CN111828440A

CN111828440A - Fluid pulse pressure generator based on electromagnet driving

Info

Publication number: CN111828440A
Application number: CN202010636517.5A
Authority: CN
Inventors: 弥胜利; 杜志昌
Original assignee: Shenzhen International Graduate School of Tsinghua University
Current assignee: Shenzhen International Graduate School of Tsinghua University
Priority date: 2020-07-03
Filing date: 2020-07-03
Publication date: 2020-10-27

Abstract

The utility model provides a fluid pulse force generator based on electro-magnet drive, including the bed plate layer, the apron layer, the vibrating diaphragm, the magnetic sheet, electro-magnet and electro-magnet support, be formed with the fluid cavity on the bed plate layer, the vibrating diaphragm presss from both sides between bed plate layer and apron layer and forms sealedly to the fluid cavity, attach the magnetic sheet on the vibrating diaphragm, the electro-magnet mounting hole has been seted up on the apron layer, the electro-magnet is installed in the electro-magnet mounting hole, the electro-magnet support mounting is on the apron layer, the electro-magnet is fixed by the electro-magnet support, wherein, through giving the electro-magnet loading periodic pulse voltage signal, the electro-magnet attracts the magnetic sheet vibration of attaching together with the vibrating diaphragm, and then arouse liquid volume change in the fluid. The fluid pulse pressure generator can simply and reliably generate medium and low pressure fluid pressure pulses, the pressure control is accurate and stable, and the device can realize miniaturization and low cost.

Description

Fluid pulse pressure generator based on electromagnet driving

Technical Field

The invention relates to microfluid driving, in particular to a fluid pulse pressure generator based on electromagnet driving.

Background

The micro-fluidic chip technology has the characteristics of high throughput, high integration, miniaturization, low cost and the like, is widely applied to the fields of biology, chemistry, materials and the like, and realizes the preparation, reaction, separation, detection, simulation and analysis of complex processes and the like of samples through the drive control of fluid. The chip integrated micropump is used as a power source for driving fluid, and the aspects of stability and reliability of driving capability, simple structure, miniaturization, easy integration and the like of the chip integrated micropump become hot spots of current research in the field.

The chip integrated micropumps are classified into mechanical micropumps and non-mechanical micropumps according to the presence or absence of moving parts. The mechanical micropump has strong driving capability on fluid, stable driving process, and no adverse effect on electricity, heat, magnetism and the like on the fluid, and thus becomes the mainstream of current micropump research.

Mechanical micropumps produce unidirectional fluid flow by applying a periodic pressure to a pump membrane, causing a pressure change in the pump chamber. The pressure source for vibrating the pump membrane mainly comprises piezoelectric sheet drive, electromagnetic drive, gas drive, electrodrive and the like, but because the drive process is easy to interfere, high drive capacity is accompanied by high voltage, gas drive needs numerous and complicated peripheral devices and the like, a stable, reliable, safe, miniaturized and easy-to-integrate periodic pressure source meeting the high-flux drive requirement is still the requirement of the current micropump integration.

Disclosure of Invention

The invention mainly aims to overcome the defects of the prior art and provide a fluid pulse pressure generator based on electromagnet driving, so as to simply, reliably, stably and accurately realize the control of the pressure of the medium-low pressure fluid pulse.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a fluid pulse force generator based on electro-magnet drive, includes floor layer (1), apron layer (2), vibrating diaphragm (9), magnetism piece (10), electro-magnet (3) and electro-magnet support (4), be formed with fluid cavity (14) on floor layer (1), vibrating diaphragm (9) clamp is in between floor layer (1) and apron layer (2) and right fluid cavity (14) form sealedly, attach on vibrating diaphragm (9) magnetism piece (10), the electro-magnet mounting hole has been seted up on apron layer (2), the electro-magnet mounting hole with fluid cavity (14) are kept apart by vibrating diaphragm (9), electro-magnet (3) are installed in the electro-magnet mounting hole, electro-magnet support (4) are installed on apron layer (2), electro-magnet (3) are by electro-magnet support (4) are fixed, wherein, by applying a periodic pulse voltage signal to the electromagnet (3), the electromagnet (3) attracts the magnetically attractive piece (10) attached with the diaphragm (9) to vibrate, thereby causing a volume change of the liquid in the fluid chamber (14), generating a periodically changing hydraulic pressure.

Further:

the magnetic attraction sheet is a silicon steel sheet.

