CN111896498A - Porous silicon assembled micro-cavity biosensor - Google Patents
Porous silicon assembled micro-cavity biosensor Download PDFInfo
- Publication number
- CN111896498A CN111896498A CN202010776987.1A CN202010776987A CN111896498A CN 111896498 A CN111896498 A CN 111896498A CN 202010776987 A CN202010776987 A CN 202010776987A CN 111896498 A CN111896498 A CN 111896498A
- Authority
- CN
- China
- Prior art keywords
- porous silicon
- microcavity
- layer
- refractive index
- assembled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a porous silicon assembled micro-cavity biosensor, which is a common porous silicon biosensor consisting of an upper Bragg and a lower Bragg and a micro-cavity, in the process of biological detection, even biomolecules with very small size can only enter the depth of 1 mu m of the surface layer of porous silicon, and the biomolecules are difficult to reach the micro-cavity layer, so that the biological detection sensitivity of the actual porous silicon micro-cavity is lower than the theoretical value. In order to solve the problem, the invention discloses a porous silicon assembled micro-cavity biosensor, wherein the Bragg reflector at the upper part and the Bragg reflector at the lower part are separated, the Bragg device based on a quartz glass substrate is used for replacing the Bragg distribution at the upper part, and a micro-cavity and the Bragg device at the lower part are prepared by porous silicon, so that biomolecules can directly enter a micro-cavity layer. Since the biological molecules can easily enter the microcavity layer with larger holes, larger red shift or angular spectrum shift of the reflection spectrum can be caused, and the sensitivity of the porous silicon is improved.
Description
Technical Field
The invention relates to the technical field of biosensors, in particular to an assembled porous silicon micro-cavity biosensor.
Background
The porous silicon has the characteristics of large specific surface area, good biocompatibility, capability of being prepared into optical devices with various structures and the like, so that the porous silicon is widely applied to biosensors.
The porous silicon optical biosensor is divided into two types according to different detection mechanisms, wherein one type is a sensor based on fluorescent labels, and the sensor is mainly characterized by high sensitivity; the other is a sensor based on refractive index change, which is mainly characterized by biomolecular immunity. There have been reported to date, based on refractive index changes, the following: porous silicon optical biosensor with surface grating, Bragg, microcavity and other structures.
The Porous Silicon Microcavity (PSM) biosensor consists of two identical Bragg reflectors and a middle defect layer, and has high transmittance of a reflection spectrum defect peak and narrow half width of a transmission peak, so that the Porous Silicon Microcavity (PSM) biosensor has high sensitivity and is widely applied to detection of various sensitive element materials such as DNA, antigen-antibody, enzyme and the like. The porous silicon micro-cavity utilizes the change of refractive index of the porous silicon layer caused by the entrance of biological molecules into the porous silicon, and detects the change of a reflection spectrum or an angle spectrum caused by the change of the refractive index of the porous silicon layer, thereby achieving the aim of biological detection.
The theoretical analysis reported in the past is based on the fact that biomolecules can enter all layers, and the refractive index of each layer of porous silicon is caused to change identically. However, the experimental result has a large difference from the theory, which is represented by the increase of the full width at half maximum of the defect state of the reflection spectrum and the increase of the reflectivity of the defect state, which means that the detection sensitivity is far lower than the theoretical value. The reason for this is that the biomolecule is difficult to enter the deep layer of porous silicon, generally only enters the depth of about 1 μm, i.e. enters the partial region of porous silicon, the porous silicon photonic crystal is not fully utilized, and only the biomolecule enters the microcavity layer and the lower part, the refractive index is greatly changed, thus causing great difference between experiment and theory. With reference to fig. 5, theoretical analysis is performed by using a transfer matrix method, and assuming that the refractive index of each layer changes by 0.01 when biomolecules enter porous silicon, we study the influence of the biomolecules entering the front eight layers of the porous silicon microcavity, the front four layers of the microcavity layer and the lower half bragg reflector and all layers on the reflectance spectra, and the reflectance spectra are respectively red-shifted by 0.28nm, 3.5nm and 5.09nm, and the larger the red shift amount is, the higher the sensitivity is.
