CN111889323A - Automatic film scraping equipment capable of performing vacuum/gas modification treatment and operation method thereof - Google Patents
Automatic film scraping equipment capable of performing vacuum/gas modification treatment and operation method thereof Download PDFInfo
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- CN111889323A CN111889323A CN202010751669.XA CN202010751669A CN111889323A CN 111889323 A CN111889323 A CN 111889323A CN 202010751669 A CN202010751669 A CN 202010751669A CN 111889323 A CN111889323 A CN 111889323A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/04—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades
- B05C11/041—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades characterised by means for positioning, loading, or deforming the blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/04—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades
- B05C11/048—Scrapers, i.e. metering blades having their edge oriented in the upstream direction in order to provide a reverse angle of attack
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0218—Pretreatment, e.g. heating the substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
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Abstract
The invention discloses automatic film scraping equipment capable of performing vacuum/gas modification treatment and a control method thereof. According to the invention, vacuum/special gas modification treatment and a film scraping technology are combined, effective regulation and control of film forming appearance, thickness, physicochemical properties and the like of single solution or blended solution in a blade coating manner are realized by optimizing the film scraping speed, the film forming temperature, the film modification, the pressure in a cabin and the like, so that the optimal film quality is formed, the performance of various devices is greatly improved, and the photoelectric performance of the devices is remarkably improved. The equipment can maintain the repeatability of blade coating film formation by automatic operation, and can be widely applied to the field of large-area preparation of various organic/inorganic semiconductor optoelectronic devices of different types.
Description
Technical Field
The invention relates to the technical field of solution film forming equipment, in particular to automatic film scraping equipment capable of performing vacuum/gas modification treatment and an operation method thereof.
Background
The traditional film scraping technique is to use a manual or simple mechanical control to advance a scraper which pushes the solution, thereby forming a liquid film. For high boiling point solvent, it is easy that after the film scraping is completed, the solution is not completely dried, and the flowing and aggregation of the liquid film easily causes the film formation thickness to be uneven, the appearance to be poor and the repeatability to be poor.
The Chinese patent with application number 201120518929.5 discloses a flat film scraper, which comprises a frame, a front panel, a side panel base and a support column, and is characterized in that; the screw rod seat and the first motor are fixed on the base, the screw rod is installed in the screw rod seat, the first motor is connected with the screw rod through the coupler, the screw rod outer sleeve is connected with the stroke block, the push rod frame is fixed on the stroke block, the heat insulation plate is fixed on the support column, the electric heating plate and the heat conduction plate are sequentially arranged on the heat insulation plate, the push rod fixed on the push rod frame is arranged above the heat conduction plate, and the scraper pressing device is further arranged on the push rod frame. The utility model is simple in operation, can prepare that thickness is even, the error is little, the precision is high, and the large tracts of land film of shape rule can adjust film forming temperature according to the demand, and substrate surface temperature is even, can directly arrange in after the film forming and scrape thermal treatment on the membrane machine, avoids moving the damage that the film substrate carries out thermal treatment and brings after scraping the membrane in the past.
The utility model discloses a chinese utility model patent of application number 200820180253.1 discloses a high accuracy scientific research is with small-size dull and stereotyped knifing machine mainly comprises base, support frame, lamina membranacea, scraper, lamina membranacea elevating gear. The automatic film casting and scraping device and the infrared heating temperature control device are further arranged, so that the control of the temperature conditions in the automatic and uniform film casting and scraping process and the film making process can be realized. The utility model discloses a can realize that the accurate control membrane is thick and other membrane manufacturing process conditions, guarantee the requirement of membrane repeatability to satisfy the needs of consumption scientific research membrane. Especially, the diaphragm lifting device utilizes the principles of inclined plane transmission, screw nut transmission and wheel shaft, can realize the high-precision and ultrathin film making, and the technology is not only suitable for scientific research, but also can be popularized to the industrial application field and applied to a large-scale flat-plate film scraper.
