CN112004614A - Vibration device - Google Patents
Vibration device Download PDFInfo
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- CN112004614A CN112004614A CN201980028001.8A CN201980028001A CN112004614A CN 112004614 A CN112004614 A CN 112004614A CN 201980028001 A CN201980028001 A CN 201980028001A CN 112004614 A CN112004614 A CN 112004614A
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- vibrates
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- 230000002093 peripheral effect Effects 0.000 claims description 46
- 230000008878 coupling Effects 0.000 claims description 28
- 238000010168 coupling process Methods 0.000 claims description 28
- 238000005859 coupling reaction Methods 0.000 claims description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 34
- 238000006073 displacement reaction Methods 0.000 description 11
- 238000003384 imaging method Methods 0.000 description 11
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0655—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of cylindrical shape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0651—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of circular shape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B17/00—Details of cameras or camera bodies; Accessories therefor
- G03B17/02—Bodies
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B17/00—Details of cameras or camera bodies; Accessories therefor
- G03B17/02—Bodies
- G03B17/08—Waterproof bodies or housings
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B17/00—Details of cameras or camera bodies; Accessories therefor
- G03B17/56—Accessories
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/0666—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface used as a diaphragm
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Studio Devices (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Blocking Light For Cameras (AREA)
- Accessories Of Cameras (AREA)
Abstract
Provided is a vibration device capable of efficiently removing water droplets and the like. The vibration device (1) of the present invention comprises: a vibrating body (3) which is cylindrical and has a 1 st opening end (3a), a 2 nd opening end (3b), an outer side surface (3c) and an inner side surface (3 d); a light-transmitting body (8) connected to the 2 nd opening end (3b) of the vibrating body (3); and a piezoelectric vibrator (7) disposed on the vibrator (3), the vibrator having a flange portion extending outward from an outer side surface (3c) of the vibrator, the vibration device further comprising a drive circuit (12), the drive circuit (12) vibrating a connection body of the light transmitting body (8) and the vibrator (3) in accordance with a vibration mode in which the light transmitting body vibrates or a vibration mode in which the flange portion vibrates, and alternately switching the vibration mode in which the light transmitting body vibrates and the vibration mode in which the flange portion vibrates.
Description
Technical Field
The present invention relates to a vibration device capable of removing water droplets and the like by mechanical vibration.
Background
Conventionally, imaging devices such as cameras used as monitoring devices are required to have a clear field of view. For example, various mechanisms for removing water droplets such as raindrops have been proposed for cameras used outdoors such as in-vehicle applications. Patent document 1 listed below discloses a vibrating device having a light-transmitting portion, in which the light-transmitting portion is disposed in front of a camera. The light-transmitting portion is supported by the cylindrical body. In this vibrating device, a recess is provided in the light-transmitting portion or the cylindrical body to excite localized vibration, and water droplets are moved to the vibrating portion and atomized.
Documents of the prior art
Patent document
Patent document 1: international publication No. 2017/221622
Disclosure of Invention
Problems to be solved by the invention
However, when the recess is provided in the light-transmitting portion, the optical axis of the light-transmitting portion is largely distorted, and there is a problem that distortion is likely to occur in an image of a camera or the like. Further, when the translucent portion is formed in a dome shape in order to receive light at a wide angle, the manufacturing is difficult.
On the other hand, in the case of driving the cylindrical body without the light-transmissive portion, the vibrating device needs to be large in size in order to reliably excite local vibration. Further, since the portion provided with the recess is thin, the durability may be low.
Further, in the case of using the (0, 0) mode described in patent document 1, which has a large amplitude in the central portion, the amplitude decreases as the distance from the central portion increases, and therefore, it is necessary to increase the driving voltage at the time of atomizing water droplets, which causes a problem of a decrease in efficiency.
The invention aims to provide a vibration device capable of efficiently removing water drops and the like.
Means for solving the problems
In one broad aspect of the vibration apparatus of the present invention, the vibration apparatus comprises: a vibrating body having a cylindrical shape and having a 1 st opening end and a 2 nd opening end, and an outer side surface and an inner side surface connecting the 1 st opening end and the 2 nd opening end; a light-transmitting body connected to the 2 nd opening end of the vibrating body; and a piezoelectric vibrator that is disposed on the vibrator to vibrate a connected body of the light transmitting body and the vibrator, the vibrator having a flange portion extending outward from the outer side surface of the vibrator, the vibration device further including a drive circuit that is electrically connected to the piezoelectric vibrator to vibrate the connected body of the light transmitting body and the vibrator in a vibration mode in which the light transmitting body vibrates or in a vibration mode in which the flange portion vibrates, and to alternately switch between the vibration mode in which the light transmitting body vibrates and the vibration mode in which the flange portion vibrates.
In another broad aspect of the vibration device of the present invention, the vibration device comprises: a vibrating body having a cylindrical shape and having a 1 st opening end and a 2 nd opening end, and an outer side surface and an inner side surface connecting the 1 st opening end and the 2 nd opening end; a light-transmitting body connected to the 2 nd opening end of the vibrating body; and a piezoelectric vibrator disposed on the vibrator to vibrate a connected body of the vibrator and the light transmitting body, the vibrator having a flange portion extending outward from the outer side surface of the vibrator, the vibration device further including a drive circuit electrically connected to the piezoelectric vibrator to vibrate the connected body of the vibrator and the light transmitting body in a vibration mode mainly involving vibration of the light transmitting body or a vibration mode mainly involving vibration of the flange portion and alternately switch between a vibration mode mainly involving vibration of the light transmitting body and a vibration mode mainly involving vibration of the flange portion, and when a resonance frequency of vibration of the light transmitting body is f1 and a resonance frequency of vibration of the flange portion is f2, the vibration frequency of the vibration mode mainly involving vibration of the light transmitting body is set to a frequency within a frequency range including f1, and the vibration frequency of the vibration mode mainly involving vibration of the flange portion is set to a frequency within a frequency range including f2 And (4) rate.
In another broad aspect of the vibration device of the present invention, the vibration device comprises: a vibrating body having a cylindrical shape and having a 1 st opening end and a 2 nd opening end; a light-transmitting body connected to the 2 nd opening end of the vibrating body; and a piezoelectric vibrator configured to vibrate a coupled body of the light transmitting body and the vibrator, wherein the vibrator has a flange portion extending outward beyond a 2 nd opening end portion coupled to the light transmitting body, and the vibration device further includes a drive circuit electrically connected to the piezoelectric vibrator, configured to vibrate the coupled portion of the light transmitting body and the vibrator in accordance with a vibration mode in which the light transmitting body vibrates or a vibration mode in which the flange portion vibrates, and configured to alternately switch between the vibration mode in which the light transmitting body vibrates and the vibration mode in which the flange portion vibrates.
In another broad aspect of the vibration device of the present invention, the vibration device comprises: a vibrating body having a cylindrical shape and having a 1 st opening end and a 2 nd opening end; a light-transmitting body connected to the 2 nd opening end of the vibrating body; and a piezoelectric vibrator configured to vibrate a connection body of the light-transmitting body and the vibrator, wherein the vibrator has a flange portion extending outward beyond a 2 nd opening end portion connected to the light-transmitting body, and the vibration device further includes a drive circuit electrically connected to the piezoelectric vibrator, configured to vibrate the connection portion of the light-transmitting body and the vibrator in a vibration mode in which the light-transmitting body vibrates or a vibration mode in which the flange portion vibrates, and configured to alternately switch between the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates, and wherein an amplitude of the flange portion is larger than an amplitude of the light-transmitting body in the vibration mode in which the flange portion vibrates.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, a vibration device capable of efficiently removing water droplets and the like can be provided.
Drawings
Fig. 1 is a schematic partially cut-away perspective view of a vibration device according to embodiment 1 of the present invention.
Fig. 2 is a schematic front sectional view of an image forming apparatus having a vibration device of embodiment 1 of the present invention.
Fig. 3 is a diagram showing an example of resonance frequencies of a vibration mode in which the light-transmitting body vibrates and a vibration mode in which the flange portion vibrates.
Fig. 4 is a schematic cross-sectional view for explaining a vibration mode in which the light-transmitting body vibrates.
Fig. 5 is a schematic cross-sectional view for explaining a vibration mode of the flange portion.
Fig. 6 is a schematic front cross-sectional view of a vibration device according to modification 1 of embodiment 1 of the present invention.
Fig. 7 is a schematic front cross-sectional view of a vibration device according to variation 2 of embodiment 1 of the present invention.
Fig. 8 is a graph showing the relationship between the normalized frequency difference and the coupling coefficient between the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates.
Fig. 9 is a diagram showing a relationship between the normalized frequency difference and the displacement between the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates.
Detailed Description
The present invention will be explained below by describing specific embodiments thereof with reference to the accompanying drawings.
The embodiments described in the present specification are exemplary, and it is previously noted that partial replacement or combination of the structures may be performed between different embodiments.
Fig. 1 is a schematic partially cut-away perspective view of a vibration device according to embodiment 1 of the present invention.
The vibration device 1 shown in fig. 1 is a vibration device as follows: the water droplets and foreign matter are removed from the field of view of the image pickup device by moving the water droplets and foreign matter by vibration or atomizing the water droplets and the like. The vibration device 1 includes a vibration element 2 including a cylindrical vibration body 3, a light-transmitting body 8 provided so as to cover an opening of the vibration element 2, and a drive circuit 12 electrically connected to the vibration element 2.
Fig. 2 is a schematic front sectional view of an image forming apparatus having a vibration device of embodiment 1 of the present invention. In a perspective view and a cross-sectional view other than fig. 1, the drive circuit may be omitted.
An imaging element 10A indicated by a one-dot chain line is disposed in an internal space surrounded by the vibrator 3 and the translucent body 8. The imaging device 10 as an optical detection apparatus of an embodiment of the present invention is thus constituted. The imaging apparatus 10 has a vibration device 1 and an image pickup element 10A. Examples of the imaging element 10A include a CMOS, a CCD, a bolometer, a thermopile, and the like that receive light having any wavelength from the visible region to the far-infrared region. Examples of the imaging device 10 include a video camera, a Radar, and a LIDAR device.
In addition, an optical detection element for optically detecting the energy ray other than the imaging element 10A may be disposed in the internal space. The energy line to be detected may be, for example, an active energy line such as an electromagnetic wave or an infrared ray. The detection region of the optical detection element is included in a light transmitting body described later. In the imaging apparatus 10 shown in fig. 2, the field of view of the image pickup element 10A is included in the light transmitting body 8. The light transmittance in the present specification means a light transmittance through which at least energy rays and light of a wavelength detected by the optical detection element are transmitted.
