CN111922470A - Welding device for ceramic plate and metal cylinder part - Google Patents
Welding device for ceramic plate and metal cylinder part Download PDFInfo
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- CN111922470A CN111922470A CN202010649066.9A CN202010649066A CN111922470A CN 111922470 A CN111922470 A CN 111922470A CN 202010649066 A CN202010649066 A CN 202010649066A CN 111922470 A CN111922470 A CN 111922470A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/04—Heating appliances
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/06—Solder feeding devices; Solder melting pans
- B23K3/0607—Solder feeding devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
- B23K3/087—Soldering or brazing jigs, fixtures or clamping means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
Abstract
The invention discloses a welding device for a ceramic plate and a metal cylinder part, which belongs to the field of welding equipment and comprises a heating furnace, wherein the bottom of the inner wall of the heating furnace is fixedly connected with a workbench, the right side of the top of the workbench is fixedly connected with a limiting plate, two sides of the front surface of the workbench are fixedly connected with mounting blocks, the top of each mounting block is rotatably connected with a clamping screw rod, the top end of each clamping screw rod is fixedly connected with an adjusting hand wheel, and each clamping screw rod is in threaded connection with a clamping plate. According to the invention, the installation blocks are fixedly connected to both sides of the front surface of the workbench, the top of each installation block is rotatably connected with the clamping screw rod, the top end of each clamping screw rod is fixedly connected with the adjusting hand wheel, and the clamping screw rod is in threaded connection with the clamping plate, so that the ceramic plate can be fixed after being placed in the heating furnace, the ceramic plate is prevented from being dislocated in the welding process, the welding accuracy is ensured, and the extrusion disc can prevent solder from overflowing from the filling position.
Description
Technical Field
The invention relates to the field of welding devices, in particular to a welding device for a ceramic plate and a metal cylindrical part.
Background
As such an electrostatic chuck, there is known an electrostatic chuck in which a metal gas introduction pipe is joined from the back side of a disk-shaped ceramic plate provided with a gas introduction hole, and He gas or the like is supplied to the adsorption surface of the wafer to improve thermal conductivity, and since the ceramic plate and the metal cylinder for manufacturing the electrostatic chuck need to be welded together by a welding technique during the manufacturing process, a welding apparatus is required to weld the ceramic plate and the metal cylinder.
Most of existing welding devices for ceramic plates and metal cylinders do not have the function of fixing a welding part, and due to the fact that manual fixing is adopted, danger can occur in the welding process, welding accuracy is low, and most of existing welding devices cannot well press and fix the welding part.
Disclosure of Invention
1. Technical problem to be solved
The invention aims to provide a welding device for a ceramic plate and a metal cylindrical component, which can effectively ensure the stability of a welding seat and the ceramic plate in the welding process, can effectively prevent solder from overflowing from a joint and can provide pressure to ensure that the welding seat and the ceramic plate are fixed.
2. Technical scheme
In order to solve the problems, the invention adopts the following technical scheme:
a welding device for ceramic plates and metal cylinder parts comprises a heating furnace, wherein the heating furnace is fixedly connected with a workbench at the bottom of the inner wall of the heating furnace, a limiting plate is fixedly connected to the right side of the top of the workbench, mounting blocks are fixedly connected to both sides of the front surface of the workbench, a clamping screw rod is rotatably connected to the top of each mounting block, an adjusting hand wheel is fixedly connected to the top end of the clamping screw rod, a clamping plate is connected to the clamping screw rod through threads, fixing nuts are fixedly connected to both sides of the top of the heating furnace, adjusting screw rods are connected to the inner threads of the fixing nuts, the bottom ends of the adjusting screw rods penetrate through the heating furnace and extend into the heating furnace, a pressing disc is fixedly connected to the bottom ends of the adjusting screw rods, heat insulation layers are arranged at the bottom, the top and both sides of the inner wall, the left side fixedly connected with handle of sealing door, the blowing groove has been seted up in the left side of heating furnace, the blowing groove with accommodate the lead screw's top fixedly connected with fixed hand wheel.
