CN111791607A - Base plate and adsorb adjusting device and inkjet printing equipment thereof - Google Patents
Base plate and adsorb adjusting device and inkjet printing equipment thereof Download PDFInfo
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- CN111791607A CN111791607A CN202010947961.9A CN202010947961A CN111791607A CN 111791607 A CN111791607 A CN 111791607A CN 202010947961 A CN202010947961 A CN 202010947961A CN 111791607 A CN111791607 A CN 111791607A
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- fixing plate
- substrate
- adjusting
- adsorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
- B41J3/4073—Printing on three-dimensional objects not being in sheet or web form, e.g. spherical or cubic objects
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0045—Guides for printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
Abstract
The application relates to the technical field of display panel production, and discloses a substrate, an adsorption adjusting device of the substrate and ink-jet printing equipment, wherein the adsorption adjusting device comprises a fixed first fixing plate; the second fixing plate is movably connected with the first fixing plate; the adsorption structure is arranged on the second fixing plate; the detection structure is arranged on the second fixing plate; the first adjusting structure is connected between the first fixing plate and the second fixing plate; the second adjusting structure is connected between the first fixing plate and the second fixing plate; the first adjusting structure and the second adjusting structure adjust the substrate according to the position information of the substrate detected by the detecting structure. After the substrate is transmitted to the initial position, the adsorption structure adsorbs the substrate to prevent the substrate from shifting, and then the substrate is adjusted to an accurate position and a horizontal state according to the information detected by the detection structure, so that alignment of subsequent processing procedures is facilitated, the defective rate is reduced, and the production yield of the substrate is improved.
Description
Technical Field
The application relates to the technical field of display panel production, concretely relates to base plate and adsorb adjusting device and inkjet printing equipment thereof.
Background
Because of their characteristics of lightness, flexibility and bending, OLED (Organic Light-Emitting Diode) display devices are now becoming the first choice for electronic devices such as high-end mobile phones, televisions, watches, and the like. At present, equipment and a process for manufacturing an OLED product by adopting an inkjet printing method are mature, and specifically, a material for manufacturing an OLED display substrate can be dissolved in an inkjet printing solvent to form inkjet printing ink, and the inkjet printing ink is sprayed onto a glass substrate through a nozzle in an inkjet printing device to print a pixel pattern.
In the process of manufacturing the OLED display panel by inkjet printing, the position accuracy of the substrate is required to be high, and the substrate cannot be positioned at an accurate position when being transported to an initial position.
Disclosure of Invention
In view of the above-mentioned shortcomings, the present application aims to provide a substrate, an adsorption adjusting device thereof and an inkjet printing apparatus, which can correct the position of the substrate to make the substrate in a precise position.
In order to achieve the above purpose, the technical solution provided by the present application is: the utility model provides an absorption adjusting device of base plate, sets up in air supporting platform one side, drives the base plate is in it removes shower nozzle device department and carries out inkjet printing to air supporting platform is last, absorption adjusting device includes:
a first fixing plate, the first fixing plate being fixed;
the second fixing plate is movably connected to the first fixing plate;
the adsorption structure is arranged on the second fixing plate and used for adsorbing the substrate;
the detection structure is arranged on the second fixing plate and used for detecting the position of the substrate;
the first adjusting structure is connected between the first fixing plate and the second fixing plate and used for adjusting an included angle between the working surface of the adsorption structure and the conveying direction of the substrate;
the second adjusting structure is connected between the first fixing plate and the second fixing plate and used for adjusting the levelness of the adsorption structure;
the first adjusting structure and the second adjusting structure adjust the substrate according to the position information of the substrate detected by the detecting structure.
Furthermore, the first adjusting structures are symmetrically arranged at the positions corresponding to the two ends of the adsorption structure.
Further, the first adjusting structure comprises a fixed seat and a motor, and the fixed seat is fixed on the first fixing plate; the motor is fixed on the fixed seat, and the output end of the motor is connected with the second fixed plate.
Furthermore, the first adjusting structure further comprises a displacement sensor fixed on the second fixing plate, and the position of the displacement sensor corresponds to that of the fixing seat; the fixed seat comprises a grating which is arranged on the surface adjacent to the displacement sensor, and the position of the grating corresponds to that of the displacement sensor.
Furthermore, the second adjusting structure comprises a flexible elastic sheet, a floating shaft assembly and an adjusting bolt, and the flexible elastic sheet is fixed at the center of the second fixing plate; the floating shaft assembly is connected with the first fixing plate and the flexible elastic sheet, and the flexible elastic sheet is embedded into the floating shaft assembly and fixed with the floating shaft assembly; the adjusting bolt penetrates through the second fixing plate to abut against the first fixing plate and is arranged around the first adjusting structure.
Furthermore, the adjusting bolts are arranged at two sides of the adsorption structure and at the middle corresponding position of one side of the flexible elastic sheet far away from the adsorption structure.
Further, the first fixing plate comprises a moving guide rail, and the second fixing plate is connected with the moving guide rail in a matched mode.
Further, the detection structure comprises a fine tuning mechanism and a charge coupled device, and the fine tuning mechanism is arranged on the second fixing plate and used for adjusting the charge coupled device; the charge coupling element is inversely arranged on the fine adjustment mechanism, and the working surface of the charge coupling element faces the substrate and is used for scanning the position of the substrate.
Further, the adsorption structure adopts vacuum adsorption.
The technical scheme provided by the application is as follows: a substrate for the adsorption regulation device comprises a cross target arranged at four corners of the substrate.
The technical scheme provided by the application is as follows: an ink jet printing device comprises an air floating platform, a spray head device, a positioning device and the adsorption adjusting device.
Has the advantages that:
after the substrate is conveyed to the initial position, the adsorption structure adsorbs the substrate to prevent the substrate from shifting, and then the substrate is adjusted to be in an accurate position and horizontal state according to the information detected by the detection structure, so that alignment of subsequent processing procedures is facilitated, the defective rate is reduced, and the production yield of the substrate is improved; then first regulation structure and second are adjusted the structure and are adjusted the second fixed plate, adjust the adsorption structure, and then adjust the position of base plate, through indirect regulation mode, make the accommodation process more steady, prevent that base plate and adsorption structure from breaking away from.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the application, are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. It is obvious that the drawings in the following description are only some embodiments of the application, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:
FIG. 1 is a schematic view of an inkjet printing apparatus of an embodiment of the present application;
FIG. 2 is a schematic diagram of the structure of an adsorption conditioning device of an embodiment of the present application;
fig. 3 is a schematic diagram of a structure of an adsorption adjusting apparatus according to still another embodiment of the present application.
Wherein, 1, a substrate; 2. a second fixing plate; 3. a first fixing plate; 4. fixing the vertical plate; 5. a fine adjustment mechanism; 6. a charge-coupled element; 9. a motor; 10. a flexible spring sheet; 11. adjusting the bolt; 12. a fixed seat; 13. an adsorption structure; 14. a floating shaft assembly; 15. a displacement sensor; 16. a moving guide rail; 17. a positioning device; 100. an adsorption adjusting device; 200. an inkjet printing apparatus; 210. an air floating platform; 220. a spray head device.
Detailed Description
It is to be understood that the terminology, the specific structural and functional details disclosed herein are for the purpose of describing particular embodiments only, and are representative, but that the present application may be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.
In the description of the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating relative importance or as implicitly indicating the number of technical features indicated. Thus, unless otherwise specified, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; "plurality" means two or more. The terms "comprises" and "comprising," and any variations thereof, are intended to cover a non-exclusive inclusion, such that one or more other features, integers, steps, operations, elements, components, and/or combinations thereof may be present or added.
Further, terms of orientation or positional relationship indicated by "center", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, are described based on the orientation or relative positional relationship shown in the drawings, are simply for convenience of description of the present application, and do not indicate that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present application.
Furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly and may include, for example, fixed connections, removable connections, and integral connections; can be mechanically or electrically connected; either directly or indirectly through intervening media, or through both elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
The application relates to producing an OLED display panel by an ink-jet printing technology.
The application is further described with reference to the drawings and alternative embodiments.
As shown in fig. 1, an embodiment of the present application discloses an inkjet printing apparatus 200, which includes a positioning device 17, an air floating platform 210, a nozzle device 220, and an adsorption adjusting device 100 for a substrate 1, where the adsorption adjusting device 100 is disposed on one side of the air floating platform 210 to drive the substrate 1 to move to the nozzle device 220 on the air floating platform 210 for inkjet printing. As shown in fig. 2, the adsorption adjusting device 100 of the substrate 1 includes a first fixing plate 3, a second fixing plate 2, an adsorption structure 13, a detection structure, a first adjusting structure and a second adjusting structure; the first fixing plate 3 is fixed; the second fixing plate 2 is movably connected to the first fixing plate 3; the adsorption structure 13 is arranged on the second fixing plate 2 and used for adsorbing the substrate 1; the detection structure is arranged on the second fixing plate 2 and used for detecting the position of the substrate 1; the first adjusting structure is connected between the first fixing plate 3 and the second fixing plate 2, and adjusts an included angle between the working surface of the adsorption structure 13 and the conveying direction of the substrate 1; the second adjusting structure is connected between the first fixing plate 3 and the second fixing plate 2, and is used for adjusting the levelness of the adsorption structure 13; the first adjusting structure and the second adjusting structure adjust the substrate 1 according to the position information of the substrate 1 detected by the detecting structure. Wherein, the substrate 1 is a glass substrate; the first fixing plate 3 is fixed by a fixing vertical plate 4.
After the substrate 1 is conveyed to the initial position, the adsorption structure 13 adsorbs the substrate 1 to prevent the substrate 1 from shifting, and then the substrate 1 is adjusted to an accurate position and a horizontal state according to the information detected by the detection structure, so that alignment of subsequent processing procedures is facilitated, the defective rate is reduced, and the production yield of the substrate 1 is improved; then first regulation structure and second regulation structure adjust second fixed plate 2, adjust adsorption structure 13, and then adjust the position of base plate 1, through indirect regulation mode, make the accommodation process more steady, prevent that base plate 1 and adsorption structure 13 from breaking away from.
Specifically, the glass substrate is firstly conveyed to an air floatation platform, then the glass substrate is pushed onto the adsorption structure 13 through the positioning device 17, and the adsorption structure 13 adsorbs the glass substrate and then adjusts the glass substrate. The air supporting platform can enable the glass substrate to float in the air, the glass substrate does not need to be in contact with the platform in the moving process, the scratching, glass substrate deviation or crushing problems of the display panel and the platform are greatly reduced, dust cannot be generated, dust is not prone to adhering to the glass substrate due to the fact that gas is blown directly, and the production yield of the display panel is greatly improved. Adsorption structure 13 adopts vacuum adsorption, can not damaged adsorb the glass substrate, and the adsorption zone is glass substrate's edge, is similar to the slender stick, and unilateral contact makes glass substrate can not warp. The conveying direction of the air floating platform is the Y-axis direction.
The adjustment of the adsorption adjusting device 100 includes two parts, one is the adjustment of the levelness of the adsorption structure 13, and the other is the adjustment of the parallelism of the adsorption structure 13 and the Y-axis.
In an embodiment, the first adjusting structures are symmetrically disposed at positions corresponding to two ends of the adsorbing structure 13, so that the two ends of the adsorbing structure 13 can be adjusted more uniformly, and the adjustment and the control are facilitated. The first adjusting structure comprises two fixed seats 12 and two motors 9, wherein one fixed seat 12 and one motor 9 are respectively matched with one fixed seat 12, and the fixed seats 12 are fixed on the first fixing plate 3 and positioned at two sides of the adsorption structure 13; the motor 9 is fixed on the fixed seat 12, and the output end of the motor 9 is connected with the second fixed plate 2 through an L-shaped partition plate; motor 9 is connected with second fixed plate 2 through the L template, and is specific, motor 9 is voice coil motor. The telescopic direction of the motor 9 is an X axis. On the one hand, because second fixed plate 2 is bigger, the L template can increase the area of contact of motor 9 with second fixed plate 2, the dispersion atress, it is more even to make the atress, on the other hand, because second fixed plate 2 is swing joint in first fixed plate 3, motor 9 is too little to the area of action of second fixed plate 2, in-process pushing away or drawing the glass substrate just makes second fixed plate 2 produce the skew easily, thereby make the glass substrate who fixes a position produce the skew, the power of push-and-pull is come the conduction through the same L template of length and 2 thickness of second fixed plate now, make 2 atress of second fixed plate even, more steady in the motion process, it is more accurate to adjust. The voice coil motors at the two ends of the adsorption structure 13 work in a matched mode, so that the voice coil motors at the two ends can extend outwards or retract inwards synchronously, the glass substrate can move a certain distance towards the X axis in a translation mode, and the glass substrate can reach a preset position; or the voice coil motors at the two ends can respectively extend and retract, so that the glass substrate slightly rotates, and the included angle between the glass substrate and the Y axis is adjusted to enable the glass substrate to be parallel to the Y axis.
The first adjusting structure further comprises a displacement sensor 15 fixed on the second fixing plate 2, and the position of the displacement sensor corresponds to that of the fixing seat 12; the fixed seat 12 includes a grating, and is disposed on a surface adjacent to the displacement sensor 15, and the position of the grating corresponds to the displacement sensor 15. The displacement sensor 15 accurately reads the output displacement of each voice coil motor through the high-precision grating attached to the fixing seat 12, controls the translation distance or the rotation angle of the glass substrate, finally limits the glass substrate within an allowable error range, realizes accurate positioning, enables the glass substrate to be parallel to the Y axis, facilitates alignment of subsequent processing procedures, reduces the defective rate, and improves the production yield of the substrate 1.
In one embodiment, the second adjusting structure comprises a flexible elastic sheet 10, a floating shaft assembly 14 and an adjusting bolt 11, wherein the flexible elastic sheet 10 is fixed at the center of the second fixing plate 2; the floating shaft assembly 14 is connected with the first fixing plate 3 and the flexible elastic sheet 10, and the flexible elastic sheet 10 is embedded in the floating shaft assembly 14 and fixed with the floating shaft assembly 14; the adjusting bolts 11 penetrate through the second fixing plate 2 and abut against the first fixing plate 3, and the number of the adjusting bolts 11 is three, and the three adjusting bolts are respectively arranged on two sides of the adsorption structure 13 and in the middle corresponding position of one side of the flexible elastic sheet 10, which is far away from the adsorption structure 13. The levelness of the glass substrate is adjusted through the matching of the flexible elastic sheet 10, the floating shaft assembly 14 and the adjusting bolts 11, the second fixing plate 2 can rotate around an X axis by screwing the adjusting bolts 11 on the two sides of the adsorption structure 13, namely the glass substrate can be adjusted to rotate around the X axis, and the second fixing plate 2 can rotate around a Y axis by screwing the adjusting bolts 11 on the side of the flexible elastic sheet 10, namely the glass substrate can be adjusted to rotate around the Y axis. The flexible elastic sheet 10 provides a resilience force, the second fixing plate 2 is always tensioned to an initial state, the second fixing plate 2 is prevented from being separated from the first fixing plate 3, the first fixing plate 3 and the second fixing plate 2 are tensioned, the shaking of the second fixing plate 2 is reduced, and the working movement process is more stable; adjusting the three adjusting bolts 11 to adjust the glass substrate to a horizontal state; the flexible elastic sheet 10 is arranged at the center of the second fixing plate 2, namely the floating shaft assembly 14 connected with the flexible elastic sheet 10 is also arranged at the center of the second fixing plate 2, so that the whole second fixing plate 2 is uniformly stressed, the moving process is more stable, and the adjustment is more accurate.
Further, the first fixing plate 3 includes a moving guide 16, and the second fixing plate 2 is connected with the moving guide 16. The second fixing plate 2 is guided to move by the moving guide rail 16, so that the moving direction of the second fixing plate 2 is more accurate, the deviation is prevented from influencing the positioning of the glass substrate, and the positioning accuracy of the glass substrate is ensured.
In an embodiment, the detecting structure includes a fine tuning mechanism 5 and a Charge-coupled device (CCD) 6, the fine tuning mechanism 5 is disposed on the second fixing plate 2 for adjusting the CCD 6; the charge coupled device 6 is mounted upside down on the fine adjustment mechanism 5 with a working surface facing the substrate 1 for scanning the position of the substrate 1. The substrate 1 includes a cross target disposed at four corners of the substrate 1. The specific coordinate position of the substrate 1 is identified through scanning of the charge coupled device 6, and then the position of the substrate 1 is adjusted according to the scanned data, so that the levelness of the substrate 1 and the parallelism of the substrate 1 and the Y axis are within a preset range, and the positioning is more accurate.
The levelness adjustment of the adsorption adjusting device 100 is completed by manually combining an operator with a semi-automatic mode of equipment, and the specific adjusting method comprises the following steps: the adsorption structure 13 is provided with two cross targets, f1 and f2, the second fixing plate 2 is provided with a cross target f3, the X-axis sliding table is provided with a high-resolution CCD and a distance sensor, the cross targets f1, f2 and f3 are positioned by the high-resolution CCD of the X-axis to obtain the positions Posi (f1), Posi (f2) and Posi (f3) of the cross targets in an XY coordinate system, the distance sensor on the X-axis sliding table is called to obtain the heights Z (f1), Z (f2) and Z (f3) of the cross targets according to the positions Posi (f1), Posi (f2) and Posi (f3) of the cross targets, and the minimum height values of min { Z (f1), Z (f2) and Z (f3) } are taken as a reference, the adjusting bolts 11 are adjusted, and the levelness of the substrate 1 is finally within an allowable error range after being repeated for multiple times.
The parallelism adjustment of the adsorption adjusting device 100 and the Y axis is automatically completed through a control system, and the specific adjusting method comprises the following steps: the high-resolution CCD on the X-axis sliding table positions cross targets f1 and f2 on the adsorption structure 13 to obtain positions Posi (f1) and Posi (f2) of the cross targets in an XY coordinate system, wherein Deltax = X _ Posi (f1) -X _ Posi (f2), the smaller the Deltax is, the better the parallelism between the adsorption structure 13 and the Y axis is, the voice coil motor jointly acts to respectively output displacements d1 and d2 to offset Deltax, and the operations are repeated for multiple times, so that the parallelism between the adsorption structure 13 and the Y axis is in an allowable error range finally. The computer control program records the final displacements df1 and df2 of the voice coil motor.
The glass substrate falls to a feeding area of the air floatation platform, after the mechanical device is roughly positioned, the adsorption structure 13 adsorbs the glass substrate to move along the Y axis, and the high-resolution CCD on the X-axis sliding table identifies the cross light target on the glass substrate, so that the position parameter of the glass substrate in the XY coordinate system is determined, and the included angle alpha between the glass substrate and the Y axis is calculated. The OLED ink-jet printing device 200 requires that the drop point precision of the ink-jet drops is in a micron level, the XY axis positioning precision is in a submicron level, meanwhile, the control of the included angle alpha between the glass substrate and the Y axis is realized by moving a group of voice coil motors, the control precision is milliradian, and the accurate drop of the ink-jet drops into the pixel defining groove of the substrate 1 can be guaranteed only in this way. The adsorption adjusting device 100 for the substrate 1 can realize nondestructive clamping of the glass substrate, and meanwhile, the position accuracy of all pixel defining grooves of the glass substrate after deviation rectification is guaranteed, so that high-precision ink-jet printing is realized.
The foregoing is a more detailed description of the present application in connection with specific alternative embodiments, and the present application is not intended to be limited to the specific embodiments shown. For those skilled in the art to which the present application pertains, several simple deductions or substitutions may be made without departing from the concept of the present application, and all should be considered as belonging to the protection scope of the present application.
Claims (11)
1. The utility model provides an absorption adjusting device of base plate, its characterized in that sets up in air supporting platform one side, drives the base plate is in it removes shower nozzle device department on the air supporting platform and carries out inkjet printing, absorption adjusting device includes:
a first fixing plate, the first fixing plate being fixed;
the second fixing plate is movably connected to the first fixing plate;
the adsorption structure is arranged on the second fixing plate and used for adsorbing the substrate;
the detection structure is arranged on the second fixing plate and used for detecting the position of the substrate;
the first adjusting structure is connected between the first fixing plate and the second fixing plate and used for adjusting an included angle between the working surface of the adsorption structure and the conveying direction of the substrate;
the second adjusting structure is connected between the first fixing plate and the second fixing plate and used for adjusting the levelness of the adsorption structure;
the first adjusting structure and the second adjusting structure adjust the substrate according to the position information of the substrate detected by the detecting structure.
2. The apparatus as claimed in claim 1, wherein the first adjusting structures are symmetrically disposed at positions corresponding to two ends of the absorbing structure.
3. The apparatus of claim 2, wherein the first adjustment structure comprises:
the fixing seat is fixed on the first fixing plate;
and the motor is fixed on the fixed seat, and the output end of the motor is connected with the second fixed plate.
4. The apparatus of claim 3, wherein the first adjusting structure further comprises a displacement sensor fixed on the second fixing plate at a position corresponding to the fixing seat;
the fixed seat comprises a grating which is arranged on the surface adjacent to the displacement sensor, and the position of the grating corresponds to that of the displacement sensor.
5. The apparatus of claim 1, wherein the second adjustment structure comprises:
the flexible elastic sheet is fixed at the central position of the second fixing plate;
the floating shaft assembly is connected with the first fixing plate and the flexible elastic sheet, and the flexible elastic sheet is embedded into the floating shaft assembly and fixed with the floating shaft assembly;
and the adjusting bolt penetrates through the second fixing plate and abuts against the first fixing plate, and is arranged around the first adjusting structure.
6. The device of claim 5, wherein the adjusting bolts are disposed at two sides of the absorbing structure and at a corresponding middle position of one side of the flexible elastic sheet away from the absorbing structure.
7. The apparatus of claim 1, wherein the first fixing plate comprises a moving guide rail, and the second fixing plate is coupled to the moving guide rail.
8. The apparatus of claim 1, wherein the detecting structure comprises a fine-tuning mechanism and a charge-coupled device, the fine-tuning mechanism is disposed on the second fixing plate for tuning the charge-coupled device; the charge coupling element is inversely arranged on the fine adjustment mechanism, and the working surface of the charge coupling element faces the substrate and is used for scanning the position of the substrate.
9. The apparatus of claim 1, wherein the suction structure is vacuum-sucked.
10. A substrate for a suction modulation device as claimed in any one of claims 1 to 9, comprising cross targets arranged at the four corners of the substrate.
11. An inkjet printing apparatus comprising an air bearing platform, a nozzle assembly, a positioning assembly, and a substrate adsorption adjustment assembly as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010947961.9A CN111791607B (en) | 2020-09-10 | 2020-09-10 | Base plate and adsorb adjusting device and inkjet printing equipment thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010947961.9A CN111791607B (en) | 2020-09-10 | 2020-09-10 | Base plate and adsorb adjusting device and inkjet printing equipment thereof |
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| Publication Number | Publication Date |
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| CN111791607A true CN111791607A (en) | 2020-10-20 |
| CN111791607B CN111791607B (en) | 2020-12-29 |
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| CN202010947961.9A Active CN111791607B (en) | 2020-09-10 | 2020-09-10 | Base plate and adsorb adjusting device and inkjet printing equipment thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023028400A1 (en) * | 2021-08-27 | 2023-03-02 | Kateeva, Inc. | Substrate holder with linear slide mechanism |
| CN115782418A (en) * | 2022-12-26 | 2023-03-14 | 武汉国创科光电装备有限公司 | Ink-jet printing large-size substrate posture correcting and transferring system |
| CN115790455A (en) * | 2022-12-26 | 2023-03-14 | 武汉国创科光电装备有限公司 | Ink-jet printing substrate flatness detection system |
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| US20200180329A1 (en) * | 2018-12-05 | 2020-06-11 | Kateeva, Inc. | Inkjet printer with substrate height position control |
| WO2020132061A1 (en) * | 2018-12-20 | 2020-06-25 | Kateeva, Inc. | Ejection control using substrate alignment features and print region alignment features |
| WO2020131620A1 (en) * | 2018-12-21 | 2020-06-25 | Kateeva, Inc. | Devices, systems, and methods for controlling floatation of a substrate |
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| CN109417043A (en) * | 2016-07-08 | 2019-03-01 | 科迪华公司 | Transmitting path alignment technique and related system, method and apparatus |
| CN110505926A (en) * | 2017-02-15 | 2019-11-26 | 卡帝瓦公司 | Exact position alignment, calibration and measurement in printing and manufacture system |
| US20200180329A1 (en) * | 2018-12-05 | 2020-06-11 | Kateeva, Inc. | Inkjet printer with substrate height position control |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2023028400A1 (en) * | 2021-08-27 | 2023-03-02 | Kateeva, Inc. | Substrate holder with linear slide mechanism |
| CN115782418A (en) * | 2022-12-26 | 2023-03-14 | 武汉国创科光电装备有限公司 | Ink-jet printing large-size substrate posture correcting and transferring system |
| CN115790455A (en) * | 2022-12-26 | 2023-03-14 | 武汉国创科光电装备有限公司 | Ink-jet printing substrate flatness detection system |
| CN115790455B (en) * | 2022-12-26 | 2023-12-01 | 武汉国创科光电装备有限公司 | Ink jet printing base plate roughness detecting system |
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| Publication number | Publication date |
|---|---|
| CN111791607B (en) | 2020-12-29 |
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