CN111913347A - Even gluey chromium version inspection device - Google Patents
Even gluey chromium version inspection device Download PDFInfo
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- CN111913347A CN111913347A CN202010938646.XA CN202010938646A CN111913347A CN 111913347 A CN111913347 A CN 111913347A CN 202010938646 A CN202010938646 A CN 202010938646A CN 111913347 A CN111913347 A CN 111913347A
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- placing
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- protruding portion
- side wall
- limit
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
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- General Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses a uniform glue chrome plate inspection device which comprises a fixed plate, two supporting plates and rotating wheels rotatably connected with the supporting plates, wherein the bottoms of the two supporting plates are fixed on the fixed plate, the tops of the supporting plates comprise a first placing edge and a second placing edge which are perpendicular to each other, the two supporting plates are parallel to each other and are arranged at intervals to form an installation space for installing the rotating wheels, the first placing edges of the two supporting plates are aligned, the second placing edges of the two supporting plates are aligned, at least two rotating wheels are arranged in the installation space, one of the two rotating wheels is rotatably installed on the first placing edge and protrudes out of the top surface of the first placing edge, and the other rotating wheel is installed on the second placing edge and protrudes out of the top surface of the second placing edge. The uniform glue chromium plate is stably placed through the structure, and meanwhile, the uniform glue chromium plate can be kept clean and is prevented from being damaged due to collision in the placing process.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a uniform glue chrome plate inspection device.
Background
With the continuous progress of science and technology in China, semiconductor integrated circuits are applied more and more in the liquid crystal display industry or the touch screen industry, a mask plate is needed in the production and manufacturing process of the semiconductor integrated circuits, and a photoresist mask plate is used as a base plate of the mask plate, so that the photoresist mask plate has an important position in the production of the semiconductor integrated circuits.
As a basic material of a mask, a photoresist mask is known. The degree of cleanliness directly affects the quality of the final product. In the actual production process, the glass substrate is used as a substrate of the uniform glue chromium plate, the uniform glue chromium plate can be prepared after the processes of film coating, glue homogenizing and the like are sequentially carried out, and then the mask plate is prepared on the uniform glue chromium plate through a photoetching process. In order to enable the quality of the produced mask plate to meet the preset requirement, the actual production process comprises the steps of placing the uniform glue chromium plate or the glass substrate on an inspection seat, temporarily storing, cooling and inspecting the uniform glue chromium plate or the glass substrate, and the uniform glue chromium plate or the glass substrate is required to be kept in a clean and dustless state in the above processes. The existing uniform-glue chromium plate inspection device is mainly used for clamping a uniform-glue chromium plate or a glass substrate plate in the air through a clamping device, so that the following problems can be caused: the clamped even-glue chromium plate or the glass substrate is easily damaged, and fine particles are easily stained at the clamping position.
Therefore, there is a need for a device for inspecting a uniform chrome plate to solve the above problems.
Disclosure of Invention
The invention provides a uniform glue chrome plate inspection device aiming at the technical defects at present.
The technical scheme adopted by the invention for realizing the purpose is as follows:
a uniform glue chrome plate inspection device comprises a fixed plate, two supporting plates and a rotating wheel which is rotatably connected with the supporting plates, wherein the bottoms of the two supporting plates are fixed on the fixed plate, the top of the supporting plate comprises a first placing edge and a second placing edge which form a right angle with each other, the two supporting plates are parallel to each other and are arranged at intervals to form an installation space for installing the rotating wheel, the first placing edges of the two supporting plates are aligned, the second placing edges of the two supporting plates are aligned, the number of the rotating wheels is at least two, the rotating wheels are positioned in the installation space, one of the two rotating wheels is rotatably installed on the first placing edge and protrudes out of the top surface of the first placing edge, and the other rotating wheel is installed on the second placing edge and protrudes out of the top surface of the second placing edge.
The improved structure comprises a first placing edge, a second placing edge and a third placing edge, wherein the first placing edge is provided with two rotating wheels, the first placing edge is provided with a first protruding portion and a second protruding portion which are used for installing the rotating wheels in an upward protruding mode, the first protruding portion and the second protruding portion are arranged along the length direction of the first placing edge, and the top surface of the first protruding portion and the top surface of the second protruding portion are located on the same straight line.
