CN111842940A - Ultra-precision machining method and device based on combined cutting - Google Patents

Ultra-precision machining method and device based on combined cutting Download PDF

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Publication number
CN111842940A
CN111842940A CN202010750798.7A CN202010750798A CN111842940A CN 111842940 A CN111842940 A CN 111842940A CN 202010750798 A CN202010750798 A CN 202010750798A CN 111842940 A CN111842940 A CN 111842940A
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ultra
cutting
precision
diamond
elliptical vibration
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杜东兴
毛强
孔金星
汤金钢
黄文�
李星占
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Institute of Mechanical Manufacturing Technology of CAEP
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Institute of Mechanical Manufacturing Technology of CAEP
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Priority to CN202010750798.7A priority Critical patent/CN111842940A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B5/00Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P25/00Auxiliary treatment of workpieces, before or during machining operations, to facilitate the action of the tool or the attainment of a desired final condition of the work, e.g. relief of internal stress
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/10Arrangements for cooling or lubricating tools or work
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Abstract

The invention discloses an ultraprecise machining method based on composite cutting, which comprises the following steps: starting cooling liquid, precisely turning the workpiece by using a hard alloy cutter, and flattening the surface of the workpiece; starting an ultrasonic elliptical vibration device to perform ultrasonic elliptical vibration cutting; simultaneously, spraying cooling liquid to the tool tip of the diamond tool by using a low-temperature micro-lubricating device; semi-precision turning is carried out on the hard alloy flattening workpiece by using a diamond cutter; starting an ultrasonic elliptical vibration device, and performing ultrasonic elliptical vibration cutting by the ultrasonic elliptical vibration device; simultaneously, spraying cooling liquid to the tool tip of the diamond tool by using a low-temperature micro-lubricating device; and precisely machining the semi-precision turning workpiece by using a diamond cutter to finally finish machining. The invention relates to an ultra-precision machining method based on low-temperature micro-lubrication and elliptical vibration combined cutting, which is suitable for ultra-precision machining of pure iron high-plasticity materials.

Description

Ultra-precision machining method and device based on combined cutting
Technical Field
The invention relates to the technical field of precision and ultra-precision cutting, in particular to an ultra-precision machining method and an ultra-precision machining device based on composite cutting.
Background
The sample made of pure iron high-plasticity materials is a key part for physical experiment research, the manufacturing quality of the surface of the sample requires that the processed surface is ideal surface micro-morphology and the surface roughness is better than 10nm, the processed surface layer material is close to the base material and the surface deterioration layer depth is better than 100nm, the sample has almost no surface residual stress, and surface defects such as inclusion, embedding and the like cannot be brought in. Because the surface of a workpiece is not allowed to have the requirement of residual pollution in engineering use, the problem of the surface quality of a sample is solved by adopting an ultra-precise turning technology.
The high plasticity characteristic of the pure iron material, the large chip deformation, the serious work hardening and the fast tool abrasion in the cutting process, and the processed surface layer material can generate serious plastic flow under the action of cutting force, cutting heat and coupling thereof, which is the root cause of the poor processing surface quality of the pure iron sample. In order to obtain a high machined surface of a workpiece, technological measures such as optimized geometric parameters of a cutter, a coating, cutting technological parameters, a cooling and lubricating mode and the like are usually adopted in production, but the plastic deformation of a pure iron high-plastic material in machining is not fundamentally reduced, and obviously, the traditional cutting method cannot meet the technical requirements of precise physical experimental parts.
Natural single crystal diamond is known to have excellent characteristics such as high hardness, capability of grinding an extremely sharp cutting edge, and cutting an extremely thin chip, and is considered to be an ideal tool material for ultra-precision cutting. The single-point diamond ultra-precision turning can obtain the surface roughness of nanometer level and the surface precision of submicron level after one-time processing, and has wide development prospect. Literature research shows that the graphitization problem of the diamond cutter in the ultra-precision turning process of the pure iron high-plasticity material is a main factor for restricting the ultra-precision processing application of the pure iron high-plasticity material.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the invention provides an ultra-precision machining method based on combined cutting, which solves the problems that the machining surface precision is poor due to large cutting force, high cutting temperature and serious cutter abrasion in the ultra-precision cutting process of pure iron materials.