Therefore, it is necessary to develop an optical biosensor, which can make biomolecules directly enter the porous silicon microcavity layer and the bragg reflector below the porous silicon microcavity layer, thereby solving the problem that the sensitivity of the device is reduced because the biomolecules only enter several surface layers in the conventional porous silicon microcavity.
Disclosure of Invention
The invention aims to provide a porous silicon assembled micro-cavity biosensor to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a porous silicon assembled microcavity biosensor comprises an upper distribution Lag reflector, a microcavity layer and a lower Bragg reflector, wherein the upper distribution Lag reflector is a Bragg device based on quartz glass, the microcavity layer and the lower Bragg reflector are prepared from porous silicon, the upper distribution Lag reflector, the microcavity layer and the lower Bragg reflector are separated, and the upper distribution Lag reflector, the microcavity layer and the lower Bragg reflector are assembled by a fixed clamp.
Preferably, the preparation method comprises the following specific steps:
s1, corroding a porous silicon device with a first layer of a microcavity and a six-period Bragg reflector structure below the microcavity by an anodic electrochemical corrosion method;
s2, functionalizing the porous silicon corroded in the step S1 for coupling organisms;
s3, coupling the porous silicon functionalized in the step S2 with probe DNA, then dropwise adding the target DNA into a half area of the porous silicon, and using the other half area as a control to reduce the influence of the assembled air gap on biological detection;
s4, preparing a six-period Bragg reflector with quartz as a substrate in a sputtering coating mode, wherein the high-refractive-index layer and the low-refractive-index layer are respectively made of Al2O3And MgF2Make up ofThe refractive indexes are respectively 1.58 and 1.37, and the thicknesses are respectively 100.16nm and 115.51 nm;
s5, assembling the porous silicon prepared in the steps S1 and S2 and a Bragg reflector which takes quartz as a substrate by a fixed clamp to form an assembled micro-cavity structure.
S6, measuring the reflected light intensity of the assembled microcavity by using an angle spectrum method, wherein after biomolecules enter the porous silicon device, the refractive index of each layer is increased, the central wavelength of a defect state is increased, and before biological detection, the incident angle is adjusted to theta1When the wavelength of the defect state is the same as that of the incident wave, the light intensity reaches the minimum value, the refractive index is increased when the biological reaction occurs in the porous silicon microcavity layer, and the incident light is adjusted to theta again2The intensity of light is again minimized, and Δ θ is equal to θ according to the angle change2-θ1Variations in the concentration of added organisms can be obtained.
Preferably, the porous silicon in step 1 satisfies the following formula:
nHdH＝nLdL＝λC/4
nCdC＝mλC/2
wherein n isH，nLHigh and low refractive index, n, of Bragg mirror, respectivelyCIs the refractive index of the microcavity layer; dH，dLThickness of the high and low refractive index layers of the Bragg reflector, respectivelyCIs the thickness of the microcavity layer, λCThe micro-cavity layer has larger porosity and smaller refractive index, which is the central wavelength of the porous silicon micro-cavity and is beneficial to the entry of biological molecules.
The larger the value of m, the narrower the defect state full width at half maximum, the constant defect state center wavelength, and the quality factor Q (Q ═ ω)0/ω，ω0Is the resonant frequency and ω is the half-height linewidth). Considering the problems of preparation of porous silicon micro-cavities, resolution of experimental instruments, air gaps in assembly and the like in experiments, the thickness of the micro-cavity layer is not larger, the thickness is better, and the optimal value m is 2.
Preferably, the central wavelength of the porous silicon is 633nm, the thickness and the refractive index of the microcavity layer are 560.16nm and 1.13 respectively, the thickness of the high refractive index layer and the low refractive index layer of the lower Bragg reflector are 100.16nm and 140.04nm respectively, and the high refractive index and the low refractive index of the lower Bragg reflector are 1.58 and 1.13 respectively.
Preferably, in step 2, the porous silicon functionalization process comprises three processes of oxidation, silanization and glutaraldehyde.
