CN112002539B - Integrated inductor and integrated circuit capable of reducing far-end electromagnetic radiation - Google Patents
Integrated inductor and integrated circuit capable of reducing far-end electromagnetic radiation Download PDFInfo
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- CN112002539B CN112002539B CN202010899867.0A CN202010899867A CN112002539B CN 112002539 B CN112002539 B CN 112002539B CN 202010899867 A CN202010899867 A CN 202010899867A CN 112002539 B CN112002539 B CN 112002539B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2823—Wires
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F38/00—Adaptations of transformers or inductances for specific applications or functions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/10—Inductors
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Abstract
The invention discloses an integrated inductor capable of reducing far-end electromagnetic radiation, which comprises: the four rings are connected in parallel according to a certain sequence, so that the magnetic fields of the four closely-connected ring-shaped inductors are adjacent and opposite in direction. The inductor comprises a first lead, a second lead and a third lead, wherein the first lead and the second lead are crossed with each other, a first isolation layer is arranged at the overlapped part of the first lead and the second lead, each end of the first lead is respectively connected with two ends of the second lead through the third lead, so that the first lead, the second lead and the third lead form four parallel inductance coils H1, H2, H3 and H4, and the shape and the area of the area formed by the four inductance coils are the same. The invention greatly reduces the electromagnetic radiation of the integrated inductor to the far end, thereby reducing the influence on other VCOs; in addition, a smaller value inductor can be manufactured, the upper limit range of the working frequency of the VCO is improved, the phase noise is reduced, and the Q value is improved.
Description
Technical Field
The present invention relates to the field of semiconductors. More particularly, the present invention relates to an integrated inductor and integrated circuit that reduces electromagnetic radiation to remote locations.
Background
A large number of passive devices are included in an integrated circuit, of which an on-chip inductor is one of the most important, and is one of the important components of a radio frequency CMOS integrated circuit. In a typical wireless product, the inductive element has a significant effect on the overall radio frequency performance, especially with respect to other circuits that may generate radiation effects. The design and analysis of these inductive components has also been extensively studied. The inductor serves as a core component of the radio frequency circuit, and generally can affect the overall performance of the whole circuit. At present, on-chip inductors with high quality factors are widely applied to radio frequency circuit modules such as VCO (voltage controlled oscillator), low noise amplifier and the like. As the process nodes of CMOS technology become smaller, the impact of inductive radiation on other circuits becomes more and more critical. In a radio frequency transceiver, a plurality of VCOs will affect each other and other circuits, and how to reduce or even eliminate the effects is the problem to be solved by the present invention.
Disclosure of Invention
An object of the present invention is to solve at least the above problems and to provide at least the advantages described later.
The invention also aims to provide an integrated inductor and an integrated circuit capable of reducing far-end electromagnetic radiation, wherein four annular integrated inductors which are close together are designed, and the four annular integrated inductors are mutually connected in parallel according to a certain sequence, so that the adjacent two directions of the magnetic fields of the four close-together annular integrated inductors are opposite, and the radiation influence on a far-end circuit can be mutually offset by designing the four close-together annular integrated inductors, so that the electromagnetic radiation on the far end by the integrated inductor which can reduce the far-end electromagnetic radiation is greatly reduced, and the influence on other VCOs is reduced; in addition, a smaller value inductor can be manufactured, the upper limit range of the working frequency of the VCO is improved, the phase noise is reduced, and the Q value is improved.
To achieve these objects and other advantages in accordance with the purpose of the invention, there is provided an integrated inductor capable of reducing electromagnetic radiation to a far end, comprising:
the first lead and the second lead are crossed, a first isolation layer is arranged at the overlapped part of the first lead and the second lead, each end of the first lead is respectively connected with two ends of the second lead through the third lead, so that the first lead, the second lead and the fourth lead form four parallel first inductance coils H1, H2, H3 and H4, and the shape and the area of the area formed by the four first inductance coils are the same.
Preferably, the third wire is connected between the first wire and the second wire in a circular arc shape.
Preferably, the third wire is connected between the first wire and the second wire in a broken line manner, and the first wire, the second wire and the fourth wire form a polygon with at least more than six sides.
Preferably, the integrated inductor further comprises:
the four conductors are also connected between the end part of the first conductor and the end part of the second conductor, the first conductor, the second conductor and the at least one group of conductors form at least one group of second inductance coils, each group comprises four second inductance coils connected in parallel, the shapes and the areas of the areas formed by the four second inductance coils are the same, the four second inductance coils in each group are correspondingly arranged at the periphery or the inner part of the four first inductance coils respectively, and the areas of the areas formed by the second inductance coils in different groups are gradually increased or reduced.
