CN112004621B - Amorphous metal thin strip, method for processing same, and method for producing laminated body - Google Patents

Amorphous metal thin strip, method for processing same, and method for producing laminated body Download PDF

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CN112004621B
CN112004621B CN201980027450.0A CN201980027450A CN112004621B CN 112004621 B CN112004621 B CN 112004621B CN 201980027450 A CN201980027450 A CN 201980027450A CN 112004621 B CN112004621 B CN 112004621B
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amorphous metal
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太田元基
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Bomeilicheng Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21DWORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D28/00Shaping by press-cutting; Perforating
    • B21D28/02Punching blanks or articles with or without obtaining scrap; Notching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21DWORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D28/00Shaping by press-cutting; Perforating
    • B21D28/24Perforating, i.e. punching holes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Soft Magnetic Materials (AREA)
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  • Manufacturing Cores, Coils, And Magnets (AREA)

Abstract

The present invention provides a method for suppressing the occurrence of cracks or fissures in an amorphous metal ribbon during the machining of the amorphous metal ribbon. In the method for processing an amorphous metal thin strip according to the present invention, the amorphous metal thin strip is vibrated and then machined or is vibrated and then machined. Specifically, in the method for processing an amorphous metal thin strip, the amorphous metal thin strip has a saturation magnetostriction of 1ppm or more, and the vibration is a vibration caused by magnetostriction of the amorphous metal thin strip. Or, for the amorphous metal thin strip, a portion to which vibration is locally applied by a processing tool is machined.

Description

非晶态金属薄带、其加工方法和层叠体的制造方法Amorphous metal thin strip, method for processing same, and method for producing laminated body

技术领域technical field

本发明涉及非晶态金属薄带、其加工方法和层叠体的制造方法。The present invention relates to an amorphous metal thin strip, a method for processing the same, and a method for producing a laminate.

背景技术Background technique

非晶态金属薄带(amorphous metal ribbon)在各种各样的被广泛使用。列举一例为,具有软磁性的非晶态金属薄带信息设备、汽车、家电/民生设备、工业机械等领域被使用,具体而言,被作为旋转电机及电抗器、电力用变压器、噪声抑制零件、磁天线等有益于高效率和高增益的材料使用。Amorphous metal ribbon (amorphous metal ribbon) is widely used in various. As an example, amorphous metal strips with soft magnetic properties are used in information equipment, automobiles, home appliances/civilian equipment, industrial machinery, etc., specifically, as rotating electrical machines and reactors, power transformers, and noise suppression parts , Magnetic antennas, etc. are beneficial to the use of high-efficiency and high-gain materials.

非晶态金属薄带一般被认为硬度高而延展性低。例如,具有软磁性的非晶态金属薄带通常利用单辊法等的熔融金属淬火法将熔融的金属制造成长条(长尺寸)带状的部件。薄带的厚度以5~70μm为主。这些金属薄带的硬度的维氏硬度HV为500以上。因此,非晶态金属薄带具有机械加工显著困难的缺点。Thin ribbons of amorphous metals are generally considered to have high hardness and low ductility. For example, an amorphous metal thin strip having soft magnetic properties is generally manufactured into a long (long) strip-shaped member by molten metal by a molten metal quenching method such as a single roll method. The thickness of the ribbon is mainly 5-70 μm. The Vickers hardness HV of the hardness of these thin metal strips is 500 or more. Thus, thin strips of amorphous metal have the disadvantage of being significantly difficult to machine.

现有技术中,这些非晶态金属薄带以能够几乎不进行机械加工地制造的、呈环形卷绕的绕组磁芯为主要的应用对象。近年来,正在研究在绕组磁芯的基础上层叠非晶态金属薄带,用作旋转电机及电抗器、天线等的磁性部件使用的技术。In the prior art, these thin strips of amorphous metal are mainly used in toroidally wound winding cores which can be produced almost without machining. In recent years, research has been conducted on the technology of laminating thin strips of amorphous metal on top of winding cores for use as magnetic parts such as rotating electrical machines, reactors, and antennas.

非晶态金属薄带被制造为条带状的形态的部件,因此在层叠非晶态金属薄带成为层叠体的情况下,有时采用将带状的非晶态金属薄带加工为规定的形状,之后将其层叠这类工序。作为将非晶态金属薄带加工为规定的形状的方式方法,有蚀刻加工和放电加工、激光加工等。但是,这些加工方法的加工效率极低,存在工业生产上的问题。此外,由于非晶态金属薄带很脆,所以还存在不能避免产生裂纹和裂缝、加工成品率差的问题。The amorphous metal ribbon is manufactured as a strip-shaped member. Therefore, when the amorphous metal ribbon is laminated to form a laminate, the ribbon-shaped amorphous metal ribbon may be processed into a predetermined shape. , which are then stacked with such operations. Examples of methods for processing an amorphous metal thin strip into a predetermined shape include etching processing, electric discharge processing, laser processing, and the like. However, the processing efficiency of these processing methods is extremely low, and there are problems in industrial production. In addition, since the amorphous metal strip is brittle, cracks and cracks cannot be avoided, and the processing yield is poor.

对非晶态金属薄带具有通用性的加工方式仍为在厚度方向上使模具及加工工具移动的冲孔加工和裁切加工等机械加工。但是,以非晶态金属薄带为被加工物的机械加工相对于上述的加工方法,更容易发生裂纹和裂缝。The general-purpose processing methods for amorphous metal thin strips are mechanical processing such as punching and cutting in which a die and a processing tool are moved in the thickness direction. However, mechanical processing using an amorphous metal strip as a workpiece is more prone to cracks and cracks than the above-mentioned processing methods.

作为其应对措施,例如,专利文献1是以对非晶态金属薄带实施冲孔加工为前提的发明,公开有制作将厚度为8~35μm的软磁性金属薄带层叠多个的层叠板,且在金属薄带间按规定的厚度形成热固化性树脂的技术。此外,作为其效果,记载着能够容易地提供冲孔加工性优异、高性能的层叠体。As a countermeasure, for example, Patent Document 1 is an invention based on the premise of punching an amorphous metal strip, and discloses the production of a laminate in which a plurality of soft magnetic metal strips with a thickness of 8 to 35 μm are laminated. And it is a technology to form a thermosetting resin with a predetermined thickness between thin metal strips. In addition, as an effect thereof, it is described that a laminate having excellent punchability and high performance can be easily provided.

现有技术文献prior art literature

专利文献patent documents

专利文献1:日本特开2008-213410号公报Patent Document 1: Japanese Patent Laid-Open No. 2008-213410

发明内容Contents of the invention

发明所要解决的问题The problem to be solved by the invention

但是,作为裂纹和裂缝的应对措施,不仅需要专利文献1那样的、利用非晶态金属薄带以外的部件增强机械强度的研究,而且还需要研究机械加工自身的改善措施。However, as countermeasures against cracks and fissures, not only the study of enhancing the mechanical strength by members other than the amorphous metal ribbon as in Patent Document 1, but also the study of improvement measures for machining itself is required.

本发明的目的在于,提供一种能够在非晶态金属薄带的机械加工中,抑制在非晶态金属薄带产生裂纹及裂缝的方法。此外,提供一种使用该非晶态金属薄带的层叠体的制造方法。此外,提供一种通过该机械加工得到的非晶态金属薄带。An object of the present invention is to provide a method capable of suppressing the occurrence of cracks and fissures in an amorphous metal ribbon during machining of the amorphous metal ribbon. In addition, a method of manufacturing a laminate using the amorphous metal ribbon is provided. In addition, there is provided an amorphous metal thin strip obtained by the machining.

用于解决问题的方式way to solve problems

本发明是非晶态金属薄带的加工方法,The present invention is a processing method of an amorphous metal thin strip,

在使上述非晶态金属薄带振动后进行机械加工,或一边使其振动一边进行机械加工。Machining is performed after vibrating the above-mentioned amorphous metal thin strip, or while vibrating.

在上述的本发明中,上述非晶态金属薄带具有1ppm以上的饱和磁致伸缩(saturation magnetostriction),上述振动能够为上述非晶态金属薄带的磁致伸缩引起的振动。In the present invention described above, the amorphous metal ribbon has a saturation magnetostriction of 1 ppm or more, and the vibration may be vibration caused by the magnetostriction of the amorphous metal ribbon.

上述振动的频率能够为1Hz以上500kHz以下。The frequency of the vibration can be from 1 Hz to 500 kHz.

上述振动能够通过对上述非晶态金属薄带施加1A/m以上的交流磁场而使其产生。The above-mentioned vibration can be generated by applying an AC magnetic field of 1 A/m or more to the above-mentioned amorphous metal ribbon.

上述非晶态金属薄带为长条的带状,能够一边将上述非晶态金属薄带在上述长条的方向运送一边进行机械加工。The thin amorphous metal ribbon is in the shape of an elongated strip, and can be machined while conveying the thin amorphous metal ribbon in the elongated direction.

在上述的本发明中,In the above-mentioned present invention,

对于上述非晶态金属薄带,能够对利用加工工具局部地施加了振动的部分进行机械加工。In the above-mentioned amorphous metal thin strip, machining can be performed on a portion to which vibration is locally applied by a processing tool.

能够为如下的加工方法:上述加工工具包括能够夹持上述非晶态金属薄带的上下表面的打孔机和打孔架,上述打孔机和打孔架的至少一者能够在上述非晶态金属薄带的厚度方向滑动,能够通过上述打孔机和打孔架夹持上述非晶态金属薄带的上下表面,且其至少一者在上述厚度方向上振动,在上述非晶态金属薄带的位于上述打孔机和打孔架的滑动部的部分对上述非晶态金属薄带施加振动,利用上述打孔机对通过上述振动施加了反复疲劳的部分实施冲孔加工。It can be the following processing method: the above-mentioned processing tool includes a punching machine and a punching frame capable of clamping the upper and lower surfaces of the above-mentioned amorphous metal thin strip, at least one of the above-mentioned punching machine and the punching frame can be used on the above-mentioned amorphous metal strip. The thickness direction of the state metal strip slides, the upper and lower surfaces of the above-mentioned amorphous metal strip can be clamped by the above-mentioned puncher and the punching frame, and at least one of them vibrates in the above-mentioned thickness direction, and the above-mentioned amorphous metal Vibration is applied to the amorphous metal ribbon at the portion of the ribbon located at the sliding portion of the puncher and the punching frame, and punching is performed on the portion subjected to repeated fatigue by the vibration with the puncher.

上述非晶态金属薄带能够使用通过轧辊冷却制造的以Fe为主成分的材料。As the above-mentioned amorphous metal strip, a material mainly composed of Fe produced by roll cooling can be used.

上述非晶态金属薄带的厚度能够为5μm以上70μm以下。The thickness of the amorphous metal thin ribbon can be 5 μm or more and 70 μm or less.

上述非晶态金属薄带能够使用维氏硬度HV为500以上的薄带。As the amorphous metal ribbon, a ribbon having a Vickers hardness HV of 500 or more can be used.

能够将通过这些非晶态金属薄带的加工方法加工后的非晶态金属薄带层叠,形成层叠体。The amorphous metal ribbons processed by these amorphous metal ribbon processing methods can be laminated to form a laminate.

通过上述的非晶态金属薄带的加工方法,得到以下的本发明的非晶态金属薄带。The following amorphous metal ribbon of the present invention is obtained by the above-mentioned processing method of the amorphous metal ribbon.

其是一种在薄带的加工面具有通过机械加工形成的剪切面的非晶态金属薄带,在上述加工面,薄带表面的塌边面侧的轮廓具有波纹型。It is an amorphous metal ribbon having a sheared surface formed by machining on the processed surface of the ribbon where the profile on the sag side of the ribbon surface has a corrugated shape.

该波纹型的轮廓能够按平均0.1~20μm的周期具有凹凸。The corrugated profile can have irregularities at an average period of 0.1 to 20 μm.

此外,在上述加工面,上述剪切面能够占40%以上的面积。In addition, the above-mentioned sheared surface may occupy 40% or more of the area of the above-mentioned processed surface.

此外,相对于上述薄带表面的塌边面侧的轮廓,上述剪切面的塌边面侧的轮廓能够具有相关的波纹型。Furthermore, the contour of the shear surface on the side of the sag side can have a corrugated shape relative to the contour of the surface of the strip on the side of the sag side.

