CN112025088A - Laser beam astigmatism compensation method and laser processing system - Google Patents
Laser beam astigmatism compensation method and laser processing system Download PDFInfo
- Publication number
- CN112025088A CN112025088A CN202010783928.7A CN202010783928A CN112025088A CN 112025088 A CN112025088 A CN 112025088A CN 202010783928 A CN202010783928 A CN 202010783928A CN 112025088 A CN112025088 A CN 112025088A
- Authority
- CN
- China
- Prior art keywords
- astigmatism
- laser
- compensation device
- optical
- astigmatism compensation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The invention discloses a laser beam astigmatism compensation method and a laser processing system.A astigmatism compensation device is added in an external optical path of the laser processing system, and laser beams generate astigmatism after passing through the astigmatism compensation device; the rotating angle of the optical element in the astigmatism compensating device is adjusted, the size and the direction of the astigmatism generated by the astigmatism compensating device are changed, the astigmatism generated by the astigmatism compensating device is equal to the astigmatism of the original laser processing system in size and opposite in direction, and the astigmatism of the whole laser processing system is reversely compensated. The laser processing method can reduce astigmatism of the laser beam finally reaching the processing table-board, so that the focusing spot and the defocusing spot are both circular spots, the consistency of the scribing width and the depth in any direction during laser processing in a defocusing state is improved, the astigmatism problem of the laser beam is eliminated, the laser processing quality can be obviously improved, the processing effect is improved, the yield is improved, and the processing cost is reduced.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a laser beam astigmatism compensation method and a laser processing system.
Background
With the continuous development of laser processing technology, the application range of the laser processing technology is wider and wider, and the requirements of the corresponding laser processing technology effect on the quality of the laser beam are higher and higher. The laser beam is produced by the laser and cooperates the outer light path of design to process the sample, the common optical element of outer light path such as holophote, beam expander, beam splitting component, galvanometer, field lens, etc., laser in the transmission process, because some defects such as the surface type, coating film quality, etc. on the manufacturing process of the optical element itself or in the installation structure process can not reach the ideal state, can produce the unfavorable influence to the laser beam quality, wherein comparatively outstanding is the astigmatism problem of the laser beam.
For many laser applications, the process method is to perform defocusing processing, and the roundness of a defocusing spot has the greatest influence on indexes such as line width consistency and depth consistency during defocusing processing. Fig. 1 is a schematic diagram of astigmatism generated in laser processing and a form of a focused beam spot showing astigmatism, and if a laser beam has a significant astigmatism problem, when the laser beam is focused, although the focused beam spot is circular, the focused beam spot is a significant elliptical beam spot in an out-of-focus state, and the out-of-focus processing of a material by using such a beam spot causes inconsistency of line width and depth when scribing is performed in different directions, which seriously affects laser processing quality.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a laser beam astigmatism compensation method and a laser processing system, which can reduce the astigmatism of a laser beam finally reaching a processing table surface by adding an astigmatism compensation device in an outer optical path, increase the roundness of a defocused light spot, improve the consistency of the width and the depth of a scribing line in any direction during laser processing in a defocused state and achieve the purpose of improving the laser processing quality.
The invention is realized by the following steps: the invention discloses a laser beam astigmatism compensation method, which comprises the following steps:
an astigmatism compensation device is added in an external light path of the laser processing system, and laser beams generate astigmatism after passing through the astigmatism compensation device;
the rotating angle of the optical element in the astigmatism compensating device is adjusted, the size and the direction of the astigmatism generated by the astigmatism compensating device are changed, the astigmatism generated by the astigmatism compensating device is equal to the astigmatism of the original laser processing system in size and opposite in direction, and the astigmatism of the whole laser processing system is reversely compensated.
Further, the beam quality analyzer is used for observing the ovality of the final light spot in the defocusing state to adjust the astigmatism compensation device, when the light spot in the defocusing state is a circular light spot to the maximum extent, the rotating angle of the corresponding astigmatism compensation device is the required angle, and the compensation amount of the astigmatism compensation device is the astigmatism compensation value.
