CN111993160B - Method for identifying similar vibration frequency based on ultra-precise diamond lathe surface shape - Google Patents

Method for identifying similar vibration frequency based on ultra-precise diamond lathe surface shape Download PDF

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CN111993160B
CN111993160B CN202010504048.1A CN202010504048A CN111993160B CN 111993160 B CN111993160 B CN 111993160B CN 202010504048 A CN202010504048 A CN 202010504048A CN 111993160 B CN111993160 B CN 111993160B
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魏巍
李加胜
李星占
杨中元
李强
陈刚利
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Abstract

The invention discloses a method for identifying similar vibration frequencies based on the surface shape of an ultra-precise diamond lathe, which is characterized in that the extension of the surface shape data of a circular workpiece is approximate to quarter circular surface shape data, and the connected boundary data are sequentially copied and spliced into four groups so as to improve the resolution and not change the frequency characteristic of the surface shape of the workpiece; and performing multi-scale self-adaptive modal decomposition processing on the extended annular workpiece surface shape data by adopting an improved two-dimensional empirical modal decomposition method. By utilizing the quadrupling continuation decomposition method for the circular workpiece surface shape data, the key similar vibration frequencies of 2Hz, 3Hz and 53Hz in the surface shape processed by the ultra-precision diamond lathe can be accurately identified, and the accurate identification of the important vibration frequencies of 2Hz and 3Hz by the ultra-precision diamond lathe under the condition that the resolution is 1Hz can be realized.

Description

Method for identifying similar vibration frequency based on ultra-precise diamond lathe surface shape
Technical Field
The invention relates to the technical field of ultra-precision machining, in particular to a similar vibration frequency identification method based on the surface shape of an ultra-precision diamond lathe.
Background
The ultra-precise diamond turning technology has the characteristics of high processing precision and good repeatability, and is widely applied to the processing of precise elements in the fields of aerospace, optical precise instruments, nuclear fusion and the like. In the process of ultra-precision diamond turning, because the surface appearance of the workpiece is formed by repeatedly engraving the contour of a cutter on the surface to be processed along an actual cutting track by the cutter, the finally formed three-dimensional surface appearance of the workpiece is influenced by the dynamic performance of a machine tool to form the texture characteristics of a specific shape.
The main shaft of the ultra-precise diamond turning system generally adopts an air floatation supporting mode, has low supporting rigidity and is a weak link of the whole ultra-precise diamond dynamic turning system. Due to manufacturing and installation reasons, the main shaft rotor often has unbalance, and can generate larger centrifugal force under the condition of high-speed rotation, so that the main shaft rotor is subjected to forced vibration with the vibration frequency being the frequency multiplication of the rotating speed in the dynamic turning process, the surface appearance of a workpiece generates radial texture characteristics, and the surface quality and the service performance of the workpiece are seriously influenced. The characteristic texture is analyzed and extracted from the surface topography data of the workpiece by using an effective data analysis method, so that the dynamic error tracing analysis of ultra-precision turning can be assisted, and the processing quality and the processing efficiency are improved.
The accurate identification of the key vibration frequency is beneficial to further improving the processing precision of the workpiece. Aiming at processing a circular workpiece with a specific purpose, by compiling an ultra-precision diamond lathe surface shape simulation algorithm, the key vibration frequencies influencing the surface shape precision of the processed circular workpiece are 2Hz, 3Hz and 53Hz, and because the spatial frequency resolution is 1Hz, the 2Hz and 3Hz can not be accurately separated by adopting a classical discrete Fourier transform method and a two-dimensional empirical mode decomposition method, so that the mode aliasing phenomenon occurs, and the key vibration frequencies influencing the processed surface shape of the workpiece, namely 2Hz and 3Hz, can not be accurately identified.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the invention provides a method for identifying the similar vibration frequency of the surface shape based on an ultra-precise diamond lathe, which solves the problems that the prior method can not identify the important adjacent vibration frequencies of 2Hz and 3Hz under the condition that the spatial resolution is 1 Hz.
