CN111982335B - Spiral type liquid conductivity adjustable temperature sensor - Google Patents

Spiral type liquid conductivity adjustable temperature sensor Download PDF

Info

Publication number
CN111982335B
CN111982335B CN202010840460.0A CN202010840460A CN111982335B CN 111982335 B CN111982335 B CN 111982335B CN 202010840460 A CN202010840460 A CN 202010840460A CN 111982335 B CN111982335 B CN 111982335B
Authority
CN
China
Prior art keywords
cavity
electrode
spiral
electrodes
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010840460.0A
Other languages
Chinese (zh)
Other versions
CN111982335A (en
Inventor
吴锜
刘海玲
高莉媛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dezhou Yaoding Photoelectric Technology Co ltd
Original Assignee
Dezhou Yaoding Photoelectric Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dezhou Yaoding Photoelectric Technology Co ltd filed Critical Dezhou Yaoding Photoelectric Technology Co ltd
Priority to CN202010840460.0A priority Critical patent/CN111982335B/en
Publication of CN111982335A publication Critical patent/CN111982335A/en
Application granted granted Critical
Publication of CN111982335B publication Critical patent/CN111982335B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/26Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being an electrolyte
    • G01K7/28Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being an electrolyte in a specially-adapted circuit, e.g. bridge circuit
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08Protective devices, e.g. casings
    • G01K1/12Protective devices, e.g. casings for preventing damage due to heat overloading

Abstract

The invention belongs to the technical field of temperature sensors, and relates to a spiral liquid conductance adjustable temperature sensor.A spiral cavity is formed on a lower chassis of a square or round plate structure, and a first voltage electrode and a second voltage electrode are respectively fixed at corresponding positions of the cavity; the inner sides of the inner end and the outer end of the spiral cavity are respectively fixedly provided with a first current electrode and a second current electrode, the interior of the cavity is filled with liquid in the spiral cavity, and the upper side surface of the cavity is hermetically provided with an upper chassis; the upper chassis and the lower chassis are structurally corresponding, and are sealed and involuted to form a box-type spiral cavity with a closed structure.