The invention also provides a first integrated inductor which is manufactured by applying the integrated inductor capable of reducing far-end electromagnetic radiation, wherein the first integrated inductor is formed by serially connecting a plurality of integrated inductors capable of reducing far-end electromagnetic radiation on the same plane.
The invention also provides a second integrated inductor which is manufactured by applying the integrated inductor capable of reducing far-end electromagnetic radiation, the second integrated inductor is manufactured by overlapping and connecting a plurality of integrated inductors capable of reducing far-end electromagnetic radiation in series, and a second isolating layer is arranged between two adjacent integrated inductors capable of reducing far-end electromagnetic radiation.
The invention also provides a third integrated inductor which is manufactured by applying the integrated inductor capable of reducing the electromagnetic radiation to the far end, wherein the third integrated inductor is formed by connecting a plurality of integrated inductors capable of reducing the electromagnetic radiation to the far end in series on the same plane.
The invention also provides a fourth integrated inductor which is manufactured by applying the integrated inductor capable of reducing far-end electromagnetic radiation, the fourth integrated inductor is manufactured by overlapping and connecting a plurality of integrated inductors capable of reducing far-end electromagnetic radiation in series, and a third isolating layer is arranged between two adjacent integrated inductors capable of reducing far-end electromagnetic radiation.
The invention also provides an integrated circuit comprising the integrated inductor capable of reducing electromagnetic radiation to a far end.
The invention at least comprises the following beneficial effects: the four annular integrated inductors which are close to each other are designed, the four annular integrated inductors are mutually connected in parallel according to a certain sequence, so that two adjacent magnetic field directions of the four annular integrated inductors which are close to each other are opposite, the radiation influence on a far-end circuit can be mutually offset by designing the four annular integrated inductors which are close to each other, the electromagnetic radiation on the far end of the integrated inductor which can reduce the electromagnetic radiation on the far end integrally can be greatly reduced, and the influence on other VCOs is reduced. Macroscopically as if one of the radiations entered the adjacent one, the mutual inductance formed a closed loop with little leakage. In addition, the integrated inductor capable of reducing far-end electromagnetic radiation reduces the inductance value by connecting the four annular integrated inductors in parallel, can improve the upper limit range of the working frequency of the VCO, reduces phase noise and improves the Q value.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is a schematic diagram of a first structure of an integrated inductor capable of reducing electromagnetic radiation to a far end according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an integrated inductor with terminals for reducing electromagnetic radiation at a remote location, according to an embodiment of the present invention;
FIG. 3 is a diagram illustrating a second structure of an integrated inductor capable of reducing electromagnetic radiation to a far end according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a third structure of an integrated inductor capable of reducing electromagnetic radiation to a far end according to an embodiment of the present invention
FIG. 5 is a schematic diagram of a first structure of an integrated inductor capable of reducing electromagnetic radiation to a far end according to another embodiment of the present invention;
FIG. 6 is a diagram illustrating a second structure of an integrated inductor capable of reducing electromagnetic radiation to a far end according to another embodiment of the present invention;
fig. 7 is a schematic structural diagram of a first integrated inductor according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a second integrated inductor according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of a third integrated inductor according to an embodiment of the present invention;
fig. 10 is a schematic structural diagram of a fourth integrated inductor according to an embodiment of the present invention.
Detailed Description
The present invention is further described in detail below with reference to the attached drawings so that those skilled in the art can implement the invention by referring to the description text.
It is to be noted that the experimental methods described in the following embodiments are all conventional methods unless otherwise specified, and the reagents and materials, if not otherwise specified, are commercially available; in the description of the present invention, the terms "lateral", "longitudinal", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
As shown in fig. 1 to 4, the present invention provides an integrated inductor capable of reducing far-end electromagnetic radiation, comprising:
the inductor comprises a first lead 1, a second lead 2 and four third leads 3, wherein the first lead 1 and the second lead 2 are crossed with each other, a first isolation layer is arranged at the overlapped part of the first lead 1 and the second lead 2, each end of the first lead 1 is respectively connected with two ends of the second lead 2 through the two third leads 3, so that the first lead 1, the second lead 2 and the four third leads 3 enclose four first inductance coils H1, H2, H3 and H4 which are connected in parallel, and the shape and the area of the enclosed area of the four first inductance coils are the same;
as shown in fig. 2, in order to facilitate the use of the integrated inductor capable of reducing far-end electromagnetic radiation, a first terminal 4 is disposed at one end of the first conducting wire 1, a second terminal 5 is disposed at one end of the second conducting wire 2, and the first terminal 4 and the second terminal 5 may not be disposed actually, and the integrated inductor capable of reducing far-end electromagnetic radiation is directly connected into a circuit through one end of the first conducting wire 1 and one end of the second conducting wire 2 in use.
