CN111871964A - Laser cleaning device and method for cleaning surface of workpiece with axisymmetric structure - Google Patents

Laser cleaning device and method for cleaning surface of workpiece with axisymmetric structure Download PDF

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Publication number
CN111871964A
CN111871964A CN202010523723.5A CN202010523723A CN111871964A CN 111871964 A CN111871964 A CN 111871964A CN 202010523723 A CN202010523723 A CN 202010523723A CN 111871964 A CN111871964 A CN 111871964A
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CN
China
Prior art keywords
cleaned
workpiece
cleaning
laser
color
Prior art date
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Pending
Application number
CN202010523723.5A
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Chinese (zh)
Inventor
袁田
付超
龚宇佳
应斯
王春明
张锦
王军
伍罡
余登
杨国泰
邓先生
方睿
黄小华
张虎
武文华
王昱晴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Sky Laser Tech Co ltd
China Electric Power Research Institute Co Ltd CEPRI
Original Assignee
Wuhan Sky Laser Tech Co ltd
China Electric Power Research Institute Co Ltd CEPRI
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Filing date
Publication date
Application filed by Wuhan Sky Laser Tech Co ltd, China Electric Power Research Institute Co Ltd CEPRI filed Critical Wuhan Sky Laser Tech Co ltd
Priority to CN202010523723.5A priority Critical patent/CN111871964A/en
Publication of CN111871964A publication Critical patent/CN111871964A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046Automatically focusing the laser beam
    • B23K26/048Automatically focusing the laser beam by controlling the distance between laser head and workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms

Abstract

The invention provides a laser cleaning device and a method for cleaning the surface of an axisymmetric workpiece, which comprises the following steps: determining the power of a laser cleaning head according to various parameters of a workpiece to be cleaned; acquiring related distance data to realize the focal length adjustment of the cleaning head; the method comprises the steps of obtaining color data of each annular area on the surface of a workpiece to be cleaned, determining the current annular area for color detection as the surface to be cleaned when the color data are different from preset values, and enabling a laser spot to move along the surface to be cleaned along a circular line track with a corresponding radius, so that the surface to be cleaned of the workpiece to be cleaned is cleaned. According to the invention, the vertical distance data between the distance sensor and the workpiece to be cleaned is obtained, the automatic focusing of the cleaning head is realized, the track of the area to be cleaned is determined by detecting the color of the surface of the workpiece to be cleaned, and the circular line light spot is controlled to move along the track by the galvanometer system, so that the workpiece to be cleaned is uniformly cleaned, and the laser cleaning efficiency and the cleaning quality are improved.

Description

Laser cleaning device and method for cleaning surface of workpiece with axisymmetric structure
Technical Field
The invention relates to the technical field of laser cleaning, in particular to a laser cleaning device and method for cleaning the surface of an axisymmetric workpiece.
Background
In the prior art, in order to keep enough energy of laser energy, spots focused from the optical fiber are generally small and only 70 μm to 400 μm, which results in too small cleaning area and reduced cleaning speed. Therefore, the focused spot light spot can be swung at a high speed through the oscillating mirror which rotates in a reciprocating manner to form a line light spot which is scanned at a high speed so as to increase the cleaning efficiency, according to the optical characteristics of the field lenses with different focal lengths, the laser beam generally has a focal depth of 1-4mm at the focusing position, the focal position change is ensured not to exceed the focal depth range during cleaning, but the method is not applicable to cleaning of axisymmetric objects with radian because the focal points of the light spot can not be all concentrated on the surface of the object to be cleaned when the surface of the arc-shaped object is cleaned, and the cleaning efficiency and the quality are seriously influenced.
Disclosure of Invention
In view of the above, the invention provides a laser cleaning method, a laser cleaning device and application, and aims to solve the problems of low cleaning efficiency and low quality when the laser cleaning is carried out on axisymmetric objects with radian in the prior art.
