CN1118717A - Fluid Supplying apparatus - Google Patents

Fluid Supplying apparatus Download PDF

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Publication number
CN1118717A
CN1118717A CN95107249A CN95107249A CN1118717A CN 1118717 A CN1118717 A CN 1118717A CN 95107249 A CN95107249 A CN 95107249A CN 95107249 A CN95107249 A CN 95107249A CN 1118717 A CN1118717 A CN 1118717A
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CN
China
Prior art keywords
rotor
fluid
magnetic pole
impulse motor
stator
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Granted
Application number
CN95107249A
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Chinese (zh)
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CN1076225C (en
Inventor
池本义宽
丸山照雄
船所宏行
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Publication of CN1118717A publication Critical patent/CN1118717A/en
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Publication of CN1076225C publication Critical patent/CN1076225C/en
Anticipated expiration legal-status Critical
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B67OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67DDISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06Details or accessories
    • B67D7/58Arrangements of pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Coating Apparatus (AREA)
  • Rotary Pumps (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

This fluid supplying apparatus consists of the fluid suction hole 23 and discharge hole 27, a fluid transporting part formed between a rotor 25 and a fixing member 19 housing the rotor 25, a shaft 10 connected to the rotor, a pulse motor to impart relative rotation and oscillation between the shaft 10 and fixing member and a control part as a driving power source to control the rotation and oscillation, having a non-pulsating continuous flow rate characteristic and a constant flow rate characteristic free from the temperature and viscosity condition and capable of realizing ultrahigh precision and infinitesimally flow of the supply flow.

