CN111830780B - Photomask and photomask information reading method - Google Patents
Photomask and photomask information reading method Download PDFInfo
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- CN111830780B CN111830780B CN202010611422.8A CN202010611422A CN111830780B CN 111830780 B CN111830780 B CN 111830780B CN 202010611422 A CN202010611422 A CN 202010611422A CN 111830780 B CN111830780 B CN 111830780B
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 230000005540 biological transmission Effects 0.000 claims abstract description 26
- 238000001514 detection method Methods 0.000 claims abstract description 25
- 238000007493 shaping process Methods 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims description 32
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
- G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
- G06K7/14—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation using light without selection of wavelength, e.g. sensing reflected white light
- G06K7/1404—Methods for optical code recognition
- G06K7/1408—Methods for optical code recognition the method being specifically adapted for the type of code
- G06K7/1413—1D bar codes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
- G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
- G06K7/14—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation using light without selection of wavelength, e.g. sensing reflected white light
- G06K7/1404—Methods for optical code recognition
- G06K7/1439—Methods for optical code recognition including a method step for retrieval of the optical code
Abstract
The application discloses a photomask and a photomask information reading method, and relates to the technical field of semiconductor integrated circuit manufacturing. Wherein the photomask includes a bar code area, the bar code area including: a body read pattern, a start read pattern, and a stop read pattern. Wherein the method comprises at least the steps of: determining a bar code area in a mask according to a first aspect of the present application; scanning the bar code area along a specific direction using the detection light; converting the light shield information in the bar code area into a transmission light signal with alternating strong and weak and duration time change; converting the transmitted light signal into an electrical pulse signal having alternating high and low levels and a duration of the high and low levels; shaping the electric pulse signal into a pulse digital signal; determining a start signal and a stop signal in the pulse digital signal; the pulse digital signal is sequentially converted into characters in the time domain by taking the start signal as the start signal until the end signal. The problem that the read information cannot be identified in the related technology can be solved.
Description
Technical Field
The application relates to the technical field of semiconductor integrated circuit manufacturing, in particular to a photomask and a photomask information reading method.
Background
Masks are important tools for fabricating integrated circuits, with which an already designed circuit pattern can be transferred to a silicon wafer.
Generally, the structure of the mask includes a main body read pattern region in which a circuit pattern is formed, a pre-alignment region around the main body read pattern region in which a pre-alignment mark pattern is formed, an arrow region in which an arrow mark pattern is formed, and a barcode region in which a barcode pattern is formed, the pre-alignment mark pattern being used for photolithography positioning, the arrow mark pattern being used for indicating a direction in which the mask is moved, and the barcode pattern being used for acquiring mask information corresponding to the mask.
Before transferring the designed circuit pattern to the silicon wafer using the mask, the mask information needs to be read to determine whether the mask is selected incorrectly. However, the related art has a problem in that the read information cannot be recognized when the mask information is read.
Disclosure of Invention
The application provides a photomask and a photomask information reading method, which can solve the problem that read information cannot be identified when the photomask information is read in the related technology.
In a first aspect, an embodiment of the present application provides a photomask, the photomask including a barcode region, the barcode region including:
a subject reading pattern for expressing subject reading information;
a start read pattern for expressing start read information indicating a start end of the main body read information;
and a termination read pattern for expressing termination read information for indicating a termination end of the body read information.
Optionally, the initial reading pattern is a transparent reading pattern, and a minimum distance between the initial reading pattern and an initial end of the main body reading pattern is 7-9 mm.
Optionally, the termination read pattern is a light-transmitting read pattern, and a minimum distance between the termination read pattern and a termination end of the main body read pattern is 7-9 mm.
Optionally, the main body reading pattern includes a plurality of light shielding strips and light transmitting strips with different widths; and the light shielding strips and the light transmitting strips are sequentially and alternately arranged from the initial reading end to the final reading end of the main body reading pattern.
In a second aspect, an embodiment of the present application provides a method for reading mask information, where the method includes at least the following steps:
determining a bar code area in a mask according to the first aspect of the application;
scanning the bar code area in a specific direction using detection light;
converting the light cover information in the bar code area into a transmission light signal with alternating intensity and duration of intensity;
converting the transmitted light signal into an electrical pulse signal having alternating high and low levels and a duration of the high and low levels;
shaping the electrical pulse signal into a pulse digital signal;
determining a start signal and a stop signal in the pulse digital signal;
and converting the pulse digital signal into characters in sequence in the time domain by taking the starting signal as the starting signal until the ending signal.
