CN111980888A

CN111980888A - Fluid conveying device and piezoelectric pump

Info

Publication number: CN111980888A
Application number: CN202010997592.4A
Authority: CN
Inventors: 不公告发明人
Original assignee: Changzhou Weitu Fluid Technology Co ltd
Current assignee: Changzhou Weitu Fluid Technology Co ltd
Priority date: 2020-09-21
Filing date: 2020-09-21
Publication date: 2020-11-24

Abstract

The invention belongs to the technical field of fluid conveying equipment, and particularly relates to a fluid conveying device and a piezoelectric pump. A fluid delivery device comprising: an actuator including a vibration plate and at least one piezoelectric element provided on the vibration plate; a diaphragm plate stacked on one side of the actuator and connected to the diaphragm through a connecting portion; a connection part, a first end of which is connected to the resonator plate, and a second end of which is connected to the vibration plate. A piezoelectric pump comprises the fluid conveying device. The problem of among the prior art fluid delivery device and piezoelectric pump reduce the volume and can lead to output capacity to reduce by a wide margin is solved.

Description

Fluid conveying device and piezoelectric pump

Technical Field

The invention belongs to the technical field of fluid conveying equipment, and particularly relates to a fluid conveying device and a piezoelectric pump.

Background

The micro fluid pump has wide application requirements in the fields of medical biology, fine chemical engineering, aerospace, micro electro mechanical systems and the like. Nowadays, as electronic products targeted for application generally have a tendency to be miniaturized, the micro fluid pump is also required to be more miniaturized while ensuring its output capability (output pressure and output flow rate).

In the prior art, on the premise of certain driving conditions, the output capacity (output pressure and output flow) of the micropump is greatly reduced due to the reduction of the volume of the micropump. As disclosed in patent document CN102597520B, a fluid pump is disclosed, and specifically discloses: an annular beam is arranged between the vibrating plate and the vibration supporting frame, the annular beam is respectively connected to the vibrating plate and the vibration supporting frame through two connecting parts, piezoelectric ceramics are bonded on the vibrating plate, and the vibrating plate generates bending deformation. The scheme provides a scheme for reducing the volume of the pump, but the outer frame or the supporting frame is distributed on the periphery of the area generating the bending deformation and is approximately in the same plane, so that the peripheral size is increased, and the reduced volume of the pump has a limit.

The invention aims to provide a fluid conveying device which is small in size and high in pumping capacity and a piezoelectric pump.

Disclosure of Invention

In order to solve the technical problem that the volume reduction of the fluid conveying device and the piezoelectric pump in the prior art can cause the great reduction of the output capacity, the invention provides the fluid conveying device and the piezoelectric pump, which can further reduce the volume of the piezoelectric pump while ensuring the output capacity.

The technical scheme adopted by the invention for solving the technical problem is as follows:

the present invention provides a fluid delivery device comprising: an actuator including a vibration plate and at least one piezoelectric element provided on the vibration plate; a diaphragm plate stacked on one side of the actuator and connected to the diaphragm through a connecting portion; a connection part, a first end of which is connected to the resonator plate, and a second end of which is connected to the vibration plate.

Further, a protrusion is formed on one side of the resonator plate, which is far away from the actuator, and the protrusion and the resonator plate are integrally formed or fixedly arranged on the resonator plate.

Further, the connecting portion includes a cantilever beam, a first end of the cantilever beam is connected to the resonator plate, and a second end of the cantilever beam is connected to the vibration plate.

Further, the cantilever beam includes at least one curved beam formed as a single-member beam structure or a plurality of the curved beams formed as a composite beam structure.

Furthermore, the cantilever beam comprises a transition beam, the transition beam is arranged in a straight line or a curve along the circumferential direction of the resonator plate, at least one first connecting arm extends from the first side of the transition beam, at least one second connecting arm extends from the second side of the transition beam, and the first connecting arm and the second connecting arm are respectively connected with the resonator plate and the vibrating plate.