The invention is realized by the following technical scheme:
an ultra-precision machining method based on composite cutting comprises the following steps:
s1, starting cooling liquid, precisely turning a workpiece by using a hard alloy cutter, and flattening the surface of the workpiece;
s2, starting an ultrasonic elliptical vibration device, and driving a diamond cutter to generate periodic elliptical vibration by the ultrasonic elliptical vibration device to perform ultrasonic elliptical vibration cutting; meanwhile, a low-temperature micro-lubricating device is used for spraying cooling liquid to the tool tip of the diamond tool, so that the cooling and lubricating effects are realized; semi-precision turning is carried out on the hard alloy flattening workpiece by using a diamond cutter;
s3, starting an ultrasonic elliptical vibration device, and driving a diamond cutter to generate periodic elliptical vibration by the ultrasonic elliptical vibration device to perform ultrasonic elliptical vibration cutting; meanwhile, a low-temperature micro-lubricating device is used for spraying cooling liquid to the tool tip of the diamond tool, so that the cooling and lubricating effects are realized; and precisely machining the semi-precision turning workpiece by using a diamond cutter to finally finish machining.
The high plasticity characteristic of the pure iron high-plasticity material, the chip deformation is large, the work hardening is serious, the cutter abrasion is fast in the cutting process, and the processed surface layer material generates serious plastic flow under the action of cutting force, cutting heat and coupling thereof, so that the method is the root cause of poor quality of the processed surface of a pure iron sample. In order to obtain a high machined surface of a workpiece, technological measures such as optimized geometric parameters of a cutter, a coating, cutting technological parameters, a cooling and lubricating mode and the like are usually adopted in production, but the plastic deformation of a pure iron high-plastic material in the machining process is not reduced fundamentally. Natural single crystal diamond is known to have excellent characteristics such as high hardness, capability of grinding an extremely sharp cutting edge, and cutting an extremely thin chip, and is considered to be an ideal tool material for ultra-precision cutting. However, literature research shows that the graphitization problem of the diamond cutter in the ultra-precision turning process of the pure iron high-plasticity material is a main factor for restricting the ultra-precision machining application of the pure iron high-plasticity material.
Based on the background, the method combines a hard alloy cutting method and a diamond cutting method, and adopts the hard alloy cutting and the diamond cutting to process pure iron workpieces in turn; then, an ultrasonic elliptical vibration device and a low-temperature micro-lubricating device are combined to synchronously operate;
aiming at the problems existing in the high-surface-quality cutting of the pure iron high-plasticity material, the average cutting force can be effectively reduced by the ultrasonic elliptical vibration cutting technology in an intermittent cutting mode, and the chemical wear of the cutter can be slowed down by reducing the contact time of the cutter and a workpiece, but the chemical wear of the diamond cutter in the later cutting process can also be caused by the fact that the instantaneous cutting force of the vibration cutting is larger and the instantaneous cutting temperature is increased; the invention combines the ultrasonic elliptical vibration cutting and low-temperature micro-lubrication technology, can make up the defects of the ultrasonic elliptical vibration cutting and the low-temperature micro-lubrication technology, can fully play the advantages of the ultrasonic elliptical vibration cutting and the low-temperature micro-lubrication technology, is particularly used for high-surface-quality cutting of pure iron high-plasticity materials, and solves the problem existing in the high-surface-quality cutting of the pure iron high-plasticity materials.
According to the invention, by utilizing the separation characteristic of the cutter-tool and cutter-scrap of the high-frequency ultrasonic elliptical vibration cutting, the ultrasonic vibration cutting mode can more effectively enable the cutting fluid to enter the actual cutting area; the auxiliary low-temperature micro-lubricating cooling and lubricating mode performs local physical modification and tool-tool/tool-scrap antifriction and lubricating effects on the material in the cutting area, locally reduces the plasticity of the material, and reduces the cutting force and the cutting temperature, thereby improving the cutting surface quality of the high-purity iron high-plasticity material.
Further preferably, in S1, the precision turning parameters of the cemented carbide tool are set as follows: the shaft speed was 500r/min, the feed rate was 20 μm/r, and the depth of cut was 10 μm.
More preferably, in S2, the ultrasonic elliptical vibration is set to 0.1 μm in parallel with the axial vibration of the blade edge, 2 μm in the vertical direction of the blade edge, and the vibration frequency is set to 100 KHz.
Further preferably, in S2, the semi-precision turning parameters of the diamond tool are set as follows: the main shaft rotating speed is 30r/min-40r/min, the feeding amount is 10 mu m/r-20 mu m/r, and the cutting depth is 10 mu m-20 mu m.
More preferably, in S3, the ultrasonic elliptical vibration is set to 0.1 μm in parallel with the axial vibration of the blade edge, 2 μm in the vertical direction of the blade edge, and the vibration frequency is set to 100 KHz.
Further preferably, in S3, the precision turning parameters of the diamond tool are set as follows: the main shaft rotating speed is 30r/min-40r/min, the feeding amount is 5 mu m/r-10 mu m/r, and the cutting depth is 3 mu m-5 mu m.
Further preferably, before the step of S1, the method further includes: the ultra-precision machining tool is preheated, the environmental temperature in the cutting process is controlled to be 20 +/-2 ℃, the humidity is controlled to be 40-60%, and the cleanliness is controlled to be more than 1000 grade.
Further preferably, after the step of S3, the method further includes: and taking down the workpiece, carrying out ultrasonic cleaning by using acetone and alcohol, and blow-drying and storing to obtain the ultra-precise workpiece surface sample.
An ultra-precision machining device is used for realizing the ultra-precision machining method based on combined cutting, and comprises an ultra-precision machining tool, a hard alloy cutting mechanism and a diamond cutting mechanism; in a working state, the hard alloy cutting mechanism is firstly arranged on an ultra-precise processing machine tool for processing, and then the diamond cutting mechanism replaces the hard alloy cutting mechanism for further processing; the hard alloy cutting mechanism comprises a hard alloy cutter and a cutter rest, the cutter rest is arranged on a Z-axis guide rail of the lathe bed of the ultra-precision machining lathe, and the hard alloy cutter is arranged on the cutter rest; the diamond cutting mechanism comprises an ultrasonic elliptical vibration device and a low-temperature micro-lubricating device; the ultrasonic elliptical vibration device is arranged on a Z-axis guide rail of the lathe bed of the ultraprecise processing machine tool through a height adjusting device, the fixed end of the height adjusting device is arranged on the lathe bed of the ultraprecise processing machine tool, and the lifting end of the height adjusting device is provided with the ultrasonic elliptical vibration device; the ultrasonic elliptic vibration device is used for mounting a diamond cutter; the low-temperature micro-lubricating device is arranged on a Z-axis guide rail of the lathe bed of the ultra-precision machining tool, and a nozzle of the low-temperature micro-lubricating device is aligned to the tool tip part of the diamond tool; and a main shaft of the lathe bed of the ultraprecise processing machine tool is provided with a pure iron workpiece.
Further preferably, the device also comprises a compressed gas storage tank and a gas pipe, wherein the compressed gas storage tank is used for storing compressed gas; one end of the air pipe is connected with the output end of the compressed gas storage tank, and the other end of the air pipe is connected with the input end of the low-temperature micro-lubricating device; and the output end of the compressed gas storage tank is provided with a pressure reducing valve.