In a further improvement, the second placing edge is provided with two rotating wheels, the second placing edge is provided with a third protruding portion and a fourth protruding portion which are used for installing the rotating wheels in an upward protruding mode, the third protruding portion and the fourth protruding portion are arranged along the length direction of the second placing edge, and the top surfaces of the third protruding portion and the fourth protruding portion are located on the same straight line.
The outer side wall of the rotating wheel is inwards sunken to form an annular placing part for placing the uniform glue chromium plate, and the left side wall and the right side wall of the placing part are perpendicular to each other.
In a further improvement, the uniform-glue chromium plate inspection device further comprises reinforcing plates for stably supporting the supporting plate on the fixing plate, the reinforcing plates are obliquely fixed between the supporting plate and the fixing plate, the number of the reinforcing plates is at least two, and the two reinforcing plates are respectively positioned on two sides of the installation space.
In a further improvement, the first end of the placing edge is connected with the second end of the placing edge, the first protruding portion is located at the first end of the placing edge, the second protruding portion is located at a position of a certain distance away from the first end of the placing edge, the third protruding portion is located at a position of a certain distance away from the second end of the placing edge, and the fourth protruding portion is located at the second end of the placing edge.
In a further improvement, the first protrusion includes a first top surface, a first sidewall and a second sidewall, the first sidewall and the second sidewall are respectively located on two sides of the first top surface, the first sidewall is located on a side of the first top surface opposite to the second protrusion, and the first sidewall and the first top surface are perpendicular to each other.
In a further improvement, the fourth protrusion includes a second top surface, a third sidewall and a fourth sidewall, the third sidewall and the fourth sidewall are respectively located on two sides of the second top surface, the fourth sidewall is located on a side of the second top surface opposite to the third protrusion, and the fourth sidewall and the second top surface are perpendicular to each other.
The uniform-glue chromium plate inspection device is further improved by comprising a base for supporting the fixing plate, wherein a plurality of flow guide holes are formed in the supporting surface of the base.
The improved structure is characterized in that the base comprises a bearing plate and a fixing frame, the bearing plate is fixed at the top of the fixing frame, the flow guide hole penetrates through the bearing plate along the vertical direction, and the fixing plate is placed on the bearing plate.
The invention has the beneficial effects that: the bottom parts of the two supporting plates are fixed on the fixing plate, the top parts of the supporting plates comprise a first placing edge and a second placing edge which are mutually at right angles, the two supporting plates are mutually parallel and are arranged at intervals to form an installation space for installing the rotating wheels, the first placing edges of the two supporting plates are aligned, the second placing edges of the two supporting plates are aligned, at least two rotating wheels are arranged, and the rotating wheels are positioned in the installation space, so that the side edges of the glue homogenizing chromium plate or the glass substrate can be placed on the two rotating wheels in actual use, the stable placement of the glue homogenizing chromium plate or the glass substrate is realized, and liquid on the glue homogenizing chromium plate or the glass substrate can fall off from the installation space; meanwhile, one of the two rotating wheels is rotatably arranged on the first placing edge and protrudes out of the top surface of the first placing edge, and the other rotating wheel is arranged on the second placing edge and protrudes out of the top surface of the second placing edge, so that when the side edges of the glue homogenizing chromium plate or the glass substrate are placed on the two rotating wheels, the edge part of the glue homogenizing chromium plate or the glass substrate cannot collide with the supporting plate to be damaged.
The invention is further described with reference to the following detailed description and accompanying drawings.
Drawings
FIG. 1 is a schematic structural view of a leveling chrome plate inspection apparatus according to the present invention;
FIG. 2 is a front view of the connection of the fixing plate, the support plate and the reinforcing plate of the present invention;
FIG. 3 is a side view of the attachment of the securing plate, support plate and reinforcing plate of the present invention;
FIG. 4 is a schematic view of the construction of the rotating wheel of the present invention;
fig. 5 is a top view of the base of the present invention.
