CN111828350A - Starting method, device and system for magnetic suspension molecular pump - Google Patents
Starting method, device and system for magnetic suspension molecular pump Download PDFInfo
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- CN111828350A CN111828350A CN202010991753.9A CN202010991753A CN111828350A CN 111828350 A CN111828350 A CN 111828350A CN 202010991753 A CN202010991753 A CN 202010991753A CN 111828350 A CN111828350 A CN 111828350A
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- molecular pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/002—Details, component parts, or accessories especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Control Of Non-Positive-Displacement Pumps (AREA)
Abstract
The invention provides a starting method, a starting device and a starting system of a magnetic suspension molecular pump, which relate to the technical field of magnetic suspension molecular pump control and comprise the following steps: before the magnetic suspension molecular pump is started, the magnetic suspension molecular pump is set to be in a state to be detected; then judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not; and finally, controlling the magnetic suspension molecular pump to start under the condition of meeting the starting condition. Therefore, the embodiment can avoid the technical problem of poor suspension effect by detecting whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not and controlling the starting mode of the magnetic suspension molecular pump only when the starting condition is met.
Description
Technical Field
The invention relates to the technical field of magnetic suspension molecular pump control, in particular to a starting method, a starting device and a starting system of a magnetic suspension molecular pump.
Background
The conventional magnetic suspension molecular pump is mainly operated after being suspended, and even if the suspension state is not good, the molecular pump can be operated by operating the control panel. In addition, an operator who operates the magnetic suspension molecular pump is not always familiar with the magnetic suspension molecular pump, and therefore, the molecular pump is likely to be in poor suspension due to violent butt joint and the like.
In conclusion, the technical problem of poor suspension effect of the magnetic suspension molecular pump in the use process exists in the prior art.
Disclosure of Invention
The invention aims to provide a starting method, a starting device and a starting system of a magnetic suspension molecular pump, so as to solve the technical problem that the magnetic suspension molecular pump in the prior art is poor in suspension effect in the using process.
In a first aspect, the present invention provides a method for starting a magnetic suspension molecular pump, including: before the magnetic suspension molecular pump is started, setting the magnetic suspension molecular pump to be in a state to be detected; judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not; and if so, releasing the state to be detected, and controlling the magnetic suspension molecular pump to start.
Further, judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not includes: and judging whether the voltage/current value of the magnetic suspension molecular pump in the state to be detected is within a preset normal range.
Further, setting the magnetic suspension molecular pump to be in a state to be detected comprises: and setting a control panel of the magnetic suspension molecular pump to be in a locking state, and setting a communication module of the magnetic suspension molecular pump to be in the locking state.
Further, the starting method of the magnetic suspension molecular pump further comprises the following steps: if not, keeping the to-be-detected state of the magnetic suspension molecular pump, and giving an alarm.
Further, releasing the state to be detected includes: and releasing the locking state of the control panel of the magnetic suspension molecular pump and releasing the locking state of the communication module of the magnetic suspension molecular pump.
In a second aspect, the present invention provides a magnetic suspension molecular pump startup device, including: the setting unit is used for setting the magnetic suspension molecular pump to be in a state to be detected before the magnetic suspension molecular pump is started; the judging unit is used for judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not; and the release control unit is used for releasing the state to be detected and controlling the magnetic suspension molecular pump to start if the state to be detected is positive.
Further, the setting unit includes: and the setting module is used for setting the control panel of the magnetic suspension molecular pump to be in a locking state and setting the communication module of the magnetic suspension molecular pump to be in the locking state.
Further, the magnetic suspension molecular pump startup device further includes: and the maintaining alarm unit is used for maintaining the state to be detected of the magnetic suspension molecular pump and giving an alarm if the state is not the detected state.
In a third aspect, the present invention provides a magnetic suspension molecular pump startup system, including: a controller and a magnetic suspension molecular pump; wherein the controller includes: the system comprises an ARM processor, a double-port RAM memory, a DSP controller and a control panel which are connected with each other; the ARM processor is used for setting the magnetic suspension molecular pump to be in a state to be detected before the magnetic suspension molecular pump is started; the ARM processor is also used for setting a control panel of the magnetic suspension molecular pump to be in a locking state; the DSP controller is used for judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not; the DSP controller is used for sending a release instruction to the ARM processor through the double-port RAM memory if the magnetic suspension molecular pump is started, and controlling the magnetic suspension molecular pump to be started; the release instruction is used for releasing the state to be detected.
