CN111867227B - Automatic beam spot calibrating and adjusting device for nuclear track membrane production terminal - Google Patents
Automatic beam spot calibrating and adjusting device for nuclear track membrane production terminal Download PDFInfo
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- CN111867227B CN111867227B CN202010711142.4A CN202010711142A CN111867227B CN 111867227 B CN111867227 B CN 111867227B CN 202010711142 A CN202010711142 A CN 202010711142A CN 111867227 B CN111867227 B CN 111867227B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
- H05H2007/002—Arrangements for beam delivery or irradiation for modifying beam trajectory, e.g. gantries
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
- H05H2007/008—Arrangements for beam delivery or irradiation for measuring beam parameters
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Abstract
The invention relates to a nuclear pore membrane production terminal beam spot automatic calibration beam modulation device, which comprises two beam current signal detection devices, a data acquisition device, a control computer and a power supply, wherein the two beam current signal detection devices are connected with the control computer; the two beam signal detection devices are arranged in a transmission channel of the beam pipeline and are used for detecting visible light video images capable of representing the beam position and shape of the beam in the transmission channel; the data acquisition device is used for acquiring visible light video images; and the control computer is used for analyzing the beam spot position and shape of the beam current in the acquired visible light video image, controlling the power supply to adjust the beam current position and shape according to the analysis result, and realizing automatic beam calibration and beam adjustment of the beam spot of the nuclear track membrane production terminal. The invention can be widely applied to the production of the nuclear pore membrane.
Description
Technical Field
The invention relates to an automatic beam spot calibration and adjustment device for a nuclear track membrane production terminal, and relates to the technical field of nuclear track membrane irradiation production and fluorescence target monitoring.
Background
Nuclear pore membranes are the most sophisticated microfiltration membranes in the world. The film is a porous plastic film, dense hemp pores are arranged on the film, and the shape and the size of each pore are the same. Nuclear pore membranes come in many sizes, with membrane thicknesses ranging from 5 microns to 60 microns, pore sizes ranging from 0.2 microns to 15 microns, and pore densities ranging from 1 to 9 powers of 10 per square centimeter.
The nuclear pore membrane is generally perforated by heavy ions provided by a high-energy accelerator, and the perforation of the heavy ions is the most critical ring in the production process of the nuclear pore membrane. Only a few countries worldwide have heavy ion accelerators suitable for nuclear pore membrane production. In the prior art, in the production process of the nuclear pore membrane, beam irradiation is deviated on the irradiation membrane because the beam is not positioned at the center of the irradiation pipeline, and further the nuclear pore membrane defective product is generated.
Disclosure of Invention
Aiming at the problems, the invention aims to provide an automatic beam spot calibration and adjustment device for a nuclear pore membrane production terminal, which can automatically judge the beam position, avoid the problem of deviation of beam irradiation on an irradiation membrane and improve the nuclear pore membrane production quality.
In order to achieve the purpose, the invention adopts the following technical scheme: a nuclear track membrane production terminal beam spot automatic calibration beam adjusting device comprises two beam current signal detection devices, a data acquisition device, a control computer and a power supply;
the two beam signal detection devices are arranged in a transmission channel of the beam pipeline and are used for detecting visible light video images capable of representing the beam position and shape of the beam in the transmission channel;
the data acquisition device is used for acquiring visible light video images;
and the control computer is used for analyzing the beam spot position and shape of the beam current in the acquired visible light video image, controlling the power supply to adjust the beam current position and shape according to the analysis result, and realizing automatic beam calibration and beam adjustment of the beam spot of the nuclear track membrane production terminal.
The automatic beam spot calibration and beam adjustment device for the nuclear track membrane production terminal is characterized in that each beam signal detection device preferably adopts a fluorescent target.
The automatic beam spot calibration and beam adjustment device for the nuclear track membrane production terminal is characterized in that preferably, the fluorescence target comprises a target, a motion control system and a camera device, the motion control system controls the motion of the target relative to the beam pipeline, and the camera device is arranged below the target and used for shooting visible light video images generated by the beam on the target.
The automatic beam spot calibration and beam adjustment device at the nuclear track membrane production terminal is characterized in that preferably, the fluorescent target is further provided with a target lamp, and the target lamp is arranged on one side of the camera device and used for observing the state of the target piece relative to a beam transmission pipeline.
The automatic beam spot calibration and beam adjustment device for the nuclear track membrane production terminal is characterized in that the data acquisition device preferably acquires video images by adopting a plurality of video acquisition channels.
The automatic beam spot calibrating and adjusting device for the nuclear track membrane production terminal is characterized in that the power supply comprises a correcting power supply and a scanning power supply;
the correction power supply is used for moving the position of the beam spot by adjusting the magnitude of the current;
the scanning power supply is used for ensuring the scattering degree of the beam current, so that the beam spot shape meets the requirement.
The automatic beam spot calibrating and beam adjusting device for the nuclear pore membrane production terminal is characterized in that preferably, the control computer comprises a data processing module, a data analysis module, a data display module and a database;
the data processing module is used for processing the visible light video image and identifying whether the beam spot is in the middle position of the beam pipeline and the shape of the beam spot, and specifically comprises the following steps: the device comprises a power supply, a scanning power supply, a power supply and a controller, wherein the scanning power supply is used for determining whether the shape and the position of a beam spot meet requirements by adopting an edge detection algorithm, if the beam spot is not in the middle position or the shape of the beam spot does not meet the requirements, a corresponding control instruction is sent to the power supply, the current of the correction power supply is adjusted to correct the beam position to reach the center of a fluorescent target, and the shape change of the beam spot is adjusted by the scanning power supply to enable the beam spot to reach the shape which accords with the expectation;
the data analysis module is used for comparing and analyzing the beam spots which meet the production requirements and the production qualified rate of the nuclear pore membranes, if the beam spots meet the production requirements, the production is continued, and if the beam spots do not meet the production requirements, a new round of adjustment is started;
the data display module is used for displaying the position of the current beam spot and the change of the beam spot in the adjusting process;
the database is used for storing video data in the process and process data of beam spot adjustment.
Further, the data acquisition device comprises a video processing module for processing the visible light video image and identifying whether the beam spot is in the middle position of the beam pipeline and the shape of the beam spot, specifically: the device is used for determining whether the shape and the position of the beam spot meet the requirements or not by adopting an edge detection algorithm, if the beam spot is not in the middle position or the shape of the beam spot does not meet the requirements, a corresponding control instruction is sent to the power supply, the current of the correction power supply is adjusted to correct the beam position to reach the center of the fluorescent target, and the shape change of the beam spot is adjusted by the scanning power supply to enable the beam spot to reach the expected beam spot shape.
Due to the adoption of the technical scheme, the invention has the following advantages:
1. the beam spot adjusting device can automatically judge the position of the beam, adjust the position and the shape of the beam device by controlling the power supply, realize the automatic calibration and beam adjustment of the beam spot of the nuclear pore membrane production terminal, avoid the deviation of the beam irradiation on the irradiation membrane caused by the fact that the beam is not positioned at the center of the irradiation pipeline in the production process of the nuclear pore membrane, improve the production quality of the nuclear pore membrane and effectively reduce the generation of the defective nuclear pore membrane;
2. the data acquisition device can also automatically judge the beam position according to the acquired video image, send an instruction to a power supply for controlling beam bias together with a control computer, automatically correct the beam position by adjusting the magnitude of the power supply current until the beam position reaches the center of a fluorescent target and reaches the beam cluster shape meeting the expectation;
in conclusion, the invention can be widely applied to the production of the nuclear pore membrane.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Like parts are designated with like reference numerals throughout the drawings. In the drawings:
FIG. 1 is a schematic structural diagram of a beam spot automatic calibration and beam adjustment device for a nuclear track membrane production terminal according to an embodiment of the present invention;
FIG. 2 is a schematic view of a fluorescent target according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a data acquisition device according to an embodiment of the present invention;
FIG. 4 is a visible light video processing flow diagram of an embodiment of the present invention;
FIG. 5 is a flow chart of beam spot correction according to an embodiment of the present invention;
FIG. 6 is a flow chart of data analysis according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only, and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" may be intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "including," and "having" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and/or groups thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring their performance in the particular order described or illustrated, unless specifically identified as an order of performance. It should also be understood that additional or alternative steps may be used.
Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms may be only used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.
For convenience of description, spatially relative terms, such as "inner", "outer", "lower", "upper", and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.
As shown in fig. 1, the automatic beam spot calibration and adjustment device for a nuclear track membrane production terminal provided by this embodiment includes a fluorescent target 1, a data acquisition device 2, a control computer 3 and a power supply 4.
The middle transmission channel of the beam pipeline is provided with a first fluorescence target and a second fluorescence target at intervals, and the first fluorescence target and the second fluorescence target are used for detecting visible light video data capable of representing the position and the shape of the beam.
As shown in fig. 2, the fluorescent target 1 is an existing intercepting type device, the first fluorescent target and the second fluorescent target have the same structure, and both include a target 11, a camera 12 and a motion control system 13, when beam information needs to be measured, the motion control system 13 pushes the target 11 to block a beam pipeline, preferably, the target 11 and the beam are at an angle of 45 degrees, since the fluorescent material is coated on the target 11, the beam hits the target 11 to generate an obvious visible light, the camera 12 collects the visible light generated on the target 11 due to the beam hitting the target, and video data is transmitted through a network, preferably, the camera 12 can adopt a high definition camera.
The data acquisition device 2 is respectively connected with the first camera and the second camera and used for acquiring video images.
The control computer 3 analyzes the position and the shape of the beam spot of the acquired video image, identifies whether the beam spot is at the middle position of the beam pipeline and whether the analysis shape meets the requirements, if the beam spot is not at the middle position or the beam spot shape does not meet the set requirements, the control computer 3 starts to send an instruction to the power supply 5, and the position and the shape of the beam spot are adjusted through the power supply 5, so that the automatic calibration and beam adjustment of the beam spot at the nuclear track membrane production terminal are realized.
In some embodiments of the present invention, the fluorescent target 1 is further provided with an led target lamp 14, since the whole beam tube has no visible light when there is no beam, it is unclear whether the target sheet 11 of the fluorescent target can be tested to be stretched normally, and therefore, by turning on the target lamp 14, the states of the target sheet 11 in and out can be clearly seen.
In some embodiments of the invention, the number of the power supplies for adjusting the beam spot can be set to 5, including 4 correction power supplies and 1 scanning power supply, the correction power supply can move the position of the beam spot by adjusting the current, and the scanning power supply can ensure the scattering degree of the beam current, so that the shape of the beam spot meets the requirements.
In some embodiments of the invention, the control computer 3 comprises a data processing module, a data analysis module, a data display module and a database;
the data processing module is used for processing the video data and identifying whether the beam spot is automatically judged and responded at the middle position of the beam pipeline, and specifically comprises the following steps: as shown in fig. 4, the video data acquired by the camera is compared with the preset threshold value of the edge to determine whether the shape and the position of the beam spot meet the requirements, if the video data are not at the middle position or the shape of the beam spot does not meet the set requirements, a corresponding control instruction is sent to the power supply 4, the beam position is automatically corrected by adjusting the size of the correction power supply current until the beam position reaches the center of the fluorescent target 1, and the shape change of the beam spot is adjusted by scanning the power supply to reach the beam shape meeting the expectation.
