CN111830789A - Balance mass device and photoetching equipment - Google Patents
Balance mass device and photoetching equipment Download PDFInfo
- Publication number
- CN111830789A CN111830789A CN201910310380.1A CN201910310380A CN111830789A CN 111830789 A CN111830789 A CN 111830789A CN 201910310380 A CN201910310380 A CN 201910310380A CN 111830789 A CN111830789 A CN 111830789A
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- magnetic steel
- steel array
- side plates
- balance mass
- base
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70766—Reaction force control means, e.g. countermass
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70783—Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
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- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention relates to a balance mass device, which comprises an adjusting unit, a frame unit and a magnetic steel array, wherein the adjusting unit comprises a first adjusting component and a second adjusting component; the first adjusting assembly is arranged on the outer sides of the two side plates so as to adjust the surface shape of the magnetic steel array corresponding to the outer sides of the two side plates; the second adjusting component is arranged between the two side plates to adjust the surface type of the magnetic steel array corresponding to the two side plates. The invention compensates the surface type of the magnetic steel array, and further makes the surface type of the magnetic steel array meet the requirements.
Description
Technical Field
The invention relates to the technical field of photoetching equipment, in particular to a mass balancing device and photoetching equipment.
Background
In the design of a workpiece table of a photoetching device, a high-precision linear direct-drive three-phase motor is generally adopted for servo control, meanwhile, in order to reduce the impact of the workpiece table moving at a high speed on the outside, a balance mass unit is often added, the reaction force of the workpiece table acts on the balance mass unit, so that the balance mass unit and the workpiece table move reversely, and thus, according to the law of conservation of momentum and conservation of center of mass, the energy conservation is achieved inside the workpiece table system comprising the workpiece table and the balance mass unit, and the influence on the outside of the workpiece table system is relatively small. The balance mass unit can provide a magnetic field for a coarse motion motor driving the workpiece table to move, and vibration generated by the coarse motion motor is reduced.
Present balance mass unit, including balance mass frame and magnetic steel array, bond good magnetic steel array back on balance mass frame, because the magnetic force each other of magnetic steel array and the gravity action that magnetic steel array itself received, make the deformation of collapsing appear easily in the middle of the magnetic steel array and both sides, influence the surface profile type of whole magnetic steel array, this will seriously influence the motion stroke of coarse motion motor, and then influence the power of coarse motion motor, thereby finally make the unable accurate control of motion condition of workstation, consequently must be in certain limit with magnetic steel array's deformation control.
Disclosure of Invention
The invention aims to provide a balance mass device which can solve the problem of collapse and deformation of a magnetic steel array, compensate the deformation of the magnetic steel array and further enable the magnetic steel surface type to meet the requirement.
In order to achieve the above object, the present invention provides a balance mass apparatus, including an adjusting unit, a frame unit and a magnetic steel array, wherein the adjusting unit includes a first adjusting assembly and a second adjusting assembly, the frame unit includes a top plate and two side plates connected to a first surface of the top plate and disposed oppositely, the magnetic steel array is disposed on a second surface of the top plate, and the second surface is opposite to the first surface; the first adjusting assembly is arranged on the outer sides of the two side plates so as to adjust the surface shape of the magnetic steel array corresponding to the outer sides of the two side plates; the second adjusting component is arranged between the two side plates to adjust the surface shape of the magnetic steel array corresponding to the two side plates.
Optionally, the first adjusting assembly includes a first base and at least two lateral adjusting members, at least two first screw holes are formed in one side of the first base close to the side plate at intervals along a first direction, one end of each lateral adjusting member is screwed into the first screw hole to be connected with the first base, and the other end of each lateral adjusting member is attached to the side plate; wherein the first direction is a length direction of the frame unit.
Optionally, the lateral adjusting part can be screwed out or screwed in towards a direction away from the first base, so that the surface shape of the magnetic steel array outside the two side plates is deformed upwards or downwards.
Optionally, the lateral adjusting member is a first screw, and a screw head of the first screw, which is used for being attached to the side plate, is arc-shaped.