Description

Spiral type liquid conductivity adjustable temperature sensor
The technical field is as follows:
the invention belongs to the technical field of temperature sensors, and relates to a spiral type liquid conductivity adjustable temperature sensor and a structural design thereof.
The background art comprises the following steps:
in the field of sensor technology, especially in the application field related to temperature sensor technology, temperature is a very important and special basic physical quantity, and the measurement of temperature is an important branch in the technical field of metrology. In each link of scientific research and industrial and agricultural production, reliable and accurate measurement of temperature cannot be avoided, and the accurate measurement of temperature is closely related to the external environment, such as pressure, surrounding environment and the like, where the temperature sensor is located. Conventional temperature measurement uses sensing elements such as thermistors, thermocouples, platinum resistors, etc. that are measured by converting the sensed temperature into a resistance value, which is then compared to a standard temperature source of a metrology grade and calibrated by interpolation to form a thermometer. According to the definition of resistance
Figure BDA0002641190650000011
The resistance of the thermosensitive element with the length of L and the sectional area of S changes with the temperature, the conductance value and the conductivity are respectively the reciprocal of the resistance value and the resistivity, and the change of the length of L or S directly influences the change of the resistance value. During the manufacturing process, due to process tolerance or process variation between different manufacturing lots, the resistance value of each thermistor may be inconsistent, which makes calibration difficult. High temperature processes during fabrication can build up stress on the thermal element. The residual stress is slowly released during the application process despite the anneal process, resulting in a drift in resistance. In addition, the harsh application environment, such as high external pressure, can also cause stress on the thermistor, resulting in resistance drift, which can cause measurement error. Therefore, there is a need to create a thermistor that does not accumulate stress during the manufacturing process and during the application process, and whose conductance (or resistance) can be adjusted at any time.
In the prior art, temperature sensors are of a wide variety, for example: chinese patent 201910235278X discloses a water triple point micro calibration source chip, the technical scheme of which belongs to the technical field of semiconductor materials and preparation processes thereof, and relates to a water triple point micro calibration source chip, the main structure of which comprises a silica shell, a vacuum interlayer, a water body and a three-dimensional cavity, wherein a three-dimensional cavity is formed in the inner cavity space of the cavity-shaped silica shell of the three-dimensional structure, the space of the three-dimensional cavity is divided into an upper structure and a lower structure, the cavity at the lower part is filled with purified water to form the water body, the cavity at the upper part forms the vacuum interlayer, the vacuum interlayer and the water body are sealed in the three-dimensional cavity, and the outside of the three-dimensional cavity forms a closed silica shell and forms a chip structure; the designed chip has the advantages of scientific and reasonable structure, simple process, wide material selection, stable and reliable performance, wide application field, obvious temperature-sensitive effect, simple preparation process and equipment, mature technical means, energy conservation and environmental friendliness; but this solution does not enable automatic calibration or reset functionality. For another example, chinese patent 202010297769X discloses a temperature sensor with adjustable liquid conductance, the main structure of which comprises a lead, a fixing rod, an electrically insulating rubber ring, two electrodes, a conductive liquid with known conductivity or conductance value, an adjusting rod and a housing, wherein one of the electrodes passes through the fixing rod and is fixed at one end of the housing by the electrically insulating rubber ring, and the second rubber ring cooperates with the second electrode to adjust the distance between the second electrode and the first electrode by the adjusting rod in a manual, electric or magnetic manner, so as to achieve the function of adjusting the conductance. In addition, chinese patent 2020103109514 discloses a four-electrode conductance adjustable temperature sensor, whose main structure includes two detachably assembled housings, a liquid filled with known conductivity (or resistivity) in the housings, a rubber gasket, an adjusting rod, two pairs of electrodes and a conducting wire. The relative position between the two shells is adjusted through screws, so that the change of the distance between the two voltage electrodes and the corresponding voltage drop change are realized, and the conductivity is adjustable, thereby obtaining the high consistency between the temperature sensors in batches and the high accuracy of the conductivity value. The temperature sensor is not influenced by the external stress and the self stress, avoids temperature measurement errors caused by the stress, avoids measurement errors caused by electrode polarization, enables temperature measurement to be more accurate, and has the advantages of simple structure, small size, high precision, good long-term stability, good integration, high batch-to-batch consistency and the like, but the self-calibration function is not enough.
In the field of physics, the electrical conductivity of many liquids varies linearly with temperature, and liquids are theoretically incompressible and do not build up stress during the manufacturing and application processes. The method comprises the steps of placing liquid with known concentration and conductivity in an insulating shell, adding a pair of electrodes on two ends of the liquid, applying constant voltage (or current) to the electrodes, measuring the change of the current (or voltage) of the electrodes, converting the change into the change of the conductivity, and then deducing the change of temperature to realize accurate detection of the temperature. Or a pair of current electrodes is added at two ends of the liquid, and constant current is applied to the pair of electrodes; and adding a pair of voltage electrodes in the middle section of the liquid, measuring the voltage change of the liquid, converting the measured resistance into the conductivity change, and pushing out the temperature change to realize accurate temperature detection. By adjusting the position between the current electrode and the voltage electrode, the conductance (or resistance) can be adjusted, and the elimination of the manufacturing tolerance is realized; the drift error can be eliminated by automatically adjusting the distance between the two electrodes in the application process; the technology has important scientific significance when applied to the temperature sensor, but no specific structural design and products are known at present.
