CN112011759B - PVD vacuum coating machine - Google Patents
PVD vacuum coating machine Download PDFInfo
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- CN112011759B CN112011759B CN202010854764.2A CN202010854764A CN112011759B CN 112011759 B CN112011759 B CN 112011759B CN 202010854764 A CN202010854764 A CN 202010854764A CN 112011759 B CN112011759 B CN 112011759B
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- air
- side wall
- working bin
- movable
- cleaning liquid
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a PVD vacuum coating machine, which comprises a casing, wherein a working bin and a mechanical part positioned above the working bin are arranged in the casing, a lifting plate is transversely arranged in the mechanical part, an isolation cover wall is arranged at the bottom end of the lifting plate, a separating ring is arranged on the side wall of the casing, a gap is formed between a top plate and the separating ring, and the gap is used for the isolation cover wall to pass through; a plurality of through holes are uniformly distributed on the separating ring; the side wall of the mechanical part is fixedly provided with a plurality of motors, the output ends of the motors are provided with gears, the gears are meshed and connected with vertical racks, and the racks are fixedly arranged on the movable track; a movable cleaning part is arranged on the movable track; the lateral wall of isolated cover wall is provided with a plurality of air jet, and the air jet sprays hot-air towards the lateral wall of working bin, removes the lateral wall injection cleaning solution of washing portion towards the working bin. The invention can automatically clean the side wall of the vacuum coating machine, does not influence the coating work, can ensure the coating quality and improve the efficiency.
Description
Technical Field
The invention relates to a PVD vacuum coating machine.
Background
PVD, physical vapor deposition, is an advanced surface treatment technology that is currently widely used internationally. The working principle is that under the vacuum condition, gas or evaporated material is partially separated by gas discharge, and the evaporated material or its reactant is deposited on the base material while the gas ion or evaporated material ion bombards. It has the features of fast deposition speed and clean surface, and has the advantages of strong film adhesion, high winding performance, wide range of platable material, etc. The vacuum coating machine mainly refers to a coating machine which needs to be coated under a higher vacuum degree, and the working principle of the vacuum coating machine comprises vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into evaporation and sputtering.
During vacuum coating, the coating material vapor emitted by the coating source is deposited on the component to be coated, and is also partially sputtered and deposited on the side wall of the coating machine, and the coating material vapor is thicker along with the increase of the coating times and time. The deposits are not firmly adhered to the side wall, and are easy to fall off onto the plated element in the element plating process, so that the plated element is subjected to film plating defects.
The cleaning of the deposits on the inner cavity of the film coating machine and the surface of the clamp according to the cleaning period becomes an important component of the vacuum coating work of the optical element.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the PVD vacuum coating machine, which can quickly clean the side wall of the vacuum coating machine, ensure the coating quality and improve the efficiency; the invention also provides a cleaning work, and the side wall of the vacuum coating machine can be quickly cleaned by using the device of the invention without damaging the side wall.
In order to solve the technical problem, the invention is solved by the following technical scheme: a PVD vacuum coating machine comprises a machine shell, wherein a working bin and a mechanical part located above the working bin are arranged in the machine shell, a pulling plate is transversely arranged in the mechanical part, an isolation cover wall is arranged at the bottom end of the pulling plate, a push rod is connected to the top of the pulling plate, an air cylinder is arranged at the top of the push rod, and the air cylinder drives the push rod to lift so as to control the lifting and descending of the isolation cover wall; the lifting plate is provided with four penetrating openings, the top of the mechanical part is provided with four supporting columns, the supporting columns penetrate through the penetrating openings and are fixedly connected with a top plate of the working bin at the bottom, a separating ring is arranged on the side wall of the machine shell, and a gap is formed between the top plate and the separating ring and is used for the wall of the isolation cover to pass through; a plurality of through holes are uniformly distributed on the separating ring; the side wall of the mechanical part is fixedly provided with a plurality of motors, the output ends of the motors are provided with gears, the gears are meshed and connected with vertical racks, and the racks are fixedly arranged on the movable track; the movable cleaning part is arranged on the movable track; the lateral wall of isolated cover wall is provided with a plurality of air jet, the air jet orientation the lateral wall of working bin sprays hot-air, remove the cleaning portion orientation the lateral wall of working bin sprays the cleaning solution.