The details of the vibration device 1 are explained below.
The vibration element 2 includes a vibrator 3 and a piezoelectric vibrator 7. The vibrator 3 has a 1 st opening end 3a and a 2 nd opening end 3b, and an outer side surface 3c and an inner side surface 3d connecting the 1 st opening end 3a and the 2 nd opening end 3 b. In the present specification, the direction connecting the 1 st opening end portion 3a and the 2 nd opening end portion 3b of the vibrator 3 is defined as an axial direction, and the direction orthogonal to the axial direction is defined as a radial direction.
The vibrator 3 includes a cylindrical 1 st vibrator portion 4, a frame-shaped 2 nd vibrator portion 5, and a frame-shaped connecting portion 6 connecting the 1 st vibrator portion 4 and the 2 nd vibrator portion 5. The 1 st vibrating body portion 4 includes the 1 st opening end portion 3a of the vibrating body 3. The 2 nd vibrating body portion 5 includes the 2 nd opening end portion 3b of the vibrating body 3. The 2 nd vibration body portion 5 and the connection portion 6 are shaped to correspond to the 1 st vibration body portion 4 so that the vibration body 3 is a single cylindrical body. More specifically, in the present embodiment, the 1 st vibration body 4 is cylindrical, the 2 nd vibration body 5 is annular, and the coupling portion 6 is annular. The vibrator 3 is a cylindrical vibrator body having a cylindrical 1 st vibrator portion 4, an annular coupling portion 6, and an annular 2 nd vibrator portion 5 arranged such that their central axes are on a concentric axis.
Here, in the present specification, unless otherwise specified, the outer peripheral edge and the inner peripheral edge refer to the outer peripheral edge and the inner peripheral edge when viewed from above. In a plan view, the coupling portion 6 and the outer peripheral edge of the 1 st vibration body 4 overlap each other, and the inner peripheral edge of the coupling portion 6 is located outward of the inner peripheral edge of the 1 st vibration body 4 and the inner peripheral edge of the 2 nd vibration body 5. When the distance between the outer side surface and the inner side surface in the radial direction of each part of the vibrating body 3 is set to the thickness of each part, the thickness of the connecting portion 6 is smaller than that of the 1 st vibrating body portion 4. In the vibrator 3, the inner diameter of the connecting portion 6 is larger than the inner diameter of the other portions.
The outer side surfaces 3c of the vibrator 3 are formed by connecting the outer side surfaces of the 1 st vibrator portion 4, the connecting portion 6, and the 2 nd vibrator portion 5. Similarly, the inner surface 3d of the vibrator 3 is formed by connecting the inner surfaces of the 1 st vibrator portion 4, the connecting portion 6, and the 2 nd vibrator portion 5. In the present embodiment, the inner surface 3d has a stepped portion in the portion of the coupling portion 6. On the other hand, the outer surface 3c has no step.
The vibrator 3 has a flange portion 9 extending radially outward from an outer surface 3c of the vibrator 3. In the present embodiment, the flange 9 is disposed on the 2 nd vibrating body 5. The flange portion 9 extends outward from the 2 nd opening end portion 3 b. In the present embodiment, the thicknesses of the 2 nd vibrating body portion 5 and the flange portion 9 are the same in the axial direction. Therefore, the flange 9 disposed in the 2 nd vibration element 5 projects outward from the outer peripheral edge of the connection portion 6 directly connected to the 2 nd vibration element 5.
The 1 st vibrating body 4 may be substantially cylindrical or square. The 2 nd vibration body 5 and the connection portion 6 may have a frame shape other than an annular shape. In a plan view, the 1 st vibration element 4, the 2 nd vibration element 5, and the connection portion 6 may have similar shapes or substantially similar shapes. Alternatively, the vibrating body 3 may be constituted only by the cylindrical 1 st vibrating body portion 4. The outer surface 3c and the inner surface 3d of the vibrator 3 may or may not have a stepped portion.
In the vibration element 2, the piezoelectric vibrator 7 is disposed at the 1 st opening end portion 3a of the vibrator 3. The piezoelectric vibrator 7 has an annular piezoelectric body. The piezoelectric body is made of, for example, Pb (Zr, Ti) O3、(K、Na)NbO3Or LiTaO, etc3、LiNbO3And the like, suitable piezoelectric single crystals. Electrodes are provided on one main surface and the other main surface of the piezoelectric body, respectively.
In the present embodiment, one annular piezoelectric vibrator 7 is disposed in the vibrator 3. The shape and number of the piezoelectric vibrators 7 are not limited to the above. For example, a plurality of piezoelectric vibrators may be arranged in a circumferential direction around the center of the vibrator 3 as a rotation axis in a plan view. The piezoelectric body in the piezoelectric vibrator may have a rectangular plate shape or the like.
As shown in fig. 1, a dome-shaped light-transmitting body 8 is coupled to the 2 nd opening end portion 3b of the vibrator 3. The light-transmitting body 8 is provided so as to cover the opening of the 2 nd vibrating body portion 5 of the vibrating body 3. The light-transmitting body 8 has a dome shape, but in the present invention, the light-transmitting body 8 may have a flat plate shape. The light-transmitting body 8 is made of a light-transmitting material. As the light-transmitting material, for example, light-transmitting plastic, glass, or light-transmitting ceramic can be used. The piezoelectric vibrator 7 vibrates a connected body of the light transmitting body 8 and the vibrator 3.