The invention has the following advantages and beneficial effects:
1. the method combines a hard alloy cutting method and a diamond cutting method, and adopts hard alloy cutting and diamond cutting to process pure iron workpieces in turn; then, an ultrasonic elliptical vibration device and a low-temperature micro-lubricating device are adopted for synchronous operation, and by utilizing the separation characteristic of a cutter-tool and a cutter-scrap of high-frequency ultrasonic elliptical vibration cutting, the ultrasonic vibration cutting mode can more effectively enable cutting fluid to enter an actual cutting area; the auxiliary low-temperature micro-lubricating cooling and lubricating mode performs local physical modification and tool-tool/tool-scrap antifriction and lubricating effects on the material in the cutting area, locally reduces the plasticity of the material, and reduces the cutting force and the cutting temperature, thereby improving the cutting surface quality of the high-purity iron high-plasticity material.
2. The ultra-precision machining method provided by the invention can prolong the service life of the diamond cutter, and compared with the existing pure iron ultra-precision machining technology, the service life of the diamond cutter is prolonged by nearly one time; meanwhile, the roughness of the cutting surface and the depth of a surface deterioration layer can be effectively reduced. The invention is suitable for the ultra-precision machining of ferrous metal materials such as pure iron, stainless steel and the like, and can be widely popularized in the technical field of precision and ultra-precision machining.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a front view of a composite cutting apparatus for precision machining according to the present invention;
FIG. 2 is a surface optical profile of the finished product of the present invention;
FIG. 3 is a transmission electron microscope image of the surface of the finished product of the present invention.
Reference numbers and corresponding part names in the drawings: 1-ultraprecise processing machine tool body, 2-X axis, 3-main shaft, 4-vacuum chuck, 5-pure iron workpiece, 6-nozzle, 7-diamond cutter, 8-low temperature micro-lubricating device, 9-ultrasonic elliptical vibrating device, 10-air pipe, 11-pressure reducing valve, 12-compressed gas storage tank, 13-low temperature micro-lubricating device controller, 14-oil pressure gauge, 15-ultrasonic elliptical vibrating device controller, 16-Z axis, and 17-height adjusting device.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example 1
The embodiment provides an ultraprecise machining method based on composite cutting, which specifically comprises the following steps:
step 1, preheating an ultraprecise processing machine tool, controlling the environmental temperature in the cutting process to be 20 +/-2 ℃, controlling the humidity to be 40-60%, controlling the cleanliness to be more than 1000 grade, and returning the X axis and the Z axis of the machine tool to zero.
And 2, mounting the pure iron workpiece with the diameter of 30 x 10mm on a vacuum chuck of the spindle of the ultra-precision machine tool to complete dynamic balance adjustment of the workpiece.
Step 3, starting the oil-based cooling liquid, and precisely turning the pure iron workpiece by using a hard alloy cutter to flatten the surface of the pure iron workpiece; and closing the cooling liquid after flattening, and removing the hard alloy tool rest. Setting the cutting parameters of the hard alloy as follows: the spindle speed is 500r/min, the feed rate is 20 μm/r, and the cutting depth is 10 μm.
And 4, mounting the ultrasonic elliptical vibration device and the precision height adjusting device on a Z axis of the ultra-precision machine tool, mounting a diamond cutter, starting a controller of the ultrasonic elliptical vibration device, adjusting amplitude and phase difference, and finishing tool setting.
And 5, mounting the low-temperature minimal quantity lubrication device on a Z axis of the ultra-precision machine tool, aligning a nozzle of the low-temperature minimal quantity lubrication device to the cutter point of the diamond cutter of the ultrasonic elliptical vibration device, and setting appropriate parameters by adjusting a controller of the low-temperature minimal quantity lubrication device.
