CN110515277B - Optical system component suitable for laser direct-writing exposure equipment - Google Patents
Optical system component suitable for laser direct-writing exposure equipment Download PDFInfo
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- CN110515277B CN110515277B CN201910760237.2A CN201910760237A CN110515277B CN 110515277 B CN110515277 B CN 110515277B CN 201910760237 A CN201910760237 A CN 201910760237A CN 110515277 B CN110515277 B CN 110515277B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 36
- 230000001154 acute effect Effects 0.000 claims abstract description 3
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000006978 adaptation Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
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-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Lens Barrels (AREA)
Abstract
The invention relates to an optical system component suitable for laser direct writing exposure equipment, which comprises an illumination component, wherein the illumination component comprises a light bar adjusting piece, a first multiplying power adjusting piece, a light spot adjusting component and a first reflector component which are sequentially connected in sequence, the light bar adjusting piece comprises a shell, a light bar and a fixing mechanism for fixing the light bar are arranged in the shell, the light spot adjusting component comprises a lens base, and a plurality of clamping grooves for mounting lenses are arranged in the lens base; the first reflector component comprises a mounting seat, a fixing support used for fixing the first reflector is arranged in the mounting seat, a reflection outlet is formed in the side face of the mounting seat, the fixing support is obliquely arranged in the mounting seat and forms an acute angle with the bottom of the mounting seat, and therefore light reflected by the first reflector can be emitted through the reflection outlet. The invention simplifies the structure of the original optical system component, simplifies the component structure, reduces the production cost, and has compact structure and convenient assembly and debugging.
Description
Technical Field
The invention relates to the technical field of optical systems, in particular to an optical system component suitable for laser direct-writing exposure equipment.
Background
With the development of digital direct write exposure apparatuses in recent years, there is a new demand for optical systems: modularization, miniaturization, high optical utilization rate, low cost and the like. Most of optical systems of digital direct-writing exposure equipment in recent years are integrated with overall equipment, integral assembly and debugging are needed, the systems are too heavy, the assembly and debugging are complex, optical lenses are too large, and the processing cost is high.
Disclosure of Invention
The invention aims to provide an optical system component suitable for laser direct-writing exposure equipment, which has the advantages of simple structure, low cost, compact structure and convenience in assembly and debugging.
In order to achieve the purpose, the invention adopts the following technical scheme:
an optical system component suitable for laser direct writing exposure equipment comprises an illumination component, wherein the illumination component comprises a light bar adjusting piece, a first multiplying power adjusting piece, a light spot adjusting component and a first reflector component which are sequentially connected, the light bar adjusting piece comprises a shell, a light bar and a fixing mechanism for fixing the light bar are arranged in the shell, the light spot adjusting component comprises a lens base, and a plurality of clamping grooves for mounting lenses are arranged in the lens base; first speculum subassembly includes the mount pad, be equipped with the fixed bolster that is used for fixed first speculum in the mount pad, the side of mount pad is equipped with the reflection export, the fixed bolster slope is located in the mount pad and for the acute angle with the contained angle that the bottom of mount pad formed to make the light that first speculum reflected can jet out through reflecting the export.
As a further improvement of the above technical solution:
the casing is the cylinder, fixed establishment includes the mounting, the external diameter of mounting with the internal diameter size looks adaptation of casing, be equipped with in the middle part of mounting with the trompil of optical wand size looks adaptation, the optical wand passes through the trompil to be installed in the inner chamber of casing, the optical wand with clearance between the casing passes through the clamping piece and fixes.
The clamping piece is cylindrical, and the aperture of the clamping piece is matched with the size of the cross section of the optical rod; the fixing piece and the shell are correspondingly provided with first screw holes, and the light bar penetrates through the first screw holes through a screw rod to be tightly pressed in the shell.
The clamping device comprises a shell, at least two fixing pieces and clamping pieces, wherein the fixing pieces are arranged at the end part and the middle part of the shell respectively, the clamping pieces are arranged between the two fixing pieces and on the outer sides of the two fixing pieces, a rubber pad is arranged on the inner side of the connecting end of the shell, and the fixing pieces and the clamping pieces are tightly pressed and fixed in the shell through the rubber.
The first multiplying power adjusting piece comprises a first connecting part and a second connecting part, the first connecting part is in threaded connection with the microscope base, and the second connecting part is in threaded connection with the shell;
a first locking ring is arranged at the joint of the first connecting part and the microscope base, and the first locking ring is installed on the first connecting part through threads; the junction of second connecting portion and casing still is equipped with the second locking circle, the second locking circle leads to the screw thread to be installed on the casing.
