CN111947607A - Flatness measuring method, flatness measuring device, electronic equipment and storage medium - Google Patents
Flatness measuring method, flatness measuring device, electronic equipment and storage medium Download PDFInfo
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Abstract
The invention discloses a flatness measuring method, a flatness measuring device, electronic equipment and a storage medium, wherein the flatness measuring method comprises the following steps of; acquiring original flatness data, and processing the original flatness data to obtain a target array; acquiring target position information corresponding to each data in the target array; calculating a target correction matrix for the target position information to obtain a target correction value; and calculating to obtain the flatness according to the target correction value. By the flatness measuring method, the flatness can be automatically detected without other reference surfaces, and the measuring precision is high.
Description
Technical Field
The invention relates to the technical field of measurement and control, in particular to a flatness measuring method and device, electronic equipment and a storage medium.
Background
In order to meet the processing precision and process requirements of the processing and manufacturing industry, flatness measurement needs to be carried out on an object. The flatness refers to the deviation of the height of macro-concave-convex of the substrate relative to the ideal plane, and the flatness measurement refers to the variation of the measured actual surface to the ideal plane. The flatness measurement can be applied to the flatness measurement of the surface of the CPU, and can also be applied to the measurement of all planes such as other common planes, high-light-reflection planes and the like. The traditional flatness measuring methods include a surface method, a flat crystal method, a liquid level method, a light beam plane method, a level meter method and the like.
The traditional flatness measuring method needs manual operation, and the testing process is complicated, so that the obtained testing effect is poor, and the normal production and operation activities are seriously influenced.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the flatness measuring method provided by the invention can realize automatic flatness detection without other reference surfaces, and has the advantages of high measuring precision and strong reliability.
The invention also provides a flatness measuring device.
The invention further provides the flatness measurement electronic equipment.
The invention also provides a computer readable storage medium.
The flatness measuring method according to an embodiment of the first aspect of the invention includes:
acquiring original flatness data, and processing the original flatness data to obtain a target array;
acquiring target position information corresponding to each data in the target array;
calculating a target correction matrix for the target position information to obtain a target correction value;
and calculating to obtain the flatness according to the target correction value.
The flatness measuring method according to the embodiment of the first aspect of the invention has at least the following beneficial effects: the flatness detection method comprises the steps of firstly, obtaining original flatness data, processing the original flatness data to obtain a target array, then calculating a target correction matrix according to target position information corresponding to each datum in the target array to obtain a plurality of target correction values, and finally calculating the flatness according to the target correction values.
According to some embodiments of the invention, the calculating a target correction matrix for the target position information to obtain a target correction value includes: calculating a line correction matrix for the target position information and generating a preset space model; and calculating a plane correction matrix for the preset space model to obtain the target correction value.
According to some embodiments of the present invention, the processing the original flatness data to obtain a target array includes: performing data processing based on the identifier of the original flatness data, and if the original flatness data comprises the identifier, performing turnover processing on the original flatness data; and obtaining the target array according to the turning processing result.
According to some embodiments of the invention, the flipping the original flatness data comprises: if the line number group in the original flatness data is an even number group, turning over the line number group; and/or recording the row array if the row array in the original flatness data is an odd array.
According to some embodiments of the invention, the data processing based on the identifier of the raw flatness data further comprises: if the original plane data does not comprise the identifier, recording the original plane data; and obtaining the target array according to the record processing result.
According to some embodiments of the invention, the recording the raw flatness data comprises: obtaining a relative height value in the original flatness data, and obtaining a preset threshold value; if the relative height value exceeds the preset threshold value, replacing the relative height value with a preset height value, and recording the preset height value to a line group; and/or recording the relative height value to a line group if the relative height value does not exceed the preset threshold value.
According to some embodiments of the present invention, the obtaining the target position information corresponding to each data in the target array includes: acquiring the abscissa and the ordinate corresponding to each data in the target array; and generating a space line model according to the abscissa and the ordinate, and obtaining target position information corresponding to each data in the target array according to the space line model.