The invention content is as follows:
the invention aims to overcome the defects in the prior art, and designs a spiral type temperature sensor with adjustable liquid conductivity by combining the characteristic that the conductivity of the liquid conductivity sensor changes linearly with the temperature and a conductivity cell with adjustable electrode positions, so that the polarization effect is eliminated, and the high consistency and the field in-situ adjustment of the conductivity value are realized.
In order to achieve the purpose, the spiral liquid conductance adjustable temperature sensor comprises a two-electrode structure and a four-electrode structure, wherein the two structures comprise cavity structures, so that the high-standard calibration of conductance can be realized by changing the distance between electrodes, and the measurement error caused by polarization effect can be effectively eliminated, so that the temperature measurement is more accurate; different from a slender temperature sensing head, the spiral cavity structure enables the sensing head to be flattened, so that the length of the temperature sensing head can be reduced, and flexible and various choices are provided for a complex environment; two electrodes of the two-electrode spiral liquid conductance adjustable temperature sensor are positioned at the spiral starting point and the spiral end point; two current electrodes of the four-electrode spiral type liquid conductance adjustable temperature sensor are respectively positioned at the starting point and the end point of the spiral structure, two voltage electrodes are positioned at the middle relative position of the cavity of the spiral structure, and the positions of the two current electrodes and the two voltage electrodes can be flexibly adjusted, so that the distance between the electrodes is changed, the voltage drop of liquid in the cavity is changed, the resistance value is changed, and the resistance is adjustable.
The invention relates to a four-electrode spiral type liquid conductivity adjustable temperature sensor, which comprises a main body structure, a lower chassis, a first voltage electrode, a second voltage electrode, liquid, a first current electrode, a second current electrode, a spiral cavity, an upper chassis symmetrical to the lower chassis and sections of homogeneous wires for connecting the electrodes, wherein the upper chassis is connected with the upper chassis through the spiral cavity; a spiral cavity is formed on the lower chassis of the square or round plate structure, and a first voltage electrode and a second voltage electrode are respectively fixed at the corresponding positions of the cavity; a first current electrode and a second current electrode are respectively fixed on the inner sides of the inner end and the outer end of the spiral cavity, the interior of the cavity is filled with liquid in the spiral cavity, and the upper side surface of the cavity is hermetically provided with an upper chassis; the upper chassis and the lower chassis are structurally corresponding and are sealed and involuted to form a box-type spiral cavity with a closed structure.
The first current electrode and the second current electrode are respectively positioned at the inner end of the starting end and the outer end of the ending end of the spiral cavity, the positions of the first current electrode and the second current electrode can be adjusted in a small range nearby, and the two current electrodes are connected through a lead, penetrate through the lower chassis and are led out; the first voltage electrode and the second voltage electrode are positioned in the middle of the spiral cavity, the positions of the first voltage electrode and the second voltage electrode are adjustable, and the first voltage electrode and the second voltage electrode are connected by a lead and led out by penetrating through the lower chassis; the relative position of the two voltage electrodes can be directly adjusted, namely the conductance value of the liquid can be adjusted, and the conductance can be adjusted.
The spiral cavity comprises a spiral shell, a lower chassis and an upper chassis; the lower chassis is tightly connected with the spiral shell to ensure the sealing and no air leakage, the four electrodes and the liquid are placed at respective positions of the inner space of the spiral cavity, the upper chassis is tightly connected with the spiral shell, and then the four electrodes and the liquid are led out from the perforated part of the lower chassis in a sealed manner by each section of lead.
The liquid related to the invention comprises saline water, alcohol and other liquids with conductivity and different concentrations, and the other liquids with conductivity comprise acidic liquid, alkaline liquid, salt liquid, oil, acetone and methanol; the conductance value of the liquid in the cavity is any conductance value and can be obtained by adjusting the position of the electrode; the temperature measurement range is between the freezing point and the steam point of the liquid, including 117.3 ℃ below zero to 100 ℃.
The four electrodes are made of platinum electrodes or stainless steel electrodes or other electric materials; electrode shapes include cylindrical, dot, sheet, or other shapes.
The cavity of the spiral liquid conductance adjustable temperature sensor is made of heat conducting materials, and comprises ceramics, metal, quartz, polytetrafluoroethylene, high polymer materials and plastics with the heat conductivity coefficient ranging from 0.1W/mK to 450W/mK, and the size ranges from nanometer to tens of centimeters; the inner structure and the outer structure of the cavity are insulated, and the insulation mode comprises insulation of a shell material and coating of a layer of insulator on the shell wall of the cavity.
The four-electrode measuring method comprises the steps of applying a constant current excitation source to two current electrodes and measuring voltage drop change between two voltage electrodes; the two-electrode measuring method is to apply constant current excitation source to the two current electrodes and measure the liquid resistance according to the resistance formula.
The two current electrodes apply constant alternating current excitation to the two ends, the voltage of the two voltage electrodes is measured, and the change of the voltage drop reflects the change of the liquid conductance along with the temperature, so that the change of the temperature can be deduced; the structure can realize accurate and stable measurement of the temperature under external high pressure.
Compared with the existing temperature sensor, the invention has the advantages of scientific and reliable design principle, novel and simple structure, large condition without being influenced by the external environment and self stress, adjustable conductivity value at any time, small volume, high precision, good stability, high integration level and the like, wherein the four electrodes avoid the influence of errors caused by polarization, and the size can be in the order of nanometers to dozens of centimeters; the system has important scientific value and application prospect in the fields of sensing, ocean exploration, aerospace and the like in the Internet of things which need temperature monitoring and detection, and can be developed and applied to medical temperature measurement occasions.