As shown in fig. 5, when the control computer 3 determines that the beam spot is not in the central position and/or the shape does not meet the requirement, it may send an adjustment instruction to 5 controlled power supplies 4, adjust the current output of the power supplies, determine the position and the shape of the beam, if the requirement is met, continue the production of the nuclear pore membrane, if the requirement is not met, continue the cycle of the process;
and the data analysis module is used for comparing and analyzing the beam spots which meet the production requirements and the production qualified rate of the nuclear pore membrane, observing the produced irradiation membrane under an electron microscope as shown in fig. 6, running counting software to count irradiation pores in unit area, continuing the production if the production requirements are met, and starting a new round of adjustment if the production requirements are not met.
The data display module is used for displaying the position of the current beam spot and the change of the beam spot in the adjusting process;
and the database is used for storing the video data in the process and the process data of beam spot adjustment.
In some embodiments of the present invention, as shown in fig. 3, the data acquisition device 2 may be implemented by an FPGA control circuit board, and the data acquisition device 2 employs multiple video acquisition channels for sending acquired video data to the control computer 3. In addition, the data acquisition device 2 also has a function of issuing a plurality of control commands so as to control the led target lamp 14 and the power supply 5. Further, the data acquisition device 2 is further provided with a video processing module and a video analysis module, and is configured to process the position and shape of the beam spot in the acquired video image, and is configured to identify whether the beam spot is at the middle position of the beam conduit and whether the shape of the beam spot meets the requirements, the specific principle is the same as the data processing principle of the control computer 3, and details are not repeated here, the data processing module and the control computer 3 send an instruction to the power supply for controlling beam bias, automatically correct the beam position by adjusting the magnitude of the power supply current until the beam position reaches the center of the fluorescent target, and adjust the shape change of the beam spot by the correction power supply and the scanning power supply, and achieve the beam shape meeting the expectation.
The above embodiments are only used for illustrating the present invention, and the structure, connection mode, manufacturing process, etc. of the components may be changed, and all equivalent changes and modifications performed on the basis of the technical solution of the present invention should not be excluded from the protection scope of the present invention.
Claims (4)
1. A nuclear pore membrane production terminal beam spot automatic calibration beam modulation device is characterized by comprising two beam current signal detection devices, a data acquisition device, a control computer and a power supply; the power supply comprises a rectification power supply and a scanning power supply; the correction power supply is used for moving the position of the beam spot by adjusting the magnitude of the current; the scanning power supply is used for ensuring the scattering degree of the beam current so that the beam spot shape meets the requirement;
the two beam signal detection devices are arranged in a transmission channel of the beam pipeline and used for detecting visible light video images capable of representing the beam position and shape of the beam in the transmission channel, and each beam signal detection device adopts a fluorescent target;
the data acquisition device is used for acquiring visible light video images; the data acquisition device comprises a video processing module, and is used for processing the visible light video image and identifying whether the beam spot is in the middle position of the beam pipeline and the shape of the beam spot, and specifically comprises the following steps: the device comprises a power supply, a scanning power supply, a power supply and a controller, wherein the scanning power supply is used for determining whether the shape and the position of a beam spot meet requirements by adopting an edge detection algorithm, if the beam spot is not in the middle position or the shape of the beam spot does not meet the requirements, a corresponding control instruction is sent to the power supply, the current of the correction power supply is adjusted to correct the beam position to reach the center of a fluorescent target, and the shape change of the beam spot is adjusted by the scanning power supply to enable the beam spot to reach the shape which accords with the expectation;
the control computer is used for analyzing the beam spot position and shape of the beam current in the acquired visible light video image, controlling the power supply to adjust the beam current position and shape according to the analysis result, and realizing automatic beam calibration and beam adjustment of the beam spot of the nuclear track membrane production terminal;
the control computer comprises a data processing module, a data analysis module, a data display module and a database;
the data processing module is used for processing the visible light video image and identifying whether the beam spot is in the middle position of the beam pipeline and the shape of the beam spot, and specifically comprises the following steps: the device comprises a power supply, a scanning power supply, a power supply and a controller, wherein the scanning power supply is used for determining whether the shape and the position of a beam spot meet requirements by adopting an edge detection algorithm, if the beam spot is not in the middle position or the shape of the beam spot does not meet the requirements, a corresponding control instruction is sent to the power supply, the current of the correction power supply is adjusted to correct the beam position to reach the center of a fluorescent target, and the shape change of the beam spot is adjusted by the scanning power supply to enable the beam spot to reach the shape which accords with the expectation;
the data analysis module is used for comparing and analyzing the beam spots which meet the production requirements and the production qualified rate of the nuclear pore membranes, if the beam spots meet the production requirements, the production is continued, and if the beam spots do not meet the production requirements, a new round of adjustment is started;
the data display module is used for displaying the position of the current beam spot and the change of the beam spot in the adjusting process;
the database is used for storing video data in the process and process data of beam spot adjustment.