Optionally, the second adjusting assembly includes a plurality of second bases and a plurality of middle adjusting members, the plurality of second bases are arranged at intervals along the first direction and connected between the two side plates, a plurality of second screw holes are arranged at intervals along the second direction on each second base, one end of each middle adjusting member is arranged on the second base, and the other end of each middle adjusting member passes through the second screw holes and is attached to the top plate; wherein the first direction is a width direction of the frame unit.
Optionally, the middle adjusting part can be screwed in the direction close to the second base or screwed out in the direction away from the second base, so that the surface shape of the magnetic steel array in the two side plates is deformed upwards or downwards.
Optionally, the middle adjusting part is a second screw, and the end of the screw, which is used for being attached to the top plate, of the second screw is arc-shaped.
Optionally, a back iron is further arranged between the frame unit and the magnetic steel array, and the magnetic steel array is bonded to the back iron.
The invention also provides photoetching equipment which comprises a wafer bearing table, a coarse motion motor connected with the wafer bearing table and the balance mass device, wherein an adjusting unit in the balance mass device is used for adjusting the surface shape of the magnetic steel array, and the coarse motion motor is used for pushing the wafer bearing table to move.
According to the invention, the first adjusting components are arranged on the outer sides of the two side plates of the frame unit to adjust the surface shapes of the magnetic steel arrays outside the two side plates, and the second adjusting components are arranged between the two side plates to adjust the surface shapes of the magnetic steel arrays inside the two side plates, so that the surface shapes of the two ends and the middle part of the magnetic steel arrays are compensated, and the surface shapes of the magnetic steel arrays meet the requirements.
Drawings
Fig. 1 is a schematic structural diagram of a balance mass apparatus according to an embodiment of the present invention;
FIG. 2 is a bottom view A of FIG. 1 in accordance with the present invention;
FIG. 3 is a schematic structural view of a lateral fastener and a central fastener provided in accordance with another embodiment of the present invention;
fig. 4 is a schematic structural diagram of a balancing mass apparatus according to another embodiment of the present invention;
in the figure: 1-a magnetic steel array; 2-back iron; 3-a frame unit; 31-a top plate; 32-side plate; 4-a first adjustment assembly; 41-a first base; 42-lateral adjustment; 43-lateral adjustment; 5-a second adjustment assembly; 51-a second base; 52-middle adjustment; 53-middle adjustment.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
As shown in fig. 1 and 2, a balance mass device includes an adjusting unit, a frame unit 3 and a magnetic steel array 1, wherein the adjusting unit includes a first adjusting component 4 and a second adjusting component 5, the frame unit 3 includes a top plate 31 and two side plates 32 connected to a first surface of the top plate 31 and disposed opposite to each other, the magnetic steel array 1 is disposed on a second surface of the top plate 31, and the second surface is opposite to the first surface; the first adjusting component 4 is arranged outside the two side plates 32 to adjust the surface shape of the magnetic steel array 1 corresponding to the outside of the two side plates 32; the second adjusting component 5 is arranged between the two side plates 32 to adjust the surface shape of the magnetic steel array 1 corresponding to the two side plates 32.
Specifically, the second surface upper berth of roof 31 is equipped with magnet steel array 1, magnet steel array 1 comprises a plurality of magnet steel blocks according to certain mode of arranging, and the magnetic pole of adjacent magnet steel block can be the same or different according to specific demand. And, frame element 3 with still be provided with back iron 2 between magnet steel array 1, magnet steel array 1 bond in on back iron 2, back iron 2 is used for fixed magnet steel array 1 and optimizes the magnetic field distribution in order to increase magnetic field intensity. Through the first adjusting component 4, the surface shape of the magnetic steel array 1 corresponding to the outside of the two side plates 32, namely the surface shape of the two ends of the magnetic steel array 1, can be changed; through the second adjusting component 5, the surface shape corresponding to the magnetic steel array 1 in the two side plates 32, namely the surface shape in the middle of the magnetic steel array 1, can be changed.
Further, the first adjusting component 4 includes a first base 41 and at least two lateral adjusting members 42, at least two first screw holes are formed in one side of the first base 41 close to the side plate 32 at intervals along a first direction, one end of each of the lateral adjusting members 42 is screwed into the first screw hole to be connected with the first base 41, and the other end of each of the lateral adjusting members 42 is attached to the side plate 32.
Specifically, the first base 41 is disposed at two ends of a first surface (a side away from the magnetic steel array 1) of the top plate 31, the first direction is a length direction of the frame unit 3, and at least two lateral adjusting members 42 are disposed on the first base 41, in this embodiment, at least two first screw holes are uniformly disposed on the first base 41 at two ends along the first direction, the number and the interval of the first screw holes are determined according to actual conditions, the first screw holes may be blind holes or through holes, one end of each lateral adjusting member 42 having external threads is screwed into the first screw hole, the other end is always attached to the side plate 32, the lateral adjusting member 42 is rotated to change the distance relative to the first base 41, so as to change the deformation of the first base 41, thereby adjusting the surface shape of the magnetic steel array 1 corresponding to two sides outside the side plate 32, and the two ends of the magnetic steel array 1 are in a surface shape.
Further, the lateral adjusting member 42 can be screwed out in a direction away from the first base 41 or screwed in a direction close to the first base 41, so that the surface shape of the magnetic steel array 1 corresponding to the two side plates 32 is deformed upwards or downwards.
Specifically, side direction regulating part 42 is to keeping away from the in-process of the direction back-out of first base 41, because side direction regulating part 42's the other end all the time with curb plate 32 laminates, then with the one end that first base 41 is connected for can apply when first screw back-out first base 41 ascending thrust, so that first base 41 takes place the deformation of upwards warping after receiving thrust, and then makes and is corresponding to two outside curb plate 32 the face type of magnet steel array 1, promptly the face type at magnet steel array 1 both ends upwards warp, in order to reach the regulation the purpose of the face type at magnet steel array 1 both ends.
If the degree of upward warpage adjustment exceeds the requirement, the lateral adjustment member 42 can be screwed in a direction close to the first base 41, and a downward pulling force is applied to the first base 41 by the end of the lateral adjustment member 42 connected to the first base 41 during screwing, so that the first base 41 is subjected to the downward warpage deformation after receiving the pulling force, and further the surface shapes at the two ends of the magnetic steel array 1 are deformed downward, so as to achieve the purpose of adjusting the surface shapes at the two ends of the magnetic steel array 1.
Further, the second adjusting assembly 5 includes a plurality of second bases 51 and a plurality of middle adjusting members 52, the plurality of second bases 51 are disposed along the first direction at intervals and connected between the two side plates 32, each of the second bases 51 is disposed along the second direction at intervals and provided with a plurality of second screw holes, one end of each of the middle adjusting members 52 is disposed on the second base 51, and the other end thereof passes through the second screw holes and is attached to the top plate 31.
Specifically, the second bases 51 are disposed below the top plate 31, two ends of each second base 51 are respectively connected to the side plates 32, each second base 51 is provided with a plurality of middle adjusting members 52, the number and the distance of the middle adjusting members 52 are determined according to actual conditions, and the second direction is the width direction of the frame unit 3. In this embodiment, 3 second bases 51 are provided, a plurality of second screw holes are uniformly formed in each second base 51 along the second direction, so as to mount corresponding middle adjusting pieces 52, the other end of each middle adjusting piece 52 having an external thread is screwed into the second screw hole and passes through the second screw hole to be attached to the top plate 31, and the middle adjusting pieces 52 are rotated to change the distance between the middle adjusting pieces 52 and the second bases 51, so that the deformation of the second bases 51 can be changed, and the surface shape of the magnetic steel array 1 corresponding to the two side plates 32, that is, the surface shape of the middle of the magnetic steel array 1 can be adjusted.
Further, the middle adjusting member 52 can be screwed in a direction approaching to the second base 51 or screwed out in a direction departing from the second base 51, so as to deform the surface shape of the magnetic steel array 1 corresponding to the two side plates 32 upwards or downwards.