此外,其它本发明的非晶态金属薄带如下。In addition, other amorphous metal ribbons of the present invention are as follows.

一种在薄带的加工面具有通过机械加工形成的剪切面的非晶态金属薄带,A thin strip of amorphous metal having a shear plane formed by machining on the worked surface of the strip,

在机械加工后的上述薄带的加工面,断裂面占50%以上的面积。On the machined surface of the thin strip after machining, the fractured surface occupies 50% or more of the area.

发明的效果The effect of the invention

根据本发明,能够在非晶态金属薄带的机械加工中,实现在非晶态金属薄带产生的裂纹及裂缝的抑制。由此,能够得到尺寸精度高的机械加工了的非晶态金属薄带,进一步,能够得到将其层叠而得到的层叠体。According to the present invention, cracks and cracks generated in the amorphous metal ribbon can be suppressed during machining of the amorphous metal ribbon. Thereby, a machined amorphous metal ribbon with high dimensional accuracy can be obtained, and further, a laminate obtained by laminating them can be obtained.

附图说明Description of drawings

图1是本发明中使用的加工装置的示意图。Fig. 1 is a schematic diagram of a processing apparatus used in the present invention.

图2是本发明中使用的其它加工装置的示意图。Figure 2 is a schematic diagram of another processing apparatus used in the present invention.

图3是本发明中使用的其它加工装置的示意图。Fig. 3 is a schematic diagram of another processing apparatus used in the present invention.

图4是本发明中使用的其它加工装置的示意图。Figure 4 is a schematic diagram of another processing apparatus used in the present invention.

图5是判断为合格的、没有裂纹及裂缝的机械加工后的非晶态金属薄带的示意图。Fig. 5 is a schematic diagram of a mechanically processed amorphous metal strip that is judged as acceptable and has no cracks or cracks.

图6是判断为不合格的、有裂纹及裂缝的机械加工后的非晶态金属薄带的示意图。FIG. 6 is a schematic diagram of a machined amorphous metal strip that is judged to be unacceptable and has cracks and cracks.

图7是表示实施方式中使用的非晶态金属薄带的软磁特性的BH曲线。FIG. 7 is a BH curve showing the soft magnetic properties of the amorphous metal ribbon used in the embodiment.

图8是将图7的横轴的一部分放大后的图。FIG. 8 is an enlarged view of a part of the horizontal axis in FIG. 7 .

图9是实施例1的非晶态金属薄带(表1No.2)的加工面的照片。FIG. 9 is a photograph of the processed surface of the amorphous metal ribbon (Table 1 No. 2) of Example 1. FIG.

图10是图9的放大照片。FIG. 10 is an enlarged photograph of FIG. 9 .

图11是图10的示意图。FIG. 11 is a schematic diagram of FIG. 10 .

图12是比较用的非晶态金属薄带(表1No.8)的加工面的照片。Fig. 12 is a photograph of the processed surface of an amorphous metal ribbon (Table 1 No. 8) for comparison.

图13是图12的放大照片。FIG. 13 is an enlarged photograph of FIG. 12 .

图14是图13的示意图。FIG. 14 is a schematic diagram of FIG. 13 .

图15是实施例4的非晶态金属薄带的加工面的照片。FIG. 15 is a photograph of the processed surface of the amorphous metal ribbon of Example 4. FIG.

图16是图15的示意图。FIG. 16 is a schematic diagram of FIG. 15 .

图17是其它比较用的非晶态金属薄带的加工面的照片。Fig. 17 is a photograph of the processed surface of another amorphous metal ribbon for comparison.

图18是图17的示意图。FIG. 18 is a schematic diagram of FIG. 17 .

具体实施方式Detailed ways

通过实施方式对本发明进行具体说明,不过本发明并不限定于这些实施方式。Although the present invention has been specifically described through embodiments, the present invention is not limited to these embodiments.

本发明的实施方式是非晶态金属薄带的加工方法,An embodiment of the present invention is a method of processing a thin strip of amorphous metal,

在使上述非晶态金属薄带振动后进行机械加工,或一边使其振动一边进行机械加工。Machining is performed after vibrating the above-mentioned amorphous metal thin strip, or while vibrating.

非晶态金属薄带是断裂韧性极高的材料。因此,当在机械加工中在薄带开始进行断裂时,在断裂裂隙的前端产生大的塑性变形,其结果是,在非晶态金属薄带与加工工具之间产生大的冲击。此外,非晶态金属薄带如上所述,其硬度极高,因此容易因该冲击而在裁切部位产生裂纹及裂缝。特别是在加工为复杂的形状的情况下,容易在曲率小的角部等产生裂纹及裂缝。Thin ribbons of amorphous metals are materials with extremely high fracture toughness. Therefore, when the ribbon starts to break during machining, a large plastic deformation occurs at the tip of the fracture crack, and as a result, a large impact occurs between the amorphous metal ribbon and the processing tool. In addition, since the amorphous metal thin strip has extremely high hardness as described above, it is easy to cause cracks and cracks in the cut portion due to the impact. In particular, when processed into a complicated shape, cracks and cracks tend to occur at corners with small curvatures and the like.

但是,在本发明中,发现能够通过采用上述的加工方法来抑制该问题。However, in the present invention, it was found that this problem can be suppressed by adopting the above-mentioned processing method.

以下,对得到本发明的效果的机制进行推测。Hereinafter, the mechanism by which the effects of the present invention are obtained is estimated.

一般而言,玻璃的裁切多采用在表面形成划痕,主要为以划痕为起点,使裂隙传播的弹性断裂的加工方法。整个玻璃的原子的排列以共价电子耦合为主,由于玻璃任一部位都是硬的,所以能够采用上述的加工方法。Generally speaking, the cutting of glass mostly adopts the processing method of forming scratches on the surface, mainly starting from the scratches, and making the cracks propagate through the elastic fracture processing method. The atomic arrangement of the whole glass is dominated by covalent electronic coupling, and since any part of the glass is hard, the above-mentioned processing method can be used.

正如非晶态金属薄带还被称为金属玻璃那样,与玻璃相同,原子的排列不规则。不过,与一般的玻璃不同,过渡性金属彼此(例如Fe-Fe间)的耦合形态主要为金属耦合,不过在含有半金属(准金属元素)的耦合中成为共价电子耦合,按薄带的原子层级根据场所的不同而硬度不同。此外,在金属(合金)内,存在大量存在有被称为自由体积(自由容积、freevolume)的原子的空间(晶相中的晶格缺陷),借助于这些自由体积,原子能够移动,因此容许大的塑性变形。另一方面,薄带的表面不存在自由体积,具有非常硬的特征。因此,推测非晶态金属薄带难以应用于与玻璃相同的加工方法,而需要利用剪切变形进行机械加工。Just as an amorphous metal ribbon is also called a metallic glass, the arrangement of atoms is irregular like glass. However, unlike ordinary glasses, the coupling form of transition metals (such as between Fe-Fe) is mainly metal coupling, but in the coupling containing semi-metals (metalloid elements), it becomes covalent electronic coupling. The atomic level varies in hardness depending on the location. In addition, in metals (alloys), there are a large number of spaces (lattice defects in the crystal phase) in which atoms called free volumes (free volumes) exist. large plastic deformation. On the other hand, the surface of thin ribbons has no free volume and is characterized by very rigidity. Therefore, it is presumed that the thin amorphous metal ribbon is difficult to be applied to the same processing method as glass, and mechanical processing using shear deformation is required.

因此,本发明的发明人想到在使非晶态金属薄带振动后进行机械加工、或一边使其振动一边进行机械加工的加工方法。此处,一边使非晶态金属薄带振动一边进行机械加工还包括一边使加工工具振动一边对非晶态金属薄带进行机械加工。Therefore, the inventors of the present invention conceived of a machining method in which the amorphous metal ribbon is vibrated and then machined, or is vibrated while being machined. Here, machining the amorphous metal strip while vibrating also includes machining the amorphous metal strip while vibrating a processing tool.

认为上述的加工方法会得到(1)~(3)的效果。The above-mentioned processing method is considered to obtain the effects of (1) to (3).

(1)通过使非晶态金属薄带振动,能够提高非晶态金属薄带的脆性。因此,通过在振动后进行机械加工,能够对不使其振动的加工对象提高加工性。(1) By vibrating the amorphous metal ribbon, the brittleness of the amorphous metal ribbon can be improved. Therefore, by performing machining after vibrating, it is possible to improve the workability of a machining object that is not vibrated.

(2)通过使非晶态金属薄带振动,能够提高非晶态金属薄带的脆性。因此,通过一边使加工工具振动一边进行机械加工,即,一边使非晶态金属薄带振动一边进行机械加工,能够对不使其振动的加工对象提高加工性。(2) By vibrating the amorphous metal ribbon, the brittleness of the amorphous metal ribbon can be improved. Therefore, by performing machining while vibrating the machining tool, that is, performing machining while vibrating the amorphous metal thin strip, it is possible to improve the processability of a machining object that is not vibrated.

(3)通过一边使非晶态金属薄带振动一边进行机械加工,在非晶态金属薄带与加工工具抵接时相对地振动,因此以与研磨非晶态金属薄带的硬的表面相同的状态开始机械加工,能够实现高精度的加工。另外,之后通过机械加工,薄带的内部被剪切变形。(3) By performing machining while vibrating the amorphous metal ribbon, the amorphous metal ribbon relatively vibrates when it comes into contact with the processing tool, so that the hard surface of the amorphous metal ribbon is polished in the same manner. The state starts machining, and can realize high-precision machining. In addition, the inside of the ribbon is sheared and deformed by machining thereafter.

另外,在使用锋利的裁切刀片作为加工工具的情况下,通常裁切刀片压靠于被加工物,在该状态下使其相对地移动而裁切。在这种情况下,需要使裁切刀片与被加工物在规定的方向上移动规定的距离。此外,曲线和复杂形状的加工极为困难。In addition, when a sharp cutting blade is used as a processing tool, the cutting blade is usually pressed against the workpiece and relatively moved in this state to cut. In this case, it is necessary to move the cutting blade and the workpiece by a predetermined distance in a predetermined direction. In addition, the machining of curves and complex shapes is extremely difficult.

在如本发明那样利用振动的情况下,已知裁切刀片的刀尖部分为微观上的锯齿状,当这样的裁切刀片与非晶态金属薄带相对地进行振动时,即使不使被加工物与裁切刀片相对地长距离移动,也能够在被加工物的表面产生切口。In the case of using vibration as in the present invention, it is known that the tip of the cutting blade is microscopically serrated. The workpiece and the cutting blade relatively move over a long distance, and an incision can be made on the surface of the workpiece.

此外,本发明作为其它次要的效果,能够期待可以延长加工工具的寿命的效果。由于抑制压入速度,在硬的条带表面敲打时的冲击大幅降低。In addition, as another secondary effect of the present invention, the effect of prolonging the life of the machining tool can be expected. By suppressing the pressing speed, the impact when hitting on a hard strip surface is greatly reduced.

另外,在本发明中,机械加工是指使用加工工具、工作机械加工被加工物的、已知的加工方法。例如,冲孔加工、剪切加工、裁切加工、切缝加工等。In addition, in the present invention, machining refers to a known machining method in which a workpiece is machined using a machining tool or a working machine. For example, punching processing, shearing processing, cutting processing, slitting processing, etc.

以下,对具体的非晶态金属薄带的加工方法进行说明。Hereinafter, a specific method of processing the amorphous metal ribbon will be described.

在本发明的实施方式中,上述非晶态金属薄带具有1ppm以上的饱和磁致伸缩,上述振动能够为上述非晶态金属薄带的磁致伸缩引起的振动。In an embodiment of the present invention, the amorphous metal ribbon has a saturation magnetostriction of 1 ppm or more, and the vibration may be vibration caused by the magnetostriction of the amorphous metal ribbon.