The lens base is cylindrical, and a flange is arranged on the outer side of the lens base and close to the middle of the lens base; the mount pad includes stiff end and installation department, the stiff end be equipped with the mounting hole of mirror base tip size looks adaptation, the tip of mirror base is installed just can in the mounting hole rotatory in the mounting hole, the mirror base is fixed through the clamp ring with the junction of stiff end.
The imaging assembly comprises a DMD assembly, a second reflector assembly, a lens assembly and a second magnification adjusting assembly, wherein the DMD assembly is installed at the upper end of the second reflector assembly, one end of the lens assembly is connected with the second reflector assembly, and the other end of the lens assembly is connected with the second magnification adjusting assembly through a flange;
the second mirror subassembly includes the adapter, be equipped with the linking bridge that is used for installing the second mirror in the adapter, be equipped with on the adapter with the round hole that the linking bridge is relative, install the speculum angle on the linking bridge and pass through linking bridge and adjust to make the second mirror can receive the light of first speculum reflection through the round hole.
The lens assembly comprises a lens barrel, a lens groove used for installing a lens is formed in the lens barrel, one end of the lens barrel is fixedly connected with the adapter through a screw, and the other end of the lens barrel is connected with the second magnification adjusting assembly through a flange.
The second multiplying power adjusting assembly comprises a cylindrical shell, threads are arranged on the inner side of the shell, a lens is mounted at the end of the shell, one end of the flange is in threaded connection with the other end of the shell, and the other end of the flange is in threaded connection with the end of the lens barrel.
According to the technical scheme, the optical system component suitable for the laser direct-writing exposure equipment is simple in structure, convenient to detach and install and low in cost; the structure of the existing optical system component is simplified, the whole structure is more compact, modularization and modularization are realized, the optical system is integrated into a whole to form the component, and the optical system component has the advantages of compact structure, small size, convenience in assembly and debugging, equipment maintenance, low processing cost and the like.
Drawings
FIG. 1 is a schematic structural view of a lighting assembly of the present invention;
FIG. 2 is an exploded schematic view of the inventive lighting assembly;
FIG. 3 is a cross-sectional view of the inventive lighting assembly;
FIG. 4 is a schematic view of the construction of the fastening member of the present invention;
FIG. 5 is a schematic view of the structure of the optical wand of the present invention installed in cooperation with a fixture;
FIG. 6 is a cross-sectional view of the optical wand, the fixing member and the pressing member in accordance with the present invention;
FIG. 7 is a cross-sectional view of the light bar, the fixing member and the pressing member of the present invention installed in the housing;
FIG. 8 is a schematic structural view of an imaging assembly of the present invention;
FIG. 9 is a cross-sectional view of an imaging assembly of the present invention;
FIG. 10 is a cross-sectional view of the imaging assembly of the present invention without the DMD assembly and mirror mounted;
FIG. 11 is a schematic diagram of an illumination assembly of the present invention used in conjunction with an imaging assembly.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
as shown in fig. 1 and 2, the optical system component suitable for a laser direct writing exposure apparatus of the present embodiment includes an illumination component 1, the illumination component 1 includes a light rod adjusting member 11, a first magnification adjusting member 12, a light spot adjusting member 14, and a first reflector assembly 15, which are sequentially connected in sequence, the light rod adjusting member 11 includes a cylindrical housing 111, and a light rod 112 and a fixing mechanism for fixing the light rod 112 are disposed in the housing 111.
As shown in fig. 2 and 4, the fixing mechanism includes a fixing member 113, the fixing member 113 has a cylindrical shape, and the outer diameter of the fixing member 113 is matched with the inner diameter of the housing 111, so that the fixing member 113 can be installed in the housing 111. As shown in fig. 4, an opening 115 is provided in the middle of the fixing member 113, the size of the light bar 112 is adapted to the size of the light bar 112, the light bar 112 is installed in the inner cavity of the housing 111 through the opening 115, and the gap between the light bar 112 and the housing 111 is fixed by the clamping member 114.
The schematic diagram of the clamping member 114, the fixing member 113 and the optical wand 112, as shown in fig. 5-7, illustrates that the optical wand 112 has a square cross section, the clamping member 114 has a cylindrical shape, and the aperture of the clamping member 114 is matched with the cross section of the optical wand 112. The number of the fixing members 113 and the clamping members 114 is set according to the actual situation, preferably 2 in this embodiment, the fixing members 113 are respectively disposed at the lower end portion and the middle portion of the housing 111, the clamping members 114 are disposed between the two fixing members 113 and outside the fixing members 113, a rubber pad 117 is disposed inside the upper end of the housing 111, and the fixing members 113 and the clamping members 114 are pressed and fixed in the housing 111 through the rubber pad 117.
As shown in fig. 2 and 3, the first magnification adjustment element 12 of the present embodiment includes a first connection portion 121 and a second connection portion 122, the flare adjusting assembly 14 includes a cylindrical lens base 141, and a flange 143 is disposed at a position near the middle of the outer side of the lens base 141. A plurality of card slots 142 for mounting various lenses are arranged in the lens base 141, and the shapes and the number of the card slots 142 are set according to the actually set lens structure; the outer side of the first connecting portion 121 and the inner side of the lower end of the lens holder 141 are both provided with threads, the first connecting portion 121 is in threaded connection with the lower end of the lens holder 141, the inner side of the second connecting portion 122 and the outer side of the shell 111 are both provided with threads, and the second connecting portion 122 is in threaded connection with the shell 111.
The first mirror assembly 15 includes a mounting base 151, the mounting base 151 includes a fixing end 154 and a mounting portion 155, the fixing end 154 is provided with a mounting hole matched with the size of the upper end of the mirror base 141, the upper end of the mirror base 141 is mounted in the mounting hole and can rotate in the mounting hole, the mirror base 141 is connected with the fixing end 154 through the flange 143, and the joint of the mirror base 141 and the fixing end 154 is fixed through the pressing ring 16.
A fixing bracket 152 for fixing the first reflector is arranged in the mounting portion 155, a reflection outlet 153 is arranged on the side surface of the mounting base 151, a lens 155 is arranged in the reflection outlet 153, and the fixing bracket 152 is obliquely arranged in the mounting portion 155 and forms an included angle of 45 degrees with the bottom of the mounting portion 155, so that the light reflected by the first reflector 156 can be completely emitted through the reflection outlet 153. In order to simplify the structure of the first mirror assembly 15, in the present embodiment, the cross section of the mounting portion 155 is a right triangle having an included angle of 45 degrees, and the first mirror 156 is mounted on the inner inclined surface of the mounting portion 155.
A first locking ring 17 is arranged at the joint of the first connecting part 121 and the mirror base 141, the first locking ring 17 is installed on the first connecting part 121 through threads, a second locking ring 18 is also arranged at the joint of the second connecting part 122 and the shell 111, and the second locking ring 18 is installed on the shell 111 through threads.
As shown in fig. 8-10, still include the formation of image subassembly 2, the formation of image subassembly 2 includes DMD subassembly 21, second mirror subassembly 22, lens subassembly 23 and second multiplying power adjustment assembly 24, during the actual use, this DMD subassembly 21 passes through fixing device 26 and installs the upper end at second mirror subassembly 22, fixing device 26 of this embodiment includes heat dissipation assembly, concrete structure can set for according to actual conditions, the upper end and the second mirror subassembly 22 of lens subassembly 23 pass through bolted connection, the lower extreme of lens subassembly 23 passes through flange 25 and is connected with second multiplying power adjustment assembly 24.
Further, the lens assembly 23 includes a lens barrel 231, a lens groove 232 for installing lenses is provided in the lens barrel 231, the shape and number of the lens groove 232 are set according to the actually installed lenses, the upper end of the lens barrel 231 is fixedly connected to the adapter 221 through screws, and the lower end of the lens barrel 231 is connected to the flange 25 through screws. The second magnification adjustment assembly 24 includes a cylindrical housing 241, a screw thread is provided on the outer side of the upper end of the housing 241, a lens 245 is installed on the end of the housing 241, and a flange 25 is connected to the housing 241 by the screw thread.
As shown in fig. 10, the second reflector assembly 22 includes an adapter 221, a connecting bracket 223 for mounting the second reflector 225 is disposed in the adapter 221, a circular hole 224 opposite to the connecting bracket 223 is disposed on the adapter 221, and the angle of the reflector mounted on the connecting bracket 223 is adjusted by the connecting bracket 223, so that the second reflector can receive the light reflected by the first reflector 156 through the circular hole 224.
As shown in fig. 11, the cross section of the connecting bracket 223 of this embodiment is a right triangle, and includes a bottom surface, a right-angle surface and an inclined surface, the inclined surface is used for installing the second reflector 225, the right-angle surface is installed in the adapter 221 through the bolt 22, a plurality of screw holes are further arranged on the side surface of the adapter 221, the screw holes are distributed on the edge of the right-angle surface, and the inclination adjustment of the inclined surface of the connecting bracket 223 is realized by adjusting the screws installed in the screw holes.