In a fourth aspect, the present invention further provides a computer readable medium having non-volatile program code executable by a processor, wherein the program code causes the processor to execute the magnetic levitation molecular pump startup method.
The invention provides a starting method, a starting device and a starting system of a magnetic suspension molecular pump, wherein the starting method comprises the following steps: before the magnetic suspension molecular pump is started, the magnetic suspension molecular pump is set to be in a state to be detected; then judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not; and finally, controlling the magnetic suspension molecular pump to start under the condition of meeting the starting condition. Therefore, the embodiment can improve the suspension effect of the magnetic suspension molecular pump in the use process by detecting whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not and controlling the starting of the magnetic suspension molecular pump only when the starting condition is met.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a flowchart of a starting method of a magnetic suspension molecular pump according to an embodiment of the present invention;
FIG. 2 is a flowchart of another method for starting a magnetic levitation molecular pump according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a magnetic suspension molecular pump startup device according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a magnetic suspension molecular pump startup system according to an embodiment of the present invention.
Icon:
11-a setting unit; 12-a determination unit; 13-release the control unit; 10-a magnetic molecular pump; 20-a controller; 101-a storage unit; 102-a sensor; 201-ARM processor; 202-dual port RAM memory; 203-DSP controller; 204-control panel.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The conventional magnetic suspension molecular pump is mainly operated after being suspended, and even if the suspension state is not good, the molecular pump can be operated by operating the control panel. In addition, an operator who operates the magnetic suspension molecular pump is not always familiar with the magnetic suspension molecular pump, and therefore, the molecular pump is likely to be in poor suspension due to violent butt joint and the like. In conclusion, the technical problem of poor suspension effect of the magnetic suspension molecular pump in the use process exists in the prior art. Based on the above, the invention provides a starting method, a starting device and a starting system of a magnetic suspension molecular pump, which are used for improving the suspension effect of the magnetic suspension molecular pump in the using process.
For the convenience of understanding the embodiment, a detailed description will be given to a starting method of a magnetic suspension molecular pump disclosed in the embodiment of the present invention.
Example 1:
in accordance with an embodiment of the present invention, there is provided an embodiment of a method for starting a magnetic levitation molecular pump, where the steps illustrated in the flowchart of the figure may be performed in a computer system such as a set of computer executable instructions, and where a logical order is illustrated in the flowchart, in some cases the steps illustrated or described may be performed in an order different than that illustrated herein.
Fig. 1 is a flowchart of a method for starting a magnetic suspension molecular pump according to an embodiment of the present invention, as shown in fig. 1, the method includes the following steps:
step S101, before the magnetic suspension molecular pump is started, setting the magnetic suspension molecular pump to be in a state to be detected;
step S102, judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not;
and step S103, if so, releasing the state to be detected and controlling the magnetic suspension molecular pump to start.
In the embodiment of the invention, the starting-up condition can be set by self-definition. The magnetic suspension molecular pump is set to be in a state to be detected and then judged, so that the starting and starting of the magnetic suspension molecular pump caused by misoperation can be prevented.
In practical application, the pump body and the cable interface of the magnetic suspension molecular pump are 61-pin circular aviation plugs, although openings are formed, violent butt joint can be conducted, and the suspension effect of the magnetic suspension molecular pump is influenced by the violent butt joint mode. Therefore, before the magnetic suspension molecular pump is started, the magnetic suspension molecular pump is set to be in a state to be detected; then judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not; and finally, controlling the magnetic suspension molecular pump to start under the condition of meeting the starting condition. Therefore, the embodiment of the invention can fundamentally improve the suspension effect of the magnetic suspension molecular pump in the use process by detecting whether the magnetic suspension molecular pump in the state to be detected meets the starting condition and controlling the starting of the magnetic suspension molecular pump only when the starting condition is met.
In an alternative embodiment, step S101, setting the magnetic levitation molecular pump to the state to be detected, includes the following steps: and setting a control panel of the magnetic suspension molecular pump to be in a locking state, and setting a communication module of the magnetic suspension molecular pump to be in the locking state.
In the embodiment of the present invention, the control panel may refer to an operable panel with various switches and displays. The control panel can realize the function control of the magnetic suspension molecular pump, such as: starting up/stopping off, setting rotating speed, switching communication modes, converting communication addresses, resetting molecular pumps and the like. The locking state can also be called a cut-off state, the communication module of the magnetic suspension molecular pump is set to be in the locking state, and communication between the controller and the controller (or called a console) can be cut off.
In an alternative embodiment, the step S102 of determining whether the magnetic suspension molecular pump in the state to be detected satisfies the start-up condition includes the following steps: and judging whether the voltage/current value of the magnetic suspension molecular pump in the state to be detected is within a preset normal range.
In an alternative embodiment, as shown in fig. 2, the method further comprises:
and step S104, if not, keeping the to-be-detected state of the magnetic suspension molecular pump, and giving an alarm.
The alarm can be sent to the relevant personnel in a form of short message, can be played in a form of voice playing, can be displayed through the display lamp, and has various alarm sending modes, so the alarm sending mode is not particularly limited in the embodiment of the invention.
In an optional embodiment, the releasing the state to be detected in step S103 includes:
and releasing the locking state of the control panel of the magnetic suspension molecular pump and releasing the locking state of the communication module of the magnetic suspension molecular pump.
The embodiment of the invention reduces the loss of the product caused by wrong use in the use process of the magnetic suspension molecular pump, reduces the loss of customers and manufacturers, and reduces the loss caused by a series of reasons such as installation, replacement, shutdown and the like aiming at the customers; according to manufacturers, scrapped materials can be reduced, labor force for returning to factories for maintenance is reduced, maintenance cost is reduced, and the service condition of the magnetic suspension molecular pump is simpler and more intelligent.
Example 2:
the embodiment of the invention provides a magnetic suspension molecular pump starting device, which is mainly used for executing the magnetic suspension molecular pump starting method provided by the embodiment 1.
Fig. 3 is a schematic structural diagram of a magnetic suspension molecular pump startup device according to an embodiment of the present invention. As shown in fig. 3, the starting device of the magnetic suspension molecular pump mainly includes: a setting unit 11, a judging unit 12, and a release control unit 13, wherein:
the setting unit 11 is used for setting the magnetic suspension molecular pump to be in a state to be detected before the magnetic suspension molecular pump is started;
the judging unit 12 is used for judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not;
and the release control unit 13 is used for releasing the state to be detected and controlling the starting of the magnetic suspension molecular pump if the state to be detected is positive.
The invention provides a starting device of a magnetic suspension molecular pump, which comprises: before the magnetic suspension molecular pump is started, the magnetic suspension molecular pump is set to be in a state to be detected by using a setting unit 11; then, the judgment unit 12 is used for judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not; and finally, the magnetic suspension molecular pump is controlled to be started by the release control unit 13 under the condition of meeting the starting condition. Therefore, the embodiment can improve the suspension effect of the magnetic suspension molecular pump in the use process by detecting whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not and controlling the starting of the magnetic suspension molecular pump only when the starting condition is met.
Optionally, the setting unit includes: and the setting module is used for setting the control panel of the magnetic suspension molecular pump to be in a locking state and setting the communication module of the magnetic suspension molecular pump to be in the locking state.
Optionally, the magnetic suspension molecular pump startup device further includes: and the maintaining alarm unit is used for maintaining the state to be detected of the magnetic suspension molecular pump and giving an alarm if the state is not the detected state.
Optionally, the determining unit 12 is further configured to: and judging whether the voltage/current value of the magnetic suspension molecular pump in the state to be detected is within a preset normal range.
Optionally, the unlocking control unit 13 is further configured to unlock the control panel of the magnetic levitation molecular pump, and unlock the communication module of the magnetic levitation molecular pump.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
Example 3:
fig. 4 is a schematic structural diagram of a magnetic suspension molecular pump startup system according to an embodiment of the present invention. As shown in fig. 4, includes: a magnetically levitated molecular pump 10 and a controller 20, wherein the magnetically levitated molecular pump 10 includes: a storage unit 101 and a sensor 102, the storage unit 101 is used for storing the voltage or current of the magnetic molecular pump 10, the sensor 102 can be a radial-axial sensor, and the controller 20 comprises: an ARM processor 201, a dual-port RAM memory 202, a DSP controller 203 and a control panel 204 which are connected with each other.
The ARM processor 201 is used for setting the magnetic suspension molecular pump 10 to be in a state to be detected before the magnetic suspension molecular pump 10 is started; the ARM processor 201 is further configured to set the control panel 204 of the magnetic levitation molecular pump 10 to a locked state, and set the communication module of the magnetic levitation molecular pump 10 to a locked state.
The DSP controller 203 is used for judging whether the magnetic suspension molecular pump 10 in the state to be detected meets the starting condition or not; specifically, the DSP controller 203 is configured to determine whether the voltage/current value of the magnetic suspension molecular pump 10 in the state to be detected is within a preset normal range. That is, the DSP controller 203 judges the levitation state of the magnetic molecular pump 10 by detecting whether the voltage of the radial-axial sensor or the current of the radial-axial bearing is within a preset normal range, and during the judged time period, the DSP controller 203 cuts off the remote communication state (i.e., the communication between various consoles and the controller 20 of the customer) or closes the operable state of the control panel 204.
The DSP controller 203 is used for sending a release instruction to the ARM processor 201 through the dual-port RAM 202 and controlling the magnetic suspension molecular pump 10 to start up if the release instruction is positive; the release instruction is used for releasing the state to be detected, namely releasing the locking state of the control panel 204 of the magnetic molecular pump 10 and the locking state of the communication module of the magnetic molecular pump 10. And the DSP controller 203 is used for keeping the to-be-detected state of the magnetic molecular pump 10 and giving an alarm if the magnetic molecular pump is not in the to-be-detected state.
When the magnetic molecular pump 10 is in normal suspension, the DSP controller 203 can directly restore the communication state or the operable state of the control panel 204; when the magnetic suspension molecular pump 10 is in abnormal suspension, the DSP controller 203 issues an alarm and can prevent the magnetic suspension molecular pump 10 from running, thereby prompting the user to check the connection state of the magnetic suspension molecular pump 10.
According to the starting system of the magnetic suspension molecular pump, provided by the invention, the starting mode of the magnetic suspension molecular pump 10 is controlled only when the starting condition is met by detecting whether the magnetic suspension molecular pump 10 in the state to be detected meets the starting condition, so that the suspension effect of the magnetic suspension molecular pump 10 in the using process can be improved.
In an alternative embodiment, the present embodiment also provides a computer readable medium having non-volatile program code executable by a processor, wherein the program code causes the processor to perform the method of the above method embodiment.
In addition, in the description of the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description of the present embodiment, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present embodiment. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the embodiments provided in the present embodiment, it should be understood that the disclosed method, apparatus, and system may be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is only one logical division, and there may be other divisions when actually implemented, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.
The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a non-volatile computer-readable storage medium executable by a processor. Based on such understanding, the technical solution of the present embodiment or parts of the technical solution may be essentially implemented in the form of a software product stored in a storage medium and including instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and other various media capable of storing program codes.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein.
Claims (9)
1. A starting method of a magnetic suspension molecular pump is characterized by comprising the following steps:
before the magnetic suspension molecular pump is started, setting the magnetic suspension molecular pump to be in a state to be detected;
judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not;
if so, removing the state to be detected, and controlling the magnetic suspension molecular pump to start up;
judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not, and the method comprises the following steps:
and judging whether the voltage/current value of the magnetic suspension molecular pump in the state to be detected is within a preset normal range.
2. The method of claim 1, wherein setting the magnetically levitated molecular pump to a state to be detected comprises:
and setting a control panel of the magnetic suspension molecular pump to be in a locking state, and setting a communication module of the magnetic suspension molecular pump to be in the locking state.
3. The method of claim 1, further comprising:
if not, keeping the to-be-detected state of the magnetic suspension molecular pump, and giving an alarm.
4. The method of claim 2, wherein releasing the condition to be detected comprises:
and releasing the locking state of the control panel of the magnetic suspension molecular pump and releasing the locking state of the communication module of the magnetic suspension molecular pump.
5. A magnetic suspension molecular pump starting device is characterized by comprising:
the setting unit is used for setting the magnetic suspension molecular pump to be in a state to be detected before the magnetic suspension molecular pump is started;
the judging unit is used for judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not;
the release control unit is used for releasing the state to be detected and controlling the magnetic suspension molecular pump to start if the state to be detected is the same as the state to be detected;
a determination unit further configured to: and judging whether the voltage/current value of the magnetic suspension molecular pump in the state to be detected is within a preset normal range.
6. The apparatus of claim 5, wherein the setting unit comprises:
and the setting module is used for setting the control panel of the magnetic suspension molecular pump to be in a locking state and setting the communication module of the magnetic suspension molecular pump to be in the locking state.
7. The apparatus of claim 5, further comprising:
and the maintaining alarm unit is used for maintaining the state to be detected of the magnetic suspension molecular pump and giving an alarm if the state is not the detected state.
8. A magnetic suspension molecular pump start-up system is characterized by comprising: a controller and a magnetic suspension molecular pump; wherein the controller includes: the system comprises an ARM processor, a double-port RAM memory, a DSP controller and a control panel which are connected with each other;
the ARM processor is used for setting the magnetic suspension molecular pump to be in a state to be detected before the magnetic suspension molecular pump is started;
the ARM processor is also used for setting a control panel of the magnetic suspension molecular pump to be in a locking state;
the DSP controller is used for judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not;
the DSP controller is used for sending a release instruction to the ARM processor through the double-port RAM memory if the magnetic suspension molecular pump is started, and controlling the magnetic suspension molecular pump to be started; the release instruction is used for releasing the locking state;
judging whether the magnetic suspension molecular pump in the state to be detected meets the starting condition or not, and the method comprises the following steps:
and judging whether the voltage/current value of the magnetic suspension molecular pump in the state to be detected is within a preset normal range.
9. A computer-readable medium having non-volatile program code executable by a processor, the program code causing the processor to perform the method of any of claims 1 to 4.
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| CN202010991753.9A CN111828350A (en) | 2020-09-21 | 2020-09-21 | Starting method, device and system for magnetic suspension molecular pump |
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| CN202010991753.9A CN111828350A (en) | 2020-09-21 | 2020-09-21 | Starting method, device and system for magnetic suspension molecular pump |
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| CN202010991753.9A Pending CN111828350A (en) | 2020-09-21 | 2020-09-21 | Starting method, device and system for magnetic suspension molecular pump |
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| CN103427757A (en) * | 2013-08-21 | 2013-12-04 | 北京航空航天大学 | Magnetic bearing and motor integrated control system for magnetic suspension molecular pump |
| CN103475285B (en) * | 2013-09-12 | 2016-04-20 | 北京航空航天大学 | A kind of magnetically levitated flywheel brushless DC motor control system |
| CN109217774A (en) * | 2018-11-09 | 2019-01-15 | 珠海格力电器股份有限公司 | Power-on control method and device for magnetic suspension centrifugal unit, storage medium and motor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5443368A (en) * | 1993-07-16 | 1995-08-22 | Helix Technology Corporation | Turbomolecular pump with valves and integrated electronic controls |
| EP1783373A1 (en) * | 2005-11-04 | 2007-05-09 | Power Cooler Enterprise Co., Ltd. | Method for positioning display of icon or text on fan |
| CN102425557A (en) * | 2011-12-08 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Control method for acquiring rotor suspension center of magnetic suspension molecular pump |
| CN103427757A (en) * | 2013-08-21 | 2013-12-04 | 北京航空航天大学 | Magnetic bearing and motor integrated control system for magnetic suspension molecular pump |
| CN103475285B (en) * | 2013-09-12 | 2016-04-20 | 北京航空航天大学 | A kind of magnetically levitated flywheel brushless DC motor control system |
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Application publication date: 20201027 |