CN112030099B - Uniform coating equipment for part processing and use method thereof - Google Patents
Uniform coating equipment for part processing and use method thereof Download PDFInfo
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- CN112030099B CN112030099B CN202010835383.XA CN202010835383A CN112030099B CN 112030099 B CN112030099 B CN 112030099B CN 202010835383 A CN202010835383 A CN 202010835383A CN 112030099 B CN112030099 B CN 112030099B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses uniform coating equipment for processing parts and a use method thereof, relates to the technical field of part processing, and aims to solve the problem that the surface of a part after coating is uneven because the existing coating equipment for processing parts cannot perform uniform coating processing on the part in the use process. The upper end of coating film processing platform is provided with the vacuum coating cavity, one side of coating film processing platform is provided with the preliminary treatment platform, the inside of preliminary treatment platform is provided with the power supply box and receives the work or material rest, the upper end of receiving the work or material rest is provided with the base plate of polishing, the upper end of polishing the base plate is provided with the polisher, the inside of polishing the base plate is provided with detection frame, and detection frame and polishing base plate integrated into one piece set up, detection frame's inside is provided with puts the recess, and puts recess and detection frame integrated into one piece and set up, the top of putting the recess is provided with the activity pick-up plate.
Description
Technical Field
The invention relates to the technical field of part processing, in particular to uniform coating equipment for part processing and a using method thereof.
Background
The component processing belongs to a component processing factory, and is a general term of an industrial department which provides machine-made components, wherein the component processing manufacturer is mainly used for processing raw materials such as mining products and agricultural products, or reprocessing and repairing products in the processing industry, or assembling components. Generally, the parts are subjected to film coating operation in the processing process, and the film coating is mainly used for reducing reflection. In order to improve the light transmittance of the lens and the quality of images, the lens is coated in modern lens manufacturing processes. The lens is coated with a layer of substance with a thickness of a quarter wavelength on the surface of the lens according to the optical interference principle, so that the reflection of the lens to the colored light with the wavelength is reduced to the minimum. It is clear that one film only works for one color of light, while multiple films can work for multiple colors of light.
The existing coating equipment for processing the parts cannot carry out uniform coating processing on the parts in the using process, so that the surface of the coated parts is uneven, and the finished product degree of the parts is influenced.
Disclosure of Invention
The invention aims to provide uniform coating equipment for processing parts and a using method thereof, and aims to solve the problem that the surface of the part after coating is uneven because the part cannot be uniformly coated by the conventional coating equipment for processing the part in the background technology in the using process.
In order to achieve the purpose, the invention provides the following technical scheme: the uniform coating equipment for processing the parts comprises a coating processing table, wherein a vacuum coating cavity is arranged at the upper end of the coating processing table, a pretreatment table is arranged on one side of the coating processing table, a power supply box and a material receiving frame are arranged inside the pretreatment table, a polishing substrate is arranged at the upper end of the material receiving frame, and a polishing machine is arranged at the upper end of the polishing substrate.
Preferably, the inside of the polishing substrate is provided with a detection frame, the detection frame and the polishing substrate are integrally formed, a placing groove is formed in the detection frame, the placing groove and the detection frame are integrally formed, a movable detection plate is arranged above the placing groove, sealing baffles are arranged on the outer walls of the two ends of the movable detection plate, and the sealing baffles are tightly attached to the inner wall of the detection frame.
Preferably, all be provided with the locating track on the both sides inner wall of testing frame, and locating track and testing frame integrated into one piece set up, the both ends of activity detection board all are provided with bears the inside groove, and bear the inside groove and set up with activity detection board integrated into one piece, the upper end of activity detection board is provided with the push pedal, and push pedal and activity detection board integrated into one piece set up.
Preferably, the inside of bearing the weight of the inside groove is provided with the transmission gyro wheel, and the transmission gyro wheel rolls with the inner wall of positioning rail and is connected, the both ends of transmission gyro wheel all are provided with the connecting axle, and the connecting axle sets up with transmission gyro wheel integrated into one piece.