Further, the second end of the cantilever beam is integrally formed or fixedly connected with a connecting piece, and the connecting piece is connected to the vibration plate.

Further, the connecting piece is a continuous connecting plate or a discrete connecting plate, and the connecting piece is connected with the vibrating plate in a discrete or continuous manner.

Furthermore, the connecting part is an elastic connecting part, and the connecting part is connected with any position of the vibration plate; alternatively, the connecting portion is a rigid connecting portion, and the connecting portion is connected to a node of the vibration plate or a position near the node where no vibration or little vibration occurs.

Further, at least one fluid inlet is formed in the center or near the center of the resonance plate, a concave portion communicated with the fluid inlet is formed in the inner periphery of the protrusion, a fluid outlet is formed in the connecting portion, and the fluid outlet is a first fluid outlet arranged among the cantilever beams.

Further, a recess is formed in a surface of the vibration plate facing the resonator plate, the recess being located opposite to the cantilever beam.

Further, at least one fluid inlet is formed at or near the center of the resonator plate, a concave portion communicated with the fluid inlet is formed in the inner periphery of the protrusion, a concave portion is formed in the surface, facing the resonator plate, of the vibration plate and is opposite to the cantilever beam in position, and at least one fluid outlet is formed in the circumferential direction of the concave portion.

Further, the fluid outlet comprises a third fluid outlet arranged on a side wall of the recess and/or a second fluid outlet arranged on an inner concave surface close to the side wall.

Another aspect of the present invention further provides a piezoelectric pump, including the fluid delivery device.

And further, the pump body is further included, a pump cavity is formed in the pump body, and the fluid delivery device is connected with the pump body through the bulge.

Further, be provided with on the pump body with the import and the export of pump chamber intercommunication, the import is passed through the depressed part and the fluid entry intercommunication that protruding inner periphery set up, the fluid export through the pump chamber communicate in the export, simultaneously the arch of sounding board is right fluid entry and fluid export form the isolation.

The piezoelectric element is characterized by further comprising an electrode assembly, wherein the electrode assembly comprises an insulating plate and two electrode plates arranged on the insulating plate, the two electrode plates are insulated from each other, two electrodes of the electrode assembly are respectively formed on the two electrode plates, at least one part of the two electrodes extends out of the pump cavity to form an external terminal, and at least one part of the two electrodes is arranged in the pump cavity and is electrically connected with the piezoelectric element.

Further, the piezoelectric element comprises a substrate, and a first conductive electrode and a second conductive electrode which are arranged on the substrate, wherein the first conductive electrode is arranged on the first side of the substrate and forms a connecting end, the second conductive electrode is arranged on the second side of the substrate, and meanwhile, one end of the second conductive electrode is folded to the first side of the substrate and forms a connecting end.

Based on the technical scheme, the invention can realize the following technical effects:

1. according to the fluid conveying device and the piezoelectric pump, the vibrating plate and the resonance plate are connected together through the connecting part to form an integral structure, the bulge is formed on one side of the resonance plate, which is far away from the actuator, and the bulge can be connected with an external supporting structure, so that the structures of the connecting part and the supporting part are greatly reduced or omitted, the circumferential size of the integral structure is reduced, and the miniaturization of the fluid conveying device and the piezoelectric pump is facilitated;

2. according to the fluid conveying device and the piezoelectric pump, the connecting part can be in various forms, and the fluid outlet can be arranged on the connecting part and/or the vibrating plate in various forms as long as the fluid conveying device can convey fluid in a single direction. Further, when the connecting portion is an elastic connecting portion, the connecting portion may be deformed by vibration of the actuator, and a connecting position thereof to the actuator may not be required, but the connecting position is preferably a position where there is no vibration or little vibration at or near a node of the actuator; when the connecting part is a rigid connecting part, the connecting part cannot vibrate and deform along with the actuator, and the connecting position of the connecting part and the actuator needs to be at a position where no vibration or little vibration exists at or near a node of the actuator, so that the vibration deformation of the actuator and the resonance plate is not influenced;

3. according to the piezoelectric pump, the bulge can be directly connected with the pump body, and due to the arrangement of the bulge, a gap exists between the resonance plate and the inner wall of the pump body, so that a space can be reserved for vibration deformation of the resonance plate.