The vibrating membrane is a high-molecular rigid membrane.

The bottom plate layer (1) is bonded with the vibrating membrane (9) through a double-sided adhesive tape (12), and the magnetic suction sheet (10) is bonded with the vibrating membrane (9) through a double-sided adhesive tape (13).

A plurality of compression springs (11) are arranged between the bottom of the electromagnet (3) and the diaphragm (9) for promoting the diaphragm (9) to reset after being deformed upwards.

A plurality of top platforms are arranged in the fluid chamber (14) of the bottom plate layer (1) and used for limiting the downward deformation of the vibrating membrane (9) so as to ensure that the vibration of the vibrating membrane (9) has a determined initial state.

The cover plate layer (2) and the bottom plate layer (1) are pressed together through a plurality of through holes (15) which are uniformly distributed on the cover plate layer (2) and the bottom plate layer (1) according to a circumferential array by using a screw rod (7) and a nut (8).

Two circulation holes (21) are formed in the cover plate layer (2), a quick connector (6) is installed on each circulation hole (21), and a rubber gasket (20) is embedded below each quick connector (6); holes (18, 19) corresponding to the circulation holes (21) are formed in the vibrating membrane (9), two flow channels communicated with the fluid cavity (14) are formed in the bottom plate layer (1), and the holes of the vibrating membrane (9) are correspondingly communicated with the flow channels.

A round hole is formed in the center of the bottom surface of the electromagnet support (4), a counter bore (27) is formed in the center of the top surface of the electromagnet support, a through hole is formed in the middle of the counter bore (27), and a micro bearing (5) with a screw rod is fixedly connected in the counter bore (27) of the electromagnet support (4); the electromagnet (3) is embedded into the bottom of the electromagnet support (4) and is provided with a threaded hole (25) which is matched and connected with a stud (28) on the micro bearing (5) with the screw rod, and the distance between the electromagnet (3) and the magnetic suction sheet (10) is adjusted by rotating the micro bearing (5) with the screw rod.

Electromagnet support (4) have both sides square heavy platform, between the square heavy platform in electro-magnet (3) embedding both sides, square heavy platform is opened there is through-hole (26), apron layer (2) have screw hole (22), with screw rod (7) square heavy platform through-hole (26) with screw hole (22) cooperation on apron layer (2) layer will electromagnet support (4) are installed on apron layer (2).

The invention has the following beneficial effects:

the invention provides a fluid pulse pressure generating device based on electromagnet driving, which can generate periodically-changed fluid pressure. The fluid pulse pressure generating device generates a periodically-changed magnetic field by loading pulse voltage to the electromagnet, and the magnetic field drives the silicon steel sheet on the vibrating membrane to periodically vibrate, so that periodically-changed fluid pressure is generated in the fluid chamber. The invention can simply and reliably generate the pressure pulse of the medium-low pressure fluid, the pressure control is accurate and stable, and the device can realize the miniaturization and the low cost.

Compared with the prior art, the invention has the following advantages:

the pressure generated by the fluid pulse pressure generator has high stability and is not easily interfered by other external factors;

the output fluid pulse pressure waveform is not easy to distort in the medium and low frequency range;

the range of the output fluid pulse pressure can be quickly adjusted according to the requirement;

the device has low manufacturing cost and can be miniaturized;

the device can work at low voltage and is safe to use.

Drawings

FIG. 1 is a schematic cross-sectional view of a fluid pulse pressure generating device driven by an electromagnet according to an embodiment of the present invention;

FIG. 2 is a schematic view of the structure and the assembly of the bottom plate layer, the polymer rigid film and the silicon steel sheet in FIG. 1;

FIG. 3 is a schematic view of the structure and cooperation of the cover plate layer, the rubber gasket and the quick connector of FIG. 1;

FIG. 4 is a schematic diagram of the respective structures and mutual cooperation of the electromagnet, the spring, the electromagnet support and the micro-bearing with the screw in FIG. 1;

FIG. 5 is a schematic view of the final assembly of the preliminarily assembled structures of FIGS. 2, 3 and 4 into a whole;

fig. 6 is a schematic diagram of a fluid pulse pressure generator as a power source to drive fluid flow according to an embodiment of the present invention.

Detailed Description

The embodiments of the present invention will be described in detail below. It should be emphasized that the following description is merely exemplary in nature and is not intended to limit the scope of the invention or its application.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element. In addition, the connection may be for either a fixed or coupled or communicating function.