Description of the drawings:
fig. 1 is a schematic view of the principle of the main structure of a four-electrode temperature sensor according to the present invention.
Fig. 2 is a schematic diagram of a three-dimensional structure of a four-electrode temperature sensor according to the present invention.
Fig. 3 is a schematic view of the principle of the main structure of the two-electrode temperature sensor according to the present invention.
Fig. 4 is a schematic diagram of the three-dimensional structure of the two-electrode temperature sensor according to the present invention.
The specific implementation mode is as follows:
the invention is further described by way of example with reference to the accompanying drawings.
Example 1:
the spiral liquid conductance adjustable four-electrode temperature sensor related to the embodiment has a main structure comprising a lower chassis 10, a first voltage electrode 20, a second voltage electrode 25, liquid 30, a first current electrode 40, a second current electrode 45, a spiral cavity 50, an upper chassis 60 symmetrical to the lower chassis 10, and sections of homogeneous wires 51, 52, 53 and 54 connecting the electrodes; a spiral cavity 50 is formed on the lower chassis 10 of the square or round plate type structure, and a first voltage electrode 20 and a second voltage electrode 25 are respectively fixed at the corresponding positions of the cavity 50; a first current electrode 40 and a second current electrode 45 are respectively fixed on the inner sides of the inner end and the outer end of the spiral cavity 50, the inside of the cavity 50 is filled with liquid 30 in the spiral cavity, and the upper side surface of the cavity 50 is hermetically provided with an upper chassis 60; the upper chassis 60 corresponds to the lower chassis 10 in structure, and the two are sealed and combined to form a box-type spiral cavity 50 with a closed structure.
The first current electrode 40 and the second current electrode 45 related to the present embodiment are respectively located at the starting end (inner end) and the ending end (outer end) of the spiral cavity 50, and can be adjusted in position within a small range nearby, and the wires 53 and 51 connect the two current electrodes to penetrate through the lower chassis 10 and be led out; the first voltage electrode 20 and the second voltage electrode 25 are positioned in the middle of the spiral cavity 50 and are adjustable in position, and the leads 52 and 54 are connected with the two voltage electrodes and led out through the lower chassis 10; the relative position of the two voltage electrodes can be directly adjusted, namely the conductance value of the liquid 30 can be adjusted, and the conductance can be adjusted.
The spiral cavity 50 according to the present embodiment includes a spiral housing, a lower chassis 10 and an upper chassis 60; the lower chassis 10 is tightly connected with the spiral shell to ensure the sealing and no air leakage, the upper chassis 60 is tightly connected with the spiral shell after the four electrodes and the liquid 30 are arranged in the inner space of the spiral cavity 50, and each section of conducting wire is led out from the perforated part of the lower chassis 10 in a sealed mode.
The liquid 30 according to the present embodiment includes saline water, alcohol, and other liquids with conductivity and different concentrations or other conductive liquids, such as acidic liquid, alkaline liquid, salt liquid, oil, acetone, and methanol; the conductance of the liquid in the chamber 30 is any conductance, which can be obtained by adjusting the position of the electrodes; the temperature range is between the freezing point and the vapor point of the liquid 30, including 117.3 ℃ below zero to 100 ℃.
The four electrodes involved in the embodiment are made of platinum electrodes or stainless steel electrodes or other electrical materials; electrode shapes include cylindrical, dot, sheet, or other shapes.
The cavity 30 of the spiral liquid conductivity adjustable temperature sensor of the embodiment is made of a heat conducting material, and comprises ceramics, metal, quartz, polytetrafluoroethylene, high polymer materials and plastics with the heat conductivity coefficient ranging from 0.1W/mK to 450W/mK, and the size ranges from nanometer to tens of centimeters; the inner structure and the outer structure of the cavity 30 are insulated, and the insulation mode comprises insulation of a shell material and coating of a layer of insulator on the shell wall of the cavity 30.
The two-electrode sensor according to the present embodiment is a pair of current electrodes, which are located at the starting end and the ending end of the spiral cavity 30; the four-electrode sensor includes a pair of current electrodes and a pair of voltage electrodes, the current electrodes are located at the starting end and the ending end of the spiral cavity 30, and the voltage electrodes are located at the middle position of the spiral cavity 30.
The four-electrode measuring method is that a constant current excitation source is applied to two current electrodes, and voltage drop change between two voltage electrodes is measured; the two-electrode measuring method is to apply constant current excitation source to the two current electrodes and measure the liquid resistance according to the resistance formula.
The two current electrodes related to the embodiment apply constant alternating current excitation to the two ends, the voltage of the two voltage electrodes is measured, and the change of the voltage drop reflects the change of the liquid conductance along with the temperature, so that the change of the temperature can be deduced; the structure can realize accurate and stable measurement of the temperature under external high pressure.
Example 2:
the spiral two-electrode liquid conductance adjustable temperature sensor related to the present embodiment has a main structure similar to that of a four-electrode sensor, and includes a lower chassis 10, a liquid 30, a first current electrode 40, a second current electrode 45, a spiral cavity 50, an upper chassis 60 symmetrical to the lower chassis 10, and sections of leads 51 and 53 for connecting the electrodes, and the connection principle and structure of the components correspond to those of the structure of embodiment 1.
The two current electrodes according to this embodiment apply constant ac excitation to both ends, and the resistance value of the liquid 30 in the cavity 50 is obtained according to the measured voltage and current, and the change in resistance value reflects the change in liquid conductance with temperature, so that the temperature can be derived; through the structure, the temperature under external high pressure can be accurately and stably measured.
The sensor that this embodiment relates to can be applied to the cardiac function test equipment of medical field after the structural improvement design, can be used for equipment such as future new generation's intellectuality electrocardiogram measurement appearance and sphygmomanometer, pulsometer especially.