2. The automatic beam spot calibrating and beam modulating device for the nuclear track membrane production terminal as claimed in claim 1, wherein the fluorescent target comprises a target, a motion control system and a camera device, the motion control system controls the motion of the target relative to the beam current pipeline, and the camera device is arranged below the target and is used for capturing a visible light video image generated by the beam current on the target.
3. The device for automatically calibrating and beam-modulating the beam spot at the end of the nuclear track membrane production as claimed in claim 2, wherein the fluorescent target is further provided with a target lamp, the target lamp is arranged at one side of the camera device, and the target lamp is controlled to be turned on by the data acquisition device and is used for observing the state of the target sheet relative to the beam transmission pipeline.
4. The automatic beam spot calibrating and beam adjusting device for the nuclear pore membrane production terminal as claimed in claim 2, wherein the data acquisition device adopts multiple video acquisition channels for video image acquisition.
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| CN112987077B (en) * | 2021-03-22 | 2022-06-14 | 中国科学院近代物理研究所 | Low-energy ion beam detection and ion beam current strength self-balancing interlocking control system |
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| CN1224055C (en) * | 2002-07-26 | 2005-10-19 | 中国科学院等离子体物理研究所 | Beam emittance automatic measurement and particle beam focusing automatic regualting method and apparatus |
| CN102156292A (en) * | 2011-03-10 | 2011-08-17 | 中国原子能科学研究院 | Method for determining beam current distribution of special irradiation pipeline for single event effect by using nuclear track membrane |
| JP2014139868A (en) * | 2013-01-21 | 2014-07-31 | Hitachi High-Technologies Corp | Charged particle beam device and method for correcting charged particle beam |
| JP6757583B2 (en) * | 2016-03-30 | 2020-09-23 | 株式会社日立製作所 | Particle beam dose evaluation system, planning device and particle beam irradiation system and dose evaluation method |
| CN206212394U (en) * | 2016-12-09 | 2017-05-31 | 四川智研科技有限公司 | A kind of beam control apparatus |
| CN106730415B (en) * | 2016-12-26 | 2019-08-30 | 江苏海明医疗器械有限公司 | A kind of medical accelerator line automatic centering control method |
| CN107148140B (en) * | 2017-06-30 | 2023-08-08 | 中广核达胜加速器技术有限公司 | Automatic beam spot corrector of accelerator and accelerator |
| CN107462918B (en) * | 2017-08-22 | 2018-07-31 | 合肥中科离子医学技术装备有限公司 | A kind of accelerator beam cross section measuring system and method based on LabVIEW |
| JP2019180738A (en) * | 2018-04-09 | 2019-10-24 | 株式会社日立製作所 | Particle beam therapy system and radiation position control method for particle beam therapy system |
| CN111308542B (en) * | 2020-02-28 | 2021-12-21 | 中国科学院电工研究所 | Measuring device and measuring method for beam spot performance of electron gun |
| CN111292866B (en) * | 2020-03-05 | 2022-02-01 | 中国科学院近代物理研究所 | Heavy ion production device for nuclear track membrane industrial production |
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