CN111854589B - Quick calibration device and calibration method for contact type displacement sensor array - Google Patents

Quick calibration device and calibration method for contact type displacement sensor array Download PDF

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Publication number
CN111854589B
CN111854589B CN201910354804.4A CN201910354804A CN111854589B CN 111854589 B CN111854589 B CN 111854589B CN 201910354804 A CN201910354804 A CN 201910354804A CN 111854589 B CN111854589 B CN 111854589B
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calibration
sensor array
sensor
outer sleeve
shaped
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CN111854589A (en
Inventor
叶瑞夺
王超
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Research Institute of Physical and Chemical Engineering of Nuclear Industry
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Research Institute of Physical and Chemical Engineering of Nuclear Industry
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B7/31Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention discloses a rapid calibration device of a contact type displacement sensor array, which comprises a working arm, a suspension mechanism and a calibration body, wherein the working arm is connected with the suspension mechanism; the working arm is provided with a sensor array and a plurality of V-shaped positioning structures, and the sensor array comprises a plurality of sensors which are arranged in a linear manner; the outer hoisting mechanism suspends the calibration body through the hanging ring so that the bottom of the outer sleeve is attached to the top end of the V-shaped positioning structure correspondingly arranged below the outer sleeve to be used for supporting the working arm, and the calibration body is contacted with the measuring head of the sensor to be used for calibrating the sensor. The outer sleeve is in contact with the V-shaped positioning structure and does not enable the working arm to bear load, and the measuring head of the sensor is in contact with the calibrating body, so that the calibration and zero setting of all sensors in the array are completed at one time, the calibration speed is high, the calibration is accurate, and the calibration time is shortened.