A flatness measuring apparatus according to an embodiment of a second aspect of the present invention includes:
the first acquisition module is used for acquiring original flatness data and processing the original flatness data to obtain a target array;
the second acquisition module is used for acquiring target position information corresponding to each data in the target array;
the correction module is used for calculating a target correction matrix for the target position information to obtain a target correction value;
and the calculation module is used for calculating and obtaining the flatness according to the target correction value.
The flatness measuring apparatus according to the embodiment of the second aspect of the present invention has at least the following advantages: the flatness detection method comprises the steps of obtaining original flatness data through a first obtaining module, processing the original flatness data, obtaining target position information corresponding to each data in a target array through a second obtaining module, calculating a target correction matrix according to the target position information through a correction module to obtain a target correction value, and calculating the flatness according to the target correction value through a calculation module.
Flatness measurement electronic apparatus according to an embodiment of a third aspect of the present invention includes: at least one processor, and a memory communicatively coupled to the at least one processor; wherein the memory stores instructions that are executable by the at least one processor to cause the at least one processor to implement the flatness measurement method of the first aspect when executing the instructions.
The flatness-measuring electronic apparatus according to the embodiment of the third aspect of the present invention has at least the following advantageous effects: by implementing the flatness measuring method of the first aspect of the invention, automatic flatness detection can be realized without other reference surfaces, and the measuring precision is high.
A computer-readable storage medium according to an embodiment of the fourth aspect of the present invention, the storage medium storing computer-executable instructions for causing a computer to perform the flatness measurement method of the first aspect.
The computer-readable storage medium according to the fourth aspect of the present invention has at least the following advantages: by implementing the flatness measuring method of the first aspect of the invention, automatic flatness detection can be realized without other reference surfaces, and the measuring precision is high.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
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The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic flow chart of a flatness measuring method according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a flatness measuring apparatus according to an embodiment of the present invention;
fig. 3 is a functional block diagram of a flatness-measuring electronic device according to an embodiment of the present invention.
Reference numerals:
the system comprises a first acquisition module 200, a second acquisition module 210, a correction module 220, a calculation module 230, a processor 300, a memory 310, a data transmission module 320, a camera 330 and a display screen 340.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
Referring to fig. 1, a flatness measuring method according to an embodiment of a first aspect of the present invention includes:
and S100, acquiring original flatness data, and processing the original flatness data to obtain a target array.
The flatness refers to the variation of the actual surface of the measured object to the ideal plane. The original flatness data can be a plurality of data acquired directly by flatness detection of the measured object, each data can represent the relative height value of each measured point on the surface of the measured object, and the surface of the measured object can comprise a plurality of measured points; the target array may be a set of arrays resulting from processing the raw flatness data. The flatness measuring method can be applied to the flatness measurement of the surface of the CPU, and can also be applied to the flatness measurement of all planes such as other common planes, high-reflection planes and the like. Optionally, a spectrum confocal sensor, a servo driver, and an object-measuring fixing frame may be disposed on a detection machine for detecting flatness to detect a measured object, so as to obtain original flatness data, where the original flatness data may be data obtained from the spectrum confocal sensor, and each data represents a relative height value of a measured point. Further, data processing may be performed on the original flatness data, for example, the original flatness data is selected, and each piece of data may be processed in sequence, including: carrying out replacement processing on the overrun data; and turning over the even array data, thereby obtaining the target array.
In some specific embodiments, the raw flatness data may be obtained by: three servo drivers, a spectrum confocal sensor and a measured object fixing frame are arranged on the flatness detection anti-shake machine table. Each driver respectively controls three motion axes correspondingly, one motion axis drives the spectrum confocal sensor to move up and down, one motion axis drives the spectrum confocal sensor to move left and right, and the other motion axis drives the fixed frame of the object to be measured to move back and forth. After the information of the measured object is determined, the length, the width and the position information of the measured object, the scanning line number, the sampling frequency and the like are set through software, so that the original data can be fully automatically acquired according to a certain movement track, and can be acquired back and forth according to the Chinese character 'gong'. The raw flatness data may be data obtained from a spectroscopic confocal sensor, each data representing a relative height value of the point being measured. When the parameters are set, the scanning and collecting range is ensured to cover the whole surface to be measured of the measured object as much as possible, and the scanning and collecting range can be ensured to cover the whole surface to be measured of the measured object. After the information of the measured object is determined, the original data can be fully automatically acquired according to a certain motion track by acquiring the length, width and position information of the measured object, setting the scanning line number, sampling frequency and the like. After the parameters are simply and reasonably set, the reliability and the precision of flatness calculation can be improved.