In the figure: 100. the device comprises a uniform glue chrome plate inspection device, 10 a fixing plate, 20a supporting plate, 30 a rotating wheel, 21 a first placing edge, 22 a second placing edge, 20a mounting space, 211 a first protruding portion, 212 a second protruding portion, 221 a third protruding portion, 222 a fourth protruding portion, 31 a placing portion, 40 a reinforcing plate, 2111 a first top surface, 2112 a first side wall, 2113 a second side wall, 2221 a second top surface, 2222 a third side wall, 2223 a fourth side wall, 50a base, 51 a bearing plate, 52 a fixing frame, 50a flow guide hole, 311 a left side wall and 312 a right side wall.
Detailed Description
The following are merely preferred embodiments of the present invention, and do not limit the scope of the present invention.
Referring to fig. 1 to 4, the apparatus 100 for inspecting a uniform coating chrome plate of the present invention includes a fixing plate 10, two supporting plates 20, and a rotating wheel 30 rotatably connected to the supporting plates 20. The bottoms of the two support plates 20 are fixed on the fixing plate 10, the top of the support plate 20 comprises a first placing edge 21 and a second placing edge 22 which are mutually at right angles, the two support plates 20 are mutually parallel and are arranged at intervals to form an installation space 20a for installing the rotating wheel 30, the first placing edges 21 of the two support plates 20 are aligned, the second placing edges 22 of the two support plates 20 are aligned, at least two rotating wheels 30 are arranged, the rotating wheels 30 are positioned in the installation space 20a, one of the two rotating wheels 30 is rotatably installed on the first placing edge 21 and protrudes out of the top surface of the first placing edge 21, and the other rotating wheel 30 is installed on the second placing edge 22 and protrudes out of the top surface of the second placing edge 22. Specifically, two rotating wheels 30 are installed on the first placing edge 21, the first placing edge 21 is provided with a first protruding portion 211 and a second protruding portion 212 which are used for installing the rotating wheels 30 in an upward protruding manner, the first protruding portion 211 and the second protruding portion 212 are arranged along the length direction of the first placing edge 21, and the top surface of the first protruding portion 211 and the top surface of the second protruding portion 212 are located on the same straight line, so when the rotating wheels 30 are installed on the first protruding portion 211 and the second protruding portion 212 respectively, the rotating wheels 30 on the first protruding portion 211 and the rotating wheels 30 on the second protruding portion 212 are also located on the same straight line, so that the edge of the chrome plate with even glue can be stably connected with the rotating wheels 30 on the first protruding portion 211, and meanwhile, the edge of the chrome plate with even glue can also be stably connected with the rotating wheels 30 on the second protruding portion 212; more specifically, two rotating wheels 30 are installed on the second placing edge 22, the second placing edge 22 is provided with a third protruding portion 221 and a fourth protruding portion 222 which are used for installing the rotating wheels 30 in an upward protruding manner, the third protruding portion 221 and the fourth protruding portion 222 are arranged along the length direction of the second placing edge 22, and the top surface of the third protruding portion 221 and the top surface of the fourth protruding portion 222 are located on the same straight line, so when the rotating wheels 30 are installed on the third protruding portion 221 and the fourth protruding portion 222 respectively, the rotating wheels 30 on the third protruding portion 221 and the rotating wheels 30 on the fourth protruding portion 222 are also located on the same straight line, so that the edge of the chrome plate can be stably connected with the rotating wheels 30 on the third protruding portion 221, and the edge of the chrome plate can also be stably connected with the rotating wheels 30 on the fourth protruding portion 222. Of course, in other embodiments, the number of the rotating wheels 30 may be two, three, or more than four by those skilled in the art, and is not limited thereto.
Referring to fig. 2 and 3, the outer side wall of the rotating wheel 30 is recessed inward to form a ring-shaped placing portion 31 for placing the chrome plate, and the left and right side walls of the placing portion 31 are perpendicular to each other. Therefore, when the leveling chrome plate is placed on the placing part 31 of the rotating wheel 30, the leveling chrome plate abuts against the left and right side walls 311 and 312 of the placing part 31 so that the leveling chrome plate can be stably placed. For example, the rotating wheel 30 is made of a peek material, but is not limited thereto.