Further, an optical element in the astigmatism compensation device is driven to rotate by a stepping motor with position feedback, the light beam quality analyzer automatically measures the ellipticity of the light spot, the ellipticity data is recorded and judged by a computer, if the ellipticity data does not reach a preset ellipticity value, a rotation adjusting signal is sent to the stepping motor, the light beam quality analyzer measures and records the ellipticity data of the light spot again after the stepping motor rotates, the ellipticity data is judged again, a closed loop is formed until the light spot conforming to the preset ellipticity is finally obtained, and the rotating angle of the stepping motor is the optimal adjusting quantity of the astigmatism compensation element at the moment.
Further, the astigmatism compensation device adopts flat glass.
Further, the astigmatism compensation means employs a monolithic optical wedge.
Furthermore, the astigmatism compensation device adopts two optical wedges, the rotation angles of the two optical wedges are adjusted, and the size and the direction of astigmatism generated by the combination of the two optical wedges are changed;
the method comprises the following steps of adjusting the rotating angles of two optical wedges, and changing the size and the direction of astigmatism generated by the combination of the two optical wedges, wherein the method specifically comprises the following steps: when the first optical wedge is not moved, the angle of the second optical wedge is rotated to adjust the size of astigmatism generated by the combination of the two optical wedges, when the second optical wedge rotates to form an angle of 180 degrees with the first optical wedge, the astigmatism generated by the combination of the two optical wedges is 0, and the astigmatism compensation device does not have astigmatism.
The invention discloses a laser processing system, which comprises a laser, a galvanometer, a field lens and an astigmatism compensation device, wherein the laser is used for generating and emitting laser beams;
the galvanometer is used for receiving the laser beam and driving the reflecting mirror to swing through the motor so as to change the processing path of the laser beam;
the field lens is used for focusing the laser beam passing through the vibrating mirror to the surface of a sample to be processed for processing;
the astigmatism compensation device is positioned on a light path before focusing or after focusing and is used for generating opposite astigmatism equivalent to that of the original laser processing system and compensating astigmatism formed by a laser in the laser processing system and the whole external light path comprehensively.
Further, the laser processing system also comprises a computer, and the computer is used for controlling the laser to emit light and controlling the galvanometer motor to move according to a set processing path and process the material.
Further, the laser processing system also comprises a beam quality analyzer, the beam quality analyzer is used for observing and recording the light spot form of the laser beam finally reaching the processing table surface, the light spot form comprises a focus position and positive and negative defocusing positions, reference and feedback are made on the adjustment amount of the astigmatism adjusting device, the astigmatism adjusting device carries out rotation adjustment according to the light spot form observed by the beam quality analyzer until the light spot presents a circular shape at the focus and the positive and negative defocusing positions to the maximum extent, and the astigmatism compensating device is ensured to be adjusted in place to complete astigmatism compensation.
Furthermore, the laser processing system also comprises a reflecting mirror, and the reflecting mirror is used for changing the propagation direction of the laser beam in an external optical path so that the laser beam is transmitted according to the required direction.
Further, the astigmatism compensation device adopts flat glass.
Further, the astigmatism compensation means employs a monolithic optical wedge.
Furthermore, the astigmatism compensation device comprises two optical wedges, the size and the direction of astigmatism generated by the combination of the two optical wedges are changed by adjusting the rotating angles of the two optical wedges, when the two optical wedges are in an angle of 180 degrees, the astigmatism generated by the combination of the two optical wedges is 0, and the astigmatism compensation device does not have astigmatism.
The invention has the beneficial effects that: the astigmatism compensation device is additionally arranged in an outer light path of the laser processing system, the light spot shape and the ellipticity of a focused light spot at a focus position and a defocusing position are observed and recorded through the light beam quality analyzer, the rotating angle of an optical element in the astigmatism compensation device is adjusted, astigmatism generated by the astigmatism compensation device is equal to the astigmatism of an original laser processing system in size and opposite in direction, and the astigmatism of the whole laser processing system is reversely compensated, so that the astigmatism of a laser beam finally reaching a processing table surface can be reduced, the focused light spot and the defocusing light spot are both circular light spots, the scribing width and the depth consistency in any direction during laser processing in a defocusing state are improved, the astigmatism problem of the laser beam is eliminated, the laser processing quality can be obviously improved, the processing effect is improved, the yield is improved, and the processing cost is reduced.
Drawings
FIG. 1 is a schematic diagram of astigmatism generated during laser processing and a focused beam spot configuration exhibiting astigmatism;
FIG. 2 is a diagram of astigmatic compensation before focusing and defocusing spot simulation;
FIG. 3 is a diagram of a simulation of focused and defocused spots after astigmatism compensation;
FIG. 4 is a schematic view of astigmatism of a flat glass;
FIG. 5 is a schematic diagram of 3 types of astigmatism compensation apparatuses according to the invention;
FIG. 6 is a schematic view of a focusing-plus-astigmatism compensation apparatus according to the present invention;
FIG. 7 is a schematic view of a pre-focus plus astigmatism compensation apparatus according to the present invention;
fig. 8 is a schematic diagram of an exemplary laser processing beam path of the laser processing system of the present invention.
In the figure, 1 is a laser, 2 is a reflector, 3 is a galvanometer, 4 is a field lens, 5 is an astigmatism compensation device, 6 is a beam quality analyzer, and 7 is a computer.
Detailed Description
In order to make the implementation objects, technical solutions and advantages of the present invention clearer, the technical solutions implemented by the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Example one
The embodiment discloses a laser beam astigmatism compensation method, which comprises the following steps:
an astigmatism compensation device is added in an external light path of the laser processing system, and laser beams generate astigmatism after passing through the astigmatism compensation device;
the rotating angle of the optical element in the astigmatism compensating device is adjusted, the size and the direction of the astigmatism generated by the astigmatism compensating device are changed, the astigmatism generated by the astigmatism compensating device is equal to the astigmatism of the original laser processing system in size and opposite in direction, and the astigmatism of the whole laser processing system is reversely compensated.
The rotation angle of the optical element can be adjusted manually or automatically. In the actual debugging process, a beam quality analyzer is required to be added under a field lens, and then a computer is adopted to measure and adjust the astigmatism data of the optical path.
Further, the beam quality analyzer is used for observing the ovality of the final light spot in the defocusing state to adjust the astigmatism compensation device, when the light spot in the defocusing state is a circular light spot to the maximum extent, the rotating angle of the corresponding astigmatism compensation device is the required angle, and the compensation amount of the astigmatism compensation device is the astigmatism compensation value.
Further, an optical element in the astigmatism compensation device is driven to rotate by a stepping motor with position feedback, the light beam quality analyzer automatically measures the ellipticity of the light spot, the ellipticity data is recorded and judged by a computer, if the ellipticity data does not reach a preset ellipticity value, a rotation adjusting signal is sent to the stepping motor, the light beam quality analyzer measures and records the ellipticity data of the light spot again after the stepping motor rotates, the ellipticity data is judged again, a closed loop is formed until the light spot conforming to the preset ellipticity is finally obtained, and the rotating angle of the stepping motor is the optimal adjusting quantity of the astigmatism compensation element at the moment.
The astigmatism compensation device is an independent mechanical optical device, can be arranged at different positions and in different installation modes for different optical systems and different accumulated astigmatism sizes, flexibly adjusts compensation amount according to needs, and has wider applicability.
The present invention proposes various astigmatism compensation devices, as shown in fig. 5, the first one uses flat glass for compensation; the second uses an optical wedge for compensation; the third uses two identical wedges for compensation; the astigmatism compensation method or device is mainly characterized in that astigmatism is generated by parallel beams or convergent beams after the parallel beams or the convergent beams pass through the astigmatism compensation device, the size of the generated astigmatism can be changed by adjusting some devices in the astigmatism compensation device, so that uncertain astigmatism in an external optical path or a main optical path of laser can be compensated, the direction of the device is rotated by 90 degrees, and opposite astigmatism equivalent to the original direction astigmatism can be generated.
Further, the astigmatism compensation device comprises a flat glass; as shown in fig. 4, when the tilted flat glass is added to the optical path, the focal planes of the meridian plane and the sagittal plane are not at the same position, so as to generate an astigmatism Xts1, wherein the magnitude of the astigmatism Xts1 is related to the thickness T of the glass, the incident angle θ of the principal ray and the refractive index n of the glass;
the astigmatism value generated by the flat glass is Xts1, Xts1 is approximately equal to T, sin theta, sin (theta-Asin (sin theta)/n)/cos (Asin (sin theta)/n) is approximately equal to T/3, sin theta, and when theta is equal to 0, Xts1 is equal to 0; asin refers to an arcsine, arcsin.
Therefore, the flat glass can compensate the astigmatism of the laser light paths from Xts1 to Xts 1.
Further, the astigmatism compensation means comprises a monolithic optical wedge; the astigmatism generated by the monolithic wedge is Xts2,
Xts2≈f*(tan2α+k*sinθ)+T/3*sinθ；
wherein α is an optical wedge angle, f is a focal length of a focusing lens in a laser processing system (or focusing system), T is a thickness of the optical wedge (i.e., a thickness of the optical wedge at a chief ray incident point, in this embodiment, a thickness of a central point of the optical wedge), θ is a chief ray incident angle, k is a theoretical correction coefficient, and a value range is between 0 and 1.
The astigmatism correctable by a single wedge is in the range of-Xts 2-Xts 2, i.e. -fttan2α～f*tan2Alpha is between.
Furthermore, the astigmatism compensation device adopts two optical wedges, the rotation angles of the two optical wedges are adjusted, and the size and the direction of astigmatism generated by the combination of the two optical wedges are changed;
the method comprises the following steps of adjusting the rotating angles of two optical wedges, and changing the size and the direction of astigmatism generated by the combination of the two optical wedges, wherein the method specifically comprises the following steps: when the first optical wedge is not moved, the angle of the second optical wedge is rotated to adjust the size of astigmatism generated by the combination of the two optical wedges, when the second optical wedge rotates to form an angle of 180 degrees with the first optical wedge, the astigmatism generated by the combination of the two optical wedges is 0, and the astigmatism compensation device does not have astigmatism.
The combination of two wedges produced an astigmatism value of Xts3, with Xts3 having a maximum value of 2 xf tan2α, where α is the wedge angle, f is the focal length of the focusing lens in the laser processing system, the astigmatism generated by the combination of the wedges is between 0 and Xts3, and the correctable astigmatism ranges from-Xts 3 to Xts3, i.e., -2f tan2α～2f*tan2α。
The three astigmatism compensation technical schemes all have astigmatism, and the astigmatism can be adjusted, for example, the astigmatism of the flat glass is adjusted according to the incident angle theta, or the astigmatism direction can be adjusted by rotating the flat glass for 90 degrees; the single optical wedge can be replaced by different wedge angles, or the incidence angle can be adjusted, the astigmatism can be adjusted, or the single optical wedge can be installed by rotating 90 degrees, and the direction of the astigmatism can also be adjusted; the optical wedge combination can be changed into different optical wedge angles, or the first optical wedge is fixed and the second optical wedge is rotated, so that the size of astigmatism can be adjusted, or the first optical wedge is installed by rotating 90 degrees and the direction of astigmatism can also be adjusted.
After the parallel beams or the convergent beams pass through the astigmatism compensation device, astigmatism is generated, the size of the generated astigmatism can be changed by adjusting some devices in the astigmatism compensation device, so that the uncertain astigmatism in an external optical path or a main optical path of the laser can be compensated, the device is rotated by 90 degrees, opposite astigmatism equivalent to the astigmatism in the original direction can be generated, and the astigmatism compensation in the optical path of the laser can be completed.
The astigmatism compensation device can be arranged at any position in the outer optical path of the laser processing system, and the astigmatism of any optical element is compensated. The way in which the compensation amount is adjusted in the astigmatism compensation unit is very many and in principle the same. The astigmatism compensation device provided by the invention uses the rotating device to adjust the compensation amount, and the astigmatism is compensated by adjusting the rotating angle of the optical element in the astigmatism compensation device. The size of the astigmatism compensation amount is determined by the size of the rotation angle of the optical element in the astigmatism compensation device, the size of the rotation angle of the optical element in the astigmatism compensation device can be adjusted by observing the final ellipticity of the light spot in the defocused state through a beam quality analyzer, when the light spot in the defocused state is a circular light spot to the maximum extent, the corresponding rotation angle of the astigmatism compensation device is the required angle, at the moment, the compensation amount of the astigmatism compensation device is the astigmatism compensation value, and astigmatism in an optical system can be reduced to the maximum extent.
For a laser processing system, accumulated astigmatism of the whole outer light path is eliminated, and the best choice is to insert an astigmatism compensation device after a focusing field lens, so that a laser beam enters from one surface of the astigmatism compensation device after passing through the field lens and then exits from the other surface, and the astigmatism compensation process is completed. For a certain laser processing system, the astigmatism of the whole optical system is also determined, so that for the astigmatism compensation device which uses the rotating device to adjust the compensation amount, a certain rotating angle exists, the astigmatism of the laser beam emitted from the field lens can be compensated to the maximum extent after the laser beam enters the astigmatism compensation device with the certain rotating angle, the astigmatism of the laser beam reaching the processing table surface is reduced, the roundness of a defocused light spot is increased, and the processing quality is improved.