Description

Fluid supply apparatus
The present invention relates in the production process in fields such as electronic component, household appliances, quantitatively discharge, supply with the liquid discharge device of various liquid such as bonding agent, paste soldering material, lubricating grease, coating, hot melt liquid, medicine, food.
Liquid discharge device is applied to various fields already, still, is accompanied by the demand of the little form height density assembling of electronic component in recent years, the technology that requires that the energy high accuracy is arranged and stably control the fluent material flow.
Be example with surface-mounted (SMT) field for example, in the high speed, microminiaturization, densification, high-gradeization of assembling and unmanned mighty torrent, the problem that liquid discharge device faces is summarized following points:
1. improve the precision of coating weight;
2. shortening efflux time;
3. reduce coating weight one time.
As traditional liquid discharge device, always be extensive use of the liquid discharge device of air pulsing mode as shown in figure 12, for example wait on the books and periodicals for No. 7 and introduced this technology at 1993 25 volumes of Japan's " automatic technology " magazine.Adopt the device for draining fluid of this mode, offer in the container 150 (cylinder) the quantitative air pulse that will supply with from the level pressure source, and will discharge from nozzle 151 with the corresponding a certain amount of fluid of pressure rising degree in the cylinder 150.
The device of above-mentioned as an alternative air pulsing mode has begun to use the liquid discharge device that is commonly referred to as eccentric shaft pump Moyno pump (Moyno Pomp), employing rotation displacement type now.Because this Moyno pump is done to move like the snake, so another name is also referred to as the snake pump, this technology has been done detailed introduction in " piping technology " in July, 85 of Japan in number first-class books and periodicals.Figure 11 shows an example of its structure.
In Figure 11, the 100th, main shaft (driving shaft), the 101st, ball bearing, the 102nd, the rotor of snake pump, the 103rd, stator the 104, the 105th, universal coupling is connected with connecting rod 106 and this connecting rod 106 rotor 102 with driving shaft 100.Rotor 102 cross sections are circular, and external screw thread is arranged, and the cross section in hole that is provided with the stator 103 of the internal thread corresponding with this external screw thread is Long Circle.Rotor 102 setting-ins are gone in the stator 103, rotor 102 is rotated in the eccentric shaft center, then rotor 102 moves up and down on stator 103 internal edges rotation limit.The fluid that is sealed between rotor 102 and the stator 103 moves by fissureless unlimited piston, is delivered to the discharge side continuously from the suction side.
But there are the following problems for the liquid discharge device of above-mentioned these modes.
1. the problem of the liquid discharge device of air pulsing mode:
(1) fluctuation of the discharge rate that causes because of the pulse of discharge pressing;
(2) fluctuation of the discharge rate that causes because of differential water pressures;
(3) because of changing the discharge rate that causes, liquid viscosity changes.
The phenomenon of above-mentioned (1) is short more at pipeline, efflux time shows remarkable more more in short-term.Therefore, taked to be configured such that the height of air pulsing becomes the measures such as stabilized loop of even usefulness.
The reason of above-mentioned (2) is, because the volume of cylinder internal pore portion 152 is because of the difference of fluid surplus H is different, so when supplying with a certain amount of gases at high pressure, the pressure intensity of variation in the space part 152 can have very big variation because of the difference of above-mentioned H.If liquid residue reduces, coating weight can occur and for example compare and reduce by about 50-60% such problem with maximum.Therefore, taked for example following measure, that is, discharged all tracer liquid surplus H at every turn, the time of adjusting pulse in view of the above is wide, so that the discharge quantitative change is even.
Above-mentioned (3) betide the occasion that its viscosity of material of for example containing a large amount of solvents changes in time.Therefore the countermeasure of taking is, with viscosity variation tendency programmed in computer of relative time axle, for example adjusts pulse width in advance, to revise the influence that viscosity changes.
At the measure of above-mentioned problem, no matter which all makes the control system that comprises computer complicate, and the very difficult variation that adapts to irregular environmental condition (temperature etc.), be not the solution of essence.
2. with the problem of the liquid discharge device of snake pump:
Occasion at the snake pump, because be fluid is encapsulated into the displacement type of also carrying in the seal cavity of a constant volume, so compare with the device for draining fluid of above-mentioned air pulsing mode, be not vulnerable to the influence of viscosity variation, pump discharge lateral load variation etc., have constant flow rate characteristics.But, thisly rotating the limit by rotor 102 in stator 103 internal edges and do reciprocating linear motion and obtain the pump of pump-absorb action, rotor 102 is cantilever support structure basically, stator 103 effect of bearing of supporting rotor 102 of also having held concurrently.Therefore, if for example rise or pump load increases and causes that discharging lateral pressure rises, then do not possess the motion that sufficient location keeps the rotor 102 of function and become unstable easily because of the rotating speed of main shaft 100.Consequently, the gap change between rotor 102 and the stator 103, the change of internal leakage amount, thereby have the problem of flow accuracy difference etc.In addition, because of decreasing the discharge characteristic that causes, the eccentric wear of stator 103, rotor 102 passes in time that to become also be a very big problem.Therefore, because with the snake pump as liquid discharge device and when having done root diameter little, because above-mentioned, the limit of accuracy of discharging total amount is at most ± and 10-20%.