Description

Quick calibration device and calibration method for contact type displacement sensor array
Technical Field
The invention belongs to the technical field of measurement and test, and particularly relates to a rapid calibration device and a rapid calibration method for a contact type displacement sensor array.
Background
At present, a large-range and high-precision straightness measuring device is adopted for accurately measuring the straightness of the inner axis of the thin-wall long cylinder with the large length-diameter ratio. The main body part of the straightness measuring equipment is a linear contact type displacement sensor array, the sensor array is formed by linearly arranging a plurality of differential type inductance displacement sensors with the same model, and the zero position datum line straightness error of the sensor array is larger due to the tiny difference of the geometric dimension and the zero position of each sensor, and each inductance displacement sensor is required to be calibrated by a micro-motion displacement table before each use, so that the calibration efficiency is low and the measurement efficiency is low.
Disclosure of Invention
The invention aims to provide a rapid calibration device for a contact type displacement sensor array, which has the advantages of simple structure, simple operation, shortened calibration time and high calibration efficiency.
The technical scheme of the invention is as follows:
A rapid calibration device of a contact type displacement sensor array comprises a working arm, a suspension mechanism and a calibration body;
the working arm is provided with a sensor array and a plurality of V-shaped positioning structures, and the sensor array comprises a plurality of sensors which are arranged in a linear manner;
The outer sleeve is arranged below the hanging ring, the calibration body penetrates into the outer sleeve in a working state, the outer hanging mechanism hangs the calibration body through the hanging ring so that the bottom of the outer sleeve is attached to the top end of the V-shaped positioning structure correspondingly arranged below the outer sleeve to be used for supporting the working arm, and the calibration body is contacted with the measuring head of the sensor to be used for calibrating the sensor.
In the above technical scheme, a groove is formed on the working arm, the V-shaped positioning structure is installed in the groove, the V-shaped positioning structure is uniformly arranged along the length direction of the working arm, and the position of the suspension mechanism corresponds to the position of the V-shaped positioning structure.
In the above technical scheme, V type location structure includes V type bearing support and 2V type bearings, V type bearing support installs in the recess of work arm, and 2V type bearings pass through the axostylus axostyle symmetry and install on V type bearing support in order to form the ascending V type groove of opening.
In the technical scheme, the V-shaped groove formed on the V-shaped bearing is matched with the outer sleeve, so that the outer wall of the outer sleeve is tightly attached to the V-shaped groove.
In the above technical solution, the length of the calibration body is the same as the length of the linear sensor array, so as to ensure that the calibration body covers all the sensors in the sensor array.
In the above technical solution, the calibration body is a cylinder, and a bottom bus of the calibration body is a straight line.
In the above technical scheme, the measuring head of the sensor is vertically contacted with the bottommost bus of the calibration body, and the top end position of the measuring head of the sensor is higher than the top end position of the V-shaped positioning structure.
In the technical scheme, the outer sleeve is sleeved outside the calibration body along the axial section of the calibration body and is used for hanging and fixing the calibration body.
In the above technical scheme, the number of the hanging rings is at least 2, and the number of the outer sleeves connected with the hanging rings is at least 2.
Another object of the present invention is to provide a calibration method of a rapid calibration device based on a contact displacement sensor array, comprising the steps of:
(1) And (3) installing a calibration body: the calibration body is sleeved in the outer sleeve, so that the suspension arm lifts the calibration body, the bottom of the outer sleeve is attached to the bearing supporting device, and meanwhile, each sensor measuring head in the sensor array is perpendicular to the bottommost generatrix of the calibration body;
(2) Sensor array calibration: and starting the sensor array, and performing calibration zero setting on the current state of the measuring head of each sensor to finish the rapid calibration of the sensor array.
The invention has the advantages and positive effects that:
1. the suspension mechanism lifts the calibration body, ensures that the outer sleeve contacts with the V-shaped positioning structure and does not lead the working arm to bear load, and the measuring head of the sensor contacts with the calibration body so as to lead the calibration and zero setting of all the sensors in the array to be completed at one time, thereby having fast calibration speed, accurate calibration and shortened calibration time.
2. The higher the processing grade of the calibration body, the smaller the linear error rate and the smaller the surface roughness, so that the better the calibration effect of the sensor is.
Drawings
FIG. 1 is a schematic diagram of the structure of the quick calibration device of the present invention;
FIG. 2 is a calibration schematic of the quick calibration device of the present invention;
Fig. 3 is a schematic view of the structure of the suspension mechanism in the present invention.
In the figure:
1. Working arm 2, V-shaped positioning structure 3 and sensor array
4. Suspension ring 5, outer sleeve 6 and calibration body
7. Supporting seat
Detailed Description
The present invention will be described in further detail with reference to specific examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the present invention.
Example 1
As shown in fig. 1 and 2, the rapid calibration device for a contact displacement sensor array 3 of the present invention includes a working arm 1, a suspension mechanism, and a calibration body 6.
One end of the working arm 1 is fixedly connected with a supporting seat 7 for supporting the working arm 1, a sensor array 3 and 2V-shaped positioning structures 2 are installed on the working arm 1, and the sensor array 3 comprises a plurality of sensors which are arranged in a linear mode.
The suspension mechanism comprises 2 suspension rings 4 and an outer sleeve 5, wherein the suspension rings 4 and the outer sleeve 5 are used for being connected with an external suspension mechanism, the outer sleeve 5 is arranged below the suspension rings 4, a calibration body 6 penetrates into the outer sleeve 5 in a working state, the external suspension mechanism suspends the calibration body 6 through the suspension rings 4 so that the bottom of the outer sleeve 5 is attached to the top end of a V-shaped positioning structure 2 correspondingly arranged below the outer sleeve 5 for supporting a working arm 1, and the calibration body 6 is contacted with a measuring head of a sensor for calibrating the sensor.
Further, the V-shaped positioning structure 2 comprises a V-shaped bearing bracket and 2V-shaped bearings, the V-shaped bearing bracket is installed in the groove of the working arm 1, and the 2V-shaped bearings are symmetrically installed on the V-shaped bearing bracket through a shaft rod to form a V-shaped groove with an upward opening.
Further, the V-shaped groove formed on the V-shaped bearing is matched with the outer sleeve 5, so that the outer wall of the outer sleeve 5 is tightly fitted with the V-shaped groove.
Further, the length of the calibration body 6 is the same as the length of the linear sensor array 3 to ensure that the calibration body 6 covers all sensors in the sensor array 3.
Further, the calibration body 6 is a cylinder, the bottom generatrix of the calibration body 6 is a straight line, the straightness error of the calibration body 6 is 0.002mm, the cylindricity error is 0.003mm, the surface roughness is Ra0.2μm, and the measuring head of the sensor is vertically contacted with the bottommost generatrix of the calibration body 6.
Further, the outer sleeve 5 is sleeved outside the calibration body 6 along an axial section of the calibration body 6 for suspending and fixing the calibration body 6.
Further, the top end position of the measuring head of the sensor is higher than the top end position of the V-shaped positioning structure 2.
According to the rapid calibration device, the sensor array 3 and the V-shaped positioning structure 2 are arranged on the working arm 1, the outer sleeve 5 of the suspension mechanism is matched with the V-shaped bearing, the position of the suspension mechanism corresponds to the position of the V-shaped positioning structure 2 arranged on the working arm 1, and the outer sleeve 5 is just attached to the V-shaped groove of the V-shaped bearing through the external hoisting mechanism without bearing the working arm 1 because the weight of the calibration body 6 is large so as to avoid bending deformation of the working arm 1 caused by the calibration body 6; and the measuring head of the sensor array 3 is vertically contacted with the bus at the bottommost part of the calibration body 6, and the installation errors of the sensor and the V-shaped bearing, the plane errors of the working arm 1 and other machining assembly errors and zero errors of the sensor are all corrected into straightness errors of the calibration body 6 through the calibration device, so that the calibration and zero setting of all the sensors of the sensor array 3 are completed at one time, the calibration time is shortened to 15% of the calibration time of the micro displacement table, and the calibration efficiency is high.
Example 2
The calibration method using the rapid calibration device of the invention specifically comprises the following steps:
(1) The calibration body 6 is mounted: the calibration body 6 is sleeved in the outer sleeve 5, so that the suspension arm lifts the calibration body 6, the bottom of the outer sleeve 5 is attached to the V-shaped bearing, and meanwhile, each sensor measuring head in the sensor array 3 is perpendicular to the bottommost bus of the calibration body 6;
(2) Sensor array 3 calibration: and starting the sensor array 3, and performing calibration zero setting on the current state of the measuring head of each sensor to finish the rapid calibration of the sensor array 3.
Outside hoist and mount mechanism adjusts outer sleeve 5 joint laminating on V type bearing, guarantees that work arm 1 does not bear the weight of and can not influence work arm 1 and warp, and outer sleeve 5 just laminates with V type bearing, and the gauge head and the calibration body 6 bottom generating line vertical contact of each sensor calibrate sensor array 3 behind the location calibration body 6, and the later stage of being convenient for is through sensor array 3 to long section of thick bamboo class work piece measurement straightness accuracy.
Example 3
On the basis of embodiment 1, a groove is formed on the working arm 1, a V-shaped positioning structure 2 is installed in the groove, the V-shaped positioning structure 2 is uniformly arranged along the length direction of the working arm 1, and the suspension mechanism is arranged corresponding to the position of the V-shaped positioning structure 2.
Spatially relative terms, such as "upper," "lower," "left," "right," and the like, may be used in the embodiments for ease of description to describe one element or feature's relationship to another element or feature's illustrated in the figures. It will be understood that the spatial terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "under" other elements or features would then be oriented "over" the other elements or features. Thus, the exemplary term "lower" may encompass both an upper and lower orientation. The device may be otherwise positioned (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
Moreover, relational terms such as "first" and "second", and the like, may be used solely to distinguish one element from another element having the same name, without necessarily requiring or implying any actual such relationship or order between such elements.
The foregoing has described exemplary embodiments of the invention, it being understood that any simple variations, modifications, or other equivalent arrangements which would not unduly obscure the invention may be made by those skilled in the art without departing from the spirit of the invention.

Claims (8)

1. A rapid calibration device for a contact displacement sensor array, characterized in that: comprises a working arm, a suspension mechanism and a calibration body;
the working arm is provided with a sensor array and a plurality of V-shaped positioning structures, and the sensor array comprises a plurality of sensors which are arranged in a linear manner;
The outer sleeve is arranged below the hanging ring, the calibration body penetrates into the outer sleeve in a working state, the outer hanging mechanism hangs the calibration body through the hanging ring so that the bottom of the outer sleeve is attached to the top end of the V-shaped positioning structure correspondingly arranged below the outer sleeve to be used for supporting the working arm, and the calibration body is contacted with the measuring head of the sensor to be used for calibrating the sensor;
the working arm is provided with a groove, the V-shaped positioning structure is arranged in the groove, the V-shaped positioning structure is uniformly arranged along the length direction of the working arm, and the suspension mechanism is correspondingly arranged with the V-shaped positioning structure;
The V-shaped positioning structure comprises a V-shaped bearing bracket and 2V-shaped bearings, wherein the V-shaped bearing bracket is arranged in a groove of the working arm, and the 2V-shaped bearings are symmetrically arranged on the V-shaped bearing bracket through a shaft rod to form a V-shaped groove with an upward opening;
the calibrating body is a cylinder, the bottom bus of the calibrating body is a straight line, the straightness error of the calibrating body is 0.002mm, the cylindricity error of the calibrating body is 0.003mm, the surface roughness is 0.2 mu m, and the measuring head of the sensor is vertically contacted with the bottommost bus of the calibrating body.
2. The rapid calibration device of claim 1, wherein: the V-shaped groove formed on the V-shaped bearing is matched with the outer sleeve, so that the outer wall of the outer sleeve is tightly attached to the V-shaped groove.
3. The rapid calibration device according to any one of claims 1-2, wherein: the length of the calibration body is the same as the length of the linear sensor array to ensure that the calibration body covers all sensors in the sensor array.
4. A rapid calibration device according to claim 3, wherein: the measuring head of the sensor is vertically contacted with the bottommost bus of the calibration body.
5. The rapid calibration device of claim 4, wherein: the outer sleeve is sleeved outside the calibration body along the axial section of the calibration body and is used for hanging and fixing the calibration body.
6. The rapid calibration device of claim 5, wherein: the number of the hanging rings is at least 2, and the number of the outer sleeves connected with the hanging rings is at least 2.
7. The rapid calibration device of claim 6, wherein: the top end position of the measuring head of the sensor is higher than the top end position of the V-shaped positioning structure.
8. A calibration method based on the rapid calibration device of claim 7, comprising the steps of:
(1) And (3) installing a calibration body: the calibration body is sleeved in the outer sleeve, so that the suspension arm lifts the calibration body, the bottom of the outer sleeve is attached to the bearing supporting device, and meanwhile, each sensor measuring head in the sensor array is perpendicular to the bottommost generatrix of the calibration body;
(2) Sensor array calibration: and starting the sensor array, and performing calibration zero setting on the current state of the measuring head of each sensor to finish the rapid calibration of the sensor array.
CN201910354804.4A 2019-04-29 2019-04-29 Quick calibration device and calibration method for contact type displacement sensor array Active CN111854589B (en)

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CH315152A (en) * 1952-08-08 1956-07-31 Noviant Paul Georges Device for measuring the average diameter of a thread
CA1145537A (en) * 1981-03-03 1983-05-03 Domtar Inc. Roughness sensor calibration
US4576034A (en) * 1984-02-27 1986-03-18 Westinghouse Electric Corp. Adjustable radius apparatus for calibrating ultrasonic transducer array
US5748505A (en) * 1996-02-06 1998-05-05 Perceptron, Inc. Method and apparatus for calibrating a noncontact gauging sensor with respect to an external coordinate system
JP3591554B2 (en) * 1996-03-13 2004-11-24 石川島播磨重工業株式会社 Calibration device for sensor roll
CA2322367A1 (en) * 1999-10-05 2001-04-05 Perceptron, Inc. Method and apparatus for calibrating a non-contact gauging sensor with respect to an external coordinate system
CN203642896U (en) * 2013-12-17 2014-06-11 王德岭 Linear displacement sensor on-line calibration clamp
DE102016005699B3 (en) * 2016-05-12 2017-05-18 Carl Zeiss Automated Inspection GmbH Method for calibrating a measuring device for measuring body parts and other workpieces and measuring device suitable for carrying out the method

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