Referring to fig. 1 to 4, the apparatus 100 further includes a reinforcing plate 40 for stably supporting the supporting plate 20 on the fixing plate 10, the reinforcing plate 40 is obliquely fixed between the supporting plate 20 and the fixing plate 10, at least two reinforcing plates 40 are provided, and the two reinforcing plates 40 are respectively disposed at two sides of the installation space 20a. The connection between the support plate 20 and the fixing plate 10 can be reinforced by the reinforcing plate 40.
Referring to fig. 1, the end of the first placing side 21 is connected to the head of the second placing side 22, the first protruding portion 211 is located at the head of the first placing side 21, the second protruding portion 212 is located at a distance from the end of the first placing side 21, the third protruding portion 221 is located at a distance from the head of the second placing side 22, and the fourth protruding portion 222 is located at the end of the second placing side 22. Specifically, the first protrusion 211 includes a first top surface 2111, a first side wall 2112 and a second side wall 2113, the first side wall 2112 and the second side wall 2113 are respectively located on both sides of the first top surface 2111, the first side wall 2112 is located on a side of the first top surface 2111 facing away from the second protrusion 212, and the first side wall 2112 and the first top surface 2111 are perpendicular to each other; more specifically, the fourth protruding portion 222 includes a second top surface 2221, a third side wall 2222, and a fourth side wall 2223, the third side wall 2222 and the fourth side wall 2223 are respectively located at two sides of the second top surface 2221, the fourth side wall 2223 is located at a side of the second top surface 2221 opposite to the third protruding portion 221, and the fourth side wall 2223 and the second top surface 2221 are perpendicular to each other.
Referring to fig. 1 and 5, the uniform-thickness chrome plate inspection apparatus 100 further includes a base 50 for supporting the fixing plate 10, and a supporting surface of the base 50 is provided with a plurality of flow guiding holes 50a. Preferably, the base 50 includes a supporting plate 51 and a fixing frame 52, the supporting plate 51 is fixed on the top of the fixing frame 52, the guiding hole 50a penetrates the supporting plate 51 along the vertical direction, and the fixing plate 10 is placed on the supporting plate 51. The flow guide holes 50a are formed in the support plate 51, so that the weight of the support plate 51 can be reduced, air can be guided, and the air in the installation space 20a can be kept clean.
The invention has the beneficial effects that: because the bottoms of the two support plates 20 are fixed on the fixed plate 10, the top of the support plate 20 comprises a first placing edge 21 and a second placing edge 22 which are mutually at right angles, the two support plates 20 are mutually parallel and are arranged at intervals to form an installation space 20a for installing the rotating wheel 30, the first placing edges 21 of the two support plates 20 are aligned, the second placing edges 22 of the two support plates 20 are aligned, at least two rotating wheels 30 are arranged, and the rotating wheels 30 are positioned in the installation space 20a, the side edges of the glue homogenizing chrome plate or the glass substrate can be placed on the two rotating wheels 30 in actual use, so that the glue homogenizing chrome plate or the glass substrate can be stably placed, and liquid on the glue homogenizing chrome plate or the glass substrate can fall from the installation space 20 a; meanwhile, one of the two rotating wheels 30 is rotatably installed on the first placing edge 21 and protrudes out of the top surface of the first placing edge 21, and the other rotating wheel 30 is installed on the second placing edge 22 and protrudes out of the top surface of the second placing edge 22, so that when the side edge of the glue spreading chrome plate or the glass substrate is placed on the two rotating wheels 30, the edge part of the glue spreading chrome plate or the glass substrate cannot collide with the support plate 20 to be damaged.
The present invention is not limited to the above embodiments, and other devices for inspecting a homogenized chrome plate, which are obtained by using the same or similar structures, devices, processes or methods as those of the above embodiments of the present invention, are within the scope of the present invention.