The conducting wire 3 can be enclosed into a smooth circular arc shape, so that the shape of an area enclosed by the first inductance coil is an irregular ring shape, as shown in fig. 1-2; the conducting wires 3 may also be folded to form a polygonal shape, so that the shape of the area surrounded by the first inductor winding is polygonal, as shown in fig. 3 to 4.
Here, the current may enter from one end of the first wire 1 or from one end of the second wire 2.
In use, if it is described that current enters from the upper end of the first lead 1, the current directly enters the first inductor H1 and the first inductor H4 respectively after entering from the upper end of the first lead 1, and at the same time, the current also enters the first inductor H2 and the first inductor H3 respectively after passing through the first lead 1, the direction of the current in the first inductor H1 is counterclockwise, the direction of the current in the first inductor H4 is clockwise, the direction of the current in the first inductor H2 is clockwise, the direction of the current in the first inductor H3 is counterclockwise, and if it is described that current enters from the lower end of the first lead 2, the situation is opposite to the above description. The four first inductor coils which are close together are adjacent and have opposite magnetic field directions, the radiation influence on a far-end circuit can be mutually offset by designing the four first inductor coils which are close together, the electromagnetic radiation on the far end of the integrated inductor which can reduce the electromagnetic radiation on the far end is greatly reduced, and therefore the influence on other VCOs is reduced.
In another embodiment, as shown in FIGS. 5-6, the integrated inductor capable of reducing far-end electromagnetic radiation further comprises:
at least one group of four wires 6, each group of four wires 6, the four wires 6 are also connected between the end of the first wire 1 and the end of the second wire 2, the first wire 1, the second wire 2 and the at least one group of four wires 6 form at least one group of second inductance coils in a surrounding manner, each group of four second inductance coils are connected in parallel, the shape and the area of the region formed by the four second inductance coils in the surrounding manner are the same, the four second inductance coils in each group are respectively and correspondingly arranged at the periphery or the inner part of the four first inductance coils, and the area of the region formed by the second inductance coils in different groups is gradually increased or gradually reduced.
Here, fig. 5 and fig. 6 only show a case where one set of second inductor winding is disposed on the periphery or inside of the first inductor winding, when there are multiple sets of the four wires 6, there are multiple sets of the second inductor windings that are surrounded, if multiple second inductor windings corresponding to the same first inductor winding in the multiple sets of second inductor windings are all on the periphery of the first inductor winding, the area of the region surrounded by the multiple second inductor windings is gradually increased, and if multiple second inductor windings corresponding to the same first inductor winding in the multiple sets of second inductor windings are all inside the first inductor winding, the area of the region surrounded by the multiple second inductor windings is gradually decreased. Of course, there is also a case where a plurality of second inductance wires corresponding to the same first inductance coil are present in the periphery of the first inductance coil and are present in the interior of the first inductance coil, for different sets of second inductance wires.
When the VCO is used, similar to the previous embodiment, the two adjacent magnetic field directions of the four first inductor coils close together are opposite, the radiation influence on the far-end circuit is mutually offset, the two adjacent magnetic field directions of the four second inductor coils close together are opposite, and the radiation influence on the far-end circuit is mutually offset, so that the electromagnetic radiation on the far-end of the integrated inductor whole with far-end electromagnetic radiation can be reduced, meanwhile, because the embodiment comprises more inductor coils connected in parallel, the integral inductance value of the integrated inductor with far-end electromagnetic radiation can be further reduced, the upper limit range of the working frequency of the VCO can be greatly increased, the phase noise is reduced, and the Q value is increased.
In another embodiment, as shown in fig. 1-2, the conducting wire three 3 is connected between the conducting wire one 1 and the conducting wire two 2 in a circular arc shape.