The ceramic plate comprises a first through hole and a metal cylinder, and is characterized in that a boss is arranged at the top of the ceramic plate above the first through hole, a joint groove, a conical positioning groove and a second through hole which are communicated with each other are sequentially arranged at the middle position of the boss from top to bottom, the second through hole is communicated with the first through hole, the diameter of the joint groove is gradually decreased from bottom to top, a plurality of annular grooves are arranged at the positions, close to the side edges, of the bottom of the joint groove, the cross sections of the annular grooves are in a barb shape, a welding seat is in threaded connection with the bottom end of the metal cylinder and is arranged at the middle position of the joint groove, the welding seat comprises a cylinder part, an annular positioning part, a fan-shaped transition part, a fan-shaped material blocking part and a ceramic nail, the annular positioning part is matched with the conical positioning groove, and is clamped inside the conical positioning groove, the bottom in the cylindric portion outside evenly is provided with a plurality of fan-shaped transition portions along its circumferencial direction, the cross-section of fan-shaped transition portion is the arcuation, just the one end that cylindric portion was kept away from to fan-shaped transition portion extends to the inside bottom of annular groove, and is a plurality of fan-shaped transition portion is for forming the annular, fan-shaped transition portion keeps away from cylindric portion one end slope and is provided with fan-shaped fender material portion, and a plurality of fan-shaped fender material portion is for forming the awl tube-shape, and is adjacent fan-shaped fender material portion with be provided with the sliding seal subassembly between the fan-shaped transition portion, be provided with the solder between joint groove, annular groove and a.
The number of the fan-shaped transition parts is 4.
The top of the inner side of the cylindrical part is provided with a first mounting groove, an inner thread is arranged on the inner side wall of the first mounting groove, a second mounting groove is formed in the bottom end of the outer side of the metal cylinder, and an outer thread matched with the inner thread is arranged on the side wall of the second mounting groove.
Sliding seal subassembly is including setting up fan-shaped material portion of keeping off with fan-shaped transition portion one side and with fan-shaped material portion of keeping off with fan-shaped transition portion shape assorted slot and setting are in fan-shaped material portion of keeping off with fan-shaped transition portion opposite side and with fan-shaped material portion of keeping off with fan-shaped transition portion shape assorted cutting, the cutting matches each other with the slot.
The cylindrical part, the annular positioning part, the fan-shaped transition part and the fan-shaped material blocking part are integrally formed, and the cylindrical part, the annular positioning part, the fan-shaped transition part and the fan-shaped material blocking part are made of 60Si2 Mn.
The vertical height of the fan-shaped material blocking part is larger than the sum of the depths of the joint groove and the annular groove.
The solder adopts a component with better wettability with the component contained in the ceramic plate as the solder.
3. Advantageous effects
(1) The invention is characterized in that the two sides of the front surface of the workbench are fixedly connected with the installation blocks, the top of the installation block is rotatably connected with the clamping screw rod, the top end of the clamping screw rod is fixedly connected with the adjusting hand wheel, the clamping screw rod is in threaded connection with the clamping plate which can play a role in fixing the ceramic plate after the ceramic plate is placed in the heating furnace, the ceramic plate is prevented from being dislocated in the welding process, the welding accuracy is ensured, the two sides of the top of the heating furnace are fixedly connected with the fixing nuts, the inner threads of the fixing nuts are connected with the adjusting screw rod, the bottom end of the adjusting screw rod penetrates through the heating furnace and extends to the inside of the heating furnace, the bottom end of the adjusting screw rod is fixedly connected with the pressing disc which can press and fix the welding seat and the ceramic plate while heating welding is carried out, the fan-shaped transition part is clamped in the annular groove, so that the stability of the structure is improved.
(2) According to the invention, the top of the ceramic plate above the first through hole is provided with the bulge part, the middle position of the bulge part is sequentially provided with the joint groove, the conical positioning groove and the second through hole which are communicated from top to bottom, the position, close to the side edge, of the bottom of the joint groove is provided with the annular groove, the cross section of the annular groove is in the shape of a barb, the bottom end of the metal cylinder is in threaded connection with the welding seat, the welding seat is arranged at the middle position of the joint groove and comprises the cylinder part, the annular positioning part, the fan-shaped transition part, the fan-shaped material blocking part and the ceramic nail, during welding, the annular positioning part of the welding seat is positioned inside the conical positioning groove of the bulge part, so that the welding seat is positioned, the welding of the welding material filling is convenient, the welding strength of the welding seat and the ceramic plate is enhanced by the welding material, Annular location portion, the material of fan-shaped transition portion and fan-shaped fender portion is 60Si2Mn, 60Si2Mn has excellent elasticity and tempering nature, when the welding seat takes place the inflation, fan-shaped fender portion can inwards form certain crooked with fan-shaped transition portion, avoid the welding seat to form the extrusion to solder and pottery, cause ceramic fracture and solder to drop, when the welding seat shrink, fan-shaped fender portion can form certain crooked with fan-shaped transition portion in outer, avoid the welding part to take place to peel off, through the whole shape of welding seat and material promptly, reduce because of the welding or when electrostatic chuck carries out the thermal cycle, the influence of the stress that the inflation difference produced to the welding part.
(3) The welding flux adopts the component with better wettability with the component contained in the ceramic plate as the welding flux, so that the bonding strength between the welding flux and the ceramic plate, namely the welding strength, is obviously improved, the bonding strength between the welding flux and the welding seat, namely the welding strength, is improved through the ceramic nails inserted on the welding seat, and the welding quality is ensured.
(4) The invention transfers the welding flux welded in the prior art to the side edge, so that when the electrostatic chuck is used for thermal cycle, the temperature of the joint of the welding seat, the welding flux and the ceramic plate is from high to low, thereby reducing the expansion and contraction amount of the ceramic plate and the welding flux, avoiding the peeling of the welding part and further improving the welding strength.
(5) The diameter of the joint groove is gradually reduced from bottom to top, so that after welding is completed, one side of the welding flux abuts against the side wall of the joint groove, the other side of the welding flux abuts against the fan-shaped material blocking part of the welding seat, the side wall of the joint groove abuts against the fan-shaped material blocking part of the welding seat through the welding flux, and the welding strength is further improved in a barb mode.
Drawings
FIG. 1 is a schematic structural view of a preferred embodiment of a welding apparatus for welding a ceramic plate and a metallic cylindrical member according to the present invention;
FIG. 2 is a schematic structural view of a ceramic plate and a bonding pad according to the present invention;
FIG. 3 is a schematic view of a soldering nest according to the present invention;
FIG. 4 is a schematic view of a metal cylinder structure according to the present invention;
FIG. 5 is a schematic top view of the soldering nest of the present invention;
FIG. 6 is a schematic top view of the fan-shaped material blocking portion and the fan-shaped transition portion of the present invention;
fig. 7 is a side view structure schematic diagram of the fan-shaped material blocking part and the fan-shaped transition part of the invention.
Reference numerals: 1. heating furnace; 2. a work table; 3. a discharging groove; 4. a limiting plate; 5. mounting blocks; 6. clamping the screw rod; 7. adjusting a hand wheel; 8. a splint; 9. fixing a nut; 10. adjusting the screw rod; 11. a compression disc; 12. a sealing door; 13. a thermal insulation layer; 14. fixing a hand wheel; 15. a ceramic plate; 151. a first through hole; 16. a metal cylinder; 161. a second mounting groove; 162. an external thread; 17. a boss portion; 18. an engaging groove; 19. a conical positioning groove; 20. a second through hole; 21. welding a base; 21. welding a base; 211. an internal thread; 212. a first mounting groove; 213. a cylindrical portion; 214. a fan-shaped material blocking part; 215. a ceramic nail; 216. an annular positioning portion; 217. a sector transition portion; 218. cutting; 219. a slot; 22. welding flux; 23. an annular groove.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-7, an embodiment of the present invention is shown: the heating furnace comprises a heating furnace 1, a workbench 2 fixedly connected to the bottom of the inner wall of the heating furnace 1, a limiting plate 4 fixedly connected to the right side of the top of the workbench 2, mounting blocks 5 fixedly connected to both sides of the front of the workbench 2, clamping screws 6 rotatably connected to the tops of the mounting blocks 5, adjusting handwheels 7 fixedly connected to the tops of the clamping screws 6, clamping plates 8 connected to the clamping screws 6 through threads, fixing nuts 9 fixedly connected to both sides of the top of the heating furnace 1, adjusting screws 10 connected to the inner threads of the fixing nuts 9, the bottom ends of the adjusting screws 10 penetrating through the heating furnace 1 and extending into the heating furnace 1, a pressing disc 11 fixedly connected to the bottom ends of the adjusting screws 10, heat insulation layers 13 arranged on the bottom, the top and both sides of the inner wall of the heating furnace 1, a sealing door 12 hinged to, the discharging groove 3 has been seted up in the left side of heating furnace 1, and discharging groove 3 and accommodate the lead screw 10's top fixedly connected with fixed hand wheel 14, the bottom of extrusion dish 11 be provided with the scarf of welding seat 21 looks adaptation, can provide pressure and push down welding seat 21 when extrusion dish 11 pushes down, make fan-shaped transition portion 217 card go into annular groove 23, improve the stability of structure.
