CN111812868A - Integrated micro light amplitude and phase controller based on LNOI film - Google Patents
Integrated micro light amplitude and phase controller based on LNOI film Download PDFInfo
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- CN111812868A CN111812868A CN202010711874.3A CN202010711874A CN111812868A CN 111812868 A CN111812868 A CN 111812868A CN 202010711874 A CN202010711874 A CN 202010711874A CN 111812868 A CN111812868 A CN 111812868A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
Abstract
An integrated micro optical amplitude phase controller based on LNOI film is composed of optical waveguide and traveling wave electrode on LNOI film, which is composed of lithium niobate layer and SiO2The buffer layer is formed, lithium niobate heterogeneous single mode waveguide is formed on the lithium niobate layer by adopting a deposition method to form an optical waveguide, and phase controller electrodes are arranged on two sides of the optical waveguide to form a phase control unit; the two optical waveguides are divided into two parallel paths, an amplitude controller electrode is arranged between the two optical waveguides to form an amplitude control unit, and then the two optical waveguides are combined to perform interference to be used as output waveguides after the amplitude phase control of light. The invention can regulate and control the phase and the amplitude of the light field simultaneously according to the requirement; and the waveguide structure is heterogeneous of thin film lithium niobate and silicon nitride, so that the amplitude-phase controller has the advantages of low loss, high modulation efficiency, high integration and the like, has potential economic and application values, and can be applied to the fields of optical detection and optical communicationIs widely applied.
Description
Technical Field
The invention belongs to the technical field of photoelectrons, and relates to an integrated micro optical amplitude and phase controller based on a lithium niobate thin film (LNOI), which can be applied to optical communication, phased array radar, optical calculation and the like.
Background
With the increasing demand of long-distance communication such as remote sensing communication, deep space exploration and the like, the caliber and the transmitting power of the antenna are required to be continuously increased, but the manufacturing of the transmitting and receiving antenna with large caliber is very difficult in the current processing level. Distributed antenna arrays are one of the effective ways to solve this problem. The distributed antenna array is composed of a plurality of sub-antennas with smaller apertures, the sub-antennas are arranged in a specific structure, and the functions of high power, high precision, multi-target detection and the like are realized by controlling the amplitude, the phase and the polarization state of electromagnetic waves emitted by each transceiver unit by utilizing technologies such as beam forming and the like. The amplitude and phase controller is a core device in the distributed system and is also one of the main factors influencing the performance of the whole system.
The optical amplitude phase controller is used as a key device of a new generation of microwave photonic system and mainly realizes the phase and intensity control of microwave signals in an optical domain. In order to realize amplitude and phase control simultaneously, a conventional amplitude and phase controller usually needs a plurality of modulators to be cascaded through an optical fiber, which causes the disadvantages of large volume, large loss and the like. In addition, the phase instability is caused by external factors such as jitter and temperature sensitivity of the optical fiber, so that the system noise is deteriorated, and finally the performance of the whole system is reduced. The traditional lithium niobate electro-optical modulator adopts Ti diffusion or proton exchange waveguide, and the traditional amplitude-phase modulator is usually large in volume and difficult to integrate due to small refractive index difference. In conclusion, the existing separated amplitude-phase controller cannot meet the requirements of high-speed remote communication on amplitude-phase control, so that the design of an amplitude-phase modulator with high modulation efficiency, low loss and high integration degree has important significance.
Disclosure of Invention
In order to solve the technical problem, the invention provides an integrated amplitude-phase controller based on a lithium niobate thin film and a silicon nitride loading strip, wherein an optical field is coupled into a chip through an input optical fiber, and output light is also coupled into an output optical fiber through space after being controlled by the amplitude-phase controller.
In order to achieve the purpose, the invention adopts the following technical scheme:
the integrated micro light amplitude phase controller based on the LNOI film is formed by constructing an optical waveguide and a traveling wave electrode on the LNOI film, wherein the LNOI film is composed of a lithium niobate layer and SiO2The buffer layer is formed, the lithium niobate layer adopts X-cut lithium niobate, a lithium niobate heterogeneous single mode waveguide is formed on the lithium niobate layer by adopting a deposition method, so that the optical waveguide is formed, and the front end of the optical waveguide is used as an input waveguide; then, arranging phase controller electrodes on two sides of the optical waveguide to form a phase control unit; after the light wave is guided out of the phase control unit, the light wave is equally divided into two parallel optical waveguides by a Y-shaped waveguide beam splitter, an amplitude controller electrode is arranged between the two optical waveguides to form an amplitude control unit, and the amplitude controller electrode consists of an amplitude controller central electrode positioned between the two optical waveguides and two amplitude controller ground electrodes positioned at the outer sides of the two optical waveguides; after the two paths of light waves are guided out of the amplitude control unit, the two paths of light waves are interfered by a Y-shaped waveguide beam combiner to be used as output waveguides after the amplitude and phase control of the light.