In addition, if adaptation liquid discharge device ultra micro rill quantize (flow Q=10 for example -5Cm 3/ sec is following) demand and when attempting for example root diameter being accomplished D=0.5mm φ is following, there is the traditional structure of intermetallic contact can produce between this rotor, stator because of the situations such as strain, skimming wear and breakage that rotor strength lowly causes, extremely difficult with its practical application.
In order to solve the problem of above-mentioned existence, fluid supply apparatus provided by the invention is characterized in that having: the suction inlet of fluid and tap; At rotor with hold the fluid delivery section that forms between the fixed part of this rotor; The axle that is connected with described rotor; Make and produce the rotary oscillation impulse motor that relativity rotatablely moves and oscillating motion is used between this and the described fixed part; Its drive source promptly rotates swing motion control portion.
Object of the present invention is that the snake pump is that oblong stator interior is done straight reciprocating motion in the cross section in order to make rotor, makes the main shaft limit of the driving side that is connected with this rotor make eccentric motion (oscillating motion), and the limit rotates around its eccentric shaft center.Fig. 1 shows the operating principle of snake pump, and 1 is basic circle, and 2 is its inscribed circle.O 1Be the center of above-mentioned inscribed circle 2, O 2Be the center of eccentricity rotor movement, the 3rd, with O 1Main shaft for the center.At this, rotate with rolling limit, rotational speed omega limit in the inboard of basic circle 1 as if inscribed circle 2, then the inscribed circle center O 1In center O 2Around do oscillating motion with rotational speed omega/2.Therefore, main shaft 3 limits of snake pump rotate with rotational speed omega, and side ring is around center O 2ε does oscillating motion with offset.
In addition, carrying the rotor (not shown among Fig. 1, as to see 25 among Fig. 2) of the pump part of fluid is to be the circle at center with point on the circumference of above-mentioned inscribed circle 2.It is in the oblong stator (do not go out out among Fig. 1, see 26 among Fig. 2) that this rotor is housed in the cross section, does by initial point O 2Rectilinear motion.
Use fluid supply apparatus of the present invention, utilize and to have selected the impulse motor that becomes the magnetic pole tooth of the fixed body number of teeth and become the magnet number of poles of rotor, can be with rotating speed the rotation (rotation) of ω move and with the rotating speed of ω/2 around initial point O 2Rotation (revolution) motion (oscillating motion) put on main shaft 3 simultaneously.
In addition, use fluid supply apparatus of the present invention, utilize and to have selected the impulse motor that becomes the magnetic pole tooth of the fixed body number of teeth and become the magnet number of poles of rotor, can be with rotating speed the rotation (rotation) of ω move and with the rotating speed of ω around initial point O 2Rotation (revolution) motion (oscillating motion) put on main shaft 3 simultaneously.
For the minimum tiny flow quantity liquid discharge device of discharge rate, notice that the root diameter of snake pump and the offset of oscillating motion (ε of Fig. 1) can be for minimum, if between the bearing of the radial support rotor of snake pump and rotor minim gap is set, rotor can be done oscillating motion.
Rotation and swing two motions and undertaken by the pulse signal and the drive circuit portion of rotation driving pulse motor.Its result, main shaft 3 carries out the intrinsic compound motion of Moyno pump, and the confined space that forms between rotor and stator moves to the discharge side successively from the suction side, obtain continuous pump-absorb action.
Brief description:
Fig. 1: the figure that object of the present invention is the drive principle of snake pump is shown.
Fig. 2: the front section view that fluid supply apparatus the 1st embodiment of the present invention is shown.
Fig. 3: the figure that the rotary oscillation impulse motor structure of the 1st embodiment among Fig. 1 is shown.
Fig. 4: the block diagram of the rotary oscillation control part of above-mentioned the 1st embodiment.
Fig. 5: the figure that action describes to the rotary oscillation impulse motor of the 1st embodiment.
Fig. 6: the figure that the thrust FDB is shown.
Fig. 7: the figure that the rotary oscillation impulse motor structure among fluid supply apparatus the 2nd embodiment of the present invention is shown.
Fig. 8: the figure that action describes to the rotary oscillation impulse motor of the 2nd embodiment.
Fig. 9: the front section view that fluid supply apparatus the 3rd embodiment of the present invention is shown.
Figure 10: the block diagram of the rotary oscillation control part of the 3rd embodiment.
Figure 11: the front section view of known snake pump.
Figure 12: the pie graph of air pulsing liquid discharge device.
Followingly describe with reference to the embodiment of accompanying drawing to the liquid discharge device that fluid supply apparatus of the present invention is applied to supply with tiny flow quantity liquid.
In Fig. 2, the 10th, main shaft, the 11st, the rotary oscillation actuation element that is rotated with oscillating motion is the rotor of impulse motor rotor, is made up of permanent magnet.The 12nd, the fixed body stator of impulse motor is that the copper silicon plate is carried out die-cutly laminating after making it have magnetic pole tooth, again coil and making on reeling on the magnetic pole tooth.13-19 is fixed parts, 20, the 21st, be located at top thrust FDB and bottom thrust FDB between fixed part 13,14,15,16,17,18,19 and the main shaft 10, the 22nd, the sealing of axle collar shape, the 23rd, inlet hole, 24 are formed in the thread groove pump on the main shaft 10, the 25th, the rotor of snake pump, the 26th, the stator of snake pump, the 27th, discharge nozzle.In the drawings, the shape of only part of the rotor 25 of snake pump and stator 26 having been drawn its amplitude slightly turgidly.29, the 28th, journal bearing, and be provided with gap ε between the main shaft 10.
Fig. 3 illustrates the cutaway view that the rotary oscillation actuation element is the impulse motor structure.Post the permanent magnet of 4 utmost points that are magnetized to the N utmost point, the S utmost point in the periphery of main shaft 10, constitute the rotor rotor 11 of impulse motor.The 12nd, the fixed body stator of impulse motor has 12 magnetic pole tooths 31,32,33,34,35,36,37,38,39,40,41,42, is wound with coil on these magnetic pole tooths 31-42 respectively.
Fig. 4 is control, the block diagram that drives the rotary oscillation control part of rotary oscillation impulse motor.The 51st, pulse oscillator, the 52nd, accept the distributor circuit of the order that the signal of pulse oscillator 51 and decision switch on respectively to the coil of each magnetic pole tooth 31-42 of rotary oscillation impulse motor, the 53rd, accept distributor circuit 52 signal and to the drive circuit of the coil electricity of the magnetic pole tooth 31,32,33,34,35,36,37,38,39,40,41,42 of rotation pendulum fortune impulse motor 54.
Fig. 5 is the action specification figure of the rotary oscillation impulse motor of present embodiment.In Fig. 5 (a), give the coil electricity of magnetic pole tooth 31, making the part excitation relative with rotor magnet is the S utmost point.So, being subjected to the attraction of the S utmost point of magnetic pole tooth 31, the N utmost point of rotor 11 is relative with magnetic pole tooth 31.At this moment, offset is journal bearing 28,29 among Fig. 2 and the gap ε between the main shaft 10.Stop coil electricity then to magnetic pole tooth 31, and shown in Fig. 5 (b) to the coil electricity of magnetic pole tooth 32, making the part excitation relative with rotor magnet is the N utmost point.The N utmost point that the S utmost point of rotor 11 is subjected to magnetic pole tooth 32 attracts, and turns to relative with magnetic pole tooth 32 along arrow Y direction.Stop coil electricity then to magnetic pole tooth 32, and shown in Fig. 5 (c) to the coil electricity of magnetic pole tooth 33, be the S utmost point with the part excitation relative with rotor magnet.The N utmost point of rotor 11 is attracted by the S utmost point of magnetic pole tooth 33 and turns to relative with magnetic pole tooth 33 to arrow Y direction.Similarly, again from Fig. 5 (d) to Fig. 5 (1), rotor 11 rotated for 2 weeks along arrow Y direction, and with the offset of ε to arrow Z direction along revolution (swing) week in the magnetic pole of the stator tooth.In this fluid supply apparatus with impulse motor of not only doing to rotate but also doing swing, the described thrust FDB the 20, the 21st among Fig. 2 is provided with the known hydrodynamic bearing of the shallow slot 71 that is called as the Pacific herring bone on the face of flange, and Fig. 6 shows one of its shape example.Enclosing between FDB 20,21 and fixed part has lubricating oil, because the pump-absorb action of shallow slot 71, lubricating oil can not flow out to the outside.
Main shaft 10 is because by two above-mentioned thrust FDBs 20,21 supportings, so can not tilt and restricted in the direction of axle.Therefore, because the driving force of impulse motor, main shaft 10 can be done oscillating motion under the situation that still keeps plumbness.The above-mentioned sealing 22 that is axle collar shape is in order to prevent to carry fluid and to enter FDB portion and impulse motor portion and be provided with, and the gap between axle collar shape sealing and its axial opposite face is set at enough little.In addition, thread groove pump 24 to be carried fluid to flow into snake pump portion easily and is provided with in order to make in an embodiment.
In employing shown in Figure 11 snake pump with the traditional approach of universal coupling, if gapped, rotor 102 just is quick condition in this interstice coverage between rotor 102 and the stator 103.Its result, internal leakage amount be subjected to rotor 102 instability action influence and change causes the flow accuracy instability.And use of the present invention embodiment illustrated in fig. 2 in, the motion of rotor 25 and absolute position thereof are fully by main shaft 10 defineds of top driving side.Therefore, have the complicated snakelike rotor 25 on-stream contactless states that can keep to stator 26.
The gap that rotor 25 in a period of motion and stator are 26 is because the movement locus of main shaft 10 is certain, so no matter at which position, can both have certain cycle variation characteristic all the time.Therefore, internal leakage is also certain for the influence of discharge rate, even the gap between rotor 25 and the stator 26 is big slightly, also can obtain the pulsation-free delivery flow as predicting.
In addition, the parts that between rotor 25 of the present invention and main shaft 10, do not exist the such obstruction of traditional universal coupling (104 among Figure 11,105) to carry fluid to flow.Therefore, even in order to realize tiny flow quantityization the snake pump made small-sized and reduce the perforate part 23 of its inlet, carry fluid also can flow into swimmingly in the snake pump.
Fig. 7, Fig. 8 show the 2nd embodiment of the present invention, wherein with the 1st embodiment in the identical symbolic representation part identical or suitable with the 1st embodiment.In the 2nd embodiment, the cutaway view of the cutaway view of its fluid supply apparatus and above-mentioned the 1st embodiment shown in Figure 2 is identical, and the Therefore, omited illustrates it.Different is, structure such as Fig. 7, shown in Figure 8 that it makes the impulse motor of rotary oscillation are attached to permanent magnet main shaft 10 peripheries, that be magnetized to the N utmost point, the S utmost point and are not 4 utmost points but 6 utmost points.On the stator 12 of impulse motor, the same with the 1st embodiment, also be provided with 31-42 and amount to 12 magnetic pole tooths, also be wound with coil on these magnetic pole tooths.
The 2nd embodiment's is also identical with rotary oscillation control part structure among the 1st embodiment shown in Figure 4 to rotation, the swing impulse motor rotary oscillation control part structure controlling, drive, and the Therefore, omited illustrates it.
