CN111974233A - Melting device convenient for processing semiconductor graphite wafer and use method thereof - Google Patents

Melting device convenient for processing semiconductor graphite wafer and use method thereof Download PDF

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Publication number
CN111974233A
CN111974233A CN202010652052.2A CN202010652052A CN111974233A CN 111974233 A CN111974233 A CN 111974233A CN 202010652052 A CN202010652052 A CN 202010652052A CN 111974233 A CN111974233 A CN 111974233A
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CN
China
Prior art keywords
crushing
shaft
fixedly arranged
box
motor
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Pending
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CN202010652052.2A
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Chinese (zh)
Inventor
柴万红
张培林
武建军
柴利春
张作文
王志辉
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Datong Xincheng New Material Co Ltd
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Datong Xincheng New Material Co Ltd
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Priority to CN202010652052.2A priority Critical patent/CN111974233A/en
Publication of CN111974233A publication Critical patent/CN111974233A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F21/00Dissolving
    • B01F21/10Dissolving using driven stirrers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/70Pre-treatment of the materials to be mixed
    • B01F23/708Filtering materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/60Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a horizontal or inclined axis
    • B01F27/70Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a horizontal or inclined axis with paddles, blades or arms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00Other mixers; Mixing plants; Combinations of mixers
    • B01F33/80Mixing plants; Combinations of mixers
    • B01F33/83Mixing plants specially adapted for mixing in combination with disintegrating operations
    • B01F33/831Devices with consecutive working receptacles, e.g. with two intermeshing tools in one of the receptacles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C21/00Disintegrating plant with or without drying of the material
    • B02C21/02Transportable disintegrating plant
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C23/00Auxiliary methods or auxiliary devices or accessories specially adapted for crushing or disintegrating not provided for in preceding groups or not specially adapted to apparatus covered by a single preceding group
    • B02C23/08Separating or sorting of material, associated with crushing or disintegrating
    • B02C23/10Separating or sorting of material, associated with crushing or disintegrating with separator arranged in discharge path of crushing or disintegrating zone
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C4/00Crushing or disintegrating by roller mills
    • B02C4/02Crushing or disintegrating by roller mills with two or more rollers
    • B02C4/08Crushing or disintegrating by roller mills with two or more rollers with co-operating corrugated or toothed crushing-rollers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C4/00Crushing or disintegrating by roller mills
    • B02C4/28Details
    • B02C4/30Shape or construction of rollers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C4/00Crushing or disintegrating by roller mills
    • B02C4/28Details
    • B02C4/42Driving mechanisms; Roller speed control

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  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mixers Of The Rotary Stirring Type (AREA)

Abstract

The invention discloses a melting device convenient for processing a semiconductor graphite wafer, which comprises a base, wherein a melting box is fixedly arranged on the top surface of the base, and an equipment box is arranged at the top of one side of the melting box; a partition plate is fixedly arranged at the upper part in the melting box, and the melting box is divided into a crushing cavity and a melting cavity through the partition plate; two crushing shafts are transversely arranged in parallel in the crushing cavity, a shaft body of each crushing shaft is sleeved with a plurality of first sleeves, and the periphery of the surface of each first sleeve is fixedly provided with a crushing assembly; stirring shafts are transversely arranged in the melting cavity, second sleeves are fixedly sleeved on a shaft body of each stirring shaft at equal intervals, and a disturbance assembly and a stirring assembly are respectively and fixedly arranged at the upper part and the lower part of a pipe body of each second sleeve; the invention has simple operation, and solves the problems of poor crushing efficiency, poor crushing quality and poor uniformity through the driving assembly and the crushing assembly; through vortex subassembly and stirring subassembly, longer and the relatively poor problem of mixing effect of time consuming when having solved the dissolution.

Description

Melting device convenient for processing semiconductor graphite wafer and use method thereof
Technical Field
The invention relates to the technical field of semiconductor graphite wafer processing, in particular to a melting device convenient for semiconductor graphite wafer processing and a using method thereof.
