CN111855669A - Substrate detection device - Google Patents
Substrate detection device Download PDFInfo
- Publication number
- CN111855669A CN111855669A CN202010707443.XA CN202010707443A CN111855669A CN 111855669 A CN111855669 A CN 111855669A CN 202010707443 A CN202010707443 A CN 202010707443A CN 111855669 A CN111855669 A CN 111855669A
- Authority
- CN
- China
- Prior art keywords
- supporting
- support
- state
- substrate
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of electronic product detection equipment, and particularly discloses a substrate detection device. The substrate detection device comprises a frame body and a supporting mechanism, wherein the supporting mechanism is used for supporting a substrate to be detected, the supporting mechanism is connected to the frame body in a sliding mode so as to be switched between a first state and a second state, and projections formed on the substrate when the supporting mechanism is in the first state and the second state are not overlapped. First, the support mechanism is in a first state, the support mechanism in the first state forms a projection on the substrate, and the CCD camera located at the lower side of the frame body cannot detect a region of the projection of the support mechanism on the substrate, which is a first undetected region. Then the supporting mechanism slides to a second state on the frame body, a second undetected area is formed by the projection of the supporting mechanism in the second state on the substrate, and the projections of the supporting mechanism in the first state and the second state on the substrate are not overlapped, so that the lower surface of the substrate can be detected, and the accuracy of a detection result is ensured.
Description
Technical Field
The invention relates to the technical field of electronic product detection equipment, in particular to a substrate detection device.
Background
Various substrates, such as liquid crystal panels, OLED (Organic Light-Emitting Display) panels, touch panels, glass substrates, etc., need to be inspected before shipment to ensure that the substrates are qualified.
When inspecting a substrate, the substrate is generally placed on an inspection apparatus, and the substrate inspection apparatus includes a plurality of support bars arranged at intervals for supporting the substrate. The upper side and the lower side of the substrate detection device are both provided with CCD cameras so as to collect images of the upper surface and the lower surface of the substrate. In the prior art, the supporting bars can shield part of the lower surface of the substrate, and the CCD camera positioned on the lower side cannot detect the part of the substrate shielded by the supporting bars, so that an undetected area is formed. As the size of the substrate is larger and larger, more supporting bars are needed for supporting, so that the area of an undetected area is increased, and the accuracy of a detection result is influenced.
Disclosure of Invention
The invention aims to provide a substrate detection device, which is used for avoiding an undetected area and improving the accuracy of a detection result.
In order to achieve the purpose, the invention adopts the following technical scheme:
a substrate detection apparatus comprising:
a frame body;
the supporting mechanism is connected to the frame body in a sliding mode so as to switch between a first state and a second state, and projections of the supporting mechanism on the substrate do not coincide when the supporting mechanism is in the first state and the second state.
Preferably, the support mechanism includes an upper support assembly, and the upper support assembly includes:
a plurality of first supporting strips arranged in parallel along a first direction to support the substrate; the first supporting strip extends along a second direction, and two ends of the first supporting strip along the second direction are respectively connected to the frame body in a sliding mode along the first direction; the first direction is perpendicular to the second direction;
when the supporting mechanism is in the first state, the first supporting bar slides to a first position, and when the supporting mechanism is in the second state, the first supporting bar slides to a second position.
Preferably, the upper support assembly further comprises:
the two ends of the first supporting strips along the second direction are connected with the first connecting plates, and the two adjacent first supporting strips are connected through the first connecting plates.
Preferably, the upper support assembly further comprises:
the upper guide assembly comprises a first guide rail and a first sliding block connected with the first guide rail in a sliding manner;
the length direction of the first guide rail is parallel to the first direction, the two ends of the first supporting strip along the second direction are both connected with the first sliding blocks, and the first guide rail is arranged at the position, corresponding to the first sliding blocks, on the frame body.
Preferably, the upper support assembly further comprises:
the first driving piece is arranged on the frame body, and the output end of the first driving piece is connected with the first supporting strip or the first connecting plate so as to drive the first supporting strip to move along the first direction.