Optionally, the step of determining the barcode area where the mask information is located includes:
a start read pattern, a body read pattern, and an end read pattern of the bar code area are determined.
Optionally, the step of scanning the barcode region along a specific direction using detection light includes:
and using detection light to sequentially scan the initial reading pattern, the main body reading pattern and the ending reading pattern according to the sequence of the mask information in the time domain.
Optionally, the step of converting the mask information in the barcode region into a transmitted light signal having alternating intensity and duration of intensity, includes:
sequentially converting the mask information in the initial reading pattern, the main body reading pattern and the final reading pattern into an initial optical signal, a transmission main body optical signal and a transmission final optical signal according to the sequence of detection optical scanning; the transmitted subject optical signal has alternating intensity and duration variations in the time domain.
Optionally, the step of converting the transmitted light signal into an electrical pulse signal having a high-low level alternating and a high-low level duration change includes:
sequentially converting the transmission start optical signal, the transmission main optical signal and the transmission end optical signal into an electric pulse start signal, an electric pulse main signal and an electric pulse end signal respectively; the electric pulse main body signal has high-low level alternating change and high-low level duration change in a time domain.
And shaping to obtain a pulse start digital signal, a pulse main digital signal and a pulse end digital signal.
Optionally, the step of determining a start signal and a stop signal in the pulse digital signal includes:
determining the start signal according to the pulse start digital signal;
and determining the termination signal according to the pulse termination digital signal.
The technical scheme of the application at least comprises the following advantages: the present application provides a specific photomask, the photomask has a bar code area, the bar code area includes: a body read pattern, a start read pattern, and a stop read pattern. Scanning a bar code area in a mask along a specific direction by determining the bar code area using detection light; converting the light cover information in the bar code area into a transmission light signal with alternating intensity and duration of intensity; converting the transmitted light signal into an electrical pulse signal having alternating high and low levels and a duration of the high and low levels; shaping the electrical pulse signal into a pulse digital signal; determining a start signal and a stop signal in the pulse digital signal; the starting signal is used as a starting signal to sequentially convert the pulse digital signal into characters in the time domain until the ending signal, so that the problem that the reading information cannot be identified in the related technology is solved, the effects that the starting end of the main body reading information can be judged according to the starting reading information, the main body reading information is controlled to be identified, the ending end of the main body reading information can be judged according to the ending reading information, and the main body reading information is controlled to be identified are achieved.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present application, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a photomask according to an embodiment of the present application;
FIG. 2 is an enlarged schematic view of the initial read pattern and surrounding area in FIG. 1;
FIG. 3 is an enlarged schematic view of a portion of a subject read pattern provided in an embodiment of the present application;
FIG. 4 is a flowchart of a method for reading mask information according to an embodiment of the present application;
FIG. 5 is a schematic illustration of scanning the bar code area in a particular direction using detection light in an embodiment of the present application;
FIG. 6a is an enlarged schematic view of detection light scanning through section B of FIG. 5 in an embodiment of the application;
FIG. 6B is a schematic diagram of a transmitted light signal formed after the detection light scans through section B of FIG. 5 in an embodiment of the present application;
FIG. 6c is a schematic diagram of converting the transmitted light signal shown in FIG. 6b into an electrical pulse signal in accordance with an embodiment of the present application;
FIG. 6d is a schematic diagram of shaping the electrical pulse signal shown in FIG. 6c into a pulsed digital signal in accordance with an embodiment of the present application;
fig. 7 is a flowchart of another method for reading mask information according to an embodiment of the present application.
Detailed Description
The following description of the embodiments of the present application will be made more apparent and fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments of the application are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, or can be communicated inside the two components, or can be connected wirelessly or in a wired way. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present application described below may be combined with each other as long as they do not collide with each other.
Referring to fig. 1, a schematic diagram of a photomask according to an embodiment of the present application is shown. As shown in fig. 1, the photomask 11 includes a main pattern region 12, and a barcode region 13 is formed around the main pattern region 12.
The barcode region 13 is provided with:
a body read pattern 131, the body read pattern 131 being used to express body read information of the photomask 11.
The specific mask 11 reads information corresponding to a specific subject. The body read pattern 131 includes a start read end 1311 and an end read end 1312. During reading, information in the body read pattern 131 is sequentially read from the start read end 1311 until the end read end 1312.
As shown in fig. 3, the main body reading pattern 131 includes a plurality of light shielding bars 14 and light transmitting bars 15 having different widths; the light shielding stripes 14 and the light transmitting stripes 15 are alternately arranged in order from the start reading end 1311 to the end reading end 1312 of the main body reading pattern 131.
The bar code area 13 is also provided with: a start read pattern 132, the start read pattern 132 for expressing start read information for indicating a start end of the subject read information.
As shown in fig. 2, the initial read pattern 132 is a transparent read pattern, and the minimum distance d1 between the initial read pattern 132 and the initial end of the main body read pattern 131 is 7-9 mm.
Illustratively, the initial read pattern 132 is a light transmissive rectangle having a length L in the range of 6-10 mm and a width W in the range of 5-9 mm.
A termination read pattern 133, the termination read pattern 133 for expressing termination read information for indicating a termination end of the body read information.
The termination read pattern 133 is a light-transmitting read pattern, and the minimum distance between the termination read pattern 133 and the termination end of the body read pattern 131 is 7 to 9mm.
Illustratively, the termination read pattern 133 is a light-transmissive rectangle having a length in the range of 6-10 mm and a width in the range of 5-9 mm.
Since the subject read information is specific mark information of the mask, the specific mask can be specified by identifying the subject read information, and thus it is necessary to accurately identify the subject read information. In the process of transcoding and identifying the read information, the start end of the main body read information can be judged according to the start read information, the main body read information can be identified under control, the end of the main body read information can be judged according to the end read information, and the end of the main body read information can be identified under control.
Referring to fig. 4, a method for reading information of a photomask according to an embodiment of the present application is suitable for reading information of a photomask shown in fig. 1, and the method for reading information of a photomask may include the following steps:
step 101, determining a bar code area in a photomask.
The structure of the mask is shown in fig. 1 to 3, and will not be described here again.
Step 102, scanning the bar code area along a specific direction using the detection light.
As shown in fig. 5, the start reading pattern 132, the body reading pattern 131, and the end reading pattern 133 in the barcode region 13 are scanned in this order from the outside of the start reading pattern 132 using the detection light 16.
Step 103, converting the mask information in the bar code area into a transmitted light signal with alternating intensity and duration of intensity.
The mask information in the barcode region includes main body read information, and start read information for indicating a start end of the main body read information, and stop read information for indicating a stop end of the main body read information.
FIG. 6a is an enlarged view of the detection light 16 scanning through the portion B of FIG. 5, as shown in FIG. 6a, the main body reading pattern includes a plurality of light shielding strips and light transmitting strips having different widths; the light shielding strips and the light transmitting strips in the reading pattern from the main body are alternately arranged in turn.
FIG. 6B is a schematic diagram of the transmitted light signal formed after the detection light 16 scans through the portion B in FIG. 5, wherein the transmitted light signal is a strong signal when the detection light 16 scans through the light-transmitting strip 15, and the duration of the strong signal is determined by the width of the light-transmitting strip 15; the transmitted light signal is a weak signal as the detection light 16 scans across the light shielding strip 14, the width of the light shielding strip 14 determining the duration of the weak signal. As shown in fig. 6B, the transmitted light signal formed after the detection light 16 is scanned through the portion B in fig. 5 includes a weak signal S11, a strong signal S21, a weak signal S31, a strong signal S41, and a weak signal S51 in this order.
Since the main body reading pattern includes a plurality of light shielding strips and light transmitting strips having different widths; the light shielding strips and the light transmitting strips in the reading pattern from the main body are alternately arranged in order, so that when the detection light scans the bar code area along a specific direction, the mask information in the bar code area can be converted into a transmitted light signal having alternating intensity and duration of intensity.
Step 104, converting the transmitted light signal into an electric pulse signal with alternating high and low levels and duration of the high and low levels.