Here, the four conductive lines 6 may be connected between the first conductive lines 1 and the second conductive lines 2 in the same manner as the three conductive lines 3, and of course, the four conductive lines 6 may be connected between the first conductive lines 1 and the second conductive lines 2 in other shapes.
In another embodiment, the three wires 3 are connected between the first wire 1 and the second wire 2 in a polygonal manner, and the first wire 1, the second wire 2 and the four wires 3 enclose a polygon with at least six sides, as shown in fig. 3, a hexagonal inductance coil is enclosed by the first wire 1, the second wire 2 and the four wires 3, and as shown in fig. 4, an octagonal inductance coil is enclosed by the first wire 1, the second wire 2 and the four wires 3.
Here, the four conductive lines 6 may be connected between the first conductive lines 1 and the second conductive lines 2 in the same manner as the three conductive lines 3, and of course, the four conductive lines 6 may be connected between the first conductive lines 1 and the second conductive lines 2 in other shapes.
As shown in fig. 7, the present invention further provides a first integrated inductor manufactured by using the above integrated inductor capable of reducing far-end electromagnetic radiation, where the first integrated inductor is formed by connecting a plurality of the above integrated inductors capable of reducing far-end electromagnetic radiation in series on the same plane.
As shown in fig. 8, the present invention further provides a second integrated inductor manufactured by applying the above integrated inductor capable of reducing electromagnetic radiation to a far end, the second integrated inductor is manufactured by overlapping and connecting a plurality of the above integrated inductors capable of reducing electromagnetic radiation to a far end in series, and a second isolation layer is disposed between two adjacent integrated inductors capable of reducing electromagnetic radiation to a far end, which is illustrated by only 3 integrated inductors capable of reducing electromagnetic radiation to a far end, wherein a dotted line indicates that the second isolation layer penetrates through the second isolation layer, and the terminals are connected to each other.
As shown in fig. 9, the present invention further provides a third integrated inductor manufactured by using the above integrated inductor capable of reducing far-end electromagnetic radiation, where the third integrated inductor is formed by connecting a plurality of the above integrated inductors capable of reducing far-end electromagnetic radiation in series on the same plane.
As shown in fig. 10, the present invention further provides a fourth integrated inductor manufactured by applying the above integrated inductor capable of reducing electromagnetic radiation to a far end, wherein the fourth integrated inductor is manufactured by overlapping and connecting a plurality of the above integrated inductors capable of reducing electromagnetic radiation to a far end in series, and a third isolation layer is disposed between two adjacent integrated inductors capable of reducing electromagnetic radiation to a far end, and only 3 integrated inductors capable of reducing electromagnetic radiation to a far end are taken as an example, in the figure, a dotted line indicates that the third isolation layer penetrates through the third isolation layer, and a terminal is connected to the third isolation layer.
The invention also provides an integrated circuit comprising the integrated inductor capable of reducing far-end electromagnetic radiation, and similarly, the first integrated inductor, the second integrated inductor, the third integrated inductor and the fourth integrated inductor can also be applied to the integrated circuit.
While embodiments of the invention have been described above, it is not limited to the applications set forth in the description and the embodiments, which are fully applicable in various fields of endeavor to which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.
Claims (9)
1. An integrated inductor for reducing electromagnetic radiation at a remote location, comprising:
the first inductor comprises a first lead, a second lead and a third lead, wherein the first lead and the second lead are crossed with each other, a first isolation layer is arranged at the overlapped part of the first lead and the second lead, one end of the first lead is connected with one end of the second lead through the third lead, one end of the first lead is connected with the other end of the second lead through the third lead, the other end of the first lead is connected with one end of the second lead through the third lead, the other end of the first lead is connected with the other end of the second lead through the third lead, so that the first lead, the second lead and the third lead form four parallel first inductor coils H1, H2, H3 and H4, and the shapes and areas of the areas formed by the four first inductor coils are the same.
2. The integrated inductor of claim 1, wherein said third conductor is rounded and connected between said first and second conductors.
3. The integrated inductor capable of reducing electromagnetic radiation at a far end of claim 1, wherein the three conducting wires are connected between the first conducting wire and the second conducting wire in a polygonal line manner, and the first conducting wire, the second conducting wire and the four conducting wires form a polygon with at least six sides.