The Chinese patent with application number 201310013291.3 discloses an intelligent flat film scraping machine, which solves the problem that automatic operation of a machine replaces manual operation in the fields of chemical industrial production, scientific research, teaching and the like. The intelligent flat film scraping machine can perform functions of scraper speed regulation, scraper temperature setting and control, film scraping thickness regulation and the like. The technical key lies in the thickness precision control and temperature control of the film. The invention has realized the requirement of the intelligent flat film scraper in the test, the film thickness can be adjusted to 0.1mm precision, the temperature control deviation is within 2 ℃, and the scraper speed can be adjusted.
The reported film scraping machine can only scrape the film under the atmospheric condition, cannot accelerate film forming under the low-pressure condition, or utilizes special gas to modify and treat the film in the drying process, so that the film scraping quality is difficult to ensure or the film is modified in the film scraping process, and the application range of the film scraping machine is limited.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, provides automatic film scraping equipment capable of performing vacuum/gas modification treatment, and solves the problem that a film scraping machine cannot perform accelerated film forming under a low-pressure condition.
The technical scheme of the invention is as follows: an automatic film scraping device capable of performing vacuum/gas modification treatment comprises a film scraping unit, a vacuum low-pressure/special gas modification treatment unit, a fixed film forming unit, a control unit, a transmission unit and a temperature control unit;
the film scraping unit comprises a scraper frame and a scraper, and the scraper is arranged on the scraper frame;
the transmission unit comprises a rack, a stepping motor and a crawler, the stepping motor and the crawler are respectively installed on the rack, the stepping motor is used for driving the crawler to run back and forth, and the scraper frame is connected with the crawler;
the vacuum low-pressure/special gas modification processing unit comprises a vacuum chamber, a chamber door, an air exhaust electromagnetic valve and a vacuum degree sensor, wherein the vacuum chamber is arranged above the rack, the vacuum chamber is provided with the air exhaust electromagnetic valve, the vacuum degree sensor is arranged in the vacuum chamber and is used for detecting the vacuum degree in the vacuum chamber, the air exhaust electromagnetic valve is connected with an external vacuum pump and is used for exhausting gas in the vacuum chamber, and the chamber door is used for opening the vacuum chamber and placing a substrate;
the fixed film forming unit comprises a vacuum adsorption device and a liquid inlet electromagnetic valve, the vacuum adsorption device comprises a substrate adsorption hole and an adsorption external pipeline, the substrate adsorption hole is formed in the bottom of the vacuum chamber, the substrate is placed on the substrate adsorption hole, one end of the adsorption external pipeline is connected with the substrate adsorption hole, the other end of the adsorption external pipeline is connected with an external vacuum pump, one end of the liquid inlet electromagnetic valve is connected with the vacuum chamber, and the other end of the liquid inlet electromagnetic valve is connected with an external liquid inlet pipeline;
the temperature control unit comprises a heating sheet and a temperature sensor, the heating sheet is positioned between the vacuum chamber and the rack, the heating sheet comprises a heat transfer layer, a heat insulation layer and an electric heating wire, the electric heating wire is clamped between the heat transfer layer and the heat insulation layer, the heat transfer layer is in contact with the bottom surface of the vacuum chamber, the temperature sensor is arranged at the bottom of the vacuum chamber and used for detecting the temperature of the bottom surface of the vacuum chamber, and the temperature sensor is electrically connected with the control unit;
step motor, the vacuum degree sensor, the solenoid valve bleeds, temperature sensor and feed liquor solenoid valve respectively with the control unit electric connection, the control unit is used for controlling step motor's rotational speed, vacuum degree sensor transmits the vacuum data in with the vacuum chamber to the control unit, the control unit opens and shuts according to vacuum data control bleed solenoid valve, temperature sensor transmits temperature data to the control unit, the control unit opens and shuts according to the opening and shutting of temperature data control heating plate, the control unit controls the feed liquor solenoid valve and opens and shuts, when the pressure in the vacuum chamber reaches the default, control center control feed liquor solenoid valve opens, make the automatic ration of solution in the outside feed liquor pipeline inhale the vacuum chamber through the inside and outside pressure difference in vacuum chamber, after the feed liquor volume reaches the predetermined solution volume, control center control feed liquor solenoid valve closes.
Further, the vacuum low-pressure/special gas modification processing unit further comprises a special gas inlet electromagnetic valve, the special gas inlet electromagnetic valve is installed in the vacuum chamber and used for being connected with external nitrogen, hydrogen, rare gas and organic solvent steam, and the special gas inlet electromagnetic valve is electrically connected with the control unit.