It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the embodiments of the present invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be in any way limiting of the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1 to 5, an embodiment of the present invention provides an electromagnet-driven fluid pulse pressure generator, including a base plate layer 1, a cover plate layer 2, a diaphragm 9, a magnetic attraction sheet 10, an electromagnet 3, and an electromagnet support 4, where a fluid chamber 14 is formed on the base plate layer 1, the diaphragm 9 is sandwiched between the base plate layer 1 and the cover plate layer 2 and seals the fluid chamber 14, the magnetic attraction sheet 10 is attached to the diaphragm 9, an electromagnet mounting hole is formed on the cover plate layer 2, the electromagnet mounting hole and the fluid chamber 14 are separated by the diaphragm 9, the electromagnet 3 is mounted in the electromagnet mounting hole, the electromagnet support 4 is mounted on the cover plate layer 2, the electromagnet 3 is fixed by the electromagnet support 4, and by applying a periodic pulse voltage signal to the electromagnet 3, the electromagnet 3 attracts the magnetically attracted piece 10 attached to the diaphragm 9 to vibrate, which in turn causes a volume change of the liquid in the fluid chamber 14, generating a periodically changing hydraulic pressure. In the embodiment of the invention, the fluid pulse pressure generation principle is as follows: by applying a periodic pulse voltage signal to the electromagnet 3, the electromagnet 3 attracts the magnetic attraction piece 10 attached with the vibration membrane 9 to vibrate, thereby causing the volume of the liquid in the fluid chamber 14 of the bottom plate layer 1 to change, and generating a periodically changing hydraulic pressure. Stability and accuracy of the fluid pulse pressure can be achieved by ensuring fluid tightness of the fluid chamber 14 on the floor layer 1 and controlling the vibration of the diaphragm 9. The fluid pulse pressure generator provided by the embodiment of the invention can simply and reliably generate medium and low pressure fluid pressure pulses, the pressure control is accurate and stable, and the device can realize miniaturization and low cost.

In an exemplary embodiment, the magnetically attractive sheet 10 may be a silicon steel sheet or other material with suitable magnetic permeability. The diaphragm 9 may be a polymer rigid film.

Referring to fig. 1 to 5, in some embodiments, a fluid pulse pressure generator based on electromagnet driving mainly includes a base plate layer 1, a cover plate layer 2, a vibrating membrane 9, a magnetic attraction sheet 10, a compression spring 11, an electromagnet 3, a micro bearing 5 with a screw, and an electromagnet support 4, which are connected by a double-sided tape, a thread structure, a screw 7, a nut 8, an interference fit, and the like.

In some embodiments, the bottom plate layer 1 is bonded to the vibrating membrane 9 through a 0.15mm double-sided adhesive tape 12, and the magnetic attraction sheet 10 is bonded to the upper surface of the vibrating membrane 9 through a 0.1mm double-sided adhesive tape 13; a screw 7 and a nut 8 with the specification of M5 are used for tightly pressing the cover plate layer 2 and the bottom plate layer 1 together through 8 through holes 15 with the diameter of 6mm uniformly distributed in a circumferential array, and the sealing performance between the bottom plate layer 1 and the vibrating membrane 9 is ensured. Then, two hole sites 21 are arranged on the cover plate layer 2, the upper half part of the cover plate layer is an M4 threaded hole, the lower half part of the cover plate layer is a circular counter bore with the diameter of 5mm, a threaded quick joint 6 is installed on the hole sites 21, and a circular tube type rubber gasket 20 with the specification of 5mm multiplied by 2.5mm multiplied by 3mm (outer diameter multiplied by inner diameter multiplied by height) is embedded below the hole sites 21; the fluid chamber 14 is communicated through the quick connector 6, the rubber gasket 20 and the

2mm round holes

18 and 19 on the diaphragm 9; the rubber gasket 20 is pressed through the quick connector 6, and the tightness of the inlet and the outlet of the fluid chamber 14 is ensured.

In some embodiments, the vibration of the vibrating membrane 9 is controlled, on one hand, the downward deformation of the vibrating membrane 9 is limited by 3 circular truncated cones 16 with the diameter of 3mm uniformly distributed on the periphery of the bottom plate layer 1, so that the vibration of the vibrating membrane 9 is ensured to have a certain initial state; on the other hand, the compression springs 11 with the diameter of 2mm are adhered to the three circular counter bores 24 on the electromagnet 3 by glue, so that the diaphragm 9 deformed upwards is ensured to be quickly reset, and the pulse pressure waveform distortion under the higher frequency is further prevented.