Here, as described above, in the present embodiment, the flange portion 9 is disposed in the 2 nd vibrating body portion 5. The flange 9 may be disposed on the 1 st vibration element 4 or the connection portion 6. Alternatively, the portion of the outer surface 3c of the vibrator 3 where the flange 9 is provided may include portions corresponding to the 1 st vibrator portion 4 and the connecting portion 6, or may include portions corresponding to the connecting portion 6 and the 2 nd vibrator portion 5. When the flange portion 9 is thicker than the connecting portion 6 in the axial direction, the portion of the outer surface 3c of the vibrating body 3 where the flange portion 9 is provided may include portions corresponding to the 1 st vibrating body portion 4, the connecting portion 6, and the 2 nd vibrating body portion 5. The flange 9 may be disposed closer to the light transmitting body 8 than the center position in the axial direction of the vibrator 3.
The drive circuit 12 is electrically connected to the vibration element 2. More specifically, the drive circuit 12 is electrically connected to the piezoelectric vibrator 7. The drive circuit 12 vibrates the connection body of the light-transmitting body 8 and the vibrator 3 by the piezoelectric vibrator 7 in accordance with a vibration mode in which the light-transmitting body vibrates or a vibration mode in which the flange portion vibrates, which will be described later, and alternately switches the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates. Here, the vibration mode in which the light-transmitting body vibrates means a vibration mode in which the amplitude of the light-transmitting body is larger than the amplitude of the flange portion. The vibration mode in which the flange portion vibrates means a vibration mode in which the amplitude of the flange portion is larger than the amplitude of the light-transmitting body. Preferably, the vibration mode in which the light-transmitting body vibrates is a vibration mode in which: in the light-transmitting body, the node of vibration is not located inside the outer peripheral edge in a plan view, and the amplitude of the central portion of the light-transmitting body is maximum. Preferably, the vibration mode in which the flange portion vibrates is a vibration mode in which the amplitude of the outer peripheral edge of the flange portion is maximum when viewed from above. In addition, hereinafter, the vibration mode in which the light transmitting body vibrates and the vibration mode in which the flange portion vibrates are sometimes abbreviated as light transmitting body vibration and flange portion vibration.
The present embodiment is characterized in that the vibrating body 3 has the 2 nd vibrating body portion 5 including the flange portion 9, and the vibrating device 1 has the driving circuit 12 that alternately switches the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates. This enables efficient removal of water droplets and the like. The details thereof are explained below.
Fig. 3 is a diagram showing an example of resonance frequencies of a vibration mode in which the light-transmitting body vibrates and a vibration mode in which the flange portion vibrates. Fig. 4 is a schematic cross-sectional view for explaining a vibration mode in which the light-transmitting body vibrates. Fig. 5 is a schematic cross-sectional view for explaining a vibration mode of the flange portion. In fig. 3, the solid line shows the results of the present embodiment, and the broken line shows the results of the comparative example. The comparative example is different from the present embodiment in that the vibrating body does not have the flange portion. Fig. 4 and 5 show a portion corresponding to a half of the cross section of the vibration device shown in fig. 2. The solid line indicates the original state of the vibration device, and the alternate long and short dash line indicates the state of vibration.
In fig. 3, arrow a indicates the resonance frequency of the vibration mode in which the light-transmitting body vibrates, and arrow B indicates the resonance frequency of the vibration mode in which the flange portion vibrates. The vibration mode in which the light-transmitting body vibrates is a vibration mode in which: as shown in fig. 4, in the light-transmitting body 8, the node of vibration is not located inside the outer peripheral edge, and the amplitude of the central portion of the light-transmitting body 8 is the largest. In the vibration mode in which the light-transmitting body vibrates, the amplitude of the flange portion 9 is small. The vibration mode in which the flange portion vibrates is a vibration mode in which the amplitude of the outer peripheral edge of the flange portion 9 is maximum as shown in fig. 5. In the vibration mode in which the flange portion vibrates, the amplitude of the light transmitting body 8 is small. In the vibration mode in which the flange portion vibrates, the node of the vibration is located at the portion of the inner surface 3d of the vibrator 3 closest to the portion to which the flange portion 9 is fixed.
When the dimension of the flange portion 9 along the radial direction is set to a length, the resonance frequency of the vibration mode of the light transmitting body vibration and the resonance frequency of the vibration mode of the flange portion vibration can be adjusted by adjusting the length, the thickness in the axial direction, and the like of the flange portion 9. For example, as shown in fig. 4, the vibration mode of the light transmitting body can be set to be the main vibration mode, but the flange portion vibration may be mixed slightly. Alternatively, as shown in fig. 5, the flange portion may vibrate in a main vibration mode, but the flange portion may vibrate in a state in which the translucent body vibrates slightly.
On the other hand, as shown in fig. 3, in the comparative example, since the vibrating body does not have the flange portion, a vibration mode in which the flange portion vibrates is not generated.