Step 6, starting an ultrasonic elliptical vibration device, and driving the diamond cutter to generate periodic elliptical vibration by the ultrasonic elliptical vibration device to perform ultrasonic elliptical vibration cutting; meanwhile, a low-temperature micro-lubricating device is used for spraying cooling liquid to the tool tip of the diamond tool, so that the cooling and lubricating effects are realized; semi-precision turning is carried out on the hard alloy flattening workpiece by using a diamond cutter;
ultrasonic elliptic vibration is set to be 0.1 mu m in parallel with the axial vibration of the cutter tip, 2 mu m in vertical vibration of the cutter tip and 100KHz in vibration frequency. The semi-precision turning parameters of the diamond cutter are set as follows: the main shaft rotating speed is 30r/min-40r/min, the feeding amount is 10 mu m/r-20 mu m/r, and the cutting depth is 10 mu m-20 mu m. And finishing the semi-finishing.
Step 7, starting the ultrasonic elliptical vibration device, and driving the diamond cutter to generate periodic elliptical vibration by the ultrasonic elliptical vibration device to perform ultrasonic elliptical vibration cutting; meanwhile, a low-temperature micro-lubricating device is used for spraying cooling liquid to the tool tip of the diamond tool, so that the cooling and lubricating effects are realized; and precisely machining the semi-precision turning workpiece by using a diamond cutter to finally finish machining.
Ultrasonic elliptic vibration is set to be 0.1 mu m in parallel with the axial vibration of the cutter tip, 2 mu m in vertical vibration of the cutter tip and 100KHz in vibration frequency. The precise turning parameters for setting the diamond cutter are as follows: the main shaft rotating speed is 30r/min-40r/min, the feeding amount is 5 mu m/r-10 mu m/r, and the cutting depth is 3 mu m-5 mu m. And finishing the precision machining.
And 8, closing the ultrasonic elliptical vibration device controller and the low-temperature minimal quantity lubrication device controller, taking down the pure iron workpiece, performing ultrasonic cleaning by using acetone and alcohol, drying and storing, and obtaining the ultra-precision pure iron surface sample based on the ultra-precision machining of the low-temperature minimal quantity lubrication and elliptical vibration combined cutting.
The roughness Ra of the surface of the ultra-precision processed pure iron prepared in the present invention was measured by an optical profiler and a transmission electron microscope, and the surface roughness value Sa was 6.086nm, as shown in fig. 2; as shown in fig. 3, there is nearly no surface alteration layer.
Example 2
The embodiment provides a combined cutting device for precision machining, which is used for realizing the ultra-precision machining method based on combined cutting provided by the embodiment 1, and the combined cutting device specifically comprises the following structures: the device comprises an ultraprecise processing machine tool, a hard alloy cutting mechanism and a diamond cutting mechanism; in a working state, the hard alloy cutting mechanism is firstly arranged on the ultra-precise processing machine tool for processing, and then the diamond cutting mechanism replaces the hard alloy cutting mechanism for continuously processing, namely the hard alloy cutting mechanism and the diamond cutting mechanism are adopted for sequentially processing pure iron workpieces 5 in turn.
The ultraprecise processing machine tool comprises an ultraprecise processing machine tool body 1, an X shaft 2 and a Z shaft 16 are arranged on the ultraprecise processing machine tool body 1, a main shaft 3 is arranged on the X shaft 2, a sucking disc 4 is arranged on the main shaft 3, and a pure iron workpiece 5 is adsorbed and fixed through the sucking disc 4.
The hard alloy cutting mechanism comprises a hard alloy cutter and a cutter rest, the cutter rest is arranged on a Z-axis 16 guide rail of the ultra-precision processing machine tool body 1, the hard alloy cutter is arranged on the cutter rest, and the cutter point of the hard alloy cutter is aligned to the processing surface of the pure iron workpiece 5;
the diamond cutting mechanism comprises an ultrasonic elliptical vibration device 9 and a low-temperature minimal quantity lubrication device 8. The ultrasonic elliptical vibration device 9 is arranged on a Z-axis 16 guide rail of the ultra-precision machine tool body 1 through a height adjusting device 17, the fixed end of the height adjusting device 17 is arranged on the ultra-precision machine tool body 1, and the lifting end of the height adjusting device 17 is provided with the ultrasonic elliptical vibration device 9; the ultrasonic elliptic vibration device 9 is used for mounting a diamond cutter 7, and the tool tip of the diamond cutter 7 is aligned with the processing surface of the pure iron workpiece 5; the height adjusting device 17 adopts a conventional lifting mechanism with a linear guide rail or a lead screw to realize high-precision lifting adjustment. The low-temperature micro-lubricating device 8 is arranged on a Z-axis 16 guide rail of the ultra-precision machine tool body 1, and a nozzle 6 of the low-temperature micro-lubricating device 8 is aligned with the tool tip part of the diamond tool 7; a main shaft 3 of the ultra-precision processing machine tool body 1 is provided with a pure iron workpiece 5.