In some embodiments, the micro bearing 5 with the screw is fixed to the counterbore 27 of the electromagnet bracket 4 by interference fit or gluing; embedding the electromagnet 3 into the electromagnet bracket 4, and connecting the electromagnet with a stud 28 on the micro bearing 5 with a screw in a matching way through a threaded hole 25 with the specification of M4; mounting the electromagnet support 4 on the cover plate layer 2 by using a screw 7 with the specification of M5 to match with the four threaded holes 22 on the cover plate layer 2 through the four through holes 26 with the diameter of 5mm on the electromagnet support 4; finally, the distance between the electromagnet 3 and the magnetic attraction piece 10 is adjusted by rotating the miniature bearing 5 with the screw, and the adjustment of the output pulse pressure range is realized by matching with voltage control. In addition, other methods for changing the pressure range of the output pulse exist, such as replacing the magnetic attraction sheet 10 with materials with different magnetic conductivities, adjusting the thickness of the magnetic attraction sheet 10, selecting electromagnets 3 with different types, and the like.

In some embodiments, the floor layer 1 is 6mm thick and the fluid chamber 14 inside it is 2-3mm deep; the thickness of the cover plate layer 2 is 6 mm; the thickness of the vibrating membrane 9 is 0.05-0.15 mm; the thickness of the magnetic attraction piece is 0.6mm, and the diameter of the magnetic attraction piece is larger than or equal to that of the electromagnet 3.

In different embodiments, the base plate layer 1, the cover plate layer 2 and the electromagnet support 4 are not limited to be machined by using various materials with certain strength and rigidity, such as metal, plastic and the like, and the machining mode is not limited to a plurality of modes, such as machine tool machining, injection molding and the like. The diaphragm 9 is not limited to a polymer plastic film with certain rigidity, such as PET, PVC, PP, PC, and the like. The electromagnet 3, the quick connector 6, the screw 7, the nut 8, the spring 11 and the like can all adopt standard parts.

The electric signal applied to the electromagnet 3 in the fluid pulse pressure generator is not limited to be provided by a waveform generator, an analog circuit and other various modes; the input peak voltage range is 0-24V, the frequency range is 0.1-20Hz, and the low-voltage operation of the device is ensured.

The fluid pulse pressure generator is not limited to be applied to the fields of mechanical micropump driving, complex fluid pressure field simulation and the like.

Specific embodiments are further described below in conjunction with the appended drawings.

A fluid pulse pressure generator based on electromagnet driving is shown in figure 1 and comprises a bottom plate layer 1, a cover plate layer 2, a vibrating membrane 9, a magnetic suction piece 10, a compression spring 11, an electromagnet 3, a micro bearing 5 with a screw rod, an electromagnet support 4 and the like.

The base plate layer 1 and the cover plate layer 2 are processed by selecting acrylic plate material PMMA with the thickness of 6mm, and the vibration film 9 is selected to be a PET film with the diameter of 0.05mm, and both the diameters are 72 mm. As shown in fig. 2, a circular groove with a diameter of 39mm and a depth of 2mm is formed on the bottom plate layer 1, a flow channel with a width of 3mm extends from each of two ends of the circular groove, and the whole groove is used as a fluid chamber 14; 3 circular truncated cones 16 with a diameter of 3mm are uniformly distributed on the circumference of 24mm in the middle of the fluid chamber 14. As shown in fig. 2,

circular holes

18 and 19 with a diameter of 2mm are formed on the diaphragm 9, corresponding to the positions of the flow channel end points of the fluid chamber 14 on the bottom plate layer 1; as shown in fig. 3, two hole sites 21 are formed on the cover plate layer 2, and the centers of the hole sites 21 correspond to the centers of the

circular holes

18 and 19 on the diaphragm 9; the upper half of the hole 21 is an M4 threaded hole with the depth of 3mm, the lower half is a circular counter bore with the diameter of 5mm and the height of 3mm, a threaded quick joint 6 is arranged on the hole 21, and a circular tube type rubber gasket 20 with the specification of 5mm multiplied by 2.5mm multiplied by 3mm (outer diameter multiplied by inner diameter multiplied by height) is embedded below the hole. The cover plate layer 2 is provided with four threaded holes 22 with the specification of M5 for mounting the electromagnet bracket 4; a counter bore with the diameter of 39mm and the depth of 2mm is firstly processed in the middle of the cover plate layer 2 shown in figures 1 and 3, and then a through hole with the diameter of 32mm is formed in the middle of the counter bore. Eight circular through holes 15 which are uniformly distributed on the circumference with the diameter of 54mm are formed in the bottom plate layer 1, and the diameter of each through hole is 6 mm; through holes with the same specification are formed in corresponding positions on the cover plate layer 2 and the diaphragm 9.

As shown in fig. 4, an electromagnet 3 having a diameter of 30mm and a height of 22mm is selected; the working end face of the electromagnet is provided with a ring groove with the depth of 1.5mm, and 3 circular counter bores 24 which are uniformly distributed, have the depth of 0.5mm and the diameter of 2mm are processed on the ring groove; the non-working end face of the electromagnet is provided with a threaded hole with the specification of M4 and the depth of 10 mm; 3 compression springs 11 with the diameter of 2mm, the height of 3mm and the wire diameter of 0.2mm are selected and are installed in the positions of counter bores 24 on the electromagnets 3 and are fixed by glue. A screw-equipped micro-bearing 5 with an outer diameter of 11mm was selected, on which a screw 28 of M4 with a length of 6mm was placed. The whole size of the electromagnet support 4 is 45mm multiplied by 25mm multiplied by 26mm (length multiplied by width multiplied by height), a round hole with the diameter of 30mm and the height of 18mm is arranged at the center position of the bottom surface, a counter bore 27 with the diameter of 11mm and the depth of 6.5mm is arranged at the center position of the top surface, and a through hole with the diameter of 8mm is arranged in the middle of the counter bore 27; four corners of the electromagnet support 4 are provided with 4 square sinking platforms with the side length of 9mm and the depth of 16mm, and the center of each square sinking platform is provided with a through hole 26 with the diameter of 5 mm.

The fluid pulse pressure generator completes the assembly in four steps: firstly, as shown in fig. 2, a floor layer 1 is bonded to a vibrating membrane 9 through a 0.15mm double-sided adhesive tape 12, and a magnetic suction sheet 10 is bonded to the upper surface of the vibrating membrane 9 through a 0.1mm double-sided adhesive tape 13 to form a semi-assembled product 17; secondly, as shown in fig. 3, the quick connector 6 and the rubber gasket 20 are arranged at the corresponding positions of the cover plate layer 2 to form a semi-assembly product 23; then, as shown in fig. 4, the micro bearing 5 with the screw is fixedly connected to the counterbore 27 of the electromagnet support 4 by interference fit or gluing, the electromagnet 3 with the embedded spring is mounted on the electromagnet support 4 and is connected with the stud 28 on the micro bearing 5 with the screw in a matching manner, and a semi-assembly 29 is formed; finally, as shown in fig. 5, the

semi-assembled parts

17, 23, 29 are assembled into a whole 30 by means of a screw 7 with a gauge of M5 and a length of 14mm and a nut 8 with a gauge of M5.

After the assembly of the fluid pulse pressure generator is completed, the periodic pressure generation process is summarized as follows: first, the fluid chamber 14 is filled with a liquid, such as water, through the two quick connectors 6; then blocking the two quick connectors 6; the pulse voltage waveform generated by the waveform generator is amplified by the signal amplifier and then connected to the electromagnet 3 of the fluid pulse pressure generator, and finally fluid pulse pressure is generated in the fluid chamber 14.

As shown in fig. 6, the fluid pulse pressure generator can be used as a power source of the micro pump to drive the fluid to flow, and the specific operation mode is as follows: connecting one of the quick couplings 6 of a fluid pulse pressure generator (not shown in fig. 6) to the pressure loading chamber 32 through a fluid pipe 31; when the fluid pulse pressure generator is operated, the periodically changing pressure of the fluid in the pressure loading chamber 32 causes the elastic membrane structure 33 to periodically vibrate, causing the pressure of the fluid in the chamber 34 to periodically change, thereby selectively opening and closing the check valve 35 to generate the one-way flow 36.

The background of the present invention may contain background information related to the problem or environment of the present invention and does not necessarily describe the prior art. Accordingly, the inclusion in the background section is not an admission of prior art by the applicant.

The foregoing is a more detailed description of the invention in connection with specific/preferred embodiments and is not intended to limit the practice of the invention to those descriptions. It will be apparent to those skilled in the art that various substitutions and modifications can be made to the described embodiments without departing from the spirit of the invention, and these substitutions and modifications should be considered to fall within the scope of the invention. In the description herein, references to the description of the term "one embodiment," "some embodiments," "preferred embodiments," "an example," "a specific example," or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction. Although embodiments of the present invention and their advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the scope of the claims.

Claims

1. The utility model provides a fluid pulse force generator based on electro-magnet drive, its characterized in that includes floor layer (1), apron layer (2), vibrating diaphragm (9), magnetism piece (10), electro-magnet (3) and electro-magnet support (4), be formed with fluid cavity (14) on floor layer (1), vibrating diaphragm (9) are pressed from both sides bottom layer (1) with between apron layer (2) and to fluid cavity (14) formation is sealed, attach on vibrating diaphragm (9) magnetism piece (10), the electro-magnet mounting hole has been seted up on apron layer (2), the electro-magnet mounting hole with fluid cavity (14) are kept apart by vibrating diaphragm (9), electro-magnet (3) are installed in the electro-magnet mounting hole, electro-magnet support (4) are installed on apron layer (2), electro-magnet (3) are by electro-magnet support (4) are fixed, wherein, by applying a periodic pulse voltage signal to the electromagnet (3), the electromagnet (3) attracts the magnetically attractive piece (10) attached with the diaphragm (9) to vibrate, thereby causing a volume change of the liquid in the fluid chamber (14), generating a periodically changing hydraulic pressure.

2. The fluid pulse pressure generator of claim 1 wherein said magnetically attractive sheet is a silicon steel sheet.

3. The fluid pulse pressure generator of claim 1 or 2, wherein the diaphragm is a polymeric rigid membrane.

4. The fluidic pulse pressure generator according to any of claims 1 to 3, characterized in that the backsheet layer (1) is bonded to the diaphragm (9) by means of a double-sided adhesive tape (12) and the magnetic patch (10) is bonded to the diaphragm (9) by means of a double-sided adhesive tape (13).

5. The fluidic pulse pressure generator according to any of claims 1 to 4, characterized in that a plurality of compression springs (11) are arranged between the bottom of the electromagnet (3) and the diaphragm (9) for promoting the return of the diaphragm (9) after upward deformation.

6. The fluidic pulse pressure generator according to any of claims 1 to 5, characterized in that a plurality of plateaus are provided in the fluid chamber (14) of the backplate layer (1) for limiting the downward deformation of the diaphragm (9) to ensure a defined initial state of the vibration of the diaphragm (9).

7. The fluid pulse pressure generator according to any of claims 1 to 6, characterized in that the cover plate layer (2) and the base plate layer (1) are pressed together by means of a plurality of through holes (15) which are distributed in a circumferential array evenly over the cover plate layer (2) and the base plate layer (1) with screws (7) and nuts (8).

8. The fluid pulse pressure generator according to any of claims 1 to 7, characterized in that the cover plate layer (2) is opened with two through holes (21), the through holes (21) are installed with a quick connector (6), the quick connector (6) is embedded with a rubber gasket (20); holes (18, 19) corresponding to the circulation holes (21) are formed in the vibrating membrane (9), two flow channels communicated with the fluid cavity (14) are formed in the bottom plate layer (1), and the holes of the vibrating membrane (9) are correspondingly communicated with the flow channels.

9. The fluid pulse pressure generator according to any one of claims 1 to 8, characterized in that the electromagnet support (4) is provided with a circular hole at the center of the bottom surface and a counter bore (27) at the center of the top surface, the middle of the counter bore (27) is provided with a through hole, and the micro bearing (5) with a screw is fixedly connected in the counter bore (27) of the electromagnet support (4); the electromagnet (3) is embedded into the bottom of the electromagnet support (4) and is provided with a threaded hole (25) which is matched and connected with a stud (28) on the micro bearing (5) with the screw rod, and the distance between the electromagnet (3) and the magnetic suction sheet (10) is adjusted by rotating the micro bearing (5) with the screw rod.

10. The fluid pulse pressure generator according to claim 9, characterized in that the electromagnet support (4) has two side square sinkers, between which the electromagnet (3) is embedded, the square sinkers being open with through holes (26), the cover plate layer (2) having threaded holes (22), the electromagnet support (4) being mounted to the cover plate layer (2) with screws (7) engaging the through holes (26) of the square sinkers with the threaded holes (22) of the cover plate layer (2) layer.