In one aspect, the invention provides a laser cleaning device, comprising a lifting platform, a cleaning head, a distance sensor, a color sensor and a control unit; the cleaning head is arranged on the lifting platform and comprises a galvanometer system and a laser generator; the distance sensor is arranged on the lifting platform and used for acquiring the vertical distance between the distance sensor and a workpiece to be cleaned with an axisymmetric structure; the color sensor is arranged on the lifting platform and used for acquiring color data of each annular area on the surface of the workpiece to be cleaned; the control unit is electrically connected with the distance sensor, the color sensor, the galvanometer system and the laser generator and is used for receiving vertical distance data acquired by the distance sensor and controlling the lifting platform to drive the cleaning head to move a preset distance in the vertical direction according to the distance data so as to realize the focus adjustment between the cleaning head and the workpiece to be cleaned; receiving color data acquired by the color sensor, and determining that the current annular area for color detection is the surface to be cleaned when the color data is different from a preset value; and controlling the galvanometer system to move, so that the light spot generated by the laser generator moves along the annular area along a circular line track with a corresponding radius, and the surface to be cleaned is cleaned.
Further, in the above laser cleaning apparatus, the lift platform includes: the vertical moving mechanism and the horizontal moving mechanism are connected; wherein, one side of the vertical moving mechanism is provided with a mounting seat, and the cleaning head is arranged on the mounting seat; horizontal migration mechanism keeps away from vertical migration mechanism's one end wears to locate the lateral wall of mount pad and extends to inside the mount pad, distance sensor with color sensor all sets up on the horizontal migration platform, and the two is located one side of cleaning head bottom.
Further, in the above laser cleaning apparatus, the vertical movement mechanism includes: the device comprises a screw rod, a sliding block, a sliding rail and a motor; the screw rod is arranged in the slide rail, the sliding block is sleeved on the screw rod and is connected with the mounting seat, and a thread matched with the screw rod thread is arranged on the contact surface of the sliding block and the screw rod; the output shaft of the motor is connected with the lead screw and used for driving the lead screw to rotate so as to convert the rotary motion of the lead screw into the linear motion of the sliding block and further drive the mounting seat to move along the vertical direction.
Further, in the laser cleaning device, the horizontal movement mechanism is an expansion link.
Further, the laser cleaning apparatus further includes: a cleaning table; the cleaning table is connected with the bottom of the lifting platform and used for bearing the workpiece to be cleaned.
According to the invention, the vertical distance data between the distance sensor and the workpiece to be cleaned is acquired through the distance sensor, so that the effective focus of the cleaning head is kept in the working process, the problem that the cleaning effect is poor due to insufficient laser energy caused by defocusing is avoided, the color sensing system with high-speed reaction can ensure the uniform cleaning effect of the surface of the equipment to be cleaned, on one hand, the laser cleaning technology can enter more industrial manufacturing fields, so that the objects which are inconvenient to clean in the past can be cleaned by using laser, on the other hand, the cleaning efficiency is improved, and the laser cleaning is integrated into the fields of automation equipment and intelligent manufacturing.
On the other hand, the invention also provides a laser cleaning method, which comprises the following steps: determining the power of a laser cleaning head according to various parameters of a workpiece to be cleaned; acquiring vertical distance data between a distance sensor and a workpiece to be cleaned, and realizing the focal length adjustment between the cleaning head and the workpiece to be cleaned; and acquiring color data of each annular area on the surface of the workpiece to be cleaned, and determining the current annular area for color detection as the surface to be cleaned when the color data is different from a preset value, so that the laser spot moves along the surface to be cleaned along a circular line track with a corresponding radius, thereby cleaning the surface to be cleaned of the workpiece to be cleaned.
Further, in the cleaning method, after a removal power density threshold and a damage power density threshold of laser output are determined according to various parameters of the workpiece to be cleaned, the power of the laser cleaning head is determined according to the removal power density threshold and the damage power density threshold.
Further, in the cleaning method, in the focal length adjusting step, the vertical distance between the laser generator lens of the laser cleaning head and the surface of the workpiece to be cleaned is controlled through the vertical distance data acquired by the distance sensor, so that the laser focal length fluctuation in the cleaning process is kept within 1 mm.
Further, in the cleaning method, in the cleaning step, after the current surface to be cleaned is cleaned, color data of a next annular region on the surface of the workpiece to be cleaned is continuously acquired, so that when the color of the annular region is different from the preset value, the laser spot continuously moves along the annular region along a circular line track with a corresponding radius.
Further, in the above cleaning method, after the cleaning step, the method further includes: and removing residues generated after laser cleaning on the surface of the workpiece to be cleaned.
According to the laser cleaning method provided by the invention, the vertical distance data between the distance sensor and the workpiece to be cleaned is obtained through the distance sensor, the automatic focusing of the cleaning head is realized, the color of the surface of the workpiece to be cleaned is detected through the color sensor, so that after the annular track of the area to be cleaned is determined, the circular line light spot is controlled by the galvanometer system to move along the track, the workpiece to be cleaned is uniformly cleaned, the laser cleaning efficiency and the cleaning quality are improved, and meanwhile, the surface of the workpiece to be cleaned is prevented from being damaged by laser beams in the cleaning process.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
fig. 1 is a schematic structural diagram of a laser cleaning apparatus according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
Referring to fig. 1, a laser cleaning apparatus for a surface of a workpiece having an axisymmetric structure according to an embodiment of the present invention includes: the device comprises a lifting platform 1, a cleaning head 2, a distance sensor 3, a color sensor 4 and a control unit 5; the cleaning head 2 is arranged on the lifting platform 1, and the cleaning head 2 comprises a galvanometer system and a laser generator; the distance sensor 3 is arranged on the lifting platform 1 and used for acquiring the vertical distance between the distance sensor 3 and a workpiece 8 to be cleaned with an axisymmetric structure; the color sensor 4 is arranged on the lifting platform 1 and used for acquiring color data of each annular area on the surface of the workpiece 8 to be cleaned; the control unit 5 is electrically connected with the distance sensor 3, the color sensor 4, the galvanometer system and the laser generator, and is used for receiving vertical distance data acquired by the distance sensor 3 and controlling the lifting platform 1 to drive the cleaning head 2 to move a preset distance in the vertical direction according to the distance data so as to realize the focus adjustment between the cleaning head 2 and the workpiece 8 to be cleaned; receiving the color data acquired by the color sensor 4, and determining the current annular area for color detection as the surface to be cleaned when the color data is different from a preset value; and controlling the galvanometer system to move, so that the light spot generated by the laser generator moves along the annular area along a circular line track with a corresponding radius, and the surface to be cleaned is cleaned.
Specifically, the workpiece 8 to be cleaned may be an apparatus having an axisymmetric structure. In this embodiment, the workpiece 8 to be cleaned may be an insulator coated with an RTV paint after a period of operation. In the present embodiment, the surface to be cleaned means the edge of the annular region of each cross section of the surface of the workpiece 8 to be cleaned in the thickness direction. That is to say, the workpiece 8 to be cleaned has an axisymmetrical structure, and can be cleaned from top to bottom in a circle along the thickness direction of the workpiece until the color of the surface of the workpiece 8 to be cleaned is consistent with the color of the body of the power equipment, so that the workpiece can be considered to be cleaned.
The cleaning head 2 is CO2A continuous laser or a fiber laser.
The color sensor 4 can detect the color data of the cleaning region and the non-cleaning region on the surface of the workpiece 8 to be cleaned in real time, and feeds the acquired color data of each annular region back to the control unit 5, the control unit 5 controls the cleaning light spot to move along the preset circular line track by adjusting the galvanometer system of the cleaning head, so that the region to be cleaned can be cleaned, and the uniform cleaning of the surface of the workpiece 8 to be cleaned is realized. The preset circular line track refers to an edge line of an annular area of the currently detected part to be cleaned. When the color data of the area being cleaned acquired by the color sensor 4 is consistent with the color of the power equipment body, the area can be considered to be cleaned, and the next area can be cleaned.
More specifically, the color sensor 4 may be of a light-to-photocurrent conversion type, a light-to-analog voltage conversion type or a light-to-digital conversion type. The reaction time of the color sensor 4 was 200. mu.s.
The distance sensor 3 is a laser ranging sensor, the linearity of the laser ranging sensor in the embodiment is less than 0.2 μm, the response frequency is not lower than 10kHz, and the measurement error is not more than 0.1 mm. The focus tracking precision of the whole distance sensor module is not less than +/-1 mm, and the tracking speed is not less than 200 mm/s.
The elevating platform 1 may include: the vertical moving mechanism 11 and the horizontal moving mechanism 12 are connected; wherein, one side of the vertical moving mechanism 11 is provided with a mounting seat 6, and the cleaning head 2 is arranged on the mounting seat 6; the lateral wall of mount pad 6 is worn to locate and is extended to inside mount pad 6 by the one end that vertical movement mechanism was kept away from to horizontal movement mechanism, and distance sensor 3 and color sensor 4 all set up on horizontal movement platform, and the two is located the one side of cleaning head 2 bottoms.
More specifically, the vertical movement mechanism 11 includes: the screw rod, the sliding block 110, the sliding rail 111 and the motor; the screw rod is arranged in the slide rail, the sliding block 110 is sleeved on the screw rod and is connected with the mounting base 6, and a thread matched with the screw rod thread is arranged on the contact surface of the sliding block and the screw rod; the output shaft of the motor is connected with the lead screw and used for driving the lead screw to rotate so as to convert the rotary motion of the lead screw into the linear motion of the sliding block and further drive the mounting seat 6 to move along the vertical direction. The motor may be a servo motor. The control unit 5 is connected with the servo motor to control the servo motor to rotate forward and backward, the screw rod can be driven to rotate forward and backward, the driving sliding block is driven to ascend or descend, and the cleaning head 2 is enabled to move up and down along the vertical direction.
The horizontal moving mechanism 12 can be connected with a vertical moving mechanism through a sliding block, and the vertical moving mechanism drives the mounting base 6 to move up and down, so that the cleaning head 2, the distance sensor 3 and the color sensor 4 can be driven to move up and down (the direction shown by an arrow A in the figure).
After focusing is finished, the position of the cleaning head 2 is fixed, whether the color data of the annular area aligned with the current lens is consistent with the color of the body of the workpiece 8 to be cleaned or not is acquired through the color sensor 4, and if the color data is consistent with the color of the body of the workpiece 8 to be cleaned, the area is considered to be cleaned completely or not to be cleaned; accessible control unit 5 control horizontal migration mechanism stretches out and draws back, move along the horizontal direction in order to drive color sensor 4, thereby carry out the colour detection of next annular region, when detecting the colour data of a certain region and waiting to wash the surface colour of work piece inconsistent, can control color sensor 4 through control unit 5 and stop moving, continue to carry out the focus adjustment through the perpendicular distance data that distance sensor 3 obtained after that, treat after the focus adjustment, can control the mirror system that shakes through control unit 5 and remove the washing of treating the washing surface in order to accomplish through the laser facula, so circulate in proper order, end until wasing.
The horizontal movement mechanism drives the distance sensor 3 and the color sensor 4 to move in the horizontal direction (the direction indicated by an arrow B in the figure) so as to acquire vertical distance data and color data of different areas in the thickness direction on the surface of the workpiece to be cleaned.
The structure of the mounting seat 6 is not particularly limited, and the mounting seat can adapt to the mounting of laser cleaning heads 2 of different models and the adjustment of mounting positions. The horizontal moving mechanism is provided with a mounting support, a plurality of long round holes are formed in the mounting support, color sensors 4 and distance sensors 3 of different models can be mounted in preset hole positions, and the positions of the distance sensors 3 and the color sensors 4 in the long round holes can be adjusted. The mounting bracket is also provided with a clamping groove for fixing the sensor cable.
More specifically, the horizontal movement mechanism 12 may be a telescopic rod. The mounting bracket may be provided on a lower surface of the telescopic bar so that the distance sensor 3 and the color sensor 4 may be moved in a horizontal direction (a direction shown by an arrow B in the drawing) as the telescopic bar is extended and retracted.
In this embodiment, the method further includes: a cleaning table 7; wherein, the cleaning platform 7 is connected with the bottom of the lifting platform 1 and is used for bearing the workpiece to be cleaned. The cleaning table may be square, circular, etc., and this embodiment does not limit it at all.
The control unit 5 is a general processor, a digital signal processor, an application specific integrated circuit ASIC or a field programmable gate array FPGA.
The control unit 5 comprises a memory in which focus data of the cleaning head 2 and color data of the workpiece body 8 to be cleaned are stored, and a processor connected to the memory for receiving the focus data of the cleaning head 2 and the color data of the workpiece body to be cleaned.
The processor is connected with the distance sensor 3 and used for comparing the vertical distance data acquired by the distance sensor 3 with the focal length of the cleaning head 2 stored in the memory in advance, so that when the difference between the two is within 1mm, focusing is determined to be finished.
The processor is also connected with the color sensor 4 and used for comparing the color data acquired by the color sensor 4 with the color data of the equipment to be cleaned, which is stored in the memory in advance, and when the color data and the color data are not consistent, determining the current area for color detection as the surface to be cleaned; and when the two are consistent, determining that the area currently subjected to color detection is cleaned or does not need to be cleaned.
The memory includes one or more of a read only memory ROM, a random access memory RAM, a flash memory or an electrically erasable programmable read only memory EEPROM.
The control unit 5 further includes: a housing; and a PLC controller, a servo driving module, a switching power supply and other electric components are arranged in the shell. The control box is provided with an external control signal interface, a laser light outlet interface, an external operation screen interface and the like.
The aforesaid obviously can derive, the laser belt cleaning device who provides in this embodiment, acquire its and wait to wash the perpendicular distance data between the work piece through distance sensor, be favorable to the holding of cleaning head 2 effective focus in the course of the work, avoid leading to laser energy not enough and the cleaning performance not good because of the defocus, the even cleaning performance on cleaning equipment surface can be guaranteed to wait by the color sensing system of high-speed reaction, make laser cleaning technique can get into more industrial manufacturing fields on the one hand, make the inconvenient abluent article in the past can use laser cleaning, on the other hand has improved abluent efficiency, make laser cleaning merge into automation equipment and intelligent manufacturing field.
The invention also provides a cleaning method of the laser cleaning device, which comprises the following steps:
and step S1, determining the power of the laser cleaning head according to various parameters of the workpiece to be cleaned.
Specifically, after a clearing power density threshold and a damage power density threshold of laser output are determined according to various parameters of the workpiece to be cleaned, the power of a laser cleaning head is determined according to the clearing power density threshold and the damage power density threshold. Namely, the removal power density threshold value and the damage power density threshold value are determined according to the size, the shape, the surface dirt thickness and the dirt material property of the workpiece to be cleaned.
The cleaning power density threshold value is the minimum power density which can clean the thickness of the dirt to be cleaned; the damage power density threshold is the maximum power density which can be borne when the surface of the power equipment to be cleaned is irradiated by laser, and the surface of the workpiece to be cleaned is damaged when the maximum power density is exceeded. After the frequency of the laser generator is adjusted, a workpiece to be cleaned can be placed on the cleaning table, and after focusing is performed, laser can be output to scan and clean the surface of an article to be cleaned.
And step S2, acquiring vertical distance data between the distance sensor and the workpiece to be cleaned, and realizing the focal length adjustment between the cleaning head and the workpiece to be cleaned.
Specifically, in the focal length adjusting step, the vertical distance between the laser generator lens of the laser cleaning head and the surface of the workpiece to be cleaned is controlled through the vertical distance data acquired by the distance sensor, so that the fluctuation of the laser focal length is kept within 1mm in the cleaning process, namely, the focal position is not more than the focal depth range of the laser beam 9, and the phenomenon that the cleaning effect is influenced due to insufficient laser energy caused by defocusing can be avoided.
The vertical distance between the cleaning head and the surface to be cleaned is measured in real time through the laser ranging sensor and fed back to the control unit, the control unit obtains the displacement and the time compensation parameter of the cleaning head to be adjusted through data sampling comparative analysis and calculation, the servo motor is driven to operate through time delay control, the position of the laser cleaning head is adjusted, and the automatic focusing process is completed.
Step S3, acquiring color data of each annular area on the surface of the workpiece to be cleaned, determining the annular area currently subjected to color detection as the surface to be cleaned when the color data is different from a preset value, and moving a laser spot along the surface to be cleaned along a circular line track with a corresponding radius so as to clean the surface to be cleaned of the workpiece to be cleaned.
Specifically, after the current surface to be cleaned is cleaned, color data of a next annular area of the surface of the workpiece to be cleaned is continuously acquired, so that when the color of the annular area is different from the preset value, the laser spot continuously moves along the annular area along a circular line track with a corresponding radius.
The color change of the cleaning area and the uncleaned area is monitored in real time through the color sensor assembly and fed back to the control system, and the control system controls the movement change of cleaning light spots through adjusting the cleaning head mirror vibrating system, so that the surface of the workpiece to be cleaned is uniformly cleaned.
After step S3, step S4 may also be included: and removing residues generated after laser cleaning on the surface of the workpiece to be cleaned.
In particular, the proper dust removing equipment can be selected according to the nature of the removed dirt to clean the dirt so as to ensure the cleanness and tidiness of the cleaning table.
The method embodiments and the apparatus embodiments have been described with reference to each other, and are not repeated herein.
According to the invention, the vertical distance data between the distance sensor and the workpiece to be cleaned is obtained through the distance sensor, the automatic focusing of the cleaning head is realized, the color of the surface of the workpiece to be cleaned is detected through the color sensor, so that after the annular track of the area to be cleaned is determined, the circular line light spot is controlled by the galvanometer system to move along the track, so that the workpiece to be cleaned is uniformly cleaned, the efficiency and the quality of laser cleaning are improved, and meanwhile, the surface of the workpiece to be cleaned is prevented from being damaged by laser beams in the cleaning process.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (10)

1. A laser cleaning apparatus for cleaning a surface of an axisymmetric structured workpiece, comprising:
a lifting platform;
the cleaning head is arranged on the lifting platform and comprises a galvanometer system and a laser generator;
the distance sensor is arranged on the lifting platform and used for acquiring the vertical distance between the distance sensor and a workpiece to be cleaned with an axisymmetric structure;
the color sensor is arranged on the lifting platform and used for acquiring color data of each annular area on the surface of the workpiece to be cleaned;
the control unit is electrically connected with the distance sensor, the color sensor, the galvanometer system and the laser generator, and is used for receiving vertical distance data acquired by the distance sensor and controlling the lifting platform to drive the cleaning head to move a preset distance in the vertical direction according to the distance data so as to realize the focus adjustment between the cleaning head and the workpiece to be cleaned; receiving color data acquired by the color sensor, and determining that the current annular area for color detection is the surface to be cleaned when the color data is different from a preset value; and controlling the galvanometer system to move, so that the light spot generated by the laser generator moves along the annular area along a circular line track with a corresponding radius, and the surface to be cleaned is cleaned.
2. The laser cleaning apparatus of claim 1, wherein the lift platform comprises: the vertical moving mechanism and the horizontal moving mechanism are connected; wherein the content of the first and second substances,
a mounting seat is arranged on one side of the vertical moving mechanism, and the cleaning head is arranged on the mounting seat;
horizontal migration mechanism keeps away from vertical migration mechanism's one end wears to locate the lateral wall of mount pad and extends to inside the mount pad, distance sensor with color sensor all sets up on the horizontal migration platform, and the two is located one side of cleaning head bottom.
3. The laser cleaning apparatus according to claim 2, wherein the vertical movement mechanism comprises: the device comprises a screw rod, a sliding block, a sliding rail and a motor; wherein the content of the first and second substances,
the screw rod is arranged in the slide rail, the sliding block is sleeved on the screw rod and is connected with the mounting seat, and a thread matched with the screw rod thread is arranged on the contact surface of the sliding block and the screw rod; the output shaft of the motor is connected with the lead screw and used for driving the lead screw to rotate so as to convert the rotary motion of the lead screw into the linear motion of the sliding block and further drive the mounting seat to move along the vertical direction.
4. The laser cleaning device of claim 2, wherein the horizontal movement mechanism is a telescoping rod.
5. The laser cleaning apparatus of claim 1, further comprising: a cleaning table; wherein the content of the first and second substances,
the cleaning table is connected with the bottom of the lifting platform and used for bearing the workpiece to be cleaned.
6. A cleaning method of the laser cleaning apparatus according to any one of claims 1 to 5, comprising the steps of:
determining the power of a laser cleaning head according to various parameters of a workpiece to be cleaned;
acquiring vertical distance data between a distance sensor and a workpiece to be cleaned, and realizing the focal length adjustment between the cleaning head and the workpiece to be cleaned;
and acquiring color data of each annular area on the surface of the workpiece to be cleaned, and determining the current annular area for color detection as the surface to be cleaned when the color data is different from a preset value, so that the laser spot moves along the surface to be cleaned along a circular line track with a corresponding radius, thereby cleaning the surface to be cleaned of the workpiece to be cleaned.
7. The cleaning method according to claim 6, wherein after determining a removal power density threshold and a damage power density threshold of the laser output according to the parameters of the workpiece to be cleaned, determining the power of the laser cleaning head according to the removal power density threshold and the damage power density threshold.
8. The cleaning method according to claim 6, wherein in the step of adjusting the focal length, the vertical distance between the laser generator lens of the laser cleaning head and the surface of the workpiece to be cleaned is controlled by the vertical distance data acquired by the distance sensor, so as to ensure that the laser focal length fluctuation is kept within 1mm during the cleaning process.
9. The cleaning method according to claim 6, wherein in the cleaning step, after the current surface to be cleaned is cleaned, the color data of a next annular area of the surface of the workpiece to be cleaned is continuously acquired, so that when the color of the annular area is different from the preset value, the laser spot is continuously moved along the annular area along a circular line track with a corresponding radius.
10. The cleaning method according to any one of claims 1 to 6, further comprising, after the cleaning step: and removing residues generated after laser cleaning on the surface of the workpiece to be cleaned.
CN202010523723.5A 2020-06-10 2020-06-10 Laser cleaning device and method for cleaning surface of workpiece with axisymmetric structure Pending CN111871964A (en)

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CN113020126A (en) * 2021-02-01 2021-06-25 武汉光谷航天三江激光产业技术研究院有限公司 Online detection method and system, terminal equipment, storage medium and detection head
CN113210361A (en) * 2021-05-27 2021-08-06 中国工程物理研究院激光聚变研究中心 Automatic focusing laser cleaning output device and output method
CN113522887A (en) * 2021-08-23 2021-10-22 武汉锐科光纤激光技术股份有限公司 Laser cleaning method
CN113798277A (en) * 2021-09-22 2021-12-17 广东电网有限责任公司江门供电局 Focal length self-adaptation cleaning gun for insulator laser cleaning
CN114472369A (en) * 2021-12-28 2022-05-13 深圳泰德激光技术股份有限公司 Method and device for cleaning material and computer readable storage medium
CN114733852A (en) * 2022-04-18 2022-07-12 扬州洛天依智能装备有限公司 Special-shaped curved surface laser cleaning equipment
CN114777654A (en) * 2022-04-08 2022-07-22 惠州锂威新能源科技有限公司 Pole piece slot positioning distance measuring method
CN114789168A (en) * 2021-01-25 2022-07-26 大族激光科技产业集团股份有限公司 Laser cleaning system and cleaning method
CN114905139A (en) * 2021-02-09 2022-08-16 中国科学院半导体研究所 Device and method for clearing CD data by laser
CN116449767A (en) * 2023-04-12 2023-07-18 武汉金顿激光科技有限公司 Semi-automatic laser cleaning track correction method and system

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CN114789168A (en) * 2021-01-25 2022-07-26 大族激光科技产业集团股份有限公司 Laser cleaning system and cleaning method
CN114789168B (en) * 2021-01-25 2023-10-20 大族激光科技产业集团股份有限公司 Laser cleaning system and cleaning method
CN113020126A (en) * 2021-02-01 2021-06-25 武汉光谷航天三江激光产业技术研究院有限公司 Online detection method and system, terminal equipment, storage medium and detection head
CN114905139A (en) * 2021-02-09 2022-08-16 中国科学院半导体研究所 Device and method for clearing CD data by laser
CN113210361A (en) * 2021-05-27 2021-08-06 中国工程物理研究院激光聚变研究中心 Automatic focusing laser cleaning output device and output method
CN113210361B (en) * 2021-05-27 2022-02-22 中国工程物理研究院激光聚变研究中心 Automatic focusing laser cleaning output device and output method
CN113522887A (en) * 2021-08-23 2021-10-22 武汉锐科光纤激光技术股份有限公司 Laser cleaning method
CN113798277A (en) * 2021-09-22 2021-12-17 广东电网有限责任公司江门供电局 Focal length self-adaptation cleaning gun for insulator laser cleaning
CN113798277B (en) * 2021-09-22 2023-01-24 广东电网有限责任公司江门供电局 Focal length self-adaptation cleaning gun for insulator laser cleaning
CN114472369A (en) * 2021-12-28 2022-05-13 深圳泰德激光技术股份有限公司 Method and device for cleaning material and computer readable storage medium
CN114777654A (en) * 2022-04-08 2022-07-22 惠州锂威新能源科技有限公司 Pole piece slot positioning distance measuring method
CN114733852A (en) * 2022-04-18 2022-07-12 扬州洛天依智能装备有限公司 Special-shaped curved surface laser cleaning equipment
CN116449767A (en) * 2023-04-12 2023-07-18 武汉金顿激光科技有限公司 Semi-automatic laser cleaning track correction method and system
CN116449767B (en) * 2023-04-12 2023-09-15 武汉金顿激光科技有限公司 Semi-automatic laser cleaning track correction method and system

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