The device also comprises a compressed gas storage tank 12 and a gas pipe 10, wherein the compressed gas storage tank 12 is used for storing compressed gas; one end of the air pipe 10 is connected with the output end of the compressed gas storage tank 12, and the other end of the air pipe 10 is connected with the input end of the low-temperature micro-lubricating device 8; the output end of the compressed gas storage tank 12 is provided with a pressure reducing valve 11. A low-temperature micro-lubricating device controller 13 is further arranged on a pipeline of the compressed gas storage tank 12 connected to the gas pipe 10 of the low-temperature micro-lubricating device 8, and the low-temperature micro-lubricating device controller 13 is used for controlling the on-off and the delivery quantity of the compressed gas. The low-temperature minimal quantity lubrication device controller 13 further comprises an oil pressure gauge 14, and the oil pressure gauge 14 is used for displaying the pressure of the compressed gas delivered to the low-temperature minimal quantity lubrication device 8. In addition, an ultrasonic elliptical vibration device controller 15 is also included, and the ultrasonic elliptical vibration device controller 15 is used for controlling the vibration parameters of the ultrasonic elliptical vibration device 9. Wherein, the low-temperature minimal quantity lubrication device 8, the low-temperature minimal quantity lubrication device controller, the ultrasonic elliptical vibration device and the ultrasonic elliptical vibration device controller all adopt the existing devices.
The tool tip of the diamond tool 7 is perpendicular to the processing surface of the pure iron workpiece 5, the axis of the nozzle 6 forms an included angle alpha with the surface of the pure iron workpiece 5, and the included angle alpha satisfies 0 & lt alpha & lt 90 degrees, and the alpha is 45 degrees in the embodiment.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (10)

1. An ultra-precision machining method based on composite cutting is characterized by comprising the following steps:
s1, starting cooling liquid, precisely turning a workpiece by using a hard alloy cutter, and flattening the surface of the workpiece;
s2, starting an ultrasonic elliptical vibration device, and driving a diamond cutter to generate periodic elliptical vibration by the ultrasonic elliptical vibration device to perform ultrasonic elliptical vibration cutting; meanwhile, a low-temperature micro-lubricating device is used for spraying cooling liquid to the tool tip of the diamond tool, so that the cooling and lubricating effects are realized; semi-precision turning is carried out on the hard alloy flattening workpiece by using a diamond cutter;
s3, starting an ultrasonic elliptical vibration device, and driving a diamond cutter to generate periodic elliptical vibration by the ultrasonic elliptical vibration device to perform ultrasonic elliptical vibration cutting; meanwhile, a low-temperature micro-lubricating device is used for spraying cooling liquid to the tool tip of the diamond tool, so that the cooling and lubricating effects are realized; and precisely machining the semi-precision turning workpiece by using a diamond cutter to finally finish machining.
2. The ultra-precision machining method based on composite cutting according to claim 1, wherein in S1, the precision turning parameters of the cemented carbide tool are set as follows: the shaft speed was 500r/min, the feed rate was 20 μm/r, and the depth of cut was 10 μm.
3. The ultra-precision machining method based on combined cutting according to claim 1, characterized in that in S2, ultrasonic elliptical vibration is set to 0.1 μm in parallel with the axial vibration of the tool tip, 2 μm in vertical vibration of the tool tip, and the vibration frequency is 100 KHz.