Claims (4)

1. A spiral type liquid conductance adjustable temperature sensor is characterized in that: the main body structure is a four-electrode structure and comprises a cavity structure, so that high-standard calibration of conductivity can be realized by changing the distance between electrodes, and measurement errors caused by polarization effects can be effectively eliminated, so that temperature measurement is more accurate; different from a slender temperature sensing head, the spiral cavity structure enables the sensing head to be flattened, so that the length of the temperature sensing head can be reduced, and flexible and various choices are provided for a complex environment; two current electrodes of the four-electrode spiral type liquid conductance adjustable temperature sensor are respectively positioned at the starting point and the end point of the spiral structure, two voltage electrodes are positioned at the middle relative position of the cavity of the spiral structure, and the positions of the two current electrodes and the two voltage electrodes can be flexibly adjusted, so that the distance between the electrodes is changed, the voltage drop of liquid in the cavity is changed, the resistance value is changed, and the resistance adjustment is realized; the main structure of the device comprises a lower chassis, a first voltage electrode, a second voltage electrode, liquid, a first current electrode, a second current electrode, a spiral cavity, an upper chassis symmetrical to the lower chassis and sections of homogeneous leads for connecting the electrodes; a spiral cavity is formed on the lower chassis of the square or round plate structure, and a first voltage electrode and a second voltage electrode are respectively fixed at the corresponding positions of the cavity; a first current electrode and a second current electrode are respectively fixed on the inner sides of the inner end and the outer end of the spiral cavity, the interior of the cavity is filled with liquid in the spiral cavity, and the upper side surface of the cavity is hermetically provided with an upper chassis; the upper chassis and the lower chassis are structurally corresponding and are sealed and involuted to form a box-type spiral cavity with a closed structure; the related first current electrode and the second current electrode are respectively positioned at the inner end of the starting end and the outer end of the ending end of the spiral cavity, the positions of the first current electrode and the second current electrode can be adjusted in a small range nearby, and the two current electrodes are connected by a lead and penetrate through the lower chassis to be led out; the first voltage electrode and the second voltage electrode are positioned in the middle of the spiral cavity, the positions of the first voltage electrode and the second voltage electrode are adjustable, and the first voltage electrode and the second voltage electrode are connected by a lead and led out by penetrating through the lower chassis; the relative position of the two voltage electrodes can be directly adjusted, namely the conductance value of the liquid can be adjusted, and the conductance can be adjusted; the electrocardiogram measuring instrument, the sphygmomanometer and the pulsometer can be applied to cardiac function testing equipment in the medical field.
2. The spiral liquid conductance adjustable temperature sensor according to claim 1, wherein the liquids involved have conductivity and different concentrations, including acidic liquids, alkaline liquids, and salt liquids; the conductance value of the liquid in the cavity is any conductance value and can be obtained by adjusting the position of the electrode; the temperature range lies between the freezing point and the vapor point of the liquid, including 117.3 ℃ below zero to 100 ℃.
3. The spiral liquid conductance tunable temperature sensor according to claim 1, wherein the material of the involved four electrodes comprises platinum electrode or stainless steel electrode; the electrode shape includes a cylindrical shape, a dot shape, or a sheet shape.
4. The spiral type liquid conductance adjustable temperature sensor according to claim 1, wherein said cavity is made of a heat conductive material, including ceramic, metal, quartz, polytetrafluoroethylene having a thermal conductivity in the range of 0.1W/mK to 450W/mK, and having a size in the range of nanometer to tens of centimeters; the inner structure and the outer structure of the cavity are insulated, and the insulation mode comprises the insulation of a shell material or the coating of a layer of insulator on the shell wall of the cavity.
CN202010840460.0A 2020-08-20 2020-08-20 Spiral type liquid conductivity adjustable temperature sensor Active CN111982335B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010840460.0A CN111982335B (en) 2020-08-20 2020-08-20 Spiral type liquid conductivity adjustable temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010840460.0A CN111982335B (en) 2020-08-20 2020-08-20 Spiral type liquid conductivity adjustable temperature sensor