Preferably, the porous silicon assembled microcavity in the step 5 needs to be assembled by a fixed clamp, and when biological detection is performed, the assembled microcavity is not easy to place due to a small sample chamber of a reflection spectrometer, and the angle of incident light cannot be well controlled, so that a measurement result has certain deviation. Therefore, the angle spectrum method in the step 6 can be used for conveniently carrying out biological detection on the sample, and can also be used for controlling the angle of incident light.
Preferably, in the step 6, the optical detection circuit is a light source, and the light source passes through a diaphragm, and is collimated and expanded by two lenses, so that the gaussian light emitted by the semiconductor laser is converted into approximate plane light, passes through another diaphragm, controls the size of a light spot, and finally reaches the surface of the assembled microcavity device.
Compared with the prior art, the invention has the beneficial effects that: a porous silicon assembled microcavity biosensor can enable biomolecules to directly enter a microcavity layer, solves the problem that the theoretical and experimental sensitivities of porous silicon microcavities are greatly different when biological detection is carried out, and can realize label-free low-cost biological detection.
Drawings
FIG. 1 is a reflection spectrum of a Bragg reflector made of quartz as a substrate according to the present invention;
FIG. 2 is a view showing the structure of an assembled micro chamber according to the present invention;
FIG. 3 is a diagram of the detection path of the porous silicon assembled microcavity of the present invention;
FIG. 4 is a relationship between an incident angle Δ θ and a biomolecule concentration Δ n in the porous silicon assembled microcavity test of the present invention;
FIG. 5 shows the reflection spectra of biomolecules respectively entering the first eight layers of the porous silicon microcavity, the microcavity layer, the first four layers of the Bragg layer and all the layers;
FIG. 6 is a relationship between an incident angle Δ θ and a shift Δ λ of a defect state wavelength in the detection of the porous silicon assembled microcavity according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, the present invention provides a technical solution: a porous silicon assembled microcavity biosensor comprises an upper distribution Lag reflector, a microcavity layer and a lower Bragg reflector, wherein the upper distribution Lag reflector is a Bragg device based on quartz glass, the microcavity layer and the lower Bragg reflector are prepared from porous silicon, the upper distribution Lag reflector, the microcavity layer and the lower Bragg reflector are separated, and the upper distribution Lag reflector, the microcavity layer and the lower Bragg reflector are assembled by a fixed clamp.
The application method comprises the following specific steps:
s1, preparing porous silicon by using<100>The P-type boron-doped monocrystalline silicon wafer with the crystal orientation has the thickness of 420 +/-10 mu m and the resistivity of 0.03-0.06 omega cm. And thoroughly cleaning the silicon wafer in an ultrasonic instrument by using acetone, absolute ethyl alcohol and deionized water for 10min respectively, and drying after removing surface impurities. Placing the dried silicon wafer in a reaction tank made of polytetrafluoroethylene, pouring a solution prepared from 40% hydrofluoric acid and anhydrous ethanol according to a ratio of 1:1 into a corrosion tank as an electrolyte, and alternately changing current density and corrosion time, wherein the current density of the high-refractive-index layer is set to be 60mA/cm2The etching time was 1.2s, and the current density of the low refractive index layer was set to 110mA/cm2The etching time was 1.0s, and the current density of the microcavity layer was set to 110mA/cm2The corrosion time is 4.0s, in order to supplement in timeFilling fluorine ion concentration, stopping for 3s after each dielectric layer is formed, repeatedly washing the corroded porous silicon by deionized water, and drying in a nitrogen environment. The total number of the dielectric layers is 13, the first layer is a microcavity, and a six-period bragg reflector is arranged below the first layer, as shown in fig. 2, 200 and 202 are upper and lower bragg reflectors, 201 is a microcavity layer, and 203 and 204 are a porous silicon low refractive index layer and a porous silicon high refractive index layer, respectively.