In the present embodiment and the comparative example, the connecting body of the light-transmitting body and the vibrating body is vibrated in accordance with the vibration mode in which the light-transmitting body vibrates, and water droplets and the like adhering to the vicinity of the center of the light-transmitting body can be atomized and removed. Then, the water droplets and the like move toward the antinodes of the vibration. Therefore, water droplets or the like not located near the center of the light-transmitting body can be atomized by moving toward the center where the antinode of vibration is located. Here, in the vibration mode in which the light-transmitting body vibrates, the node of the vibration is located in the vicinity of the portion where the light-transmitting body and the vibrator are connected. Therefore, in the case of using only the vibration mode in which the light transmitting body vibrates as in the comparative example, water droplets or the like near the node of the vibration cannot be moved or atomized, and the visual field of the imaging element cannot be sufficiently secured in some cases. In addition, in order to move and atomize water droplets and the like near the outer periphery of the light-transmitting body, it is necessary to increase the driving voltage.
In contrast, in the present embodiment shown in fig. 1, the 2 nd vibrating body 5 has the flange 9, and the vibration mode of the light transmitting body vibration and the vibration mode of the flange vibration are alternately switched by the drive circuit 12. The amplitude of the flange 9 of the vibrating body 3 is made larger than the amplitude of the light-transmitting body 8 by the vibration mode of the flange vibration. Water droplets and the like located near the portion where the light-transmitting body 8 and the 2 nd vibrating body portion 5 of the vibrating body 3 are connected and near the outer peripheral edge of the light-transmitting body 8 can easily move to the flange portion 9 by the vibration mode of the flange portion vibration. In this way, water droplets and the like located near the outer periphery of the light-transmitting body 8 can be removed, and the field of view of the imaging element 10A can be effectively prevented from being obstructed. By further atomizing the water droplets or the like that have moved to the outer peripheral edge of the flange portion 9, the water droplets or the like can be more reliably removed. On the other hand, in the light transmitting body 8, water droplets and the like located outside the vicinity of the outer peripheral edge can be easily moved to the vicinity of the center of the light transmitting body 8 by the vibration mode of the light transmitting body vibration and atomized. By switching the vibration mode in this way, water droplets and the like can be removed more reliably and efficiently without increasing the drive voltage.
In the present embodiment, since the vibrating body 3 has the flange portion 9, a state can be adopted in which a vibration mode mainly including a vibration mode in which the light transmitting body vibrates is adopted and a vibration mode in which the flange portion vibrates is slightly mixed. In this case, water droplets or the like located near the outer peripheral edge of the light transmitting body 8 can be moved toward the flange 9. Here, by switching to the vibration mode in which the flange portion vibrates, it is possible to more easily move water droplets and the like to the outer peripheral edge of the flange portion 9 and atomize the water droplets and the like. In this way, by operating the vibration mode of the light transmitting body and the vibration mode of the flange portion in cooperation, water droplets and the like can be removed more efficiently.
The resonance frequency of the vibration mode in which the light-transmitting body vibrates is f1, and the resonance frequency of the vibration mode in which the flange portion vibrates is f 2. The vibration frequency of the vibration mode mainly involving the vibration of the light-transmitting body is preferably a frequency in a frequency range including f 1. Further, the vibration frequency of the vibration mode in which the flange portion vibrates is preferably a frequency within a frequency range including f 2. Thus, the water droplets and the like can be removed more efficiently by operating the vibration mode of the light transmitting body and the vibration mode of the flange portion in cooperation with each other. Preferably, the vibration frequency of the vibration mode mainly involving the vibration of the light-transmitting body is set to a frequency in a range of 30kHz to 200 kHz. Preferably, when the vibration of the vibration mode mainly including the flange portion vibration is excited, the frequency is set to a frequency in a range of 30kHz to 200 kHz.
In the present embodiment, the light-transmitting body 8 is connected to the outermost portion of the vibrating body 3 in the axial direction. In the axial direction, the position of the portion of the 2 nd vibrating body portion 5 of the vibrating body 3 coupled to the light transmitting body 8 is the same as the position of the flange portion 9. Thus, the distance between the coupled portion and the flange portion 9 can be made closer than in the case where the position of the coupled portion and the position of the flange portion 9 are different in the axial direction. Therefore, water droplets or the like can be appropriately moved from the portion connected to the flange portion and the vicinity of the outer peripheral edge of the light transmitting body 8 to the flange portion 9 by the vibration mode of the flange portion vibration.
Further, the light-transmitting body 8 may be connected to a portion other than the outermost portion of the vibrating body 3 in the axial direction, not limited to the above. For example, in a 1 st modification of the 1 st embodiment shown in fig. 6, the surface of the 2 nd vibration body portion 25 on the light transmitting body 8 side has a step portion 25e extending in the axial direction and a 1 st surface 25c and a 2 nd surface 25d connected by the step portion 25 e. The 1 st surface 25c is located radially outward, and the 2 nd surface 25d is located radially inward. The 1 st surface 25c is located at the outermost side of the vibrator 23 in the axial direction, and the 2 nd surface 25d is located at the inner side of the 1 st surface 25 c. The translucent body 8 is connected to the 2 nd surface 25 d. In this case, as in embodiment 1, water droplets and the like can be removed more reliably and efficiently.
Preferably, the 2 nd vibrating body 25 and the light transmitting body 8 are coupled to each other without forming a gap between the step portion 25e and the light transmitting body 8. This enables more reliable removal of water droplets and the like.
