CN111810403A - Rotor and Lu's pump - Google Patents

Rotor and Lu's pump Download PDF

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Publication number
CN111810403A
CN111810403A CN201910362470.5A CN201910362470A CN111810403A CN 111810403 A CN111810403 A CN 111810403A CN 201910362470 A CN201910362470 A CN 201910362470A CN 111810403 A CN111810403 A CN 111810403A
Authority
CN
China
Prior art keywords
rotor
impeller
pump
central shaft
coating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201910362470.5A
Other languages
Chinese (zh)
Inventor
林敬渊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yatai Fuji Seiki Ltd Co ltd
Original Assignee
Yatai Fuji Seiki Ltd Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yatai Fuji Seiki Ltd Co ltd filed Critical Yatai Fuji Seiki Ltd Co ltd
Publication of CN111810403A publication Critical patent/CN111810403A/en
Withdrawn legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00Manufacture
    • F04C2230/20Manufacture essentially without removing material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00Manufacture
    • F04C2230/20Manufacture essentially without removing material
    • F04C2230/24Manufacture essentially without removing material by extrusion
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/20Rotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00Metals
    • F05C2201/04Heavy metals
    • F05C2201/0433Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0448Steel
    • F05C2201/0454Case-hardened steel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00Metals
    • F05C2201/04Heavy metals
    • F05C2201/0433Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0448Steel
    • F05C2201/0457Cemented steel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00Metals
    • F05C2201/90Alloys not otherwise provided for
    • F05C2201/903Aluminium alloy, e.g. AlCuMgPb F34,37

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

The invention discloses a rotor and a Roots pump. The rotor is used for a Roux pump. The rotor comprises a central shaft, an impeller and a coating layer, wherein the impeller surrounds the central shaft, and the coating layer covers the impeller, and the material of the coating layer is different from that of the impeller. The invention also discloses a Roots pump comprising the rotor.