Fig. 6c is a schematic diagram of converting the transmitted light signal shown in fig. 6b into an electrical pulse signal, the converted electrical pulse signal including alternating high level signals and low level signals, the transmitted light signal of the strong signal being converted into a low level electrical pulse signal, and the transmitted light signal of the weak signal being converted into a high level electrical pulse signal. As shown in fig. 6c, converting the transmitted light signal shown in fig. 6b into an electric pulse signal includes a high level signal S12, a low level signal S22, a high level signal S32, a low level signal S42, and a high level signal S52 in this order.
Step 105, shaping the electrical pulse signal into a pulse digital signal.
Fig. 6d is a schematic diagram of the shaping of the electrical pulse signal shown in fig. 6c into a pulsed digital signal, optionally with a filter to enable shaping of the electrical pulse signal shown in fig. 6c into a square wave pulsed digital signal shown in fig. 6 d. As shown in fig. 6d, the electric pulse signal shown in fig. 6c is shaped to a pulse digital signal including a high level signal S13, a low level signal S23, a high level signal S33, a low level signal S43, and a high level signal S53 in this order.
Step 106, determining a start signal and a stop signal in the pulse digital signal.
Since the subject read information is specific mark information of the mask, the specific mask can be specified by identifying the subject read information, and thus it is necessary to accurately identify the subject read information. In the process of transcoding and identifying the read information, the start end of the main body read information can be judged according to the start read information by determining the start signal and the end signal, the main body read information is controlled to be identified, the end of the main body read information can be judged according to the end read information, and the main body read information is controlled to be identified.
Step 107, the pulse digital signals are sequentially converted into characters in time domain with the start signal as the start signal until the end signal.
In summary, the present embodiment scans a barcode region in a specific direction using detection light by determining the barcode region in a mask; converting the light shield information in the bar code area into a transmission light signal with alternating strong and weak and duration time change; converting the transmitted light signal into an electrical pulse signal having alternating high and low levels and a duration of the high and low levels; shaping the electric pulse signal into a pulse digital signal; determining a start signal and a stop signal in the pulse digital signal; the method comprises the steps of sequentially converting pulse digital signals into characters in a time domain by taking a start signal as a start signal until a stop signal, solving the problem that read information cannot be identified in the related art, judging the starting end of main body read information according to the start read information, controlling to start identifying the main body read information, judging the stopping end of the main body read information according to the stop read information, and controlling to stop identifying the main body read information.
Referring to fig. 7, another method for reading mask information according to an embodiment of the present application is suitable for reading information from the mask shown in fig. 1, and the method for reading mask information may include the following steps:
step 201, determining a start reading pattern, a body reading pattern and an end reading pattern of a bar code area.
The structure of the mask is shown in fig. 1 to 3, and will not be described here again.
Step 202, using the detection light to scan the initial reading pattern, the main reading pattern and the final reading pattern in sequence according to the sequence of the mask information in the time domain.
Step 203, converting the mask information in the initial reading pattern, the main reading pattern and the final reading pattern into an initial optical signal, a transmission main optical signal and a transmission final optical signal respectively according to the sequence of the detection optical scanning; the transmitted body optical signal has alternating intensity and duration variations in the time domain.
The mask information in the barcode region includes main body read information, and start read information for indicating a start end of the main body read information, and stop read information for indicating a stop end of the main body read information.
Since the main body reading pattern includes a plurality of light shielding strips and light transmitting strips having different widths; the light shielding strips and the light transmitting strips in the reading pattern from the main body are alternately arranged in order, so that when the detection light scans the bar code area along a specific direction, the mask information in the bar code area can be converted into a transmitted light signal having alternating intensity and duration of intensity.
Step 204, converting the transmission start optical signal, the transmission main optical signal and the transmission end optical signal into an electric pulse start signal, an electric pulse main signal and an electric pulse end signal respectively; the electric pulse main body signal has high-low level alternating change and high-low level duration change in the time domain.
Step 205, the pulse start digital signal, the pulse main digital signal and the pulse end digital signal are obtained after shaping.
Step 206, determining a start signal according to the pulse start digital signal; the termination signal is determined from the pulse termination digital signal.
Step 207, sequentially converting the pulse digital signal into characters in time domain starting with the start signal until the end signal.