Preferably, the support mechanism further comprises a lower support assembly, the lower support assembly comprising:
the second supporting strips extend along the first direction, the two ends of the second supporting strips along the first direction are respectively connected to the frame body in a sliding mode along the second direction, and the second supporting strips are connected with the first supporting strips in a sliding mode so as to support the first supporting strips;
when the supporting mechanism is in the first state, the second supporting strip slides to a third position, and when the supporting mechanism is in the second state, the second supporting strip slides to a fourth position.
Preferably, the number of the second supporting strips is not less than two, and all the second supporting strips are arranged in parallel along the second direction; the lower support assembly further comprises:
and the second supporting strips are connected with the lower connecting plate along the two ends in the first direction, and the adjacent two second supporting strips are connected through the lower connecting plate.
Preferably, the lower support assembly further comprises:
the second driving piece is arranged on the frame body, and the output end of the second driving piece is connected with the second supporting strip to drive the second supporting strip to move in the second direction.
Preferably, the substrate detection apparatus further includes:
the guide mechanism is arranged at the crossed position of the first supporting strip and the second supporting strip and used for guiding the first supporting strip along the sliding in the first direction and guiding the second supporting strip along the sliding in the second direction.
Preferably, the guide mechanism comprises a third guide rail, a third slide block, a fourth slide block and a fourth guide rail; the third guide rail is connected to the second support bar, and the length direction of the third guide rail is consistent with that of the second support bar; the third sliding block is arranged on the third guide rail in a sliding manner; the fourth sliding block is connected with the third sliding block and is in sliding connection with the fourth guide rail; the fourth guide rail is connected to the first support bar, and the length direction of the fourth guide rail is consistent with the length direction of the first support bar.
The invention has the beneficial effects that:
when the substrate is detected, the support mechanism is first in a first state (or a second state), the support mechanism in the first state forms a projection on the substrate, and the CCD camera located at the lower side of the frame cannot detect a region of the projection of the support mechanism on the substrate, which is a first undetected region. Then the supporting mechanism slides to a second state (or a first state) on the frame body, a second undetected area is formed by the projection of the supporting mechanism in the second state on the substrate, and because the projection of the supporting mechanism on the substrate is not overlapped when the supporting mechanism is in the first state and the second state, namely the first undetected area and the second undetected area are not overlapped, when the supporting mechanism is in the first state and the second state, the CCD camera respectively collects images of the substrate, and the images of the second undetected area and the first undetected area are collected by the CCD camera in sequence, so that the lower surface of the substrate can be detected, and the accuracy of the detection result is ensured.
Drawings
Fig. 1 is a schematic structural diagram of a substrate detection apparatus according to an embodiment of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1 at A;
FIG. 3 is an enlarged view of a portion of FIG. 1 at B;
FIG. 4 is an enlarged view of a portion of FIG. 1 at C;
fig. 5 is a schematic structural diagram of another view angle of the substrate inspection apparatus according to an embodiment of the present invention;
fig. 6 is a partially enlarged view at D in fig. 5.
In the figure:
1. a frame body; 11. mounting a plate;
2. a support mechanism;
21. a first support bar; 22. a first connecting plate; 23. a first driving member; 24. a second supporting strip; 25. a second driving member; 26. a first guide rail; 27. a first slider;
3. a guide mechanism; 31. a third guide rail; 32. a third slider; 33. a fourth slider; 34. a fourth guide rail;
l, a first direction; m, a second direction.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some but not all of the elements associated with the present invention are shown in the drawings.
In the present invention, the directional terms such as "upper", "lower", "left", "right", "inner" and "outer" are used for easy understanding without making a contrary explanation, and thus do not limit the scope of the present invention.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example one
The embodiment provides a substrate detection device for supporting a substrate to be detected, but is not limited thereto, and can also be used for supporting other pieces to be detected so as to avoid the occurrence of undetected areas and improve the accuracy of detection results.
As shown in fig. 1, the substrate detection apparatus provided in this embodiment includes a frame 1 and a support mechanism 2, where the frame 1 is used for installing the support mechanism 2, and the support mechanism 2 is used for supporting a substrate to be detected. Preferably, the frame body 1 may include four mounting plates 11 connected end to end in sequence to form a rectangular parallelepiped structure, and the supporting mechanism 2 is disposed inside the frame body 1 and connected to the inside of the mounting plates 11 to implement the installation of the supporting mechanism 2.
Specifically, the support mechanism 2 is slidably connected to the frame 1 to be switched between a first state and a second state, and projections on the substrate do not coincide when the support mechanism 2 is in the first state and the second state, and it can be understood that the substrate is placed on the support mechanism 2 at this time.
When the substrate is to be inspected, the support mechanism 2 is first in the first state (or the second state), the support mechanism 2 in the first state forms a projection on the substrate, and the CCD camera located below the housing 1 cannot detect a region where the support mechanism 2 projects on the substrate, which is a first non-inspection region. Then the supporting mechanism 2 slides on the frame 1 to a second state (or a first state), a second undetected area is formed by the projection of the supporting mechanism 2 in the second state on the substrate, because the projection of the supporting mechanism 2 in the first state and the projection of the supporting mechanism 2 in the second state on the substrate do not coincide, namely the first undetected area and the second undetected area do not coincide, when the supporting mechanism 2 is in the first state and the second state, the CCD camera respectively collects the images of the substrate, and the images of the second undetected area and the first undetected area are collected by the CCD camera in sequence, so that the lower surface of the substrate can be detected, and the accuracy of the detection result is ensured.
As shown in fig. 1, the supporting mechanism 2 includes an upper supporting assembly including a plurality of first supporting bars 21, the plurality of first supporting bars 21 being arranged in parallel along the first direction L to support the substrate. The first supporting bars 21 extend along the second direction M, and both ends of the first supporting bars 21 along the second direction M are slidably connected to the frame 1 along the first direction L. The first direction L is perpendicular to the second direction M.
When the support mechanism 2 is in the first state, the first support bar 21 slides to the first position, and when the support mechanism 2 is in the second state, the first support bar 21 slides to the second position. The plurality of first supporting bars 21 are disposed in parallel along the first direction L and slidably coupled to the frame body 1 along the first direction L, so that they do not affect each other during the sliding.
As shown in fig. 1 and 2, preferably, in order to synchronously switch each first supporting bar 21 between the first position and the second position, the upper supporting assembly further includes a first connecting plate 22, the first connecting plate 22 is connected to both ends of the first supporting bar 21 in the second direction M, and two adjacent first supporting bars 21 are connected by the first connecting plate 22.
As shown in fig. 2, preferably, to improve the stability of the switching of the first support bar 21 between the first position and the second position, the upper support assembly further includes an upper guide assembly. The upper guide assembly includes a first rail 26 and a first slider 27 slidably coupled to the first rail 26. The longitudinal direction of the first guide rail 26 is parallel to the first direction L, both ends of the first support bar 21 in the second direction M are connected to first sliders 27, and the first guide rail 26 is provided at a position on the frame 1 corresponding to the first sliders 27.
As shown in fig. 3, preferably, in order to drive the first supporting bar 21 to move, the upper supporting assembly further includes a first driving member 23, the first driving member 23 is disposed on the frame 1, and an output end of the first driving member 23 is connected to the first supporting bar 21 or the first connecting plate 22, and is used for driving the first supporting bar 21 to move along the first direction L. Preferably, the first driving member 23 is a cylinder or a cylinder. In the present embodiment, both ends of one of the outermost first supporting bars 21 are connected to the output ends of the two first driving members 23, respectively. Of course, it is understood that the first driving member 23 may be connected to any other one of the first supporting bar 21 or the first connecting plate 22. Further, both ends of the first support bar 21 connected to the first driving member 23 are not provided with the upper guide assembly.
Preferably, to avoid bending of the first support struts 21 after long-term use, the support mechanism 2 further comprises a lower support assembly for supporting the first support struts 21. Specifically, the lower support assembly includes a second support bar 24, the second support bar 24 extends along the first direction L, two ends of the second support bar 24 along the first direction L are respectively connected to the frame body 1 in a sliding manner along the second direction M, and the second support bar 24 is connected to the first support bar 21 in a sliding manner for supporting the first support bar 21.
When the support mechanism 2 is in the first state, the second support bar 24 slides to the third position, and when the support mechanism 2 is in the second state, the second support bar 24 slides to the fourth position. The sliding connection of the second supporting bar 24 and the first supporting bar 21 can not only support the first supporting bar 21, but also does not affect the switching of the first supporting bar 21 between the first position and the second position.
Preferably, two second supporting bars 24 are provided in the present embodiment, and the two second supporting bars 24 are arranged in parallel along the second direction M. It will be appreciated that the number of the second support bars 24 is not limited to two, but may be three or more.
As shown in fig. 4, preferably, in order to drive the second supporting strip 24 to move, the lower supporting assembly further includes a second driving member 25, the second driving member 25 is disposed on the frame body 1, and an output end of the second driving member 25 is connected to the second supporting strip 24 for driving the second supporting strip 24 to move along the second direction M. Preferably, the second drive member 25 is a cylinder or a ram. Preferably, a second driving member 25 is connected to each end of each second supporting bar 24 along the first direction L, so as to respectively drive the second supporting bars 24 to slide along the second direction M.
As shown in fig. 5 and 6, preferably, the substrate detection apparatus further includes a guide mechanism 3 so as not to affect the sliding of the first support bar 21 and the second support bar 24 after the connection and to ensure that the two can stably slide relative to each other. The guide structures 3 are disposed at the intersecting positions of the first support bar 21 and the second support bar 24, and the guide structures 3 provide a guide for the first support bar 21 to slide along the first direction L and provide a guide for the second support bar 24 to slide along the second direction M.
Preferably, the guide mechanism 3 includes a third guide rail 31, a third slider 32, a fourth slider 33, and a fourth guide rail 34. The third guide rail 31 is connected to the second support bar 24, and the length direction of the third guide rail 31 is consistent with the length direction of the second support bar 24, so that the area of the undetected area is not increased by the third guide rail 31. The third slider 32 is slidably disposed on the third rail 31. The fourth slider 33 is connected to the third slider 32 and slidably connected to the fourth guide rail 34. The fourth guide rail 34 is connected to the first support bar 21, and the longitudinal direction of the fourth guide rail 34 is the same as the longitudinal direction of the first support bar 21, so that the area of the undetected area is not increased by the fourth guide rail 34.
Example two
The second embodiment is substantially the same as the first embodiment, and the difference between the second embodiment and the first embodiment is that in order to reduce the cost, the second driving members 25 are respectively disposed at two ends of only one of the second supporting bars 24.
In order to synchronously switch each second supporting strip 24 between the third position and the fourth position, the lower supporting assembly further includes a lower connecting plate (not shown in the figure), the two ends of the second supporting strip 24 along the first direction L are both connected with the lower connecting plate, and two adjacent second supporting strips 24 are connected through the lower connecting plate.
Preferably, to improve the stability of the second supporting bar 24 switching between the third position and the fourth position, the lower supporting assembly further includes a lower guiding assembly (not shown in the figure), and the lower guiding assembly includes a lower guide rail and a lower slider slidably connected to the lower guide rail. The length direction of the lower guide rail is parallel to the second direction M, and the two ends of the second supporting strip 24 along the first direction L are both connected with lower sliding blocks. A lower guide rail is arranged on the frame body 1 corresponding to the lower slide block.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A substrate detection apparatus, comprising:
a frame body (1);
the supporting mechanism (2) is used for supporting a substrate to be detected, the supporting mechanism (2) is connected to the frame body (1) in a sliding mode so as to be switched between a first state and a second state, and projections of the supporting mechanism (2) on the substrate do not coincide when the supporting mechanism is in the first state and the second state.
2. The substrate detection apparatus according to claim 1, wherein the support mechanism (2) comprises an upper support assembly comprising:
a plurality of first supporting bars (21) arranged in parallel along a first direction (L) to support the substrate; the first supporting strips (21) extend along a second direction (M), and two ends of the first supporting strips (21) along the second direction (M) are respectively connected to the frame body (1) in a sliding mode along the first direction (L); the first direction (L) is perpendicular to the second direction (M);
the first support bar (21) slides to a first position when the support mechanism (2) is in the first state, and the first support bar (21) slides to a second position when the support mechanism (2) is in the second state.
3. The substrate detection apparatus of claim 2, wherein the upper support assembly further comprises:
the two ends of the first supporting strips (21) along the second direction (M) are connected with the first connecting plates (22), and two adjacent first supporting strips (21) are connected through the first connecting plates (22).
4. The substrate detection apparatus of claim 2, wherein the upper support assembly further comprises:
The upper guide assembly comprises a first guide rail (26) and a first sliding block (27) which is connected with the first guide rail (26) in a sliding mode;
the length direction of the first guide rail (26) is parallel to the first direction (L), the two ends of the first supporting strip (21) along the second direction (M) are both connected with the first sliding blocks (27), and the first guide rail (26) is arranged on the frame body (1) at a position corresponding to the first sliding blocks (27).
5. The substrate detection apparatus of claim 3, wherein the upper support assembly further comprises:
the first driving piece (23) is arranged on the frame body (1), and the output end of the first driving piece (23) is connected with the first supporting strip (21) or the first connecting plate (22) so as to drive the first supporting strip (21) to move along the first direction (L).
6. The substrate detection apparatus according to claim 2, wherein the support mechanism (2) further comprises a lower support assembly comprising:
the second supporting strip (24) extends along the first direction (L), two ends of the second supporting strip (24) along the first direction (L) are respectively connected to the frame body (1) in a sliding mode along a second direction (M), and the second supporting strip (24) is connected with the first supporting strip (21) in a sliding mode to support the first supporting strip (21);
When the supporting mechanism (2) is in the first state, the second supporting strip (24) slides to a third position, and when the supporting mechanism (2) is in the second state, the second supporting strip (24) slides to a fourth position.
7. The substrate detection apparatus according to claim 6, wherein the number of the second support bars (24) is not less than two, all the second support bars (24) being arranged in parallel along the second direction (M); the lower support assembly further comprises:
the lower connecting plate, second support bar (24) are followed the both ends of first direction (L) all are connected with the lower connecting plate, adjacent two second support bar (24) pass through the lower connecting plate is connected.
8. The substrate detection apparatus of claim 7, wherein the lower support assembly further comprises:
the second driving piece (25) is arranged on the frame body (1), the output end of the second driving piece (25) is connected with the second supporting strip (24) to drive the second supporting strip (24) to move in the second direction (M).
9. The substrate inspection apparatus according to any one of claims 6 to 8, further comprising:
Guiding mechanism (3), first support strip (21) with the crossing position of second support strip (24) all is provided with guiding mechanism (3), guiding mechanism (3) do first support strip (21) are followed first direction (L) slides and provides the direction, and do second support strip (24) are followed second direction (M) slides and provides the direction.
10. The substrate detection apparatus according to claim 9, wherein the guide mechanism (3) includes a third guide rail (31), a third slider (32), a fourth slider (33), and a fourth guide rail (34); the third guide rail (31) is connected to the second supporting strip (24), and the length direction of the third guide rail (31) is consistent with that of the second supporting strip (24); the third sliding block (32) is arranged on the third guide rail (31) in a sliding manner; the fourth sliding block (33) is connected with the third sliding block (32) and is in sliding connection with the fourth guide rail (34); the fourth guide rail (34) is connected to the first support bar (21), and the longitudinal direction of the fourth guide rail (34) coincides with the longitudinal direction of the first support bar (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010707443.XA CN111855669B (en) | 2020-07-21 | 2020-07-21 | Substrate detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010707443.XA CN111855669B (en) | 2020-07-21 | 2020-07-21 | Substrate detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111855669A true CN111855669A (en) | 2020-10-30 |
| CN111855669B CN111855669B (en) | 2023-05-12 |
Family
ID=73002219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010707443.XA Active CN111855669B (en) | 2020-07-21 | 2020-07-21 | Substrate detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111855669B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104979256A (en) * | 2015-07-31 | 2015-10-14 | 京东方科技集团股份有限公司 | Substrate conveying device |
| CN106044232A (en) * | 2016-07-26 | 2016-10-26 | 京东方科技集团股份有限公司 | Substrate taking device |
| CN106098601A (en) * | 2016-06-30 | 2016-11-09 | 京东方科技集团股份有限公司 | The support means of a kind of substrate, drying equipment and related work method |
| CN109406104A (en) * | 2018-12-13 | 2019-03-01 | 苏州精濑光电有限公司 | A kind of detection platform and detection device |
| CN109427637A (en) * | 2017-08-30 | 2019-03-05 | 株式会社斯库林集团 | Substrate inversion set, substrate board treatment and baseplate support device and its method |
| CN109724999A (en) * | 2018-12-26 | 2019-05-07 | 江苏东旭亿泰智能装备有限公司 | Glass substrate detection device |
| CN110333611A (en) * | 2019-06-29 | 2019-10-15 | 苏州精濑光电有限公司 | A kind of detection method of supporting mechanism and display panel |
| CN211812281U (en) * | 2019-08-08 | 2020-10-30 | 东旭光电科技股份有限公司 | Glass substrate conveying device and glass substrate inspection equipment |
-
2020
- 2020-07-21 CN CN202010707443.XA patent/CN111855669B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104979256A (en) * | 2015-07-31 | 2015-10-14 | 京东方科技集团股份有限公司 | Substrate conveying device |
| CN106098601A (en) * | 2016-06-30 | 2016-11-09 | 京东方科技集团股份有限公司 | The support means of a kind of substrate, drying equipment and related work method |
| CN106044232A (en) * | 2016-07-26 | 2016-10-26 | 京东方科技集团股份有限公司 | Substrate taking device |
| CN109427637A (en) * | 2017-08-30 | 2019-03-05 | 株式会社斯库林集团 | Substrate inversion set, substrate board treatment and baseplate support device and its method |
| CN109406104A (en) * | 2018-12-13 | 2019-03-01 | 苏州精濑光电有限公司 | A kind of detection platform and detection device |
| CN109724999A (en) * | 2018-12-26 | 2019-05-07 | 江苏东旭亿泰智能装备有限公司 | Glass substrate detection device |
| CN110333611A (en) * | 2019-06-29 | 2019-10-15 | 苏州精濑光电有限公司 | A kind of detection method of supporting mechanism and display panel |
| CN211812281U (en) * | 2019-08-08 | 2020-10-30 | 东旭光电科技股份有限公司 | Glass substrate conveying device and glass substrate inspection equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111855669B (en) | 2023-05-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107658234B (en) | Display panel and display device | |
| CN203785652U (en) | Electrical core thickness and width test machine | |
| CN103620482B (en) | Flaw detection apparatus and defect detecting method | |
| KR101219782B1 (en) | Mobile Camera Lens Inspection System | |
| KR101728014B1 (en) | Bending Test Apparatus for Flexible Display Device | |
| CN108107347A (en) | A kind of automatic crimping method | |
| CN108672312A (en) | Optical detector, optical detecting method and computer readable storage medium | |
| KR20140056659A (en) | Touch mode liquid crystal display device and inspecting method thereof | |
| WO2015032106A1 (en) | Light-on test fixture, and testing method for liquid crystal panel | |
| CN111855669A (en) | Substrate detection device | |
| WO2015058528A1 (en) | Short circuit detection method for optical grating substrate | |
| CN218995193U (en) | Detection device for screen of electronic product | |
| KR20100003688A (en) | Inspection device for defects of liquid crystal display | |
| CN111897153A (en) | Shading equipment for panel detection | |
| CN105842557A (en) | Illumination tool having detection function | |
| CN207907826U (en) | A kind of polar ear detection device | |
| CN110738951A (en) | automatic detection equipment for burning | |
| CN214308616U (en) | PCB board linewidth line spacing measuring device | |
| KR20140005766U (en) | Automatic optical inspection equipment | |
| KR200478246Y1 (en) | Circuit recheck machine | |
| CN112798611A (en) | Double-station circuit board visual detection system | |
| CN208861104U (en) | For connecting the semi-automatic reflexed tooling and equipment of T-FPC and main FPC on display panel | |
| CN221101049U (en) | LED display product level difference detection device | |
| CN201352202Y (en) | Automatic optical detection device | |
| CN216526602U (en) | Liquid crystal display module touch scribing test mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |