CN111948918A - Method and device for adjusting illumination light spots of laser direct writing lens - Google Patents
Method and device for adjusting illumination light spots of laser direct writing lens Download PDFInfo
- Publication number
- CN111948918A CN111948918A CN202010912362.3A CN202010912362A CN111948918A CN 111948918 A CN111948918 A CN 111948918A CN 202010912362 A CN202010912362 A CN 202010912362A CN 111948918 A CN111948918 A CN 111948918A
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- Prior art keywords
- fixed
- reflector
- adjusting
- mounting
- square groove
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70066—Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
Abstract
The invention discloses a method and a device for adjusting an illumination spot of a laser direct writing lens, and the device comprises a fixing piece, wherein an illumination system is fixedly arranged on the side wall of an inner cavity of a square groove, a second adjusting reflector is fixedly assembled in the square groove through a second lens base, a connecting assembly is fixedly assembled between the bottom of the second lens base and the square groove, and an adjusting mechanism penetrating through the fixing piece is assembled on the side wall of the second lens base. The first fixed reflector is assembled and installed in the square groove through the first mirror seat, the second adjusting reflector is assembled through the second mirror seat, the illuminating light beam irradiates the second adjusting reflector after deflecting a certain angle through the first fixed reflector, and then the angle of the second adjusting reflector is adjusted, so that the illuminating light beam uniformly irradiates an effective working area of the DMD device, and the problem of inconvenience in operation after replacing the DMD device or when the illuminating light spot on the DMD device needs to be finely adjusted is solved.
Description
Technical Field
The invention relates to the technical field of laser direct writing exposure machines, in particular to a method and a device for adjusting an illumination spot of a laser direct writing lens.
Background
In the field of laser direct-writing exposure machines, especially in the application of printed circuit board making and screen printing making, in order to increase the capacity of the equipment, the long side of a digital micromirror device DMD is generally used as the scanning width direction, in order to further improve the capacity, the equipment needs to be provided with multiple paths of laser direct-writing lenses, the laser direct-writing lenses are arranged into one line or two lines, and a space for people to get in and out and install and debug needs to be reserved inside the equipment. Among the prior art, the illumination light beam directly incides a facula adjustment speculum after lighting system outgoing, through the angle of adjustment facula adjustment speculum, make the illumination facula cover the effective area of DMD device completely, after multichannel camera lens is densely arranged into one or two, the camera lens interval is very narrow and small, still need install the camera lens fixed plate with the camera lens rear relative of debugging maintainer, articles such as tow chain, make the adjustment space at rear also very narrow and small, like this after changing the DMD device or when needing to finely tune the illumination facula on the DMD device, because of the space is narrow and small, the operation will be very inconvenient, still need to follow the camera off the camera from time to time, then adjust, waste time and energy.
Disclosure of Invention
The present invention is directed to a method and an apparatus for adjusting an illumination spot of a laser direct writing lens, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a method and a device for adjusting the illumination spot of a laser direct writing lens,
s1, arranging a first fixed reflector and a second adjustable reflector;
s2, the illumination light beam is deflected by the first fixed reflector and irradiated onto the second adjusting reflector;
and S3, the angle of the second adjusting reflector is adjusted to make the illumination light beam uniformly irradiate the effective working area of the DMD device.
Preferably, the projection size of the illumination beam is larger than the effective working area of the DMD device, so that the illumination beam completely covers the effective area of the DMD device.
Preferably, the top of mounting is through the fixed DMD device that is equipped with of fixed subassembly, the bottom of mounting is equipped with imaging lens, the square groove has been seted up to the inner chamber of mounting, the inner chamber of square groove is through the fixed first fixed speculum that is equipped with of first microscope base, the inner chamber lateral wall fixed mounting of square groove has the illumination system, the square inslot is through the fixed second adjustment speculum that is equipped with of second microscope base, be equipped with adjustment mechanism between the bottom of second microscope base and the back lateral wall of square groove.
Preferably, the fixed subassembly is including assembling the fixed plate at DMD device top, the top spiro union of fixed plate has the fixing bolt who runs through to the mounting in, the joint has the rubber pad between fixed plate and the mounting.