4. The integrated inductor for reducing electromagnetic radiation at the distal end of claim 1, further comprising:
the four conductors are also connected between the end part of the first conductor and the end part of the second conductor, the first conductor, the second conductor and the at least one group of conductors form at least one group of second inductance coils, each group comprises four second inductance coils connected in parallel, the shapes and the areas of the areas formed by the four second inductance coils are the same, the four second inductance coils in each group are correspondingly arranged at the periphery or the inner part of the four first inductance coils respectively, and the areas of the areas formed by the second inductance coils in different groups are gradually increased or reduced.
5. A first integrated inductor manufactured by applying the integrated inductor capable of reducing far-end electromagnetic radiation according to claim 1, wherein the first integrated inductor is formed by serially connecting a plurality of integrated inductors capable of reducing far-end electromagnetic radiation according to claim 1 in the same plane.
6. A second integrated inductor manufactured by applying the integrated inductor capable of reducing far-end electromagnetic radiation according to claim 1, wherein the second integrated inductor is manufactured by overlapping and connecting a plurality of integrated inductors capable of reducing far-end electromagnetic radiation according to claim 1 in series, and a second isolation layer is disposed between two adjacent integrated inductors capable of reducing far-end electromagnetic radiation.
7. A third integrated inductor manufactured by applying the integrated inductor capable of reducing far-end electromagnetic radiation according to claim 4, wherein the third integrated inductor is formed by serially connecting a plurality of integrated inductors capable of reducing far-end electromagnetic radiation according to claim 4 on the same plane.
8. A fourth integrated inductor manufactured by applying the integrated inductor capable of reducing far-end electromagnetic radiation according to claim 4, wherein the fourth integrated inductor is manufactured by overlapping and connecting a plurality of integrated inductors capable of reducing far-end electromagnetic radiation according to claim 4 in series, and a third isolation layer is disposed between two adjacent integrated inductors capable of reducing far-end electromagnetic radiation.
9. An integrated circuit comprising an integrated inductor according to any of claims 1 to 4 capable of reducing electromagnetic radiation to a remote location.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010899867.0A CN112002539B (en) | 2020-08-31 | 2020-08-31 | Integrated inductor and integrated circuit capable of reducing far-end electromagnetic radiation |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010899867.0A CN112002539B (en) | 2020-08-31 | 2020-08-31 | Integrated inductor and integrated circuit capable of reducing far-end electromagnetic radiation |
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| CN112002539A CN112002539A (en) | 2020-11-27 |
| CN112002539B true CN112002539B (en) | 2021-04-13 |
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| US11652444B2 (en) | 2021-09-20 | 2023-05-16 | Apple Inc. | Inductor topology for phase noise reduction |
| CN114446623B (en) * | 2022-02-09 | 2023-01-17 | 北京力通通信有限公司 | Inductor assembly and integrated circuit |
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| CN1950913A (en) * | 2004-03-03 | 2007-04-18 | 艾利森电话股份有限公司 | Method and inductor layout for reduced vco coupling |
| CN102856652A (en) * | 2011-03-15 | 2013-01-02 | 深圳光启高等理工研究院 | Electromagnetic transparent metamaterial |
| CN104584152A (en) * | 2012-04-03 | 2015-04-29 | 爱立信调制解调器有限公司 | Inductor layout, and voltage-controlled oscillator (VCO) system |
| CN105304268A (en) * | 2014-06-11 | 2016-02-03 | 瑞昱半导体股份有限公司 | Apparatus with variable parameters, variable inductor and apparatus provided with variable inductor |
| WO2020171762A1 (en) * | 2019-02-21 | 2020-08-27 | Kkm Kraftkvalitémätning Ab | Cage core inductor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2497310A (en) * | 2011-12-06 | 2013-06-12 | Cambridge Silicon Radio Ltd | Inductor structure |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1950913A (en) * | 2004-03-03 | 2007-04-18 | 艾利森电话股份有限公司 | Method and inductor layout for reduced vco coupling |
| CN102856652A (en) * | 2011-03-15 | 2013-01-02 | 深圳光启高等理工研究院 | Electromagnetic transparent metamaterial |
| CN104584152A (en) * | 2012-04-03 | 2015-04-29 | 爱立信调制解调器有限公司 | Inductor layout, and voltage-controlled oscillator (VCO) system |
| CN105304268A (en) * | 2014-06-11 | 2016-02-03 | 瑞昱半导体股份有限公司 | Apparatus with variable parameters, variable inductor and apparatus provided with variable inductor |
| WO2020171762A1 (en) * | 2019-02-21 | 2020-08-27 | Kkm Kraftkvalitémätning Ab | Cage core inductor |
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