Preferably, bearing fixing grooves are formed in the inner walls of the two sides of the bearing inner groove, the bearing fixing grooves and the bearing inner groove are integrally formed, a bearing is arranged inside each bearing fixing groove, and the connecting shaft is movably connected with the bearing inner groove through the bearing.
Preferably, two negative electrode plates are arranged inside the vacuum coating cavity, a coating target is arranged between the two negative electrode plates, an emission electrode is arranged at the upper end of the coating target, and a cooling water circulation mechanism is arranged at the upper end of the emission electrode.
Preferably, an anode electrode plate is arranged right below the coating target, the cathode electrode plate and the anode electrode plate are both arranged inside the vacuum coating cavity, a part substrate is arranged at the upper end of the anode electrode plate, and the part substrate is arranged right below the coating target.
Preferably, an airtight front cover is arranged on the front end face of the vacuum coating cavity and movably connected with the vacuum coating cavity through a hinge, a vacuum pump set is arranged at the upper end of the vacuum coating cavity, and the air exhaust end of the vacuum pump set is communicated with the inside of the vacuum coating cavity.
Preferably, receive the inside of work or material rest and be provided with two reinforcing baffle, and two reinforcing baffle and receive work or material rest integrated into one piece setting, be provided with four finished products between two reinforcing baffle and put the platform, and four finished products put the both ends of platform and all with reinforcing baffle's inner wall welded connection.
Preferably, the uniform coating equipment for processing the parts and the use method thereof comprise the following steps:
the method comprises the following steps: placing a part substrate to be subjected to film coating processing into a placing groove in a polishing substrate, wherein the caliber of the placing groove is the standard size of the part substrate, and performing qualified detection on the size of the part substrate through the placing groove;
the method comprises the following steps: the movable detection plate is moved to the upper end of a placing groove in which the part substrate is placed by pushing the push plate, and whether the integral structure of the part substrate is uniform and meets the standard or not is judged according to whether the part substrate can be placed in the placing groove and the movable detection plate is completely covered;
the method comprises the following steps: when the movable detection plate moves in the detection frame, the transmission rollers in the inner grooves carried by the two ends of the movable detection plate roll in the positioning tracks, so that the friction force of the movable detection plate during moving is reduced, and the smoothness of detection operation is improved;
the method comprises the following steps: if the part substrate cannot be placed in the placing groove and cannot completely cover the movable detection plate, the part substrate is unqualified in uniformity, and needs to be placed on a polishing substrate to be polished by a polisher until the part substrate can be completely placed in the placing groove and completely cover the movable detection plate;
the method comprises the following steps: after the part substrate is processed to be qualified, putting the part substrate into a vacuum coating cavity, covering a closed front cover to start coating processing, vacuumizing the interior of the vacuum coating cavity by a vacuum pump group, evaporating surface components in a radical or ion form by an emission electrode by using an electronic coating target material, and sputtering the surface components in the radical or ion form;
the method comprises the following steps: under the action of the negative electrode plate and the positive electrode plate, atomic groups or ions flow from the negative electrode to the positive electrode and are finally deposited on the surface of the component substrate, and a film is finally formed after the film forming process, and the atomic groups or ions deposited on the surface of the component substrate can be uniformly attached to form a film because the surface of the component substrate is polished to be smooth and uniform;
the method comprises the following steps: and placing the finished product of the part substrate after coating on a finished product placing platform in the material receiving frame so as to collect and place the finished product and complete the use work of the uniform coating equipment for processing the part.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention moves the movable detection plate to the upper end of the placing groove with the part substrate by pushing the push plate, judges whether the integral structure of the part substrate is symmetrical and meets the standard according to whether the part substrate can be placed in the placing groove and completely covers the movable detection plate, if the part substrate cannot be placed in the placing groove and cannot be completely covered by the movable detection plate, the part substrate needs to be placed on a polishing substrate to be polished by a polisher, and because the surface of the part substrate is polished to be smooth and symmetrical, atomic groups or ions deposited on the surface of the part substrate can be uniformly adhered to form a film, thereby overcoming the problem that the surface of the part after film coating cannot be uniformly coated by the existing film coating equipment for processing the part in the using process, and the surface of the part is uneven.
2. When the movable detection plate moves in the detection frame, the two ends of the movable detection plate bear the driving rollers in the inner grooves to move in the positioning tracks in a rolling mode, so that the friction force of the movable detection plate during moving is reduced, and the smoothness of detection operation is improved.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the internal structure of the vacuum coating chamber of the present invention;
FIG. 3 is a schematic diagram of a polished substrate structure according to the present invention;
FIG. 4 is a schematic view of the connection structure of the inspection frame of the present invention;
FIG. 5 is an enlarged view of part A of the present invention;
FIG. 6 is a schematic view of the material receiving rack of the present invention;
in the figure: 1. a coating processing table; 2. a vacuum coating cavity; 3. sealing the front cover; 4. a vacuum pump set; 5. a pretreatment stage; 6. a power supply box; 7. a material receiving frame; 8. polishing the substrate; 9. a sander; 10. coating a film on the target material; 11. a negative electrode plate; 12. an emitter electrode; 13. a cooling water circulation mechanism; 14. a component substrate; 15. a positive electrode plate; 16. a detection frame; 17. placing a groove; 18. a movable detection plate; 19. pushing the plate; 20. sealing the baffle; 21. positioning the track; 22. a transmission roller; 23. carrying the inner groove; 24. a connecting shaft; 25. a bearing; 26. a bearing fixing groove; 27. reinforcing the baffle; 28. and (5) a finished product placing platform.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-6, an embodiment of the present invention is shown: the uniform coating equipment for processing the parts comprises a coating processing table 1, wherein a vacuum coating cavity 2 is arranged at the upper end of the coating processing table 1, a pretreatment table 5 is arranged on one side of the coating processing table 1, a power supply box 6 and a material receiving frame 7 are arranged inside the pretreatment table 5, a polishing substrate 8 is arranged at the upper end of the material receiving frame 7, and a polisher 9 is arranged at the upper end of the polishing substrate 8.
Further, the inside of polishing base plate 8 is provided with detecting frame 16, and detecting frame 16 sets up with polishing base plate 8 integrated into one piece, detecting frame 16's inside is provided with puts recess 17, and put recess 17 and detecting frame 16 integrated into one piece and set up, the top of putting recess 17 is provided with movable detection board 18, all be provided with seal baffle 20 on movable detection board 18's the both ends outer wall, and seal baffle 20 closely laminates with detecting frame 16's inner wall, the detecting frame 16 of polishing base plate 8's inside setting plays the effect of bearing and putting recess 17 and movable detection board 18.
Further, all be provided with location track 21 on the both sides inner wall of detecting frame 16, and location track 21 and detecting frame 16 integrated into one piece set up, the both ends of activity detecting plate 18 all are provided with bear inside groove 23, and bear inside groove 23 and activity detecting plate 18 integrated into one piece set up, the upper end of activity detecting plate 18 is provided with push pedal 19, and push pedal 19 and activity detecting plate 18 integrated into one piece set up, the location track 21 that all sets up on the both sides inner wall of detecting frame 16 plays the effect of being convenient for drive roller 22 roll connection with it.
Further, a transmission roller 22 is arranged inside the bearing inner groove 23, the transmission roller 22 is in rolling connection with the inner wall of the positioning rail 21, connecting shafts 24 are arranged at two ends of the transmission roller 22, the connecting shafts 24 and the transmission roller 22 are integrally formed, and the transmission roller 22 arranged inside the bearing inner groove 23 plays a role in changing sliding friction of the movable detection plate 18 into rolling friction.
Further, bearing fixing grooves 26 are formed in inner walls of both sides of the inner bearing groove 23, the bearing fixing grooves 26 are integrally formed with the inner bearing groove 23, a bearing 25 is disposed inside the bearing fixing groove 26, the connecting shaft 24 is movably connected to the inner bearing groove 23 through the bearing 25, and the bearing fixing grooves 26 formed in the inner walls of both sides of the inner bearing groove 23 serve as the bearing 25.
Further, two negative electrode plates 11 are arranged inside the vacuum coating cavity 2, a coating target 10 is arranged between the two negative electrode plates 11, an emitting electrode 12 is arranged at the upper end of the coating target 10, a cooling water circulation mechanism 13 is arranged at the upper end of the emitting electrode 12, and the two negative electrode plates 11 arranged inside the vacuum coating cavity 2 play a role in facilitating the flow of radicals or ions to the position of the positive electrode plate 15.
Further, a positive electrode plate 15 is arranged right below the coating target 10, the negative electrode plate 11 and the positive electrode plate 15 are both arranged inside the vacuum coating cavity 2, a component substrate 14 is arranged at the upper end of the positive electrode plate 15, the component substrate 14 is arranged right below the coating target 10, and the positive electrode plate 15 arranged right below the coating target 10 plays a role in facilitating attachment of radicals or ions on the surface of the component substrate 14.
Further, an airtight front cover 3 is arranged on the front end face of the vacuum coating cavity 2, the airtight front cover 3 is movably connected with the vacuum coating cavity 2 through a hinge, a vacuum pump unit 4 is arranged at the upper end of the vacuum coating cavity 2, the air exhaust end of the vacuum pump unit 4 is communicated with the inside of the vacuum coating cavity 2, and the airtight front cover 3 arranged on the front end face of the vacuum coating cavity 2 plays a role in closing the vacuum coating cavity 2.
Further, receive the inside of material frame 7 and be provided with two reinforcing baffle 27, and two reinforcing baffle 27 and receive material frame 7 integrated into one piece setting, be provided with four finished products between two reinforcing baffle 27 and put platform 28, and four finished products put the both ends of platform 28 all with reinforcing baffle 27's inner wall welded connection, receive two reinforcing baffle 27 that the inside of material frame 7 set up and play the effect of reinforcing material frame 7 overall structure intensity.
Further, the uniform coating equipment for processing the parts and the use method thereof comprise the following steps:
step 1: placing a part substrate 14 to be subjected to film coating processing into a placing groove 17 in a polishing substrate 8, wherein the caliber of the placing groove 17 is the standard size of the part substrate 14, and performing qualified detection on the size of the part substrate 14 through the placing groove 17;
step 2: the movable detection plate 18 is moved to the upper end of the placing groove 17 where the part substrate 14 is placed by pushing the push plate 19, and whether the whole structure of the part substrate 14 is uniform and meets the standard is judged according to whether the part substrate 14 can be placed in the placing groove 17 and completely covers the movable detection plate 18;
and step 3: when the movable detection plate 18 moves in the detection frame 16, the transmission rollers 22 in the inner grooves 23 carried by the two ends of the movable detection plate 18 roll in the positioning tracks 21, so that the friction force of the movable detection plate 18 during moving is reduced, and the smoothness of detection operation is improved;
and 4, step 4: if the part substrate 14 cannot be placed in the placing groove 17 and cannot completely cover the movable detection plate 18, the part substrate 14 is unqualified in uniformity, and needs to be placed on the polishing substrate 8 to polish the part substrate 14 through the polisher 9 until the part substrate 14 can be completely placed in the placing groove 17 and completely cover the movable detection plate 18;
and 5: after the part substrate 14 is processed to be qualified, the part substrate is placed into a vacuum coating cavity 2 and covered with a sealed front cover 3 to start coating processing, a vacuum pump set 4 vacuumizes the inside of the vacuum coating cavity 2, and an emission electrode 12 utilizes an electronic coating target material 10 to evaporate surface components in a radical or ion form and sputter the surface components in a radical or ion form;
and 6: under the action of the negative electrode plate 11 and the positive electrode plate 15, the atomic groups or ions flow from the negative electrode to the positive electrode, are finally deposited on the surface of the component substrate 14, undergo a film forming process, and finally form a film, and because the surface of the component substrate 14 is polished to be smooth and uniform, the atomic groups or ions deposited on the surface of the component substrate 14 can be uniformly attached to form a film;
and 7: and placing the finished product of the coated part substrate 14 on a finished product placing platform 28 inside the material receiving frame 7, so as to collect and place the finished product, thereby completing the use work of the uniform coating equipment for processing the parts.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (6)
1. The utility model provides a spare part processing is with even coating film equipment, includes coating film processing platform (1), its characterized in that: the vacuum coating processing device is characterized in that a vacuum coating cavity (2) is arranged at the upper end of the coating processing table (1), a pretreatment table (5) is arranged at one side of the coating processing table (1), a power supply box (6) and a material receiving frame (7) are arranged inside the pretreatment table (5), a polishing substrate (8) is arranged at the upper end of the material receiving frame (7), a polisher (9) is arranged at the upper end of the polishing substrate (8), a detection frame (16) is arranged inside the polishing substrate (8), the detection frame (16) and the polishing substrate (8) are integrally formed, a placing groove (17) is arranged inside the detection frame (16), the placing groove (17) and the detection frame (16) are integrally formed, a movable detection plate (18) is arranged above the placing groove (17), sealing baffles (20) are arranged on the outer walls of two ends of the movable detection plate (18), the sealing baffles (20) and the inner walls of the detection frame (16) are tightly attached, positioning rails (21) are arranged on the inner walls of two sides of the detection frame (16), the positioning rails (21) and the detection plate (16) and the inner grooves (23) and bearing the movable detection frame (18) and bearing the inner grooves (23), the upper end of activity detecting plate (18) is provided with push pedal (19), and push pedal (19) and activity detecting plate (18) integrated into one piece set up, the inside that bears inside groove (23) is provided with drive roller (22), and drive roller (22) and positioning rail (21) inner wall roll connection, the both ends of drive roller (22) all are provided with connecting axle (24), and connecting axle (24) and drive roller (22) integrated into one piece set up, all be provided with bearing fixed slot (26) on the both sides inner wall that bears inside groove (23), and bearing fixed slot (26) and bear inside groove (23) integrated into one piece set up, the inside of bearing fixed slot (26) is provided with bearing (25), and connecting axle (24) pass through bearing (25) and bear inside groove (23) swing joint.
2. The uniform coating equipment for processing the parts according to claim 1, wherein: the vacuum coating device is characterized in that two negative electrode plates (11) are arranged inside the vacuum coating cavity (2), a coating target (10) is arranged between the two negative electrode plates (11), an emitting electrode (12) is arranged at the upper end of the coating target (10), and a cooling water circulation mechanism (13) is arranged at the upper end of the emitting electrode (12).
3. The uniform coating device for processing the parts as claimed in claim 2, wherein: the vacuum coating device is characterized in that a positive electrode plate (15) is arranged under the coating target (10), the negative electrode plate (11) and the positive electrode plate (15) are arranged inside the vacuum coating cavity (2), a part substrate (14) is arranged at the upper end of the positive electrode plate (15), and the part substrate (14) is positioned under the coating target (10).
4. The uniform coating device for processing the parts as claimed in claim 3, wherein: the vacuum coating device is characterized in that an airtight front cover (3) is arranged on the front end face of the vacuum coating cavity (2), the airtight front cover (3) is movably connected with the vacuum coating cavity (2) through a hinge, a vacuum pump set (4) is arranged at the upper end of the vacuum coating cavity (2), and the air exhaust end of the vacuum pump set (4) is communicated with the inside of the vacuum coating cavity (2).