The length of the LNOI thin film is 3cm, the length of the phase control unit is 1cm, and the length of the amplitude control unit is 1.7 cm; the waveguide width of the optical waveguide is 1.8 μm; the electrode spacing of the phase controller electrode is 8 μm, and the half-wave voltage is 2.7V; the distance between the amplitude control center electrode and the two amplitude control ground electrodes is 8 μm, and the half-wave voltage is 2V.
And the waveguide bending parts of the Y-shaped waveguide beam splitter and combiner are respectively bent by adopting rising and falling cosine curves.
The invention has the beneficial effects that: (1) the invention is an amplitude-phase controller, namely, the phase and the amplitude of a light field can be simultaneously regulated and controlled according to requirements; (2) the waveguide structure is formed by the isomerous thin film lithium niobate and silicon nitride materials, so that the amplitude-phase controller has the advantages of low loss, high modulation efficiency, high integration degree and the like, has potential economic and application values, and can be widely applied to the fields of optical detection and optical communication.
Drawings
FIG. 1 is a schematic diagram of the structure of an integrated micro optical amplitude phase controller based on a lithium niobate thin film (LNOI) of the present invention;
FIG. 2 is a schematic cross-sectional view of a phase control unit according to the present invention;
FIG. 3 is a schematic cross-sectional view of an amplitude control unit according to the present invention;
in the figure, 1, an input waveguide, 2, an LNOI film, 3, a phase controller electrode, 4, an amplitude controller central electrode, 5, an amplitude controller ground electrode, 6, an output waveguide, 7, a Y-shaped waveguide beam splitter, 8, a Y-shaped waveguide beam combiner, 9, an optical waveguide, 10, a lithium niobate film, 11, SiO2The buffer layer, I, phase control unit, II amplitude control unit.
Detailed Description
The invention will be further described with reference to the drawings and the following detailed description, but the invention is not limited to this embodiment.
A schematic diagram of an integrated micro optical amplitude phase controller based on a lithium niobate thin film (LNOI) of the present embodiment is shown in fig. 1. The device comprises an input waveguide 1, an LNOI film 2, namely a lithium niobate film waveguide chip, and an output waveguide 6, wherein the lithium niobate waveguide chip comprises a first-stage phase control unit I and a second-stage amplitude control unit II, namely a Mach-Zehnder intensity modulator.
The LNOI film 2 consists of a lithium niobate layer 10 and SiO2The buffer layer 11, the lithium niobate layer 10 adopts X-cut lithium niobate, the lithium niobate heterogeneous single mode waveguide formed by a deposition method on the lithium niobate layer 10 forms the optical waveguide 9, and the front end of the optical waveguide 9 is used as the input waveguide 1; then, phase controller electrodes 3 are arranged on two sides of the optical waveguide 9 to form a phase control unit I; the optical waveguide 9 is divided equally into parallel parts by a Y-shaped waveguide beam splitter 7 after exiting the phase control unit ITwo paths, an amplitude controller electrode is arranged between the two paths of optical waveguides 9 to form an amplitude control unit II, and the amplitude controller electrode consists of an amplitude controller central electrode 4 positioned between the two paths of optical waveguides 9 and two amplitude controller ground electrodes 5 positioned at the outer sides of the two paths of optical waveguides 9; after the two optical waveguides 9 exit the amplitude control unit II, the two optical waveguides are interfered by a Y-shaped waveguide beam combiner (8) and used as output waveguides 6 after the amplitude and phase control of light.
The optical field input waveguide 1 enters a first-stage phase control unit I, and the refractive index of the optical waveguide 9 is changed under the action of the traveling wave electrode, so that the phase of the optical wave in the waveguide is changed. The light modulated by the phase control unit I is equally divided into two paths by the Y-shaped waveguide beam splitter 7, enters the amplitude control unit II of the second stage, respectively enters the upper interference arm and the lower interference arm, the two paths of light generate phase difference under the action of the traveling wave electrode, then the two paths of light are interfered by the Y-shaped waveguide beam combiner 8, and the intensity after the interference is related to the phase difference of the two paths of light. The light after phase and amplitude modulation is output by the output waveguide 6, and the amplitude and phase control of the light can be completed.
The manufacturing process is simple, the lithium niobate substrate 10 is in an X-cut shape, the optical waveguide 9 is formed by depositing silicon nitride with the thickness of 500nm on the lithium niobate layer 10 by utilizing a plasma electrochemical deposition technology and then etching through RIE to form a single-mode waveguide, and the total length of the micro-amplitude phase controller in the embodiment is 3 cm. The widths of the optical waveguide 9 on the Y-shaped waveguide beam splitter and the upper and lower parallel waveguide interference arms are the same and are 1.8 mu m. The amplitude controller adopts a push-pull type electrode structure, and an electric field can be simultaneously applied to two interference arms of the amplitude controller by the structure, so that phase modulation is realized. Compared with single-arm modulation, the push-pull type electrode structure can obtain smaller control voltage, power consumption of a controller is reduced, the thickness of an electrode is 4.5 micrometers, the width of the electrode is 8 micrometers, the distance between the electrodes is 8 micrometers, in order to reduce the length of a device and ensure that the device has lower modulation voltage, the length of an interference arm needs to be reasonably set, and the length of the interference arm is 1cm in the example. The modulation length of the phase controller of the first stage is 1cm, the distance between two arms of the amplitude controller of the second stage is 24 μm, and the length is 1.7 cm.