The working principle is as follows: laser emitted by the laser 3 is guided into the optical rod adjusting part 11 through an optical fiber, the optical rod adjusting part 11 converts an electric light source into a uniform surface light source, the surface light source adjusts the projection magnification through the first magnification adjusting part 12, then the direction is adjusted through the light spot adjusting component 14, and finally the light spot is reflected into the second reflector component 22 through the first reflector 156, the second reflector 225 in the second reflector component 22 projects the received light spot into the DMD component 21, the DMD component 21 reflects and projects the light spot into the lens barrel 231, and the light spot is finally imaged at a focal plane through various lenses in the lens barrel 231 and the second magnification adjusting component 24.
The above-mentioned embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solution of the present invention by those skilled in the art should fall within the protection scope defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (7)
1. An optical system component suitable for a laser direct-write exposure apparatus, characterized in that: the lens adjusting device comprises an illuminating assembly (1), wherein the illuminating assembly (1) comprises a light bar adjusting piece (11), a first multiplying power adjusting piece (12), a light spot adjusting assembly (14) and a first reflector assembly (15) which are sequentially connected in sequence, the light bar adjusting piece (11) comprises a shell (111), a light bar (112) and a fixing mechanism for fixing the light bar (112) are arranged in the shell (111), the light spot adjusting assembly (14) comprises a lens base (141), and a plurality of clamping grooves (142) for mounting lenses are arranged in the lens base (141); the first reflector assembly (15) comprises a mounting seat (151), a fixing support (152) for fixing the first reflector is arranged in the mounting seat (151), a reflection outlet (153) is arranged on the side surface of the mounting seat (151), the fixing support (152) is obliquely arranged in the mounting seat (151) and forms an acute angle with the bottom of the mounting seat (151), so that light rays reflected by the first reflector can be emitted out through the reflection outlet (153);
the shell (111) is cylindrical, the fixing mechanism comprises a fixing piece (113), the outer diameter of the fixing piece (113) is matched with the inner diameter of the shell (111), an opening (115) matched with the light bar (112) in size is arranged in the middle of the fixing piece (113), the light bar (112) is installed in the inner cavity of the shell (111) through the opening (115), and a gap between the light bar (112) and the shell (111) is fixed through a clamping piece (114);
the clamping piece (114) is cylindrical, and the aperture of the clamping piece (114) is matched with the size of the cross section of the optical rod (112); the fixing piece (113) and the shell (111) are correspondingly provided with first screw holes (116), and the light bar (112) penetrates through the first screw holes (116) through a screw rod to be pressed in the shell (111).
2. The optical system component suitable for a laser direct write exposure apparatus according to claim 1, characterized in that: the number of the fixing parts (113) is at least two, the fixing parts are respectively arranged at the end part and the middle part of the shell (111), the clamping parts (114) are arranged between the two fixing parts (113) and on the outer side of the two fixing parts, a rubber pad (117) is arranged on the inner side of the connecting end of the shell (111), and the fixing parts (113) and the clamping parts (114) are pressed and fixed in the shell (111) through the rubber pads (117).
3. The optical system component suitable for a laser direct write exposure apparatus according to claim 1, characterized in that: the first magnification adjusting piece (12) comprises a first connecting part (121) and a second connecting part (122), the first connecting part (121) is in threaded connection with the microscope base (141), and the second connecting part (122) is in threaded connection with the shell (111);
a first locking ring (17) is arranged at the joint of the first connecting part (121) and the microscope base (141), and the first locking ring (17) is installed on the first connecting part (121) through threads; the connecting part of the second connecting part (122) and the shell (111) is further provided with a second locking ring (18), and the second locking ring (18) is installed on the shell (111) through threads.
4. The optical system component suitable for a laser direct write exposure apparatus according to claim 1, characterized in that: the lens base (141) is cylindrical, and a flange (143) is arranged on the outer side of the lens base (141) and close to the middle of the lens base; mount pad (151) are including stiff end (154) and installation department (155), stiff end (154) be equipped with the mounting hole of mirror seat (141) tip size looks adaptation, the tip of mirror seat (141) is installed just can in the mounting hole rotatory in the mounting hole, mirror seat (141) are fixed through clamp ring (16) with the junction of stiff end (154).
5. The optical system component suitable for a laser direct write exposure apparatus according to claim 1, characterized in that: the imaging assembly (2) comprises a DMD assembly (21), a second reflector assembly (22), a lens assembly (23) and a second magnification adjusting assembly (24), the DMD assembly (21) is installed at the upper end of the second reflector assembly (22), one end of the lens assembly (23) is connected with the second reflector assembly (22), and the other end of the lens assembly (23) is connected with the second magnification adjusting assembly (24) through a flange (25);
the second reflector component (22) comprises an adapter (221), a connecting support (223) used for installing the second reflector is arranged in the adapter (221), a round hole (224) opposite to the connecting support (223) is formed in the adapter (221), and the angle of the reflector installed on the connecting support (223) is adjusted through the connecting support (223) so that the second reflector can receive light rays reflected by the first reflector through the round hole (224).
6. The optical system component suitable for a laser direct write exposure apparatus according to claim 5, characterized in that: the lens assembly (23) comprises a lens barrel (231), a lens groove (232) for mounting a lens is formed in the lens barrel (231), one end of the lens barrel (231) is fixedly connected with the adapter (221) through a screw, and the other end of the lens barrel (231) is connected with the second magnification adjusting assembly (24) through a flange (25).
7. The optical system component suitable for a laser direct write exposure apparatus according to claim 6, characterized in that: the second magnification adjustment assembly (24) comprises a cylindrical shell (241), threads are arranged on the inner side of the shell (241), a lens is mounted at the end of the shell (241), one end of the flange (25) is in threaded connection with the other end of the shell (241), and the other end of the flange (25) is in threaded connection with the end of the lens barrel (231).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910760237.2A CN110515277B (en) | 2019-08-16 | 2019-08-16 | Optical system component suitable for laser direct-writing exposure equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910760237.2A CN110515277B (en) | 2019-08-16 | 2019-08-16 | Optical system component suitable for laser direct-writing exposure equipment |
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| Publication Number | Publication Date |
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| CN110515277A CN110515277A (en) | 2019-11-29 |
| CN110515277B true CN110515277B (en) | 2021-07-09 |
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| CN201910760237.2A Active CN110515277B (en) | 2019-08-16 | 2019-08-16 | Optical system component suitable for laser direct-writing exposure equipment |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111458987B (en) * | 2020-04-26 | 2022-10-21 | 赫智科技(苏州)有限公司 | Mask-free photoetching device |
| CN111948918A (en) * | 2020-09-02 | 2020-11-17 | 苏州艾线光电科技有限公司 | Method and device for adjusting illumination light spots of laser direct writing lens |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06300973A (en) * | 1993-01-26 | 1994-10-28 | Silicon Valley Group Inc | Reducing optical system for reflection and refraction |
| CN202615015U (en) * | 2012-01-19 | 2012-12-19 | 昆山思拓机器有限公司 | Laser optical fiber probe, beam expander and reflector integrated installing structure |
| US9983482B2 (en) * | 2013-03-27 | 2018-05-29 | Asml Netherlands B.V. | Radiation collector, radiation source and lithographic apparatus |
| CN208953889U (en) * | 2018-11-15 | 2019-06-07 | 苏州源卓光电科技有限公司 | A kind of LED projection illumination photolithographic imaging system |
-
2019
- 2019-08-16 CN CN201910760237.2A patent/CN110515277B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06300973A (en) * | 1993-01-26 | 1994-10-28 | Silicon Valley Group Inc | Reducing optical system for reflection and refraction |
| CN202615015U (en) * | 2012-01-19 | 2012-12-19 | 昆山思拓机器有限公司 | Laser optical fiber probe, beam expander and reflector integrated installing structure |
| US9983482B2 (en) * | 2013-03-27 | 2018-05-29 | Asml Netherlands B.V. | Radiation collector, radiation source and lithographic apparatus |
| CN208953889U (en) * | 2018-11-15 | 2019-06-07 | 苏州源卓光电科技有限公司 | A kind of LED projection illumination photolithographic imaging system |
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| CN110515277A (en) | 2019-11-29 |
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Effective date of registration: 20240819 Address after: Building B1, Office 1626-2, Xiangyuan City Phase IV, No. 888 Wangjiang West Road, High tech Zone, Hefei City, Anhui Province, China 230088 Patentee after: Hefei Ruiyi Chuangzhi Technology Development Co.,Ltd. Country or region after: China Address before: 230000 Room 502, building 10, 1278 Lianhua Road, Shushan District, Hefei City, Anhui Province Patentee before: Yu Qingping Country or region before: China |