Fig. 8 is the action specification figure of the rotary oscillation impulse motor of the 2nd embodiment.Shown in Fig. 8 (a),, be the S utmost point at first with the part excitation relative with rotor magnet to the coil electricity of the magnetic pole tooth 31 of stator.So the N utmost point of rotor 11 is attracted by the S utmost point of magnetic pole tooth 31 and relative with magnetic pole tooth 31.At this moment, offset is journal bearing 28,29 among Fig. 2 and the gap ε between the main shaft 10.Then, stop the coil electricity of magnetic pole tooth 31 and shown in Fig. 8 (b),, be the N utmost point the part excitation relative with rotor magnet to the coil electricity of magnetic pole tooth 32.So the S utmost point of rotor 11 is attracted by the N utmost point of magnetic pole tooth 32 and goes to relative with magnetic pole tooth 32 along arrow Y direction.Then, stop coil electricity to magnetic pole tooth 32, and shown in Fig. 8 (c) to the coil electricity of magnetic pole tooth 33, be the S utmost point with the part excitation relative with rotor magnet.The N utmost point of rotor 11 be subjected to magnetic pole tooth 33 the S utmost point attraction and turn to relative along arrow Y direction with magnetic pole tooth 33.Similarly, proceed to Fig. 8 (1) from Fig. 8 (d) again, rotor 11 rotated for 1 week along arrow Y direction, and rotated (swing) 1 week (once) with the offset of ε to arrow Z direction.Other structures such as thrust FDB 20,21, sealing 22 grades are all identical with the 1st embodiment, and the Therefore, omited illustrates it.
Obviously, use the fluid supply apparatus of the present invention the 2nd embodiment, the same with the device shown in above-mentioned the 1st embodiment, because the motion of its rotor 25 and its absolute position also are subjected to the restriction of driving side main shaft fully, therefore, the rotor 25 with complicated snakelike shape also can relative stator 26 keep contactless states in operation process.Because the movement locus of main shaft 10 is certain, so the gap that rotor 25 in the motion one-period and stator are 26 also can both have certain cycle variation characteristic all the time no matter at what position.Therefore, internal leakage is also certain for the influence of discharge rate, even the gap of 26 of rotor 25 and stators is big slightly, also can obtain the pulsation-free delivery flow as predicting.
In addition, the pump of the 2nd embodiment is inhaled partly also the same with the 1st embodiment, does not establish to hinder the universal coupling of carrying fluid to flow, so the same with the 1st embodiment, even with the miniaturization of snake pump, the conveying fluid also can flow in the snake pump swimmingly.
Fig. 9, Figure 10 show the 3rd embodiment of the present invention, and what illustrate is the fluid Supplying apparatus that is provided with the sensor that rotary-type absolute encoder detects as the rotating shaft position to the rotary oscillation impulse motor.The 61st, the glass plectane in crack with seam, the 62nd, the illuminating part of light and light accepting part.Form rotor position detecting sensor by 61,61.Miscellaneous part is identical with the 1st embodiment shown in Figure 2.Figure 10 is the block diagram of rotary oscillation control part that the rotary oscillation impulse motor of the 3rd embodiment is controlled, driven, 51 among the figure, 52,53,54 identical with the 1st embodiment, and the 63rd, differentiate the judging circuit of the rotor-position of impulse motor.With reference to Fig. 5, the action of the rotary oscillation impulse motor of the 3rd embodiment is described when as follows.If impulse motor stops at the state of Fig. 5 (g), and when after this state cuts off the power supply of rotary oscillation control part, connecting power supply once more, distributor circuit 52 receives the pulse signal from pulse oscillator 51, begins magnetic pole tooth 31 from Fig. 5 (a) to coil electricity.At this moment, the rotor rotor will from the state of Fig. 5 (g) without Fig. 5 (h) to Fig. 5 (1) state and in moment, move to the state of Fig. 5 (a), just can not obtain slick and sly rotation.In addition, if stop and cutting off the electricity supply at the state of Fig. 5 (b), then in case energising, the coil of the magnetic pole tooth 31 of Fig. 5 (a) is energized, and the rotor rotor becomes the rotor-position state of Fig. 5 (a) to rotating in the opposite direction with arrow Y side.In order to remove so sharply the moving or reversal development of rotor, encoder detects and differentiates behind the position of rotor rotor to next coil electricity, so that the rotor rotor rotates sleekly, moves to correct direction.The result is that the rotor 25 (Fig. 9) of snake pump portion can rotate sleekly carries fluid.
Above-mentioned the 1st, the 2nd, the 3rd embodiment can both make the rotation of rotary oscillation motor and the speed of swing change if change the frequency of oscillation of pulse oscillator 51.
In addition, in above-mentioned three embodiment, the bearing thrust direction has adopted FDB 20,21, has radially adopted fixedly lubricating bearings 28,29, but also can stipulate thrust direction with the ball bearing mode, makes the gap that ε is radially arranged.
Again, in above-mentioned the 3rd embodiment, rotor position detecting sensor has adopted optical encoders, angle sensors 61,62, but also can adopt the element of magnetic-type phase-splitter (synchronously) or application Hall effect.
Have again, in the above-described embodiments, the rotary oscillation impulse motor be 12 mutually and the combination and 12 of 4 utmost points mutually and the combination of 6 utmost points, but also can adopt other phases with other numbers of poles and adopt the coil magnetization method.
By the present invention, fluid supply apparatus with following features can be provided, this device do not lose that the snake pump just had originally such as pulseless continuous flow characteristic, be not subject to impact etc. the characteristics of the environmental condition, viscosity variation etc. of temperature etc. with the proportional constant flow rate characteristics of rotating speed, delivery flow, also have the following features that traditional snake pump mode or air pulsing mode do not realize:
1. realize the superhigh precision of flow;
2. realize that the ultra micro rill quantizes;
3. can enlarge the flow-control scope.
If the present invention is used as for example fluid Supplying apparatus in surface-mounted field, then for dress The demand of the high speed of joining, microminiaturization, high-grade etc. can be brought into play its outstanding characteristic, obtains Very big effect.