4. The method of ultra-precision machining based on composite cutting according to claim 3, wherein in the step S2, the semi-precision turning parameters of the diamond tool are set as follows: the main shaft rotating speed is 30r/min-40r/min, the feeding amount is 10 mu m/r-20 mu m/r, and the cutting depth is 10 mu m-20 mu m.
5. The ultra-precision machining method based on combined cutting according to claim 1, characterized in that in S3, ultrasonic elliptical vibration is set to 0.1 μm in parallel with the axial vibration of the tool tip, 2 μm in vertical vibration of the tool tip, and the vibration frequency is 100 KHz.
6. The method for ultra-precision machining based on composite cutting according to claim 4, wherein in the step S3, the precision turning parameters of the diamond tool are set as follows: the main shaft rotating speed is 30r/min-40r/min, the feeding amount is 5 mu m/r-10 mu m/r, and the cutting depth is 3 mu m-5 mu m.
7. The method of ultraprecision machining based on combined cutting according to claim 1, further comprising, before the step of S1: the ultra-precision machining tool is preheated, the environmental temperature in the cutting process is controlled to be 20 +/-2 ℃, the humidity is controlled to be 40-60%, and the cleanliness is controlled to be more than 1000 grade.
8. The method for ultra-precision machining based on combined cutting according to claim 1, further comprising, after the step of S3: and taking down the workpiece, carrying out ultrasonic cleaning by using acetone and alcohol, and blow-drying and storing to obtain the ultra-precise workpiece surface sample.
9. An ultra-precision machining device for realizing the ultra-precision machining method based on combined cutting as claimed in any one of claims 1 to 8, which is characterized by comprising an ultra-precision machining tool, a hard alloy cutting mechanism and a diamond cutting mechanism; in a working state, the hard alloy cutting mechanism is firstly arranged on an ultra-precise processing machine tool for processing, and then the diamond cutting mechanism replaces the hard alloy cutting mechanism for further processing;
the hard alloy cutting mechanism comprises a hard alloy cutter and a cutter rest, the cutter rest is arranged on a guide rail of a Z-axis (16) of the lathe bed (1) of the ultra-precision processing machine tool, and the hard alloy cutter is arranged on the cutter rest;
the diamond cutting mechanism comprises an ultrasonic elliptical vibration device (9) and a low-temperature micro-lubricating device (8);
the ultrasonic elliptical vibration device (9) is arranged on a Z-axis (16) guide rail of the ultra-precision processing machine tool body (1) through a height adjusting device (17), the fixed end of the height adjusting device (17) is arranged on the ultra-precision processing machine tool body (1), and the lifting end of the height adjusting device is provided with the ultrasonic elliptical vibration device (9); the ultrasonic elliptic vibration device (9) is used for mounting a diamond cutter (7);
the low-temperature micro-lubricating device (8) is arranged on a Z-axis (16) guide rail of the ultra-precision machine tool body (1), and a nozzle (6) of the low-temperature micro-lubricating device (8) is aligned to the tool tip part of the diamond tool (7);
and a main shaft (3) of the ultra-precision processing machine tool body (1) is provided with a pure iron workpiece (5).
10. The ultra-precision machining apparatus according to claim 9, further comprising a compressed gas storage tank (12) and a gas pipe (10), wherein the compressed gas storage tank (12) stores therein a compressed gas; one end of the air pipe (10) is connected with the output end of the compressed gas storage tank (12), and the other end of the air pipe (10) is connected with the input end of the low-temperature micro-lubricating device (8); and a pressure reducing valve (11) is arranged at the output end of the compressed gas storage tank (12).