Claims (10)
1. The utility model provides a chromium version inspection device is glued to spin, its characterized in that: including fixed plate, two backup pads and with the backup pad is rotationally connected rotates the wheel, two the bottom of backup pad all is fixed in on the fixed plate, the top of backup pad is including the first limit of placing and the second of each other becoming the right angle places the limit, two the backup pad is parallel to each other and is the interval and arranges in order to be formed with the confession rotate the installation space of taking turns installation usefulness, two the first limit of placing of backup pad aligns mutually, two the second of backup pad is placed the limit and aligns mutually, it has two at least to rotate the wheel, it is located to rotate the wheel in installation space, two it is rotationally install in to rotate one of the wheel first place the limit and protrusion in the first top surface of placing the limit, two it install in to rotate another person of wheel the second place the limit and protrusion in the top surface on limit is placed to the second.
2. The leveling chrome plate inspection apparatus according to claim 1, wherein: the two rotating wheels are installed on the first placing edge, a first protruding portion and a second protruding portion used for installing the rotating wheels are arranged on the first placing edge in an upward protruding mode, the first protruding portion and the second protruding portion are arranged along the length direction of the first placing edge, and the top face of the first protruding portion and the top face of the second protruding portion are located on the same straight line.
3. The leveling chrome plate inspection apparatus according to claim 2, wherein: the two rotating wheels are installed on the second placing edge, a third protruding portion and a fourth protruding portion used for installing the rotating wheels are arranged on the second placing edge in an upward protruding mode, the third protruding portion and the fourth protruding portion are arranged along the length direction of the second placing edge, and the top face of the third protruding portion and the top face of the fourth protruding portion are located on the same straight line.
4. The leveling chrome plate inspection apparatus according to claim 1, wherein: the outer side wall of the rotating wheel is inwards sunken to form an annular placing part for placing the uniform glue chromium plate, and the left side wall and the right side wall of the placing part are perpendicular to each other.
5. The leveling chrome plate inspection apparatus according to claim 1, wherein: the fixing plate is used for fixing the supporting plate on the fixing plate, the fixing plate is used for fixing the supporting plate on the fixing plate in a stable mode, the number of the fixing plates is at least two, and the two fixing plates are located on two sides of the installation space respectively.
6. The leveling chrome plate inspection apparatus of claim 3, wherein: the first end of placing the limit with the second is placed the head end of limit and is met, first bellying is located the first head end position department of placing the limit, the second bellying is located the first position department of placing the limit apart from its terminal certain distance, the third bellying is located the second is placed the position department of limit apart from its head end certain distance, the fourth bellying is located the second is placed the terminal position department of limit.
7. The leveling chrome plate inspection device according to claim 6, wherein: the first protruding portion comprises a first top face, a first side wall and a second side wall, the first side wall and the second side wall are located on two sides of the first top face respectively, the first side wall is located on one side, back to the second protruding portion, of the first top face, and the first side wall and the first top face are perpendicular to each other.
8. The leveling chrome plate inspection apparatus of claim 7, wherein: the fourth bulge comprises a second top surface, a third side wall and a fourth side wall, the third side wall and the fourth side wall are respectively located on two sides of the second top surface, the fourth side wall is located on one side, back to the third bulge, of the second top surface, and the fourth side wall and the second top surface are perpendicular to each other.
9. The leveling chrome plate inspection apparatus according to claim 1, wherein: the bearing surface of the base is provided with a plurality of flow guide holes.
10. The leveling chrome plate inspection apparatus of claim 9, wherein: the base comprises a bearing plate and a fixing frame, the bearing plate is fixed to the top of the fixing frame, the flow guide hole penetrates through the bearing plate in the vertical direction, and the fixing plate is placed on the bearing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010938646.XA CN111913347A (en) | 2020-09-09 | 2020-09-09 | Even gluey chromium version inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010938646.XA CN111913347A (en) | 2020-09-09 | 2020-09-09 | Even gluey chromium version inspection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111913347A true CN111913347A (en) | 2020-11-10 |
Family
ID=73267818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010938646.XA Pending CN111913347A (en) | 2020-09-09 | 2020-09-09 | Even gluey chromium version inspection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111913347A (en) |
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2020
- 2020-09-09 CN CN202010938646.XA patent/CN111913347A/en active Pending
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