In summary, the present embodiment determines the initial reading pattern, the main reading pattern, and the final reading pattern of the bar code area; using detection light to sequentially scan an initial reading pattern, a main body reading pattern and a final reading pattern according to the sequence of the photomask information in the time domain; sequentially converting the mask information in the initial reading pattern, the main body reading pattern and the final reading pattern into an initial optical signal, a transmission main body optical signal and a transmission final optical signal according to the sequence of detection optical scanning; the transmission main body optical signal has alternating strong and weak changes in time domain and duration time changes of the strong and weak; sequentially converting the transmission start optical signal, the transmission main optical signal and the transmission end optical signal into an electric pulse start signal, an electric pulse main signal and an electric pulse end signal respectively; the electric pulse main body signal has high-low level alternation and high-low level duration time variation in the time domain; shaping to obtain a pulse starting digital signal, a pulse main body digital signal and a pulse ending digital signal; determining a start signal according to the pulse start digital signal; determining a termination signal based on the pulse termination digital signal; the method comprises the steps of sequentially converting pulse digital signals into characters in a time domain by taking a start signal as a start signal until a stop signal, solving the problem that read information cannot be identified in the related art, judging the starting end of main body read information according to the start read information, controlling to start identifying the main body read information, judging the stopping end of the main body read information according to the stop read information, and controlling to stop identifying the main body read information.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the application.
Claims (1)
1. A method of reading reticle information, the method comprising at least the steps of:
using detection light to sequentially scan an initial reading pattern, a main body reading pattern and a final reading pattern according to the sequence of the photomask information in the time domain;
sequentially converting the mask information in the initial reading pattern, the main body reading pattern and the final reading pattern into an initial optical signal, a transmission main body optical signal and a transmission final optical signal according to the sequence of detection optical scanning; the transmission main body optical signal has alternating strong and weak changes in the time domain and duration time changes of the strong and weak;
sequentially converting the transmission start optical signal, the transmission main optical signal and the transmission end optical signal into an electric pulse start signal, an electric pulse main signal and an electric pulse end signal respectively; the electric pulse main body signal has high-low level alternation and high-low level duration time variation in the time domain;
shaping to obtain a pulse starting digital signal, a pulse main body digital signal and a pulse ending digital signal;
determining the start signal according to the pulse start digital signal;
determining the termination signal according to the pulse termination digital signal;
and converting the pulse digital signal into characters in sequence in the time domain by taking the starting signal as the starting signal until the ending signal.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010611422.8A CN111830780B (en) | 2020-06-30 | 2020-06-30 | Photomask and photomask information reading method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010611422.8A CN111830780B (en) | 2020-06-30 | 2020-06-30 | Photomask and photomask information reading method |
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| CN111830780A CN111830780A (en) | 2020-10-27 |
| CN111830780B true CN111830780B (en) | 2023-11-03 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4567361A (en) * | 1983-05-23 | 1986-01-28 | Gca Corporation | Reticle bar code and method and apparatus for reading same |
| EP0238067A2 (en) * | 1986-03-18 | 1987-09-23 | Nippondenso Co., Ltd. | Optical information reading apparatus |
| JPH08235300A (en) * | 1995-02-23 | 1996-09-13 | Casio Comput Co Ltd | Bar code reader |
| JP3385284B1 (en) * | 1994-11-17 | 2003-03-10 | 松下電器産業株式会社 | Optical disk and optical disk manufacturing method |
| JP5424369B1 (en) * | 2012-12-12 | 2014-02-26 | Ｎｅｃインフロンティア株式会社 | Bar code reader, bar code reading method and bar code reading program |
-
2020
- 2020-06-30 CN CN202010611422.8A patent/CN111830780B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4567361A (en) * | 1983-05-23 | 1986-01-28 | Gca Corporation | Reticle bar code and method and apparatus for reading same |
| EP0238067A2 (en) * | 1986-03-18 | 1987-09-23 | Nippondenso Co., Ltd. | Optical information reading apparatus |
| JP3385284B1 (en) * | 1994-11-17 | 2003-03-10 | 松下電器産業株式会社 | Optical disk and optical disk manufacturing method |
| JPH08235300A (en) * | 1995-02-23 | 1996-09-13 | Casio Comput Co Ltd | Bar code reader |
| JP5424369B1 (en) * | 2012-12-12 | 2014-02-26 | Ｎｅｃインフロンティア株式会社 | Bar code reader, bar code reading method and bar code reading program |
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|---|---|
| CN111830780A (en) | 2020-10-27 |
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