CN111867227B - Automatic calibration beam adjustment device for nuclear pore membrane production terminal beam spot - Google Patents

Abstract

The invention relates to a beam spot automatic calibration beam adjustment device at a nuclear pore membrane production terminal. The device includes two beam current signal detection devices, a data acquisition device, a control computer and a power supply; the two beam current signal detection devices are arranged in a beam current pipeline. The transmission channel is used to detect the visible light video image that can characterize the beam position and shape of the beam in the transmission channel; the data acquisition device is used to collect the visible light video image; the control computer is used to detect the beam current in the collected visible light video image. The position and shape of the beam spot are analyzed, and the power source is controlled to adjust the position and shape of the beam according to the analysis result, so as to realize the automatic calibration and beam adjustment of the beam spot at the end of nuclear pore membrane production. The present invention can be widely applied in the production of nuclear pore membranes.

Description

Automatic calibration beam adjustment device for nuclear pore membrane production terminal beam spot

technical field

The invention relates to a beam spot automatic calibration beam adjustment device at a nuclear pore membrane production terminal, and relates to the technical field of nuclear pore membrane irradiation production and fluorescent target monitoring.

Background technique

Nuclear pore membranes are the most precise microporous filtration membranes in the world. It is a porous plastic film with densely packed holes, each of the same shape and size. Nuclear pore membranes are available in many specifications, with a thickness ranging from 5 microns to 60 microns, pore sizes ranging from 0.2 microns to 15 microns, and pore densities ranging from 1 to 10 per square centimeter to the 9th power.

Nuclear pore membranes are generally punched with heavy ions provided by high-energy accelerators. Heavy ion punching is the most critical part of the nuclear pore membrane production process. Only a few countries in the world have heavy ion accelerators suitable for nuclear pore membrane production. In the prior art, since the beam is not in the center of the irradiation pipeline in the production process of the nuclear pore membrane, deviation of the beam irradiation on the irradiated membrane may occur, thereby resulting in the problem of defective nuclear pore membranes.

SUMMARY OF THE INVENTION

In view of the above problems, the purpose of the present invention is to provide a beam spot automatic calibration beam adjustment device at the end of nuclear pore film production, which can automatically determine the position of the beam, avoid the problem of deviation of the beam irradiation on the irradiation film, and improve the nuclear Pore film production quality.

In order to achieve the above object, the present invention adopts the following technical solutions: a beam spot automatic calibration beam adjustment device at the nuclear pore membrane production terminal, the device includes two beam signal detection devices, a data acquisition device, a control computer and a power supply;

The two beam signal detection devices are arranged in the transmission channel of the beam pipeline, and are used for detecting visible light video images that can characterize the beam position and shape of the beam in the transmission channel;

A data acquisition device for collecting visible light video images;

The control computer is used to analyze the beam spot position and shape of the beam current in the collected visible light video image, and control the power source to adjust the beam current position and shape according to the analysis result, so as to realize the automatic calibration of the beam spot at the nuclear pore membrane production terminal Toning.

The beam spot automatic calibration beam adjustment device at the nuclear pore membrane production terminal, preferably, each of the beam signal detection devices adopts a fluorescent target.

The beam spot automatic calibration beam adjustment device at the end of nuclear pore film production, preferably, the fluorescent target includes a target piece, a motion control system and a camera device, and the motion control system controls the target piece relative to the beam by controlling the The movement of the flow pipe, the camera device is arranged under the target sheet, and is used for capturing the visible light video image generated by the beam current on the target sheet.

In the nuclear pore film production terminal beam spot automatic calibration beam adjustment device, preferably, the fluorescent target is further provided with a target light, and the target light is provided on one side of the camera device for observing the relative relationship of the target sheet. in the state of the beam transfer pipeline.

The beam spot automatic calibration beam adjustment device at the nuclear pore membrane production terminal, preferably, the data acquisition device uses multiple video acquisition channels to collect video images.

The beam spot automatic calibration beam adjustment device at the nuclear pore membrane production terminal, preferably, the power source includes a correction power source and a scanning power source;

The correction power supply is used to move the position of the beam spot by adjusting the magnitude of the current;

The scanning power supply is used to ensure the dispersion degree of the beam current, so that the shape of the beam spot meets the requirements.

The beam spot automatic calibration beam adjustment device at the nuclear pore membrane production terminal, preferably, the control computer includes a data processing module, a data analysis module, a data display module and a database;

The data processing module is used for processing the visible light video image, identifying whether the beam spot is in the middle position of the beam current pipeline and the beam spot shape, specifically: using an edge detection algorithm to determine whether the shape and position of the beam spot satisfy the requirements; requirements, if it is not in the middle position or the shape of the beam spot does not meet the requirements, send a corresponding control command to the power supply, adjust the current size of the correction power supply to correct the beam current position to make it reach the center of the fluorescent target, and pass the scanning The power source adjusts the shape change of the beam spot to make it meet the expected beam spot shape;

The data analysis module is used to compare and analyze the beam spot conforming to the production requirements and the production qualification rate of the nuclear pore membrane. If the production requirements are met, the production will continue, and if the production requirements are not met, a new round of adjustment will be started;

The data display module is used to display the position of the current beam spot and the change of the beam spot during the adjustment process;

The database is used for storing the video data in the process and the process data of beam spot adjustment.

Further, the data acquisition device includes a video processing module for processing visible light video images, identifying whether the beam spot is in the middle of the beam pipeline and the shape of the beam spot, specifically: using an edge detection algorithm to determine where the beam spot is located Whether the shape and position of the beam spot meet the requirements, if it is not in the middle position or the shape of the beam spot does not meet the requirements, send a corresponding control command to the power supply, adjust the current size of the correction power supply to correct the beam current position to make it reach the center of the fluorescent target , and the shape change of the beam spot is adjusted by the scanning power supply to make it meet the expected beam spot shape.

The present invention has the following advantages due to taking the above technical solutions:

1. The present invention can automatically determine the position of the beam, and adjust the position and shape of the beam device by controlling the power supply, so as to realize the automatic calibration and beam adjustment of the beam spot at the end of the nuclear pore membrane production, and avoid the production process of the nuclear pore membrane. The beam is not in the center of the irradiation pipeline, which leads to deviations when the beam is irradiated on the irradiation membrane, improves the production quality of nuclear pore membranes, and effectively reduces the generation of defective nuclear pore membranes;

2. The data acquisition device of the present invention can also automatically determine the position of the beam current according to the collected video images, and together with the control computer, issue an instruction to the power source that controls the beam current bias, and automatically correct the beam current by adjusting the size of the power source current. position until it reaches the center of the fluorescent target and reaches the expected bundle shape;

In conclusion, the present invention can be widely applied in the production of nuclear pore membranes.

Description of drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are for the purpose of illustrating preferred embodiments only and are not to be considered limiting of the invention. The same reference numerals are used to refer to the same parts throughout the drawings. In the attached image:

1 is a schematic structural diagram of a beam spot automatic calibration beam adjustment device at the end of nuclear pore membrane production according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a fluorescent target according to an embodiment of the present invention;

3 is a schematic diagram of the principle of a data acquisition device according to an embodiment of the present invention;

4 is a flowchart of visible light video processing according to an embodiment of the present invention;

5 is a flow chart of beam spot correction according to an embodiment of the present invention;

FIG. 6 is a flow chart of data analysis according to an embodiment of the present invention.

Detailed ways

Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present invention will be more thoroughly understood, and will fully convey the scope of the present invention to those skilled in the art.

It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting. As used herein, the singular forms "a," "an," and "the" can also be intended to include the plural forms unless the context clearly dictates otherwise. The terms "comprising", "comprising", "containing" and "having" are inclusive and thus indicate the presence of stated features, steps, operations, elements and/or components, but do not preclude the presence or addition of one or Various other features, steps, operations, elements, components, and/or combinations thereof. Method steps, procedures, and operations described herein are not to be construed as requiring that they be performed in the particular order described or illustrated, unless an order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be restricted by these terms. These terms may only be used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of example embodiments.

For ease of description, spatially relative terms may be used herein to describe the relationship of one element or feature to another element or feature as shown in the figures, such as "inner", "outer", "inner" ", "outside", "below", "above", etc. This spatially relative term is intended to encompass different orientations of the device in use or operation other than the orientation depicted in the figures.