该加工方法的特征在于,不使非晶态金属薄带因来自外部的应力而振动,而是施加交流磁场,通过磁致伸缩使薄带振动。通过这样进行振动,能够容易地仅使非晶态金属薄带振动。因此,通过使加工工具振动,能够以小的能量使被加工物振动。此外,因为非晶态金属薄带自身成为振动源,所以能够可靠地使其振动,能够提高裂纹及裂缝的抑制效果。即,在加工在其间夹着树脂的非晶态金属薄带的层叠体的情况下等,在利用来自外部的应力使其振动的情况下存在振动被树脂吸收,在层叠方向上不给予内侧的非晶态金属薄带以充分的振动的可能性,不过即使是这样的被加工物,也容易使非晶态金属薄带振动,得到本发明的裂纹及裂缝的抑制效果。This processing method is characterized in that the amorphous metal ribbon is not vibrated by external stress, but an alternating magnetic field is applied to vibrate the ribbon by magnetostriction. By vibrating in this way, only the amorphous metal ribbon can be easily vibrated. Therefore, by vibrating the processing tool, the workpiece can be vibrated with a small amount of energy. In addition, since the amorphous metal ribbon itself becomes a vibration source, it can be reliably vibrated, and the effect of suppressing cracks and cracks can be enhanced. That is, in the case of processing a laminated body of amorphous metal thin strips with resin sandwiched therebetween, etc., in the case of vibrating with stress from the outside, there is a possibility that the vibration is absorbed by the resin and is not given to the inside in the lamination direction. The amorphous metal ribbon may vibrate sufficiently, but even such a workpiece can easily vibrate the amorphous metal ribbon to obtain the crack and crack suppression effect of the present invention.

此外,该加工方法的特征在于,使非晶态金属薄带向多个方向振动。在本实施方式中,因为通过磁致伸缩使非晶态金属薄带振动,所以在施加磁场的方向上产生压缩·膨胀引起的振动,且在施加磁场的方向的垂直方向上同时产生膨胀·压缩引起的振动发生。即,无论加工工具与非晶态金属薄带在怎样的方向接触,与单一方向的振动相比,均成为两者稳定地相对滑动的状态,因此容易得到裂纹及裂缝的抑制效果。In addition, this processing method is characterized in that the amorphous metal thin strip is vibrated in multiple directions. In this embodiment, since the thin amorphous metal ribbon is vibrated by magnetostriction, vibration due to compression and expansion occurs in the direction of the applied magnetic field, and expansion and compression simultaneously occur in the direction perpendicular to the direction of the applied magnetic field. The resulting vibration occurs. That is, regardless of the direction in which the processing tool and the amorphous metal ribbon are in contact, they are in a state of relatively sliding relative to each other more stably than in a single direction of vibration, and therefore the effect of suppressing cracks and cracks can be easily obtained.

此外,该加工方法与现有的机械加工相比加工更容易。以下说明其理由。In addition, this processing method is easier to process than existing mechanical processes. The reason for this will be described below.

大多数的非晶态金属薄带,从工业上的生产率的观点出发,多通过轧辊淬火制作。轧辊淬火是向高导热率的金属制(例如Cu合金)的轧辊滴下溶融状态的液体金属,使其紧贴而使其急速地凝固的方法。因为能够得到1×105~1×107℃/s左右的极高的冷却速度,所以轧辊淬火作为非晶态金属薄带的铸造方法被广泛使用。Most amorphous metal thin strips are produced by roll quenching from the viewpoint of industrial productivity. Roll quenching is a method in which molten liquid metal is dripped onto a roll made of a metal with high thermal conductivity (for example, a Cu alloy), and brought into close contact to solidify rapidly. Roll quenching is widely used as a casting method for amorphous metal strips because extremely high cooling rates of about 1×10 5 to 1×10 7 °C/s can be obtained.

但是,由于以极短时间将熔融金属凝固,所以反映出部分冷却速度的不均匀性,薄带的表面容易产生凹凸。在将这些薄带层叠而要同时打孔的情况下,其中的1个薄带表面的凸部容易与对向的薄带表面相接而不易在面内方向滑动,因此虽然容易沿加工工具的刀片的形状被加工,但是另一方面,凹部因为容易产生滑动,所以来自加工工具的应力分散,不易沿加工工具的刀片的形状被加工。However, since the molten metal is solidified in an extremely short time, the unevenness of the partial cooling rate is reflected, and the surface of the ribbon tends to have unevenness. When these thin strips are stacked to punch holes at the same time, the convex portion on the surface of one of the thin strips is likely to be in contact with the opposite thin strip surface and is not easy to slide in the in-plane direction. The shape of the blade is machined, but on the other hand, since the concave portion tends to slip, the stress from the machining tool is dispersed, and it is difficult to be machined along the shape of the blade of the machining tool.

特别是,非晶态金属薄带因为硬度高,所以在进行机械加工时,需要将与加工工具的相对速度加速,非晶态金属薄带以被撕扯的方式断裂,由此产生从裁切线上脱离的缺陷。In particular, because of the high hardness of the amorphous metal strip, it is necessary to accelerate the relative speed with the processing tool during mechanical processing, and the amorphous metal strip is broken in a manner of being torn, resulting in a loss from the cutting line. detachment defect.

在本实施方式的非晶态金属薄带的加工方法中,因为以薄带振动的状态被机械加工,所以两者相对且积极地移动,由此,能够从加工工具所抵接的部位产生细小的切口,并以此处为起点推进剪切变形。因此,薄带的有凹部处也通过周围的约束较强之处的约束力而被固定,使得裁切变得容易。In the method for processing an amorphous metal strip according to this embodiment, since the strip is machined in a vibrating state, both of them move positively and relative to each other, thereby generating fine grains from the portion abutted by the processing tool. , and use this as a starting point to advance the shear deformation. Therefore, the concave portion of the thin strip is also fixed by the binding force of the surrounding strong binding force, so that cutting becomes easy.

在本实施方式中,使用饱和磁致伸缩为1ppm以上的非晶态金属薄带。如果饱和磁致伸缩不到1ppm,则不产生充分的振动,不易得到本发明的效果。饱和磁致伸缩优选为3ppm以上,更优选为5ppm以上,更优选为10ppm以上,更优选为15ppm以上。In this embodiment, an amorphous metal ribbon having a saturation magnetostriction of 1 ppm or more is used. If the saturation magnetostriction is less than 1 ppm, sufficient vibration will not be generated, and it will be difficult to obtain the effect of the present invention. The saturation magnetostriction is preferably 3 ppm or more, more preferably 5 ppm or more, more preferably 10 ppm or more, still more preferably 15 ppm or more.

上述振动优选其频率为1Hz以上500kHz以下。如果频率不到1Hz,或者超过500kHz,则难以得到裂纹及裂缝的抑制效果。The above-mentioned vibration preferably has a frequency of not less than 1 Hz and not more than 500 kHz. If the frequency is less than 1 Hz or exceeds 500 kHz, it will be difficult to obtain the effect of suppressing cracks and fissures.

频率的下限值优选为10Hz,更优选为100Hz,更优选为1kHz。频率的上限值优选为400kHz,更优选为300kHz,更优选为80kHz,更优选为60kHz,更优选为40kHz。The lower limit of the frequency is preferably 10 Hz, more preferably 100 Hz, and still more preferably 1 kHz. The upper limit of the frequency is preferably 400 kHz, more preferably 300 kHz, more preferably 80 kHz, more preferably 60 kHz, still more preferably 40 kHz.

上述振动优选通过对上述非晶态金属薄带施加1A/m以上的交流磁场而产生。如果交流磁场的下限值不到1A/m,则难以得到裂纹及裂缝的抑制效果。The above-mentioned vibration is preferably generated by applying an AC magnetic field of 1 A/m or more to the above-mentioned amorphous metal ribbon. If the lower limit of the AC magnetic field is less than 1 A/m, it will be difficult to obtain cracks and crack suppression effects.

交流磁场的下限值优选为10A/m,更优选为30A/m,更优选为70A/m,更优选为100A/m,更优选为130A/m。The lower limit of the AC magnetic field is preferably 10A/m, more preferably 30A/m, more preferably 70A/m, more preferably 100A/m, and more preferably 130A/m.

此外,上述非晶态金属薄带为长条(长尺寸)的带状,能够将上述非晶态金属薄带一边向上述长条的方向运送一边进行机械加工。另外,在一边运送一边进行机械加工时,还能够在进行机械加工时停止非晶态金属薄带的移动,在机械加工后,再开始进行移动,连续地进行机械加工。In addition, the thin amorphous metal strip is in the shape of a long (elongated) strip, and can be machined while conveying the thin amorphous metal strip in the direction of the long strip. In addition, when performing machining while conveying, it is also possible to stop the movement of the amorphous metal thin strip during the machining, and then restart the movement after the machining, so that the machining can be performed continuously.

已知运送中的薄带容易断裂。在通过来自外部的应力而使薄带振动的情况下,担心运送中的薄带容易以施加应力的场所为中心进一步断裂。另一方面,在通过磁致伸缩使之振动的情况下,磁通量沿非晶态金属薄带的面内方向流动,不易产生局部的内部应力,因此与从外部施加应力使其振动的情况相比,能够抑制运送中的薄带断裂。Ribbons in transit are known to break easily. When the ribbon is vibrated by external stress, there is a concern that the ribbon during transportation is likely to be further broken around the place where the stress is applied. On the other hand, in the case of vibrating by magnetostriction, the magnetic flux flows in the in-plane direction of the amorphous metal ribbon, and local internal stress is less likely to be generated, so compared with the case of vibrating by applying stress from the outside , can suppress ribbon breakage during transportation.

另外,本发明的被加工物的对象限定为非晶态金属薄带,但是在本实施方式的加工方法中,并不限定于此,即使非晶态金属薄带以外的具有磁致伸缩的材料,也能够获得裂纹及裂缝的抑制效果。In addition, the object of the processed object of the present invention is limited to the amorphous metal ribbon, but in the processing method of the present embodiment, it is not limited thereto, and even materials having magnetostriction other than the amorphous metal ribbon , can also obtain the inhibitory effect of cracks and cracks.

即,作为其它发明,能够提供一种一边对金属薄带或加工中使用的加工工具的至少一者施加振动一边进行机械加工的金属薄带的加工方法,其中,That is, as another invention, it is possible to provide a method of machining a thin metal strip that is machined while applying vibration to at least one of a thin metal strip or a processing tool used for processing, wherein

通过使得上述金属薄带具有1ppm以上的饱和磁致伸缩,上述振动为上述金属薄带的磁致伸缩引起的振动,而具有与本发明相同的效果。By making the metal ribbon have a saturation magnetostriction of 1 ppm or more, the vibration is vibration caused by the magnetostriction of the metal ribbon, thereby having the same effect as the present invention.

根据上述的非晶态金属薄带的加工方法,得到以下的实施方式的非晶态金属薄带。According to the above-mentioned processing method of the amorphous metal ribbon, the amorphous metal ribbon of the following embodiment is obtained.

本实施方式的非晶态金属薄带在薄带的加工面具有通过机械加工形成的剪切面,在上述加工面,薄带表面的塌边面侧的轮廓为波纹型。其中,加工面在冲孔加工和裁切加工中相当于被打孔的面(侧面)和被裁切的面(裁切面)。The amorphous metal ribbon according to the present embodiment has a sheared surface formed by machining on the processed surface of the ribbon, and on the processed surface, the contour of the ribbon surface on the side of the sagging surface is corrugated. Among them, the processing surface corresponds to a punched surface (side surface) and a cut surface (cut surface) in punching processing and cutting processing.

具体而言,波纹型的轮廓能够以平均0.1~20μm的周期具有凹凸。这样,推测凹凸以0.1~20μm的周期存在的理由如下。在该磁致伸缩振动法中,将磁场的极性按几十kHz的周期转换。即,以高频率转换正的磁化状态和负的磁化状态。在磁化状态下磁致伸缩也变大,在磁化为零的状态下磁致伸缩也成为零。该高速的磁化反转通过磁壁移动引起,磁壁上成为磁致伸缩最小之处。磁畴宽度(是磁壁与磁壁的间隔,为磁壁移动距离的大约2倍)为0.2~40μm,以能够追随高速的磁化反转。设想通过在被刀片从上表面按压的状态下,使得体积与周围不同的磁壁移动,如同成为刀片呈锯齿状移动的状态。凹凸的平均的周期的测定方法是将相邻的凹部的最深部的间隔至少测定5处,测定其间隔的平均值的方法。另外,凹凸以按凹部与凸部的薄带的厚度方向的高度具有0.3μm以上的差者为一个凹凸。Specifically, the corrugated profile can have irregularities at an average period of 0.1 to 20 μm. In this way, it is estimated that the reason why the unevenness exists at a period of 0.1 to 20 μm is as follows. In this magnetostrictive vibration method, the polarity of the magnetic field is switched at a cycle of several tens of kHz. That is, the positive magnetization state and the negative magnetization state are switched at a high frequency. Magnetostriction also increases in a magnetized state, and becomes zero in a state where magnetization is zero. This high-speed magnetization reversal is caused by the movement of the magnetic wall, and the magnetostriction becomes the smallest on the magnetic wall. The magnetic domain width (the distance between the magnetic walls, which is about twice the moving distance of the magnetic walls) is 0.2 to 40 μm in order to be able to follow the high-speed magnetization reversal. It is assumed that by moving the magnetic wall whose volume is different from that of the surroundings while being pressed by the blade from the upper surface, it is assumed that the blade moves in a zigzag manner. The method of measuring the average period of unevenness is a method of measuring at least five intervals between the deepest portions of adjacent recesses and measuring the average value of the intervals. In addition, asperities have a difference of 0.3 μm or more in the thickness direction of the thin strips between the concavities and convexities as one concavity and convexity.

此外,本实施方式的非晶态金属薄带在加工面,剪切面有时占40%以上的面积。剪切面有时占50%以上,有时进一步占60%以上,有时更进一步占65%以上的面积。另外,加工面的剪切面所占的面积的数值能够通过以下的测定方法计算出来。首先,在加工面的任意多处,测定薄带的厚度T(T1、T2、……Tn)和剪切面的宽度W(w1、w2、……wn)。之后,由T1至Tn的总和Tsum和w1至w2的总和Wsum,计算Wsum/Tsum×100(%)。在中本实施方式,在加工面的宽度450μm的范围内令任意的测定处为5处,计算出上述数值。In addition, in the amorphous metal ribbon of this embodiment, the processed surface and the sheared surface may occupy 40% or more of the area. The shear plane may occupy 50% or more of the area, may further occupy 60% or more, and may further occupy 65% or more of the area. In addition, the numerical value of the area occupied by the sheared surface of the processed surface can be calculated by the following measurement method. First, the thickness T (T1, T2, ... Tn) of the thin strip and the width W (w1, w2, ... wn) of the sheared surface are measured at arbitrary positions on the processed surface. After that, Wsum/Tsum×100(%) is calculated from the sum Tsum of T1 to Tn and the sum Wsum of w1 to w2. In the present embodiment, the above numerical value was calculated by setting arbitrary measurement points to five within the range of the width of the processed surface of 450 μm.

此外,本实施方式的非晶态金属薄带在加工面,相对于薄带表面的塌边面侧的轮廓,剪切面的塌边面侧的轮廓有时具有相关的波纹型。相关的波纹型是指,凹凸的周期(相邻的凹部的最深部的间隔)的变动在两个轮廓双方同样地出现。这样,在两个波纹型的轮廓双方存在相关的理由推测如下。如上所述,认为该周期性的起源依赖于磁壁间的距离。此处可见的磁致伸缩为线磁致伸缩,与磁壁附近的周围不同的磁致伸缩状态的区域沿铅直方向扩展,在形成塌边和断口处,即刀片的正下方,反复出现同样的周期的体积变动,因此认为两个轮廓双方酷似。In addition, in the amorphous metal ribbon of this embodiment, the profile on the sag side of the sheared surface may have a corrugated shape relative to the profile on the sag side of the ribbon surface on the processed surface. The corrugated type means that the fluctuation of the period of concavo-convexity (the interval between the deepest parts of adjacent concave parts) appears similarly on both contours. In this way, the reason why there is a correlation between the two corrugated profiles is presumed as follows. As mentioned above, the origin of this periodicity is considered to depend on the distance between the magnetic walls. The magnetostriction seen here is linear magnetostriction, and the area of the magnetostrictive state different from the surrounding area near the magnetic wall expands in the vertical direction, and the same phenomenon occurs repeatedly at the place where the sag and fracture are formed, that is, directly below the blade. Periodic volume changes, so it is considered that both sides of the two contours are exactly similar.

关于本发明的非晶态金属薄带的加工方法,对其它实施方式进行说明。在该实施方式中,使用对于非晶态金属薄带,对利用加工工具局部地施加了振动的部分进行机械加工的方式。Another embodiment will be described regarding the processing method of the amorphous metal ribbon of the present invention. In this embodiment, a system is used in which a part of an amorphous metal thin strip is machined to which vibration is locally applied by a processing tool.

根据该实施方式,因为对提高了脆性的部分进行机械加工,所以能够提高可加工性,容易得到裂纹及裂缝的抑制效果。According to this embodiment, since the portion with increased brittleness is machined, the workability can be improved, and the effect of suppressing cracks and cracks can be easily obtained.

该实施方式,例如加工工具包括能够夹持非晶态金属薄带的上下表面的打孔机和打孔架,In this embodiment, for example, the processing tool includes a puncher and a punching frame capable of clamping the upper and lower surfaces of the amorphous metal strip,

上述打孔机和打孔架的至少一者能够在上述非晶态金属薄带的厚度方向滑动,At least one of the above-mentioned punching machine and the punching frame can slide in the thickness direction of the above-mentioned amorphous metal thin strip,

能够采用如下的工序:通过上述打孔机和打孔架夹持非晶态金属薄带的上下表面,且至少一者在上述厚度方向上振动,在非晶态金属薄带的位于上述打孔机和打孔架的滑动部的部分对非晶态金属薄带施加振动,利用上述打孔机对通过振动施加了反复疲劳的部分实施冲孔加工。The following process can be adopted: the upper and lower surfaces of the amorphous metal thin strip are clamped by the above-mentioned punching machine and the punching frame, and at least one of them vibrates in the above-mentioned thickness direction, and the above-mentioned punching hole is located on the amorphous metal thin strip. Vibration was applied to the thin strip of amorphous metal by the part of the sliding part of the punching machine and the punching frame, and punching was performed on the part subjected to repeated fatigue by the vibration with the above-mentioned punching machine.

根据该实施方式,得到以下的非晶态金属薄带。According to this embodiment, the following amorphous metal ribbon is obtained.

本实施方式的非晶态金属薄带在薄带的加工面具有通过机械加工形成的剪切面,在机械加工成的薄带的加工面,断裂面占50%以上的面积。断裂面有时占60%以上,进一步有时占65%的面积。The amorphous metal ribbon of this embodiment has a sheared surface formed by machining on the processed surface of the ribbon, and the fractured surface occupies 50% or more of the area of the machined ribbon processed surface. The fracture surface may occupy more than 60% of the area, and may further occupy 65% of the area.

另外,加工面的断裂面所占的面积的数值能够通过以下的测定方法计算出来。首先,在加工面的任意多处,测定薄带的厚度T(T1、T2、……Tn)和断裂面的宽度W(W1、W2、……Wn)。之后,由T1至Tn的总和Tsum和W1至W2的总和Wsum,计算Wsum/Tsum×100(%)。在中本实施方式,在加工面的宽度450μm的范围内令任意的测定处为5处,计算出上述数值。In addition, the numerical value of the area occupied by the fracture surface of the processed surface can be calculated by the following measurement method. First, the thickness T (T1, T2, ... Tn) of the thin strip and the width W (W1, W2, ... Wn) of the fractured surface are measured at arbitrary places on the processed surface. After that, from the sum Tsum of T1 to Tn and the sum Wsum of W1 to W2, Wsum/Tsum×100(%) is calculated. In the present embodiment, the above numerical value was calculated by setting arbitrary measurement points to five within the range of the width of the processed surface of 450 μm.

以下,对本实施方式中使用的非晶态金属薄带进行说明。Hereinafter, the amorphous metal ribbon used in this embodiment will be described.

非晶态金属薄带的制造手段没有特别限定。The method for producing the amorphous metal ribbon is not particularly limited.

列举一例,能够使用通过轧辊冷却制造的、以Fe为主成分的薄带。另外,主成分是指含有量最多的成分。As an example, it is possible to use a thin strip mainly composed of Fe produced by cooling the rolls. In addition, the main component refers to the component contained most.

本实施方式的非晶态金属薄带例如使用具有如下组成的材料:在令Fe、Si和B的合计量为100原子%时,Si为0原子%以上10原子%以下,B为10原子%以上20原子%以下,Fe占其余部分。For example, the amorphous metal ribbon of this embodiment uses a material having a composition in which Si is 0 atomic % or more and 10 atomic % or B is 10 atomic % when the total amount of Fe, Si, and B is 100 atomic %. Above 20 atomic %, Fe accounts for the rest.

当Si量和B量不在该范围时,通过轧辊冷却制造时难以成为非晶态合金,或量产性容易下降。作为添加物或者不可避杂质,还可以含有Mn、S、C、Al等,Fe、Si和B以外的元素。非晶态金属薄带优选具有上述的组成,为不具有晶体结构的非晶态(非晶),优选为软磁性体。另外,Si量优选为3原子%以上10原子%以下。此外,B量优选为10原子%以上15原子%以下。此外,对于Fe量,为了得到高的饱和磁通量密度Bs,优选为78原子%以上,进一步优选为79.5原子%以上,进一步优选为80原子%以上,进一步优选为81原子%以上。另外,非晶态金属薄带虽然能够含有不可避杂质,不过Fe、Si和B的合计的比例优选为95质量%以上,更优选为98质量%以上。另外,非晶态金属薄带还有时称为非晶合金薄带,还有时称为非晶态合金条带、软磁性非晶态合金条带等。When the amount of Si and B is out of this range, it is difficult to become an amorphous alloy during production by roll cooling, or the mass productivity tends to decrease. Elements other than Fe, Si, and B, such as Mn, S, C, and Al, may be contained as additives or unavoidable impurities. The amorphous metal ribbon preferably has the above composition, is amorphous (amorphous) without a crystalline structure, and is preferably a soft magnetic body. In addition, the amount of Si is preferably not less than 3 atomic % and not more than 10 atomic %. In addition, the amount of B is preferably not less than 10 atomic % and not more than 15 atomic %. In addition, the amount of Fe is preferably 78 atomic % or more, more preferably 79.5 atomic % or more, still more preferably 80 atomic % or more, and still more preferably 81 atomic % or more in order to obtain a high saturation magnetic flux density Bs. In addition, although the amorphous metal ribbon may contain inevitable impurities, the total ratio of Fe, Si, and B is preferably 95% by mass or more, more preferably 98% by mass or more. In addition, the amorphous metal thin strip is sometimes called an amorphous alloy thin strip, and sometimes called an amorphous alloy strip, a soft magnetic amorphous alloy strip, and the like.

上述组成的非晶态金属薄带的饱和磁致伸缩为5ppm以上,且维氏硬度HV为700以上。The amorphous metal ribbon having the above composition has a saturation magnetostriction of 5 ppm or more and a Vickers hardness HV of 700 or more.

此外,还可以使用能够纳米结晶的非晶态金属薄带。作为能够纳米结晶的非晶态金属薄带,能够使用Fe基的薄带。具体而言,作为Fe基的非晶态合金条带,可以使用由下述的一般式:(Fe1-aMa)100-x-y-z-α-β-γCuxSiyBzM’αM”βXγ(原子%)(其中,M为Co和/或Ni,M’为选自Nb、Mo、Ta、Ti、Zr、Hf、V、Cr、Mn和W的至少1种元素,M”为选自Al、铂族元素、Sc、稀土类元素、Zn、Sn、Re的至少1种元素,X为选自C、Ge、P、Ga、Sb、In、Be、As的至少1种元素,a、x、y、z、α、β和γ分别满足0≤a≤0.5、0.1≤x≤3、0≤y≤30、0≤z≤25、5≤y+z≤30、0≤α≤20、0≤β≤20和0≤γ≤20。)所表示的组成的合金。优选上述一般式中,a、x、y、z、α、β和γ分别处在满足0≤a≤0.1、0.7≤x≤1.3、12≤y≤17、5≤z≤10、1.5≤α≤5、0≤β≤1和0≤γ≤1的范围。In addition, thin ribbons of amorphous metals capable of nanocrystallization can also be used. As the amorphous metal ribbon capable of nanocrystallization, an Fe-based ribbon can be used. Specifically, as the Fe-based amorphous alloy ribbon, the following general formula can be used: (Fe 1-a M a ) 100-xyz-α-β-γ Cu x Si y B z M' α M" β X γ (atomic %) (wherein M is Co and/or Ni, M' is at least one element selected from Nb, Mo, Ta, Ti, Zr, Hf, V, Cr, Mn and W, M" is at least one element selected from Al, platinum group elements, Sc, rare earth elements, Zn, Sn, Re, and X is at least one element selected from C, Ge, P, Ga, Sb, In, Be, As elements, a, x, y, z, α, β and γ respectively satisfy 0≤a≤0.5, 0.1≤x≤3, 0≤y≤30, 0≤z≤25, 5≤y+z≤30, 0 ≤ α ≤ 20, 0 ≤ β ≤ 20 and 0 ≤ γ ≤ 20.) The alloy represented by the composition. Preferably, in the above general formula, a, x, y, z, α, β and γ respectively satisfy 0≤a≤0.1, 0.7≤x≤1.3, 12≤y≤17, 5≤z≤10, 1.5≤α The ranges of ≤5, 0≤β≤1 and 0≤γ≤1.

上述组成的非晶态金属薄带的饱和磁致伸缩为5ppm以上,且维氏硬度HV为700以上。The amorphous metal ribbon having the above composition has a saturation magnetostriction of 5 ppm or more and a Vickers hardness HV of 700 or more.

通过对上述的能够纳米结晶的非晶态金属薄带在结晶开始温度以上进行热处理,使非晶态金属薄带纳米结晶。The amorphous metal ribbon is nano-crystallized by heat-treating the above-mentioned amorphous metal ribbon capable of nanocrystallization above the crystallization initiation temperature.

纳米结晶后的合金,其至少50体积%,进一步80体积%被按最大尺寸测定的粒径的平均为100nm以下的细微的晶粒所占据。此外,合金中细微晶粒以外的部分主要为非晶态。细微晶粒的比例还能够实质上为100体积%。In the nanocrystallized alloy, at least 50% by volume and further 80% by volume are occupied by fine crystal grains having an average particle diameter of 100 nm or less as measured by the largest dimension. In addition, the part other than the fine crystal grains in the alloy is mainly amorphous. The ratio of the fine crystal grains can also be substantially 100% by volume.

通过将这些组成的合金在熔点以上进行溶融,通过轧辊法淬火凝固,而能够得到长条状的非晶态金属薄带。An elongated amorphous metal ribbon can be obtained by melting alloys having these compositions at a melting point or higher and quenching and solidifying them by the roll method.

能够使用厚度为5μm以上70μm以下的非晶态金属薄带。如果厚度不到5μm,则非晶态金属薄带的机械强度不够,机械加工时的处理和向长条方向的连续的运送容易变得困难。厚度优选为15μm以上,更优选为20μm以上。另一方面,如果条带的厚度超过70μm,则根据组成,存在难以稳定地得到薄带中的非晶相的趋势。厚度优选为50μm以下,更优选为35μm以下,更优选为30μm以下。A thin amorphous metal ribbon having a thickness of 5 μm or more and 70 μm or less can be used. If the thickness is less than 5 μm, the mechanical strength of the amorphous metal ribbon is insufficient, and handling during machining and continuous conveyance in the elongated direction tend to become difficult. The thickness is preferably 15 μm or more, more preferably 20 μm or more. On the other hand, if the thickness of the ribbon exceeds 70 μm, depending on the composition, it tends to be difficult to stably obtain the amorphous phase in the thin ribbon. The thickness is preferably 50 μm or less, more preferably 35 μm or less, more preferably 30 μm or less.

对进行机械加工的实施方式的装置进行说明。The apparatus of embodiment which performs machining is demonstrated.

例如,能够使用图1、图2、图3中记载的装置。不过,在本发明中,能够使用的装置并不限定于此。For example, the apparatus described in FIG. 1 , FIG. 2 , and FIG. 3 can be used. However, in the present invention, devices that can be used are not limited thereto.

图1的装置是用于在实施方式的非晶态金属薄带的加工方法(一边通过磁致伸缩使具有磁致伸缩的非晶态金属薄带振动一边进行机械加工)中应用的装置的示意图。The apparatus in FIG. 1 is a schematic diagram of an apparatus used in the method of processing an amorphous metal ribbon (machining an amorphous metal ribbon having magnetostriction while vibrating it by magnetostriction) according to an embodiment. .

图1的装置包括非晶态金属薄带1、以向非晶态金属薄带1流动磁通量的方式卷绕的线圈2和能够对非晶态金属薄带1进行机械加工的加工工具6。线圈2流动被放大器4放大后的、流自交流电源3的交流电流。The apparatus in FIG. 1 includes a thin amorphous metal strip 1 , a coil 2 wound so as to flow a magnetic flux to the thin amorphous metal strip 1 , and a processing tool 6 capable of machining the thin amorphous metal strip 1 . The coil 2 flows an AC current from the AC power supply 3 amplified by the amplifier 4 .

在图1的实施方式中,长条的非晶态金属薄带1在周向上卷绕于至少外周侧具有柔软性的圆环状的线轴5。加工工具6是裁切刀片。加工工具6能够沿线轴5的径向移动,在向线轴侧移动时,裁切刀片的前端能够抵接在卷绕于线轴5的周面的非晶态金属薄带1。此外,以能够插入线轴5的外周侧的具有柔软性的材质而自线轴的外周面移动至内径侧的方式构成。In the embodiment shown in FIG. 1 , an elongated amorphous metal thin strip 1 is wound around an annular bobbin 5 having flexibility at least on the outer peripheral side in the circumferential direction. The processing tool 6 is a cutting blade. The processing tool 6 can move along the radial direction of the bobbin 5 , and when moving toward the bobbin side, the tip of the cutting blade can abut against the thin amorphous metal strip 1 wound around the peripheral surface of the bobbin 5 . In addition, it is configured to be able to be inserted into a flexible material on the outer peripheral side of the bobbin 5 to move from the outer peripheral surface of the bobbin to the radially inner side.

说明图1的装置的使用方法。通过向线圈2流动交流电流,在线圈的轴向上产生交流磁场,向配置在线圈的内部的非晶态金属薄带1流动交流磁通量,使非晶态金属薄带1磁致伸缩振动。通过维持该状态不变地将裁切刀片6的前端按压于非晶态金属薄带1的表面,对非晶态金属薄带1实施裁切、切缝、冲孔等机械加工。A method of using the device of FIG. 1 will be described. When an AC current is supplied to the coil 2, an AC magnetic field is generated in the axial direction of the coil, and an AC magnetic flux flows to the amorphous metal ribbon 1 disposed inside the coil, causing the amorphous metal ribbon 1 to vibrate magnetostrictively. By pressing the front end of the cutting blade 6 against the surface of the amorphous metal ribbon 1 while maintaining this state, mechanical processing such as cutting, slitting, and punching is performed on the amorphous metal ribbon 1 .

另外,在图1的实施方式中,卷绕于线轴的非晶态金属薄带1不需要为圆环状,也可以形成圆弧状。在这种情况下,也可以使用用于使流向非晶态金属薄带的磁通量回流的磁轭。In addition, in the embodiment shown in FIG. 1 , the thin amorphous metal ribbon 1 wound around the bobbin does not need to be annular, but may be arcuate. In this case, a yoke for recirculating the magnetic flux flowing to the thin strip of amorphous metal may also be used.

图2的装置与图1一样,是用于在实施方式的非晶态金属薄带的加工方法(一边使具有磁致伸缩的非晶态金属薄带磁致伸缩振动一边进行机械加工)中应用的其它装置的示意图。The apparatus of FIG. 2 is the same as that of FIG. 1, and is used in the processing method of the amorphous metal ribbon (machining the amorphous metal ribbon with magnetostriction while making the magnetostrictive vibration) in the embodiment. Schematic diagrams of other devices.

图2的装置与图1一样,包括非晶态金属薄带1、以向非晶态金属薄带1流动磁通量的方式卷绕的线圈2和能够对非晶态金属薄带1进行机械加工的加工工具。The device in Fig. 2 is the same as that in Fig. 1, comprising an amorphous metal strip 1, a coil 2 wound in such a way that a magnetic flux flows to the amorphous metal strip 1, and a device capable of machining the amorphous metal strip 1 Processing tools.

在图2的实施方式中,关于加工工具,图中6a为冲孔用的打孔机(puncher、穿孔机、冲孔机),6b为冲孔用的打孔架(punch frame、穿孔架、冲孔架)。长条的非晶态金属薄带1的一部分配置在能够利用加工工具6a、6b冲孔的位置。在图中,长条的非晶态金属薄带1从放卷轧辊7被放卷而运送至加工工具6a、6b。加工工具6a、6b对被运送的非晶态金属薄带1进行冲孔加工。由此,能够进行与使非晶态金属薄带1连续地运送同时进行的机械加工。In the embodiment of Fig. 2, regarding the processing tool, among the figure 6a is a puncher (puncher, puncher, puncher) for punching, and 6b is a punching frame (punch frame, punching frame, punching frame) for punching. punching frame). A part of the elongated amorphous metal thin strip 1 is arranged at a position where holes can be punched by the processing tools 6a and 6b. In the figure, the elongated amorphous metal thin strip 1 is unwound from the unwinding roll 7 and conveyed to the processing tools 6a, 6b. The processing tools 6a and 6b perform punching processing on the conveyed thin amorphous metal strip 1 . Thereby, machining can be performed simultaneously with continuously conveying the amorphous metal thin strip 1 .

在图中,线圈2以其轴向与非晶态金属薄带1的长条方向平行的方式形成。In the figure, the coil 2 is formed such that its axial direction is parallel to the longitudinal direction of the amorphous metal ribbon 1 .

交流电源3和放大器4为与图1相同的结构,省略说明。The AC power supply 3 and the amplifier 4 have the same structure as that of FIG. 1, and the description thereof will be omitted.

说明图2的装置的使用方法。与图1一样,通过向线圈2流动交流电流,在线圈的轴向上产生交流磁场,向配置在线圈的内部的非晶态金属薄带1流动交流磁通量,使非晶态金属薄带1磁致伸缩振动。通过维持该状态不变地使加工工具6a、6b滑动,进行冲孔加工。A method of using the device of FIG. 2 will be described. 1, by flowing an alternating current to the coil 2, an alternating magnetic field is generated in the axial direction of the coil, and an alternating magnetic flux flows to the amorphous metal ribbon 1 arranged inside the coil, so that the amorphous metal ribbon 1 is magnetized. stretching vibration. Punching is performed by sliding the processing tools 6a and 6b while maintaining this state.

另外,在图2的实施方式中,使用用于使流向非晶态金属薄带的磁通量回流的磁轭8。In addition, in the embodiment of FIG. 2 , the yoke 8 for recirculating the magnetic flux flowing to the amorphous metal ribbon is used.

图3的装置是用于在实施方式的非晶态金属薄带的加工方法(对于非晶态金属薄带,对利用加工工具局部地施加了振动的部分进行机械加工的加工方法)中应用的装置的示意图。施加了振动的部分由于反复疲劳而脆化。因此,机械加工变得容易。The apparatus of FIG. 3 is used in the processing method of the amorphous metal thin strip of the embodiment (the processing method of machining the portion of the amorphous metal thin strip to which vibration is locally applied by a processing tool) Schematic diagram of the device. The portion to which vibration is applied becomes brittle due to repeated fatigue. Therefore, machining becomes easy.

图3的装置包括非晶态金属薄带1和能够对非晶态金属薄带1进行机械加工的加工工具。加工工具包括能够分别夹持非晶态金属薄带的上下表面的打孔机8a、8b和打孔架9a、9b。The device in FIG. 3 includes an amorphous metal strip 1 and a processing tool capable of machining the amorphous metal strip 1 . The processing tools include punchers 8a, 8b and punching frames 9a, 9b capable of clamping the upper and lower surfaces of the amorphous metal thin strip, respectively.

说明图3的装置的使用方法。打孔机8a、8b和打孔架9a、9b均能够在非晶态金属薄带的厚度方向滑动。通过打孔机8a、8b和打孔架9a、9b分别夹持非晶态金属薄带1,且其至少一者在厚度方向上振动(在图3中打孔架9a、9b的箭头表示振动),在位于上述打孔机8a、8b和打孔架9a、9b的滑动部的部分对非晶态金属薄带施加振动,通过振动施加反复疲劳。之后,如图4所示那样,打孔机8a、8b向非晶态金属薄带的厚度方向移动,由此,非晶态金属薄带1在被施加反复疲劳的部位被实施冲孔加工。A method of using the device of FIG. 3 will be described. Both the punchers 8a, 8b and the punch frames 9a, 9b can slide in the thickness direction of the amorphous metal thin strip. Clamp amorphous metal strip 1 respectively by punching machine 8a, 8b and punching frame 9a, 9b, and at least one of it vibrates in thickness direction (in Fig. 3, the arrow of punching frame 9a, 9b represents vibration ), applying vibration to the amorphous metal thin strip at the part of the sliding part of the above-mentioned punches 8a, 8b and the punching frame 9a, 9b, and applying repeated fatigue through the vibration. Thereafter, as shown in FIG. 4 , the punches 8 a , 8 b are moved in the thickness direction of the amorphous metal strip 1 , whereby the amorphous metal strip 1 is punched at the portion subjected to repeated fatigue.

放卷轧辊7和非晶态金属薄带1为与图2相同的结构,省略说明。The unwinding roll 7 and the amorphous metal strip 1 have the same structure as that in Fig. 2, and the description thereof is omitted.

作为加工工具,除上述记载以外,例如还能够使用裁切用的裁切刀片、切缝加工用的切刀刀片等。As the processing tool, in addition to the above description, for example, a cutting blade for cutting, a cutting blade for slitting, and the like can be used.

作为对非晶态金属薄带或上述加工中使用的加工工具的至少一者施加振动的方式,除利用上述线圈的磁致伸缩振动以外,能够使用超声波发生装置等。超声波发生装置能够使用已知的结构,并没有特别限定。As a means of applying vibration to at least one of the amorphous metal thin strip and the processing tool used for the above-mentioned processing, an ultrasonic generator or the like can be used in addition to the magnetostrictive vibration of the above-mentioned coil. A known structure can be used for the ultrasonic generator, and it is not particularly limited.

在以上记载的非晶态金属薄带的加工方法中,还能够在非晶态金属薄带的至少一个面涂覆树脂,或粘贴树脂片的状态下,对非晶态金属薄带实施机械加工。In the method for processing the amorphous metal strip described above, the amorphous metal strip can also be mechanically processed by coating resin on at least one surface of the amorphous metal strip, or sticking a resin sheet. .

能够将根据以上记载的非晶态金属薄带的加工方法加工的非晶态金属薄带层叠,形成层叠体。The amorphous metal ribbons processed by the method for processing an amorphous metal ribbon described above can be stacked to form a laminate.

(实施例1)(Example 1)

利用图1中记载的装置,对非晶态金属薄带实施机械加工。具体而言,按以下的条件进行。A thin strip of amorphous metal was machined using the apparatus shown in FIG. 1 . Specifically, it was carried out under the following conditions.

非晶态金属薄带使用按25mm宽度切缝的薄带。As the amorphous metal thin strip, a thin strip slit with a width of 25 mm was used.

作为非晶态金属薄带,使用令Fe、Si和B为100原子%,Fe:82原子%,Si:4原子%,B:14原子%的组成的薄带。另外,Cu、Mn等不可避杂质为0.5质量%以下。As the amorphous metal ribbon, a ribbon having a composition of 100 atomic % of Fe, Si, and B, Fe: 82 atomic %, Si: 4 atomic %, and B: 14 atomic % was used. In addition, unavoidable impurities such as Cu and Mn are 0.5% by mass or less.

该非晶态金属薄带的厚度为20μm,饱和磁致伸缩为27ppm,维氏硬度HV为800。The thin amorphous metal ribbon had a thickness of 20 μm, a saturation magnetostriction of 27 ppm, and a Vickers hardness HV of 800.

该组成的非晶态金属薄带还已知作为软磁性材料具有高导磁率,磁化容易追随交流磁场而发生,借助磁化过程,使磁性体自身振动。The amorphous metal thin strip of this composition is also known as a soft magnetic material with high magnetic permeability, and magnetization easily occurs following an AC magnetic field, and the magnetic body vibrates by itself through the magnetization process.

作为加工工具6使用前端锋利的裁切刀片。A sharp cutting blade is used as the processing tool 6 .

线轴5使用纸管。纸管的外周侧具有柔软性,因此能够使裁切刀片的前端插入至比外径部更靠内周侧的位置。线轴的外径为100mm。Spool 5 uses paper tubes. Since the outer peripheral side of the paper tube has flexibility, the tip of the cutting blade can be inserted to a position closer to the inner peripheral side than the outer diameter portion. The outer diameter of the spool is 100mm.

将上述的切缝后的非晶态金属薄带1在该线轴的周向上卷绕2圈。卷绕后的非晶态金属薄带1的磁路长度为约0.314m。The above-mentioned slit amorphous metal thin strip 1 was wound twice in the circumferential direction of the bobbin. The magnetic path length of the wound amorphous metal strip 1 is about 0.314m.

线圈2的匝数为10。从交流电源3向放大器4输送10kHz~200kHz的交流电流,在放大器4将电流放大,以使得在线圈产生的交流磁场的最大值成为70A/m、130A/m的方式,在线圈2流动交流电流。The number of turns of the coil 2 is 10. An AC current of 10kHz to 200kHz is sent from the AC power supply 3 to the amplifier 4, and the current is amplified by the amplifier 4 so that the maximum value of the AC magnetic field generated in the coil becomes 70A/m or 130A/m, and an AC current flows in the coil 2 .

按上述条件,使非晶态金属薄带1磁致伸缩振动,并维持该状态不变地向裁切刀片6施加10kgf(大约以手臂轻按的100N)的载荷,将其前端按压于非晶态金属薄带1的表面。According to the above conditions, the amorphous metal thin strip 1 is magnetostrictively vibrated, and a load of 10kgf (approximately 100N lightly pressed by the arm) is applied to the cutting blade 6 while maintaining this state, and the front end is pressed against the amorphous metal strip 6. State metal strip 1 surface.

此外,作为比较,除不使磁致伸缩振动以外,与本实施方式1同样地进行机械加工。In addition, as a comparison, machining was performed in the same manner as in Embodiment 1 except that magnetostrictive vibration was not applied.

按上述的条件,确认出在非晶态金属薄带产生了何种程度的磁致伸缩。Under the above-mentioned conditions, it was confirmed to what extent magnetostriction occurred in the amorphous metal ribbon.

图7和图8是表示所使用的非晶态金属薄带的软磁性的B-H曲线,图8是将图7的横轴部分放大后的图。如图7所示,该非晶态金属薄带在800A/m的磁通量密度为接近饱和磁通量密度的B=1.5T。此外,根据图8所示可知,130A/m的磁通量密度为B=1.1T,该磁通量密度为饱和磁通量密度的约73.3%。由于该非晶态金属薄带的饱和磁致伸缩为27ppm,所以在对非晶态金属薄带施加130A/m的交流磁场的情况下,使其按通过27ppm×73.3%计算的、19.8ppm的磁致伸缩进行磁致伸缩振动。7 and 8 are B-H curves showing the soft magnetic properties of the amorphous metal ribbon used, and FIG. 8 is an enlarged view of the horizontal axis in FIG. 7 . As shown in FIG. 7 , the magnetic flux density of the amorphous metal strip at 800 A/m is B=1.5T which is close to the saturation magnetic flux density. In addition, as shown in FIG. 8 , the magnetic flux density of 130 A/m is B=1.1T, which is about 73.3% of the saturation magnetic flux density. Since the saturation magnetostriction of the amorphous metal strip is 27ppm, under the condition of applying an AC magnetic field of 130A/m to the amorphous metal strip, the magnetostriction of 19.8ppm is calculated by 27ppm×73.3%. Magnetostriction performs magnetostrictive vibration.

同样,当在对非晶态金属薄带施加70A/m的交流磁场的情况下进行计算时,使其按16ppm的磁致伸缩进行磁致伸缩振动。Similarly, when calculation is performed when an AC magnetic field of 70 A/m is applied to the amorphous metal ribbon, magnetostrictive vibration is performed at a magnetostriction of 16 ppm.

表1表示交流电源3的频率f、在线圈产生的最大的磁场强度H、外周侧的非晶态金属薄带的机械加工的合格率Out、内周侧的非晶态金属薄带的机械加工的合格率In。Table 1 shows the frequency f of the AC power supply 3, the maximum magnetic field strength H generated in the coil, the yield rate Out of the machining of the thin amorphous metal strip on the outer peripheral side, and the machining of the thin amorphous metal strip on the inner peripheral side. The qualification rate In.

另外,机械加工的合格率以图5所示那样的、未从裁切痕迹12产生裂纹及裂缝者为合格,以图6所示那样的、从裁切痕迹12产生裂纹10及裂缝11者为不合格。机械加工的实验次数为10次。In addition, the pass rate of mechanical processing is defined as those without cracks and cracks from the cut marks 12 as shown in FIG. failed. The number of experiments for machining is 10 times.

[表1][Table 1]

Nono f(kHz)f(kHz) H(A/m)H(A/m) Out(%)Out (%) In(%)In (%) 40℃以上有无发热Fever above 40°C 11 1010 130130 9090 9090 none 22 2020 130130 9090 100100 none 33 4040 130130 9090 100100 none 44 6060 130130 8080 8080 have 55 8080 130130 6060 8080 have 66 100100 130130 6060 9090 have 77 200200 7070 6060 9090 have 88 00 00 1010 5050 have

在不使非晶态金属薄带磁致伸缩振动地进行机械加工的No.8的测定结果中,外周侧的合格率仅为10%,内周侧的合格率也只有50%。In the measurement results of No. 8 in which the amorphous metal strip was machined without magnetostrictive vibration, the pass rate on the outer peripheral side was only 10%, and the pass rate on the inner peripheral side was only 50%.

与此相对,一边使非晶态金属薄带磁致伸缩振动一边进行机械加工的No.1-7的实施方式的外周侧的合格率全部为60%以上,内周侧的合格率均与为80%以上,与比较例的合格率相比所有实施方式中合格率均提高。On the other hand, in Embodiments No. 1 to 7 in which machining is performed while making the amorphous metal thin strip magnetostrictively vibrate, the yields on the outer peripheral side are all 60% or more, and the yields on the inner peripheral side are all 60% or more. 80% or more, compared with the pass rate of the comparative example, the pass rate was improved in all embodiments.

特别是在磁致伸缩振动的频率为10~60kHz的No.1-4的实施方式中,外周侧的合格率均提高至80%以上。进一步,在频率为10~40kHz的No.1-3的实施方式中,外周侧的合格率均提高至90%以上。进一步,在频率为20~40kHz的No.2、3的实施方式中,内周侧的合格率也都提高至100%。In particular, in Embodiments No. 1-4 in which the frequency of the magnetostrictive vibration is 10 to 60 kHz, the yield on the outer peripheral side was all increased to 80% or more. Furthermore, in Embodiments No. 1-3 with a frequency of 10 to 40 kHz, the pass rate on the outer peripheral side was all increased to 90% or more. Furthermore, in Embodiments No. 2 and No. 3 with a frequency of 20 to 40 kHz, the pass rate on the inner peripheral side was also increased to 100%.

此外,中表1还表示感应加热引起的有无40℃以上的发热。没有40℃以上的发热的实施方式更能够看到合格率变高的趋势。认为其理由在于,在没有发热的情况下,成为磁化追随磁场,磁场的振动高效地转换为机械的振动的状态。另一方面,认为是因为当交流磁场的频率增加时,在磁化对磁场的响应中发生大幅延迟,即产生损失,损失作为热被释放。推测产生损失是被施加的磁场的能量未高效地转换为磁致伸缩振动的能量。In addition, Table 1 in Table 1 also shows the presence or absence of heat generation at 40°C or higher due to induction heating. In the embodiment without heat generation of 40° C. or higher, a higher yield rate was observed. The reason for this is considered to be that, in the absence of heat generation, the magnetization follows the magnetic field, and the vibration of the magnetic field is efficiently converted into a state of mechanical vibration. On the other hand, it is considered because when the frequency of the AC magnetic field increases, a large delay occurs in the response of the magnetization to the magnetic field, that is, a loss occurs, and the loss is released as heat. It is presumed that the loss occurs because the energy of the applied magnetic field is not efficiently converted into the energy of the magnetostrictive vibration.