The invention is realized by the following technical scheme:
a method for identifying similar vibration frequencies based on the surface shape of an ultra-precise diamond lathe aims at a circular workpiece and comprises the following steps:
s1, extending the surface shape data of the circular workpiece by N times along the circumferential direction, and sequentially copying and splicing the connected boundary data into N groups to obtain extended rear shape data; n is a positive integer more than or equal to 4;
s2, performing multi-scale self-adaptive modal decomposition on the extended surface shape data by adopting an improved two-dimensional empirical mode decomposition method, extracting local detail information of the surface shape data, transforming and constructing a monogenic surface shape signal based on a Riesz technology, calculating the overall frequency of the surface shape, and obtaining a two-dimensional empirical mode decomposition circulation termination condition;
and S3, obtaining the characteristic surface shape containing the key frequency after two-dimensional empirical mode decomposition, and determining the size of the characteristic frequency contained in the characteristic surface shape according to the peak value number of the characteristic surface shape and the multiple of the continuation of the surface shape data.
Further preferably, in step S1, the surface shape data of the circular workpiece is extended by four times along the circumferential direction, and the similar boundary data of the extended four data sets are sequentially connected to form a new set of extended circular surface shape data.
Further preferably, in step S3, the characteristic frequencies include 2Hz and 3 Hz.
Further preferably, the improved two-dimensional empirical mode decomposition method comprises the following steps:
step a, recording the surface shape data of the ring-shaped pure copper workpiece after the ultraprecise diamond machining as f (x, y), wherein x and y are sampling points of rows and columns of the surface shape data of the workpiece after the diamond turning machining respectively;
b, carrying out four times of data continuation on the collected surface shape data along the circumferential direction, and sequentially connecting similar boundary parts of the four parts of data after continuation to form a group of new extended circular ring shape surface shape data;
step c, recording the whole surface shape data subjected to surface shape boundary data four-time extension in the circumferential direction as F (x, y), wherein x and y are sampling points of rows and columns of the corresponding surface shape data respectively;
step d, initializing r outside the allowancei(x, y) ═ f (x, y), i ═ 1; internally initializing the margin hij(x,y)＝ri(x,y),j＝1；
Step e, calculating h for the allowanceij(x, y) local maxima and forming a maximum spectrum, denoted Jij(ii) a For maximum value spectrum JijThe maximum value point in the intermediate value is interpolated to obtain hijUpper envelope surface of (x, y), denoted Bmax(x,y)；
Calculate hijLocal minima of (x, y) and forming a spectrum of minima, denoted Sij(ii) a For minimum value spectrum SijThe minimum value point in the intermediate value is interpolated to obtain hijLower envelope surface of (x, y), denoted Bmin(x,y)；
Step f, calculating hijAverage envelope plane P of (x, y)ij(x,y),
Figure GDA0003445553050000021
Step g, extracting local detail information h of the surface shape data F (x, y)i(j+1)(x,y)，hi(j+1)(x,y)＝hij(x,y)-Pij(x,y)；
Step h, for the local detail information hi(j+1)(x, y) performing Riesz transformation, the spatial domain expression of the Riesz transformation being
Figure GDA0003445553050000022
Step i, for the local detail information hi(j+1)(x, y) its monogenic signal is hM(x,y)＝(h,Rx*,RyH) is convolution operation, then the local amplitude l of the surface shape data frequency spectrum informationA，
Figure GDA0003445553050000031
Wherein the subscript a represents the amplitude and M represents the monogenic signal; local phase l of surface data spectrum informationp：
Figure GDA0003445553050000032
a represents the amplitude of the corresponding signal at that time;
step j, comparing the local phase lpFurther calculating to obtain the local frequency l of the frequency spectrum information of the surface shape dataf：
Figure GDA0003445553050000033
Step k, from the local frequency lfTo obtain the overall frequency
Figure GDA0003445553050000034
Step l, calculating cycle termination conditions:
Figure GDA0003445553050000035
if it is
Figure GDA0003445553050000036
If the wavelength is less than the given cutoff wavelength, returning to the step f to carry out the calculation again in a circulating way; if it is
Figure GDA0003445553050000037
Above a given cutoff wavelength, there is an ith intrinsic mode function BIMFi＝hi(j+1)And updating and decomposing the residue ri(x,y)＝ri1(x,y)-BIMFi(x,y)；
Step m, based on the result obtained by decomposing the face shape data, the original face shape data of the workpiece after fly-cutting processing is composed of a plurality of groups of BIMF components and a group of allowance data, and the requirement of the face shape data is met
Figure GDA0003445553050000038
The invention has the following advantages and beneficial effects:
the invention provides a key similar vibration frequency identification method based on the surface shape of an ultra-precise diamond lathe, which solves the problems that the traditional identification method cannot simultaneously and accurately identify 2Hz and 3Hz spatial frequencies due to the limitation that the spatial resolution is 1Hz, and effectively solves the problem that the existing method cannot identify important adjacent important vibration frequencies (2Hz and 3Hz) under the condition that the spatial resolution is 1 Hz.