Specifically, middle part regulating part 52 is to being close to the in-process of the direction precession of second base 51, because the other end of middle part regulating part 52 all the time with roof 31 laminates middle part regulating part 52 for can apply when the second screw precession roof 31 thrust upwards, so that roof 31 takes place warping deformation upwards after receiving thrust, and then makes and is corresponding to two in the curb plate 32 the face type of magnet steel array 1, promptly the face type in the middle part of magnet steel array 1 upwards warp, in order to reach the regulation the mesh of the face type in the middle part of magnet steel array 1.
If the degree of upwards warping adjustment exceeds the requirement, also can through with middle part regulating part 52 back to the direction back to second base 51 is unscrewed, so that the thrust that magnet steel array 1 received reduces, relies on the action of gravity, makes the face type in magnet steel array 1 middle part is down warp, in order to reach the purpose of adjusting the face type in magnet steel array 1 middle part.
Further, the lateral adjusting member is a first screw, and a screw head of the first screw, which is attached to the side plate 32, is arc-shaped. In specific implementation, the first screw may be a common screw, and in order to reduce scratches on the surface of the side plate 32 of the frame unit 3 and achieve smoother adjustment, a screw head of the first screw is configured to be an arc shape, as shown in fig. 3, a screw head of the lateral adjusting member 43 is configured to be an arc shape, and a half-round head screw, a ball head screw, and the like in a standard member may be selected.
Similarly, the middle adjusting member is a second screw, and the end of the screw used for the attachment of the second screw to the top plate 31 is arc-shaped. The second screw may be a common screw, and in order to reduce scratches on the surface of the top plate 31 of the frame unit 3 and achieve smoother adjustment, the end of the second screw is configured to be arc-shaped, as shown in fig. 3, the end of the middle adjusting member 53 is arc-shaped, and such a design is mostly non-standard members.
The preferred lateral and medial adjustment members 43, 53 are applied to the balance mass apparatus as shown in fig. 4 to provide smoother adjustment and to facilitate reduced surface damage to the frame unit.
The invention also provides photoetching equipment which comprises a wafer bearing table, a coarse motion motor connected with the wafer bearing table and the balance mass device, wherein an adjusting unit in the balance mass device is used for adjusting the surface shape of the magnetic steel array 1, and the coarse motion motor is used for pushing the wafer bearing table to move.
The surface type of the magnetic steel array is adjusted through the adjusting unit in the mass balancing device, so that the surface type of the magnetic steel array meets requirements, the influence on the stroke of the coarse motion motor is reduced, and the requirements can be met when the coarse motion motor drives the wafer bearing table to move.
In summary, in the balance mass apparatus provided in the embodiment of the present invention, the first adjusting assembly is disposed outside the two side plates of the frame unit to adjust the surface shape of the magnetic steel array corresponding to the outside of the two side plates, and the second adjusting assembly is disposed between the two side plates to adjust the surface shape of the magnetic steel array corresponding to the inside of the two side plates, so that the surface shapes of the two ends and the middle of the magnetic steel array are compensated, and the surface shape of the magnetic steel array meets the requirement.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (9)
1. A balance mass device is characterized by comprising an adjusting unit, a frame unit and a magnetic steel array, wherein the adjusting unit comprises a first adjusting component and a second adjusting component, the frame unit comprises a top plate and two side plates which are connected to the first surface of the top plate and are oppositely arranged, the magnetic steel array is arranged on the second surface of the top plate, and the second surface is opposite to the first surface; the first adjusting assembly is arranged on the outer sides of the two side plates so as to adjust the surface shape of the magnetic steel array corresponding to the outer sides of the two side plates; the second adjusting component is arranged between the two side plates to adjust the surface shape of the magnetic steel array corresponding to the two side plates.
2. The balance mass apparatus of claim 1, wherein said first adjustment assembly comprises a first base and at least two lateral adjustment members, wherein said first base has at least two first threaded holes spaced along a first direction on a side thereof adjacent to said side plate, and each of said lateral adjustment members has one end screwed into said first threaded hole to connect with said first base and the other end engaging with said side plate; wherein the first direction is a length direction of the frame unit.
3. The balance mass of claim 2, wherein said lateral adjustment member is capable of being screwed out in a direction away from said first base or screwed in a direction close to said first base to deform the profile of said magnetic steel array outwardly of said two side plates upwardly or downwardly.