S2, functionalizing the porous silicon, namely putting the porous silicon obtained in the step 1 into a hydrogen peroxide solution with the concentration of 40%, putting the solution in a vacuum drying oven at 60 ℃ for 3 hours, taking out the solution, repeatedly washing the solution with deionized water, and drying the solution in an air environment. Soaking the oxidized porous silicon in 5% ATPES solution (prepared by mixing aminopropyltriethoxysilane, methanol and deionized water according to a ratio of 1:10: 10), taking out after 1 hour, repeatedly washing with a large amount of deionized water to remove residual ATPES solution, drying in an air environment, and baking in a vacuum drying oven at 100 ℃ for 10 min. Putting the porous silicon subjected to silanization treatment into a 2.5% glutaraldehyde solution (prepared from glutaraldehyde and deionized water according to the ratio of 1: 19) for 1h, taking out the porous silicon, removing redundant glutaraldehyde, repeatedly washing the porous silicon with a phosphate buffer solution and deionized water, wherein the central wavelength of the porous silicon is 633nm, the thicknesses and the refractive indexes of the microcavity layers are 560.16nm and 1.13 respectively, the thicknesses of the high refractive index layer and the low refractive index layer of the lower Bragg reflector are 100.16nm and 140.04nm respectively, and the high refractive index and the low refractive index of the lower Bragg reflector are 1.58 and 1.13 respectively.
And S3. coupling DNA biological probe fixation with target DNA, dripping 40 mu L of DNA with the concentration of 40 mu M onto the surface of the porous silicon by using a micropipette, standing in a constant temperature box at 37 ℃ for 2 hours, taking out, repeatedly washing by using phosphate buffer solution and deionized water, drying in an air environment, putting the porous silicon into ethanolamine hydrochloride solution with the concentration of 3M for sealing unreacted aldehyde groups, standing in the constant temperature box at 37 ℃ for 1 hour, repeatedly washing by using the phosphate buffer solution and the deionized water after taking out, and drying in the air environment. And (3) dropwise adding 10 mu L of target DNA on only one half of the surface of the porous silicon by using a micropipette, using the other half as a control experiment to reduce the influence of air gaps on the assembled microcavity in biological detection, placing the assembled microcavity in a thermostat at the temperature of 37 ℃ for 1h, taking out, repeatedly washing by using a phosphate buffer, and drying.
S4, preparing a Bragg reflector mainly composed of MgF with quartz as a substrate2And Al2O3The film is alternately made, and has 6 periods and 12 layers of MgF2And Al2O3Respectively having refractive indices of 1.37 and 1.58 and thicknesses of 115.51nm and 100.16nm, respectively, fig. 1 is a reflection spectrum, in combination with fig. 2, 205 is a bragg mirror with quartz as substrate, 206, 207 is composed of MgF2And Al2O3And (4) forming.
And S5, splicing the manufactured porous silicon and the Bragg reflector together by using a fixed clamp to form a spliced microcavity structure, wherein in combination with the graph of FIG. 2, 205 is a Bragg reflector taking quartz as a substrate, 209 is corroded porous silicon, and 208 is an air gap.
S6, performing biological detection by using an angle spectrum method, and placing the porous silicon assembled micro-cavity in a reflection angle spectrum detection light path; referring to fig. 3, in fig. 3, a he-ne laser is used as a light source 300, laser passes through a diaphragm 301, is collimated and expanded through two lenses 302 and 303, and when the laser passes through the diaphragm 304, the size of a light spot is controlled, an assembled microcavity is placed in the center of a rotary table 305 with scales, and reflected light of the assembled microcavity is received by a detector 306. Fig. 4 shows the relationship between the incident angle Δ θ and the biomolecule concentration Δ n, and it can be seen that the smaller the slope, the higher the device sensitivity, and therefore, the more advantageous the detection is when the incident angle is smaller.