Preferably, adjustment mechanism includes the axis of rotation of fixed mounting at second microscope base lateral wall, the axis of rotation rotates the rear side wall of connecting in the square groove, the installation cavity has been seted up to the inner chamber of axis of rotation, the lateral wall of installation cavity is pegged graft and is had the pulling rod, the open slot has been seted up to the upper and lower lateral wall symmetry of installation cavity, there is the locating pin pulling rod's medial extremity through mounting panel fixed mounting, the locating pin is pegged graft to the constant head tank in, the lateral wall at the mounting is seted up to the constant head tank, fixed being equipped with the spring between mounting panel and.
Preferably, the first fixed reflector is a triangular prism or a plane reflector, and the second adjustable reflector is a plane reflector.
Compared with the prior art, the invention has the beneficial effects that: a method and a device for adjusting an illumination spot of a laser direct writing lens are characterized in that a square groove is formed in a fixing piece, a first fixed reflector is assembled and installed in the square groove through a first lens base, a second adjustable reflector is assembled through a second lens base, an illumination light beam passes through the first fixed reflector and irradiates on the second adjustable reflector after deflecting by a certain angle, and then the angle of the second adjustable reflector is adjusted, so that the illumination light beam uniformly irradiates on an effective working area of a DMD device, and the problem of inconvenience in operation after the DMD device is replaced or when the illumination spot on the DMD device needs to be finely adjusted is solved.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a front cross-sectional view of the present invention.
Fig. 3 is a partial side view of the present invention.
In the figure: 1. the optical lens module comprises a fixing piece, 2, a fixing component, 21, a fixing plate, 22, a fixing bolt, 23, a rubber pad, 3, a DMD device, 4, an imaging lens, 5, a square groove, 6, a first lens seat, 7, a first fixing reflector, 8, an illumination system, 9, a second lens seat, 10, a second adjusting reflector, 11, an adjusting mechanism, 111, a rotating shaft, 112, an installation cavity, 113, a pulling rod, 114, an open groove, 115, an installation plate, 116, a positioning pin, 117, a positioning groove, 118 and a spring.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
The invention provides a technical scheme that: a method for adjusting the illumination spot of a laser direct writing lens,
s1, arranging a first fixed reflector and a second adjustable reflector, wherein the first fixed reflector and the second adjustable reflector are both assembled in a square groove, and the angle of the second adjustable reflector can be adjusted;
s2, the illumination light beam is deflected by the first fixed reflector and irradiated onto the second adjusting reflector;
and S3, the angle of the second adjusting reflector is adjusted to make the illumination beam uniformly irradiate the effective working area of the DMD device, and the illumination beam is incident from the IN angle direction on the DMD device IN a spatial solid angle. The shape of its projection on the DMD device is an irregular quadrilateral.
The projection size of the illumination beam is larger than the effective working area of the DMD device, so that the illumination beam completely covers the effective area of the DMD device.
Example two
Referring to fig. 1, fig. 2 and fig. 3, the present invention provides a technical solution: the utility model provides an adjusting device of camera lens illumination facula is directly write to laser, including mounting 1, the top of mounting 1 is equipped with DMD device 3 through fixed subassembly 2 is fixed, fixed subassembly 2 is including assembling in the fixed plate 21 at 3 tops of DMD device, the top spiro union of fixed plate 21 has the fixing bolt 22 that runs through to mounting 1 in, the joint has rubber pad 23 between fixed plate 21 and the mounting 1, assemble DMD device 3 through fixing bolt 22 and fixing plate 21's cooperation, DMD device 3 is the digital micromirror device, guarantee the fixed stability of fixed plate 21 and fixing bolt 22 through setting up rubber pad 23.
The bottom of the fixed part 1 is provided with an imaging lens 4, the inner cavity of the fixed part 1 is provided with a square groove 5, the inner cavity of the square groove 5 is fixedly provided with a first fixed reflector 7 through a first lens base 6, the first lens base 6 is positioned on the rear side wall of the square groove 5, the position of the first fixed reflector 7 is fixed through the first lens base 6, the inner cavity side wall of the square groove 5 is fixedly provided with an illumination system 8, the illumination system 8 is connected with an external laser light source, after the laser light source is started, light is subjected to dodging and shaping through the illumination system 8 and emits illumination light beams to the first fixed reflector 7, the first fixed reflector 7 reflects the illumination light beams to a second adjusting reflector 10, the square groove 5 is fixedly provided with a second adjusting reflector 10 through a second lens base 9, the angle of the second lens base 9 is adjusted through an adjusting mechanism 11, so as to adjust the light beams reflected by the second adjusting reflector 10, so that the illumination beam is uniformly irradiated onto the DMD device 3, the first fixed mirror 7 is a triangular prism or a plane mirror, and the second adjusting mirror 10 is a plane mirror.
The adjusting mechanism 11 comprises a rotating shaft 111 fixedly installed on the side wall of the second lens holder 9, the rotating shaft 111 is rotatably connected to the rear side wall of the square groove 5, an installation cavity 112 is formed in the inner cavity of the rotating shaft 111, a pulling rod 113 is inserted into the side wall of the installation cavity 112, open grooves 114 are symmetrically formed in the upper side wall and the lower side wall of the installation cavity 112, a positioning pin 116 is fixedly installed at the inner side end of the pulling rod 113 through an installation plate 115, the positioning pin 116 is inserted into a positioning groove 117, the positioning groove 117 is formed in the side wall of the fixing member 1, a spring 118 is fixedly installed between the installation plate 115 and the installation cavity 112, the spring 118 generates elastic force on the installation plate 115, the positioning pin 116 is inserted into the positioning groove 117, so that the rotating angle of the second lens holder 9 is limited, the positioning grooves 117 are circumferentially and uniformly distributed on the rear side wall of the fixing member 1, the adjusting mechanism 11 and the lighting system 8 are both located on the rear side wall of the fixing member 1, so that the adjustment of the second lens base 9 is more convenient.
The working principle is as follows: the device is assembled in the using process, when the DMD device 3 is replaced or adjusted, and the irradiation position of a light beam needs to be adjusted again, after a laser light source is started, light is subjected to light homogenizing and shaping through an illumination system 8, the illumination light beam is emitted to a first fixed reflector 7, the first fixed reflector 7 reflects the illumination light beam to a second adjusting reflector 10, a pulling rod 113 is pulled outwards to enable a positioning pin 116 to move out of a positioning groove 117, then a second lens base 9 is rotated through a rotating shaft 111, angle adjustment is carried out on the second lens base 9, the illumination light beam is uniformly irradiated onto the DMD device, after adjustment is completed, the pulling rod 113 is loosened to enable the positioning pin 116 to be inserted into the positioning groove 117, the position of the second lens base 9 is fixed, and operation is simple and convenient.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. A method for adjusting an illumination spot of a laser direct writing lens is characterized by comprising the following steps:
s1, arranging a first fixed reflector and a second adjustable reflector;
s2, the illumination light beam is deflected by the first fixed reflector and irradiated onto the second adjusting reflector;
and S3, the angle of the second adjusting reflector is adjusted to make the illumination light beam uniformly irradiate the effective working area of the DMD device.
2. The method for adjusting the illumination spot of the laser direct writing lens according to claim 1, wherein: the projection size of the illumination light beam is larger than the effective working area of the DMD device, so that the illumination light beam completely covers the effective area of the DMD device.
3. The utility model provides an adjusting device of laser direct writing camera lens illumination facula, includes mounting (1), its characterized in that: the top of mounting (1) is fixed through fixed subassembly (2) and is equipped with DMD device (3), the bottom of mounting (1) is equipped with imaging lens (4), square groove (5) have been seted up to the inner chamber of mounting (1), the inner chamber of square groove (5) is fixed through first mirror seat (6) and is equipped with first fixed speculum (7), the inner chamber lateral wall fixed mounting of square groove (5) has illumination system (8), be equipped with second adjustment speculum (10) through second mirror seat (9) is fixed in square groove (5), be equipped with adjustment mechanism (11) between the bottom of second mirror seat (9) and the back side wall of square groove (5).
4. The device for adjusting the illumination spot of the laser direct writing lens according to claim 3, wherein: fixed subassembly (2) including assembling fixed plate (21) at DMD device (3) top, the top spiro union of fixed plate (21) has fixing bolt (22) of running through to mounting (1) in, the joint has rubber pad (23) between fixed plate (21) and mounting (1).
5. The device for adjusting the illumination spot of the laser direct writing lens according to claim 3, wherein: adjustment mechanism (11) are including axis of rotation (111) of fixed mounting at second mirror seat (9) lateral wall, axis of rotation (111) are rotated and are connected in the back lateral wall of square groove (5), installation cavity (112) have been seted up to the inner chamber of axis of rotation (111), the lateral wall of installation cavity (112) is pegged graft and is had pull rod (113), open slot (114) have been seted up to the upper and lower lateral wall symmetry of installation cavity (112), the medial extremity of pull rod (113) has locating pin (116) through mounting panel (115) fixed mounting, locating pin (116) are pegged graft to constant head tank (117) in, the lateral wall at mounting (1) is seted up in constant head tank (117), fixed assembly has spring (118) between mounting panel (115) and installation cavity (112).
6. The device for adjusting the illumination spot of the laser direct writing lens according to claim 3, wherein: the first fixed reflector (7) is a triangular prism or a plane reflector, and the second adjustable reflector (10) is a plane reflector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010912362.3A CN111948918A (en) | 2020-09-02 | 2020-09-02 | Method and device for adjusting illumination light spots of laser direct writing lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010912362.3A CN111948918A (en) | 2020-09-02 | 2020-09-02 | Method and device for adjusting illumination light spots of laser direct writing lens |
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| Publication Number | Publication Date |
|---|---|
| CN111948918A true CN111948918A (en) | 2020-11-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010912362.3A Pending CN111948918A (en) | 2020-09-02 | 2020-09-02 | Method and device for adjusting illumination light spots of laser direct writing lens |
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Citations (6)
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| CN108543151A (en) * | 2018-06-07 | 2018-09-18 | 朱海燕 | A kind of power liquid feed device for portable intravenous injection and transfusion system |
| CN208011202U (en) * | 2018-01-15 | 2018-10-26 | 浙江斯钽博天和电气制造有限公司 | A kind of pedestal for household electrical appliance |
| CN208221934U (en) * | 2018-04-12 | 2018-12-11 | 广州康行信息技术有限公司 | A kind of recognition of face intelligent authentication integrated management equipment |
| CN208658169U (en) * | 2018-05-03 | 2019-03-29 | 烟台工程职业技术学院 | A kind of teaching of ideology and politics is with explaining and publicising platform |
| CN110515277A (en) * | 2019-08-16 | 2019-11-29 | 俞庆平 | A kind of module of optical system suitable for laser direct-writing exposure sources |
| CN209729188U (en) * | 2019-02-21 | 2019-12-03 | 魏天欣 | A kind of mathematical model displaying device convenient for rotation |
-
2020
- 2020-09-02 CN CN202010912362.3A patent/CN111948918A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN208011202U (en) * | 2018-01-15 | 2018-10-26 | 浙江斯钽博天和电气制造有限公司 | A kind of pedestal for household electrical appliance |
| CN208221934U (en) * | 2018-04-12 | 2018-12-11 | 广州康行信息技术有限公司 | A kind of recognition of face intelligent authentication integrated management equipment |
| CN208658169U (en) * | 2018-05-03 | 2019-03-29 | 烟台工程职业技术学院 | A kind of teaching of ideology and politics is with explaining and publicising platform |
| CN108543151A (en) * | 2018-06-07 | 2018-09-18 | 朱海燕 | A kind of power liquid feed device for portable intravenous injection and transfusion system |
| CN209729188U (en) * | 2019-02-21 | 2019-12-03 | 魏天欣 | A kind of mathematical model displaying device convenient for rotation |
| CN110515277A (en) * | 2019-08-16 | 2019-11-29 | 俞庆平 | A kind of module of optical system suitable for laser direct-writing exposure sources |
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