For the effect of the astigmatism compensation method, the applicant uses optical simulation software to simulate, and the simulation result shows that the astigmatism compensation device can well compensate astigmatism after being inserted into the astigmatism compensation device, so that the roundness of defocused light spots is improved. Fig. 2 shows the results of the focus and defocus spots without the addition of the astigmatism compensation means, and fig. 3 shows the results of the focus and defocus spots with the addition of the astigmatism compensation means.
The astigmatism compensation method of the invention can be widely applied to laser processing light paths, and as shown in fig. 6 and 7, two typical application cases can be that an astigmatism compensation device is added to a parallel light path before focusing, and an astigmatism compensation device is added after focusing.
Example two
Fig. 8 is a schematic diagram illustrating application and debugging of a common laser processing optical path, and the embodiment discloses a laser processing system, which includes a laser 1, a galvanometer 3, a field lens 4, and an astigmatism compensation device 5, where the laser 1 is used for generating and emitting a laser beam;
the galvanometer 3 is used for receiving laser beams and driving the reflecting mirror to swing through a motor so as to change a laser beam processing path;
the field lens 4 is used for focusing the laser beam passing through the vibrating lens to the surface of a sample to be processed for processing;
the astigmatism compensation device 5 is positioned on a light path before focusing or after focusing, and is used for generating opposite astigmatism equivalent to that of the original laser processing system and compensating astigmatism formed by a laser in the laser processing system and the whole external light path comprehensively.
Further, the laser processing system also comprises a computer 7, wherein the computer is used for controlling the light emission of the laser and controlling the galvanometer motor to move according to a set processing path and process the material, and is connected with the light beam quality analyzer to observe and record the focused light spot.
Further, the laser processing system also comprises a beam quality analyzer 6, wherein the beam quality analyzer is used for observing and recording the light spot form of the laser beam finally reaching the processing table surface, the light spot form comprises a focus position and positive and negative defocusing positions, reference and feedback are made for the adjustment amount of the astigmatism adjusting device, and the astigmatism adjusting device carries out rotation adjustment according to the light spot form observed by the beam quality analyzer until the light spot presents a circular shape at the focus and the positive and negative defocusing positions to the maximum extent, so that insufficient compensation and excessive compensation are prevented, and the astigmatism compensating device is ensured to be adjusted in place to complete astigmatism compensation.
The astigmatism compensation device comprises an astigmatism compensation optical element, the astigmatism compensation optical element is arranged on the rotary adjusting device, the rotary adjusting device with the astigmatism compensation optical element can be arranged on the vibrating mirror mounting plate, so that the laser beam passing through the field lens enters the astigmatism compensation optical element from one surface at a specific angle and exits from the other surface, and the astigmatism compensation optical element can be properly adjusted according to different astigmatism sizes.
This patent can be manually adjusted and dispel compensation optical element's rotation angle, also can automatic adjustment and dispel compensation optical element's rotation angle, and rotation regulation device carries out corresponding adjustment as required.
The patent adjusts the compensation amount by changing the angle at which the astigmatism compensation element (plate glass, optical wedge, etc.) receives the main light beam by rotating the adjusting device. If the rotation adjusting device adopts an automatic device such as a motor, the automatic adjusting function can be realized by matching with relevant software and a feedback function. For example, a stepping motor with position feedback drives the astigmatism compensation element to rotate, software used by the beam quality analyzer has the function of automatically measuring the ellipticity of the light spot, the ellipticity data is recorded and judged by a computer, if the ellipticity data does not reach a preset ellipticity value, a rotation adjusting signal is sent to the stepping motor, the beam quality analyzer and the software measure and record the ellipticity data of the light spot again after the stepping motor rotates, the judgment is carried out again, a closed loop is formed until the light spot conforming to the preset ellipticity is finally obtained, and the rotating angle of the stepping motor is the optimal adjusting quantity of the astigmatism compensation element at the moment.
Further, the laser processing system further comprises a reflecting mirror 2, and the reflecting mirror is used for changing the propagation direction of the laser beam in an external optical path, so that the laser beam is transmitted according to a required direction. The reflecting mirror of the embodiment adopts two total reflecting mirrors which are arranged in parallel and in an inclined manner.
Further, the astigmatism compensation device adopts flat glass.
Further, the astigmatism compensation means employs a monolithic optical wedge.
Furthermore, the astigmatism compensation device comprises two optical wedges, the size and the direction of astigmatism generated by the combination of the two optical wedges are changed by adjusting the rotating angles of the two optical wedges, when the two optical wedges are in an angle of 180 degrees, the astigmatism generated by the combination of the two optical wedges is 0, and the astigmatism compensation device does not have astigmatism.
The type, model and number of optical elements used in the whole external optical path in the optical system, the characteristic parameters of the laser beam such as wavelength, diameter, beam quality, etc., the type, material, number, thickness, coating, etc. of the optical elements used in the astigmatism compensation device, the installation position, installation method, specific adjustment method of astigmatism compensation, etc. of the astigmatism compensation device in the optical path will affect the astigmatism compensation effect and feasibility, but are consistent in principle of astigmatism compensation, and these are all within the protection scope of the present invention.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (13)
1. A method for compensating astigmatism of a laser beam, comprising the steps of:
an astigmatism compensation device is added in an external light path of the laser processing system, and laser beams generate astigmatism after passing through the astigmatism compensation device;
the rotating angle of the optical element in the astigmatism compensating device is adjusted, the size and the direction of the astigmatism generated by the astigmatism compensating device are changed, the astigmatism generated by the astigmatism compensating device is equal to the astigmatism of the original laser processing system in size and opposite in direction, and the astigmatism of the whole laser processing system is reversely compensated.
2. The method for astigmatism compensation of a laser beam according to claim 1, wherein: and observing the ovality of the final light spot in the defocused state by a beam quality analyzer to adjust the astigmatism compensation device, wherein when the light spot in the defocused state is a circular light spot to the maximum extent, the rotating angle of the corresponding astigmatism compensation device is the required angle, and the compensation amount of the astigmatism compensation device is the astigmatism compensation value.
3. The method for astigmatism compensation of a laser beam according to claim 2, wherein: the optical element in the astigmatism compensation device is driven to rotate by a stepping motor with position feedback, the light beam quality analyzer automatically measures the ellipticity of the light spot, the ellipticity data is recorded and judged by a computer, if the ellipticity value does not reach a preset ellipticity value, a rotation adjusting signal is sent to the stepping motor, the light beam quality analyzer measures and records the ellipticity data of the light spot again after the stepping motor rotates, the ellipticity data is judged again, a closed loop is formed until the light spot conforming to the preset ellipticity is finally obtained, and the rotating angle of the stepping motor is the optimal adjusting amount of the astigmatism compensation element at the moment.
4. The method for astigmatism compensation of a laser beam according to claim 1, wherein: the astigmatism compensation device adopts plate glass.
5. The method for astigmatism compensation of a laser beam according to claim 1, wherein: the astigmatism compensation device adopts a single-chip optical wedge.
6. The method for astigmatism compensation of a laser beam according to claim 1, wherein: the astigmatism compensation device adopts two optical wedges, the rotating angles of the two optical wedges are adjusted, and the size and the direction of astigmatism generated by the combination of the two optical wedges are changed;
the method comprises the following steps of adjusting the rotating angles of two optical wedges, and changing the size and the direction of astigmatism generated by the combination of the two optical wedges, wherein the method specifically comprises the following steps: when the first optical wedge is not moved, the angle of the second optical wedge is rotated to adjust the size of astigmatism generated by the combination of the two optical wedges, when the second optical wedge rotates to form an angle of 180 degrees with the first optical wedge, the astigmatism generated by the combination of the two optical wedges is 0, and the astigmatism compensation device does not have astigmatism.
7. A laser machining system, characterized by: the laser comprises a laser, a galvanometer, a field lens and an astigmatism compensation device, wherein the laser is used for generating and emitting laser beams;
the galvanometer is used for receiving the laser beam and driving the reflecting mirror to swing through the motor so as to change the processing path of the laser beam;
the field lens is used for focusing the laser beam passing through the vibrating mirror to the surface of a sample to be processed for processing;
the astigmatism compensation device is positioned on a light path before focusing or after focusing and is used for generating opposite astigmatism equivalent to that of the original laser processing system and compensating astigmatism formed by a laser in the laser processing system and the whole external light path comprehensively.
8. The laser machining system of claim 7, wherein: the laser processing device further comprises a computer, wherein the computer is used for controlling the laser to emit light, controlling the galvanometer motor to move according to a set processing path and processing the material.
9. The laser processing system according to claim 7 or 8, wherein: the astigmatism adjusting device is used for carrying out rotary adjustment according to the light spot form observed by the light beam quality analyzer until the light spot presents a circular shape to the maximum extent at the focus and the positive and negative defocusing positions, and the astigmatism compensating device is guaranteed to be adjusted in place to complete astigmatism compensation.
10. The laser machining system of claim 7, wherein: the laser device also comprises a reflecting mirror, wherein the reflecting mirror is used for changing the propagation direction of the laser beam in an external light path so as to transmit the laser beam according to the required direction.
11. The laser machining system of claim 7, wherein: the astigmatism compensation device adopts plate glass.
12. The laser machining system of claim 7, wherein: the astigmatism compensation device adopts a single-chip optical wedge.
13. The laser machining system of claim 7, wherein: the astigmatism compensation device comprises two optical wedges, the size and the direction of astigmatism generated by the combination of the two optical wedges are changed by adjusting the rotating angles of the two optical wedges, when the two optical wedges are at 180 degrees, the astigmatism generated by the combination of the two optical wedges is 0, and the astigmatism compensation device does not just have astigmatism.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010783928.7A CN112025088B (en) | 2020-08-06 | 2020-08-06 | Laser beam astigmatism compensation method and laser processing system |
| PCT/CN2020/124863 WO2022027839A1 (en) | 2020-08-06 | 2020-10-29 | Laser beam astigmatism compensation method and laser machining system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010783928.7A CN112025088B (en) | 2020-08-06 | 2020-08-06 | Laser beam astigmatism compensation method and laser processing system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112025088A true CN112025088A (en) | 2020-12-04 |
| CN112025088B CN112025088B (en) | 2022-04-15 |
Family
ID=73582907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010783928.7A Active CN112025088B (en) | 2020-08-06 | 2020-08-06 | Laser beam astigmatism compensation method and laser processing system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN112025088B (en) |
| WO (1) | WO2022027839A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112838473A (en) * | 2021-01-23 | 2021-05-25 | 成都壹程科技有限公司 | Homogenization method for remote light spots of semiconductor laser |
| CN113814559A (en) * | 2021-08-18 | 2021-12-21 | 深圳市大族数控科技股份有限公司 | Cylindrical mirror-based laser beam astigmatism compensation method and device and storage medium |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114453595B (en) * | 2022-03-15 | 2023-08-15 | 季华实验室 | Method and device for measuring quality of full-breadth beam of selective laser melting equipment |
| CN114602896A (en) * | 2022-03-15 | 2022-06-10 | 镇江长悦光电科技有限公司 | Method for modulating high-power laser cleaning energy distribution |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0241789A (en) * | 1988-08-02 | 1990-02-09 | Amada Co Ltd | Laser beam machining device |
| CN1722995A (en) * | 2002-10-11 | 2006-01-18 | 英特拉雷斯公司 | Method and system for determining the position and alignment of a surface of an object in relation to a laser beam |
| CN1761549A (en) * | 2003-02-19 | 2006-04-19 | J.P.瑟塞尔联合公司 | System and method for cutting using a variable astigmatic focal beam spot |
| CN101439442A (en) * | 2007-11-21 | 2009-05-27 | 三菱电机株式会社 | Laser beam machining apparatus |
| CN102528294A (en) * | 2007-08-03 | 2012-07-04 | 浜松光子学株式会社 | Laser working method, laser working apparatus, and its manufacturing method |
| CN104646823A (en) * | 2013-11-22 | 2015-05-27 | 三菱电机株式会社 | Shape variable mirror and laser processing apparatus |
| CN205043357U (en) * | 2015-08-31 | 2016-02-24 | 伊欧激光科技（苏州）有限公司 | Laser processing equipment |
| CN105364302A (en) * | 2014-08-18 | 2016-03-02 | 株式会社迪思科 | Laser beam spot shape detection method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3064433B2 (en) * | 1990-12-25 | 2000-07-12 | 株式会社ニコン | Positioning apparatus and projection exposure apparatus having the same |
| JP3546877B2 (en) * | 2002-05-28 | 2004-07-28 | 三菱電機株式会社 | Semiconductor laser device and optical head device |
| JP5230236B2 (en) * | 2008-03-31 | 2013-07-10 | 大日本スクリーン製造株式会社 | Exposure equipment |
| JP2010062263A (en) * | 2008-09-02 | 2010-03-18 | Canon Inc | Exposure system and method for manufacturing device |
| CN102253489B (en) * | 2011-05-27 | 2012-09-05 | 清华大学 | Unit-magnification multi- optical path astigmatism compensation method and system thereof |
| JP6977609B2 (en) * | 2018-02-21 | 2021-12-08 | 株式会社リコー | Light irradiation device, light processing device using light irradiation device, light irradiation method, and light processing method |
-
2020
- 2020-08-06 CN CN202010783928.7A patent/CN112025088B/en active Active
- 2020-10-29 WO PCT/CN2020/124863 patent/WO2022027839A1/en active Application Filing
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0241789A (en) * | 1988-08-02 | 1990-02-09 | Amada Co Ltd | Laser beam machining device |
| CN1722995A (en) * | 2002-10-11 | 2006-01-18 | 英特拉雷斯公司 | Method and system for determining the position and alignment of a surface of an object in relation to a laser beam |
| CN1761549A (en) * | 2003-02-19 | 2006-04-19 | J.P.瑟塞尔联合公司 | System and method for cutting using a variable astigmatic focal beam spot |
| CN102528294A (en) * | 2007-08-03 | 2012-07-04 | 浜松光子学株式会社 | Laser working method, laser working apparatus, and its manufacturing method |
| CN101439442A (en) * | 2007-11-21 | 2009-05-27 | 三菱电机株式会社 | Laser beam machining apparatus |
| CN104646823A (en) * | 2013-11-22 | 2015-05-27 | 三菱电机株式会社 | Shape variable mirror and laser processing apparatus |
| CN105364302A (en) * | 2014-08-18 | 2016-03-02 | 株式会社迪思科 | Laser beam spot shape detection method |
| CN205043357U (en) * | 2015-08-31 | 2016-02-24 | 伊欧激光科技（苏州）有限公司 | Laser processing equipment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112838473A (en) * | 2021-01-23 | 2021-05-25 | 成都壹程科技有限公司 | Homogenization method for remote light spots of semiconductor laser |
| CN113814559A (en) * | 2021-08-18 | 2021-12-21 | 深圳市大族数控科技股份有限公司 | Cylindrical mirror-based laser beam astigmatism compensation method and device and storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022027839A1 (en) | 2022-02-10 |
| CN112025088B (en) | 2022-04-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112025088B (en) | Laser beam astigmatism compensation method and laser processing system | |
| KR101681337B1 (en) | Laser machining device | |
| US4350867A (en) | Fusion splicing of multi-layer optical fiber bundles | |
| JP5596021B2 (en) | Device for joining and tapering fibers or other optical components | |
| US5948288A (en) | Laser disk texturing apparatus | |
| JPH11501738A (en) | Laser scanner with reflective optics | |
| JP4344094B2 (en) | Hole-linked laser scanning device | |
| JP5184775B2 (en) | Optical processing equipment | |
| JPH0743563A (en) | Method for bonding optical power and module therefor | |
| CN107052570A (en) | A kind of laser precision machining device | |
| US20220390757A1 (en) | Laser processing device, and laser processing method | |
| CN111266725B (en) | Laser processing device | |
| US4805992A (en) | Astigmatism generator | |
| US6902326B1 (en) | Off-axis reflective optical apparatus | |
| JPH1164755A (en) | Laser light source and focus adjusting device and scanning optical system of the light source | |
| JP2007183669A (en) | Method for adjusting condensing lens device | |
| JPH02240617A (en) | Optical beam scanner | |
| JPH02149814A (en) | Monitor mechanism for scanning type optical device | |
| WO2007063343A1 (en) | Laser processing tool | |
| WO2004040338A1 (en) | Beam-shaping optical element and method and program for designing the same | |
| CN218848378U (en) | Multi-path light splitting system for welding quartz end cap | |
| JPH037082B2 (en) | ||
| CN208969412U (en) | Light source system | |
| CN210587655U (en) | Optical fiber end cap welding device | |
| WO2023221318A1 (en) | Free-form lens, optical system and laser welding equipment comprising same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |