CN111879481A - Detection method for detecting water seepage of vacuum vapor deposition furnace - Google Patents
Detection method for detecting water seepage of vacuum vapor deposition furnace Download PDFInfo
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- CN111879481A CN111879481A CN202010663737.7A CN202010663737A CN111879481A CN 111879481 A CN111879481 A CN 111879481A CN 202010663737 A CN202010663737 A CN 202010663737A CN 111879481 A CN111879481 A CN 111879481A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
Abstract
The invention relates to a detection method for detecting water seepage of a vacuum vapor deposition furnace, which belongs to the technical field of vacuum vapor deposition furnaces, and only needs to utilize equipment of the vacuum furnace to detect the water seepage through a pressure rise rate, does not need other auxiliary equipment, and utilizes the pressure rise rate M1 in a normal use state to compare with the pressure rise rate M2 in an anhydrous state, when M1 is more than M2, the water in an interlayer of the furnace cover can be judged to influence the pressure rise rate, and a water seepage point is indicated; and when M1 is less than or equal to M2, determining that the furnace cover has no water seepage point. The method can quickly and accurately judge whether the vacuum furnace is infiltrated or not and judge the infiltration part of the vacuum furnace, thereby effectively avoiding blind and ineffective labor force caused by furnace disassembly.
Description
Technical Field
The invention relates to a detection method for detecting water seepage of a vacuum vapor deposition furnace, and belongs to the technical field of vacuum vapor deposition furnaces.
Background
A double-layer water-cooling interlayer structure is adopted at a plurality of positions in a vacuum vapor deposition furnace, such as a furnace cover, a furnace body and a furnace bottom, wherein each of the double-layer water-cooling interlayers is provided with an independent water-cooling loop, each of the double-layer water-cooling interlayers comprises an inner layer and an outer layer, the vacuum vapor deposition furnace works at a high temperature, the inner layer structure is easily affected by temperature and other factors to generate tiny cracks, so that water in the interlayer permeates into the furnace, the water can be directly gasified in the vacuum environment in the vacuum furnace due to the vacuum state of the environment in the furnace, the pressure change in the furnace is indirectly affected, the existing method for detecting water seepage of the vacuum furnace is observed by naked eyes after the furnace is disassembled, time and labor are wasted, and the water seepage position cannot be judged, so that the method for detecting the water seepage of the vacuum vapor deposition furnace is designed to be specially used for detecting.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a detection method for detecting water seepage of a vacuum vapor deposition furnace, which can judge whether water seeps in the vacuum furnace to the maximum extent or not and judge a water seepage part by using pressure rise rate comparison.
The invention adopts the following technical scheme:
a detection method for detecting water seepage of a vacuum vapor deposition furnace comprises the following steps:
step 1: firstly, water seepage detection is carried out on a furnace cover, and the method specifically comprises the following steps:
1.1: carrying out vacuumizing operation on the vacuum furnace by using a vacuum pump to enable the vacuum furnace to reach the final pressure, namely the lowest pressure, then closing a vacuum valve connecting the vacuum furnace and the vacuum pump, namely isolating the vacuum furnace from the vacuum pump, and measuring the pressure rise rate of the vacuum furnace within a certain time t1 to be M1 ═ delta P1/t1, wherein delta P1 is the pressure change value within a time t1, and the step is to obtain the pressure rise rate M1 in the normal use state;
1.2: closing a water inlet valve of a water cooling loop in the furnace cover interlayer, blowing water in the furnace cover interlayer by using high-pressure nitrogen, blowing from the water inlet valve to discharge the water in the furnace cover interlayer from a water outlet pipeline, completely blowing the water in the furnace cover interlayer, measuring the pressure rise rate within time t2 to be M2 ═ delta P2/t2, wherein the delta P2 is a pressure change value within time t2, and obtaining the pressure rise rate in the water-free state in the furnace cover water cooling loop;
1.3: when M1 is more than M2, the water in the interlayer of the furnace cover can be judged to influence the pressure rise rate of the interlayer, and a water seepage point is indicated;
1.4: when M1 is not more than M2, determining that the furnace cover has no water seepage point;
step 2: after the furnace cover and the furnace piece are detected, repeating the step 1, and detecting whether other vacuum components (such as a furnace body, a furnace bottom and the like) are subjected to water seepage by the same detection method;
the vacuum vapor deposition furnace is characterized in that a furnace cover, a furnace body and a furnace bottom of the vacuum vapor deposition furnace are respectively provided with an independent double-layer water-cooling interlayer, an independent water-cooling loop is arranged in each water-cooling interlayer, each double-layer water-cooling interlayer comprises an inner layer and an outer layer, water in the interlayers can permeate into the furnace to cause the change of the pressure in the furnace under the influence of temperature and other factors, and preferably, the inner layer is made of stainless steel, and the outer layer is made of carbon steel.
Preferably, t2 ═ t1, i.e.:
in step 1.3, when Δ P1 > - Δ P2, it can be determined that the water in the interlayer of the furnace cover has an influence on the pressure rise rate, indicating that there is a water seepage point, and the size of the water seepage point is determined according to the size of the difference between the pressure rise rate data (the difference between Δ P1 and Δ P2), and the larger Δ P1- Δ P2 is, the larger the water seepage point is;
in step 1.4, when the delta P1 is less than or equal to the delta P2, the furnace cover can be determined to have no water seepage point.
Preferably, t1 and t2 are both 10-30 min.
Preferably, in the detection process, the temperature difference in the vacuum furnace is controlled to be +/-15 ℃, and the pressure rise rate is influenced by too large temperature difference, so that the pressure rise rates M1 and M2 are maintained within a certain temperature difference range when measured twice.
Preferably, in step 1.2, the pressure of the high pressure nitrogen is 0.2 to 0.3 MPa.
The invention is not described in detail in the prior art.
The invention has the beneficial effects that:
the method is specially used for detecting the water seepage of the vacuum vapor deposition furnace, only equipment of the vacuum furnace is needed to be used for detecting the water seepage through the pressure rise rate, other auxiliary equipment is not needed, whether the water seepage exists in the vacuum furnace or not can be quickly and accurately judged by using the pressure rise rate comparison, and the water seepage part of the vacuum furnace can be judged, so that the blind and invalid labor force caused by the furnace dismantling is effectively avoided.
Drawings
FIG. 1 is a flow chart of the detection method of the present invention.
The specific implementation mode is as follows:
in order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific examples, but not limited thereto, and the present invention is not described in detail and is in accordance with the conventional techniques in the art.
Example 1:
a method for detecting water penetration of a vacuum vapor deposition furnace, as shown in fig. 1, comprising:
step 1: firstly, water seepage detection is carried out on a furnace cover, and the method specifically comprises the following steps:
1.1: carrying out vacuumizing operation on the vacuum furnace by using a vacuum pump to enable the vacuum furnace to reach the final pressure, namely the lowest pressure, closing a vacuum valve connecting the vacuum furnace and the vacuum pump, namely isolating the vacuum furnace from the vacuum pump, and measuring the pressure rise rate of the vacuum furnace within a certain time t1 to be M1 ═ delta P1/t1, wherein delta P1 is the pressure change value within a time t1, and the step is to obtain the pressure rise rate M1 in the normal use state;
1.2: closing a water inlet valve of a water cooling loop in the furnace cover interlayer, blowing water in the furnace cover interlayer by using high-pressure nitrogen, blowing from the water inlet valve to discharge the water in the furnace cover interlayer from a water outlet pipeline, completely blowing the water in the furnace cover interlayer, measuring the pressure rise rate within time t2 to be M2 ═ delta P2/t2, wherein the delta P2 is a pressure change value within time t2, and obtaining the pressure rise rate in the water-free state in the furnace cover water cooling loop;
1.3: when M1 is more than M2, the water in the interlayer of the furnace cover can be judged to influence the pressure rise rate of the interlayer, and a water seepage point is indicated;
1.4: when M1 is not more than M2, determining that the furnace cover has no water seepage point;
step 2: and (3) repeating the step (1) after the furnace cover and the furnace piece are detected, and detecting whether other vacuum components (such as a furnace body, a furnace bottom and the like) have water seepage by using the same detection method.
Example 2:
a detection method for detecting water seepage of a vacuum vapor deposition furnace is as shown in example 1, and is different from the vacuum vapor deposition furnace, namely the vacuum furnace, in that a furnace cover, a furnace body and a furnace bottom of the vacuum vapor deposition furnace are respectively provided with a double-layer water-cooling interlayer, an independent water-cooling loop is arranged in each water-cooling interlayer, each double-layer water-cooling interlayer comprises an inner layer and an outer layer, water in each interlayer can permeate into the furnace to cause pressure change in the furnace under the influence of temperature and other factors, the inner layer is made of stainless steel, and the outer layer is made of carbon steel.
Example 3:
a method for detecting water infiltration in a vacuum vapor deposition furnace, the structure of which is as in example 1, except that t 2-t 1-20 min, namely:
in step 1.3, when Δ P1 > - Δ P2, it can be determined that the water in the interlayer of the furnace cover has an influence on the pressure rise rate, indicating that there is a water seepage point, and the size of the water seepage point is determined according to the size of the difference between the pressure rise rate data (the difference between Δ P1 and Δ P2), and the larger Δ P1- Δ P2 is, the larger the water seepage point is;
in the step 1.4, when the delta P1 is less than or equal to the delta P2, the furnace cover can be determined to have no water seepage point;
in the detection process, the temperature difference in the vacuum furnace of the embodiment is controlled to be +/-5 ℃;
in step 1.2, the pressure of the high-pressure nitrogen is 0.2-0.3 MPa.
Experimental example:
the method of the embodiment 3 is adopted to carry out water seepage detection on a batch of vacuum furnaces (20), and then the existing method is adopted to disassemble the furnaces for verification, so that the verification shows that 19 samples in 20 samples in the detection results of the embodiment 3 are accurate in detection result, and the accuracy is as high as 95%.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (6)
1. A detection method for detecting water seepage of a vacuum vapor deposition furnace is characterized by comprising the following steps:
step 1: firstly, water seepage detection is carried out on a furnace cover, and the method specifically comprises the following steps:
1.1: vacuumizing the vacuum furnace by using a vacuum pump, then closing a vacuum valve connecting the vacuum furnace and the vacuum pump, namely isolating the vacuum furnace from the vacuum pump, and measuring the pressure rise rate of the vacuum furnace within a certain time t1 as M1 as delta P1/t1, wherein the delta P1 is the pressure change value within a time t 1;
1.2: closing a water inlet valve of a water cooling loop in the furnace cover interlayer, blowing water in the furnace cover interlayer by using high-pressure nitrogen, blowing from the water inlet valve to discharge the water in the furnace cover interlayer from a water outlet pipeline, completely blowing the water in the furnace cover interlayer, measuring the pressure rise rate within time t2 to be M2 ═ delta P2/t2, and measuring the delta P2 as a pressure change value within time t 2;
1.3: when M1 is larger than M2, judging that the water in the furnace cover interlayer influences the pressure rise rate of the furnace cover interlayer, and indicating that a water seepage point exists;
1.4: when M1 is not more than M2, determining that the furnace cover has no water seepage point;
step 2: and (3) after the furnace cover and the furnace piece are detected, repeating the step 1, and detecting whether other vacuum parts are infiltrated by water by the same detection method.
2. The method as claimed in claim 1, wherein the inner layer of the vacuum furnace is made of stainless steel and the outer layer of the vacuum furnace is made of carbon steel.
3. The method as claimed in claim 1, wherein t2 is t1, which is:
in step 1.3, when delta P1 > -delta P2, judging that water in an interlayer of the furnace cover has influence on the pressure rise rate of the interlayer, indicating that a water seepage point exists, judging the size of the water seepage point according to the size of a difference value between pressure rise rate data, wherein the larger the delta P1-delta P2 is, the larger the water seepage point is;
in step 1.4, when the delta P1 is less than or equal to the delta P2, the furnace cover is determined to have no water seepage point.
4. The method according to claim 3, wherein t1 and t2 are both 10-30 min.
5. The detecting method for detecting the water infiltration of a vacuum vapor deposition furnace as claimed in claim 4, wherein the temperature difference in the vacuum furnace is controlled to ± 15 ℃ during the detection.
6. The method as claimed in claim 1, wherein in step 1.2, the pressure of the high pressure nitrogen gas is 0.2-0.3 MPa.
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| CN202010663737.7A CN111879481A (en) | 2020-07-10 | 2020-07-10 | Detection method for detecting water seepage of vacuum vapor deposition furnace |
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| CN202010663737.7A CN111879481A (en) | 2020-07-10 | 2020-07-10 | Detection method for detecting water seepage of vacuum vapor deposition furnace |
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| CN1818594A (en) * | 2006-03-17 | 2006-08-16 | 邯郸钢铁股份有限公司 | Leakage-checking spacing method of blast furnace |
| FR2969287A1 (en) * | 2010-12-17 | 2012-06-22 | Alcatel Lucent | LEAK DETECTION DEVICE USING HYDROGEN AS TRACER GAS |
| CN202382912U (en) * | 2011-12-12 | 2012-08-15 | 中冶南方(武汉)威仕工业炉有限公司 | Leakage detector for annealing furnace water cooling heat exchanger |
| CN103604573A (en) * | 2013-11-05 | 2014-02-26 | 北京卫星环境工程研究所 | Vacuum container sectional pressure raising quantitative leakage rate test method |
| CN107796572A (en) * | 2017-10-18 | 2018-03-13 | 云南钛业股份有限公司 | A kind of quick method for determining to let out pipeline in furnace chamber |
-
2020
- 2020-07-10 CN CN202010663737.7A patent/CN111879481A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1818594A (en) * | 2006-03-17 | 2006-08-16 | 邯郸钢铁股份有限公司 | Leakage-checking spacing method of blast furnace |
| FR2969287A1 (en) * | 2010-12-17 | 2012-06-22 | Alcatel Lucent | LEAK DETECTION DEVICE USING HYDROGEN AS TRACER GAS |
| CN202382912U (en) * | 2011-12-12 | 2012-08-15 | 中冶南方(武汉)威仕工业炉有限公司 | Leakage detector for annealing furnace water cooling heat exchanger |
| CN103604573A (en) * | 2013-11-05 | 2014-02-26 | 北京卫星环境工程研究所 | Vacuum container sectional pressure raising quantitative leakage rate test method |
| CN107796572A (en) * | 2017-10-18 | 2018-03-13 | 云南钛业股份有限公司 | A kind of quick method for determining to let out pipeline in furnace chamber |
Non-Patent Citations (3)
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| 张故见等: "莱钢2＃750m3 高炉冷却壁检漏方法的改进", 《山东冶金》 * |
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Application publication date: 20201103 |