As shown in FIG. 1 , the beam spot automatic calibration beam spot adjustment device provided in this embodiment for the production of nuclear pore membranes includes a fluorescent target 1 , a data acquisition device 2 , a control computer 3 and a power supply 4 .

A first fluorescent target and a second fluorescent target are arranged at intervals in the transmission channel in the middle of the beam pipeline, and the first fluorescent target and the second fluorescent target are used to detect visible light video data that can characterize the position and shape of the beam.

As shown in FIG. 2, the fluorescent target 1 is an existing intercepting device. The first fluorescent target and the second fluorescent target have the same structure, and both include a target piece 11, a camera device 12 and a motion control system 13. When the beam needs to be measured When streaming information, the motion control system 13 pushes the target 11 to block the beam pipeline. Preferably, the target 11 and the beam are at a 45-degree angle. Since the target 11 is coated with fluorescent material, the beam hits the target. 11 will generate obvious visible light. The camera device 12 collects the visible light generated by the beam hitting the target piece 11, and transmits the video data through the network. Preferably, the camera device 12 can use a high-definition camera.

The data collection device 2 is respectively connected to the first camera and the second camera, and is used for collecting video images.

The control computer 3 analyzes the position and shape of the beam spot of the acquired video image, and identifies whether the beam spot is in the middle position of the beam pipeline and whether the analysis shape meets the requirements. If it is not in the middle position or the beam spot shape does not meet the set requirements, The control computer 3 starts to issue an instruction to the power source 5, and the position and shape of the beam current are adjusted by the power source 5, so as to realize the automatic calibration and beam adjustment of the beam spot at the end of nuclear pore membrane production.

In some embodiments of the present invention, the fluorescent target 1 is also provided with an LED target lamp 14. Since there is no visible light in the entire beam pipeline when there is no beam current, it is impossible to see whether the target piece 11 of the fluorescent target can be stretched normally. Therefore, by turning on the target light 14, the pulled-out and put-in states of the target piece 11 can be clearly seen.

In some embodiments of the present invention, the number of power sources for adjusting the beam spot can be set to 5, including 4 rectifying power sources and 1 scanning power source. The dispersion degree of the beam current can be guaranteed, so that the beam spot shape can meet the requirements.

In some embodiments of the present invention, the control computer 3 includes a data processing module, a data analysis module, a data display module and a database;

The data processing module is used to process the video data and identify whether the beam spot is in the middle position of the beam pipeline to automatically judge and respond. The set threshold is compared to determine whether the shape and position of the beam spot meet the requirements. If it is not in the middle position or the shape of the beam spot does not meet the set requirements, a corresponding control command is sent to the power supply 4, and the current of the power supply is corrected by adjusting The size of the beam is automatically corrected until it reaches the center of the fluorescent target 1, and the shape of the beam spot is adjusted by scanning the power supply to achieve the desired beam shape.

As shown in FIG. 5 , when the control computer 3 determines that the beam spot is not in the center position and/or the shape does not meet the requirements, it can issue adjustment instructions to the five controlled power supplies 4 to adjust the current output of the power supplies, and then determine the beam spot. The position and shape of the flow, if the requirements are met, the nuclear pore membrane continues to be produced, if not, the process continues to cycle;

The data analysis module is used to compare and analyze the beam spot conforming to the production requirements and the production qualification rate of the nuclear pore film, as shown in Figure 6, observe the produced irradiated film under the electron microscope, and run the counting software to check the The irradiation holes per unit area are counted. If the production requirements are met, the production will continue. If the production requirements are not met, a new round of adjustment will be started.

The data display module is used to display the position of the current beam spot and the change of the beam spot during the adjustment process;

The database is used to store the video data in the process and the process data of beam spot adjustment.

In some embodiments of the present invention, as shown in FIG. 3 , the data acquisition device 2 can be implemented by using an FPGA control circuit board, and the data acquisition device 2 uses multiple video acquisition channels for sending the acquired video data to the control computer 3 . In addition, the data acquisition device 2 also has the function of issuing multiple control instructions, so as to control the LED target light 14 and the power supply 5 . Further, the data acquisition device 2 is also provided with a video processing module and a video analysis module, which are used to process the position and shape of the beam spot in the collected video image, and are used to identify whether the beam spot is in the middle of the beam pipeline. And whether the shape of the beam spot meets the requirements, the specific principle is the same as the data processing principle of the control computer 3, which will not be repeated here. Correct the beam position until it reaches the center of the fluorescent target, and adjust the shape change of the beam spot by correcting the power supply and the scanning power supply to achieve the desired beam cluster shape.

The above-mentioned embodiments are only used to illustrate the present invention, and the structure, connection method and manufacturing process of each component can be changed to some extent. Any equivalent transformation and improvement based on the technical solution of the present invention should not be used. Excluded from the scope of protection of the present invention.

Claims (4)

1. A nuclear pore membrane production terminal beam spot automatic calibration beam modulation device is characterized by comprising two beam current signal detection devices, a data acquisition device, a control computer and a power supply; the power supply comprises a rectification power supply and a scanning power supply; the correction power supply is used for moving the position of the beam spot by adjusting the magnitude of the current; the scanning power supply is used for ensuring the scattering degree of the beam current so that the beam spot shape meets the requirement;

the two beam signal detection devices are arranged in a transmission channel of the beam pipeline and used for detecting visible light video images capable of representing the beam position and shape of the beam in the transmission channel, and each beam signal detection device adopts a fluorescent target;

the data acquisition device is used for acquiring visible light video images; the data acquisition device comprises a video processing module, and is used for processing the visible light video image and identifying whether the beam spot is in the middle position of the beam pipeline and the shape of the beam spot, and specifically comprises the following steps: the device comprises a power supply, a scanning power supply, a power supply and a controller, wherein the scanning power supply is used for determining whether the shape and the position of a beam spot meet requirements by adopting an edge detection algorithm, if the beam spot is not in the middle position or the shape of the beam spot does not meet the requirements, a corresponding control instruction is sent to the power supply, the current of the correction power supply is adjusted to correct the beam position to reach the center of a fluorescent target, and the shape change of the beam spot is adjusted by the scanning power supply to enable the beam spot to reach the shape which accords with the expectation;

the control computer is used for analyzing the beam spot position and shape of the beam current in the acquired visible light video image, controlling the power supply to adjust the beam current position and shape according to the analysis result, and realizing automatic beam calibration and beam adjustment of the beam spot of the nuclear track membrane production terminal;

the control computer comprises a data processing module, a data analysis module, a data display module and a database;

the data processing module is used for processing the visible light video image and identifying whether the beam spot is in the middle position of the beam pipeline and the shape of the beam spot, and specifically comprises the following steps: the device comprises a power supply, a scanning power supply, a power supply and a controller, wherein the scanning power supply is used for determining whether the shape and the position of a beam spot meet requirements by adopting an edge detection algorithm, if the beam spot is not in the middle position or the shape of the beam spot does not meet the requirements, a corresponding control instruction is sent to the power supply, the current of the correction power supply is adjusted to correct the beam position to reach the center of a fluorescent target, and the shape change of the beam spot is adjusted by the scanning power supply to enable the beam spot to reach the shape which accords with the expectation;

the data analysis module is used for comparing and analyzing the beam spots which meet the production requirements and the production qualified rate of the nuclear pore membranes, if the beam spots meet the production requirements, the production is continued, and if the beam spots do not meet the production requirements, a new round of adjustment is started;

the data display module is used for displaying the position of the current beam spot and the change of the beam spot in the adjusting process;

the database is used for storing video data in the process and process data of beam spot adjustment.

2. The automatic beam spot calibrating and beam modulating device for the nuclear track membrane production terminal as claimed in claim 1, wherein the fluorescent target comprises a target, a motion control system and a camera device, the motion control system controls the motion of the target relative to the beam current pipeline, and the camera device is arranged below the target and is used for capturing a visible light video image generated by the beam current on the target.

3. The device for automatically calibrating and beam-modulating the beam spot at the end of the nuclear track membrane production as claimed in claim 2, wherein the fluorescent target is further provided with a target lamp, the target lamp is arranged at one side of the camera device, and the target lamp is controlled to be turned on by the data acquisition device and is used for observing the state of the target sheet relative to the beam transmission pipeline.

4. The automatic beam spot calibrating and beam adjusting device for the nuclear pore membrane production terminal as claimed in claim 2, wherein the data acquisition device adopts multiple video acquisition channels for video image acquisition.

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