Description

Rotor and Lu's pump
Technical Field
The present invention relates to a rotor and a pump, and more particularly, to a rotor and a Roots pump for a Roots pump.
Background
With the development of the technology industry, vacuum technology is widely used, for example, thin film deposition, dry etching, ion implantation or photolithography in semiconductor process are all performed in a vacuum environment, which brings about the development of vacuum pump (also called vacuum pump).
Among many vacuum pumps, dry vacuum pumps are widely used in the scientific and technical industries because the strokes swept by the motion of the rotor do not require grease for lubrication or sealing during the intake, compression, exhaust, etc., and the oil-gas backflow can be avoided to maintain high cleanliness.
The dry vacuum pump can be classified into a roots pump, a claw pump, a screw pump, etc. according to the different types of rotors used, wherein the roots pump attracts wide attention because of stable working characteristics, simple structure, easy manufacture, convenient operation and long maintenance period, and the working principle of the roots pump is to compress air by rotating two rotors in opposite directions and bring the air from a low pressure end to a high pressure end to achieve the effect of vacuum pumping.
The rotor of the conventional roots pump includes a central shaft and an impeller, both of which are made of high-strength metal material to provide the required structural strength. However, the use of high strength metal materials results in an excessive overall weight. In addition, the contour line (also called a profile line) of the impeller is formed by combining a set of specific curves, and when the impeller is manufactured, a block is usually pre-cast, most of the material is removed by processing, and the contour line is milled (for example, ball milling is used), which has the disadvantages of material waste, long processing time and inconvenience for mass production.
Disclosure of Invention
The objective of the present invention is to provide a rotor and a Roots pump to solve the above problems.
According to an embodiment of the present invention, a rotor for a roots pump includes a central shaft, an impeller surrounding the central shaft, and a coating layer covering the impeller, wherein the coating layer is made of a material different from that of the impeller.
According to the rotor, the coating layer and the impeller may be integrally molded by insert molding (insert molding).
According to the rotor, the density of the cladding layer may be less than that of the central shaft, and the cladding layer may be made of plastic.
According to the aforementioned rotor, the density of the impeller may be less than the density of the central shaft. The impeller may be made in an extruded (extrusion) manner. The impeller may be made of aluminum-containing metal. The impeller may comprise a hollow. The impeller may be of the two-lobe, three-lobe or five-lobe type.
According to the rotor, the material of the central shaft may be medium carbon steel or alloy steel.
According to another embodiment of the present invention, a Roux pump is provided, which comprises a pump body and the rotor, wherein the pump body has a pump chamber, an inlet and an outlet formed therein, the inlet and the outlet are both connected to the pump chamber, the rotor is disposed in the pump chamber, and the rotor is used for discharging gas from the inlet to the outlet.
The rotor is beneficial to manufacturing the impeller by other modes through the difference between the material of the coating layer and the material of the impeller, thereby being beneficial to reducing the material cost, shortening the processing time and being beneficial to mass production. In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
Fig. 1 is a perspective view of a rotor according to an embodiment of the present invention.
FIG. 2 is a schematic cross-sectional view of a Roux pump according to another embodiment of the present invention.
FIG. 3 is another schematic cross-sectional view of the Roux pump of FIG. 2.
FIG. 4 is a schematic cross-sectional view of a Roux pump according to yet another embodiment of the present invention.
Wherein the reference numerals are as follows:
110. 210, 310 rotor
111. 211, 311 center axis
112. 212, 312 impeller
113. 213, 313 coating layer
114. 214, 314 hollow portion
200. 300 Roux pump
220. 320 pump body
221. 321 pump chamber
222. 322 inlet
223. 323 outlet port
Detailed Description
Fig. 1 is a perspective view of a rotor 110 according to an embodiment of the invention. The rotor 110 is suitable for a Roux pump, the rotor 110 includes a central shaft 111, an impeller 112 and a coating layer 113, the impeller 112 surrounds the central shaft 111, the coating layer 113 covers the impeller 112, wherein the material of the coating layer 113 is different from that of the impeller 112.
The coating layer 113 and the impeller 112 may be integrally formed by insert injection molding. Therefore, the impeller 112 does not need to be processed to achieve the required surface precision, but the required surface precision of the coating layer 113 can be given by embedding the injection molding die, which is beneficial to shortening the processing time and further beneficial to mass production.
The central shaft 111 may be made of a metal material with high strength to provide the required structural strength, for example, the central shaft 111 may be made of a material with strength greater than or equal to medium carbon steel, for example, the material of the central shaft 111 may be medium carbon steel or alloy steel. The center shaft 111 can be formed by lathe and grinding.
The impeller 112 may be coupled to the central shaft 111 by hot-sleeving or cold-pressing, but the present invention is not limited thereto, and any method that can couple the impeller 112 to the central shaft 111 may be applied to the present invention. The impeller 112 may be made of a material lighter than the central shaft 111, and the overall weight of the rotor 110 is advantageously reduced by making the density of the impeller 112 smaller than that of the central shaft 111, for example, the material of the impeller 112 may be aluminum-containing metal, and specifically, the material of the impeller 112 may be pure aluminum or aluminum alloy. The impeller 112 can be manufactured by extrusion, so that the impeller 112 is different from the conventional impeller 112 in that the impeller is precast into a block material, most of the material is removed by processing, and the contour line is milled, so that the extrusion manufacturing is favorable for greatly shortening the processing time, and the material cost can be saved. In the embodiment, the impeller 112 is a two-blade type, thereby having the advantage of large scavenging area, but the invention is not limited thereto, and the impeller 112 may be configured in other types according to actual requirements, for example, the impeller 112 may be a three-blade type or a five-blade type. The impeller 112 may include a hollow 114, whereby the overall weight of the rotor 110 may be further reduced and material costs saved.
The density of the cladding layer 113 may be less than that of the central shaft 111, whereby the overall weight of the rotor 110 may be further reduced. The coating layer 113 may be made of plastic, and usable plastics include, but are not limited to, Acrylonitrile-Butadiene-Styrene Copolymer (ABS), Ethylene-Vinyl Acetate Copolymer (EVA), High Density Polyethylene (HDPE), Polyamide (PA), or polybutylene terephthalate (PBT).
Referring to fig. 2 and 3, fig. 2 is a schematic cross-sectional view of a roots pump 200 according to another embodiment of the invention, fig. 3 is a schematic cross-sectional view of the roots pump 200 in fig. 2, and fig. 2 and 3 are different in view angle and in addition, the rotation angle of the rotor 210 is also different. The Roux pump 200 includes a rotor 210 and a pump body 220.
The number of the rotors 210 is two, the rotor 210 includes a central shaft 211, an impeller 212 and a coating layer 213, the impeller 212 surrounds the central shaft 211, the coating layer 213 covers the impeller 212, the impeller 212 is a two-blade type and includes a hollow portion 214, and details about the rotors 210 may be the same as those of the rotors 110 in fig. 1 without contradiction, and are not repeated herein.
The pump body 220 has a pump chamber 221, an inlet 222 and an outlet 223 formed therein, the inlet 222 and the outlet 223 are both communicated with the pump chamber 221, the rotor 210 is disposed in the pump chamber 220, and the rotor 210 is used for discharging gas from the inlet 222 to the outlet 223. The operation principle of the Roux pump 200 is well known to those skilled in the art and will not be described herein. By using the rotor 210, it is advantageous to reduce the material cost, the processing time, and mass production of the Roots pump 200.
Fig. 4 is a schematic cross-sectional view of a roots pump 300 according to another embodiment of the invention. The Roux pump 300 includes a rotor 310 and a pump body 320.
The number of the rotors 310 is two, the rotor 310 includes a central shaft 311, an impeller 312 and a coating layer 313, the impeller 312 surrounds the central shaft 311, the coating layer 313 covers the impeller 312, the impeller 312 is a three-bladed type and includes a hollow portion 314, details about the rotor 310 may be the same as the rotor 110 in fig. 1 without contradiction, and are not repeated herein.
The pump body 320 has a pump chamber 321, an inlet 322 and an outlet 323 formed therein, the inlet 322 and the outlet 323 are both connected to the pump chamber 321, the rotor 310 is disposed in the pump chamber 320, and the rotor 310 is used to discharge gas from the inlet 322 to the outlet 323. The operation principle of the Roux pump 300 is well known to those skilled in the art and will not be described herein. By using the rotor 310, it is advantageous to reduce the material cost and the processing time of the Roots pump 300 and to facilitate mass production.
Compared with the prior art, the rotor is beneficial to manufacturing the impeller by other methods through the difference between the material of the coating layer and the material of the impeller, thereby being beneficial to reducing the material cost, shortening the processing time and being beneficial to mass production.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (11)

1. A rotor for a roots pump, the rotor comprising:
a central shaft;
an impeller surrounding the central shaft; and
a coating layer covering the impeller;
wherein the coating layer is made of a material different from that of the impeller.
2. The rotor of claim 1 wherein said coating is integrally formed with said impeller by insert injection molding.
3. The rotor of claim 1 wherein the cladding layer has a density less than a density of the central shaft.
4. The rotor of claim 1 wherein said material of said cladding layer is plastic.
5. The rotor of claim 1 wherein the density of the impeller is less than the density of the central shaft.
6. The rotor as recited in claim 1, wherein the impeller is formed in an extruded manner.
7. The rotor as set forth in claim 1 wherein said material of said impeller is aluminum-containing metal.
8. The rotor of claim 1, wherein the impeller comprises a hollow.
9. The rotor of claim 1 wherein the impeller is a two-lobe, three-lobe or five-lobe type.
10. The rotor as claimed in claim 1, wherein the material of the central shaft is medium carbon steel or alloy steel.
11. A Roux pump, comprising:
a pump body having a pump chamber, an inlet and an outlet formed therein, the inlet and the outlet being communicated with the pump chamber; and
the rotor of any one of claims 1-10 disposed within the pump chamber, the rotor to discharge gas from the inlet to the outlet.
CN201910362470.5A 2019-04-10 2019-04-30 Rotor and Lu's pump Withdrawn CN111810403A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW108112412A TW202037814A (en) 2019-04-10 2019-04-10 Rotor and roots pump
TW108112412 2019-04-10

Publications (1)

Publication Number Publication Date
CN111810403A true CN111810403A (en) 2020-10-23

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Family Applications (1)

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CN201910362470.5A Withdrawn CN111810403A (en) 2019-04-10 2019-04-30 Rotor and Lu's pump

Country Status (2)

Country Link
CN (1) CN111810403A (en)
TW (1) TW202037814A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4747763A (en) * 1985-06-07 1988-05-31 Toyota Jidosha Kabushiki Kaisha Rotor assembly of roots pump
US4764098A (en) * 1985-07-26 1988-08-16 Toyota Jidosha Kabushiki Kaisha Roots type pump with pin connection for plastic coated rotor
CN2199336Y (en) * 1994-01-07 1995-05-31 盛才良 Roots pump with liner
CN1446291A (en) * 2000-08-10 2003-10-01 莱博尔德真空技术有限责任公司 Two-shaft vacuum pump
CN103982432A (en) * 2013-02-07 2014-08-13 汉钟精机股份有限公司 Pump rotor and manufacturing method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4747763A (en) * 1985-06-07 1988-05-31 Toyota Jidosha Kabushiki Kaisha Rotor assembly of roots pump
US4764098A (en) * 1985-07-26 1988-08-16 Toyota Jidosha Kabushiki Kaisha Roots type pump with pin connection for plastic coated rotor
CN2199336Y (en) * 1994-01-07 1995-05-31 盛才良 Roots pump with liner
CN1446291A (en) * 2000-08-10 2003-10-01 莱博尔德真空技术有限责任公司 Two-shaft vacuum pump
CN103982432A (en) * 2013-02-07 2014-08-13 汉钟精机股份有限公司 Pump rotor and manufacturing method thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
孔凌嘉 等: "《机械基础设计实践》", 30 April 2017 *
文根保 等: "《复杂注塑模现代设计》", 31 July 2018 *

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Application publication date: 20201023