Preferably, an air pump is arranged in the mechanical part and connected with a heating part, and air sprayed by the air pump is heated by the heating part, then is conveyed into the wall of the isolation cover and finally is sprayed out from the air spraying opening; and a dust filtering device is arranged at the air inlet of the air pump.
Preferably, a gear set and a driving motor are arranged in the movable cleaning part, and the gear set is meshed with the rack and is controlled by the driving motor to rotate so as to realize lifting movement on the movable track.
Preferably, the movable cleaning part is provided with a plurality of spray heads in an arrayed manner, and the spray heads spray mist cleaning solution towards the side wall of the working bin; the lower part of the movable cleaning part is provided with a high-pressure water spraying part, two to three water spraying heads are arranged in the horizontal direction of the high-pressure water spraying part, and the water spraying heads spray high-pressure water columns to the side walls for washing; the working coverage range of the sprinkler head in the horizontal direction is not less than that of the spray head.
Preferably, the back of the movable cleaning part is provided with a connecting part, the vertical height of the connecting part is smaller than that of the movable cleaning part, the top of the connecting part is provided with a cleaning liquid pipe joint and a high-pressure water pipe joint, the cleaning liquid pipe joint and the high-pressure water pipe joint are respectively connected with a cleaning liquid pipe and a high-pressure water pipe, the cleaning liquid pipe is connected with a cleaning liquid pressure pump, the high-pressure water pipe is connected with a high-pressure water pump, the cleaning liquid pressure pump and the high-pressure water pump are arranged in the mechanical part, and the cleaning liquid and the water pumped by the cleaning liquid pressure pump and the high-pressure water pump are selected to be externally arranged; all be provided with a range finding probe about connecting portion, the range finding probe is connected driving motor when detecting that the distance is too near can bump, orders about driving motor shut down or reverse rotation.
Preferably, the top of the movable cleaning part is provided with an air blowing part, the air blowing part is provided with a plurality of air outlet heads facing the side wall of the working bin, the tail part of the air blowing part is provided with an air pipe connector, the air pipe connector is connected with an air pipe, and the other end of the air pipe is connected with the air pump.
Preferably, the edge of the bin bottom of the working bin is provided with a guide concave ring groove, and the bottom of the isolation cover wall is provided with a guide convex ring strip; when the isolation cover wall moves downwards to the bottom, the guide outer convex ring strip presses the guide inner concave ring groove to generate a guide and limiting effect, and the isolation cover wall is kept stable; the top surface of the guide outer convex ring strip is covered with a first sealing gasket, and the width of the first sealing gasket is larger than the width of a gap between the top plate and the separating ring.
Preferably, an annular groove is arranged between the bin bottom and the side wall of the working bin, the annular groove is provided with a plurality of liquid drainage holes, a plurality of water leakage partition plates are arranged on the annular groove, the positions of the water leakage partition plates correspond to the upper moving track, a supporting plate for supporting the bottom of the moving track is arranged on the top surface of each water leakage partition plate, a concave pit is arranged on the top surface of each supporting plate, a guide disc is arranged at the bottom end of the moving track, the bottom of the guide disc protrudes downwards to form an inverted cone, and the concave pit is matched with the inverted cone in shape; the top surface of the guide disc is covered with a second sealing gasket, and the second sealing gasket performs a sealing effect on the through hole when the moving track retracts into the mechanical part; the outer diameter of the guide disc is larger than the sum of the aperture of the through hole and the thickness of the second sealing gasket, and the aperture of the through hole is larger than the maximum external dimension of the movable cleaning part in the horizontal direction and smaller than the diameter of the second sealing gasket.
Preferably, a headstock is arranged on a top plate of the working bin, and a coating instrument and a clamp are arranged on the headstock and used for coating, and the coating instrument and the clamp can clamp a plurality of workpieces to be coated and perform coating at the same time.