Further, be equipped with scraper adjusting part and screw thread slide rail on the scraper frame, be equipped with vertical micrometer caliper, horizontal micrometer caliper and scraper mounting groove on the scraper frame, the both ends of screw thread slide rail are installed to the scraper frame, and horizontal micrometer caliper and screw thread slide linkage, scraper mounting groove and screw thread slide rail pass through threaded connection, and the scraper passes through magnet and installs in the scraper mounting groove, and vertical micrometer caliper runs through scraper mounting groove and butt magnet from last to down. Through adjusting horizontal micrometer caliper, make scraper mounting groove along horizontal micrometer caliper seesaw, through adjusting vertical micrometer caliper, make magnet drive scraper up-and-down motion in vertical direction.
Further, the vertical adjustment range of the scraper in the scraper frame is 0-3000 μm, and the horizontal adjustment range is 0-1500 μm.
Furthermore, a coarse adjustment knob and a fine adjustment knob are respectively arranged on the vertical micrometer screw gauge and the horizontal micrometer screw gauge, the adjustment step length of the coarse adjustment knob is 20 micrometers, and the adjustment step length of the fine adjustment knob is 2 micrometers.
Further, the transmission unit further comprises a guide rail and a transmission platform, the two ends of the guide rail are fixed to the frame, the transmission platform is connected with the guide rail in a sliding mode, the crawler belt is connected with the transmission platform, the scraper frame further comprises a lower end connecting module, a lower end connecting hole is formed in the lower end connecting module, the lower end connecting hole is connected with the transmission platform through a bolt, the stepping motor is used for driving the crawler belt to run back and forth, the crawler belt drives the transmission platform to slide along the guide rail, and the transmission platform further drives the scraper frame to move.
Furthermore, two axial ends of the guide rail are respectively provided with a limit switch for controlling the reset position and the termination position of the scraper.
Further, a silica gel sealing strip is arranged between the cabin door and the vacuum cabin.
Further, the speed of the scraper is 0-300 mm/s.
The other technical scheme of the invention is as follows: the control method of the automatic film scraping equipment comprises the following steps:
step S1: opening the hatch door, placing the substrate above the substrate adsorption hole, and closing the hatch door;
step S2: opening an external vacuum pump and an air exhaust electromagnetic valve, exhausting gas in a vacuum cavity, adsorbing the substrate by an adsorption external pipeline, and controlling the air exhaust electromagnetic valve to stop working by a control unit when a vacuum degree sensor detects that the vacuum degree in the vacuum cabin meets a preset requirement;
step S3: the heating sheet heats the substrate, the temperature sensor detects the temperature of the substrate and transmits temperature data to the control center, and the control center controls the heating sheet to stop heating when the temperature of the substrate reaches a preset temperature;
step S4: the control center controls the liquid inlet electromagnetic valve to be opened, the solution in the external liquid inlet pipeline is automatically and quantitatively sucked into the vacuum chamber through the internal and external pressure difference of the vacuum chamber, and the liquid inlet electromagnetic valve is controlled to be closed by the control center after the liquid inlet amount reaches the preset solution volume;
step S5: and starting the stepping motor, driving the track to move by the stepping motor, driving the scraper frame to move by the track, and driving the scraper to scrape and coat the substrate to form a film by the scraper frame to move.
Compared with the prior art, the invention has the following beneficial effects:
the automatic film scraping equipment capable of performing vacuum/gas modification treatment solves the problems that the appearance phase of a film is poor, the film thickness is not uniform and accurate, the film is easily influenced by external factors and the like after the film is formed by a film scraping method in the fields of scientific research, production, teaching and the like. The invention realizes the industrial blade coating film forming production which is not easily influenced by the external environment, has good repeatability, shortens the evaporation time of the high boiling point solvent and can modify the film by utilizing the low pressure/special gas modification automatic control on the basis of the accurate control of the height of the scraper, the speed of the scraper, the temperature of the substrate and the like.
According to the automatic film scraping equipment capable of performing vacuum/gas modification treatment, the scraper adjusting assembly adopts the horizontal micrometer screw and the vertical micrometer screw to match with the magnet on the scraper, the position of the scraper is accurately controlled, the accurate film scraping thickness is adjusted, and the scraper adjusting assembly is accurately and controllably combined with low-pressure/special gas modification treatment, so that the time for forming a high-quality film is greatly shortened, the physicochemical modification of the film is realized, the automatic operation is favorable for improving the repeatability of the film forming, and the automatic film scraping equipment is very suitable for industrial flow operation.
Drawings
Fig. 1 is a schematic structural view of an automatic film scraping apparatus of the present invention.
Fig. 2 is a schematic view of the internal structure of the automatic film scraping apparatus of the present invention.
Fig. 3 is a schematic structural view of the transmission unit of the present invention.
Fig. 4 is a bottom view of the transmission unit of the present invention.
Figure 5 is a schematic view of the assembly of the doctor unit and the drive unit of the invention.
Fig. 6 is a schematic view of the internal structure of the doctor blade frame of the present invention.
1. The scraper comprises a scraper frame, 2. a temperature sensor, 3. a substrate adsorption hole, 5. a vacuum chamber, 6. a chamber door, 8. a silica gel sealing strip, 9. an air exhaust electromagnetic valve, 10. a liquid inlet electromagnetic valve, 11. a vertical spiral micrometer, 12. a horizontal spiral micrometer, 14. a heating piece, 15. an adsorption external pipeline, 16. a stepping motor, 17. a lower end connecting module, 18. a frame, 19. a limit switch, 20. a crawler belt, 23. a temperature control knob, 24. a special gas inlet electromagnetic valve, 25. a guide rail, 26. a vacuum degree sensor, 27. a transmission platform, 34. a threaded slide rail, 35. a scraper mounting groove and 36. a scraper.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Examples
As shown in fig. 1, the present embodiment provides an automatic film scraping apparatus capable of performing vacuum/gas modification treatment, which includes a film scraping unit, a vacuum low-pressure/special gas modification treatment unit, a fixed film forming unit, a control unit, a transmission unit and a temperature control unit, wherein a single chip microcomputer of the control unit adopts an STM32 development board F103C8T 6.
As shown in fig. 5 and 6, be equipped with scraper adjusting part and screw thread slide rail 34 on the scraper frame 1, be equipped with vertical micrometer screw measuring instrument 11, horizontal micrometer screw measuring instrument 12 and scraper mounting groove 35 on the scraper frame, the both ends of screw thread slide rail are installed to the scraper frame, horizontal micrometer screw measuring instrument and screw thread slide rail connection, the scraper mounting groove passes through threaded connection with the screw thread slide rail, scraper 36 passes through magnet and installs in the scraper mounting groove, vertical micrometer screw measuring instrument runs through scraper mounting groove and butt magnet from last to down. Through adjusting horizontal micrometer, make scraper mounting groove along screw thread slide rail seesaw, through adjusting vertical micrometer, make magnet drive scraper up-and-down motion in vertical direction. The vertical adjustment range of the scraper in the scraper frame is 0-3000 μm, and the horizontal adjustment range is 0-1500 μm. A coarse adjustment knob and a fine adjustment knob are respectively arranged on the vertical micrometer screw gauge and the horizontal micrometer screw gauge, the adjustment step length of the coarse adjustment knob is 20 micrometers, and the adjustment step length of the fine adjustment knob is 2 micrometers. The scraper frame further comprises a lower end connecting module 17, and a lower end connecting hole is formed in the lower end connecting module.
As shown in fig. 3, 4 and 5, the transmission unit comprises a frame 18, a stepping motor 16, a caterpillar track 20, a guide rail 25 and a transmission platform 27, wherein the stepping motor and the caterpillar track are respectively installed on the frame, the stepping motor is used for driving the caterpillar track to move back and forth, two ends of the guide rail are fixed to the frame, the transmission platform is connected with the guide rail in a sliding manner, the caterpillar track is connected with the transmission platform, a lower end connecting hole is connected with the transmission platform through a bolt, the stepping motor is used for driving the caterpillar track to move back and forth, the caterpillar track drives the transmission platform to slide along the guide rail, the transmission platform further drives the scraper frame to move, and; the two axial ends of the guide rail are respectively provided with a limit switch 19 for controlling the reset position and the stop position of the scraper, and the limit switch adopts a travel limit switch contact button KW11-3Z-2 and a straight shank tripod 5A.
As shown in fig. 1 and 2, the vacuum low-pressure/special gas modification processing unit includes a vacuum chamber 5, a chamber door 6, an air-extracting solenoid valve 9, a special gas-intake solenoid valve 24 and a vacuum degree sensor 26, the vacuum chamber is installed above the frame, the air-extracting solenoid valve and the special gas-intake solenoid valve are respectively arranged on the vacuum chamber, the vacuum degree sensor is arranged in the vacuum chamber, and the vacuum degree sensor is used for detecting the vacuum degreeDetecting the vacuum degree in the vacuum chamber, wherein an air exhaust solenoid valve is connected with an external vacuum pump and used for exhausting the air in the vacuum chamber and keeping the set pressure in the vacuum chamber between normal pressure and 10 DEG C-1And a certain constant value is set between Pa, the cabin door is used for opening the vacuum cabin and placing the substrate, a silica gel sealing strip 8 is arranged between the cabin door and the vacuum cabin, the special gas inlet electromagnetic valve is used for connecting external nitrogen, hydrogen, rare gas and organic solvent steam, the special gas inlet electromagnetic valve is electrically connected with the control unit, and the special gas inlet electromagnetic valve is used for meeting the modification requirement of blade coating film formation in a special environment. The scraper and the vacuum chamber are respectively made of anti-corrosion 304 stainless steel.
As shown in fig. 1 and 2, the fixed film forming unit includes a vacuum adsorption device and a liquid inlet electromagnetic valve 10, the vacuum adsorption device includes a substrate adsorption hole 3 and an adsorption external pipeline 15, the substrate adsorption hole is opened at the bottom of the vacuum chamber, the substrate is placed on the substrate adsorption hole, one end of the adsorption external pipeline is connected with the substrate adsorption hole, the other end is connected with an external vacuum pump, one end of the liquid inlet electromagnetic valve is connected with the vacuum chamber, the other end is connected with an external liquid inlet pipeline, and the vacuum pump adopts a micro direct current vacuum pump.
As shown in fig. 1 and 2, the temperature control unit includes a heating plate 14 and a temperature sensor 2, the heating plate is located between the vacuum chamber and the frame, the heating plate includes a heat transfer layer, a thermal insulation layer and an electric heating wire, the electric heating wire is clamped between the heat transfer layer and the thermal insulation layer, the heat transfer layer contacts with the bottom surface of the vacuum chamber, the temperature sensor is located at the bottom of the vacuum chamber for detecting the temperature of the bottom surface of the vacuum chamber, and the temperature sensor is electrically connected with the control unit. In this embodiment, the heat transfer layer is the silastic-layer, and the insulating layer is the aluminium silicate heat preservation, and the heating wire is nickel chromium alloy heating wire, and the circular telegram can heat, is equipped with temperature regulation knob 23 in the frame, can adjust the knifing temperature as required.
Step motor, the vacuum degree sensor, the solenoid valve bleeds, temperature sensor and feed liquor solenoid valve respectively with the control unit electric connection, the control unit is used for controlling step motor's rotational speed, vacuum degree sensor transmits the vacuum data in with the vacuum chamber to the control unit, the control unit opens and shuts according to vacuum data control bleed solenoid valve, temperature sensor transmits temperature data to the control unit, the control unit opens and shuts according to the opening and shutting of temperature data control heating plate, the control unit controls the feed liquor solenoid valve and opens and shuts, when the pressure in the vacuum chamber reaches the default, control center control feed liquor solenoid valve opens, make the automatic ration of solution in the outside feed liquor pipeline inhale the vacuum chamber through the inside and outside pressure difference in vacuum chamber, after the feed liquor volume reaches the predetermined solution volume, control center control feed liquor solenoid valve closes.
The control method of the automatic film scraping equipment comprises the following steps:
step S1: opening the hatch door, placing the substrate above the substrate adsorption hole, and closing the hatch door;
step S2: opening an external vacuum pump and an air exhaust electromagnetic valve, exhausting gas in a vacuum cavity, adsorbing the substrate by an adsorption external pipeline, and controlling the air exhaust electromagnetic valve to stop working by a control unit when a vacuum degree sensor detects that the vacuum degree in the vacuum cabin meets a preset requirement;
step S3: the heating sheet heats the substrate, the temperature sensor detects the temperature of the substrate and transmits temperature data to the control center, and the control center controls the heating sheet to stop heating when the temperature of the substrate reaches a preset temperature;
step S4: the control center controls the liquid inlet electromagnetic valve to be opened, the solution in the external liquid inlet pipeline is automatically and quantitatively sucked into the vacuum chamber through the internal and external pressure difference of the vacuum chamber, and the liquid inlet electromagnetic valve is controlled to be closed by the control center after the liquid inlet amount reaches the preset solution volume;
step S5: the stepping motor is started, the stepping motor drives the caterpillar track to move, the caterpillar track drives the transmission platform to move, the transmission platform drives the scraper frame to move, and the scraper frame moves to drive the scraper to scrape and coat the substrate to form a film.
As mentioned above, the present invention can be better realized, and the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention; all equivalent changes and modifications made according to the present disclosure are intended to be covered by the scope of the claims of the present invention.
Claims (10)
1. An automatic film scraping device capable of performing vacuum/gas modification treatment is characterized by comprising a film scraping unit, a vacuum low-pressure/special gas modification treatment unit, a fixed film forming unit, a control unit, a transmission unit and a temperature control unit;
the film scraping unit comprises a scraper frame and a scraper, and the scraper is arranged on the scraper frame;
the transmission unit comprises a rack, a stepping motor and a crawler, the stepping motor and the crawler are respectively installed on the rack, the stepping motor is used for driving the crawler to run back and forth, and the scraper frame is connected with the crawler;
the vacuum low-pressure/special gas modification processing unit comprises a vacuum chamber, a chamber door, an air exhaust electromagnetic valve and a vacuum degree sensor, wherein the vacuum chamber is arranged above the rack, the vacuum chamber is provided with the air exhaust electromagnetic valve, the vacuum degree sensor is arranged in the vacuum chamber and is used for detecting the vacuum degree in the vacuum chamber, the air exhaust electromagnetic valve is connected with an external vacuum pump and is used for exhausting gas in the vacuum chamber, and the chamber door is used for opening the vacuum chamber and placing a substrate;
the fixed film forming unit comprises a vacuum adsorption device and a liquid inlet electromagnetic valve, the vacuum adsorption device comprises a substrate adsorption hole and an adsorption external pipeline, the substrate adsorption hole is formed in the bottom of the vacuum chamber, the substrate is placed on the substrate adsorption hole, one end of the adsorption external pipeline is connected with the substrate adsorption hole, the other end of the adsorption external pipeline is connected with an external vacuum pump, one end of the liquid inlet electromagnetic valve is connected with the vacuum chamber, and the other end of the liquid inlet electromagnetic valve is connected with an external liquid inlet pipeline;
the temperature control unit comprises a heating sheet and a temperature sensor, the heating sheet is positioned between the vacuum chamber and the rack, the heating sheet comprises a heat transfer layer, a heat insulation layer and an electric heating wire, the electric heating wire is clamped between the heat transfer layer and the heat insulation layer, the heat transfer layer is in contact with the bottom surface of the vacuum chamber, the temperature sensor is arranged at the bottom of the vacuum chamber and used for detecting the temperature of the bottom surface of the vacuum chamber, and the temperature sensor is electrically connected with the control unit;
step motor, the vacuum degree sensor, the solenoid valve bleeds, temperature sensor and feed liquor solenoid valve respectively with the control unit electric connection, the control unit is used for controlling step motor's rotational speed, vacuum degree sensor transmits the vacuum data in with the vacuum chamber to the control unit, the control unit opens and shuts according to vacuum data control bleed solenoid valve, temperature sensor transmits temperature data to the control unit, the control unit opens and shuts according to the opening and shutting of temperature data control heating plate, the control unit controls the feed liquor solenoid valve and opens and shuts, when the pressure in the vacuum chamber reaches the default, control center control feed liquor solenoid valve opens, make the automatic ration of solution in the outside feed liquor pipeline inhale the vacuum chamber through the inside and outside pressure difference in vacuum chamber, after the feed liquor volume reaches the predetermined solution volume, control center control feed liquor solenoid valve closes.