CN202010750798.7A 2020-07-30 2020-07-30 Ultra-precision machining method and device based on combined cutting Pending CN111842940A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112372001A (en) * 2020-11-04 2021-02-19 深圳大学 Electric field auxiliary processing machine tool and processing method for iron-based material
CN112894478A (en) * 2021-03-05 2021-06-04 北京航空航天大学 Bionic fluctuation trace separation interface lubrication viscosity-increasing type low-damage intermittent cutting method
CN112935931A (en) * 2021-03-01 2021-06-11 燕山大学 Ultra-precision machining method for pure iron part and pure iron part
CN113070532A (en) * 2021-04-13 2021-07-06 广东工业大学 Ultra-precise cutting method based on surface microstructure design

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101966596A (en) * 2010-08-13 2011-02-09 北京航空航天大学 High-length-to-diameter ratio variable-section slender shaft ultrasonic elliptical vibration turning machining method
CN102528077A (en) * 2011-11-29 2012-07-04 清华大学 Processing method of ferrous metal super-finishing surface
CN103691969A (en) * 2013-12-06 2014-04-02 大连理工大学 Method for cutting black metal by diamond tool
CN203578791U (en) * 2013-12-06 2014-05-07 大连理工大学 Device for cutting black metal through diamond cutter
CN106001611A (en) * 2016-06-21 2016-10-12 北京航空航天大学 Precise high-speed intermittent ultrasonic vibration cutting method
CN110976914A (en) * 2019-12-14 2020-04-10 大连理工大学 Ultra-precision machining method for tungsten alloy complex curved surface part
CN111215644A (en) * 2020-02-17 2020-06-02 中国工程物理研究院机械制造工艺研究所 Ultrasonic vibration assisted cutting feedback signal detection and compensation device and method and application
CN212665091U (en) * 2020-07-30 2021-03-09 中国工程物理研究院机械制造工艺研究所 Composite cutting device for precision machining

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101966596A (en) * 2010-08-13 2011-02-09 北京航空航天大学 High-length-to-diameter ratio variable-section slender shaft ultrasonic elliptical vibration turning machining method
CN102528077A (en) * 2011-11-29 2012-07-04 清华大学 Processing method of ferrous metal super-finishing surface
CN103691969A (en) * 2013-12-06 2014-04-02 大连理工大学 Method for cutting black metal by diamond tool
CN203578791U (en) * 2013-12-06 2014-05-07 大连理工大学 Device for cutting black metal through diamond cutter
CN106001611A (en) * 2016-06-21 2016-10-12 北京航空航天大学 Precise high-speed intermittent ultrasonic vibration cutting method
US20170100781A1 (en) * 2016-06-21 2017-04-13 Beihang University High-speed precision interrupted ultrasonic vibration cutting method
CN110976914A (en) * 2019-12-14 2020-04-10 大连理工大学 Ultra-precision machining method for tungsten alloy complex curved surface part
CN111215644A (en) * 2020-02-17 2020-06-02 中国工程物理研究院机械制造工艺研究所 Ultrasonic vibration assisted cutting feedback signal detection and compensation device and method and application
CN212665091U (en) * 2020-07-30 2021-03-09 中国工程物理研究院机械制造工艺研究所 Composite cutting device for precision machining

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
何宁等: "高速切削技术", 上海科学技术出版社, pages: 183 - 185 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112372001A (en) * 2020-11-04 2021-02-19 深圳大学 Electric field auxiliary processing machine tool and processing method for iron-based material
CN112935931A (en) * 2021-03-01 2021-06-11 燕山大学 Ultra-precision machining method for pure iron part and pure iron part
CN112894478A (en) * 2021-03-05 2021-06-04 北京航空航天大学 Bionic fluctuation trace separation interface lubrication viscosity-increasing type low-damage intermittent cutting method
CN112894478B (en) * 2021-03-05 2022-02-25 北京航空航天大学 Bionic fluctuation trace separation interface lubrication viscosity-increasing type low-damage intermittent cutting method
CN113070532A (en) * 2021-04-13 2021-07-06 广东工业大学 Ultra-precise cutting method based on surface microstructure design
CN113070532B (en) * 2021-04-13 2022-06-17 广东工业大学 Ultra-precise cutting method based on surface microstructure design

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