图9是表1的No.2的非晶态金属薄带的加工面的照片。倍率为500倍。图10是图9的放大照片。倍率为3000倍。图中为薄带的上侧卷绕于线轴时的外周侧。在图中,能够确认在薄带的厚度方向中央部具有斜线状的机械加工痕的剪切面。FIG. 9 is a photograph of the processed surface of the amorphous metal ribbon No. 2 in Table 1. FIG. The magnification is 500 times. FIG. 10 is an enlarged photograph of FIG. 9 . The magnification is 3000 times. The figure shows the outer peripheral side when the upper side of the ribbon is wound on the bobbin. In the figure, it can be confirmed that the sheared surface has oblique machining marks at the central portion in the thickness direction of the ribbon.

图11是图10的示意图。图中,B为剪切面。B2是能够在裁切刀片的移动方向上观察到线状的加工痕的剪切面,B1是不能观察该痕迹的剪切面。此外,A是塌边面,C是断裂面,D是飞边面。FIG. 11 is a schematic diagram of FIG. 10 . In the figure, B is the shear plane. B2 is a cut surface where linear processing traces can be observed in the moving direction of the cutting blade, and B1 is a cut surface where such traces cannot be observed. In addition, A is a sag surface, C is a fracture surface, and D is a flash surface.

本实施方式的非晶态金属薄带是在薄带的加工面具有通过机械加工形成的剪切面的非晶态金属薄带,在上述加工面,薄带表面的塌边面侧的轮廓具有波纹型。The amorphous metal ribbon of this embodiment is an amorphous metal ribbon having a sheared surface formed by machining on the processed surface of the ribbon. corrugated type.

波纹型的轮廓按平均5.2μm的周期形成。A corrugated profile is formed at an average period of 5.2 μm.

进一步,在加工面,剪切面占70.4%。Further, in the processed surface, the sheared surface accounts for 70.4%.

此外,本实施方式的非晶态金属薄带,在图10的照片的整个宽度45μm,相对于薄带表面的塌边面侧的轮廓,上述剪切面的塌边面侧的轮廓具有相关的波纹型。In addition, in the amorphous metal ribbon of the present embodiment, the profile on the sag side of the shear plane has a correlation with the profile on the sag side of the ribbon surface over the entire width of 45 μm in the photograph shown in FIG. 10 . corrugated type.

图12是表1的No.8的比较例的非晶态金属薄带的加工面的照片。倍率为500倍。图13是图12的放大照片。倍率为3000倍。在图中为薄带的上侧卷绕于线轴时的外周侧。在图中,能够确认在薄带的厚度方向中央部具有斜线状的机械加工痕的剪切面。FIG. 12 is a photograph of the processed surface of the amorphous metal ribbon of Comparative Example No. 8 in Table 1. FIG. The magnification is 500 times. FIG. 13 is an enlarged photograph of FIG. 12 . The magnification is 3000 times. In the drawing, it is the outer peripheral side when the upper side of the ribbon is wound on the bobbin. In the figure, it can be confirmed that the sheared surface has oblique machining marks at the central portion in the thickness direction of the ribbon.

图14是图13的示意图。图中,B为剪切面。此外,A为塌边面,C为断裂面,D为毛边面。FIG. 14 is a schematic diagram of FIG. 13 . In the figure, B is the shear plane. In addition, A is a sagging surface, C is a fracture surface, and D is a burr surface.

该比较用的非晶态金属薄带与本实施方式不同,薄带表面的塌边面侧的轮廓平坦,不是波纹型。此外,剪切面的塌边面侧的轮廓不是与薄带表面的塌边面侧的轮廓相关的形状。This comparative amorphous metal ribbon is different from the present embodiment in that the ribbon surface has a flat profile on the sag side and is not corrugated. In addition, the contour of the shear surface on the side of the sag side is not a shape related to the contour of the surface of the ribbon on the side of the sag side.

此外,剪切面所占的比例为27.2%,非常少。In addition, the proportion of the sheared surface is very small at 27.2%.

(实施例2)(Example 2)

在实施例2中,改变施加的交流磁场的强度,调查其机械加工的合格率。In Example 2, the strength of the applied AC magnetic field was changed, and the pass rate of the machining was investigated.

利用图1中记载的装置,对非晶态金属薄带实施机械加工。磁致伸缩振动的频率为30kHz。此外,以使得在线圈发生的交流磁场的最大值成为30A/m、70A/m、100A/m、130A/m的方式在线圈流动交流电流。在这种情况下,非晶态金属薄带按12ppm、16ppm、18ppm、19.8ppm的磁致伸缩进行磁致伸缩振动。A thin strip of amorphous metal was machined using the apparatus shown in FIG. 1 . The frequency of the magnetostrictive vibration is 30 kHz. In addition, an alternating current was passed through the coil so that the maximum value of the alternating magnetic field generated in the coil was 30 A/m, 70 A/m, 100 A/m, and 130 A/m. In this case, the thin amorphous metal strip undergoes magnetostrictive vibration at magnetostriction levels of 12 ppm, 16 ppm, 18 ppm, and 19.8 ppm.

除此以外,按与实施方式1相同的条件调查合格率。Except for this, the pass rate was investigated under the same conditions as in the first embodiment.

在该交流磁场的强度的范围内,一边使非晶态金属薄带磁致伸缩振动一边进行机械加工的No.1-4的实施方式的外周侧的合格率全部为60%以上,内周侧的合格率全部为70%以上,与表1的No.8的比较例的合格率相比在所有实施方式中合格率均提高。In the range of the intensity of the AC magnetic field, the yields of the outer peripheral sides of the Nos. 1-4 embodiments in which machining was performed while making the amorphous metal thin strip magnetostrictively vibrate were all 60% or more, and the inner peripheral side All of the pass rates were 70% or more, and compared with the pass rate of No. 8 comparative example in Table 1, the pass rate was improved in all embodiments.

另外,在该交流磁场的强度的范围内,存在磁场强度越大、机械加工的合格率越高的趋势。In addition, within the range of the intensity of the AC magnetic field, the higher the magnetic field intensity, the higher the yield of machining tends to be.

[表2][Table 2]

Nono f(kHz)f(kHz) H(A/m)H(A/m) Out(%)Out (%) In(%)In (%) 发热的有无presence or absence of fever 11 3030 3030 6060 7070 none 22 3030 7070 7070 8080 none 33 3030 100100 9090 9090 none 44 3030 130130 100100 100100 none

(实施例3)(Example 3)

利用图1中记载的装置,对非晶态金属薄带进行机械加工。A thin ribbon of amorphous metal was machined using the apparatus depicted in FIG. 1 .

线轴5使用与实施方式1相同的线轴。将上述的切缝的非晶态金属薄带1在该线轴的周向上卷绕4圈。As the bobbin 5, the same bobbin as that in the first embodiment is used. The above-mentioned slit amorphous metal thin strip 1 was wound four times in the circumferential direction of the bobbin.

从交流电源3向放大器4输送30kHz的交流电流,利用放大器4将电流放大,以使得在线圈(14匝)产生的交流磁场的最大值成为180A/m的方式在线圈2流动交流电流。在这种情况下,非晶态金属薄带按24ppm的磁致伸缩进行磁致伸缩振动。An AC current of 30 kHz is supplied from the AC power supply 3 to the amplifier 4, and the current is amplified by the amplifier 4 to flow an AC current through the coil 2 so that the maximum value of the AC magnetic field generated in the coil (14 turns) becomes 180 A/m. In this case, the thin amorphous metal strip undergoes magnetostrictive vibration at a magnetostriction of 24 ppm.

除此以外,按与实施方式1同样的条件调查机械加工的合格率。Except for this, the yield rate of machining was investigated under the same conditions as in Embodiment 1.

其结果是,4层均能够在不产生裂纹及裂缝的状态下裁切。As a result, all four layers could be cut without cracks or cracks.

此外,作为比较,以在线圈2不流动交流电流,不使其磁致伸缩振动的状态下调查机械加工的合格率,与上述实施方式相比,裁切刀片6在非晶态金属薄带的插入变差,4层均在大的范围发生裂缝或裂纹。产生交流磁场的情况下的合格率为90%,没有磁场的情况下的合格率为0%。In addition, as a comparison, the yield rate of machining was investigated under the condition that the coil 2 does not flow an alternating current and does not cause magnetostrictive vibration. Insertion deteriorated, and cracks or cracks occurred in a wide range in all four layers. The pass rate was 90% when an AC magnetic field was generated, and 0% when there was no magnetic field.

另外,在实施例1-3中,使用上述的FeSiB类的具有软磁性的非晶态金属薄带,不过能够纳米结晶的上述非晶态金属薄带只要是在纳米结晶前也具有相同程度的饱和磁致伸缩,因此能够通过应用本发明而期待同样的效果。In addition, in Examples 1-3, the above-mentioned FeSiB-based amorphous metal ribbon having soft magnetic properties was used, but the above-mentioned amorphous metal ribbon capable of nanocrystallization also has the same level of magnetic properties as long as it is before nanocrystallization. Since saturation magnetostriction is applied, the same effect can be expected by applying the present invention.

在实施例1-3中,对非晶态金属薄带实施设置切缝的机械加工,例如,还能够对长条的薄带进行裁切或冲孔,成为多个相同形状的加工薄带,并将它们层叠。In embodiment 1-3, implement the mechanical processing of setting slit to amorphous metal strip, for example, can also cut or punch the long thin strip, become a plurality of processing thin strips of the same shape, and stack them.

(实施例4)(Example 4)

在实施例4中,得到根据上述的实施方式的非晶态金属薄带的加工方法(对于非晶态金属薄带,利用加工工具局部地施加振动,对被施加上述振动引起的反复疲劳的部分进行机械加工的加工方法)机械加工后的非晶态金属薄带。In Example 4, the processing method of the amorphous metal thin strip according to the above-mentioned embodiment is obtained (for the amorphous metal thin strip, the vibration is locally applied by the processing tool, and the repeated fatigue caused by the above-mentioned vibration is applied Machining method) Amorphous metal strip after machining.

通过轧辊冷却,制造合金组成按原子%为Fe81.5Si4B14.5的非晶态金属薄带。准备厚度为22.7μm的非晶态金属薄带。薄带的厚度根据密度、重量和尺寸(长度×宽度)计算。此外,薄带的宽度为80mm。A thin strip of amorphous metal having an alloy composition of Fe 81.5 Si 4 B 14.5 in atomic percent was produced by cooling the rolls. A thin strip of amorphous metal with a thickness of 22.7 μm was prepared. Thickness of thin strips is calculated from density, weight and dimensions (length x width). In addition, the width of the thin strip is 80mm.

作为冲孔装置,使用图3所示的装置。As the punching device, the device shown in Fig. 3 was used.

作为冲孔模,伴同打孔机8a、8b和打孔架9a、9b,使用超硬材料(富士模具公司制富士罗伊(フジロイ)VF-12材料)。冲孔机是前端为长方形的柱状,其尺寸为5×15mm,角部被进行R角处理(R部0.3mm)。冲模形成有插入冲孔机的加工孔。此外,打孔机8a、8b和打孔架9a、9b分别夹持非晶态金属薄带1,且打孔机8a、8b在厚度方向上振动。打孔机8a、8b的振动为超声波发生装置引起的超声波振动。此外,打孔机8a、8b和打孔架9a,9能够在非晶态金属薄带的厚度方向滑动。As the punching die, a superhard material (Fuji Roy VF-12 material manufactured by Fuji Die Co., Ltd.) was used along with the punchers 8a, 8b and the punching frames 9a, 9b. The punching machine is a rectangular column with a front end, its size is 5×15mm, and the corners are treated with R corners (R part 0.3mm). The die is formed with a machined hole that is inserted into the punching machine. In addition, the punches 8a, 8b and the punching frames 9a, 9b hold the thin amorphous metal strip 1, respectively, and the punches 8a, 8b vibrate in the thickness direction. The vibrations of the punchers 8a and 8b are ultrasonic vibrations caused by ultrasonic generators. In addition, the punches 8a, 8b and the punching frames 9a, 9 can slide in the thickness direction of the amorphous metal strip.

由打孔架9a、9b和打孔机8a、8b夹持1个非晶态金属薄带。在该状态下,使打孔机8a、8b超声波振动,在打孔架和打孔机的滑动部,对非晶态金属薄带施加振动引起的反复疲劳。之后,使打孔机8a、8b超声波振动不变,在载荷1400N的条件下使打孔机8a、8b工作,进行冲孔加工。利用该一边使非晶态金属薄带振动一边进行机械加工的加工方法,得到薄带的侧面部被机械加工的非晶态金属薄带。One thin amorphous metal strip is clamped by the punching frames 9a, 9b and the punching machines 8a, 8b. In this state, the punches 8a, 8b are ultrasonically vibrated, and repeated fatigue due to the vibration is applied to the sliding portion of the punch frame and the punch. Thereafter, the punching machines 8a, 8b were operated under the condition of a load of 1400N without changing the ultrasonic vibration of the punching machines 8a, 8b, and punching was performed. According to this processing method of machining the amorphous metal ribbon while vibrating, the amorphous metal ribbon is obtained in which the side surface of the ribbon is machined.

图15是实施例4中得到的非晶态金属薄带的加工面(侧面部)的照片。倍率为500倍。图16是图15的示意图。在图中,能够确认在薄带的厚度方向中央部具有斜线状的机械加工痕的剪切面。15 is a photograph of the processed surface (side surface) of the amorphous metal ribbon obtained in Example 4. FIG. The magnification is 500 times. FIG. 16 is a schematic diagram of FIG. 15 . In the figure, it can be confirmed that the sheared surface has oblique machining marks at the central portion in the thickness direction of the ribbon.

该非晶态金属薄带,在被机械加工的薄带的加工面(侧面部),断裂面占73.4%的面积。In this amorphous metal ribbon, the fracture surface occupies 73.4% of the machined surface (side surface) of the ribbon.

作为比较,除不使打孔机8a、8b振动以外,与实施例4同样地得到被机械加工的非晶态金属薄带。For comparison, a machined amorphous metal strip was obtained in the same manner as in Example 4 except that the punches 8a and 8b were not vibrated.

图17是所得到的非晶态金属薄带的加工面(侧面部)的照片。图18是图17的示意图。一般而言,通过冲孔加工形成的截面形成有塌边面A(斜线部)、剪切面B(纵线部)、断裂面C(白色部)、毛边D(灰色部)。Fig. 17 is a photograph of the processed surface (side surface) of the obtained amorphous metal ribbon. FIG. 18 is a schematic diagram of FIG. 17 . Generally, a cross section formed by punching includes a sag surface A (hatched portion), a sheared surface B (vertical line portion), a fractured surface C (white portion), and a burr D (gray portion).

但是,该比较用的非晶态金属薄带与本实施方式不同,薄带表面的塌边面侧的轮廓平坦,不是波纹型。此外,在加工面,断裂面所占的比例不到70%(46.2%),非常少。另外,在加工面,剪切面上占的比例为48.0%。However, unlike this embodiment, the amorphous metal ribbon for comparison has a flat profile on the sag side of the ribbon surface and is not corrugated. In addition, on the processed surface, the proportion of the fractured surface is less than 70% (46.2%), which is very small. In addition, in the processed surface, the proportion of the sheared surface is 48.0%.

另外,在实施例4中,使用上述的FeSiB类的具有软磁性的非晶态金属薄带,不过能够纳米结晶的上述的非晶态金属薄带也能够通过应用本发明而期待同样的效果。In addition, in Example 4, the above-mentioned FeSiB-based soft magnetic amorphous metal ribbon was used, but the same effect can be expected by applying the present invention to the above-mentioned amorphous metal ribbon capable of nanocrystallization.

此外,在上述实施方式中,还能够应用在对非晶态金属薄带施加振动引起的反复疲劳后,停止打孔机8a、8b的超声波振动进行冲孔加工,即在使非晶态金属薄带振动后进行机械加工的加工方法。In addition, in the above-mentioned embodiment, it is also applicable to stop the ultrasonic vibration of the punchers 8a, 8b after repeated fatigue caused by applying vibration to the amorphous metal thin strip, that is, to make the amorphous metal thin strip Machining method with vibration followed by machining.

附图标记的说明Explanation of reference signs

1:非晶态金属薄带1: Amorphous metal thin strip

2:线圈2: Coil

3:交流电源3: AC power

4:放大器4: Amplifier

5:线轴5: Spool

6:加工工具6: Processing tools

7:放卷轧辊7: Unwinding roller

8:打孔机8: Punch machine

9:打孔架9: Punch frame

10:裂纹10: Crack

11:裂缝11: crack

12:裁切痕迹12: Cutting marks

A:塌边面A: slump

B:剪切面B: shear plane

C:断裂面C: fracture surface

D:毛边面。D: Rough side.

Claims (17)

1.一种非晶态金属薄带的加工方法,其特征在于:1. A processing method for an amorphous metal strip, characterized in that: 所述非晶态金属薄带的饱和磁致伸缩为5ppm以上且维氏硬度HV为700以上,The saturation magnetostriction of the amorphous metal thin strip is 5 ppm or more and the Vickers hardness HV is 700 or more, 在使所述非晶态金属薄带振动后进行裁切加工或冲孔加工,或一边使其振动一边进行裁切加工或冲孔加工。Cutting or punching is performed after vibrating the amorphous metal thin strip, or cutting or punching is performed while vibrating. 2.如权利要求1所述的非晶态金属薄带的加工方法,其特征在于:2. the processing method of amorphous metal strip as claimed in claim 1, is characterized in that: 所述振动是所述非晶态金属薄带的磁致伸缩引起的振动。The vibrations are vibrations caused by the magnetostriction of the amorphous metal ribbon. 3.如权利要求1所述的非晶态金属薄带的加工方法,其特征在于:3. the processing method of amorphous metal strip as claimed in claim 1, is characterized in that: 所述振动的频率为1Hz以上500kHz以下。The frequency of the vibration is not less than 1 Hz and not more than 500 kHz. 4.如权利要求2所述的非晶态金属薄带的加工方法,其特征在于:4. the processing method of amorphous metal strip as claimed in claim 2, is characterized in that: 所述振动通过对所述非晶态金属薄带施加1A/m以上的交流磁场而产生。The vibration is generated by applying an alternating magnetic field of 1 A/m or more to the thin amorphous metal strip. 5.如权利要求3所述的非晶态金属薄带的加工方法,其特征在于:5. the processing method of amorphous metal strip as claimed in claim 3, is characterized in that: 所述振动通过对所述非晶态金属薄带施加1A/m以上的交流磁场而产生。The vibration is generated by applying an alternating magnetic field of 1 A/m or more to the thin amorphous metal strip. 6.如权利要求1所述的非晶态金属薄带的加工方法,其特征在于:6. the processing method of amorphous metal strip as claimed in claim 1, is characterized in that: 对于所述非晶态金属薄带,对利用加工工具局部地施加了振动的部分进行裁切加工或冲孔加工。For the amorphous metal thin strip, a portion to which vibration is locally applied by a processing tool is cut or punched. 7.如权利要求6所述的非晶态金属薄带的加工方法,其特征在于:7. the processing method of amorphous metal strip as claimed in claim 6, is characterized in that: 所述加工工具包括能够夹持所述非晶态金属薄带的上下表面的打孔机和打孔架,The processing tool includes a puncher and a punching frame capable of clamping the upper and lower surfaces of the amorphous metal strip, 所述打孔机和打孔架的至少一者能够在所述非晶态金属薄带的厚度方向滑动,At least one of the puncher and the punching frame can slide in the thickness direction of the amorphous metal strip, 通过所述打孔机和打孔架夹持所述非晶态金属薄带的上下表面,且其至少一者在所述厚度方向上振动,在所述非晶态金属薄带的位于所述打孔机和打孔架的滑动部的部分对所述非晶态金属薄带施加振动,利用所述打孔机对通过所述振动施加了反复疲劳的部分实施冲孔加工。The upper and lower surfaces of the amorphous metal thin strip are clamped by the puncher and the punching frame, and at least one of them vibrates in the thickness direction, and at the position of the amorphous metal thin strip The puncher and the sliding portion of the punching frame vibrate the amorphous metal thin strip, and the puncher performs punching on a portion subjected to repeated fatigue by the vibration. 8.如权利要求1~7中的任一项所述的非晶态金属薄带的加工方法,其特征在于:8. The method for processing the amorphous metal strip according to any one of claims 1 to 7, characterized in that: 所述非晶态金属薄带为长条的带状,The thin strip of amorphous metal is in the shape of a strip, 一边将所述非晶态金属薄带在所述长条的方向运送一边进行裁切加工或冲孔加工。Cutting or punching is performed on the amorphous metal thin strip while being conveyed in the long direction. 9.如权利要求1~7中的任一项所述的非晶态金属薄带的加工方法,其特征在于:9. The method for processing the amorphous metal strip according to any one of claims 1 to 7, characterized in that: 所述非晶态金属薄带以通过轧辊冷却制造的Fe为主成分。The amorphous metal strip mainly contains Fe produced by roll cooling. 10.如权利要求1~7中的任一项所述的非晶态金属薄带的加工方法,其特征在于:10. The method for processing an amorphous metal strip according to any one of claims 1 to 7, characterized in that: 所述非晶态金属薄带的厚度为5μm以上70μm以下。The thickness of the amorphous metal strip is not less than 5 μm and not more than 70 μm. 11.一种层叠体的制造方法,其特征在于:11. A method for manufacturing a laminate, characterized in that: 层叠根据权利要求1~10中任一项所述的非晶态金属薄带的加工方法加工的非晶态金属薄带。An amorphous metal ribbon processed by the method for processing an amorphous metal ribbon according to any one of claims 1 to 10 is laminated. 12.一种非晶态金属薄带,根据权利要求1~10中任一项所述的非晶态金属薄带的加工方法加工而成,其在薄带的加工面具有通过裁切加工或冲孔加工形成的剪切面,该非晶态金属薄带的特征在于:12. An amorphous metal thin strip, processed according to the processing method of the amorphous metal thin strip according to any one of claims 1 to 10, it has a processing surface of the thin strip by cutting or processing Shear planes formed by punching, the thin strip of amorphous metal is characterized by: 在所述加工面,薄带表面的塌边面侧的轮廓具有波纹型。On the processed surface, the contour of the strip surface on the side of the sag side has a corrugated shape. 13.如权利要求12所述的非晶态金属薄带,其特征在于:13. The thin strip of amorphous metal according to claim 12, characterized in that: 所述波纹型的轮廓按平均0.1~20μm的周期具有凹凸。The corrugated profile has irregularities at an average period of 0.1 to 20 μm. 14.如权利要求12所述的非晶态金属薄带,其特征在于:14. The thin strip of amorphous metal according to claim 12, characterized in that: 在所述加工面,所述剪切面占40%以上的面积。On the processing surface, the shearing surface occupies more than 40% of the area. 15.如权利要求13所述的非晶态金属薄带,其特征在于:15. The thin strip of amorphous metal according to claim 13, characterized in that: 在所述加工面,所述剪切面占40%以上的面积。On the processing surface, the shearing surface occupies more than 40% of the area. 16.如权利要求12~15中的任一项所述的非晶态金属薄带,其特征在于:16. The thin strip of amorphous metal according to any one of claims 12-15, characterized in that: 相对于所述薄带表面的塌边面侧的轮廓,所述剪切面的塌边面侧的轮廓具有相关的波纹型。The profile of the sag side of the shear surface has a corrugated pattern relative to the profile of the sag side of the ribbon surface. 17.一种非晶态金属薄带,根据权利要求1~10中任一项所述的非晶态金属薄带的加工方法加工而成,其在薄带的加工面具有通过裁切加工或冲孔加工形成的剪切面,该非晶态金属薄带特征在于:17. An amorphous metal thin strip, processed according to the processing method of the amorphous metal thin strip according to any one of claims 1 to 10, it has a processing surface of the thin strip by cutting or processing Shear planes formed by punching, the thin ribbon of amorphous metal is characterized by: 在裁切加工或冲孔加工后的所述薄带的加工面,断裂面占50%以上的面积。On the processed surface of the thin strip after cutting or punching, the fracture surface occupies 50% or more of the area.
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