2. The automatic film scraping equipment capable of vacuum/gas modification treatment according to claim 1, wherein the vacuum low-pressure/special gas modification treatment unit further comprises a special gas inlet solenoid valve, the special gas inlet solenoid valve is installed in the vacuum chamber and used for connecting external nitrogen, hydrogen, rare gas and organic solvent vapor, and the special gas inlet solenoid valve is electrically connected with the control unit.
3. The automatic film scraping device capable of vacuum/gas modification treatment according to claim 1, wherein the scraper frame is provided with a scraper adjusting assembly and a threaded sliding rail, the scraper frame is provided with a vertical micrometer caliper, a horizontal micrometer caliper and a scraper mounting groove, two ends of the threaded sliding rail are mounted to the scraper frame, the horizontal micrometer caliper is connected with the threaded sliding rail, the scraper mounting groove is in threaded connection with the threaded sliding rail, the scraper is mounted in the scraper mounting groove through a magnet, and the vertical micrometer caliper penetrates through the scraper mounting groove from top to bottom and abuts against the magnet.
4. The automatic film scraping apparatus capable of vacuum/gas modification processing according to claim 3, wherein the vertical adjustment range of the scraper in the scraper frame is 0-3000 μm, and the horizontal adjustment range is 0-1500 μm.
5. The automatic film scraping device capable of being subjected to vacuum/gas modification treatment according to claim 3, wherein the vertical micrometer screw and the horizontal micrometer screw are respectively provided with a coarse adjustment knob and a fine adjustment knob, the adjustment step size of the coarse adjustment knob is 20 μm, and the adjustment step size of the fine adjustment knob is 2 μm.
6. The automatic film scraping device capable of vacuum/gas modification treatment according to claim 1, wherein the transmission unit further comprises a guide rail and a transmission platform, two ends of the guide rail are fixed to the frame, the transmission platform is slidably connected with the guide rail, the caterpillar is connected with the transmission platform, the scraper frame further comprises a lower end connection module, a lower end connection hole is formed in the lower end connection module, the lower end connection hole is connected with the transmission platform through a bolt, the stepping motor is used for driving the caterpillar to move back and forth, the caterpillar drives the transmission platform to slide along the guide rail, and the transmission platform further drives the scraper frame to move.
7. The automatic film scraping equipment capable of realizing vacuum/gas modification treatment according to claim 6, wherein limit switches are respectively arranged at two axial ends of the guide rail.
8. The automatic wiped film apparatus of claim 1, wherein a silicone sealing strip is disposed between the chamber door and the vacuum chamber.
9. The automatic wiped film apparatus of claim 1, wherein the speed of the doctor blade is 0-300 mm/s.
10. The control method of an automatic film scraping apparatus as claimed in any one of claims 1 to 9, characterized by comprising the steps of:
step S1: opening the hatch door, placing the substrate above the substrate adsorption hole, and closing the hatch door;
step S2: opening an external vacuum pump and an air exhaust electromagnetic valve, exhausting gas in a vacuum cavity, adsorbing the substrate by an adsorption external pipeline, and controlling the air exhaust electromagnetic valve to stop working by a control unit when a vacuum degree sensor detects that the vacuum degree in the vacuum cabin meets a preset requirement;
step S3: the heating sheet heats the substrate, the temperature sensor detects the temperature of the substrate and transmits temperature data to the control center, and the control center controls the heating sheet to stop heating when the temperature of the substrate reaches a preset temperature;
step S4: the control center controls the liquid inlet electromagnetic valve to be opened, the solution in the external liquid inlet pipeline is automatically and quantitatively sucked into the vacuum chamber through the internal and external pressure difference of the vacuum chamber, and the liquid inlet electromagnetic valve is controlled to be closed by the control center after the liquid inlet amount reaches the preset solution volume;
step S5: and starting the stepping motor, driving the track to move by the stepping motor, driving the scraper frame to move by the track, and driving the scraper to scrape and coat the substrate to form a film by the scraper frame to move.
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