CN112051251A - Gas circuit control system of atomic fluorescence spectrometer - Google Patents
Gas circuit control system of atomic fluorescence spectrometer Download PDFInfo
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- CN112051251A CN112051251A CN202010943339.0A CN202010943339A CN112051251A CN 112051251 A CN112051251 A CN 112051251A CN 202010943339 A CN202010943339 A CN 202010943339A CN 112051251 A CN112051251 A CN 112051251A
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- 239000007789 gas Substances 0.000 claims abstract description 221
- 239000012159 carrier gas Substances 0.000 claims abstract description 80
- 239000000872 buffer Substances 0.000 claims abstract description 29
- 230000001105 regulatory effect Effects 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 17
- 238000004891 communication Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 8
- 230000003139 buffering effect Effects 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 description 9
- 150000004678 hydrides Chemical class 0.000 description 8
- 238000000034 method Methods 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6402—Atomic fluorescence; Laser induced fluorescence
- G01N21/6404—Atomic fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- Health & Medical Sciences (AREA)
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- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Optics & Photonics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The invention relates to a gas circuit control system of an atomic fluorescence spectrometer, which is characterized in that: the invention is characterized in that an electric control board is arranged on a double-way integrated valve island, a gas source cylinder is arranged in the double-way integrated valve island, the gas source cylinder is respectively communicated with a gas source inlet and a gas source pressure sensor in a sealing way, a carrier gas buffer flow passage and an auxiliary gas buffer flow passage are arranged on the gas source cylinder, the carrier gas buffer flow passage is communicated with a carrier gas mass flow sensor, the carrier gas mass flow sensor is communicated with a carrier gas proportion regulating valve, the carrier gas mass flow sensor is communicated with a carrier gas outlet, the auxiliary gas buffer flow passage is communicated with an auxiliary gas mass flow sensor, the auxiliary gas mass flow sensor is communicated with an auxiliary gas proportion regulating valve, the auxiliary gas proportion regulating valve is communicated with an auxiliary gas outlet cylinder, and the auxiliary gas outlet cylinder is respectively communicated with an auxiliary gas outlet pressure sensor and an auxiliary gas outlet, ensuring the stable flow of the carrier gas and the auxiliary gas.
Description
Technical Field
The invention relates to a gas circuit control system of an atomic fluorescence spectrometer.
Background
The on-line hydride generation reaction is the main research method applied to atomic fluorescence at present, the main process is that the hydride gas of the element to be detected is generated in a reaction pipeline after the acid solution of the element to be detected is mixed with a reducing agent, after gas-liquid separation, the carrier gas carries the hydride gas into an atomization chamber to be atomized and detected, and simultaneously the waste liquid is discharged from the pipeline. At present, the control of the carrier gas of the atomic fluorescence spectrometer mainly adopts two modes of an array type differential pressure flowmeter and a mass flowmeter, wherein the mass flowmeter is generally applied to high-end atomic fluorescence spectrometers due to the advantages of accurate flow and small influence of pressure fluctuation. In order to stabilize the flow of the hydride gas, the reaction efficiency of the on-line reaction is ensured by introducing one path of auxiliary gas into the reaction pipeline to balance the pressure of the reaction pipeline, so that the purpose of stabilizing the flow of the hydride gas is achieved. However, in the present stage, both the array type differential pressure flow meter and the mass flow meter belong to flow controllers, and the pressure of the outlet pipeline cannot be effectively adjusted through flow regulation. Particularly, when the pressure fluctuation of the outlet pipeline is large, the flow control of the mass flowmeter is not influenced by the pressure fluctuation, and the pressure fluctuation of the outlet pipeline can be amplified. Especially, when the pressure of the auxiliary gas outlet is greater than the pressure of the gas source, the risk of the acidic liquid flowing back to the gas circuit system is generated, in the common design, the mode of arranging the one-way valve in the auxiliary gas output pipeline is mostly adopted to prevent the wind, but the one-way valve can have the risk of aging failure after contacting the acidic complex matrix for a long time, and the one-way valve is generally attached with larger gas resistance, so that the flow regulation process of the auxiliary gas is seriously lagged, and when the pressure rapidly fluctuates, the risk of maladjustment of the PID algorithm of the mass flow meter is generated.
Disclosure of Invention
The invention provides a gas path control system of an atomic fluorescence spectrometer, which ensures the stable flow of carrier gas and auxiliary gas in the on-line reaction process of atomic fluorescence hydride.
In order to achieve the purpose, the invention adopts the technical scheme that:
1. the utility model provides an atomic fluorescence spectrometer's gas circuit control system which characterized in that: an electric control board is arranged on the double-path integrated valve island, an air source cylinder is arranged in the double-path integrated valve island, the air source cylinder is respectively communicated with an air source inlet and an air source pressure sensor in a sealing mode, a carrier gas buffer flow passage and an auxiliary gas buffer flow passage are arranged on the air source cylinder, the outlet end of the carrier gas buffer flow passage is communicated with the inlet end of a carrier gas mass flow sensor in a sealing mode, the outlet end of the carrier gas mass flow sensor is communicated with the inlet end of a carrier gas proportion adjusting valve in a sealing mode through a first carrier gas communicating pipe, and the outlet end of the carrier gas proportion adjusting valve is communicated with;
the outlet end of the auxiliary gas buffer flow passage is hermetically communicated with the inlet end of an auxiliary gas mass flow sensor, the outlet end of the auxiliary gas mass flow sensor is hermetically communicated with the inlet end of an auxiliary gas proportion regulating valve through a first auxiliary gas communicating pipe, the outlet end of the auxiliary gas proportion regulating valve is hermetically communicated with an auxiliary gas outlet cylinder through a second auxiliary gas communicating pipe, and the auxiliary gas outlet cylinder is hermetically communicated with an auxiliary gas outlet pressure sensor and an auxiliary gas outlet respectively;
the gas source pressure sensor and the auxiliary gas outlet pressure sensor are respectively in signal communication with the electric appliance control panel, the carrier gas mass flow sensor and the auxiliary gas mass flow sensor are in signal communication with the electric appliance control panel, and the electric appliance control panel respectively controls the opening and closing degree of the carrier gas proportion regulating valve and the auxiliary gas proportion regulating valve through signals.
The gas circuit control system of atomic fluorescence spectrometer, wherein: the gas source inlet is communicated with the gas steel cylinder in a sealing mode, and gas is buffered by the gas source cylinder and then is used as carrier gas and auxiliary gas for supplying gas.
The gas circuit control system of atomic fluorescence spectrometer, wherein: the caliber of the carrier gas buffer flow passage is contracted from large to small, and the pipeline is arc-shaped and is used for buffering gas turbulence.
The gas circuit control system of atomic fluorescence spectrometer, wherein: the caliber of the auxiliary gas buffer flow channel is contracted from large to small, and the pipeline is arc-shaped and is used for buffering gas turbulence.
The gas circuit control system of atomic fluorescence spectrometer, wherein: the gas source pressure sensor converts gas pressure into a voltage signal and transmits the voltage signal to the electric appliance control panel, and an air shortage alarm signal is formed.
The gas circuit control system of atomic fluorescence spectrometer, wherein: the carrier gas mass flow sensor converts gas flow into a voltage signal and transmits the voltage signal to the electric appliance control panel, and the electric appliance control panel controls the opening and closing degree of the carrier gas proportion regulating valve through signal feedback.
The gas circuit control system of atomic fluorescence spectrometer, wherein: the auxiliary gas mass flow sensor converts gas flow into a voltage signal and transmits the voltage signal to the electric appliance control panel to form a first feedback control signal, the auxiliary gas outlet pressure sensor converts gas pressure into a voltage signal and transmits the voltage signal to the electric appliance control panel, the auxiliary gas outlet pressure sensor and the voltage signal of the gas source pressure sensor generate a differential pressure control signal to jointly form a second feedback control signal, and the electric appliance control panel jointly controls the opening degree of the auxiliary gas proportional control valve in a feedback mode through the first feedback control signal and the second feedback control signal.
The gas circuit control system of atomic fluorescence spectrometer, wherein: the carrier gas outlet is communicated with the gas-liquid separator in a sealing mode, and the auxiliary gas outlet is communicated with the four-way mixing module in a sealing mode.
The invention has the beneficial effects that: the invention realizes double accurate control of the gas flow of the auxiliary gas path flow path and the output pipeline pressure under the condition that the auxiliary gas outlet pressure has severe fluctuation, and ensures the stable flow of the carrier gas and the auxiliary gas in the on-line reaction process of the atomic fluorescent hydride.
Drawings
Fig. 1 is a three-dimensional structure diagram of a gas path control system of an atomic fluorescence spectrometer.
FIG. 2 is a top view of the gas path control system of the atomic fluorescence spectrometer.
FIG. 3 is a perspective view of the gas path control system of the atomic fluorescence spectrometer.
Description of reference numerals: 1-two-way integrated valve terminal; 2-gas source pressure sensor; 3-carrier gas mass flow sensor; 4-carrier gas proportion regulating valve; 5-auxiliary gas mass flow sensor; 6-auxiliary gas proportion regulating valve; 7-auxiliary gas outlet pressure sensor; 8-an electrical control board; 9-gas source inlet; 10-an air source cylinder; 11-carrier gas buffer flow channel; 12-a first carrier gas communicating tube; 13-second carrier gas communicating tube; 14-carrier gas outlet; 15-auxiliary gas buffer flow channel; 16-a first auxiliary gas communicating tube; 17-a second auxiliary gas communicating tube; 18-auxiliary gas outlet cylinder; 19-auxiliary gas outlet.
Detailed Description
As shown in fig. 1 to 3, the gas path control system of the atomic fluorescence spectrometer is characterized in that: an electric control board 8 is arranged on the two-way integrated valve island 1, an air source cylinder 10 is arranged in the two-way integrated valve island 1, the air source cylinder 10 is respectively communicated with an air source inlet 9 and an air source pressure sensor 2 in a sealing manner, a carrier gas buffer flow passage 11 and an auxiliary gas buffer flow passage 15 are arranged on the air source cylinder 10, the outlet end of the carrier gas buffer flow passage 11 is communicated with the inlet end of a carrier gas mass flow sensor 3 in a sealing manner, the outlet end of the carrier gas mass flow sensor 3 is communicated with the inlet end of a carrier gas proportion regulating valve 4 in a sealing manner through a first carrier gas communicating pipe 12, and the outlet end of the carrier gas proportion regulating valve 4 is communicated with a carrier;
the outlet end of the auxiliary gas buffer flow passage 15 is in sealed communication with the inlet end of an auxiliary gas mass flow sensor 5, the outlet end of the auxiliary gas mass flow sensor 5 is in sealed communication with the inlet end of an auxiliary gas proportion regulating valve 6 through a first auxiliary gas communicating pipe 16, the outlet end of the auxiliary gas proportion regulating valve 6 is in sealed communication with an auxiliary gas outlet cylinder 18 through a second auxiliary gas communicating pipe 17, and the auxiliary gas outlet cylinder 18 is respectively in sealed communication with an auxiliary gas outlet pressure sensor 7 and an auxiliary gas outlet 19;
the gas source pressure sensor 2 and the auxiliary gas outlet pressure sensor 7 are respectively in signal communication with the electric appliance control board 8, the carrier gas mass flow sensor 3 and the auxiliary gas mass flow sensor 5 are in signal communication with the electric appliance control board 8, and the electric appliance control board 8 respectively controls the opening degree of the carrier gas proportion regulating valve 4 and the opening degree of the auxiliary gas proportion regulating valve 6 through signals.