Drawings

FIG. 1 is a cross-sectional view of a fluid delivery device according to a first embodiment of the present invention;

FIG. 2 is a schematic view of the structure of a resonator plate and a connection portion thereon;

FIGS. 3-8 are schematic structural views of alternative arrangements of the resonator plate and the connections thereto;

fig. 9 is a schematic structural view of a vibration plate;

FIGS. 10-13 are schematic views of alternative configurations of vibrating plates;

FIGS. 14-17 are schematic views showing different configurations of the resonator plate and the diaphragm;

FIG. 18 is a schematic structural view of a piezoelectric element;

FIG. 19 is a top view of a piezoelectric element;

FIG. 20 is a cross-sectional view A-A of FIG. 19;

FIG. 21 is a view showing a state in which the fluid transport device of the present invention sucks in a medium;

FIG. 22 is a state view of the fluid transport device of the present invention discharging a medium;

FIG. 23 is a schematic view of a piezoelectric pump;

FIG. 24 is a cross-sectional view of the piezoelectric pump;

FIGS. 25-26 are exploded views of the piezoelectric pump from different perspectives;

FIG. 27 is a schematic view of the structure of an electrode assembly;

FIG. 28 is an exploded view of the electrode assembly;

fig. 29 is a cross-sectional view of a fluid transfer device according to a second embodiment of the present invention;

wherein: 1-an actuator; 11-a vibrating plate; 111-a recess; 112-a second fluid outlet; 113-a third fluid outlet; 114-a bump; 12-a piezoelectric element; 121-a substrate; 122 — a first conductive electrode; 123-a second conductive electrode; 124-insulating region; 2-a resonator plate; 21-bulge; 22-a fluid inlet; 23-a recess; 3-a connecting part; 31-cantilever beam; 32-a connector; 33-a first fluid outlet; 4-a pump body; 41-a first cover plate; 411-outlet; 42-a first side panel; 43-a second side panel; 44-a second cover plate; 441-inlet; 5-an electrode assembly; 51-an insulating plate; 52-an electrode plate; 521-an external terminal; 522-supply terminals.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc. are usually based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and in the case of not making a reverse description, these orientation words do not indicate and imply that the device or element being referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be considered as limiting the scope of the present invention; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.

Example one

As shown in fig. 1 to 28, the present embodiment provides a fluid delivery device including an actuator 1 and a resonator plate 2, the actuator 1 and the resonator plate 2 being stacked, the resonator plate 2 being stacked on one side of the actuator 1 and connected to a vibration plate 11 through a connection portion 3, a first end of the connection portion 3 being connected to the resonator plate 2, and a second end of the connection portion 3 being connected to the vibration plate 11.

The actuator 1 includes a vibration plate 11 and a piezoelectric element 12, the resonance plate 2, the vibration plate 11, and the piezoelectric element 12 are sequentially stacked, the piezoelectric element 12 and the vibration plate 11 are integrally connected, and the vibration plate 11 is connected to the resonance plate 2 through a connection portion 3 to restrain the resonance plate 2. The piezoelectric element 12 may be provided singly or in plural, and the plural piezoelectric elements 12 may be located on one side of the vibration plate 11 or on both sides of the vibration plate 11.

The entire resonator plate 2 has a plate shape, and may have a circular, square, or other polygonal shape, and in this embodiment, the outer contour of the resonator plate 2 is circular, the resonator plate 2 is made of an elastic material, and the resonator plate 2 is connected to the diaphragm 11 through the connection portion 3. One end of the connecting portion 3 is connected to the vibration plate 2, and the other end is connected to the vibration plate 11. As shown in fig. 2, the connecting portion 3 includes a cantilever beam 31 and a connecting member 32, the cantilever beam 31 is located on the inner periphery of the connecting member 32 and is fixedly connected or integrally formed with the connecting member 32, the cantilever beam 31 is used for connecting with the resonator plate 2, and the connecting member 32 is used for connecting with the actuator 1. Specifically, there are at least two cantilever beams 31, at least two cantilever beams 31 are evenly distributed in the circumferential direction, a first fluid outlet 33 is formed between two adjacent cantilever beams 31, and the connecting piece 32 is in a circular ring shape. The connecting portion 3 may be an elastic connecting portion or a rigid connecting portion, when the connecting portion 3 is an elastic connecting portion, the cantilever may be connected to any position of the vibration plate 2, and the outer end of the connecting portion 3 may be connected to any position of the vibration plate 11, preferably to a position where there is no vibration or little vibration at or near a node of the vibration plate 11; when the connection portion 3 is a rigid connection portion, the cantilever is preferably connected to the outer peripheral wall of the vibration plate 2, and the outer end of the connection portion 3 is connected to a node or a position near the node of the vibration plate 11 where there is no vibration or little vibration.

As an alternative to the connecting portion 3, the cantilever beam 31 of the connecting portion 3 may have other forms such as an S-shape, a double S-shape, and a T-shape, besides the radially extending structure in fig. 2. For example, cantilevered beam 31 may comprise at least one curved beam formed as a single-piece beam structure, as shown in fig. 3, 5, and 6; alternatively, a plurality of curved beams are formed into a composite beam structure, as shown in fig. 4. The cantilever beam 31 may further include a transition beam, the transition beam is linearly or curvilinearly arranged along the circumference of the resonator plate 2, at least one first connection arm is extended from a first side of the transition beam, at least one second connection arm is extended from a second side of the transition beam, and the first connection arm and the second connection arm are respectively connected to the resonator plate and the vibration plate, as shown in fig. 7 to 8.

As an alternative technical solution of the connecting portion 3, the connecting members 32 may be circular in fig. 2, square or other polygonal shapes, or may not be closed circular, and are discrete, the number of the connecting members 32 is the same as that of the cantilever beams 31, and the cantilever beams 31 are in one-to-one correspondence, at least two cantilever beams 31 are uniformly arranged, the number of the connecting members 32 is at least two, and the connecting members 32 and the cantilever beams 31 are in one-to-one correspondence to form an integral or fixed connection, as shown in fig. 5. Besides, it may be further provided that the connecting portion 3 only includes the cantilever beam 31, that is, includes at least two cantilever beams 31, as shown in fig. 6, two ends of each cantilever beam 31 are respectively connected to the vibration plate 2 and the vibration plate 11, and a circumferential gap between two adjacent cantilever beams 31 may form the first fluid outlet 33.

In order to increase the energy conversion efficiency of the piezoelectric micropump, a protrusion 21 is provided on the surface of the resonance plate 2 away from the actuator 1, and the protrusion 21 may be integrally formed with the resonance plate 2 or may be separately provided and then fixedly connected. The protrusion 21 may have a circular shape, a square shape, or other polygonal shapes, and in this embodiment, the protrusion 21 has a circular ring shape and is disposed near the circumferential edge of the sounding plate 2, the inner circumference of the protrusion 21 forms a recess 23, and the recess 23 may have a circular shape, a square shape, or other polygonal shapes, and in this embodiment, the recess 23 has a circular shape. Because the rigidity of the connecting part is small, the vibration isolation effect is achieved, when the resonance plate resonates, the high-frequency vibration has little influence on other parts of the piezoelectric micropump, the piezoelectric micropump is prevented from being impacted when contacting with the outside, and other noises cannot be generated. Preferably, the boss 21, the resonator plate 2, and the connection part 3 are coaxially disposed. Alternatively, the cantilever beam 31 of the connecting portion 3 may also be connected with the projection 21.

The resonance plate 2 is formed with a fluid inlet 22, the fluid inlet 22 is disposed corresponding to the recess, and the air flow can enter the fluid transportation device through the fluid inlet 22 and then exit the piezoelectric micropump through the first fluid outlet 33. Preferably, the fluid inlet 22, the protrusion 21, the resonator plate 2 and the connecting portion 3 are coaxially arranged. Further, the number of the fluid inlets 22 may be at least one.

The actuator 1 includes a vibration plate 11 and a piezoelectric element 12, the piezoelectric element 12 and the vibration plate 11 may have a plate-shaped structure such as a circle, a square, or another polygon, and in the present embodiment, both the vibration plate 11 and the piezoelectric element 12 have a circular plate-shaped structure. Preferably, the outer circumferential surface of the resonator plate 2 is connected to the vibration plate 11 through the connection portion 3, and the outer diameter of the piezoelectric element 12 is smaller than that of the vibration plate 11.

A recess 111 is formed on an end surface of the vibration plate 11 adjacent to the resonator plate 2, the recess 111 is opposite to the cantilever beam 31, the recess 111 may have a shape of a ring, a polygon, other irregular structures, etc., preferably, the recess 111 has a ring shape, and the recess 111 is coaxially disposed with the fluid inlet 22, as shown in fig. 9. In order to ensure that the piezoelectric micropump does not leak gas during operation and ensure stable gas transmission, it is preferable that the inner diameter of the recess 111 is not greater than the outer diameter of the resonator plate 2 and the outer diameter of the recess 111 is not less than the outer diameter of the resonator plate 2.

As a preferable embodiment of the concave portion 111, as shown in fig. 11, at least one second fluid outlet 112 may be further disposed on an inner concave surface of the concave portion 111 close to the outer sidewall, the second fluid outlet 112 may be a through hole penetrating the vibration plate 11, and the piezoelectric element 12 may be reduced in outer diameter relative to the second fluid outlet 112 to form a relief; alternatively, the piezoelectric element 12 may be formed with a through hole communicating with the second fluid outlet 112, so that the air flow in the fluid transport device can be discharged from the second fluid outlet 112.

As a preferable configuration of the recess 111, as shown in fig. 12, a third fluid outlet 113 extends from the opening outer edge of the recess 111 to the outer peripheral surface of the vibrating plate 11 on the opening side of the recess 111. By providing the third fluid outlet 113 communicating with the recess 111, the first fluid outlet 33 may not be provided on the connecting portion 3 of the resonator plate 2, and the gas flow in the fluid delivery device may be discharged from the third fluid outlet 113. The first, second and third

fluid outlets

33, 112, 113 may be arranged alternatively or in superposition.

As an alternative solution of this embodiment, the concave portion 111 may be in a discrete shape, as shown in fig. 10, the concave portion 111 is in a plurality, the plurality of concave portions 111 have the same shape and are uniformly distributed in the circumferential direction, and the plurality of concave portions 111 correspond to the positions of the cantilever beam 31.

As an alternative solution of the present embodiment, as shown in fig. 13, the recess 111 may extend to the outer peripheral surface of the vibration plate 11, and at least two protrusions 114 are formed on the outer peripheral edge of the vibration plate 11 in a discrete distribution, so that a non-sealing connection may be formed between the vibration plate 11 and the connection portion 3, and even if the first fluid outlet 33, the second fluid outlet 112 and the third fluid outlet 113 are not provided, the fluid inside the fluid delivery device may be discharged through the space between the vibration plate 11 and the connection portion 3.

Various matching modes can be formed among the vibration plate 11, the resonance plate 2 and the connecting part 3, as shown in fig. 14, the annular connecting part 32 of the connecting part 3 can be connected with the convex block 114 on the vibration plate 11, so that the non-sealing connection between the vibration plate 11 and the connecting part 3 is integrated; as shown in fig. 15, both circumferential ends of the discretely distributed coupling members 32 of the discrete coupling parts 3 may be coupled with the adjacent two bosses 114 to restrain the resonator plate 2 on the vibration plate 11; as shown in fig. 16, the discrete connectors 32 of the discrete connection part 3 can be correspondingly connected with the bumps 114; as shown in fig. 17, the discretely distributed connecting pieces 32 of the discrete connecting portions 3 may be convexly connected to the outer periphery of the annular recess 111, or the like. The above connection modes can realize the integration of the resonance plate 2 and the vibration plate 11, and do not affect the inflow and the drainage of the fluid conveying device.

The end of the actuator 1 remote from the resonator plate 2 is provided with an electrode assembly 5, which electrode assembly 5 may power a piezoelectric element 12. In the present embodiment, the electrode assembly 5 and the piezoelectric element 12 are configured accordingly in order to facilitate the electrode assembly 5 to supply power to the piezoelectric element 12. Specifically, the piezoelectric element 12 is configured in a turned-up manner such that two conductive electrodes of the piezoelectric element 12 are located on the same face of the piezoelectric element 12 to be connected to the electrode assembly 5. The piezoelectric element 12 includes a base 121, a first conductive electrode 122 disposed on a second surface of the base 121, a second conductive electrode 123 crimped from the first surface of the base 121 to the second surface of the base 121 from an outer peripheral surface of the base 121, a crimped portion of the second conductive electrode 123 on the second surface of the base 121 being disposed off-axis, and an insulating region 124 being formed between the crimped portion of the second conductive electrode 123 and the first conductive electrode 122. In this embodiment, the insulating region 124 is a gap formed between the first conductive electrode 122 and the second conductive electrode 123, and besides, an insulating material may be filled between the two conductive electrodes to insulate the two conductive electrodes from each other.

In the operation of the fluid delivery device of the present embodiment, when the protrusion 21 is rigidly supported, the stiffness of the area of the resonance plate 2 corresponding to the recessed portion is small, and bending deformation is generated under the excitation of the actuator 1, and when the vibration of the area of the resonance plate 2 corresponding to the recessed portion and the vibration of the actuator 1 are out of phase by 90 degrees, the volume change rate is the largest, and the operation principle is as follows: when the actuator 1 bends and deforms in the direction away from the resonance plate 2, the area of the resonance plate 2 corresponding to the concave part deforms in the direction away from the bending and deforming direction of the actuator 1, and the fluid conveying device sucks gas; when the actuator 1 is bent and deformed in a direction close to the resonance plate 2, the area of the resonance plate 2 corresponding to the recess is deformed in a direction close to the bending direction of the actuator 1, the fluid delivery device discharges gas, and the two processes alternately reciprocate to form continuous outflow.

The embodiment also provides a piezoelectric pump, which comprises the fluid delivery device and a pump body 4, wherein a pump cavity is formed in the pump body 4, the fluid delivery device is arranged in the pump cavity, and the fluid delivery device is connected with the pump body 4 through a bulge 21.

The pump body 4 may be integrally or separately disposed, and in order to facilitate assembly of the fluid delivery device, the pump body 4 is separately disposed in this embodiment. Specifically, the pump body 4 includes a first cover plate 41, a side plate provided with a through hole, and a second cover plate 44 surrounding the periphery of the fluid delivery device, and the first cover plate 41 and the second cover plate 44 are disposed at both ends of the side plate to form a relatively sealed accommodation space. In this embodiment, the protrusion 21 is connected to the inner wall of the second cover plate 44 in a sealing manner, and the recess of the second cover plate 44 corresponding to the inner circumference of the protrusion 21 is provided with an inlet 441. The first cover plate 41 is provided with an outlet 411, and the fluid in the pump chamber can flow out of the piezoelectric pump through the outlet 411. In addition, the outlet 411 may be disposed on the side plate, so long as it is ensured that the fluid in the pump chamber flows out of the piezoelectric pump through the outlet 411. The number of inlets 441 and outlets 411 is at least 1.

As a preferred solution of the present embodiment, in order to facilitate fixing of the electrode assembly 5, the side plates may be provided as a separate structure, and specifically include a first side plate 42 and a second side plate 43, where the first side plate 42 and the second side plate 43 are axially distributed, and the electrode assembly 5 may be fixed in a stacked manner.

The electrode assembly 5 includes an insulating plate 51 and two electrode plates 52, the two electrode plates 52 being stacked on the same side of the insulating plate 51, the insulating plate 51 being disposed adjacent to the piezoelectric element 12. Specifically, the insulating plate 51 has a square plate shape, a large through hole is formed in the middle of the insulating plate 51, two electrode plates 52 are symmetrically stacked on one side of the insulating plate 51 away from the piezoelectric element 12, and a gap is formed between the two electrode plates 52 for insulation. Each electrode plate 52 extends with an external terminal 521 and a power supply terminal 522, the two external terminals 521 are connected with a power supply, and the two power supply terminals 522 are electrically connected with the two conductive electrodes of the piezoelectric element 12.

Based on the above structure, the working process of the piezoelectric pump of this embodiment is as follows: when the external fluid enters the concave part 23 on the inner periphery of the bulge 21 from the inlet 441 on the branch pump body 4 and the actuator 1 bends and deforms towards the direction far away from the resonance plate 2, the part of the resonance plate 2 corresponding to the concave part 23 bends and deforms towards the direction far away from the actuator 1, and the fluid conveying device sucks the fluid; when the actuator 1 is bent and deformed in a direction approaching the resonance plate 2, the portion of the resonance plate 2 corresponding to the recess 23 is deformed in a direction approaching the bending and deforming direction of the actuator 1, and the fluid in the fluid transport device is discharged into the pump chamber and then discharged through the outlet 411. Continued operation of the piezoelectric pump may result in a continuous outflow from outlet 411.

Example two

As shown in fig. 29, the present embodiment is substantially the same as the first embodiment except for the structure of the actuator 1. In this embodiment, the vibrating plate 11 has a concave center, and the piezoelectric element 12 is accommodated in the concave center of the vibrating plate 11 and stacked between the resonator plate 2 and the vibrating plate 11. Preferably, the outer diameter of the piezoelectric element 12 is not greater than the outer diameter of the resonator plate 2; further preferably, the piezoelectric element 12, the vibration plate 11, and the resonator plate 2 are coaxially disposed. In addition, the outer periphery of the diaphragm 11 may be formed in a convex shape by laminating the coupling 32 of the connecting portion 3 on the outer periphery of the diaphragm 11 on the surface close to the resonator plate 2, and a concave portion 111 may be formed between the coupling 32 and the piezoelectric element 12 in the radial direction.

Compared with the first embodiment, the fluid delivery device and the piezoelectric pump of the present embodiment simplify the structure of the vibrating plate 11 and reduce the axial volume.

It should be understood that the above-described specific embodiments are merely illustrative of the present invention and are not intended to limit the present invention. Obvious variations or modifications which are within the spirit of the invention are possible within the scope of the invention.

Claims

1. A fluid delivery device, comprising:

an actuator (1), the actuator (1) comprising a vibration plate (11) and at least one piezoelectric element (12) provided on the vibration plate (11);

a resonator plate (2), wherein the resonator plate (2) is stacked on one side of the actuator (1) and is connected with the vibration plate (11) through a connecting part (3);

a connection part (3), a first end of the connection part (3) being connected to the resonance plate (2), and a second end of the connection part (3) being connected to the vibration plate (11).

2. A fluid delivery device according to claim 1, wherein a protrusion (21) is formed on a side of the resonator plate (2) remote from the actuator (1), the protrusion (21) being integrally formed with the resonator plate (2) or fixedly arranged on the resonator plate (2).

3. The fluid delivery device according to claim 1, wherein the connecting portion (3) comprises a cantilever beam (31), a first end of the cantilever beam (31) being connected to the resonator plate (2), and a second end of the cantilever beam (32) being connected to the vibrating plate (11).

4. The fluid transfer device of claim 3, wherein the cantilevered beam (31) comprises at least one curved beam formed as a single-piece beam structure or a plurality of the curved beams formed as a composite beam structure.

5. The fluid transfer device according to claim 3, wherein the cantilever beam (31) comprises a transition beam arranged linearly or curvilinearly along the circumference of the resonator plate (2), wherein at least one first connecting arm extends from a first side of the transition beam, and at least one second connecting arm extends from a second side of the transition beam, and wherein the first and second connecting arms connect the resonator plate (2) and the vibrating plate (11), respectively.

6. The fluid delivery device according to claim 3, wherein the second end of the cantilever beam (31) is integrally formed or fixedly connected with a connector (32), and the connector (32) is connected with the vibration plate (11).

7. The fluid transfer device according to claim 6, wherein the connecting member (32) is a continuous connecting plate or a discrete connecting plate, and the connection between the connecting member (32) and the vibrating plate (11) is a discrete connection or a continuous connection.

8. The fluid transfer device according to any one of claims 1 to 7, wherein the connection portion (3) is an elastic connection portion, and the connection portion (3) is connected to an arbitrary position of the vibration plate (11); or the connecting part (3) is a rigid connecting part, and the connecting part (3) is connected with the node of the vibrating plate (11) or the position near the node where no vibration or little vibration exists.

9. A fluid transfer device according to claim 3, wherein at least one fluid inlet (22) is formed at or near the center of the resonance plate (2), the inner periphery of the protrusion (21) is provided with a recess (23) communicating with the fluid inlet (22), and the connecting portion (3) is formed with a fluid outlet which is a first fluid outlet (33) provided between the cantilever beams (31).

10. The fluid delivery device according to claim 2, wherein a recess (111) is formed in a surface of the vibration plate (11) facing the resonator plate (2), the recess (111) being located opposite to the cantilever beam (31).

11. The fluid delivery device according to claim 2, wherein at least one fluid inlet (22) is formed at or near the center of the resonance plate (2), a recess (23) communicating with the fluid inlet (22) is provided on the inner periphery of the protrusion (21), a recess (111) is formed on a surface of the vibration plate (11) facing the resonance plate (2) and is opposed to the cantilever beam (31), and at least one fluid outlet is formed in the circumferential direction of the recess (111).

12. The fluid delivery device according to claim 11, wherein the fluid outlet (43) comprises a third fluid outlet (113) arranged on a side wall of the recess (111) and/or a second fluid outlet (112) arranged on an inner concave surface adjacent to the side wall.

13. A piezoelectric pump comprising a fluid delivery device as claimed in any one of claims 1 to 12.

14. A piezoelectric pump according to claim 13, further comprising a pump body (4), a pump chamber being formed in the pump body (4), the fluid delivery means being connected to the pump body (4) by the projection (21).

15. A piezoelectric pump according to claim 14, wherein the pump body (4) is provided with an inlet (441) and an outlet (411) which communicate with the pump chamber, the inlet (441) communicates with a fluid inlet (22) through a recess (23) provided in the inner periphery of the projection (21), and the fluid outlet communicates with the outlet (411) through the pump chamber, while the projection (21) of the resonator plate (2) forms a partition between the fluid inlet (22) and the fluid outlet.

16. A piezoelectric pump according to claim 13, further comprising an electrode assembly (5), wherein the electrode assembly (5) comprises an insulating plate (51) and two electrode plates (52) disposed on the insulating plate (51), the two electrode plates (52) are insulated from each other, the two electrodes of the electrode assembly (5) are respectively formed on the two electrode plates (52), at least a portion of the two electrode plates (52) protrudes out of the pump chamber to form an external terminal (521), and at least a portion of the two electrode plates (52) is disposed in the pump chamber and electrically connected to the piezoelectric element (12).

17. A piezoelectric pump according to claim 16, wherein the piezoelectric element (12) comprises a substrate (121) and a first conductive electrode (122) and a second conductive electrode (123) disposed on the substrate (121), the first conductive electrode (122) being disposed on a first side of the substrate (121) and forming a connection terminal, the second conductive electrode (123) being disposed on a second side of the substrate (121), while one end of the second conductive electrode (123) is folded over to the first side of the substrate (121) and forming a connection terminal.