The ceramic plate comprises a ceramic plate 15 with a first through hole 151 and a metal cylinder 16, and is characterized in that a convex part 17 is arranged at the top of the ceramic plate 15 above the first through hole 151, a joint groove 18, a conical positioning groove 19 and a second through hole 20 which are communicated with each other are sequentially arranged at the middle position of the convex part 17 from top to bottom, the diameter of the second through hole 20 is communicated with the first through hole 151, the diameter of the joint groove 18 gradually decreases from bottom to top, a plurality of annular grooves 23 are arranged at the positions, close to the side edges, of the bottom of the joint groove 18, the cross sections of the annular grooves 23 are in a barb shape, a welding seat 21 is in threaded connection with the bottom end of the metal cylinder 16, the welding seat 21 is arranged at the middle position of the joint groove 18, the welding seat 21 comprises a cylinder part 213, an annular positioning part 216, a fan-shaped transition part 217, a fan-shaped material blocking part, annular location portion 216 is blocked and is established inside tapered positioning groove 19, the bottom in the cylindric portion 213 outside evenly is provided with a plurality of fan-shaped transition portions 217 along its circumferencial direction, the cross-section of fan-shaped transition portion 217 is the arcuation, and the one end that the cylindric portion 213 was kept away from to fan-shaped transition portion 217 extends to the inside bottom of annular groove 23, a plurality of fan-shaped transition portions 217 are for forming the ring-type, the one end slope that cylindric portion 213 was kept away from to fan-shaped transition portion 217 is provided with fan-shaped material blocking portion 214, and a plurality of fan-shaped material blocking portions 214 are for forming the cone-shape, be provided with the sliding seal subassembly between adjacent fan-shaped material blocking portion 214 and the fan-shaped transition portion 217, joint groove 18.
The number of the fan-shaped transition portions 217 is 4.
The top end of the inner side of the cylindrical part 213 is provided with a first mounting groove 212, the inner side wall of the first mounting groove 212 is provided with an internal thread 211, the bottom end of the outer side of the metal cylinder 16 is provided with a second mounting groove 161, and the side wall of the second mounting groove 161 is provided with an external thread 162 matched with the internal thread 211.
The sliding seal assembly comprises a slot 219 which is arranged on one side of the fan-shaped material blocking portion 214 and the fan-shaped transition portion 217 and is matched with the fan-shaped material blocking portion 214 and the fan-shaped transition portion 217 in shape, and a slip 218 which is arranged on the other side of the fan-shaped material blocking portion 214 and the fan-shaped transition portion 217 and is matched with the fan-shaped material blocking portion 214 and the fan-shaped transition portion 217 in shape, wherein the slip 218 is matched with the slot 219.
The cylindrical portion 213, the annular positioning portion 216, the fan-shaped transition portion 217 and the fan-shaped material blocking portion 214 are integrally formed, and the material of the cylindrical portion 213, the annular positioning portion 216, the fan-shaped transition portion 217 and the fan-shaped material blocking portion 214 is 60Si2 Mn.
The vertical height of the fan-shaped stopping part 214 is larger than the sum of the depths of the joint groove 18 and the annular groove 23.
The solder 22 is a composition having a good wettability with the composition contained in the ceramic plate 15.
The working principle is as follows: before and after the ceramic plate 15 filled with the welding flux 22 and the welding seat 21 are firstly placed into the heating furnace 1 through the feeding groove 3, the ceramic plate 15 is enabled to move on the workbench 2 until the right side of the ceramic plate 15 contacts the limiting plate 4, then the adjusting hand wheel 7 is rotated to drive the clamping screw 6 to rotate, so that the clamping plate 8 is pressed downwards, the ceramic plate 15 is clamped and fixed to prevent dislocation in the welding process, then the furnace door of the heating furnace 1 is closed, the fixing hand wheel 14 is rotated to drive the adjusting screw 10 to rotate, so that the pressing disc 11 is moved downwards to enable the bottom of the pressing disc 11 to be attached to and tightly contacted with the top of the welding seat 21, the welding flux 22 can be blocked after the pressing disc 11 is contacted with the top of the welding seat 21 to prevent the welding flux 22 from overflowing, so that the welding effect is ensured, then the furnace door and the sealing door 12 are closed, the heating furnace 1 is started to, the welding is finished after the welding material is cooled, during welding, the annular positioning part 216 of the welding seat 21 is positioned inside the conical positioning groove 19 of the protruding part 17, so that the welding seat 21 is positioned, the welding material is convenient to fill and weld, one end of the fan-shaped transition part of the welding seat 21 is positioned inside the annular groove 23, after welding and cooling, the welding material entering the annular groove 23 can enhance the welding strength of the welding seat 21 and the ceramic plate 15, because the cylindrical part 213 of the welding seat 21, the annular positioning part 216, the fan-shaped transition part 217 and the fan-shaped material blocking part 214 are made of 60Si2Mn, 60Si2Mn has excellent elasticity and tempering performance, when the welding seat 21 expands, the fan-shaped material blocking part 214 and the fan-shaped transition part 217 can form a certain bending inwards, the welding seat 21 is prevented from extruding the welding material 22 and the ceramic plate 15, the ceramic plate 15 is prevented from being broken and the welding material 22 falls off, when the welding seat 21 contracts, the fan-shaped material blocking part 214 and, the fan-shaped material stopping part 214 is tightly attached to the welding flux 22 to avoid the peeling of the welding part, namely, the influence of the stress generated by the expansion difference on the welding part during welding or the thermal cycle of the electrostatic chuck is reduced through the integral shape and the material of the welding seat 21, and the diameter of the joint groove 18 is gradually reduced from bottom to top, so that after the welding is finished, one side of the welding flux 22 is abutted against the side wall of the joint groove 18, the other side of the welding flux 22 is abutted against the fan-shaped material stopping part 214 of the welding seat 21, the side wall of the joint groove 18 is abutted against the fan-shaped material stopping part 214 of the welding seat 21 through the welding flux 22, which is in a barb form, the welding strength is further improved, and because the used welding flux 22 adopts a component with better wettability with the component contained in the ceramic plate 15 as the welding flux, the bonding strength between the welding flux 22 and the ceramic plate 15, the invention improves the bonding strength between the solder 22 and the welding seat 21, namely the welding strength, ensures the welding quality, and simultaneously transfers the welding solder 22 welded in the prior art to the side edge, so that the temperature of the joint of the welding seat 21, the welding solder 22 and the ceramic plate 5 is from high to low when an electrostatic chuck is used for heat circulation, thereby reducing the expansion and contraction amount of the ceramic plate 15 and the welding solder, avoiding the peeling of the welding part and further improving the welding strength.
It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that changes and modifications to the above embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.
Claims (7)
1. The utility model provides a welding set of ceramic plate and metal system cylinder part, includes heating furnace (1), its characterized in that: the heating furnace (1), the bottom fixedly connected with workstation (2) of heating furnace (1) inner wall, the right side fixedly connected with limiting plate (4) at workstation (2) top, the equal fixedly connected with installation piece (5) in workstation (2) positive both sides, the top of installation piece (5) is rotated and is connected with presss from both sides tight lead screw (6), the top fixedly connected with adjusting handle (7) that presss from both sides tight lead screw (6), threaded connection has splint (8) on pressing from both sides tight lead screw (6), the equal fixedly connected with fixation nut (9) in both sides at heating furnace (1) top, the inside threaded connection of fixation nut (9) has adjusting screw (10), the bottom of adjusting screw (10) runs through heating furnace (1) and extends to the inside of heating furnace (1), the bottom fixedly connected with pressure disk (11) of adjusting screw (10), the bottom, the top and the both sides of heating furnace (1) inner wall all are provided with insulating layer (13), the left side hinge of heating furnace (1) articulates there is sealing door (12), the left side fixedly connected with handle of sealing door (12), blowing groove (3) have been seted up in the left side of heating furnace (1), blowing groove (3) with top fixedly connected with fixed hand wheel (14) of accommodate the lead screw (10).
The utility model provides a welding set of ceramic plate and metal system cylinder part, still includes ceramic plate (15) and metal system cylinder (16) that have through-hole (151), its characterized in that, ceramic plate (15) top of through-hole (151) top is provided with bellying (17), the intermediate position department of bellying (17) has set gradually joint groove (18), tapered positioning groove (19) and through-hole two (20) that are linked together from the top down, through-hole two (20) with through-hole (151) intercommunication, the diameter of joint groove (18) is followed supreme descending gradually, joint groove (18) bottom is close to side position department and is provided with a plurality of annular grooves (23), and annular groove (23) cross-section is down, the bottom threaded connection of metal system cylinder (16) has welding seat (21), welding seat (21) set up in the intermediate position department of joint groove (18), the welding seat (21) comprises a cylindrical part (213), an annular positioning part (216), a fan-shaped transition part (217), a fan-shaped material blocking part (214) and ceramic nails (215), wherein the bottom end of the cylindrical part (213) is provided with the annular positioning part (216) matched with the conical positioning groove (19), the annular positioning part (216) is clamped inside the conical positioning groove (19), the bottom end of the outer side of the cylindrical part (213) is uniformly provided with a plurality of fan-shaped transition parts (217) along the circumferential direction, the cross section of each fan-shaped transition part (217) is arc-shaped, one end, far away from the cylindrical part (213), of each fan-shaped transition part (217) extends to the bottom end inside the annular groove (23), the plurality of fan-shaped transition parts (217) form an annular shape, one end, far away from the cylindrical part (213), of each fan-shaped transition part (217) is obliquely provided with the fan-shaped material blocking part (214), and the plurality of fan-shaped, adjacent fan-shaped material blocking portion (214) with be provided with sliding seal subassembly between fan-shaped transition portion (217), be provided with solder (22) between joint groove (18), annular groove (23) and a plurality of fan-shaped material blocking portion (214) the outside.
2. A welding device of ceramic plates to cylindrical metal parts according to claim 1, characterized in that the number of said fan-shaped transitions (217) is 4.
3. The welding device of the ceramic plate and the metal cylinder component as claimed in claim 1, wherein a first mounting groove (212) is formed at the top end of the inner side of the cylinder part (213), an internal thread (211) is formed on the inner side wall of the first mounting groove (212), a second mounting groove (161) is formed at the bottom end of the outer side of the metal cylinder (16), and an external thread (162) matched with the internal thread (211) is formed on the side wall of the second mounting groove (161).
4. A ceramic plate and metal cylinder member joint structure as set forth in claim 1, wherein: the sliding seal assembly is arranged on one side of the sector material blocking portion (214) and the sector transition portion (217) and arranged in a slot (219) matched with the shape of the sector material blocking portion (217) and arranged on the other side of the sector material blocking portion (214) and a strip (218) matched with the shape of the sector transition portion (217), and the strip (218) is matched with the slot (219).
5. The welding device of a ceramic plate and a metal cylinder component as claimed in claim 1, wherein the cylinder portion (213), the annular positioning portion (216), the fan-shaped transition portion (217) and the fan-shaped baffle portion (214) are integrally formed, and the material of the cylinder portion (213), the annular positioning portion (216), the fan-shaped transition portion (217) and the fan-shaped baffle portion (214) is 60Si2 Mn.
6. A ceramic plate and metal cylinder part welding device according to claim 1, characterized in that the vertical height of the sector shaped dam (214) is greater than the sum of the depth of the joint groove (18) and the annular groove (23).
7. A ceramic plate and metal cylinder part bonding apparatus according to claim 1, wherein said solder (22) uses a component having a good wettability with a component contained in the ceramic plate (15) as the solder (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010649066.9A CN111922470B (en) | 2020-07-08 | 2020-07-08 | Welding device for ceramic plate and metal cylinder part |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010649066.9A CN111922470B (en) | 2020-07-08 | 2020-07-08 | Welding device for ceramic plate and metal cylinder part |
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| CN111922470A true CN111922470A (en) | 2020-11-13 |
| CN111922470B CN111922470B (en) | 2021-12-28 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113828954A (en) * | 2021-10-22 | 2021-12-24 | 中国科学院空天信息创新研究院 | Metal-ceramic sealing method and metal-ceramic composite structure |
| CN114248058A (en) * | 2022-01-04 | 2022-03-29 | 陕西宝光陶瓷科技有限公司 | Processing device for welding aluminum oxide ceramic and metal molybdenum |
| CN117840543A (en) * | 2024-03-08 | 2024-04-09 | 南京中江新材料科技有限公司 | Positioning device and positioning method for ceramic and metal brazing |
| CN114248058B (en) * | 2022-01-04 | 2024-05-14 | 陕西宝光陶瓷科技有限公司 | Processing device for welding aluminum oxide ceramic and metallic molybdenum |
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