In summary, the invention provides an integrated micro optical amplitude and phase controller based on a lithium niobate thin film (LNOI), which can well control the amplitude and phase of light simultaneously, and has the advantages of high modulation efficiency, low propagation loss and high integration level. Is expected to be widely applied in the fields of optical communication, deep space exploration and the like.
Claims (3)
1. The integrated micro light amplitude and phase controller based on the LNOI film is formed by constructing an optical waveguide (9) and a traveling wave electrode on the LNOI film, wherein the LNOI film (2) is composed of a lithium niobate layer (10) and an SiO2A buffer layer (11), characterized in that: the lithium niobate layer (10) adopts X-cut lithium niobate, a lithium niobate heterogeneous single-mode waveguide is formed on the lithium niobate layer (10) by a deposition method to form the optical waveguide (9), and the front end of the optical waveguide (9) is used as an input waveguide (1); then, phase controller electrodes (3) are arranged on two sides of the optical waveguide (9) to form a phase control unit (I); after the optical waveguide (9) exits the phase control unit (I), a Y-shaped waveguide beam splitter (7) is equally divided into two parallel optical waveguides (9), an amplitude controller electrode is arranged between the two optical waveguides (9) to form an amplitude control unit (II), and the amplitude controller electrode consists of an amplitude controller central electrode (4) positioned between the two optical waveguides (9) and two amplitude controller ground electrodes (5) positioned on the outer sides of the two optical waveguides (9); and after the two optical waveguides (9) exit from the amplitude control unit (II), the two optical waveguides are interfered by a Y-shaped waveguide beam combiner (8) and used as output waveguides (6) after the amplitude and phase of light are controlled.
2. The integrated micro optical amplitude and phase controller based on LNOI thin film as claimed in claim 1, wherein: the length of the LNOI thin film (2) is 3cm, the length of the phase control unit (I) is 1cm, and the length of the amplitude control unit (II) is 1.7 cm; the waveguide width of the optical waveguide (9) is 1.8 μm; the electrode distance of the phase controller electrode (3) is 8 mu m, and the half-wave voltage is 2.7V; the distance between the amplitude control central electrode (4) and the two amplitude control ground electrodes (5) is 8 mu m, and the half-wave voltage is 2V.
3. The integrated micro optical amplitude and phase controller based on LNOI thin film as claimed in claim 1 or 2, wherein: and waveguide bending parts of the Y-shaped waveguide beam splitter (7) and the Y-shaped waveguide beam splitter and combiner (8) are respectively bent by adopting rising and falling cosine curves.
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| CN202010711874.3A CN111812868A (en) | 2020-07-22 | 2020-07-22 | Integrated micro light amplitude and phase controller based on LNOI film |
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| CN202010711874.3A CN111812868A (en) | 2020-07-22 | 2020-07-22 | Integrated micro light amplitude and phase controller based on LNOI film |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001021854A (en) * | 1999-07-07 | 2001-01-26 | Toshiba Corp | Light transmitter |
| US20060285787A1 (en) * | 2004-12-24 | 2006-12-21 | Sumitomo Osaka Cement Co., Ltd. | Optical modulator |
| CN201007762Y (en) * | 2006-10-11 | 2008-01-16 | 北京世维通光通讯技术有限公司 | Lithium niobate electro-optical modulator for cable television system |
| CN102033335A (en) * | 2009-09-25 | 2011-04-27 | 北京浦丹光电技术有限公司 | Multifunctional integrated optical modulator and production method thereof |
| CN109856885A (en) * | 2019-03-27 | 2019-06-07 | 杭州芯耘光电科技有限公司 | A kind of negative chirped modulation device of low pressure |
-
2020
- 2020-07-22 CN CN202010711874.3A patent/CN111812868A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001021854A (en) * | 1999-07-07 | 2001-01-26 | Toshiba Corp | Light transmitter |
| US20060285787A1 (en) * | 2004-12-24 | 2006-12-21 | Sumitomo Osaka Cement Co., Ltd. | Optical modulator |
| CN201007762Y (en) * | 2006-10-11 | 2008-01-16 | 北京世维通光通讯技术有限公司 | Lithium niobate electro-optical modulator for cable television system |
| CN102033335A (en) * | 2009-09-25 | 2011-04-27 | 北京浦丹光电技术有限公司 | Multifunctional integrated optical modulator and production method thereof |
| CN109856885A (en) * | 2019-03-27 | 2019-06-07 | 杭州芯耘光电科技有限公司 | A kind of negative chirped modulation device of low pressure |
Non-Patent Citations (1)
| Title |
|---|
| ABU NAIM R. AHMED ET AL: "Low-Voltage Modulators Using Thin-Film Lithium Niobate", 《SPIE》, pages 2 - 4 * |
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