Step S110, obtaining target position information corresponding to each data in the target array.
The target position information may be position data corresponding to each data in the target array, for example, a spatial coordinate formed by three-dimensional orthogonal spatial coordinate X, Y, Z corresponding to each data in the target array. Each data in the target array may correspond to different target location information. Optionally, each row of data in the target array may be traversed to obtain each data of the target array, and an X/Y/Z value is calculated and allocated to each data, so that coordinate position information corresponding to each data in the target array may be obtained, and a space line model may be generated according to the X/Y/Z value, that is, a model in which each point of the space line model includes X/Y/Z information, so that target position information corresponding to each data in the target array may be obtained.
And step S120, calculating a target correction matrix for the target position information to obtain a target correction value.
The target correction matrix may include a line correction matrix and a plane correction matrix, and the target correction matrix may be used to correct target position information corresponding to each data in the target array; the target correction value may be a value obtained by calculating a target correction matrix for the target position information, and the target correction value may be a plurality of values. Optionally, a line correction matrix may be calculated for the target position information, and after all the row data in the target array are traversed, a spatial plane model is generated; and then, calculating a plane correction matrix for the space plane model to obtain a corrected plane Z value, wherein the obtained plane Z value can be used as a target correction value.
And step S130, calculating to obtain the flatness according to the target correction value.
Optionally, the flatness of the measured object may be calculated according to the obtained plurality of target correction values. Specifically, a maximum value and a minimum value may be obtained from the plurality of target correction values, and a difference value calculation may be performed according to the maximum value and the minimum value, where the obtained difference value is the flatness of the object to be measured.
According to the flatness measuring method, firstly, original flatness data are obtained and processed to obtain a target array, then a target correction matrix is calculated according to target position information corresponding to each datum in the target array to obtain a plurality of target correction values, finally flatness can be calculated according to the target correction values, automatic flatness detection can be achieved without the help of other reference surfaces, and the flatness measuring method is high in measuring precision and high in reliability.
In some embodiments of the present invention, calculating a target correction matrix for the target position information to obtain a target correction value includes:
and calculating a line correction matrix for the target position information and generating a preset space model. The line correction matrix may be a correction matrix for correcting a spatial line model in the target position information; the preset spatial model may be a model including a plurality of spatial points generated after target position information corresponding to each data in the target array is calculated in a traversal manner. Alternatively, to obtain the target correction value, a line correction matrix may be calculated for the target position information, for example, assuming that a certain target position information is a (x)1，y1，z1) Then, based on the target position information, a line correction matrix can be calculated by the following formula:
tanθ＝Δz/y->Δz＝y*tanθ；z’＝z–Δz＝z–y*tanθ； ①
the line correction matrix is: z ═ Z-Y ═ tan θ (c)
According to the formulas (i) and (ii), X/Y/Z data of each datum of the space line model can be recorded, and then the X/Y/Z data of each datum can be obtained after all rows of data in the target array are traversed, so that the space plane model can be generated.
And calculating a plane correction matrix for the preset space model to obtain a target correction value. The plane correction matrix may be a correction matrix for correcting position information of each data in the preset spatial model. Optionally, assuming that the target correction value is a plane Z value, the target correction value may be calculated by the following formula:
tanΦ＝Δz/x->Δz＝x*tanΦ；z”＝z’–Δz＝z’–x*tanΦ＝z–y*tanθ-x*tanΦ； ③
the planar rectification matrix is: z ═ Z-Y tan theta-X tan phi
According to the above-mentioned formulas (c) and (d), the plane Z value can be obtained by calculation, and the information of a certain target position is obtained1，y1，z1) The target correction value of (2) is obtained by calculating the target correction value corresponding to each data in the target array in sequence to obtain a plurality of target correction values Z ═ Z0，Z1，Z2，……，ZkAnd k ∈ N. Computing line corrections by constraining the line to target position informationThe matrix is generated, a preset space model is generated, then a plane correction matrix can be calculated for the preset space model, a target correction value is obtained, the Z value can be corrected by the target correction matrix, the planeness can be calculated according to the obtained target correction value, and the planeness of the surface to be measured of the measured object can be accurately calculated under the condition that no other reference surface is used no matter the measured object is placed horizontally or obliquely.
In some embodiments of the present invention, processing the original flatness data to obtain a target array includes:
and performing data processing based on the identifier of the original flatness data, and if the original flatness data comprises the identifier, performing turnover processing on the original flatness data. Where the identifier of the original flatness data may be a symbol that identifies the original flatness data, for example, the data of a row is separated from the data of a row by a special identifier, which may be denoted as "FF", which may be used as the identifier of the original flatness data. The flipping process may be to flip the ordering of each row of data in the original flatness data. Optionally, when the original plane data includes the identifier, the original plane data may be directly subjected to the flipping process, for example, if the line number group in the target array is an even number array, the sort of each line number group in the target array is subjected to the flipping process, so as to obtain a flipping process result.
And obtaining a target array according to the overturning processing result. Wherein, the flipping processing result may be the original flatness data after the flipping processing. Optionally, if the original flatness data includes the identifier, the original flatness data may be subjected to a flipping process, so as to obtain a flipping process result (i.e., the flipped original flatness data), that is, the original flatness data may be processed, and a target array may be obtained according to the flipped original flatness data. The data processing method comprises the steps of judging how to process data according to an identifier in original flatness data, if the original flatness data comprise the identifier, turning over the original flatness data to obtain a turning-over processing result, and obtaining a target array according to the turning-over processing result, so that the original flatness data comprising the identifier can be simply and reasonably processed, the data can be automatically stored, personnel are not needed to participate, and the automation degree is high.
In some embodiments of the present invention, the flipping process performed on the original flatness data includes:
and if the line number group in the original flatness data is an even number group, turning over the line number group. The line number group can be an array obtained by linearly arranging the original flatness data line by line, the number of the line number groups can be a plurality of, and the original flatness data can be formed by a plurality of line number groups; the even number array may be an array in which the number of rows is output as even numbers. Optionally, if the row number group in the original flatness data is an even number group, the row number group may be flipped, for example, if a certain row number group is 12437, the row number group is flipped, and the flipped row number group is 73421. The number of lines after the upset is organized and can be preserved, can be according to the number of lines after every upset that is preserved organize and obtain the target array.
In other embodiments, if the row array in the original flatness data is an odd array, the row array is recorded. The odd number array may be an array obtained by outputting the row number array as an odd number. Optionally, if the row array in the original flatness data is an odd array, the row array does not need to be turned over, each row array can be directly recorded, and the target array is obtained according to each row array. By judging whether the row array in the original flatness data is an even array or an odd array, the original flatness data can be respectively subjected to data processing according to different row array conditions to obtain target arrays under different conditions, and simple and reasonable processing of the original flatness data can be realized.
In some embodiments of the invention, the data processing based on the identifier of the original flatness data further comprises:
and if the original flatness data does not comprise the identifier, recording the original flatness data. Optionally, when the original flatness data does not include the identifier, the original flatness data may be directly recorded, that is, each data in the original flatness data may be recorded to obtain the target array. For example, the relative height value of each measured point in the original flatness data can be read, and the obtained relative height value is recorded to obtain a recording result.
And obtaining a target array according to the record processing result. Wherein, the recording processing result may be the original flatness data after recording processing. Optionally, if the original flatness data does not include the identifier, the original flatness data may be recorded, so as to obtain a recording processing result (i.e., the recorded original flatness data), that is, the original flatness data may be processed, and the target array may be obtained according to the recorded original flatness data. And judging how to process the data according to the identifier in the original flatness data, if the original flatness data does not comprise the identifier, recording the original flatness data to obtain a recording processing result, and obtaining a target array according to the recording processing result, so that the original flatness data containing the identifier can be simply and reasonably processed, and the data can be automatically stored.
In some embodiments of the present invention, the recording process of the raw flatness data includes:
and obtaining a relative height value in the original flatness data, and obtaining a preset threshold value. The relative height value may be a numerical value of the relative height of each measured point in the original flatness data, and the preset threshold may be a critical value corresponding to the preset relative height value. Optionally, whether the relative height value of the measured point exceeds the preset threshold value or not may be judged according to the relative height value, and the original flatness data may be recorded according to whether the relative height value exceeds the preset threshold value or not.
And if the relative height value exceeds the preset threshold value, replacing the relative height value with the preset height value, and recording the preset height value to the line group. Wherein, the preset height value can be the relative height of the preset measured point. The line number group may be an array obtained by linearly arranging the original flatness data line by line, and the line number group may be a plurality of line number groups, and the original flatness data may be composed of a plurality of line number groups. Optionally, assume a relative height value of Z1False, falseSetting the preset threshold value as Z0Assuming a predetermined height value ZkH is 99999, if Z1＞Z0Then Z can be1Is replaced by ZkI.e. Z1＝Zk99999, record this ZkThen Z can bekAnd recording the data into the line number group, and forming a target array according to the recorded line number group.
In other embodiments, if the relative height does not exceed the predetermined threshold, the relative height is recorded to the row group. Optionally, assume a relative height value of Z1Assuming that the preset threshold is Z0If Z is1＜Z0Then the relative height value Z can be directly recorded1In the line group, a target array may be formed according to the recorded line group. Judging whether the relative height value exceeds the limit or not by judging the size relation between the relative height value and a preset threshold value, replacing the overrun data with the preset height value when the relative height value exceeds the limit, recording the preset height value into a line group, and obtaining a target array according to the recorded line group; when the profession duty does not exceed the predetermined threshold value, can direct record relative height value to the line group, can obtain the target array according to the line group of this record, can realize handling simply and screening original flatness data, obtain more reasonable target array.
In some embodiments of the present invention, obtaining the target location information corresponding to each data in the target array includes:
and acquiring the abscissa and the ordinate corresponding to each data in the target array. The abscissa may be an abscissa corresponding to each data in the target array, and the abscissa may be represented by x; the ordinate may be the ordinate corresponding to each data in the target array, and may be represented by y. Optionally, the abscissa and the ordinate may be calculated and allocated to each data in the target array, so as to obtain the actual coordinate value corresponding to each data. The abscissa and ordinate corresponding to the obtained target array are assumed to be: (x)i，yi)＝{(x1，y1)，(x2，y2)，……，(xk，yk) And e, obtaining the actual coordinate value corresponding to each datum in the target array by using k as N.
And generating a space line model according to the abscissa and the ordinate, and obtaining target position information corresponding to each data in the target array according to the space line model. The space line model may be a model in which each point in space includes abscissa, ordinate, and ordinate information. Alternatively, the space line model may be generated according to the actual coordinate values (i.e. the abscissa and the ordinate) corresponding to each data, for example, assuming that the abscissa and the ordinate of a certain data in the target array are (x)2，y2) Then the data can be assigned a vertical coordinate z2Then the horizontal coordinate, the vertical coordinate and the vertical coordinate corresponding to the data are respectively (x)2，y2，z2) And sequentially allocating a vertical coordinate to each data in the target array, thereby obtaining the horizontal coordinate, the vertical coordinate and the vertical coordinate corresponding to each data in the target array, namely generating a space line model, and obtaining target position information corresponding to the data according to the space line model. By acquiring the abscissa and the ordinate corresponding to each data in the target array and generating the space line model according to the abscissa and the ordinate, the target position information corresponding to each data in the target array can be obtained according to the space line model, and the measurement precision can be improved.
Referring to fig. 2, a flatness measuring apparatus according to an embodiment of a second aspect of the present invention includes:
the first obtaining module 200 is configured to obtain original flatness data, and process the original flatness data to obtain a target array;
a second obtaining module 210, configured to obtain target position information corresponding to each data in the target array;
the correction module 220 is configured to calculate a target correction matrix for the target position information to obtain a target correction value;
and the calculating module 230 is used for calculating the flatness according to the target correction value.
In some embodiments of the present invention, the rectification module 220 is further configured to calculate a line rectification matrix for the target position information, and generate a preset spatial model; the correction module 220 is further configured to calculate a plane correction matrix for the preset spatial model to obtain a target correction value.
In some embodiments of the present invention, the first obtaining module 200 is further configured to perform data processing based on an identifier of the original flatness data, and if the original flatness data includes the identifier, perform flipping processing on the original flatness data; the first obtaining module 200 obtains a target array according to the flipping processing result.
In some embodiments of the present invention, the first obtaining module 200 is further configured to perform a flipping process on the row number group if the row number group in the original flatness data is an even number group; and/or, the first obtaining module 200 is further configured to record the row array if the row array in the original flatness data is an odd array.
In some embodiments of the present invention, the first obtaining module 200 is further configured to perform a recording process on the original flatness data if the original flatness data does not include the identifier; the first obtaining module 200 is further configured to obtain a target array according to the recording processing result.
In some embodiments of the present invention, the first obtaining module 200 is further configured to obtain a relative height value in the original flatness data, and obtain a preset threshold; the first obtaining module 200 is further configured to replace the relative height value with a preset height value if the relative height value exceeds the preset threshold, and record the preset height value to the row number group; and/or, the first obtaining module 200 is further configured to record the relative height value to the row number group if the relative height value does not exceed the preset threshold.
In some embodiments of the present invention, the second obtaining module 210 is further configured to obtain an abscissa and an ordinate corresponding to each data in the target array; the second obtaining module 210 is further configured to generate a space line model according to the abscissa and the ordinate, and obtain target position information corresponding to each data in the target array according to the space line model.
The flatness measuring device, by executing the flatness measuring method according to the first aspect of the present invention, obtains original flatness data through the first obtaining module and processes the original flatness data, obtains target position information corresponding to each data in the target array through the second obtaining module, calculates a target correction matrix for the target position information through the correction module to obtain a target correction value, and finally calculates the flatness through the calculation module according to the target correction value, so that automatic flatness detection can be achieved without using other reference surfaces, and the measurement accuracy is high.
Referring to fig. 3, an embodiment of the third aspect of the present invention further provides an internal structure diagram of a flatness measurement electronic device, including: at least one processor 300, and a memory 310 communicatively coupled to the at least one processor 300; the system also comprises a data transmission module 320, a camera 330 and a display screen 340.
Wherein the processor 300 is configured to execute the flatness measurement method in the first embodiment by calling a computer program stored in the memory 310.
The memory, as a non-transitory storage medium, may be used to store non-transitory software programs as well as non-transitory computer-executable programs, such as the flatness measurement method in the embodiment of the first aspect of the present invention. The processor implements the flatness measuring method in the above-described first embodiment by executing a non-transitory software program and instructions stored in the memory.
The memory may include a storage program area and a storage data area, wherein the storage program area may store an operating system, an application program required for at least one function; the stored data area may store data for performing the flatness measurement method in the embodiment of the first aspect described above. Further, the memory may include high speed random access memory, and may also include non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid state storage device. In some embodiments, the memory optionally includes memory located remotely from the processor, and these remote memories may be connected to the terminal over a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
Non-transitory software programs and instructions required to implement the flatness measurement method in the first aspect embodiment described above are stored in a memory and, when executed by one or more processors, perform the flatness measurement method in the first aspect embodiment described above.
Embodiments of the fourth aspect of the present invention also provide a computer-readable storage medium storing computer-executable instructions for: the flatness measurement method in the embodiment of the first aspect is performed.
In some embodiments, the storage medium stores computer-executable instructions, which when executed by one or more control processors, for example, by one of the processors in the electronic device of the embodiment of the third aspect, may cause the one or more processors to perform the flatness measurement method of the embodiment of the first aspect.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.
One of ordinary skill in the art will appreciate that all or some of the steps, systems, and methods disclosed above may be implemented as software, firmware, hardware, and suitable combinations thereof. Some or all of the physical components may be implemented as software executed by a processor, such as a central processing unit, digital signal processor, or microprocessor, or as hardware, or as an integrated circuit, such as an application specific integrated circuit. Such software may be distributed on computer readable media, which may include computer storage media (or non-transitory media) and communication media (or transitory media). The term computer storage media includes volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data, as is well known to those of ordinary skill in the art. Computer storage media includes, but is not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, Digital Versatile Disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium which can be used to store the desired information and which can accessed by a computer. In addition, communication media typically embodies computer readable instructions, data structures, program modules or other data in a modulated data signal such as a carrier wave or other transport mechanism and includes any information delivery media as known to those skilled in the art.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. The flatness measuring method is characterized by comprising the following steps:
acquiring original flatness data, and processing the original flatness data to obtain a target array;
acquiring target position information corresponding to each data in the target array;
calculating a target correction matrix for the target position information to obtain a target correction value;
and calculating to obtain the flatness according to the target correction value.
2. The method of claim 1, wherein calculating a target remediation matrix for the target location information to obtain a target remediation value comprises:
calculating a line correction matrix for the target position information and generating a preset space model;
and calculating a plane correction matrix for the preset space model to obtain the target correction value.
3. The method of claim 1, wherein the processing the raw flatness data to obtain a target array comprises:
performing data processing based on the identifier of the original flatness data, and if the original flatness data comprises the identifier, performing turnover processing on the original flatness data;
and obtaining the target array according to the turning processing result.
4. The method of claim 3, wherein the flipping the raw flatness data comprises:
if the line number group in the original flatness data is an even number group, turning over the line number group;
and/or the presence of a gas in the gas,
and if the row array in the original flatness data is an odd array, recording the row array.
5. The method of claim 3, wherein the data processing based on the identifier of the raw flatness data further comprises:
if the original plane data does not comprise the identifier, recording the original plane data;
and obtaining the target array according to the record processing result.
6. The method according to claim 5, wherein the recording the raw flatness data comprises:
obtaining a relative height value in the original flatness data, and obtaining a preset threshold value;
if the relative height value exceeds the preset threshold value, replacing the relative height value with a preset height value, and recording the preset height value to a line group;
and/or the presence of a gas in the gas,
and if the relative height value does not exceed the preset threshold value, recording the relative height value to a line group.
7. The method of claim 1, wherein the obtaining the target location information corresponding to each data in the target array comprises:
acquiring the abscissa and the ordinate corresponding to each data in the target array;
and generating a space line model according to the abscissa and the ordinate, and obtaining the target position information corresponding to each data in the target array according to the space line model.
8. Flatness measuring device, its characterized in that includes:
the first acquisition module is used for acquiring original flatness data and processing the original flatness data to obtain a target array;
the second acquisition module is used for acquiring target position information corresponding to each data in the target array;
the correction module is used for calculating a target correction matrix for the target position information to obtain a target correction value;
and the calculation module is used for calculating and obtaining the flatness according to the target correction value.
9. Flatness measurement electronic equipment, characterized by comprising:
at least one processor, and,
a memory communicatively coupled to the at least one processor; wherein,
the memory stores instructions for execution by the at least one processor to cause the at least one processor, when executing the instructions, to implement the flatness measurement method of any of claims 1 to 7.
10. A computer-readable storage medium storing computer-executable instructions for causing a computer to perform the flatness measurement method of any one of claims 1 to 7.
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