Background
The wafer refers to a silicon chip used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape of the wafer is circular; the wafer is a carrier for producing integrated circuits, and generally means the wafer mostly refers to a monocrystalline silicon wafer; the monocrystalline silicon wafer is drawn and refined by common silica sand, a monocrystalline silicon rod is prepared by a series of measures of dissolution, purification and distillation, and the monocrystalline silicon rod becomes a wafer after being polished and sliced; usually, a graphene oxide ethanol solution containing boron or nitrogen is coated on the surface of a monocrystalline silicon wafer to prepare a semiconductor graphite wafer; when retrieving graphite wafer, need smash and melt it, current china ink wafer's reducing mechanism exists crushing efficiency relatively poor and smash the not good shortcoming of quality and homogeneity, because kibbling not enough even ink wafer particle that leads to has consuming time longer and mix the relatively poor shortcoming of effect when dissolving.
Disclosure of Invention
The invention aims to solve the defects in the prior art and provides a melting device convenient for processing a semiconductor graphite wafer.
In order to achieve the purpose, the invention adopts the following technical scheme:
the melting device convenient for processing the semiconductor graphite wafer comprises a base, wherein the base is in a horizontally arranged rectangular plate shape, a rectangular dissolving box is fixedly arranged in the middle of the top surface of the base, a rectangular equipment box is fixedly arranged at the top of one side of the dissolving box, and a driving assembly is fixedly arranged in the equipment box; a liquid inlet pipe is transversely and fixedly arranged in the middle of one side of the dissolving box; a liquid outlet pipe is transversely and fixedly arranged at the bottom of the other side of the dissolving box, a rectangular motor box is fixedly arranged on a box body on the other side of the dissolving box above the liquid outlet pipe, a first motor is transversely and fixedly arranged in the motor box, open-mouth feed hoppers are vertically arranged on two sides of the middle part of the top surface of the dissolving box, a partition plate is horizontally and fixedly arranged at the upper part in the dissolving box, and the dissolving box is divided into a crushing cavity and a melting cavity through the partition plate;
the front end and the rear end of the middle part of the inner walls at the two sides of the crushing cavity are respectively fixedly provided with a first bearing, two crushing shafts are transversely arranged in the crushing cavity in parallel, and the two ends of each crushing shaft are fixedly connected in the inner ring of the first bearing; a plurality of first sleeves are fixedly sleeved on the shaft body of each crushing shaft at equal intervals, and crushing assemblies are fixedly arranged on the peripheral sides of the surfaces of the first sleeves; melt the middle part of the both sides inner wall in chamber and all fixedly be equipped with the second bearing melt the intracavity and transversely be equipped with the (mixing) shaft melt the equidistant fixed cover on the axis body of (mixing) shaft and be equipped with the second sleeve pipe, every the fixed disturbance subassembly and the stirring subassembly of being equipped with respectively in second sheathed tube body upper portion and lower part, the one end of (mixing) shaft runs through into in the motor case to through the coaxial rigid coupling of motor shaft of shaft coupling and first motor.
Preferably, the crushing assembly comprises T-shaped crushing blocks and crushing lugs, the T-shaped crushing blocks are fixedly arranged on the periphery of the surface of each first sleeve, rectangular crushing grooves and crushing grooves are respectively formed in the middle and two sides of the top surface of each T-shaped crushing block, the crushing lugs are fixedly arranged on the inner walls of the front end and the rear end of the crushing cavity, and the protruding parts of the crushing lugs extend into the crushing grooves and the crushing grooves; the T-shaped crushing blocks on the crushing shaft at the rear end of the crushing cavity and the T-shaped crushing blocks on the crushing shaft at the front end of the crushing cavity are arranged in a left-right staggered mode.
Preferably, the driving assembly comprises a second motor, a storage battery, a driving gear and a driven gear, the second motor is transversely and fixedly arranged at the front end in the equipment box, the storage battery is fixedly arranged at the rear end in the equipment box, one end of each crushing shaft penetrates through the equipment box, and a motor shaft of the second motor is coaxially and fixedly connected with one end of the crushing shaft at the front end through a coupling; a driving gear is fixedly sleeved on the crushing shaft body located at the front end in the equipment box, a driven gear is fixedly sleeved on the crushing shaft body located at the rear end in the equipment box, and the driving gear is in meshing transmission with the driven gear.
Preferably, the disturbance subassembly includes first montant, spoiler and spoiler, every the equal vertical fixed first montant that is equipped with in second sheathed tube body upper portion, every the body of rod both sides of second montant are equalling apart from the horizontal fixed spoiler that is equipped with the slope down setting, every equal vertical fixed spoiler that is equipped with between the spoiler of first montant both sides.
Preferably, the stirring subassembly includes second montant, V type puddler and stirring tooth, every the equal vertical fixed second montant that is equipped with in second sheathed tube body bottom, every the body of rod both sides of second montant are equant apart from horizontal high fixed V type puddler that is equipped with opening outside, every the equant vertical stirring tooth that is equipped with in bottom and the top in the V type puddler opening.
Preferably, a connecting rod is vertically and fixedly arranged at the bottom end of each second vertical rod, and a brush is transversely and fixedly arranged at the bottom end of each connecting rod; a first filter screen is horizontally and fixedly arranged in the middle of each feed hopper, rectangular screening openings are formed in two sides of the middle of the top surface of the partition plate, and a second filter screen is horizontally and fixedly arranged in each screening opening; the device comprises a dissolving tank, a rectangular opening is formed in the lower portion of the front end face of the dissolving tank, an observation window is fixedly arranged in the rectangular opening, and liquid level scale marks are vertically arranged on the front end face of the dissolving tank on one side of the observation window.
The invention also provides a use method of the melting device convenient for processing the semiconductor graphite wafer, which comprises the following steps:
firstly, electrically connecting a first motor and a second motor with a storage battery through leads respectively, injecting a decomposition liquid into a dissolving box through a liquid inlet pipe, and then placing a blocky graphite wafer to be melted into the dissolving box through a feed hopper;
step two, a second motor is controlled to drive a crushing shaft at the front end to rotate, a driving gear is driven to rotate through the rotation of the crushing shaft at the front end, a crushing shaft at the rear end of a crushing cavity is driven to rotate through the meshing transmission of the driving gear and a driven gear, and a crushing assembly on each first sleeve is driven to crush the graphite wafer through the rotation of the two crushing shafts;
step three, filtering larger particles of the crushed graphite wafer through a second filter screen, then dropping the particles into a melting cavity, controlling a first motor to drive a stirring shaft to rotate, and driving a turbulence component and a stirring component of each second sleeve to mix and stir the crushed graphite wafer and decomposition liquid through the rotation of the stirring shaft;
dissolving the graphite wafer by the stirred and mixed decomposition liquid, observing the dissolving state of the graphite wafer on the inner wall through an observation window, and discharging the mixed liquid in the dissolving box through a liquid outlet pipe until the graphite wafer is completely dissolved;
and step five, cutting off the power supply after the dissolution is finished.
Compared with the prior art, the invention has the beneficial effects that:
1. the grinding shafts are conveniently driven to rotate by the driving assembly, the grinding assemblies on each first sleeve are conveniently driven to grind the graphite wafer by the rotation of the two grinding shafts, the grinding quality of the graphite wafer during grinding is effectively improved by the left-right staggered arrangement of the T-shaped grinding blocks and the grinding lugs in the grinding assemblies, the graphite wafer is conveniently ground into particles with uniform particles, the quick decomposition of the graphite wafer by decomposition liquid is conveniently accelerated, and the grinding efficiency and the quality after grinding of the graphite wafer are effectively improved by the driving assembly and the grinding assemblies; the problems of poor crushing efficiency, poor crushing quality and poor crushing uniformity of the conventional graphite wafer crushing device are solved;
2. the stirring shaft is driven to rotate by controlling the first motor, and the stirring shaft drives the turbulence component and the stirring component of each second sleeve to mix and stir the crushed graphite wafer and the decomposition liquid, so that the turbulence of the decomposition liquid is effectively increased by the turbulence plate and the turbulence rod, and the decomposition liquid can be conveniently mixed and dissolved with particles of the graphite wafer; through V type puddler and stirring tooth, effectively improved the mixing efficiency to decomposition liquid and graphite particle, avoided taking place the phenomenon of conglobation when graphite wafer particle dissolves, effectively improved the work efficiency that graphite wafer dissolved, solved current graphite wafer particle longer and the relatively poor problem of mixing effect when dissolving time consuming.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic view of a partial cross-sectional structure of the present invention;
FIG. 3 is a schematic top view of a partial cross-sectional structure of a dissolution tank and an equipment tank according to the present invention;
FIG. 4 is an enlarged view of the structure of the portion A in FIG. 2 according to the present invention;
FIG. 5 is a schematic top view of the divider plate of the present invention;
FIG. 6 is a schematic view of a method of use of the present invention;
number in the figure: base 1, dissolve case 2, equipment box 3, feed liquor pipe 4, drain pipe 5, motor case 6, first motor 7, feeder hopper 8, division board 9, crushing axle 10, first sleeve pipe 11, (mixing) shaft 12, second sleeve pipe 13, the piece 14 is smashed to T type, smash lug 15, second motor 16, battery 17, driving gear 18, driven gear 19, first montant 20, second montant 21, vortex pole 22, spoiler 23, V type puddler 24, stirring tooth 25, connecting rod 26, brush 27, first filter screen 28, second filter screen 29, observation window 30.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1: referring to fig. 1-5, the thawing apparatus convenient for processing semiconductor graphite wafers comprises a base 1, wherein the base 1 is in a horizontally arranged rectangular plate shape, a rectangular dissolving tank 2 is fixedly arranged in the middle of the top surface of the base 1, a rectangular equipment box 3 is fixedly arranged at the top of one side of the dissolving tank 2, and a driving assembly is fixedly arranged in the equipment box 3; a liquid inlet pipe 4 is transversely and fixedly arranged in the middle of one side of the dissolving box 2; a liquid outlet pipe 5 is transversely and fixedly arranged at the bottom of the other side of the dissolving tank 2, a rectangular motor tank 6 is fixedly arranged on a tank body on the other side of the dissolving tank 2 above the liquid outlet pipe 5, a first motor 7 is transversely and fixedly arranged in the motor tank 6, the model of the second motor 7 is YCTL180-4A, open-mouth feed hoppers 8 are vertically arranged on two sides of the middle part of the top surface of the dissolving tank 2, a partition plate 9 is horizontally and fixedly arranged at the upper part in the dissolving tank 2, and the dissolving tank 2 is divided into a crushing cavity and a melting cavity by the partition plate 9; the front end and the rear end of the middle part of the inner walls of the two sides of the crushing cavity are respectively fixedly provided with a first bearing, two crushing shafts 10 are transversely arranged in the crushing cavity in parallel, and the two ends of each crushing shaft 10 are fixedly connected in the inner ring of the first bearing; a plurality of first sleeves 11 are fixedly sleeved on the shaft body of each crushing shaft 10 at equal intervals, and a crushing assembly is fixedly arranged on the peripheral side of the surface of each first sleeve 11; melt the both sides of chamber inner wall the middle part all fixed second bearing that is equipped with melt the intracavity and transversely be equipped with (mixing) shaft 12 the fixed cover of equidistance is equipped with second sleeve pipe 13 on the axis body of (mixing) shaft 12, every the body upper portion and the lower part of second sleeve pipe 13 are fixed disturbance subassembly and the stirring subassembly of being equipped with respectively, the one end of (mixing) shaft 12 runs through in advancing motor case 6 to through the coaxial rigid coupling of motor shaft of shaft coupling and first motor 7.
In the invention, the crushing assembly comprises T-shaped crushing blocks 14 and crushing lugs 15, the periphery of the surface of each first sleeve 11 is fixedly provided with the T-shaped crushing blocks 14, the middle part and two sides of the top surface of each T-shaped crushing block 14 are respectively provided with a rectangular crushing groove and a rectangular crushing groove, the inner walls of the front end and the rear end of the crushing cavity are respectively fixedly provided with the crushing lugs 15, and the protruding part of each crushing lug 15 extends into the crushing groove and the crushing groove; the T-shaped crushing blocks 14 on the crushing shaft 10 at the rear end of the crushing cavity and the T-shaped crushing blocks 14 on the crushing shaft 10 at the front end of the crushing cavity are arranged in a left-right staggered manner; the driving assembly comprises a second motor 16, a storage battery 17, a driving gear 18 and a driven gear 19, the model of the second motor 16 is YCTL250-4B, the second motor 16 is transversely and fixedly arranged at the front end in the equipment box 3, the storage battery 17 is fixedly arranged at the rear end in the equipment box 3, one end of each crushing shaft 10 penetrates through the equipment box 3, and a motor shaft of the second motor 16 is coaxially and fixedly connected with one end of the crushing shaft 10 at the front end through a coupling; a driving gear 18 is fixedly sleeved on the shaft body of the crushing shaft 10 positioned at the front end in the equipment box 3, a driven gear 19 is fixedly sleeved on the shaft body of the crushing shaft 10 positioned at the rear end in the equipment box 3, and the driving gear 18 is in meshing transmission with the driven gear 19; the left and right sides of the T-shaped crushing blocks and the crushing lugs in the crushing assembly are arranged in a staggered mode, so that the crushing quality of the graphite wafer during crushing is effectively improved, the graphite wafer is conveniently crushed into particles with uniform particles, and the decomposition of decomposition liquid for the graphite wafer is accelerated.
In the invention, the disturbing component comprises a first vertical rod 20, disturbing flow rods 22 and a spoiler 23, the first vertical rod 20 is vertically and fixedly arranged at the upper part of the pipe body of each second sleeve pipe 13, the disturbing flow rods 22 which are obliquely arranged downwards are transversely and fixedly arranged at equal intervals at two sides of the pipe body of each second vertical rod 20, and the spoiler 23 is vertically and fixedly arranged between the disturbing flow rods 22 at two sides of each first vertical rod 20; the stirring assembly comprises second vertical rods 21, V-shaped stirring rods 24 and stirring teeth 25, the bottom of the pipe body of each second sleeve pipe 13 is vertically and fixedly provided with the second vertical rods 21, the two sides of the pipe body of each second vertical rod 21 are horizontally and highly fixedly provided with the V-shaped stirring rods 24 with outward openings at equal intervals, and the bottom and the top in the openings of each V-shaped stirring rod 24 are vertically and equally provided with the stirring teeth 25; the crushed graphite wafer and the decomposition liquid are mixed and stirred through the turbulence plate and the stirring assembly, the disturbance on the decomposition liquid is effectively increased through the turbulence plate and the turbulence rod, and the decomposition liquid is convenient to mix and dissolve particles of the graphite wafer; through V type puddler and stirring tooth, effectively improved the mixing efficiency to decomposition liquid and graphite particle, avoided taking place the phenomenon of conglobation when graphite wafer particle dissolves, effectively improved the work efficiency that graphite wafer dissolved.
In the invention, the bottom end of each second vertical rod 21 is vertically and fixedly provided with a connecting rod 26, and the bottom end of each connecting rod 26 is horizontally and fixedly provided with a brush 27; a first filter screen 28 is horizontally and fixedly arranged in the middle of each feed hopper 8, rectangular screening openings are respectively formed in two sides of the middle of the top surface of the partition plate 9, and a second filter screen 29 is horizontally and fixedly arranged in each screening opening; a rectangular opening is formed below the front end face of the dissolving tank 2, an observation window 30 is fixedly arranged in the rectangular opening, and liquid level scale marks are vertically arranged on the front end face of the dissolving tank 2 on one side of the observation window 30; the brush 27 is convenient for cleaning the sediment on the inner bottom surface of the dissolving tank 1 and preventing the sediment from being stuck on the inner bottom surface of the dissolving tank 1.
Example 2: referring to fig. 6, in this embodiment, the present invention further provides a method for using a melting apparatus for facilitating semiconductor graphite wafer processing, including the following steps:
firstly, a first motor 7 and a second motor 16 are respectively and electrically connected with a storage battery 17 through leads, decomposing liquid is injected into a dissolving box 2 through a liquid inlet pipe 4, and then a blocky graphite wafer to be melted is placed into the dissolving box 2 through a feed hopper 8;
step two, the second motor 16 is controlled to drive the crushing shaft 10 at the front end to rotate, the driving gear 18 is driven to rotate through the rotation of the crushing shaft 10 at the front end, the crushing shaft 10 at the rear end of the crushing cavity is driven to rotate through the meshing transmission of the driving gear 18 and the driven gear 19, and the crushing assemblies on each first sleeve are driven to crush graphite wafers through the rotation of the two crushing shafts 10;
step three, filtering larger particles of the crushed graphite wafer by a second filter screen 29, then dropping the particles into a melting cavity, controlling a first motor 7 to drive a stirring shaft 12 to rotate, and driving a turbulence component and a stirring component of each second sleeve 13 to mix and stir the crushed graphite wafer and the decomposition liquid by the rotation of the stirring shaft 12;
dissolving the graphite wafer by the stirred and mixed decomposition liquid, observing the state of the graphite wafer dissolved on the inner wall through the observation window 30 until the graphite wafer is completely dissolved, and discharging the mixed liquid in the dissolving tank 1 through the liquid outlet pipe 5;
and step five, cutting off the power supply after the dissolution is finished.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims (7)

1. Melt device convenient to processing of semiconductor graphite wafer, including base (1), its characterized in that: the base (1) is in a horizontally arranged rectangular plate shape, a rectangular dissolving box (2) is fixedly arranged in the middle of the top surface of the base (1), a rectangular equipment box (3) is fixedly arranged at the top of one side of the dissolving box (2), and a driving assembly is fixedly arranged in the equipment box (3); a liquid inlet pipe (4) is transversely and fixedly arranged in the middle of one side of the dissolving box (2); a liquid outlet pipe (5) is transversely and fixedly arranged at the bottom of the other side of the dissolving box (2), a rectangular motor box (6) is fixedly arranged on a box body on the other side of the dissolving box (2) above the liquid outlet pipe (5), a first motor (7) is transversely and fixedly arranged in the motor box (6), open-mouth feed hoppers (8) are vertically arranged on two sides of the middle of the top surface of the dissolving box (2), a partition plate (9) is horizontally and fixedly arranged at the upper part in the dissolving box (2), and the dissolving box (2) is divided into a crushing cavity and a melting cavity through the partition plate (9);
the front end and the rear end of the middle part of the inner walls of the two sides of the crushing cavity are respectively fixedly provided with a first bearing, two crushing shafts (10) are transversely arranged in the crushing cavity in parallel, and the two ends of each crushing shaft (10) are fixedly connected in the inner ring of the first bearing; a plurality of first sleeves (11) are fixedly sleeved on the shaft body of each crushing shaft (10) at equal intervals, and crushing assemblies are fixedly arranged on the peripheral sides of the surfaces of the first sleeves (11); melt the both sides of chamber inner wall the middle part all fixed second bearing that is equipped with melt intracavity and transversely be equipped with (mixing) shaft (12) the fixed cover of equidistance is equipped with second sleeve pipe (13) on the axis body of (mixing) shaft (12), every the body upper portion and the lower part of second sleeve pipe (13) are fixed disturbance subassembly and the stirring subassembly of being equipped with respectively, the one end of (mixing) shaft (12) is run through in motor case (6) to the coaxial rigid coupling of motor shaft through shaft coupling and first motor (7).
2. The thawing apparatus for facilitating semiconductor graphite wafer processing according to claim 1, wherein: the crushing assembly comprises T-shaped crushing blocks (14) and crushing lugs (15), the periphery of the surface of each first sleeve (11) is fixedly provided with the T-shaped crushing blocks (14), the middle and two sides of the top surface of each T-shaped crushing block (14) are respectively provided with a rectangular crushing groove and a rectangular crushing groove, the inner walls of the front end and the rear end of the crushing cavity are respectively fixedly provided with the crushing lugs (15), and the protruding parts of each crushing lug (15) extend into the crushing grooves and the crushing grooves; the T-shaped crushing blocks (14) on the crushing shaft (10) at the rear end of the crushing cavity and the T-shaped crushing blocks (14) on the crushing shaft (10) at the front end of the crushing cavity are arranged in a left-right staggered mode.
3. The thawing apparatus for facilitating semiconductor graphite wafer processing according to claim 2, wherein: the driving assembly comprises a second motor (16), a storage battery (17), a driving gear (18) and a driven gear (19), the second motor (16) is transversely and fixedly arranged at the front end in the equipment box (3), the storage battery (17) is fixedly arranged at the rear end in the equipment box (3), one end of each crushing shaft (10) penetrates through the equipment box (3), and a motor shaft of the second motor (16) is coaxially and fixedly connected with one end of the crushing shaft (10) positioned at the front end through a coupler; a driving gear (18) is fixedly sleeved on a crushing shaft body (10) positioned at the front end in the equipment box (3), a driven gear (19) is fixedly sleeved on the crushing shaft body (10) positioned at the rear end in the equipment box (3), and the driving gear (18) is in meshing transmission with the driven gear (19).
4. The thawing apparatus for facilitating semiconductor graphite wafer processing according to claim 1, wherein: the disturbance subassembly includes first montant (20), spoiler (22) and spoiler (23), every the equal vertical fixation in body upper portion of second sleeve pipe (13) is equipped with first montant (20), every the equal range horizontal fixed spoiler (22) that are equipped with the slope down setting in body of rod both sides of second montant (20), every equal vertical fixation is equipped with spoiler (23) between spoiler (22) of first montant (20) both sides.
5. The thawing apparatus for facilitating semiconductor graphite wafer processing according to claim 1, wherein: stirring subassembly includes second montant (21), V type puddler (24) and stirring tooth (25), every the equal vertical fixed second montant (21) that are equipped with in body of rod bottom of second sleeve pipe (13), every the horizontal high fixed V type puddler (24) that are equipped with the opening outside in the body of rod both sides of second montant (21) the impartial distance in bottom and the top in V type puddler (24) opening is vertical to be equipped with stirring tooth (25).
6. The thawing apparatus for facilitating semiconductor graphite wafer processing according to claim 5, wherein: the bottom end of each second vertical rod (21) is vertically and fixedly provided with a connecting rod (26), and the bottom end of each connecting rod (26) is horizontally and fixedly provided with a brush (27); a first filter screen (28) is horizontally and fixedly arranged in the middle of each feed hopper (8), rectangular screening openings are formed in two sides of the middle of the top surface of the partition plate (9), and a second filter screen (29) is horizontally and fixedly arranged in each screening opening; the lower part of the front end face of the dissolving tank (2) is provided with a rectangular opening, an observation window (30) is fixedly arranged in the rectangular opening, and liquid level scale marks are vertically arranged on the front end face of the dissolving tank (2) on one side of the observation window (30).
7. Use of a thawing apparatus for facilitating semiconductor graphite wafer processing according to any of claims 1 to 6, characterized by comprising the steps of:
firstly, a first motor (7) and a second motor (16) are respectively and electrically connected with a storage battery (17) through leads, decomposing liquid is injected into a dissolving box (2) through a liquid inlet pipe (4), and then a blocky graphite wafer to be melted is placed into the dissolving box (2) through a feed hopper (8);
secondly, a second motor (16) is controlled to drive a crushing shaft (10) at the front end to rotate, a driving gear (18) is driven to rotate through the rotation of the crushing shaft (10) at the front end, the crushing shaft (10) at the rear end of a crushing cavity is driven to rotate through the meshing transmission of the driving gear (18) and a driven gear (19), and the crushing assemblies on each first sleeve are driven to crush graphite wafers through the rotation of the two crushing shafts (10);
thirdly, filtering larger particles of the crushed graphite wafer by a second filter screen (29), then dropping the particles into a melting cavity, controlling a first motor (7) to drive a stirring shaft (12) to rotate, and driving a turbulence component and a stirring component of each second sleeve (13) to mix and stir the crushed graphite wafer and the decomposition liquid by the rotation of the stirring shaft (12);
dissolving the graphite wafer by the stirred and mixed decomposition liquid, observing the dissolving state of the graphite wafer on the inner wall through an observation window (30), and discharging the mixed liquid in the dissolving box (1) through a liquid outlet pipe (5) until the graphite wafer is completely dissolved;
and step five, cutting off the power supply after the dissolution is finished.
CN202010652052.2A 2020-07-08 2020-07-08 Melting device convenient for processing semiconductor graphite wafer and use method thereof Pending CN111974233A (en)

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CN202010652052.2A CN111974233A (en) 2020-07-08 2020-07-08 Melting device convenient for processing semiconductor graphite wafer and use method thereof

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CN202010652052.2A CN111974233A (en) 2020-07-08 2020-07-08 Melting device convenient for processing semiconductor graphite wafer and use method thereof

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CN107455474A (en) * 2017-08-03 2017-12-12 芜湖泰庆电子科技有限公司 A kind of soya bean grinding and filtering integral device
CN108097075A (en) * 2017-12-28 2018-06-01 郑州赫恩电子信息技术有限公司 A kind of chemical material dissolver with crushing function
CN108499389A (en) * 2018-05-11 2018-09-07 大同新成新材料股份有限公司 A kind of brush production powder uniform mixing equipment and mixed method
CN208727626U (en) * 2018-06-01 2019-04-12 江苏建筑职业技术学院 A kind of novel pulverising mill sizing device recycled for stalk
CN210121473U (en) * 2019-04-29 2020-03-03 南京恒旺生物医药有限公司 Preparation device for 3, 3-ethyl dimethacrylate
CN210674852U (en) * 2019-07-18 2020-06-05 何应军 Clinical medicine solid reagent dissolving device
CN210699758U (en) * 2019-09-04 2020-06-09 天津市深成科技发展有限公司 Crushing and dissolving device based on waste paper recycling

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101200806B1 (en) * 2012-05-18 2012-11-13 주식회사 자동기 The Calcium Chloride Dissolution Manufacture and Supply System for Snow Removal
CN107455474A (en) * 2017-08-03 2017-12-12 芜湖泰庆电子科技有限公司 A kind of soya bean grinding and filtering integral device
CN108097075A (en) * 2017-12-28 2018-06-01 郑州赫恩电子信息技术有限公司 A kind of chemical material dissolver with crushing function
CN108499389A (en) * 2018-05-11 2018-09-07 大同新成新材料股份有限公司 A kind of brush production powder uniform mixing equipment and mixed method
CN208727626U (en) * 2018-06-01 2019-04-12 江苏建筑职业技术学院 A kind of novel pulverising mill sizing device recycled for stalk
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