CN111792615A

CN111792615A - Hydrophobic material protected by microstructure and preparation method and application thereof

Info

Publication number: CN111792615A
Application number: CN202010690283.2A
Authority: CN
Inventors: 邓旭; 于凡斐; 王德辉
Original assignee: University of Electronic Science and Technology of China
Current assignee: University of Electronic Science and Technology of China
Priority date: 2020-07-17
Filing date: 2020-07-17
Publication date: 2020-10-20

Abstract

The present disclosure provides a hydrophobic material protected by a microstructure, comprising a substrate, at least one surface of the substrate being provided with a microstructure consisting of a plurality of microstructure units, with hydrophobic fillers in the interstices between the plurality of microstructure units and/or in the plurality of microstructure units. The disclosure also provides methods of making and applications of hydrophobic materials protected by microstructures. The method realizes the protection of the hydrophobic material which is easy to be damaged and fall off and has poor mechanical property, avoids the harsh acting forces such as external impact, frictional wear and the like which can be born by the hydrophobic material in the using process, greatly increases the durability of the hydrophobic surface in practical application, can be used for surfaces such as self-cleaning, antifouling, anticorrosion and mildew-proof, anti-icing and the like for a long time, and has very high universality and practicability.

Description

Hydrophobic material protected by microstructure and preparation method and application thereof

Technical Field

The invention relates to the field of hydrophobic materials, in particular to a hydrophobic material protected by a microstructure, and a preparation method and application thereof.

Background

The surface hydrophobic technology is a basic research technology with wide and deep depth and high practical value. At present, hydrophobic material coatings are widely used in many aspects in modern life and industrial fields. By designing material coatings with different structures, chemical and physical properties, new additional functions on the surface of solid materials can be provided, and particularly the rapidly growing demands of modern industries on hydrophobic material coatings make the functionalized hydrophobic material coatings attract extensive attention.

The hydrophobic layer is generally a low surface energy coating material coated on the surface of various substrates, and mainly comprises organic materials such as organosilane, perfluoropolymer and the like. The action modes of combining the hydrophobic materials with the substrate are roughly divided into two categories, one category is combining with the substrate through the action of a covalent bond, the hydrophobic layers are monomolecular grafting layers, and the thickness of the film layers is in the nanometer level; one is the application to a substrate by physical adsorption (electrostatic, van der waals forces), such as an electroplated inorganic film or a vapor deposited film, and the thickness of such a hydrophobic layer is on the order of microns to millimeters. As the static water contact angle on the surface of the hydrophobic material is more than 90 degrees, the hydrophobic material has remarkable application prospect in a plurality of daily life scenes and engineering technical fields such as water prevention, fog prevention, frost prevention, ice/snow prevention, corrosion prevention, antifouling, oxidation resistance, adhesion prevention, fluid drag reduction, enhanced condensation heat transfer and the like.

However, hydrophobic materials still face significant opportunities and challenges in practical applications, namely, greater mechanical stability, abrasion resistance, and weatherability over long-term use. Considering that the hydrophobic coating tends to have a poor adhesion to the substrate, the hydrophobic coating applied to the substrate by covalent coupling, van der waals forces and electrostatic forces, as described above, has the greatest disadvantage of being easily peeled off. Therefore, in the practical use process, when the glass is used for windshields of automobiles, airplanes, spacecrafts and the like, the surface is inevitably damaged and falls off after repeated impact, friction, abrasion and other mechanical actions, so that the performance is failed. In particular, for some polymeric coating materials that have very poor adhesion to the substrate, even a light touch by the hand can damage the coating. With the expansion of application scenes, the hydrophobic coating is required to have the characteristics of easy cleaning, frost resistance, fingerprint resistance and the like, and the requirements on the comprehensive properties such as transparency, wear resistance and the like are gradually improved. Therefore, the development of a hydrophobic coating surface with stable friction and abrasion resistance is a key problem for driving the hydrophobic material to be really applied.

Disclosure of Invention

Problems to be solved by the invention

In view of the defects that the existing hydrophobic coating is insufficient in mechanical stability, is easy to damage in an actual use environment, is short in service life, and is poor in comprehensive performance in the aspects of light transmittance, wear resistance and the like, the invention provides a hydrophobic material protected by a microstructure, and a preparation method and application thereof, so as to solve one or more problems in the prior art.

Means for solving the problems

To achieve the above object, the present disclosure provides a hydrophobic material protected by a microstructure, including a substrate having at least one surface provided with a microstructure composed of a plurality of microstructure units, and a hydrophobic filler in voids between the plurality of microstructure units and/or in the plurality of microstructure units.

In the hydrophobic material protected by the microstructure according to a further embodiment of the present disclosure, the microstructure unit is a microprotrusion body higher than the surface of the substrate, a plurality of discontinuous microprotrusion bodies are arranged in an array, or the microstructure unit is a recessed microcavity lower than the surface of the substrate, a plurality of recessed microcavities are arranged in an array, and non-recessed portions between adjacent recessed microcavities are continuous with each other.

In the hydrophobic material protected by the microstructure provided in the further embodiment of the present disclosure, the shape of the microprotrusions is one or more selected from the group consisting of a polygonal pyramid, a polygonal frustum, a cone, a polygonal prism, a cylinder, or the shape of the recessed microcavities is one or more selected from the group consisting of an inverted polygonal pyramid, an inverted polygonal frustum, an inverted cone, a polygonal prism, a cylinder.

In the hydrophobic material protected by the microstructure provided by the further embodiment of the present disclosure, the height h of the microprotrusions satisfies 1 μm or less and h 1mm or less, or the depth h 'of the recessed microcavities satisfies 1 μm or less and h' or less and 1 mm.

In a hydrophobic material protected by microstructures provided in a further embodiment of the present disclosure, when the microstructure unit has a shape of a polygonal pyramid, an inverted polygonal pyramid, a polygonal frustum, an inverted polygonal frustum, a cone or an inverted cone, an included angle α between a sidewall of the microstructure unit and a base plane satisfies 90 ° < α <160 °.

In the hydrophobic material protected by a microstructure provided in a further embodiment of the present disclosure, when the microstructure unit has a shape of a polygonal pyramid, an inverted polygonal pyramid, a polygonal frustum, an inverted polygonal frustum, or a polygonal prism, a side length a of a bottom surface of the microstructure unit satisfies 1 μm < a <2 mm; or when the microstructure unit is in the shape of a cone, an inverted cone or a cylinder, the radius r of the bottom circle of the microstructure unit satisfies 0.5 μm < r <1 mm.

In the hydrophobic material protected by the microstructure provided in a further embodiment of the present disclosure, a closest distance b between bottom face edges of adjacent microstructure units satisfies 10nm < b <2 mm.

In the hydrophobic material protected by microstructure provided by the further embodiment of the present disclosure, the substrate is made of silicon wafer, metal, glass, ceramic or flexible high molecular material, and the hydrophobic filler is perfluorooctyl trichlorosilane, polytetrafluoroethylene, perfluoroethylene propylene copolymer FEP, fluoroplastic film ETFE, fluorosilicone polymer, perfluoropolyether polymer, polyethylene terephthalate, fluorinated oil WP140 or fluorinated oil AF 160.

The present disclosure also provides a method of preparing a hydrophobic material protected by a microstructure, comprising the steps of:

directly preparing a microstructure consisting of a plurality of microstructure units on a substrate by photoetching or micro-milling, or preparing a mould firstly and transferring a pattern to the substrate by a cold/hot pressing technology to indirectly prepare the microstructure consisting of a plurality of microstructure units;

the hydrophobic filler is filled in the voids between the microstructure units and/or in the microstructure units by a vapor deposition method, a spin/spray method, an evaporation method, or a magnetron sputtering method.

The present disclosure also provides for the use of the hydrophobic material protected by microstructure comprising using the hydrophobic material protected by microstructure as a water repellent surface, an anti-icing surface, an anti-fouling surface, a fluid drag reduction workpiece surface, or an anti-fingerprint surface.

ADVANTAGEOUS EFFECTS OF INVENTION

The invention has the advantages of one or more aspects as follows:

1. according to the invention, the hydrophobic material is filled in the microstructure with high mechanical stability, so that the hydrophobic material which is easy to damage and fall off and has poor mechanical property is protected, severe acting forces such as external impact, frictional wear and the like which can be borne by the hydrophobic material in the use process are avoided, and the durability of the hydrophobic surface in practical application is greatly improved.

2. Based on the protection of the microstructure, the hydrophobic material can avoid the exposure of the body material once and for all, shows excellent hydrophobic performance, and can be used for self-cleaning, antifouling, anticorrosion and mildew-proof, anti-icing and other surfaces for a long time.

3. The invention can be prepared on various base materials such as metal, ceramics, glass, high polymer materials and the like, has very high universality and practicability, and can be durably and stably applied to almost all the fields of hydrophobic coatings.

4. The method is simple, convenient and feasible, has controllable cost, and has great social value and economic value in industrialized production and application.

Drawings

The present disclosure is described in detail in terms of one or more various embodiments with reference to the following figures. The drawings are provided to facilitate an understanding of the disclosure and should not be taken to limit the breadth, scope, size, or applicability of the disclosure. For ease of illustration, the drawings are not necessarily drawn to scale.

Fig. 1 is a schematic design diagram of a microstructure array structural unit.

FIG. 2 is a SEM image of a silicon substrate rectangular pyramid microstructure array.

Fig. 3 is a schematic diagram of a silicon substrate rectangular pyramid microstructure array protective hydrophobic material.

FIG. 4 is a surface mechanical property test chart of a hydrophobic material protected by a silicon substrate rectangular pyramid microstructure.

Fig. 5 is a graph of mechanical property measurements of a hydrophobic material film layer of a smooth glass substrate.

FIG. 6 is an SEM image of a glass substrate cylindrical microstructure array.

FIG. 7 is a schematic view of a glass substrate cylindrical microstructure protective anti-fingerprint AF material.

Fig. 8 is a test chart of whether a smooth glass substrate is fingerprint-resistant.

FIG. 9 is a diagram illustrating the anti-fingerprint effect of the AF material protected by the glass substrate microstructure.

Detailed Description

General structure of hydrophobic materials protected by microstructures

The present invention provides a hydrophobic material protected by a microstructure. In general, the material includes a substrate having at least one surface provided with a microstructure comprised of a plurality of microstructure units having a hydrophobic filler in the plurality of microstructure units or in the interstices between the microstructure units.

Substrate

The substrate can be made of various common materials, such as silicon wafers, metal, glass, ceramics, flexible polymer materials and the like, and can be flexibly selected according to actual use scenes.

Microstructure unit and microstructure

As shown in fig. 1, the microstructure units and microstructures may have a variety of organization forms:

a) the microstructure unit can be in the form of a micro-protrusion body higher than the surface of the substrate, and a plurality of discontinuous micro-protrusion bodies are arranged in an array to form a discontinuous microstructure;

or

b) The microstructure units can be in the form of recessed micro-cavities lower than the surface of the substrate, a plurality of recessed micro-cavities are arranged in an array, and non-recessed parts between adjacent recessed micro-cavities are mutually continuous to form a continuous microstructure.

Further, when the microstructure unit is a micro-protrusion, the specific shape of the micro-protrusion may be a polygonal pyramid, a polygonal frustum, a cone, a polygonal prism, a cylinder, etc.; wherein the polygonal pyramid is preferably a triangular pyramid, a rectangular pyramid or a hexagonal pyramid, the polygonal platform is preferably a triangular frustum, a rectangular frustum or a hexagonal frustum, and the polygonal prism is preferably a triangular prism, a rectangular prism or a hexagonal prism;

when the microstructure unit is a concave microcavity, the specific shape of the concave microcavity can be an inverted polygonal pyramid, an inverted polygonal frustum, an inverted cone, a polygonal prism, a cylinder and the like; wherein, the reverse polygonal pyramid is preferably an inverted triangular pyramid, an inverted rectangular pyramid or an inverted hexagonal pyramid, the reverse polygonal platform is preferably an inverted triangular frustum, an inverted rectangular frustum or an inverted hexagonal frustum, and the polygonal column is preferably a triangular prism, a quadrangular prism or a hexagonal prism.

Size of microstructure unit:

for microprotrusions, the height h of the microprotrusions may be selected from the micrometer scale to the millimeter scale, e.g., 1 μm-1mm, and may be adjusted for different reaction conditions;

for the depressed microcavity, the depth h' of the depressed microcavity can be selected from micrometer scale to millimeter scale, such as 1 μm-1mm, and can be adjusted according to different reaction conditions;

an included angle alpha is formed between the side wall of the microstructure unit and the plane of the substrate, and when the shape of the microstructure unit is a polygonal pyramid, an inverted polygonal pyramid, a polygonal frustum, an inverted polygonal frustum, a cone or an inverted cone, the included angle alpha between the side wall of the microstructure unit and the plane of the substrate preferably satisfies 90 degrees < alpha <160 degrees; when the microstructure units are in the shape of a polygonal prism or a cylinder, the included angle alpha between the side wall of each microstructure unit and the plane of the substrate is 90 degrees.

When the microstructure unit is in the shape of a polygonal pyramid, an inverted polygonal pyramid, a polygonal frustum, an inverted polygonal frustum or a polygonal prism, the bottom surface side length a preferably satisfies 1 μm < a <2 mm; when the microstructure unit is in the shape of a cone, an inverted cone, or a cylinder, it is preferable that the radius r of the base circle thereof satisfies 0.5 μm < r <1 mm.

Distance between microstructure units:

the proper distance between the microstructure units is beneficial to realizing the comprehensive performance of the material in the aspects of hydrophobicity, wear resistance, light transmission and the like. Preferably, the closest distance b between the edges of the base surfaces of adjacent microstructure units satisfies 10nm < b <2 mm.

Hydrophobic filler

The hydrophobic filler is distributed in a plurality of microstructure units (in the case of a depressed microcavity), or in the voids between microstructure units (in the case of a microprotrusion). The hydrophobic filler is not particularly limited and may be selected according to actual needs. For example, the hydrophobic filler may be a fluoro/silicon material such as perfluorooctyltrichlorosilane, Polytetrafluoroethylene (PTFE) in the class of fluorocarbon coatings, perfluoroethylene propylene copolymer FEP, fluoroplastic film ETFE, or the like; alternatively, Anti-fingerprint (AF) polymer materials can be selected, such as hydrophobic and oleophobic polymers, such as fluorosilicone polymer, perfluoropolyether polymer (PFPE), polyethylene terephthalate (PETE/PET), or Polytetrafluoroethylene (PTFE), or commercially available fluorinated oils, such as those sold under the brand numbers WP140 or AF 160.

Method for producing microstructure

The method of preparing the microstructure on the substrate is not limited and may be selected according to the properties of the substrate itself. For example, the microstructure can be directly prepared by a micro-processing technique such as photolithography and micro-milling, or can be indirectly prepared by a method of first fabricating a mold and then transferring a pattern to a substrate by a cold/hot pressing technique.

Method for filling hydrophobic fillers

According to the specific form of the microstructure, the hydrophobic filler can be filled in the gaps between the microstructure units by a vapor deposition method, a spin coating/spray coating method, an evaporation method, a magnetron sputtering method or the like. The hydrophobic filler may fill all or only a portion of the spaces between the microstructure elements, for example, the hydrophobic filler may form a thin layer covering the surfaces of the microstructure elements and/or the surfaces between the microstructure elements.

Use of hydrophobic materials protected by microstructures

The hydrophobic material protected by the microstructure provided by the invention has wide application value, can be suitable for scenes such as metal, ceramic or polymer which do not need light transmission and transparency on the surface of a common substrate, such as non-stick pan, airplane wings, medical machines, PCB circuit boards, intelligent household appliances, industrial fields and the like, and can also be used in fields needing high transparency and definition, such as the technical fields of intelligent electronics, LED display screens and various electronic equipment touch screens. Particularly, the material protected by the microstructure can play a good role in protecting the anti-fingerprint material film layer, so that the problems that the film layer is easy to scratch and the like can be avoided, and meanwhile, the light transmittance, the transparency and the definition of the film layer can be ensured.

Embodiments of the present disclosure will be described in detail below with reference to examples, but those skilled in the art will appreciate that the following examples are only illustrative of the present disclosure and should not be construed as limiting the scope of the present disclosure. The examples, in which specific conditions are not specified, were conducted under conventional conditions or conditions recommended by the manufacturer. The reagents or instruments used are not indicated by the manufacturer, and are all conventional products commercially available.

Example 1

The hydrophobic material prepared in this example includes an array of discontinuous rectangular pyramid microstructure units (as shown in fig. 2) prepared on a silicon substrate with a polymeric hydrophobic filler between the microstructure units. The angle of the side wall of each rectangular pyramid is 125 degrees, the side length of each rectangular pyramid is 60 mu m, the height of each rectangular pyramid is 40 mu m, and the interval between every two adjacent rectangular pyramids is 3.5 mu m; the microstructure is prepared by photolithography and wet etching on a silicon substrate, and hydrophobic filler is deposited in the microstructure frame by vapor deposition for protection, as shown in fig. 3.

The preparation of a silicon substrate rectangular pyramid microstructure, namely photoetching and wet etching, comprises the following process steps: firstly, the silicon wafer is treated by plasma for 30min, and then the silicon wafer is baked for 30min at 260 ℃. Uniformly spin-coating photoresist on the processed silicon wafer at 3500rpm, prebaking at 110 deg.C for 1min, exposing for 6s, developing with 2.78% TMAH for 24s, postbaking at 100 deg.C for 3min, and etching silicon dioxide (BOE, buffer-oxide-etch, 40% NH)₄F: 40% HF ═ 6:1) for 3min, boiling off the resist in acetone, wet etching the silicon with 25% TMAH containing surfactant at 75 ℃ and removing the silicon dioxide of the etch resist (BOE,3 min). Is etched by the methodThe side wall angle of the rectangular pyramid microstructure is 125 degrees. The photoresist used was a S1813 positive photoresist.

The filling-vapor deposition method of the hydrophobic fluorinated polymer material comprises the following process steps: the surface was first treated in a plasma surface treater for 20min, then placed in a vacuum desiccator, and an open glass bottle containing 200. mu.l perfluorooctyltrichlorosilane was placed together and kept under vacuum for 2.5h (. about.2 KPa).

The microstructure of the hydrophobic material surface protected by the microstructure obtained in the way has better mechanical stability, and the microstructure is not easily abraded or destroyed by a macroscopic object, so that the surface still keeps stable hydrophobicity after being subjected to high molecular friction and abrasion such as multiple times of blades, steel wire balls, cones, iron brushes, flexible PDMS and the like, and the contact angle of a water drop of the surface is still more than 110 degrees, which indicates that the fluorinated coating in the surface is not destroyed or shed.

Example 2

The hydrophobic material prepared in this embodiment includes a silicon substrate as a substrate to be filled, a rectangular pyramid microstructure is prepared on a silicon wafer substrate by photolithography and wet etching (the method is the same as that in embodiment 1), and a hydrophobic filler is filled in the microstructure by a spin coating method.

The filling-spin coating method of the hydrophobic material comprises the following specific steps: the microstructured silicon wafer was subjected to ultrasonic treatment with acetone, alcohol, and deionized water for 5 minutes in sequence. The oil of fluorinating WP140 was then spin coated on a spin coater at 3000rpm for 20 s. Finally, the filled silicon wafer is placed in an oven to be dried at 60 ℃.

The microstructured hydrophobic material prepared in this example was subjected to 20 scratching experiments with a razor blade. The result shows that the surface of the hydrophobic material prepared in the embodiment still keeps a hydrophobic state after blade scratching, and no obvious scratch is seen (as shown in fig. 4), which indicates that the hydrophobic material protected by the microstructure can resist stronger friction wear and scratching, and the hydrophobic property keeps stable and reliable.

Comparative example 1

In comparative example 1, a smooth glass sheet was taken and subjected to ultrasonic treatment with acetone, alcohol, and deionized water in this order for 5 minutes. The glass sheet was then spin coated with the fluorinated oil WP140 on the surface at 3000rpm for 20 seconds on a spin coater. The treated glass sheet was then placed in an oven and dried at 60 ℃.

The smooth glass surface treated with the fluorinated oil was subjected to 20 scratching experiments with a razor blade. The results show that the fluorinated smooth glass surface is hydrophobic, but after scratching, a significant scratch is seen on the surface, and the fluorinated layer is broken off and becomes hydrophilic, as shown in fig. 5.

Example 3

The hydrophobic material prepared in this example includes a glass substrate having an array of discontinuous cylindrical microstructure elements thereon (as shown in fig. 6). The radius of the bottom surface of the cylinder is 19 μm, the interval between the adjacent cylinders is 83 μm, and the height is 32.5 μm; the cylindrical microstructure is prepared on a sheet glass substrate by adopting a precise hot-press molding technology, and anti-fingerprint hydrophobic/oleophobic materials are filled between microstructure units in a magnetron sputtering mode (as shown in figure 7).

The preparation of glass substrate microstructure-precise hot press molding technology, the process steps are: firstly, stainless steel plated with nickel-phosphorus alloy is taken as a substrate, and an inverted cylindrical microstructure array is processed on the surface of the substrate by a micro-milling technology of an ultra-precision machine tool. And then performing precision glass molding by a hot pressing-heat preservation pressure release technology. The thin sheet of glass was placed over a metal mold with an array of rounded pillars and heated to 343 ℃ to soften the glass. And meanwhile, nitrogen is introduced to ensure that the mold is not oxidized at high temperature. The glass preform was then pressurized (-0.3 MPa) to reverse transfer the array of inverted cylindrical microstructures of the alloy mold to the thin sheet glass surface. And finally, cooling and releasing pressure, and demolding the formed sheet glass to obtain the sheet glass with the cylindrical microstructure.

The filling of the anti-fingerprint AF material, namely a magnetron sputtering method, comprises the following specific steps: firstly, the micro-structured glass sheet is subjected to ultrasonic treatment for 5 minutes by acetone, alcohol and deionized water in sequence, oil stains attached to the surface are removed, and the adhesive force and the light transmittance of the AF material are improved. Then the thin glass is placed on a common frame of a magnetron sputtering instrument, the vacuum is pumped to 0.01-0.05Pa, argon is injected until the pressure is 1-5Pa, and then bombardment is carried out for 5-10min under the conditions that the bias voltage is 100-800V and the duty ratio is 30% -60%. Then putting a polytetrafluoroethylene target purchased from the market into a vacuum chamber, vacuumizing to 0.02Pa, introducing reaction gases CF4 and N2 (the ratio is 3: 10), adjusting the vacuum degree to 0.8Pa, starting a radio frequency power supply, controlling the power to be 800W, biasing to be 50V, controlling the duty ratio to be 20 percent, controlling the time to be 1h, and cooling and taking out.

Through tests, the hydrophobic material surface protected by the obtained microstructure can resist stronger friction wear and scratch, and meanwhile, the hydrophobic performance is ensured.

Example 4

This example prepares a hydrophobic material protected by a microstructure that can be used as an anti-fingerprint film. This example is the same as example 3 in the preparation of the glass substrate microstructure. In contrast, the present embodiment realizes the filling of the hydrophobic filler by spin coating the anti-fingerprint AF material (fluorinated oil AF 160). And finally detecting the fingerprint prevention effect of the obtained material.

The filling-spin coating method of the anti-fingerprint AF material comprises the following specific steps: microstructured glass flakes prepared as in example 3 were sonicated for 5 minutes in sequence with acetone, alcohol, deionized water. The oil AF160 was then spin coated on a spin coater at 3000rpm for 20 s. Finally, the filled glass sheets were placed in an oven and dried at 60 ℃.

Detecting the fingerprint prevention effect: in order to demonstrate the anti-fingerprint effect of the microstructure-protected AF material, a smooth glass was used as a comparison for the detection. The results show that when a finger is touched to a smooth glass surface, a clear visible fingerprint remains on the surface, whereas the microstructure protected AF material surface does not see the presence of a fingerprint.

It is specifically noted and explained that incident light will be refracted at the sidewalls of the individual microstructure elements due to the presence of substrate microstructures, such as glass substrate microstructures, and the resulting microstructured surface will be obscured by the non-uniformity of the direction of the refracted light. Therefore, for application scenes requiring high transparency and definition, the filled anti-fingerprint AF material should be selected as much as possible to maintain a refractive index substantially consistent with that of the glass substrate. If the glass has a refractive index of 1.55, the filled fingerprint-preventing AF material may be polyethylene terephthalate having a refractive index of 1.57. Compared with the common smooth glass surface (shown in figure 8) which is not anti-fingerprint, the AF material surface protected by the microstructure has stronger anti-fingerprint effect, and the surface also ensures the transparency and the definition (shown in figure 9) because the refractive index of the filling material is basically consistent with that of the substrate.

While the features of the present invention have been shown and described in detail with reference to the preferred embodiments, those skilled in the art will understand that other changes may be made therein without departing from the spirit of the scope of the invention. Likewise, the various figures may depict exemplary architectures or other configurations for the present disclosure, which are useful for understanding the features and functionality that may be included in the present disclosure. The present disclosure is not limited to the example architectures or configurations shown, but may be implemented using a variety of alternative architectures and configurations. Additionally, while the present disclosure has been described above in terms of various exemplary embodiments and implementations, it should be understood that the various features and functionality described in one or more of the individual embodiments are not limited in their applicability to the particular embodiment to which they pertain. Rather, they may be applied, individually or in some combination, to one or more other embodiments of the disclosure, whether or not such embodiments are described and whether or not such features are presented as being part of the described embodiments. Thus, the breadth and scope of the present disclosure should not be limited by any of the above-described exemplary embodiments.

Claims

1. Hydrophobic material protected by a microstructure, characterized in that it comprises a substrate, at least one surface of which is provided with a microstructure consisting of a plurality of microstructure units, with hydrophobic fillers in the interstices between the microstructure units and/or in the microstructure units.

2. Hydrophobic material protected by microstructures according to claim 1, characterized in that:

the microstructure unit is a microprotrusion body higher than the surface of the substrate, a plurality of discontinuous microprotrusion bodies are arranged in an array, or

The microstructure units are recessed micro-cavities lower than the surface of the substrate, the plurality of recessed micro-cavities are arranged in an array, and non-recessed parts between adjacent recessed micro-cavities are mutually continuous.

3. Hydrophobic material protected by microstructures according to claim 2, characterized in that:

the shape of the microprotrusions is one or more selected from the group consisting of a polygonal pyramid, a polygonal frustum, a cone, a polygonal prism, a cylinder, or

The shape of the depressed microcavity is one or more selected from the group consisting of an inverted polygonal pyramid, an inverted polygonal frustum, an inverted cone, a polygonal prism, and a cylinder.

4. Hydrophobic material protected by microstructures according to claim 2 or 3, characterized in that:

the height h of the microprotrusions is such that h is not less than 1 μm and not more than 1mm, or

The depth h' of the concave micro-cavity is more than or equal to 1 mu m and less than or equal to 1 mm.

5. Hydrophobic material protected by microstructures according to claim 3, wherein the microstructure unit has a shape of a polygonal pyramid, an inverted polygonal pyramid, a polygonal frustum, an inverted polygonal frustum, a cone or an inverted cone, wherein the angle α between the side wall of the microstructure unit and the base plane satisfies 90 ° < α <160 °.

6. Hydrophobic material protected by microstructures according to claim 3, characterized in that:

when the microstructure unit is in the shape of a polygonal pyramid, an inverted polygonal pyramid, a polygonal frustum, an inverted polygonal frustum or a polygonal prism, the side length a of the bottom surface of the microstructure unit satisfies 1 [ mu ] m < a <2 mm; or

When the microstructure unit is in the shape of a cone, an inverted cone or a cylinder, the radius r of the bottom circle of the microstructure unit satisfies 0.5 μm < r <1 mm.

7. Hydrophobic material protected by microstructures according to any of claims 1 to 3, wherein the closest distance b between the edges of the bottom faces of adjacent microstructure units satisfies 10nm < b <2 mm.

8. The hydrophobic material protected by microstructure according to any of claims 1 to 7, wherein the substrate is made of silicon wafer, metal, glass, ceramic or flexible polymer material and the hydrophobic filler is perfluorooctyl trichlorosilane, polytetrafluoroethylene, perfluoroethylene propylene copolymer FEP, fluoroplastic film ETFE, fluorosilicone polymer, perfluoropolyether polymer, polyethylene terephthalate, fluorinated oil WP140 or fluorinated oil AF 160.

9. Method for the preparation of a hydrophobic material protected by a microstructure according to any of the claims 1 to 8, characterized in that it comprises the following steps:

10. Use of the hydrophobic material protected by microstructure according to any of claims 1 to 8, characterised in that it is used as a water-repellent surface, an anti-icing surface, an anti-fouling surface, a fluid drag reduction workpiece surface or an anti-fingerprint surface.