Publications (2)

Publication Number Publication Date
CN111982335A CN111982335A (en) 2020-11-24
CN111982335B true CN111982335B (en) 2022-05-17

Family

ID=73434896

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010840460.0A Active CN111982335B (en) 2020-08-20 2020-08-20 Spiral type liquid conductivity adjustable temperature sensor

Country Status (1)

Country Link
CN (1) CN111982335B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114323357B (en) * 2021-11-23 2022-12-23 四川大学 Spiral type capacitance pressure sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858192A (en) * 1996-10-18 1999-01-12 Board Of Regents, The University Of Texas System Method and apparatus for manipulation using spiral electrodes
CN201837607U (en) * 2010-10-15 2011-05-18 杭州泰林生物技术设备有限公司 Measuring electrode for liquid electric conductivity
CN105388192B (en) * 2015-12-24 2017-12-15 河海大学 A kind of sea water conductivity sensor based on MEMS silica glass bonding technologies
CN107677312B (en) * 2017-09-26 2019-03-12 哈尔滨工程大学 A kind of chip seawater conductivity-temperature-depth system
CN111397752A (en) * 2020-04-16 2020-07-10 德州尧鼎光电科技有限公司 Liquid conductance adjustable temperature sensor
CN111486977A (en) * 2020-04-20 2020-08-04 德州尧鼎光电科技有限公司 Four-electrode conductance adjustable temperature sensor

Also Published As

Publication number Publication date
CN111982335A (en) 2020-11-24

Similar Documents

Publication Publication Date Title
Gennarelli et al. A microwave resonant sensor for concentration measurements of liquid solutions
CN112924494B (en) Conductivity sensor with in-situ self-calibration function
Oliveira et al. The viscosity of R32 and R125 at saturation
CN111982335B (en) Spiral type liquid conductivity adjustable temperature sensor
JP2001033295A (en) Capacitive probe for measuring level of conductive liquid in vessel and manufacture of the probe
CN207832953U (en) A kind of test device of oil for electric power industrial frequency withstand voltage
Ramires et al. The thermal conductivity of toluene and water
Bradshaw et al. Electrical conductivity of seawater
CN111486977A (en) Four-electrode conductance adjustable temperature sensor
CN103698357A (en) Thermal conductivity and thermal diffusivity sensor based on MEMS double heater
CN113125048B (en) Micro calorimeter capable of directly measuring thermocouple type power sensor and power reference system
CN110988019A (en) Testing device and testing method for shale thermal expansion coefficient
CN112378980B (en) Correction system and method for silk screen probe concentration detection device
Heidari et al. Conductivity effect on the capacitance measurement of a parallel-plate capacitive sensor system
CN107621477A (en) A kind of Harmonic Method hydrogel testing device for measuring thermal conductivity and method
CN109725183B (en) Probe for portable thermoelectric potential detector
CN111397752A (en) Liquid conductance adjustable temperature sensor
CA1091059A (en) Apparatus for measuring barometric pressure
KR100845343B1 (en) A miniature electrical conductance sensor using dual concentric ring-disk electrodes with a flat face
CN115979443A (en) Filling material type liquid temperature sensor
CN111982330B (en) In-situ self-calibration type temperature sensing device
CN115078843A (en) Temperature compensation type on-chip integrated conductivity sensor and conductivity measurement method
Wakeham et al. The thermal conductivity of some electrically conducting liquids
US2375892A (en) Thermometer
Liang et al. Microfabricated thermal conductivity sensor: a high resolution tool for quantitative thermal property measurement of biomaterials and solutions

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant