CN111872406A - Inductively coupled plasma powder production equipment and production process - Google Patents

Inductively coupled plasma powder production equipment and production process Download PDF

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Publication number
CN111872406A
CN111872406A CN202010706654.1A CN202010706654A CN111872406A CN 111872406 A CN111872406 A CN 111872406A CN 202010706654 A CN202010706654 A CN 202010706654A CN 111872406 A CN111872406 A CN 111872406A
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powder
gas
tank
protective gas
iron
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孙伟民
李风华
李家鑫
王庆文
孙靖远
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Henan Nengwei New Materials Technology Co ltd
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Henan Nengwei New Materials Technology Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/14—Making metallic powder or suspensions thereof using physical processes using electric discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B22F1/054—Nanosized particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/06—Metallic powder characterised by the shape of the particles
    • B22F1/065—Spherical particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma

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  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma Technology (AREA)

Abstract

An inductively coupled plasma powder production device comprises a protective gas circulating device, a protective gas pumping and charging device, a powder feeder, a host tank, a powder filtering and sorting tank and a nano powder collecting tank; the top of the main machine tank is provided with a plasma generator which is used for generating plasma flame; a powder feeding gun is arranged in the plasma generator, connected with the powder feeder and used for spraying the raw material iron body into the plasma flame; the protective gas circulating device comprises a compressor, a gas storage tank, a flowmeter and a gas purifying device, wherein the compressor is used for compressing inert protective gas in the equipment and storing the inert protective gas in the gas storage tank. A production process of Feia micron powder, which uses the powder production equipment. The powder production equipment can realize the continuous production of a large amount of submicron powder and has the characteristics of high production efficiency and low cost. The iron submicron powder obtained by the process has the characteristics of uniform particle size, narrow particle size distribution, good activity, good sphericization and high purity.

Description

Inductively coupled plasma powder production equipment and production process
Technical Field
The invention relates to the technical field of powder materials, in particular to inductively coupled plasma powder production equipment and a process for producing submicron powder of D50 metallic iron (Fe) with the particle size of 500-800 nm by using the equipment.
Background
The dimension range is 1-100 nm, and the material which is obviously different from the conventional material is called as nano material. The dimension range is 500-800 nm, and the material is called submicron material. Compared with nano materials, the submicron materials have large consumption and wider application, and are widely applied to the material fields of powder metallurgy products, high-temperature alloys, electrical engineering alloys, precision alloys, chemical products and the like.
The existing methods for preparing the iron submicron powder comprise an atomization method and a chemical method, wherein the iron submicron powder produced by the atomization method has low yield and uneven particles. The activity of the iron submicron powder obtained by the chemical method is low, and the use effect is influenced. Therefore, a production device and a production process for iron submicron powder capable of realizing mass production are needed.
Disclosure of Invention
In order to overcome the defects in the background art, the invention discloses inductively coupled plasma powder production equipment and a process for producing submicron powder of metal iron (Fe) with the particle size of 500-800 nm by using the equipment. The purpose is as follows: by using inductively coupled plasma powder production equipment and technology, the ferrous submicron powder and the ferrous nano powder which have uniform particles, good activity, low cost and higher yield are produced in batches.
In order to achieve the purpose, the invention adopts the following technical scheme:
an inductively coupled plasma powder production device comprises a protective gas circulating device, a protective gas pumping and charging device, a powder feeder, a host tank, a powder filtering and sorting tank and a nano powder collecting tank; wherein, a plasma generator is arranged on the top of the main machine tank and used for generating plasma flame; a powder feeding gun is arranged in the plasma generator, connected with the powder feeder and used for spraying the raw material iron body into the plasma flame; the protective gas circulating device comprises a compressor, a gas storage tank, a flowmeter and a gas purifying device, wherein the compressor is used for compressing inert protective gas in the equipment and storing the inert protective gas in the gas storage tank; the gas storage tank outputs four paths of inert protective gas through a flowmeter, wherein the inert protective gas comprises powder feeding gas connected with the powder feeder, ion gas and cooling gas connected with the plasma generator, and quenching gas connected with the main tank; each path of inert protective gas sequentially passes through the powder filtering and sorting tank, the nanometer powder collecting tank, the radiator and the gas purification device to flow back into the compressor, and the circulation is repeated; the protective gas pumping and filling device comprises a vacuum pump and an inert protective gas tank, wherein the vacuum pump is used for pumping out gas in the circulating system, and the inert protective gas tank is used for filling inert protective gas into the equipment.
Further improve technical scheme, be provided with the observation window on the lateral wall of host computer jar.
Further improves technical scheme, connects the vacuum respectively and receives the powder case at the bottom of host computer jar, powder filtration and separation jar, nanometer powder collecting tank, and the vacuum is received the powder case and is connected with the vacuum pump.
Further improves technical scheme, be provided with in the powder filters the sorting jar and be used for separating the sorting filter core of iron nanometer powder, indisputable submicron powder, still be provided with differential pressure transmitter and vibration pollen trap.
Further improves technical scheme, be provided with the filter core in the nanometer powder collecting tank, still be provided with differential pressure transmitter and blowback and clean the motor.
According to the further improved technical scheme, a dryer is arranged in the gas purification device, and silica gel or phosphorus pentoxide for adsorbing water vapor components in inert protective gas is placed in the dryer in a layered mode.
A production process of ferro submicron powder by an inductive coupling plasma method comprises the following steps:
the method comprises the following steps: starting a vacuum pump, vacuumizing the inside of inductively coupled plasma powder production equipment to enable the vacuum degree to reach 0.096-0.099 KPa, then injecting inert shielding gas, and starting a compressor to enable the inert shielding gas to circulate in the equipment;
step two: setting the pressure of a gas storage tank to be 0.2-0.5 MPa, and setting the pressure of inert protective gas in the equipment to be-5 KPa; igniting the plasma generator under high-frequency high-voltage electric excitation, and adjusting the flow rate of ionic gas to be 5-40L/min, the flow rate of cooling gas to be 20-160L/min, the flow rate of powder conveying gas to be 5-60L/min and the flow rate of quenching gas to be 20-200L/min through a flowmeter; setting the anode voltage to be 8-10 KV and the anode current to be 6-11A;
step three: after the plasma flame in the plasma generator is stabilized, starting the powder feeder, and spraying the raw material iron powder into the plasma flame from the powder feeder gun; observing plasma flame flow through an observation window, and generating a large amount of tail flames in a star-tailing shape, which shows that the raw material iron powder is partially gasified and is condensed through quenching gas to generate the ferrous submicron powder; the powder feeding amount of the powder feeder is adjusted to control the generation proportion of the Feia micron powder, if a large amount of steam appears, most of the raw material iron powder is completely gasified, the steam is condensed by quenching gas to generate the iron nano powder, and the powder feeding amount needs to be increased; if the number of the meteor trailing tail flames is reduced, the fact that most raw iron powder is not gasified is indicated, and the powder feeding amount needs to be reduced;
step four: under the drive of inert protective airflow, the mixture of the iron nano powder and the iron submicron powder sequentially enters a host tank, a powder filtering and sorting tank and a nano powder collecting tank for sorting; depositing iron submicron powder at the bottoms of the host tank and the powder filtering and sorting tank; the iron nano powder enters the nano powder collecting tank under the drive of inert protective gas flow and is deposited at the bottom of the nano powder collecting tank; then, packaging is finished through a vacuum powder collecting box; the inert protective gas enters the radiator to be cooled, enters the gas purification device to purify water vapor, is compressed by the compressor and then enters the gas storage tank to be recycled.
The technical scheme is further improved, and the inert protective gas is argon.
Due to the adoption of the technical scheme, compared with the background technology, the invention has the following beneficial effects: the purity of the inert protective gas in the circulating system is ensured.
1. According to the inductively coupled plasma powder production equipment, the independent protective gas pumping and filling device is arranged, so that gas in the circulating system can be pumped out without dead zones, the inert protective gas in the equipment is purified, and a high-purity inert protective gas environment is provided for subsequent production; the protective gas circulating device enables the inert protective gas to be recycled, so that the production and operation cost is reduced; the generation ratio of the iron submicron powder and the iron nano powder can be controlled by controlling the powder feeding amount and the anode voltage; the ferrous micron powder and the iron nano powder can be separated out in sequence through filtration, and the collection efficiency of the powder is high. The invention can realize the continuous production of a large amount of submicron powder and has the characteristics of high production efficiency and low cost.