As described above, the flange portion 9 of the present embodiment shown in fig. 2 is a portion that protrudes outward from the outer peripheral edge of the connecting portion 6 of the vibrator 3 in a plan view. Thus, when the length of the flange portion 9 is constant, the distance between the outer peripheral edge of the flange portion 9 and the portion where the 2 nd vibrating body 5 and the light transmitting body 8 are connected can be made closer as the outer diameter of the connecting portion 6 is made smaller. This enables water droplets or the like to efficiently move from the portion to be connected and the vicinity of the outer peripheral edge of the translucent body 8 to the outer peripheral edge of the flange 9 by the vibration mode of the flange vibration.
In the present embodiment, the coupling portion 6 and the 1 st vibrating body 4 overlap each other in the outer peripheral edge in plan view, but the present invention is not limited to this. In a modification 2 of embodiment 1 shown in fig. 7, the outer peripheral edge of the coupling portion 6 of the vibrator 33 is located inside the outer peripheral edge of the 1 st vibrator portion 4. When the length of the flange portion 9 is constant, the outer peripheral edge of the flange portion 9 is located inward as the outer peripheral edge of the coupling portion 6 is located inward. This makes it possible to make the distance between the outer peripheral edge of the flange 9 and the portion where the light-transmitting body 8 and the vibrator 33 are connected close to each other. Preferably, at least a part of the connection portion 6 overlaps the light transmitting body 8 in a plan view. More preferably, as in the present modification, the outer peripheral edge of the coupling portion 6 overlaps the light transmitting body 8 in a plan view. More preferably, the outer peripheral edge of the coupling portion 6 is located inward of the outer peripheral edge of the light transmitting body 8 in a plan view. This makes it possible to further approximate the distance between the outer peripheral edge of the flange portion 9 and the coupled portion. Therefore, water droplets or the like can be more efficiently and more quickly moved from the vicinity of the coupled portion and the outer peripheral edge of the light-transmitting body 8 to the outer peripheral edge of the flange 9.
In the present modification, the distance between the outer peripheral edge of the flange portion 9 and the coupled portion can be made close to each other without making the thicknesses of the 1 st vibration body portion 4 and the coupling portion 6 thin and without making the outer diameter of the 2 nd vibration body portion 5 large. Therefore, water droplets and the like can be removed more efficiently without causing a decrease in strength or an increase in size.
The 2 nd vibration body portion 25 of the present modification has the same configuration as that of the 1 st modification. In a plan view, the outer peripheral edge of the coupling portion 6 overlaps the stepped portion 25e, and the coupling portion 6 overlaps the 2 nd surface 25 d.
Here, when the resonance frequency of the vibration mode in which the light transmitting body vibrates is f1 and the resonance frequency of the vibration mode in which the flange portion vibrates is f2 as described above, the frequency difference between the resonance frequency f1 of the vibration mode in which the light transmitting body vibrates and the resonance frequency f2 of the vibration mode in which the flange portion vibrates is represented by (f1-f 2). The normalized frequency difference obtained by normalizing the frequency difference (f1-f2) by the resonance frequency f1 of the vibration mode in which the light-transmitting body vibrates is expressed by { (f1-f2)/f1 }. times.100 (%).
The resonance frequency f2 of the vibration mode of the flange portion vibration can be adjusted by the length of the flange portion 9 shown in fig. 2. Thereby, the normalized frequency difference can be adjusted by the length of the flange portion 9. Since the resonance frequency f2 of the vibration mode of the flange vibration is higher as the flange 9 is shorter, the normalized frequency difference becomes smaller. On the other hand, the longer the flange 9 is, the lower the resonance frequency f2 of the vibration mode of the flange vibration is, and therefore the normalized frequency difference becomes a larger value.
Hereinafter, the relationship between the normalized frequency difference and the coupling coefficient and displacement of the vibration mode in which the light transmissive body vibrates and the coupling coefficient and displacement of the vibration mode in which the flange portion vibrates is shown.
Fig. 8 is a graph showing the relationship between the normalized frequency difference and the coupling coefficient between the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates. Fig. 9 is a diagram showing a relationship between the normalized frequency difference and the displacement between the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates. In fig. 8 and 9, the solid line indicates the result of the vibration mode in which the translucent body vibrates, and the broken line indicates the result of the vibration mode in which the flange portion vibrates. The displacement shown in fig. 9 indicates the magnitude of the displacement when a voltage of 1V is applied.
As shown in fig. 8, the magnitude relationship of the coupling coefficients of the vibration mode of the transparent body vibration and the vibration mode of the flange vibration is opposite in the vicinity of 0% of the normalized frequency difference. Therefore, the state of vibration is unstable. Preferably, the normalized frequency difference is-10% or less or 10% or more. This stabilizes the state of vibration.
As shown in fig. 8 and 9, in the vibration mode in which the flange portion vibrates, when the normalized frequency difference is-45% or less, both the coupling coefficient and the displacement are largely reduced. Particularly at normalized frequency differences of less than-70%, the coupling coefficient is as low as less than 5% and the displacement is as low as less than about 200 nm/1V. The normalized frequency difference is preferably-70% or more and-10% or less, more preferably-45% or more and-10% or less. This makes it possible to appropriately increase the coupling coefficient of the vibration mode of the flange portion vibration and to appropriately increase the displacement while stabilizing the vibration state.
On the other hand, if the flange 9 is too long, various stray waves (spidious) are generated, and the excitation of the vibration mode of the light-transmitting body vibration may be unstable. Thus, the normalized frequency difference is preferably 10% or more and 20% or less. This can stabilize the state of vibration.
As shown in fig. 8 and 9, in the vibration mode in which the light transmissive body vibrates, the coupling coefficient is high and the displacement is large in the range other than the range in which the normalized frequency difference is larger than-10% and smaller than 10%. Here, the absolute value of the difference between the coupling coefficient of the vibration mode in which the transparent body vibrates and the coupling coefficient of the vibration mode in which the flange vibrates is preferably 2% or less. In this case, the coupling coefficient can be increased for both the vibration mode of the light transmitting body vibration and the vibration mode of the flange portion vibration, and the displacement can be increased. Accordingly, the connecting body of the light-transmitting body 8 and the vibrating body 3 can be appropriately vibrated in any one of the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates, and water droplets and the like can be more reliably and efficiently removed.
Description of the reference numerals
1 … vibration device; 2 … vibrating element; 3 … vibrating body; 3a, 3b … at the 1 st open end and the 2 nd open end; 3c … outer side; 3d … medial side; 4 … 1 st vibration body; 5 … 2 nd vibration body; 6 … connecting part; 7 … piezoelectric vibrator; 8 … light transmissive body; 9 … flange portion; 10 … imaging device; 10a … image pickup element; 12 … driver circuit; 23 … vibrating body; 25 … 2 nd vibrating body; 25c, 25d …, 1 st and 2 nd surfaces; 25e … step; 33 … vibrating body.
Claims (17)
1. A vibration device, wherein,
the vibration device includes:
a vibrating body having a cylindrical shape and having a 1 st opening end and a 2 nd opening end, and an outer side surface and an inner side surface connecting the 1 st opening end and the 2 nd opening end;
a light-transmitting body connected to the 2 nd opening end of the vibrating body; and
a piezoelectric vibrator disposed on the vibrator to vibrate a connecting body of the light transmitting body and the vibrator,
the vibrator has a flange portion extending outward from the outer side surface of the vibrator,
the vibration device further includes a drive circuit electrically connected to the piezoelectric vibrator, and configured to vibrate a connecting body between the light-transmitting body and the vibration body in accordance with a vibration mode in which the light-transmitting body vibrates or a vibration mode in which the flange portion vibrates, and to alternately switch between the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates.
2. A vibration device, wherein,
the vibration device includes:
a vibrating body having a cylindrical shape and having a 1 st opening end and a 2 nd opening end, and an outer side surface and an inner side surface connecting the 1 st opening end and the 2 nd opening end;
a light-transmitting body connected to the 2 nd opening end of the vibrating body; and
a piezoelectric vibrator disposed on the vibrator to vibrate a connecting body of the light transmitting body and the vibrator,
the vibrator has a flange portion extending outward from the outer side surface of the vibrator,
the vibration device further includes a drive circuit electrically connected to the piezoelectric vibrator, for vibrating a connection body of the light-transmitting body and the vibration body in a vibration mode in which vibration of the light-transmitting body is dominant or a vibration mode in which vibration of the flange portion is dominant, and for alternately switching between a vibration mode in which vibration of the light-transmitting body is dominant and a vibration mode in which vibration of the flange portion is dominant,
when the resonant frequency of the light transmitting body vibration is f1 and the resonant frequency of the flange portion vibration is f2, the vibration frequency of the vibration mode in which the light transmitting body vibration is dominant is set to a frequency within a frequency range including f1, and the vibration frequency of the vibration mode in which the flange portion vibration is dominant is set to a frequency within a frequency range including f 2.
3. The vibration device according to claim 1 or 2,
the vibrator includes a cylindrical 1 st vibrating body portion, a frame-shaped 2 nd vibrating body portion, and a frame-shaped connecting portion connecting the 1 st vibrating body portion and the 2 nd vibrating body portion,
the 1 st oscillating body portion includes the 1 st open end portion, and the 2 nd oscillating body portion includes the 2 nd open end portion.
4. The vibration device according to claim 3,
the flange portion is disposed on the 2 nd vibrating body portion.
5. The vibration device according to claim 4,
the outer peripheral edge of the connecting portion overlaps the light transmitting body in a plan view.
6. The vibration device according to claim 4 or 5,
the connecting portion and an outer peripheral edge of the 1 st vibration body portion overlap each other in a plan view, and an inner peripheral edge of the connecting portion is located outward of an inner peripheral edge of the 1 st vibration body portion and an inner peripheral edge of the 2 nd vibration body portion.
7. The vibration device according to any one of claims 3 to 6,
the 1 st vibration body portion is cylindrical, the 2 nd vibration body portion is annular, and the connection portion is annular.
8. The vibration device according to any one of claims 1 to 7,
the vibration mode in which the light-transmitting body vibrates is a vibration mode in which: wherein the vibration node is not located inside the outer peripheral edge in a plan view, and the amplitude of the vibration is maximized at the center of the light-transmitting body,
the vibration mode in which the flange portion vibrates is a vibration mode in which: the flange portion has a maximum amplitude of the outer peripheral edge in a plan view.
9. The vibration device according to claim 8,
when the resonance frequency of the vibration mode in which the transparent body vibrates is f1 and the resonance frequency of the vibration mode in which the flange portion vibrates is f2, a normalized frequency difference { (f1-f2)/f1} × 100 (%) obtained by normalizing the frequency difference (f1-f2) between the resonance frequency f1 of the vibration mode in which the transparent body vibrates and the resonance frequency f2 of the vibration mode in which the flange portion vibrates by the resonance frequency f1 of the vibration mode in which the transparent body vibrates is-70% or more and-10% or less.