Aiming at a circular pure copper workpiece machined by an ultra-precision diamond lathe under different cutting parameters, the surface appearance of the machined workpiece is measured in situ by adopting a laser interferometer; carrying out four-time data continuation on the collected surface shape data along the circumferential direction, sequentially connecting similar boundary parts of the four parts of data after the continuation to form a group of new extended annular surface shape data, carrying out multi-scale self-adaptive mode decomposition on the extended surface shape data by adopting an improved two-dimensional empirical mode decomposition method, extracting local detail information of the surface shape data, transforming and constructing a monogenic surface shape signal based on a Riesz technology, calculating the overall frequency of the surface shape, and obtaining a two-dimensional empirical mode decomposition cycle termination condition; the method comprises the steps of obtaining a characteristic surface shape containing key frequency after two-dimensional empirical mode decomposition, determining the size of the characteristic frequency contained in the characteristic surface shape according to the peak value number of the characteristic surface shape and the extension multiple of surface shape data, and decomposing the surface shape spatial frequency with the spatial resolution of 1Hz to obtain the key similar vibration frequencies of 2Hz, 3Hz and 53Hz without further power spectrum density analysis of a separated characteristic profile curve through a spatial power spectral density technology. The method has important guiding significance for structure optimization and disturbance suppression of the ultra-precise diamond turning machine by suppressing the identified key vibration source which has important influence on the processing surface shape.
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The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a flow chart of the identification of key similar vibration frequencies of the ultra-precision diamond lathe surface shape of the present invention;
FIG. 2 is a three-dimensional topography of the original surface shape of the ultra-precision diamond lathe of the present invention;
FIG. 3 is a schematic diagram of the original surface shape data of the ultra-precision diamond lathe of the present invention; wherein A represents a circumferential direction and B represents a radial direction.
FIG. 4 is a circumferential quadruple extended surface profile data diagram of the present invention;
FIG. 5 shows that the key vibration frequency obtained by the extended decomposition and identification of the surface shape data is 2 Hz;
FIG. 6 shows that the key vibration frequency obtained by the extended decomposition and identification of the surface shape data is 3 Hz;
FIG. 7 shows that the key vibration frequency obtained by the extended decomposition and identification of the surface shape data is 53 Hz.
Reference numbers and corresponding part names in the drawings: 1-circular workpiece, 2-first data after continuation of circular workpiece, 3-second data after continuation of circular workpiece, 4-third data after continuation of circular workpiece, 5-fourth data after continuation of circular workpiece, and 6-similar boundary connecting part.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Examples
The embodiment provides a method for identifying key similar vibration frequencies of the surface shape of an ultra-precise diamond lathe, which comprises the following specific operation steps:
s1, processing a circular pure copper workpiece by an ultra-precision diamond lathe under different cutting parameters, and measuring the surface appearance of the processed workpiece in situ by adopting a laser interferometer;
s2, carrying out four times of data continuation on the collected surface shape data along the circumferential direction, and sequentially connecting similar boundary data of the four parts of data after the continuation to form a group of new extended circular surface shape data;
s3, performing multi-scale self-adaptive modal decomposition on the extended surface shape data by adopting an improved two-dimensional empirical mode decomposition method, extracting local detail information of the surface shape data, transforming and constructing a monogenic surface shape signal based on a Riesz technology, calculating the integral frequency of the surface shape, and obtaining a two-dimensional empirical mode decomposition circulation termination condition; the method comprises the steps of obtaining a characteristic surface shape containing key frequency after two-dimensional empirical mode decomposition, determining the size of the characteristic frequency contained in the characteristic surface shape according to the peak value number of the characteristic surface shape and the multiple of continuation of surface shape data, and accurately identifying important vibration frequencies (2Hz, 3Hz and 53Hz) of the ultra-precise diamond lathe under the condition that the resolution is 1Hz without further performing power spectrum density analysis on a separated characteristic profile curve through a spatial power spectrum density technology.
The improved two-dimensional empirical mode decomposition method comprises the following steps:
step a, recording the surface shape data of the ring-shaped pure copper workpiece after the ultraprecise diamond machining as f (x, y), wherein x and y are sampling points of rows and columns of the surface shape data of the workpiece after the diamond turning machining respectively;
b, carrying out four times of data continuation on the collected surface shape data along the circumferential direction, and sequentially connecting similar boundary parts of the four parts of data after continuation to form a group of new extended circular ring shape surface shape data;
step c, recording the whole surface shape data subjected to surface shape boundary data four-time extension in the circumferential direction as F (x, y), wherein x and y are sampling points of rows and columns of the corresponding surface shape data respectively;
step d, initializing r outside the allowancei(x, y) ═ f (x, y), i ═ 1; internally initializing the margin hij(x,y)＝ri(x,y),j＝1；
Step e, calculating h for the allowanceij(x, y) local maxima and forming a maximum spectrum, denoted Jij(ii) a For maximum value spectrum JijThe maximum value point in the intermediate value is interpolated to obtain hijUpper envelope surface of (x, y), denoted Bmax(x,y)；
Calculate hijLocal minima of (x, y) and formingMinimum spectrum, denoted Sij(ii) a For minimum value spectrum SijThe minimum value point in the intermediate value is interpolated to obtain hijLower envelope surface of (x, y), denoted Bmin(x,y)；
Step f, calculating hijAverage envelope plane P of (x, y)ij(x,y),
Figure GDA0003445553050000051
Step g, extracting local detail information h of the surface shape data F (x, y)i(j+1)(x,y)，hi(j+1)(x,y)＝hij(x,y)-Pij(x,y)；
Step h, for the local detail information hi(j+1)(x, y) performing Riesz transformation, the spatial domain expression of the Riesz transformation being
Figure GDA0003445553050000052
Step i, for the local detail information hi(j+1)(x, y) its monogenic signal is hM(x,y)＝(h,Rx*,RyH) is convolution operation, then the local amplitude l of the surface shape data frequency spectrum informationA，
Figure GDA0003445553050000053
Wherein the subscript a represents the amplitude and M represents the monogenic signal; local phase l of surface data spectrum informationp：
Figure GDA0003445553050000054
a represents the amplitude of the corresponding signal at that time;
step j, comparing the local phase lpFurther calculating to obtain the local frequency l of the frequency spectrum information of the surface shape dataf：
Figure GDA0003445553050000061
Step k, byLocal frequency lfTo obtain the overall frequency
Figure GDA0003445553050000062
Step l, calculating cycle termination conditions:
Figure GDA0003445553050000063
if it is
Figure GDA0003445553050000064
If the wavelength is less than the given cutoff wavelength, returning to the step f to carry out the calculation again in a circulating way; if it is
Figure GDA0003445553050000065
Above a given cutoff wavelength, there is an ith intrinsic mode function BIMFi＝hi(j+1)And updating and decomposing the residue ri(x,y)＝ri1(x,y)-BIMFi(x,y)；
Step m, based on the result obtained by decomposing the face shape data, the original face shape data of the workpiece after fly-cutting processing is composed of a plurality of groups of BIMF components and a group of allowance data, and the requirement of the face shape data is met
Figure GDA0003445553050000066
And S4, determining the characteristic frequency contained in the characteristic surface shape after two-dimensional empirical mode decomposition according to the peak value quantity of the characteristic surface shape and the multiple of the continuation of the surface shape data.
As shown in fig. 5, in order to obtain the natural mode characteristic diagram, 8 divergent stripes are displayed on the surface shape, each stripe represents a frequency of 1Hz, and the vibration frequency contained in fig. 5 obtained by decomposition is 8Hz, and since the original surface shape data is extended by four times, the frequency corresponding to the original surface shape is 2 Hz.
As shown in fig. 6, 12 divergent stripes are displayed on the surface shape for the natural mode characteristic diagram obtained by decomposition, each stripe represents a frequency of 1Hz, and the vibration frequency contained in fig. 6 obtained by decomposition is 12Hz, and since the original surface shape data is extended by four times, the frequency corresponding to the original surface shape is 3 Hz.
As shown in fig. 7, 212 divergent stripes are displayed on the surface shape for the natural mode characteristic diagram obtained by decomposition, each stripe represents a frequency of 1Hz, and the vibration frequency contained in fig. 7 obtained by decomposition is 212Hz, and since the original surface shape data is extended by four times, the frequency corresponding to the original surface shape is 53 Hz.
In conclusion, the method for four-time continuation decomposition of the circular workpiece surface shape data provided by the invention can accurately identify the key similar vibration frequencies of 2Hz, 3Hz and 53Hz in the ultra-precision diamond lathe processing surface shape.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (3)

1. A method for identifying similar vibration frequencies based on the surface shape of an ultra-precise diamond lathe is characterized by comprising the following steps of:
s1, extending the surface shape data of the circular workpiece by N times along the circumferential direction, and sequentially copying and splicing the connected boundary data into N groups to obtain extended rear shape data; n is a positive integer more than or equal to 4;
s2, performing multi-scale self-adaptive modal decomposition on the extended surface shape data by adopting an improved two-dimensional empirical mode decomposition method, extracting local detail information of the surface shape data, transforming and constructing a monogenic surface shape signal based on a Riesz technology, calculating the overall frequency of the surface shape, and obtaining a two-dimensional empirical mode decomposition circulation termination condition;
s3, obtaining a characteristic surface shape containing the key frequency after two-dimensional empirical mode decomposition, and determining the size of the characteristic frequency contained in the characteristic surface shape according to the peak value number of the characteristic surface shape and the multiple of the continuation of the surface shape data;
the improved two-dimensional empirical mode decomposition method comprises the following steps:
step a, recording the surface shape data of the ring-shaped pure copper workpiece after the ultraprecise diamond machining as f (x, y), wherein x and y are sampling points of rows and columns of the surface shape data of the workpiece after the diamond turning machining respectively;
b, carrying out four times of data continuation on the collected surface shape data along the circumferential direction, and sequentially connecting similar boundary parts of the four parts of data after continuation to form a group of new extended circular ring shape surface shape data;
step c, recording the whole surface shape data subjected to surface shape boundary data four-time extension in the circumferential direction as F (x, y), wherein x and y are sampling points of rows and columns of the corresponding surface shape data respectively;
step d, initializing r outside the allowancei(x, y) ═ f (x, y), i ═ 1; internally initializing the margin hij(x,y)＝ri(x,y),j＝1；
Step e, calculating h for the allowanceij(x, y) local maxima and forming a maximum spectrum, denoted Jij(ii) a For maximum value spectrum JijThe maximum value point in the intermediate value is interpolated to obtain hijUpper envelope surface of (x, y), denoted Bmax(x,y)；
Calculate hijLocal minima of (x, y) and forming a spectrum of minima, denoted Sij(ii) a For minimum value spectrum SijThe minimum value point in the intermediate value is interpolated to obtain hijLower envelope surface of (x, y), denoted Bmin(x,y)；
Step f, calculating hijAverage envelope plane P of (x, y)ij(x,y),
Figure FDA0003445553040000011
Step g, extracting local detail information h of the surface shape data F (x, y)i(j+1)(x,y)，hi(j+1)(x,y)＝hij(x,y)-Pij(x,y)；
Step h, for the local detail information hi(j+1)(x, y) Riesz transform, Riesz transformed nullThe expression of interdomain is
Figure FDA0003445553040000012
Step i, for the local detail information hi(j+1)(x, y) its monogenic signal is hM(x,y)＝(h,Rx*,RyH) is convolution operation, then the local amplitude l of the surface shape data frequency spectrum informationA，
Figure FDA0003445553040000021
Wherein the subscript a represents the amplitude and M represents the monogenic signal; local phase l of surface data spectrum informationp：
Figure FDA0003445553040000022
a represents the amplitude of the corresponding signal at that time;
step j, comparing the local phase lpFurther calculating to obtain the local frequency l of the frequency spectrum information of the surface shape dataf：
Figure FDA0003445553040000023
Step k, from the local frequency lfTo obtain the overall frequency
Figure FDA0003445553040000024
Step l, calculating cycle termination conditions:
Figure FDA0003445553040000025
if it is
Figure FDA0003445553040000026
If the wavelength is less than the given cutoff wavelength, returning to the step f to carry out the calculation again in a circulating way; if it is
Figure FDA0003445553040000027
Above a given cutoff wavelength, there is an ith intrinsic mode function BIMFi＝hi(j+1)And updating and decomposing the residue ri(x,y)＝ri1(x,y)-BIMFi(x,y)；
Step m, based on the result obtained by decomposing the face shape data, the original face shape data of the workpiece after fly-cutting processing is composed of a plurality of groups of BIMF components and a group of allowance data, and the requirement of the face shape data is met
Figure FDA0003445553040000028
2. The method for identifying the similar vibration frequencies based on the ultra-precise diamond lathe surface shape according to claim 1, wherein in step S1, the surface shape data of the circular workpiece is extended by four times along the circumferential direction, and similar boundary data of the extended four data sets are connected in sequence to form a new set of extended circular surface shape data.
3. The method for identifying similar vibration frequencies based on the ultra-precise diamond lathe surface shape according to claim 1, wherein the characteristic frequencies comprise 2Hz and 3Hz in the step S3.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101931772A (en) * 2010-08-19 2010-12-29 深圳大学 Panoramic video fusion method, system and video processing device
CN106563973A (en) * 2015-10-13 2017-04-19 桂林市君威机电科技有限公司 Dynamic milling force measuring method based on tool vibration displacement
CN108664901A (en) * 2018-04-20 2018-10-16 三峡大学 Based on the micro-capacitance sensor power quality disturbance signal detection method for improving LMD
US10479674B2 (en) * 2013-06-28 2019-11-19 Stmicroelectronics S.R.L. Oscillation frequency measuring system and method for a MEMS sensor
CN111144193A (en) * 2019-10-31 2020-05-12 中国工程物理研究院机械制造工艺研究所 Relative vibration identification method based on ultra-precise fly-cutting machining surface shape

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103956756B (en) * 2014-05-23 2015-12-02 福州大学 A kind of low-frequency oscillation of electric power system modal identification method
JP6881084B2 (en) * 2016-09-12 2021-06-02 株式会社リコー Image processing equipment, object recognition equipment, equipment control systems, moving objects, image processing methods and programs
US11170070B2 (en) * 2018-03-06 2021-11-09 Dalian University Of Technology Sparse component analysis method for structural modal identification when the number of sensors is incomplete

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101931772A (en) * 2010-08-19 2010-12-29 深圳大学 Panoramic video fusion method, system and video processing device
US10479674B2 (en) * 2013-06-28 2019-11-19 Stmicroelectronics S.R.L. Oscillation frequency measuring system and method for a MEMS sensor
CN106563973A (en) * 2015-10-13 2017-04-19 桂林市君威机电科技有限公司 Dynamic milling force measuring method based on tool vibration displacement
CN108664901A (en) * 2018-04-20 2018-10-16 三峡大学 Based on the micro-capacitance sensor power quality disturbance signal detection method for improving LMD
CN111144193A (en) * 2019-10-31 2020-05-12 中国工程物理研究院机械制造工艺研究所 Relative vibration identification method based on ultra-precise fly-cutting machining surface shape

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ＫＤＰ晶体单点金刚石飞切轨迹波纹误差辨识研究;阳红等;《振动、测试与诊断》;20170430(第2期);第235-239页 *
基于振动信号特征频率的数控车床故障辨识方法;张日升等;《制造技术与机床》;20181202(第12期);第160-163页 *

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