Since the biological molecules can only enter the position with the depth of about 1 μm of the porous silicon, if the biological molecules enter the microcavity layer and the first four layers of the lower half Bragg, the refractive index of each layer is changed by 0.01, and the reflection spectrum of the biological molecules is obtained, as shown in FIG. 5, the red shift of the reflection spectrum is 3.5nm, the value of the red shift is far higher than that of the biological molecules entering the first eight layers of the upper half Bragg reflector and is slightly lower than that of the biological molecules entering all the layers. As is clear from fig. 4 and 6, the larger the biomolecule concentration Δ n, the larger the angle change Δ θ, and the larger the shift Δ λ of the defect peak. Therefore, the Bragg reflector enables the biological molecules to directly enter the porous silicon microcavity and below the porous silicon microcavity, and can effectively solve the problem that the sensitivity of the traditional microcavity is reduced because the biological molecules only enter a plurality of layers on the surface.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. A porous silicon assembled micro-cavity biosensor is characterized in that: the device comprises an upper distribution Lag reflector, a microcavity layer and a lower Bragg reflector, wherein the upper distribution Lag reflector is a Bragg device based on quartz glass, the microcavity layer and the lower Bragg reflector are prepared from porous silicon, the upper distribution Lag reflector, the microcavity layer and the lower Bragg reflector are separated, and the upper distribution Lag reflector, the microcavity layer and the lower Bragg reflector are partially assembled by a fixed clamp.
2. The porous silicon assembled micro-cavity biosensor as claimed in claim 1, wherein: the application method comprises the following specific steps:
s1, corroding a porous silicon device with a first layer of a microcavity and a six-period Bragg reflector structure below the microcavity by an anodic electrochemical corrosion method;
s2, functionalizing the porous silicon corroded in the step S1 for coupling organisms;
s3, coupling the porous silicon functionalized in the step S2 with probe DNA, then dropwise adding the target DNA into a half area of the porous silicon, and using the other half area as a control to reduce the influence of the assembled air gap on biological detection;
s4, preparing a six-period Bragg reflector with quartz as a substrate in a sputtering coating mode, wherein the high-refractive-index layer and the low-refractive-index layer are respectively made of Al2O3And MgF2The composition, the refractive index is 1.58 and 1.37 respectively, and the thickness is 100.16nm and 115.51nm respectively;
s5, splicing the porous silicon manufactured in the S1 and the S2 with a Bragg reflector which takes quartz as a substrate by using a fixed clamp to form a spliced micro-cavity structure;
s6, measuring the reflected light intensity of the assembled microcavity by using an angle spectrum method, wherein after biomolecules enter the porous silicon device, the refractive index of each layer is increased, the central wavelength of a defect state is increased, and before biological detection, the incident angle is adjusted to theta1When the wavelength of the defect state is the same as that of the incident wave, the light intensity reaches the minimum value, the refractive index is increased when the biological reaction occurs in the porous silicon microcavity layer, and the incident light is adjusted to theta again2The intensity of light is again minimized, and Δ θ is equal to θ according to the angle change2-θ1Variations in the concentration of added organisms can be obtained.
3. The porous silicon fabricated micro-cavity biosensor as claimed in claim 2, wherein: the porous device silicon in step 1 satisfies the following formula:
nHdH＝nLdL＝λC/4
nCdC＝mλC/2
wherein n isH，nLHigh and low refractive index, n, of Bragg mirror, respectivelyCIs the refractive index of the microcavity layer; dH，dLThickness of the high and low refractive index layers of the Bragg reflector, respectivelyCIs the thickness of the microcavity layer, λCThe central wavelength of the porous silicon microcavity is adopted, the microcavity layer has high porosity and low refractive index, and biomolecules can enter the microcavity layer easily;
the larger the value of m, the narrower the defect state full width at half maximum, the constant defect state center wavelength, and the quality factor Q (Q ═ ω)0/ω，ω0Is the resonant frequency, ω is the half-height linewidth); considering the problems of preparation of the porous silicon microcavity in the experiment, the resolution of the experimental instrument, air gaps in assembly and the like, the thickness of the microcavity layer is not larger, the better the microcavity layer is, and the optimal value m is 2.
4. The porous silicon fabricated micro-cavity biosensor as claimed in claim 2, wherein: the central wavelength of the porous silicon is 633nm, the thickness and the refractive index of the microcavity layer are 560.16nm and 1.13 respectively, the thickness of the high refractive index layer and the low refractive index layer of the lower Bragg reflector are 100.16nm and 140.04nm respectively, and the high refractive index layer and the low refractive index layer of the lower Bragg reflector are 1.58 and 1.13 respectively.
5. The porous silicon fabricated micro-cavity biosensor as claimed in claim 2, wherein: in the step 2, the porous silicon functionalization process comprises three processes of oxidation, silanization and glutaraldehyde.
6. The porous silicon fabricated micro-cavity biosensor as claimed in claim 2, wherein: the porous silicon assembled microcavity in the step 5 needs to be assembled by a fixed clamp, and when biological detection is performed, the assembled microcavity is not easy to place due to a small sample chamber of the reflection spectrometer and cannot well control the angle of incident light, so that a measurement result has certain deviation, biological detection can be conveniently performed on the assembled microcavity by adopting the angle spectroscopy in the step 6, and the angle of the incident light can be controlled.
7. The porous silicon fabricated micro-cavity biosensor as claimed in claim 2, wherein: and 6, the optical detection circuit is used for converting the Gaussian light emitted by the semiconductor laser into approximate plane light by collimating and expanding the light through two lenses by a light source through a diaphragm, controlling the size of a light spot through another diaphragm and finally reaching the surface of the assembled microcavity device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010776987.1A CN111896498B (en) | 2020-08-05 | 2020-08-05 | Application method of porous silicon assembled microcavity biosensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010776987.1A CN111896498B (en) | 2020-08-05 | 2020-08-05 | Application method of porous silicon assembled microcavity biosensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111896498A true CN111896498A (en) | 2020-11-06 |
| CN111896498B CN111896498B (en) | 2023-07-04 |
Family
ID=73245660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010776987.1A Active CN111896498B (en) | 2020-08-05 | 2020-08-05 | Application method of porous silicon assembled microcavity biosensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111896498B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6187592B1 (en) * | 1998-12-23 | 2001-02-13 | Sandia Corporation | Method for determining properties of red blood cells |
| WO2007107849A1 (en) * | 2006-03-21 | 2007-09-27 | Istituto Nazionale Di Ricerca Metrologica (Inrim) | Apparatus for the determination of ethanol content in liquid or aeriform substances and corresponding process |
| CN101710118A (en) * | 2009-12-03 | 2010-05-19 | 新疆大学 | Optical immunity detecting method based on porous silicon three-element structure microcavity |
| CN102313717A (en) * | 2011-08-02 | 2012-01-11 | 上海交通大学 | Porous silicon micro-cavity biosensor and its preparation method |
| US20150077747A1 (en) * | 2012-05-04 | 2015-03-19 | Isis Innovation Limited | Active chemical sensing using optical microcavity |
| CN205484001U (en) * | 2015-08-20 | 2016-08-17 | 苏州华和呼吸气体分析研究所有限公司 | Portable acetone scentometer of real -time on -line monitoring fat burning |
| CN106124412A (en) * | 2016-05-25 | 2016-11-16 | 黄辉 | The microbiological sensor of a kind of optically-based resonator cavity and detection method thereof |
| TWI592651B (en) * | 2016-08-31 | 2017-07-21 | 國立清華大學 | Metal ion detection equipment and metal ion detection method |
| CN109100308A (en) * | 2018-08-23 | 2018-12-28 | 江苏大学 | A kind of porous silicon biosensor and its design method based on Bloch surface wave |
| CN109950792A (en) * | 2019-03-29 | 2019-06-28 | 钟祥博谦信息科技有限公司 | The distributed bragg reflector mirror of gallium nitride and the preparation method of resonant cavity |
-
2020
- 2020-08-05 CN CN202010776987.1A patent/CN111896498B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6187592B1 (en) * | 1998-12-23 | 2001-02-13 | Sandia Corporation | Method for determining properties of red blood cells |
| WO2007107849A1 (en) * | 2006-03-21 | 2007-09-27 | Istituto Nazionale Di Ricerca Metrologica (Inrim) | Apparatus for the determination of ethanol content in liquid or aeriform substances and corresponding process |
| CN101710118A (en) * | 2009-12-03 | 2010-05-19 | 新疆大学 | Optical immunity detecting method based on porous silicon three-element structure microcavity |
| CN102313717A (en) * | 2011-08-02 | 2012-01-11 | 上海交通大学 | Porous silicon micro-cavity biosensor and its preparation method |
| US20150077747A1 (en) * | 2012-05-04 | 2015-03-19 | Isis Innovation Limited | Active chemical sensing using optical microcavity |
| CN205484001U (en) * | 2015-08-20 | 2016-08-17 | 苏州华和呼吸气体分析研究所有限公司 | Portable acetone scentometer of real -time on -line monitoring fat burning |
| CN106124412A (en) * | 2016-05-25 | 2016-11-16 | 黄辉 | The microbiological sensor of a kind of optically-based resonator cavity and detection method thereof |
| TWI592651B (en) * | 2016-08-31 | 2017-07-21 | 國立清華大學 | Metal ion detection equipment and metal ion detection method |
| CN109100308A (en) * | 2018-08-23 | 2018-12-28 | 江苏大学 | A kind of porous silicon biosensor and its design method based on Bloch surface wave |
| CN109950792A (en) * | 2019-03-29 | 2019-06-28 | 钟祥博谦信息科技有限公司 | The distributed bragg reflector mirror of gallium nitride and the preparation method of resonant cavity |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111896498B (en) | 2023-07-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Auguié et al. | Tamm plasmon resonance in mesoporous multilayers: toward a sensing application | |
| Chen et al. | Wide range refractive index measurement using a multi-angle tilted fiber Bragg grating | |
| US8268637B2 (en) | Label-free biosensors based upon distributed feedback laser | |
| Bradshaw et al. | Planar integrated optical waveguide spectroscopy | |
| Guo et al. | Hyperboloid‐Drum Microdisk Laser Biosensors for Ultrasensitive Detection of Human IgG | |
| CN109856087B (en) | Sensing chip and preparation method, detection system and detection method thereof | |
| WO2005019798A2 (en) | Biochemical sensors with micro-resonators | |
| JPWO2005078415A1 (en) | Surface plasmon resonance sensor | |
| EP0404900A1 (en) | Improvements in or relating to optical biosensors | |
| US11619580B2 (en) | Resonator-based ion-selective sensor | |
| Laplatine et al. | Silicon photonic olfactory sensor based on an array of 64 biofunctionalized Mach-Zehnder interferometers | |
| CN104914072B (en) | A kind of detection method of Porous silicon photonic Crystal structures biochip | |
| US20130063717A1 (en) | Laminated structure for measuring reflected light intensity, device containing laminated structure for measuring reflected light intensity, and method for measuring film thickness and/or mass and/or viscosity of thin film | |
| Zhang et al. | Biological detection based on the transmitted light image from a porous silicon microcavity | |
| Gryga et al. | Narrow Tamm resonances in one-dimensional photonic crystals employed in sensor applications | |
| CN111896498B (en) | Application method of porous silicon assembled microcavity biosensor | |
| Visser et al. | Refractive index sensing in the visible/NIR spectrum using silicon nanopillar arrays | |
| Burke et al. | Design and fabrication of enhanced polymer waveguide platforms for absorption-based optical chemical sensors | |
| Cheng et al. | Double slot micro ring resonators with inner wall angular gratings as ultra-sensitive biochemical sensors | |
| CN111208060A (en) | Sensing chip and preparation method, detection system and detection method thereof | |
| Delezoide et al. | Vertically coupled polymer microresonators for optofluidic label-free biosensors | |
| WO2013038830A1 (en) | Spr sensor cell and spr sensor | |
| Sun et al. | A biosensor based on an assembled porous silicon microcavity | |
| Bonneville et al. | Hybrid silicon-tellurium-dioxide DBR resonators coated in PMMA for biological sensing | |
| Zhang et al. | Research on biological detection based on reflected light images of a porous silicon Bragg mirror |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |