CN111979521A - Composite coating method for realizing high-wear-resistance film thermocouple manufacturing on FSW stirring head - Google Patents
Composite coating method for realizing high-wear-resistance film thermocouple manufacturing on FSW stirring head Download PDFInfo
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- CN111979521A CN111979521A CN202010827440.XA CN202010827440A CN111979521A CN 111979521 A CN111979521 A CN 111979521A CN 202010827440 A CN202010827440 A CN 202010827440A CN 111979521 A CN111979521 A CN 111979521A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
- C23C14/0611—Diamond
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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Abstract
The invention relates to a composite coating method for realizing high-wear-resistance film thermocouple manufacturing on an FSW stirring head, which comprises the following steps: pretreating a substrate; depositing a pure silicon bottom layer on the substrate; depositing an insulating and heat-insulating layer on the pure silicon bottom layer; depositing a thin film thermocouple on the insulating and heat-insulating layer to insulate the thin film thermocouple from the substrate; and depositing a transition layer on the insulating and heat-insulating layer and the thin-film thermocouple, and then depositing a ta-c layer on the transition layer. The invention is beneficial to realizing high-precision and high-real-time temperature measurement performance.
Description
Technical Field
The invention relates to the technical field of manufacturing of composite coatings, in particular to a composite coating method for manufacturing a high-wear-resistance film thermocouple on an FSW stirring head.
Background
Friction stir welding (FSW for short) is an advanced green joining technology and is widely used in high and new technology industries such as spacecraft, ships, new energy vehicles and the like. Friction stir welding tool bits are key components in achieving this process. In the welding process, the temperature of the welding area has great influence on the material flow and the performance of the final connecting joint, so that how to realize the temperature measurement of the welding area and regulate and control the welding temperature by adjusting the welding process parameters is the key for realizing high-quality welding.
At present, the temperature of a welding zone is measured by adopting a mode of placing a thermocouple in a welding material in advance, the defect that the real-time performance is poor, the lag is serious, the method can only be used for experiments and cannot be practically applied, the problem that the temperature is measured by adopting a common thermocouple on a stirring head is researched, the defect is that the structure is damaged, the real-time performance is poor, meanwhile, the method can not work for a long time due to quick abrasion, along with the continuous development of a local temperature measurement technology, the temperature measurement mode is developed from the temperature measurement of the common thermocouple into the temperature measurement mode of a film thermocouple, and the film thermocouple has the advantages of high temperature measurement real-time performance, accuracy, non-destructiveness and the like, and is widely applied to the fields of space engines, cutting processes, material forming and the like.
The stirring head is made of tool steel, the problems of insulation between a film and a metal matrix, bonding stress between the film and the surface, wear resistance and high temperature resistance of the film thermocouple and the like must be solved when a film thermocouple coating is manufactured on the surface of the tool steel, and the wear resistance is only considered to be increased in the conventional coating method, but the coating is too thick to facilitate real-time temperature measurement, so that the measurement and the service life of the film thermocouple are influenced.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to provide a composite coating method and a composite coating, which can ensure the wear resistance, the insulativity and the service life of the thin-film thermocouple and realize the manufacture of the high-wear-resistant thin-film thermocouple on the FSW stirring head with high precision and high real-time temperature measurement performance.
In order to solve the technical problem, the invention provides a composite coating method for manufacturing a high-wear-resistance film thermocouple on an FSW stirring head, which comprises the following steps: pretreating a substrate; depositing a pure silicon bottom layer on the substrate; depositing an insulating and heat-insulating layer on the pure silicon bottom layer; depositing a thin film thermocouple on the insulating and heat-insulating layer to insulate the thin film thermocouple from the substrate; and depositing a transition layer on the insulating and heat-insulating layer and the thin-film thermocouple, and then depositing a ta-c (tetrahedral amorphous carbon) layer on the transition layer.
In one embodiment of the present invention, the method for pretreating the substrate comprises: after polishing the substrate, cleaning the substrate for the first time, and then cleaning the substrate for the second time after sand blasting.
In one embodiment of the invention, the insulating layer is Si3N4And an insulating and heat-insulating layer.
In one embodiment of the invention, the thin film thermocouple comprises a NiCr thin film, a NiSi thin film, a hot junction, conductive silver adhesive and protective adhesive, and the NiCr thin film, the NiSi thin film, the hot junction, the conductive silver adhesive and the protective adhesive form a closed loop.
In one embodiment of the present invention, the thin film thermocouple further comprises a wire.
In one embodiment of the invention, the thickness of the ta-c layer is 2-5 um.
In one embodiment of the invention, the pure silicon bottom layer is deposited on the substrate by magnetron sputtering.
In one embodiment of the invention, the ta-c layer is deposited on the transition layer by using a high-power pulse magnetron sputtering technology.
In one embodiment of the invention, the ta-c layer is a PVD diamond carbon coating.
In one embodiment of the invention, the material of the base body is the same as that of the stirring head.
Compared with the prior art, the technical scheme of the invention has the following advantages:
the composite coating method and the composite coating for manufacturing the high-wear-resistance film thermocouple on the FSW stirring head, disclosed by the invention, have the advantages that after a base body is polished, the base body is cleaned for the first time to remove oxides, oil stains and other dirt on the surface of a sample, and then after sand blasting treatment, the base body is cleaned for the second time to remove residual impurities such as carborundum and the like; depositing a pure silicon bottom layer on the substrate, wherein the pure silicon bottom layer can play a role in heat insulation; an insulating and heat-insulating layer is deposited on the pure silicon bottom layer, so that the stability of the coating is improved; a thin film thermocouple is deposited on the insulating heat-insulating layer, can be used for measuring temperature, is favorable for realizing high dynamic high-precision measurement of the temperature of a welding interface, and is insulated from the base body to ensure the stable performance of the base body; the transition layer is deposited on the insulating and heat-insulating layer and the thin-film thermocouple, and the ta-c layer is deposited on the transition layer, so that the bonding force between the insulating and heat-insulating layer and the ta-c layer is enhanced, and the physical performance of the thin-film thermocouple is prevented from being influenced due to the protection of the ta-c layer, so that the structure of the thin-film thermocouple is not damaged.
Drawings
In order that the present disclosure may be more readily and clearly understood, reference is now made to the following detailed description of the embodiments of the present disclosure taken in conjunction with the accompanying drawings, in which
FIG. 1 is a schematic representation of a composite coating of the present invention;
FIG. 2 is a schematic diagram of a thin film thermocouple configuration according to the present invention.
The specification reference numbers indicate: 11-substrate, 12-pure silicon bottom layer, 13-insulating and heat-insulating layer, 14-thin film thermocouple, 141-NiCr thin film, 142-NiSi thin film, 143-hot junction, 144-conductive silver adhesive and protective adhesive, 145-wire, 15-transition layer and 16-ta-c layer.
Detailed Description
As shown in fig. 1, this embodiment provides a method for implementing a composite coating for manufacturing a high wear-resistant thin-film thermocouple on an FSW stirring head, which includes the following steps: step S1: pre-treating the substrate 11; step S2: depositing a pure silicon bottom layer 12 on the substrate 11; step S3: depositing an insulating and heat-insulating layer 13 on the pure silicon bottom layer 12; step S4: depositing a thin film thermocouple 14 on the insulating layer 13 to insulate the thin film thermocouple 14 from the substrate 11; step S5: and depositing a transition layer 15 on the insulating and heat-insulating layer 13 and the thin-film thermocouple 14, and then depositing a ta-c layer 16 on the transition layer 15.
In the method for manufacturing the composite coating on the FSW stirring head to realize the high wear-resistant film thermocouple, in step S1, the substrate 11 is pretreated to facilitate the removal of impurities such as dirt; in step S2, depositing a pure silicon bottom layer 12 on the substrate 11, wherein the pure silicon bottom layer 12 can serve as a heat insulation layer; in the step S3, depositing an insulating layer 13 on the pure silicon bottom layer 12, so as to improve the stability of the coating; in the step S4, a thin film thermocouple 14 is deposited on the insulating layer 13, and the thin film thermocouple 14 can be used for measuring temperature, which is beneficial to realizing high dynamic and high precision measurement of the temperature of the welding interface, and meanwhile, the thin film thermocouple 14 is insulated from the substrate 11, so as to ensure stable performance; in the step S5, the transition layer 15 is deposited on the insulating and heat-insulating layer 13 and the thin-film thermocouple 14, and then the ta-c layer 16 is deposited on the transition layer 15, which is not only beneficial to enhancing the bonding force between the insulating and heat-insulating layer 13 and the ta-c layer 16, but also avoids influencing the physical properties of the thin-film thermocouple 14 due to the protection of the ta-c layer 16, thereby not damaging the structure of the thin-film thermocouple 14.
In step S1, the method for pretreating the substrate 11 includes: after polishing the substrate 11, the substrate 11 is cleaned for the first time to remove oxides, oil stains and other dirt on the surface of the sample, and then cleaned for the second time after sand blasting to remove the residual impurities such as carborundum. And ultrasonic cleaning is adopted for both the first cleaning and the second cleaning of the substrate 11. Specifically, the substrate 11 is polished to a mirror surface structure with sandpaper and polishing cloth, then ultrasonic cleaning is performed to remove oxides, oil stains, and other dirt of the substrate 11, then the substrate 11 is sandblasted with a jet-suction type sandblaster, and then ultrasonic cleaning is performed again on the roughened substrate 11 to remove remaining impurities such as silicon carbide.
In step S2, when depositing the pure silicon bottom layer 12 on the substrate 11, a magnetron sputtering method is used for deposition.
In step S3, since the thermal insulation layer is made of a material with poor thermal conductivity, the thermal stability of the coating can be effectively improved by depositing the thermal insulation layer 13 on the pure silicon bottom layer 12.
As shown in fig. 2, in the step S4, the thin film thermocouple 14 includes a NiCr thin film 141, a NiSi thin film 142, a hot junction 143, conductive silver paste, and a protective paste 144, and the NiCr thin film 141, the NiSi thin film 142, the hot junction 143, the conductive silver paste, and the protective paste 144 form a closed loop. The temperature measurement principle is based on the seebeck effect, namely, a closed loop is formed by conductors made of two different materials, and when the temperatures of two contact points are different, current can pass through the closed loop. The electric signal is converted into a temperature signal and transmitted to an upper computer, so that the high dynamic high-precision measurement of the temperature of the welding interface can be realized.
The NiCr film 141 and the NiSi film 142 are made of two different metal materials, belong to functional layers, and are used for generating a hot junction 143, and the position of the hot junction 143 is the position of the measured temperature. The conductive silver paste and the protective paste 144 function to conduct and protect electricity.
The thin film thermocouple 14 also includes a wire 145. The number of the conducting wires 145 is two, the conducting wires are connected with the physical end of the ADC, temperature signals are collected from the ADC through the thermocouple and then sent to the upper computer through the serial port end of the coordinator.
In the step S5, the transition layer 15 is still deposited on the insulating layer 13 and the thin-film thermocouple 14 by magnetron sputtering, so that the bonding force between the insulating layer 13 and the ta-c layer 16 can be effectively strengthened.
In addition, when the ta-c layer 16 is deposited on the transition layer 15, a High Power Impulse magnetron Sputtering (High IMS for short) technique is adopted for deposition.
The material of the base body 11 is the same as that of the stirring head.
The insulating layer 13 is Si3N4The insulating and heat-insulating layer is beneficial to improving the thermal stability of the coating.
The ta-c layer 16, due to its high coating hardness and low friction coefficient, is suitable for high speed processing of graphite, carbon fiber, composite materials, aluminum and aluminum alloys (silicon content < 12%), which can be used not only on the surface of alloy cutters, but also deposited on high speed steel, aluminum, titanium and other materials.
In this embodiment, the ta-c layer 16 may be a PVD diamond carbon coating, which has the highest hardness and the best friction performance.
The ta-c layer 16 can also adopt a super-hard coating with high wear resistance and high temperature resistance, the thickness is 2um-5um, and the measurement is not influenced. Such as DLC (diamond like carbon) which has not only an ultra-hard coating but also good insulation.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. A composite coating method for realizing high-wear-resistance film thermocouple manufacturing on an FSW stirring head is characterized by comprising the following steps:
step S1: pretreating a substrate;
step S2: depositing a pure silicon bottom layer on the substrate;
step S3: depositing an insulating and heat-insulating layer on the pure silicon bottom layer;
step S4: depositing a thin film thermocouple on the insulating and heat-insulating layer to insulate the thin film thermocouple from the substrate;
step S5: and depositing a transition layer on the insulating and heat-insulating layer and the thin-film thermocouple, and then depositing a ta-c layer on the transition layer.
2. The method for realizing the composite coating for manufacturing the high-abrasion-resistance thin-film thermocouple on the FSW stirring head as claimed in claim 1, wherein the method comprises the following steps: the method for pretreating the substrate comprises the following steps: after polishing the substrate, cleaning the substrate for the first time, and then cleaning the substrate for the second time after sand blasting.
3. The method for realizing the composite coating for manufacturing the high-abrasion-resistance thin-film thermocouple on the FSW stirring head as claimed in claim 1, wherein the method comprises the following steps: the insulating and heat-insulating layer is Si3N4And an insulating and heat-insulating layer.
4. The method for realizing the composite coating for manufacturing the high-abrasion-resistance thin-film thermocouple on the FSW stirring head as claimed in claim 1, wherein the method comprises the following steps: the film thermocouple comprises a NiCr film, a NiSi film, a hot junction, conductive silver adhesive and protective adhesive, wherein the NiCr film, the NiSi film, the hot junction, the conductive silver adhesive and the protective adhesive form a closed loop.
5. The method for realizing the composite coating for manufacturing the high-abrasion-resistance thin-film thermocouple on the FSW stirring head as claimed in claim 4, wherein the method comprises the following steps: the thin film thermocouple further includes a wire.
6. The method for realizing the composite coating for manufacturing the high-abrasion-resistance thin-film thermocouple on the FSW stirring head as claimed in claim 1, wherein the method comprises the following steps: and when the pure silicon bottom layer is deposited on the substrate, a magnetron sputtering method is adopted for deposition.
7. The method for realizing the composite coating for manufacturing the high-abrasion-resistance thin-film thermocouple on the FSW stirring head as claimed in claim 1, wherein the method comprises the following steps: the thickness of the ta-c layer is 2um-5 um.
8. The method for realizing the composite coating for manufacturing the high-abrasion-resistance thin-film thermocouple on the FSW stirring head as claimed in claim 1, wherein the method comprises the following steps: and when the ta-c layer is deposited on the transition layer, depositing by adopting a high-power pulse magnetron sputtering technology.
9. The method for realizing the composite coating for manufacturing the high-abrasion-resistance film thermocouple on the FSW stirring head as claimed in any one of claims 1, 7 or 8, wherein the method comprises the following steps: the ta-c layer is a PVD diamond carbon coating.
10. The method for realizing the composite coating for manufacturing the high-abrasion-resistance thin-film thermocouple on the FSW stirring head as claimed in claim 1, wherein the method comprises the following steps: the material of the base body is the same as that of the stirring head.
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| CN202010827440.XA CN111979521A (en) | 2020-08-17 | 2020-08-17 | Composite coating method for realizing high-wear-resistance film thermocouple manufacturing on FSW stirring head |
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| CN202010827440.XA CN111979521A (en) | 2020-08-17 | 2020-08-17 | Composite coating method for realizing high-wear-resistance film thermocouple manufacturing on FSW stirring head |
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| US20130306216A1 (en) * | 2012-05-18 | 2013-11-21 | Wisconsin Alumni Research Foundation | Vibration welding system with thin film sensor |
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2020
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| CN102564628A (en) * | 2010-12-10 | 2012-07-11 | 中国计量学院 | Thermocouple temperature sensor based on multiple layers of membranes |
| US20130306216A1 (en) * | 2012-05-18 | 2013-11-21 | Wisconsin Alumni Research Foundation | Vibration welding system with thin film sensor |
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