The gas source inlet 9 is communicated with the gas steel cylinder in a sealing way, and gas is buffered by the gas source cylinder 10 and then is used as carrier gas and auxiliary gas for supplying gas.
The caliber of the carrier gas buffer flow channel 11 is contracted from large to small, and the pipeline is arc-shaped and is used for buffering gas turbulence.
The caliber of the auxiliary gas buffer flow channel 15 is contracted from large to small, and the pipeline is arc-shaped and is used for buffering gas turbulence.
The gas source pressure sensor 2 converts gas pressure into a voltage signal and transmits the voltage signal to the electric appliance control panel 8, and an air shortage alarm signal is formed.
The carrier gas mass flow sensor 3 converts gas flow into a voltage signal and transmits the voltage signal to the electric appliance control panel 8, and the electric appliance control panel 8 controls the opening and closing degree of the carrier gas proportion regulating valve 4 through signal feedback.
The auxiliary gas mass flow sensor 5 converts gas flow into a voltage signal and transmits the voltage signal to the electrical appliance control board 8 to form a first feedback control signal, the auxiliary gas outlet pressure sensor 7 converts gas pressure into a voltage signal and transmits the voltage signal to the electrical appliance control board 8, a differential pressure control signal is generated between the differential pressure control signal and the voltage signal of the gas source pressure sensor 2 to form a second feedback control signal together, and the electrical appliance control board 8 controls the opening and closing degree of the auxiliary gas proportional control valve 6 together in a feedback mode through the first feedback control signal and the second feedback control signal.
The carrier gas outlet 14 is in sealed communication with the gas-liquid separator, and the auxiliary gas outlet 19 is in sealed communication with the four-way mixing module.
In the embodiment, the air source cylinder 10 is arranged in the two-way integrated valve island 1, the air source cylinder 10 is respectively communicated with the air source inlet 9 and the air source pressure sensor 2 in a sealing way, the gas source inlet 9 is hermetically communicated with the gas steel cylinder through a pipeline, the gas source pressure sensor 2 senses that no pressure exists in the gas source cylinder 10 and transmits a voltage signal to the electric appliance control board 8 as a gas shortage alarm signal, at the moment, the gas cylinder may be opened, gas may be input into the gas source cylinder 10 through the gas source inlet 9, the air source cylinder 10 effectively buffers turbulence generated by the air source inlet 9 in a large flow state (the total output of carrier gas and auxiliary gas is more than 1000mL/min), so that the air source pressure sensor 2 can not be influenced by pressure fluctuation generated by the turbulence and stably and accurately output a voltage signal of the air source pressure.
After the gas in the gas source cylinder 10 passes through the carrier gas buffer flow channel 11 to eliminate turbulence, the gas enters the carrier gas mass flow sensor 3, the gas enters the carrier gas proportion adjusting valve 4 through the first carrier gas communicating pipe 12, the gas enters the carrier gas outlet 14 through the second carrier gas communicating pipe 13 and enters the gas-liquid separator, the carrier gas mass flow sensor 3 converts the gas flow into a voltage signal to be transmitted to the electric appliance control panel 8, the electric appliance control panel 8 controls the opening degree of the carrier gas proportion adjusting valve 4 through PID algorithm feedback, further accurately controls the carrier gas flow to a preset value, and controls the range to be 0-1500mL/min, the inner diameter of the carrier gas buffer flow channel 11 is in a horn mouth shape from large to small, the shape of the whole pipeline is arc, and the gas turbulence entering the carrier gas mass flow sensor 3 under the large flow state (the carrier gas output is more than 700mL/min) is effectively buffered, wherein the carrier gas turbulence Therefore, the carrier gas mass flow sensor 3 can not be influenced by pressure fluctuation generated by turbulence, and can stably and accurately output a voltage signal of carrier gas flow.
The gas in the gas source cylinder 10 enters the auxiliary gas mass flow sensor 5 after turbulence is eliminated through the auxiliary gas buffer flow channel 15, the gas enters the auxiliary gas proportional control valve 6 through the first auxiliary gas communicating pipe 16, the gas enters the auxiliary gas outlet cylinder 18 through the second auxiliary gas communicating pipe 17, the auxiliary gas outlet cylinder 18 is respectively communicated with the auxiliary gas outlet pressure sensor 7 and the auxiliary gas outlet 19 in a sealing manner, the gas enters the four-way mixing module through the auxiliary gas outlet 19, the auxiliary gas mass flow sensor 5 converts the gas flow into a voltage signal and transmits the voltage signal to the electrical appliance control board 8, the electrical appliance control board 8 forms a first feedback control signal through a PID algorithm, the auxiliary gas outlet pressure sensor 7 converts the gas pressure into a voltage signal and the signal of the gas source pressure sensor 2 generates a differential pressure control signal, the electric appliance control board 8 controls the opening degree of the auxiliary gas proportion adjusting valve 6 in a feedback mode through the first feedback control signal and the second feedback control signal, further accurately controls the flow rate of the auxiliary gas to a preset value, the control range is from 0-1500mL/min, the pressure fluctuation is balanced by adjusting the flow rate during the pressure fluctuation, the auxiliary gas proportion adjusting valve 6 is automatically closed to protect a gas circuit control system and give an alarm when the outlet pressure is higher than the inlet pressure through a differential pressure control signal to generate the risk of liquid backflow, the inner diameter of the auxiliary gas buffer flow channel 15 is contracted from a large bell mouth shape, the shape of the whole pipeline is arc-shaped, and the gas turbulence entering the auxiliary gas mass flow sensor 5 under the large-flow state (the output of carrier gas is higher than 700mL/min) is effectively buffered, the auxiliary gas mass flow sensor 5 can not be influenced by pressure fluctuation generated by turbulent flow, and can stably and accurately output the carrier gas flow.
The invention has the advantages that:
the invention realizes double accurate control of the gas flow of the auxiliary gas path flow path and the output pipeline pressure under the condition that the auxiliary gas outlet pressure has severe fluctuation, and ensures the stable flow of the carrier gas and the auxiliary gas in the on-line reaction process of the atomic fluorescent hydride.
The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (8)
1. The utility model provides an atomic fluorescence spectrometer's gas circuit control system which characterized in that: an electric control board (8) is arranged on the double-way integrated valve island (1), an air source cylinder (10) is arranged in the double-way integrated valve island (1), the air source cylinder (10) is respectively communicated with an air source inlet (9) and an air source pressure sensor (2) in a sealing manner, a carrier gas buffer flow passage (11) and an auxiliary gas buffer flow passage (15) are arranged on the air source cylinder (10), the outlet end of the carrier gas buffer flow passage (11) is communicated with the inlet end of a carrier gas mass flow sensor (3) in a sealing manner, the outlet end of the carrier gas mass flow sensor (3) is communicated with the inlet end of a carrier gas proportion adjusting valve (4) in a sealing manner through a first carrier gas communicating pipe (12), and the outlet end of the carrier gas proportion adjusting valve (4) is communicated with a carrier gas outlet (14);
the outlet end of the auxiliary gas buffer flow passage (15) is in sealed communication with the inlet end of an auxiliary gas mass flow sensor (5), the outlet end of the auxiliary gas mass flow sensor (5) is in sealed communication with the inlet end of an auxiliary gas proportion regulating valve (6) through a first auxiliary gas communicating pipe (16), the outlet end of the auxiliary gas proportion regulating valve (6) is in sealed communication with an auxiliary gas outlet cylinder (18) through a second auxiliary gas communicating pipe (17), and the auxiliary gas outlet cylinder (18) is respectively in sealed communication with an auxiliary gas outlet pressure sensor (7) and an auxiliary gas outlet (19);
the gas source pressure sensor (2) and the auxiliary gas outlet pressure sensor (7) are respectively in signal communication with the electric appliance control panel (8), the carrier gas mass flow sensor (3) and the auxiliary gas mass flow sensor (5) are in signal communication with the electric appliance control panel (8), and the electric appliance control panel (8) respectively controls the opening and closing degrees of the carrier gas proportion regulating valve (4) and the auxiliary gas proportion regulating valve (6) through signals.
2. The gas path control system of the atomic fluorescence spectrometer as claimed in claim 1, wherein: the gas source inlet (9) is communicated with the gas steel cylinder in a sealing way, and gas is buffered by the gas source cylinder (10) and then is used as carrier gas and auxiliary gas for supplying gas.
3. The gas path control system of the atomic fluorescence spectrometer as claimed in claim 1, wherein: the caliber of the carrier gas buffer flow channel (11) is contracted from large to small, and the pipeline is arc-shaped and is used for buffering gas turbulence.
4. The gas path control system of the atomic fluorescence spectrometer as claimed in claim 1, wherein: the caliber of the auxiliary gas buffer flow channel (15) is contracted from large to small, and the pipeline is arc-shaped and is used for buffering gas turbulence.
5. The gas path control system of the atomic fluorescence spectrometer as claimed in claim 1, wherein: the gas source pressure sensor (2) converts gas pressure into a voltage signal and transmits the voltage signal to the electric appliance control panel (8) to form an air shortage alarm signal.
6. The gas path control system of the atomic fluorescence spectrometer as claimed in claim 1, wherein: the carrier gas mass flow sensor (3) converts gas flow into a voltage signal and transmits the voltage signal to the electric appliance control panel (8), and the electric appliance control panel (8) controls the opening and closing degree of the carrier gas proportion regulating valve (4) through signal feedback.
7. The gas path control system of the atomic fluorescence spectrometer as claimed in claim 1, wherein: the auxiliary gas mass flow sensor (5) converts gas flow into a voltage signal and transmits the voltage signal to the electric appliance control panel (8) to form a first feedback control signal, the auxiliary gas outlet pressure sensor (7) converts gas pressure into a voltage signal and transmits the voltage signal to the electric appliance control panel (8), a differential pressure control signal is generated between the differential pressure control signal and the voltage signal of the gas source pressure sensor (2) to form a second feedback control signal together, and the electric appliance control panel (8) performs feedback control on the opening degree of the auxiliary gas proportional control valve (6) together through the first feedback control signal and the second feedback control signal.
8. The gas path control system of the atomic fluorescence spectrometer as claimed in claim 1, wherein: the carrier gas outlet (14) is in sealed communication with the gas-liquid separator, and the auxiliary gas outlet (19) is in sealed communication with the four-way mixing module.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010943339.0A CN112051251B (en) | 2020-09-09 | 2020-09-09 | Gas circuit control system of atomic fluorescence spectrometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010943339.0A CN112051251B (en) | 2020-09-09 | 2020-09-09 | Gas circuit control system of atomic fluorescence spectrometer |
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| CN112051251A true CN112051251A (en) | 2020-12-08 |
| CN112051251B CN112051251B (en) | 2024-02-09 |
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| JP2009236850A (en) * | 2008-03-28 | 2009-10-15 | Advance Denki Kogyo Kk | Ultrasonic flowmeter |
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| CN108679448A (en) * | 2018-06-02 | 2018-10-19 | 哈尔滨工业大学 | Microfluid flow on-line control device and detection method |
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-
2020
- 2020-09-09 CN CN202010943339.0A patent/CN112051251B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009236850A (en) * | 2008-03-28 | 2009-10-15 | Advance Denki Kogyo Kk | Ultrasonic flowmeter |
| US20140293732A1 (en) * | 2013-03-29 | 2014-10-02 | Horiba, Ltd. | Exhaust gas mixer and constant volume sampling apparatus |
| CN203397223U (en) * | 2013-07-26 | 2014-01-15 | 北京瑞利分析仪器有限公司 | Intelligent-type gas flow control system for analytical instrument |
| US20170190013A1 (en) * | 2016-01-05 | 2017-07-06 | Super Master Developing Co., Ltd. | Pneumatic tool |
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