2. The invention adopts high-frequency induction to excite argon in a plasma generator to form plasma flame, so that raw material iron powder flowing through the plasma flame is partially gasified, and most of ferrum submicron powder and a small amount of ferrum nanometer powder can be obtained after quenching separation. The iron submicron powder obtained by the process has the characteristics of uniform particle size, narrow particle size distribution, good activity, good sphericization and high purity.
3. The invention can control the generation proportion of the iron submicron powder and the iron nano powder by adjusting the powder feeding amount and the anode voltage of the powder feeder so as to meet the requirements of different users.
Drawings
FIG. 1 is a schematic flow chart of the present invention.
In the figure: 1. a compressor; 2. a gas storage tank; 3. a flow meter; 4. feeding powder gas; 5. an ionic gas; 6. cooling the gas; 7. quenching cold air; 8. a powder feeder; 9. a plasma generator; 10. a host tank; 11. a powder filtering and sorting tank; 12. a nano-powder collection tank; 13. a vacuum powder collecting box; 14. a heat sink; 15. a gas purification device; 16. a vacuum pump; 17. an inert protective gas tank; 18. and (4) a valve.
Detailed Description
Preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principle of the present invention, and are not intended to limit the scope of the present invention.
An inductively coupled plasma powder production apparatus, as shown in fig. 1, includes a shielding gas circulation device, a shielding gas pumping and charging device, a powder feeder 8, a host tank 10, a powder filtering and sorting tank 11, and a nano-powder collecting tank 12. Wherein, a plasma generator 9 is arranged on the top of the main machine tank 10. The upper end of the plasma generator is positioned outside the main tank 10, and the lower end is positioned inside the main tank 10. An induction coil is coaxially arranged outside the plasma generator, and the induction coil enables the plasma generator to generate plasma flame in the main machine tank 10 under the excitation of high-frequency voltage. In order to facilitate observation of the plasma flame, an observation window is provided on a side wall of the main body tank 10. A powder feeding gun is arranged in the plasma generator, and is connected with a powder feeding device 8 and used for spraying raw material iron bodies into the plasma flame to enable the raw material iron bodies to be partially gasified and to be condensed by quenching gas 7 to generate the Fei submicron powder.
The protective gas circulating device comprises a compressor 1, a gas storage tank 2, a flowmeter 3 and a gas purifying device 15, wherein the compressor 1 is used for compressing inert protective gas inside equipment and is stored in the gas storage tank 2. The gas storage tank 2 outputs four paths of inert protective gas through a flowmeter 3, wherein the inert protective gas comprises powder feeding gas 4 connected with a powder feeder 8, ionic gas 5 and cooling gas 6 connected with a plasma generator 9, and quenching gas 7 connected with a main tank 10. The flow meter 3 is used for metering and controlling the flow of each path of inert protective gas. The powder feeding gas 4 is used as powder feeding power to quantitatively blow out the raw material iron body from the powder feeder 8; the ion gas 5 is used as a medium for enabling the plasma generator 9 to generate plasma flame; the cooling gas 6 is used for cooling the plasma generator 9 and preventing the plasma generator 9 from being burnt at high temperature; the quenching air 7 is used for cold quenching the gasified raw material iron body in the main tank 10 to generate the low-grain-size iron nano powder and the iron submicron powder. Each path of inert protective gas sequentially passes through the powder filtering and sorting tank 11, the nanometer powder collecting tank 12, the radiator 14 and the gas purifying device 15 to flow back into the compressor 1 for repeated recycling.
In the powder production process by the inductively coupled plasma method, if impurity gases, such as oxygen, exist in the equipment, the impurity gases not only react with the raw material iron body at high temperature, but also damage a plasma generator. Therefore, the purity of the gas in the equipment must be ensured, and a high-purity inert protective gas environment is provided for subsequent production. At present, most of similar equipment adopts a compressor 1 to evacuate gas in the equipment, and after inert shielding gas is filled, the compressor 1 is used to circulate the inert shielding gas in the equipment. In this way, the compressor 1 appears to be used both for evacuating and for compressing the inert protective gas. However, in this design, there is a dead zone of evacuation, when the valve of the shielding gas circulation loop is closed during evacuation, the pipeline between the valve and the compressor 1 forms a dead zone of evacuation, and this dead zone cannot be evacuated, which may affect the purity of the inert shielding gas in the system. For this purpose, the device is provided with an independent protective gas pumping and charging device. The protective gas pumping and filling device comprises a vacuum pump 16 and an inert protective gas tank 17. The vacuum pump 16 is used for evacuating the gas in the circulating system, and the vacuum pump 16 is communicated in the circulating system through the valve 18, so that the gas in the circulating system can be evacuated without dead zones, and the purity of the inert protective gas in the circulating system is ensured. An inert protective gas tank 17 is communicated with the circulating system through a valve 18, and 7 is used for filling the inert protective gas into the equipment.
In order to collect the iron nano powder and the iron submicron powder in a system without leakage, the technical scheme is further improved, the bottom parts of the host tank 10, the powder filtering and sorting tank 11 and the nano powder collecting tank 12 are respectively connected with a vacuum powder collecting box 13, the vacuum powder collecting box 13 is connected with a vacuum pump 16, and the iron nano powder and the iron submicron powder are absorbed into the vacuum powder collecting box 13 through negative pressure generated by vacuum and are packaged.
In order to realize the separation of the iron nano powder and the iron submicron powder, the technical scheme is further improved, a separation filter element for separating the iron nano powder and the iron submicron powder is arranged in the powder filtering and separating tank 11, and a differential pressure transmitter and a vibration powder remover are also arranged. The separation filter element is used for separating and filtering the iron nano powder and the iron submicron powder, so that the iron nano powder with smaller particle size enters the nano powder collecting tank 12 through the separation filter element, and the iron submicron powder which cannot pass through the separation filter element falls into the powder filtering and separation tank 11. The differential pressure transmitter is used for sensing the differential pressure on the two sides of the sorting filter element and transmitting the differential pressure to the control system. And when the pressure difference between the two sides of the sorting filter element is increased, which indicates that the sorting filter element is blocked by powder, the control system opens the vibration powder remover to vibrate the sorting filter element, so that the powder attached to the sorting filter element is vibrated and dropped, and the sorting filter element works normally.
A filter element is arranged in the nano powder collecting tank 12 and is used for preventing the iron nano powder from entering the circulating system for internal circulation and damaging the cylinder body of the compressor 1. Similarly, a differential pressure transmitter and a back-flushing cleaning motor are arranged on the filter element. The back flushing cleaning motor is arranged on the air outlet side of the filter element, when the pressure difference between the two sides of the filter element is increased, the control system opens the back flushing cleaning motor, the back flushing cleaning motor blows air in the reverse direction of the filter element, iron nano powder attached to the filter element is blown off, and the normal work of the filter element is guaranteed.
The heat sink 14 is used to reduce the temperature of the inert shielding gas. A dryer is arranged in the gas purification device 15, and silica gel for adsorbing water vapor components in the inert shielding gas is layered in the dryer. The cooled and dried inert protective gas can be put into the system again for recycling after being compressed by the compressor 1.
In order to better disclose the production of the submicron powder, the invention also discloses a production process for producing the submicron powder with the metal iron (Fe) with the particle size D50 of 500-800 nm by using the inductively coupled plasma powder production equipment, wherein in the production process, the raw material iron body is the metal iron powder with the particle size of 5-100 mu m, and the inert protective gas used by the production equipment is argon. The production process comprises the following steps:
the method comprises the following steps: and starting a vacuum pump 16, vacuumizing the inside of the inductively coupled plasma powder production equipment to ensure that the vacuum degree reaches 0.096-0.099 KPa, then opening a valve 18 of an inert protective gas tank 17, injecting argon, and starting a compressor 1 to ensure that the argon circulates in the equipment. The purity of the argon in the equipment is crucial to the ignition combustion of plasma and the purity of powder production, so that in order to improve the purity of the argon in the equipment, the circulation of vacuumizing for many times and injecting the argon again can be performed, and the argon in the equipment is purified.
Step two: setting the pressure of a gas storage tank 2 to be 0.2-0.5 MPa and the pressure of argon in the equipment to be 5 KPa; under the excitation of high-frequency high-voltage electricity, the induction coil enables the plasma generator to be ignited, then the plasma generator is converted into an air storage tank 2 for air supply, the flow of ion gas 5 is adjusted to be 5-40L/min through a flowmeter 3, the flow of cooling gas 6 is adjusted to be 20-160L/min, the flow of powder feeding gas 4 is adjusted to be 5-60L/min, and the flow of quenching gas 7 is adjusted to be 20-200L/min; setting the anode voltage to be 8-10 KV and the anode current to be 6-11A.
Step three: after the plasma flame in the plasma generator 9 is stabilized, starting the powder feeder 8, and spraying the raw material iron powder into the plasma flame from the powder feeding gun; the plasma flame flow is observed through the observation window, a large number of meteor tailing-shaped tail flames appear, the raw iron powder is partially gasified, and the flow directions of the raw iron powder are different, so that the temperatures of the plasma flames in different areas are different, most of the raw iron powder flowing through the plasma flames is partially gasified, and only a small part of the raw iron powder is completely gasified. The raw material iron powder which is partially gasified is condensed by quenching gas 7 to generate the ferro-submicron powder; the completely gasified raw material iron powder is condensed by quenching gas 7 to generate iron nano powder. Under the action of the quenching gas 7, the iron nano powder, the iron submicron powder and the argon gas are mixed in the main tank 10 and are in an aerosol state.
The generation ratio of the iron submicron powder and the iron nano powder can be controlled by adjusting the powder feeding amount of the powder feeder 8 and the anode voltage; if a large amount of steam appears, most raw iron powder is completely gasified, most raw iron powder is condensed by the quenching gas 7 to generate iron nano powder, and the powder feeding amount needs to be increased or the anode voltage needs to be reduced; if the amount of the star-shaped tail flame is reduced, the fact that most of the raw iron powder is not gasified indicates that the powder feeding amount needs to be reduced or the anode voltage needs to be increased.
Step four: under the drive of argon gas flow, the mixture of the aerosol-shaped iron nano powder and the iron submicron powder sequentially enters a main machine tank 10, a powder filtering and sorting tank 11 and a nano powder collecting tank 12 for sorting. Iron submicron powder is deposited at the bottoms of the main machine tank 10 and the powder filtering and sorting tank 11; the iron nano powder enters the nano powder collecting tank 12 under the driving of inert protective gas flow and is deposited at the bottom of the nano powder collecting tank 12; then, the packaging is finished through a vacuum powder collecting box 13; the inert protective gas enters the radiator 14 for cooling, enters the gas purification device 15 for purifying water vapor, is compressed by the compressor 1 and then enters the gas storage tank 2 for recycling.
The present invention is not described in detail in the prior art. Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. An inductively coupled plasma powder production facility, characterized by: comprises a protective gas circulating device, a protective gas pumping and filling device, a powder feeder, a host tank, a powder filtering and sorting tank and a nanometer powder collecting tank; wherein, a plasma generator is arranged on the top of the main machine tank and used for generating plasma flame; a powder feeding gun is arranged in the plasma generator, connected with the powder feeder and used for spraying the raw material iron body into the plasma flame; the protective gas circulating device comprises a compressor, a gas storage tank, a flowmeter and a gas purifying device, wherein the compressor is used for compressing inert protective gas in the equipment and storing the inert protective gas in the gas storage tank; the gas storage tank outputs four paths of inert protective gas through a flowmeter, wherein the inert protective gas comprises powder feeding gas connected with the powder feeder, ion gas and cooling gas connected with the plasma generator, and quenching gas connected with the main tank; each path of inert protective gas sequentially passes through the powder filtering and sorting tank, the nanometer powder collecting tank, the radiator and the gas purification device to flow back into the compressor, and the circulation is repeated; the protective gas pumping and filling device comprises a vacuum pump and an inert protective gas tank, wherein the vacuum pump is used for pumping out gas in the circulating system, and the inert protective gas tank is used for filling inert protective gas into the equipment.
2. The inductively coupled plasma powder production apparatus of claim 1, wherein: an observation window is arranged on the side wall of the main machine tank.
3. The inductively coupled plasma powder production apparatus of claim 2, wherein: the bottom of the host tank, the bottom of the powder filtering and sorting tank and the bottom of the nanometer powder collecting tank are respectively connected with a vacuum powder collecting box, and the vacuum powder collecting box is connected with a vacuum pump.
4. The inductively coupled plasma powder production apparatus of claim 3, wherein: the powder filtering and sorting tank is internally provided with a sorting filter element for separating iron nano powder and iron submicron powder, and is also provided with a differential pressure transmitter and a vibration powder remover.
5. The inductively coupled plasma powder production apparatus of claim 4, wherein: a filter element, a differential pressure transmitter and a back flushing cleaning motor are arranged in the nano powder collecting tank.
6. The inductively coupled plasma powder producing apparatus as claimed in claim 5, wherein: and a dryer is arranged in the gas purification device, and silica gel or phosphorus pentoxide for adsorbing water vapor components in the inert shielding gas is layered in the dryer.
7. A process for producing Ferro-submicron powder by inductively coupled plasma method using the apparatus as claimed in claim 6, characterized in that: the method comprises the following steps:
the method comprises the following steps: starting a vacuum pump, vacuumizing the inside of inductively coupled plasma powder production equipment to enable the vacuum degree to reach 0.096-0.099 KPa, then injecting inert shielding gas, and starting a compressor to enable the inert shielding gas to circulate in the equipment;
step two: setting the pressure of a gas storage tank to be 0.2-0.5 MPa, and setting the pressure of inert protective gas in the equipment to be-5 KPa; igniting the plasma generator under high-frequency high-voltage electric excitation, and adjusting the flow rate of ionic gas to be 5-40L/min, the flow rate of cooling gas to be 20-160L/min, the flow rate of powder conveying gas to be 5-60L/min and the flow rate of quenching gas to be 20-200L/min through a flowmeter; setting the anode voltage to be 8-10 KV and the anode current to be 6-11A;
step three: after the plasma flame in the plasma generator is stabilized, starting the powder feeder, and spraying the raw material iron powder into the plasma flame from the powder feeder gun; observing plasma flame flow through an observation window, and generating a large amount of tail flames in a star-tailing shape, which shows that the raw material iron powder is partially gasified and is condensed through quenching gas to generate the ferrous submicron powder; the powder feeding amount of the powder feeder is adjusted to control the generation proportion of the Feia micron powder, if a large amount of steam appears, most of the raw material iron powder is completely gasified, the steam is condensed by quenching gas to generate the iron nano powder, and the powder feeding amount needs to be increased; if the number of the meteor trailing tail flames is reduced, the fact that most raw iron powder is not gasified is indicated, and the powder feeding amount needs to be reduced;
step four: under the drive of inert protective airflow, the mixture of the iron nano powder and the iron submicron powder sequentially enters a host tank, a powder filtering and sorting tank and a nano powder collecting tank for sorting; depositing iron submicron powder at the bottoms of the host tank and the powder filtering and sorting tank; the iron nano powder enters the nano powder collecting tank under the drive of inert protective gas flow and is deposited at the bottom of the nano powder collecting tank; then, packaging is finished through a vacuum powder collecting box; the inert protective gas enters the radiator to be cooled, enters the gas purification device to purify water vapor, is compressed by the compressor and then enters the gas storage tank to be recycled.
8. The process for producing fe submicron powder by inductively coupled plasma method as claimed in claim 7, wherein: the inert protective gas is argon.
CN202010706654.1A 2020-07-21 2020-07-21 Inductively coupled plasma powder production equipment and production process Pending CN111872406A (en)

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CN112408473A (en) * 2020-12-10 2021-02-26 合肥中航纳米技术发展有限公司 Method for preparing nano zirconium dioxide powder by using plasma arc
CN113056080A (en) * 2021-03-17 2021-06-29 合肥中航纳米技术发展有限公司 Plasma arc vapor phase method production system for preparing nano powder
CN113770350A (en) * 2021-09-15 2021-12-10 杭州新川新材料有限公司 Treatment facility of high dispersibility nickel powder

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