The PVD vacuum coating machine provided by the invention can quickly clean the side wall of the vacuum coating machine, can ensure the coating quality and improve the efficiency; the invention also provides a cleaning work, by utilizing the device of the invention, the side wall of the vacuum coating machine can be cleaned quickly without causing damage to the side wall
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will discuss the drawings required to be used in the embodiments or the technical solutions in the prior art, it is obvious that the technical solutions described in the figures are only some embodiments of the present invention, and for those skilled in the art, other embodiments and drawings thereof can be obtained according to the embodiments shown in the drawings without creative efforts.
FIG. 1 is a schematic of the present invention.
Fig. 2 is an enlarged schematic view of the structure at a in fig. 1.
FIG. 3 is a schematic diagram of the mobile cleaning unit and its peripheral structure according to the present invention.
In the figure: working bin 1, headstock 11, lateral wall 12, bottom of the storehouse 13, leakage fluid dram 131, annular groove 132, direction indent annular groove 133, the baffle 14 that leaks, backup pad 15, machinery portion 2, isolated cover wall 3, fumarole 31, direction evagination rampart 32, first sealed pad 33, removal track 4, guiding disc 41, second sealed pad 42, removal washing portion 5, atomising head 51, high pressure jetting portion 52, sprinkler head 521, connecting portion 53, cleaning solution pipe connector 531, range finding probe 532, gas blowing portion 6, gas outlet 61, trachea joint 62.
Detailed Description
The technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments described herein without the need for inventive work, are within the scope of the present invention.
As shown in fig. 1 to 3, a PVD vacuum coater comprises a casing, wherein a working bin 1 and a mechanical part 2 located above the working bin are arranged in the casing, a pulling plate is transversely arranged in the mechanical part 2, an isolation cover wall 3 is arranged at the bottom end of the pulling plate, a push rod is connected to the top of the pulling plate, an air cylinder is arranged at the top of the push rod, and the air cylinder drives the push rod to lift so as to control the lifting and lowering of the isolation cover wall 3; the lifting plate is provided with four penetrating openings, the top of the mechanical part 2 is provided with four supporting columns, the supporting columns penetrate through the penetrating openings and are fixedly connected with a top plate of the working bin 1 at the bottom, a partition ring is arranged on the side wall 12 of the machine shell, and a gap is formed between the top plate and the partition ring and is used for the isolation cover wall 3 to pass through; a plurality of through holes are uniformly distributed on the separating ring; the side wall of the mechanical part 2 is fixedly provided with a plurality of motors, the output ends of the motors are provided with gears, the gears are meshed and connected with vertical racks, and the racks are fixedly arranged on the movable track 4; the movable cleaning part 5 is arranged on the movable track 4; the lateral wall of isolated cover wall 3 is provided with a plurality of air jet, the air jet orientation the lateral wall 12 of working bin 1 sprays hot-air, remove cleaning portion 5 orientation the lateral wall 12 of working bin 1 sprays the cleaning solution.
An air pump is arranged in the mechanical part 2 and connected with a heating part, and air sprayed by the air pump is heated by the heating part, then is conveyed into the isolation cover wall 3 and finally is sprayed out from an air spraying opening; and a dust filtering device is arranged at the air inlet of the air pump.
A gear set and a driving motor are arranged in the movable cleaning part 5, and the gear set is meshed with the rack and is controlled by the driving motor to rotate, so that the movable cleaning part can move up and down on the movable track 4.
The movable cleaning part 5 is provided with a plurality of spray heads 51 in an array, and the spray heads 51 spray mist cleaning liquid towards the side wall 12 of the working bin 1; the lower part of the movable cleaning part 5 is provided with a high-pressure water spraying part 52, the high-pressure water spraying part 52 is provided with two to three water spraying heads 521 in the horizontal direction, and the water spraying heads spray high-pressure water columns to the side wall 12 for washing; the working coverage of the sprinkler head 521 in the horizontal direction is not less than that of the spray head 51.
The back of the movable cleaning part 5 is provided with a connecting part 53, the vertical height of the connecting part 53 is smaller than that of the movable cleaning part 5, the top of the connecting part 53 is provided with a cleaning liquid pipe joint 531 and a high-pressure water pipe joint, the cleaning liquid pipe joint 531 and the high-pressure water pipe joint are respectively connected with a cleaning liquid pipe and a high-pressure water pipe, the cleaning liquid pipe is connected with a cleaning liquid pressure pump, the high-pressure water pipe is connected with a high-pressure water pump, the cleaning liquid pressure pump and the high-pressure water pump are arranged in the mechanical part 2, and the cleaning liquid and the water drawn by the cleaning liquid pressure pump and the high-pressure water pump are selected to be in an external mode; both the upper and the lower parts of the connecting part 53 are provided with a distance measuring probe 532, the distance measuring probe 532 is connected with the driving motor, and when the driving motor is detected to be collided too close, the driving motor is driven to stop or rotate reversely.
The top of the movable cleaning part 5 is provided with an air blowing part 6, the air blowing part 6 is provided with a plurality of air outlet heads 61 facing the side wall 12 of the working bin 1, the tail part of the air blowing part 6 is provided with an air pipe connector 62, the air pipe connector 62 is connected with an air pipe, and the other end of the air pipe is connected with the air pump.
The edge of the bin bottom 13 of the working bin 1 is provided with a guiding concave ring groove 133, and the bottom of the isolation cover wall 3 is provided with a guiding convex ring strip 32; when the insulating cover wall 3 moves downwards to the bottom, the guiding outer convex ring strip 32 presses on the guiding inner concave ring groove 133 to generate guiding and limiting effects, so as to help maintain the stability of the insulating cover wall 3; the top surface of the guide outer convex ring strip 32 is covered with a first sealing gasket 33, and the width of the first sealing gasket 33 is larger than the gap width between the top plate and the separating ring.
An annular groove 132 is arranged between the bin bottom 13 and the side wall 12 of the working bin 1, the annular groove 132 is provided with a plurality of liquid discharge holes 131, the annular groove 132 is provided with a plurality of water leakage partition plates 14, the positions of the water leakage partition plates 14 correspond to the upper moving track 4, the top surface of each water leakage partition plate 14 is provided with a support plate 15 for supporting the bottom of the corresponding moving track 4, the top surface of each support plate 15 is provided with a pit, the bottom end of the corresponding moving track 4 is provided with a guide disc 41, the bottom of each guide disc 41 protrudes downwards to form an inverted frustum, and the pits are matched with the inverted frustum in shape; the top surface of the guide disc 41 is covered with a second sealing gasket 42, and the second sealing gasket 42 performs a sealing function on the through hole when the moving track 4 retracts into the mechanical part 2; the outer diameter of the guide disc 41 is larger than the sum of the aperture of the through hole and the thickness of the second sealing gasket 42, and the aperture of the through hole is larger than the maximum outer dimension of the movable cleaning part 5 in the horizontal direction and smaller than the diameter of the second sealing gasket 42.
The top plate of the working bin 1 is provided with a headstock 11, the headstock 11 is provided with a film plating apparatus and a fixture, and the film plating apparatus and the fixture are used for performing film plating work and can clamp a plurality of plated workpieces to perform film plating simultaneously.
The invention can continuously carry out film coating work, and the cleaning work can not influence the original film coating work, thereby improving the efficiency; and through cleaning work, the impurities in the coating are cleaned, so that the coating quality is improved.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims, rather than the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
The PVD vacuum coating machine provided by the invention can quickly clean the side wall of the vacuum coating machine, so that the coating quality can be ensured, and the efficiency is improved; the invention also provides a cleaning work, and the side wall of the vacuum coating machine can be quickly cleaned by using the device of the invention without damaging the side wall.
Claims (6)
1. The PVD vacuum coating machine is characterized by comprising a machine shell, wherein a working bin (1) and a mechanical part (2) located above the working bin are arranged in the machine shell, a lifting plate is transversely arranged in the mechanical part (2), an isolation cover wall (3) is arranged at the bottom end of the lifting plate, the top of the lifting plate is connected with a push rod, the top of the push rod is provided with an air cylinder, and the air cylinder drives the push rod to lift so as to control the lifting and falling of the isolation cover wall (3); the lifting plate is provided with four through holes, the top of the mechanical part (2) is provided with four supporting columns, the supporting columns penetrate through the through holes and are fixedly connected with a top plate of the working bin (1) at the bottom, a separating ring is arranged on the side wall (12) of the machine shell, a gap is formed between the top plate and the separating ring, and the gap is used for the isolation cover wall (3) to pass through; a plurality of through holes are uniformly distributed on the separating ring; the side wall of the mechanical part (2) is fixedly provided with a plurality of motors, the output ends of the motors are provided with gears, the gears are meshed and connected with vertical racks, and the racks are fixedly arranged on the movable track (4); a movable cleaning part (5) is arranged on the movable track (4); the outer side wall of the isolation cover wall (3) is provided with a plurality of air nozzles, the air nozzles spray hot air towards the side wall (12) of the working bin (1), the movable cleaning part (5) sprays cleaning liquid towards the side wall (12) of the working bin (1), the edge of the bin bottom (13) of the working bin (1) is provided with a guide concave ring groove (133), and the bottom of the isolation cover wall (3) is provided with a guide convex ring strip (32); when the insulating cover wall (3) moves downwards to the bottom, the guide convex ring strip (32) presses on the guide concave ring groove (133) to generate a guide and limiting effect, so that the stability of the insulating cover wall (3) is maintained; the top surface of the guide outer convex ring strip (32) is covered with a first sealing gasket (33), the width of the first sealing gasket (33) is larger than the width of the gap between the top plate and the separating ring, a ring groove (132) is arranged between the bin bottom (13) and the side wall (12) of the working bin (1), the ring groove (132) is provided with a plurality of liquid discharge holes (131), the ring groove (132) is provided with a plurality of water leakage partition plates (14), the position of the water leakage clapboard (14) corresponds to the moving track (4) above, the top surface of the water leakage clapboard (14) is provided with a supporting plate (15) for supporting the bottom of the moving track (4), the top surface of the supporting plate (15) is provided with a pit, the bottom end of the moving track (4) is provided with a guide disc (41), the bottom of the guide disc (41) protrudes downwards to form an inverted frustum, and the shape of the pit is matched with that of the inverted frustum; the top surface of the guide disc (41) is covered with a second sealing gasket (42), and the second sealing gasket (42) performs a sealing effect on the through hole when the moving track (4) retracts into the mechanical part (2); the outer diameter of the guide disc (41) is larger than the sum of the aperture of the through hole and the thickness of the second sealing gasket (42), the aperture of the through hole is larger than the maximum outer dimension of the movable cleaning part (5) in the horizontal direction and smaller than the diameter of the second sealing gasket (42), a plurality of spray heads (51) are arranged on the movable cleaning part (5), and the spray heads (51) spray mist cleaning liquid towards the side wall (12) of the working bin (1); the lower part of the movable cleaning part (5) is provided with a high-pressure water spraying part (52), the high-pressure water spraying part (52) is provided with two to three water spraying heads (521) in the horizontal direction, and the water spraying heads spray high-pressure water columns to the side wall (12) for washing; the working coverage range of the water spray head (521) in the horizontal direction is not less than that of the spray head (51).
2. The vacuum coating machine according to claim 1, characterized in that an air pump is arranged in the mechanical part (2), the air pump is connected with a heating part, and air sprayed by the air pump is heated by the heating part, then is conveyed into the isolation cover wall (3) and finally is sprayed out from an air spraying opening; and a dust filtering device is arranged at the air inlet of the air pump.
3. The vacuum coating machine according to claim 1, characterized in that a gear set and a driving motor are arranged in the movable cleaning part (5), and the gear set is meshed with the rack and is controlled by the driving motor to rotate so as to realize lifting movement on the movable rail (4).
4. The vacuum coating machine according to claim 1, characterized in that a connecting part (53) is arranged at the back of the movable cleaning part (5), the vertical height of the connecting part (53) is smaller than the height of the movable cleaning part (5), a cleaning liquid pipe joint (531) and a high-pressure water pipe joint are arranged at the top of the connecting part (53), the cleaning liquid pipe joint (531) and the high-pressure water pipe joint are respectively connected with a cleaning liquid pipe and a high-pressure water pipe, the cleaning liquid pipe is connected with a cleaning liquid pressure pump, the high-pressure water pipe is connected with a high-pressure water pump, the cleaning liquid pressure pump and the high-pressure water pump are arranged in the mechanical part (2), and the cleaning liquid and the water drawn by the cleaning liquid pressure pump and the high-pressure water pump are selected from an external mode; all be provided with a range finding probe (532) about connecting portion (53), range finding probe (532) are connected driving motor, when detecting that the distance is too close can bump, order about driving motor shut down or reverse rotation.
5. The vacuum coating machine according to claim 2, characterized in that a blowing part (6) is arranged at the top of the movable cleaning part (5), the blowing part (6) is provided with a plurality of air outlets (61) facing the side wall (12) of the working chamber (1), an air pipe joint (62) is arranged at the tail part of the blowing part (6), the air pipe joint (62) is connected with an air pipe, and the other end of the air pipe is connected with the air pump.
6. Vacuum coating machine according to claim 1, characterized in that the top plate of the working chamber (1) is provided with a headstock (11), and the headstock (11) is equipped with coating equipment and fixtures for coating work and capable of holding a plurality of workpieces to be coated for coating at the same time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010854764.2A CN112011759B (en) | 2020-08-24 | 2020-08-24 | PVD vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010854764.2A CN112011759B (en) | 2020-08-24 | 2020-08-24 | PVD vacuum coating machine |
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| Publication Number | Publication Date |
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| CN112011759A CN112011759A (en) | 2020-12-01 |
| CN112011759B true CN112011759B (en) | 2022-06-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010854764.2A Active CN112011759B (en) | 2020-08-24 | 2020-08-24 | PVD vacuum coating machine |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114592171B (en) * | 2022-01-21 | 2022-09-23 | 杭州启俄微纳科技有限公司 | Film coating machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07313947A (en) * | 1995-03-09 | 1995-12-05 | Seiko Epson Corp | Method and apparatus for cleaning work |
| CN105296927A (en) * | 2015-10-29 | 2016-02-03 | 云南汇恒光电技术有限公司 | Cleaning method for inner cavity of optical vacuum coating machine |
| CN208362449U (en) * | 2018-05-14 | 2019-01-11 | 扬州市华盛光学仪器厂 | A kind of optical coating system |
| WO2019147493A1 (en) * | 2018-01-29 | 2019-08-01 | Applied Materials, Inc. | Process kit geometry for particle reduction in pvd processes |
| CN210816388U (en) * | 2019-09-21 | 2020-06-23 | 芜湖鑫国电子科技有限公司 | Observation window cleaning device for vacuum coating machine |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020153022A1 (en) * | 2001-04-19 | 2002-10-24 | Kuo Chia-Ming | Method for preventing particles in a pre-clean chamber |
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2020
- 2020-08-24 CN CN202010854764.2A patent/CN112011759B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07313947A (en) * | 1995-03-09 | 1995-12-05 | Seiko Epson Corp | Method and apparatus for cleaning work |
| CN105296927A (en) * | 2015-10-29 | 2016-02-03 | 云南汇恒光电技术有限公司 | Cleaning method for inner cavity of optical vacuum coating machine |
| WO2019147493A1 (en) * | 2018-01-29 | 2019-08-01 | Applied Materials, Inc. | Process kit geometry for particle reduction in pvd processes |
| CN208362449U (en) * | 2018-05-14 | 2019-01-11 | 扬州市华盛光学仪器厂 | A kind of optical coating system |
| CN210816388U (en) * | 2019-09-21 | 2020-06-23 | 芜湖鑫国电子科技有限公司 | Observation window cleaning device for vacuum coating machine |
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| CN112011759A (en) | 2020-12-01 |
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