Claims (2)

1. a fluid supply apparatus is characterized in that having: the suction inlet of fluid and tap; At rotor with hold the fluid delivery section that forms between the fixed part of this rotor; The axle that is connected with described rotor; Make and produce the rotary oscillation impulse motor that relativity rotatablely moves and oscillating motion is used between this and the described fixed part; Its drive source is the rotational oscillating motion control part.
2. fluid supply apparatus as claimed in claim 1 is characterized in that, is provided with the sensor of the rotating shaft position that detects the rotary oscillation impulse motor.
CN95107249A 1994-06-27 1995-06-27 Fluid supplying apparatus Expired - Fee Related CN1076225C (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP144835 1994-06-27
JP14483594 1994-06-27
JP144835/1994 1994-06-27
JP230976 1994-09-27
JP230976/1994 1994-09-27
JP23097694A JP3555193B2 (en) 1994-06-27 1994-09-27 Fluid supply device

Publications (2)

Publication Number Publication Date
CN1118717A true CN1118717A (en) 1996-03-20
CN1076225C CN1076225C (en) 2001-12-19

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KR (1) KR960000763A (en)
CN (1) CN1076225C (en)

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CN103079716A (en) * 2010-08-19 2013-05-01 Lg化学株式会社 Fluid supply apparatus and system and method for cleaning thin plate using same
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US9943887B2 (en) 2010-08-19 2018-04-17 Lg Chem, Ltd. Fluid supplying apparatus and system and method for cleaning thin film using the same
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CN1076225C (en) 2001-12-19
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KR960000763A (en) 1996-01-25

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