4. The balance mass of claim 3, wherein the lateral adjustment member is a first screw, and a head of the screw for engaging the side plate is rounded.
5. The balance mass apparatus of claim 2, wherein said second adjustment assembly comprises a plurality of second bases and a plurality of middle adjustment members, said plurality of second bases being spaced apart along said first direction and connected between two of said side plates, and each of said second bases having a plurality of second threaded holes spaced apart along said second direction, one end of each of said middle adjustment members being disposed on said second base and the other end of each of said middle adjustment members passing through said second threaded holes and engaging said top plate; wherein the second direction is a width direction of the frame unit.
6. The balance mass apparatus of claim 5, wherein said middle adjustment member is capable of being screwed in a direction close to said second base or screwed out in a direction away from said second base to deform a face shape corresponding to said magnetic steel array in both of said side plates upward or downward.
7. The balance mass of claim 6, wherein the central adjustment member is a second screw, and the end of the screw for engaging the top plate is rounded.
8. The balance mass of claim 1, wherein a back iron is further disposed between the frame unit and the magnetic steel array, the magnetic steel array being bonded to the back iron.
9. A lithographic apparatus comprising a stage, a coarse motion motor connected to the stage, and the balance mass apparatus of any one of claims 1 to 8, wherein the adjustment unit in the balance mass apparatus adjusts the profile of the magnetic steel array, and the coarse motion motor moves the stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910310380.1A CN111830789B (en) | 2019-04-17 | 2019-04-17 | Balance mass device and photoetching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910310380.1A CN111830789B (en) | 2019-04-17 | 2019-04-17 | Balance mass device and photoetching equipment |
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| Publication Number | Publication Date |
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| CN111830789A true CN111830789A (en) | 2020-10-27 |
| CN111830789B CN111830789B (en) | 2021-07-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910310380.1A Active CN111830789B (en) | 2019-04-17 | 2019-04-17 | Balance mass device and photoetching equipment |
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| US20050046820A1 (en) * | 2003-08-27 | 2005-03-03 | Asml Holding N.V. | Bearing arrangement for reaction mass in a controlled environment |
| CN1991593A (en) * | 2005-12-28 | 2007-07-04 | 优志旺电机株式会社 | Supporting mechanism and mask carrying stage using the same |
| US20110086315A1 (en) * | 2009-09-30 | 2011-04-14 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
| CN105487345A (en) * | 2016-01-14 | 2016-04-13 | 哈尔滨工业大学 | Electric-refrigeration-chip-based dynamic-magnetic-steel magnetic levitation dual-stage vector arc switching method and device |
| CN105629676A (en) * | 2016-01-14 | 2016-06-01 | 哈尔滨工业大学 | Vector arc stage switching method and device for double rotary balance mass-based dynamic magnetic steel type magnetic levitation workpiece stages |
| CN205827058U (en) * | 2016-04-29 | 2016-12-21 | 上海微电子装备有限公司 | Surface precision adjusting apparatus and litho machine |
-
2019
- 2019-04-17 CN CN201910310380.1A patent/CN111830789B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050046820A1 (en) * | 2003-08-27 | 2005-03-03 | Asml Holding N.V. | Bearing arrangement for reaction mass in a controlled environment |
| CN1991593A (en) * | 2005-12-28 | 2007-07-04 | 优志旺电机株式会社 | Supporting mechanism and mask carrying stage using the same |
| US20110086315A1 (en) * | 2009-09-30 | 2011-04-14 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
| CN105487345A (en) * | 2016-01-14 | 2016-04-13 | 哈尔滨工业大学 | Electric-refrigeration-chip-based dynamic-magnetic-steel magnetic levitation dual-stage vector arc switching method and device |
| CN105629676A (en) * | 2016-01-14 | 2016-06-01 | 哈尔滨工业大学 | Vector arc stage switching method and device for double rotary balance mass-based dynamic magnetic steel type magnetic levitation workpiece stages |
| CN205827058U (en) * | 2016-04-29 | 2016-12-21 | 上海微电子装备有限公司 | Surface precision adjusting apparatus and litho machine |
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| CN111830789B (en) | 2021-07-02 |
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