10. The vibration device according to claim 8,
when the resonance frequency of the vibration mode in which the transparent body vibrates is f1 and the resonance frequency of the vibration mode in which the flange portion vibrates is f2, a normalized frequency difference { (f1-f2)/f1} × 100 (%) obtained by normalizing the frequency difference (f1-f2) between the resonance frequency f1 of the vibration mode in which the transparent body vibrates and the resonance frequency f2 of the vibration mode in which the flange portion vibrates, using the resonance frequency f1 of the vibration mode in which the transparent body vibrates, is 10% or more and 20% or less.
11. The vibration device according to any one of claims 8 to 10,
the absolute value of the difference between the coupling coefficient of the vibration mode in which the light-transmitting body vibrates and the coupling coefficient of the vibration mode in which the flange portion vibrates is 2% or less.
12. The vibration device according to any one of claims 1 to 11,
the piezoelectric vibrator is disposed at the 1 st opening end portion of the vibrator.
13. The vibration device according to any one of claims 1 to 12,
when the direction connecting the 1 st opening end and the 2 nd opening end is defined as an axial direction, the light-transmitting body is connected to an outermost portion of the vibrating body in the axial direction.
14. A vibration device, wherein,
the vibration device includes:
a vibrating body having a cylindrical shape and having a 1 st opening end and a 2 nd opening end;
a light-transmitting body connected to the 2 nd opening end of the vibrating body; and
a piezoelectric vibrator that vibrates a connected body of the light transmitting body and the vibrator,
the vibrator has a flange portion extending outward from the 2 nd opening end portion connected to the light transmitting body,
the vibration device further includes a drive circuit electrically connected to the piezoelectric vibrator, and configured to vibrate a coupling portion between the light-transmitting body and the vibrator in accordance with a vibration mode in which the light-transmitting body vibrates or a vibration mode in which the flange portion vibrates, and to alternately switch between the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates.
15. A vibration device, wherein,
the vibration device includes:
a vibrating body having a cylindrical shape and having a 1 st opening end and a 2 nd opening end;
a light-transmitting body connected to the 2 nd opening end of the vibrating body; and
a piezoelectric vibrator that vibrates a connected body of the light transmitting body and the vibrator,
the vibrator has a flange portion extending outward from the 2 nd opening end portion connected to the light transmitting body,
the vibration device further includes a drive circuit electrically connected to the piezoelectric vibrator, for vibrating a connection portion between the light-transmitting body and the vibrator in accordance with a vibration mode in which the light-transmitting body vibrates or a vibration mode in which the flange portion vibrates, and for alternately switching between the vibration mode in which the light-transmitting body vibrates and the vibration mode in which the flange portion vibrates,
in a vibration mode in which the flange portion vibrates, an amplitude of the flange portion is larger than an amplitude of the light transmitting body.
16. The vibration device according to claim 14 or 15,
when the direction connecting the 1 st opening end portion and the 2 nd opening end portion is an axial direction, the flange portion is disposed at a position closer to the light transmitting body side than a center position in the axial direction of the vibrator.
17. The vibration device according to any one of claims 14 to 16,
the vibration mode in which the light-transmitting body vibrates is a vibration mode in which: wherein the vibration node is not located inside the outer peripheral edge in a plan view, and the amplitude of the vibration is maximized at the center of the light-transmitting body,
the vibration mode in which the flange portion vibrates is a vibration mode in which: the flange portion has a maximum amplitude of the outer peripheral edge in a plan view.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-123352 | 2018-06-28 | ||
| JP2018123352 | 2018-06-28 | ||
| PCT/JP2019/002545 WO2020003571A1 (en) | 2018-06-28 | 2019-01-25 | Vibration device |
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| Publication Number | Publication Date |
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| CN112004614A true CN112004614A (en) | 2020-11-27 |
| CN112004614B CN112004614B (en) | 2022-03-15 |
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| CN201980028001.8A Active CN112004614B (en) | 2018-06-28 | 2019-01-25 | Vibration device |
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| US (1) | US11745219B2 (en) |
| JP (1) | JP6962470B2 (en) |
| CN (1) | CN112004614B (en) |
| WO (1) | WO2020003571A1 (en) |
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| JP6601576B2 (en) * | 2016-11-30 | 2019-11-06 | 株式会社村田製作所 | Vibration device, water drop removing device for camera, and camera |
| JP7070497B2 (en) * | 2019-04-25 | 2022-05-18 | 株式会社村田製作所 | Vibration device and optical detection device |
| CN113891820A (en) * | 2020-03-19 | 2022-01-04 | 株式会社村田制作所 | Vibration device and vibration control method |
| EP3912735B1 (en) * | 2020-03-27 | 2023-09-27 | Murata Manufacturing Co., Ltd. | Vibration device and vibration control method |
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| JP6962470B2 (en) | 2021-11-05 |
| CN112004614B (en) | 2022-03-15 |
| US20200406298A1 (en) | 2020-12-31 |
| JPWO2020003571A1 (en) | 2021-02-15 |
| WO2020003571A1 (en) | 2020-01-02 |
| US11745219B2 (en) | 2023-09-05 |
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