5. The apparatus of claim 4, wherein the apparatus comprises: receive the inside of work or material rest (7) and be provided with two reinforcing baffle (27), and two reinforcing baffle (27) and receive work or material rest (7) integrated into one piece setting, be provided with four finished product between two reinforcing baffle (27) and put platform (28), and the both ends of four finished product put platform (28) all with the inner wall welded connection of reinforcing baffle (27).
6. The use method of the uniform coating equipment for processing the parts according to claim 5, wherein the method comprises the following steps: the method comprises the following steps:
step 1: placing a part substrate (14) to be subjected to film coating processing into a placing groove (17) in a polishing substrate (8), wherein the caliber of the placing groove (17) is the standard size of the part substrate (14), and performing qualified detection on the size of the part substrate (14) through the placing groove (17);
step 2: the movable detection plate (18) is moved to the upper end of a placing groove (17) for placing the part substrate (14) by pushing a push plate (19), and whether the integral structure of the part substrate (14) is uniform and meets the standard is judged according to whether the part substrate (14) can be placed in the placing groove (17) and completely covers the movable detection plate (18);
and 3, step 3: when the movable detection plate (18) moves in the detection frame (16), the transmission rollers (22) in the bearing inner grooves (23) at the two ends of the movable detection plate (18) move in a rolling manner in the positioning track (21), so that the friction force when the movable detection plate (18) moves is reduced, and the detection operation fluency is improved;
and 4, step 4: if the part substrate (14) cannot be placed in the placing groove (17) and cannot completely cover the movable detection plate (18), the part substrate (14) is unqualified in uniformity, and the part substrate (14) needs to be placed on the polishing substrate (8) to be polished through the polisher (9) until the part substrate (14) can be completely placed in the placing groove (17) and completely cover the movable detection plate (18);
and 5: after being processed to be qualified, a part substrate (14) is put into a vacuum coating cavity (2) and covered with a closed front cover (3) to start coating processing, a vacuum pump set (4) vacuumizes the inside of the vacuum coating cavity (2), an emission electrode (12) utilizes an electronic coating target material (10) to evaporate surface components in a radical or ion form and enables the surface components to be sputtered out in a radical or ion form;
step 6: under the action of the negative electrode plate (11) and the positive electrode plate (15), atomic groups or ions flow from the negative electrode to the positive electrode and are finally deposited on the surface of the component substrate (14) to form a film after undergoing a film forming process, and the atomic groups or ions deposited on the surface of the component substrate (14) can be uniformly attached to form a film because the surface of the component substrate (14) is polished to be smooth and uniform;
and 7: and (3) placing the finished product of the part substrate (14) after coating on a finished product placing platform (28) in the material receiving frame (7), so that the finished product is collected and placed, and the use work of the uniform coating equipment for processing the part is completed.
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| CN202010835383.XA CN112030099B (en) | 2020-08-19 | 2020-08-19 | Uniform coating equipment for part processing and use method thereof |
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| CN202010835383.XA CN112030099B (en) | 2020-08-19 | 2020-08-19 | Uniform coating equipment for part processing and use method thereof |
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| CN112030099B true CN112030099B (en) | 2022-12-20 |
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| CN207223766U (en) * | 2017-09-11 | 2018-04-13 | 宏讯精密压铸（昆山）有限公司 | One kind surveys plain grinding block |
| CN108775854A (en) * | 2018-07-13 | 2018-11-09 | 安徽悦众车身装备有限公司 | A kind of automobile cylinder housing mould assembling surface smoothness detecting tool |
| CN210636062U (en) * | 2019-07-26 | 2020-05-29 | 赫得纳米科技（黄石）有限公司 | Horizontal coating equipment with pretreatment process |
| CN211012815U (en) * | 2019-12-31 | 2020-07-14 | 张家港万宇玻璃科技有限公司 | Vertical glass surface flatness detection mechanism |
| CN211205251U (en) * | 2020-01-03 | 2020-08-07 | 天津旺达科技发展有限公司 | Copper sheet electroplating process that conveniently adjusts uses roughness detection device |
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| CN112030099A (en) | 2020-12-04 |
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