CN111791220A - Transfer robot - Google Patents

Transfer robot Download PDF

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Publication number
CN111791220A
CN111791220A CN202010068121.5A CN202010068121A CN111791220A CN 111791220 A CN111791220 A CN 111791220A CN 202010068121 A CN202010068121 A CN 202010068121A CN 111791220 A CN111791220 A CN 111791220A
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CN
China
Prior art keywords
hand
transfer robot
region
manual operation
condition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010068121.5A
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Chinese (zh)
Inventor
小林巧
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Daihen Corp
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Daihen Corp
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Filing date
Publication date
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Publication of CN111791220A publication Critical patent/CN111791220A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/904—Devices for picking-up and depositing articles or materials provided with rotary movements only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/905—Control arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Abstract

The invention provides a transfer robot, which can prevent the interference between the robot and the surroundings. A transfer robot (10) is provided with: a transfer robot (10) comprises a 1 st arm (16), a 2 nd arm (14) and hands (11, 12) for transferring substrates, each of which is rotatably connected to a rotating shaft, and a storage unit for storing: the information processing device is provided with a 1 st region (R1) and a 2 nd region (R2) set in correspondence with the operation range of the hands (11, 12), a 1 st condition selected when the operation mode when the user operates the transfer robot (10) by manual operation is rotational manual operation for each axis, and a 2 nd condition selected when the operation mode when the user operates the transfer robot (10) by manual operation is linear manual operation, and when the user performs manual operation, the information processing device reads the 1 st condition or the 2 nd condition in correspondence with the operation mode, and monitors whether or not the position of the specific point of the hands (11, 12) is suitable for the read condition.

Description

Transfer robot
Technical Field
The present invention relates to a transfer robot for transferring substrates.
Background
Conventionally, in a substrate processing apparatus for processing substrates such as semiconductor wafers and glass substrates, a transfer robot for transferring substrates to a chamber for processing the substrates is provided.
For example, patent document 1 discloses a transfer robot as follows: an interference region is set in advance in an operation range of the transfer robot, patterns of a combination of a start position of an operation to a teaching position, a target position and the interference region are stored, which pattern the operation from the start position to the target position corresponds to is determined, and an operation trajectory from the start position to the target position is determined so as to avoid the interference region according to the determined pattern.
Documents of the prior art
Patent document
Patent document 1: JP 2010-162682A
However, when the transfer robot is manually operated, that is, when the target position is not set in advance and the user directly operates the transfer robot, the transfer robot according to patent document 1 cannot be used.
Further, since a SCARA (selective compliance assembly Robot Arm) type transfer Robot having a plurality of rotation axes has a high degree of freedom and is difficult to manually operate, it is necessary to take measures to prevent interference with peripheral devices due to a user's operation error when manually operating the transfer Robot.
Disclosure of Invention
The present invention has been made in view of the above circumstances, and an object thereof is to provide a transfer robot capable of preventing interference between a hand of the transfer robot and the surroundings when transferring a substrate.
The transfer robot according to the present invention includes: a first arm 1 having one end rotatably coupled to the first rotating shaft 1; a 2 nd arm having one end rotatably coupled to a 2 nd rotation shaft provided at the other end of the 1 st arm; and a hand for transferring a substrate, one end of which is rotatably coupled to a 3 rd rotation shaft provided at the other end of the 2 nd arm, wherein the transfer robot is configured to allow a user to select: manually operating each of the axes in which the position of the hand is changed by manually rotating any one of the 1 st rotation axis, the 2 nd rotation axis, or the 3 rd rotation axis; and a linear manual operation for linearly operating the hand, wherein the transfer robot includes a storage unit for storing: a 1 st region and a 2 nd region set in accordance with the operation range of the hand; a 1 st condition selected by a user when an operation mode at the time of operating the transfer robot by manual operation is each axis rotation manual operation; and a 2 nd condition selected by a user when the handling robot is operated by a manual operation in a linear manual operation mode, wherein the 1 st condition or the 2 nd condition is read out according to the operation mode when the user performs the manual operation, and whether or not the position of the specific point of the hand is suitable for the read-out condition is monitored.
In the transfer robot according to the present invention, the 1 st condition is that the specific point of the hand is present in the 1 st area.
In the transfer robot according to the present invention, the 2 nd condition satisfies all of the following conditions (1) to (3).
(1) The specific point of the hand not performing the straight-line manual operation exists in the 1 st area.
(2) The specific point of the hand performing the linear manual operation exists within the 1 st region or within the 2 nd region.
(3) In a case where the specific point of the hand performing the linear manual operation exists within the 2 nd region, an error of the angle a with respect to an appropriate value is within an allowable error.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, since the position of the specific point of the hand is monitored based on the 1 st condition or the 2 nd condition selected corresponding to the operation mode when the transfer robot is manually operated, it is possible to prevent the hand of the transfer robot from interfering with the surroundings.
Drawings
Fig. 1 is a schematic configuration diagram showing a configuration of a main part of a substrate processing apparatus according to the present embodiment.
Fig. 2 is a perspective view schematically showing a transfer robot of the substrate processing apparatus according to the present embodiment.
Fig. 3 is a functional block diagram showing a main part configuration of a control unit of the substrate processing apparatus according to the present embodiment.
Fig. 4 is an explanatory diagram for explaining the 1 st region.
Fig. 5 is an explanatory diagram for explaining the 2 nd area.
Fig. 6 is an explanatory diagram for explaining the 2 nd region.
Fig. 7 is a flowchart for explaining operation control of the transfer robot by the control unit in the substrate processing apparatus according to the present embodiment.
Description of reference numerals
10 transfer robot
11 hand
12 hand
13 3 rd rotation axis
15 nd 2 nd rotation axis
17 st rotation axis
20 transfer chamber
21 setting surface
22 side wall
42 determination unit
43 selection part
44 monitoring part
45 stop control unit
46 notification part
100 substrate processing apparatus
C1-C8 cavity
C13 communication port
W substrate
Detailed Description
The transfer robot according to the present embodiment will be described below with reference to the drawings.
Fig. 1 is a schematic configuration diagram showing a main part configuration of a substrate processing apparatus using a transfer robot. In fig. 1, reference numeral 100 denotes a substrate processing apparatus.
The substrate processing apparatus 100 includes a main body 30 and a control unit 40. The main body 30 includes the transfer robot 10 and the transfer chamber 20 (transfer chamber). In fig. 1, the upper portion of the transmission cavity 20 is omitted for convenience.
The main body 30 includes cavities C1 to C8. Among the chambers C1 to C8, the chambers C1 to C7 are processing chambers for processing a substrate (not shown), and the chamber C8 is a load lock for carrying a substrate stored in the atmosphere into the transfer chamber 20. The substrate is, for example, a semiconductor wafer or a glass substrate.
The transfer chamber 20 is a closed space surrounded by a side wall 22 and the like, and the transfer robot 10 is disposed inside. The installation surface 21 of the transfer chamber 20 on which the transfer robot 10 is installed is, for example, a hexagonal shape. The side wall 22 of the transfer chamber 20 is provided around the end of the installation surface 21, and the chambers C1 to C8 are airtightly attached to the side wall 22 and communicate with the transfer chamber 20.
The transfer robot 10 transfers the substrate carried into the transfer chamber 20 through the chamber C8 to any one of the chambers C1 to C7. The chambers C1 to C7 perform processes such as etching on the loaded substrates. The transfer robot 10 carries out the substrate after the relevant process to the outside of the chambers C1 to C7. The carrying in and carrying out is an example of the carrying operation.
In the automatic operation, the transfer chamber 20 and the chambers C1 to C7 are in a vacuum state, and the transfer chamber 20 and the chambers C1 to C7 are set to an atmospheric environment during teaching.
Even in the vacuum state, teaching can be performed from the outside of the transfer chamber 20 even in the vacuum state as long as the inside of the transfer chamber 20 and the inside of the chambers C1 to C7 can be seen from the outside of the transfer chamber 20.
The transfer robot 10 is an articulated so-called SCARA robot having a plurality of rotation axes, and is configured to be capable of rotating each rotation axis independently. Fig. 2 is a perspective view schematically showing the transfer robot 10 of the substrate processing apparatus 100 according to the present embodiment.
The transfer robot 10 includes a base cylinder 18 that moves up and down in a Z-axis direction (hereinafter, also referred to as a vertical direction) perpendicular to the installation surface 21, and a 1 st rotating shaft 17 is provided at the center of the base cylinder 18. One end of a rod-shaped 1 st arm 16 is rotatably connected to the 1 st rotation shaft 17, and the 1 st arm 16 is rotatable about the 1 st rotation shaft 17. The second end of the 1 st arm 16 is provided with a 2 nd rotation shaft 15. One end of a rod-shaped 2 nd arm 14 is rotatably connected to the 2 nd rotation shaft 15, and the 2 nd arm 14 is rotatable about the 2 nd rotation shaft 15. That is, the lower portion of the 2 nd rotation shaft 15 is attached to the other end portion of the 1 st arm 16, and the upper portion of the 2 nd rotation shaft 15 is attached to the one end portion of the 2 nd arm 14. In addition, the length of the 1 st arm 16 is the same as the length of the 2 nd arm 14.
Further, a 3 rd rotation shaft 13 is provided at the other end of the 2 nd arm 14. One end portions of the hands 11 and 12 are rotatably connected to the 3 rd rotation shaft 13, and the hands 11 and 12 can rotate about the 3 rd rotation shaft 13. That is, the 3 rd rotation shaft 13 is configured to be able to rotate the hand 11 and the hand 12 individually.
For example, one end of the hand 12 is attached to the 3 rd rotating shaft 13 at the uppermost position, one end of the hand 11 is attached to the hand 12 at the lower position than the one end, and the other end of the 2 nd arm 14 is attached to the lowermost position in the vertical direction.
The hands 11 and 12 are made of, for example, a strip-shaped thin plate material as shown in fig. 2, and the shape is not limited.
Although the 1 st rotation shaft 17, the 2 nd rotation shaft 15, and the 3 rd rotation shaft 13 are provided with corresponding drive means (for example, motors), illustration and description thereof are omitted.
In the substrate processing apparatus 100 according to the present embodiment, since the 1 st rotation shaft 17, the 2 nd rotation shaft 15, and the 3 rd rotation shaft 13 can rotate independently, each rotation shaft can rotate independently. This enables the positions of the hands 11 and 12 to be changed.
For example, since the hands 11 and 12 can be independently rotated about the 3 rd rotation axis 13 as a rotation center, the direction of the hand 11 (the direction from one end portion (base end side) of the hand toward the other end portion (tip end side)) and the direction of the hand 12 (the direction from one end portion (base end side) of the hand toward the other end portion (tip end side)) can be set to different directions with respect to the 3 rd rotation axis 13 as shown in fig. 2. As shown in the reference position of fig. 5 described later, the direction of the hand 11 and the direction of the hand 12 can be made the same.
In the present embodiment, the operation of manually rotating a predetermined rotation shaft is referred to as "manual operation for each axis".
In addition, a plurality of rotating shafts can be rotated simultaneously. At this time, the hands 11 and 12 can be linearly operated by controlling the operation amount of each rotation axis. In the present embodiment, such an operation is referred to as "linear manual operation".
Further, the hands 11 and 12 respectively specify a specific point (for example, a center point TCP described later), and when the "linear manual operation" is performed, the operation is controlled so as to be linear at the specific point.
In addition, the user can teach (teaching) the position of the transfer robot 10 using the teaching tool 50. In this case, the axes can be manually operated or linearly manually operated by buttons provided on the teaching device 50. I.e. the operating mode can be selected.
Further, the object to be manually operated for each axis or linearly manually operated can be specified.
In the manual operation of each axis, which rotation axis is rotated can be specified as described above. In the linear manual operation, one of the hands 11 and 12 is designated.
The above-described "each axis manual operation" and "linear manual operation" can be performed by using a known technique.
The coordinate system when performing the linear manual operation is not limited.
For example, a coordinate system based on an X axis (an axis in the horizontal plane), a Y axis (an axis orthogonal to the X axis in the horizontal plane), and a Z axis (an axis in the vertical direction) that are orthogonal to each other can be set with reference to the installation position of the transfer robot 10. In this coordinate system, even if the operation position of the transfer robot 10 is changed, the coordinate system is not changed. In the present embodiment, such a coordinate system is referred to as a "fixed coordinate system".
Further, a coordinate system based on the X axis (axis in the horizontal plane), the Y axis (axis orthogonal to the X axis in the horizontal plane), and the Z axis (axis in the vertical direction) orthogonal to each other can be set with the traveling direction of one of the hands 11 and 12 as the X axis (axis in the horizontal plane) which is the reference direction. In this coordinate system, when the operation position of the transfer robot 10 changes, the coordinate system also changes. In the present embodiment, such a coordinate system is referred to as a "modified coordinate system".
Teaching can be easily performed by separately using the coordinate system at the time of teaching.
Since the transfer robot 10 of the present embodiment includes 2 hands 11 and 12, it is possible to carry out the processed substrate in the chamber C1 out of the chamber C1 with one hand, for example. Further, the unprocessed substrate held by the other hand can be newly carried into the chamber C1.
In order to perform such an operation, the user uses the teaching tool 50 to teach the operation position of the transfer robot 10 and the like.
Information such as the taught operation position of the transfer robot 10 is stored. The information other than the operation position includes, for example, an operation speed. The information such as the operation position and the operation speed taught in this way is sequentially stored, and finally becomes a teaching program.
For example, when the information such as the 1 st operation position is set as the 1 st teaching position information "P1", the information such as the 2 nd operation position is set as the 2 nd teaching position information "P2", …, the information such as the n-1 st operation position is set as the n-th teaching position information "pn-1", and the information such as the n-th operation position is set as the n-th teaching position information "pn" …, the teaching program "P" is read out and stored, and the operation of the taught transfer robot 10 can be reproduced by executing the teaching program "P".
The following describes a structure related to teaching.
The control unit 40 controls the operation of the transfer robot 10 including the rotation of the hands 11 and 12, and the like, to carry and process the substrate. Fig. 3 is a functional block diagram showing a configuration of a main part of the control unit 40 of the substrate processing apparatus 100 according to the present embodiment.
The control unit 40 includes, for example, a processing unit 41, a determination unit 42, a selection unit 43, a monitoring unit 44, a stop control unit 45, a notification unit 46, and a storage unit 47.
The storage unit 47 is formed of a nonvolatile storage medium such as a flash memory, an EEPROM (registered trademark), an HDD, an MRAM (magnetoresistive memory), an FeRAM (ferroelectric memory), or an OUM.
The storage unit 47 stores information such as the operation position of the taught transfer robot 10 as a teaching program.
The storage unit 47 stores information relating to the 1 st region R1 and information relating to the 2 nd region R2 for restricting the operation of the transfer robot 10 in order to prevent interference with the surroundings during operation of the transfer robot 10. The information on the 1 st region R1 and the information on the 2 nd region R2 are used when the monitoring unit 44 monitors the positions of the hands 11 and 12.
The information related to the 1 st region R1 and the information related to the 2 nd region R2 will be described in detail below.
< region 1R 1>
Fig. 4 is an explanatory diagram illustrating the 1 st region R1. In fig. 4, the upper part of the transmission cavity 20 is omitted for convenience.
The 1 st region R1 (hatched in fig. 4) is a region in the transfer chamber 20, which is smaller than the installation surface 21 of the transfer robot 10 when viewed in the Z-axis direction (in plan view in fig. 4) in a horizontal plane orthogonal to the Z-axis direction. In other words, the 1 st region R1 is a three-dimensional region parallel to the installation surface 21 with the 1 st rotation axis 17 of the transfer robot 10 as the center. The 1 st region R1 has a shape similar to the shape of the mounting surface 21 when viewed in the Z-axis direction (when viewed from above in fig. 4).
More specifically, the 1 st region R1 is a region surrounded by an outer contour line R11 in the horizontal plane, and the outer contour line R11 is formed by connecting: the side wall 22 provided around the end of the installation surface 21 is located away from the center of the installation surface 21 by a distance greater than the 1 st maximum distance L from a specific point on each of the hands 11 and 12 to the tip of the hand.
The range in the Z-axis direction (vertical direction) in the 1 st region R1 may be determined appropriately according to the operation range of the transfer robot 10.
The specific Point of each hand 11, 12 is, for example, a Center Point TCP (Tool Center Point) of the hand 11, 12. The present embodiment is not limited to this, and the specific point may be a point near the 3 rd rotation axis 13 or the like, or may be a center point of gravity. The following description will be given taking as an example a case where the specific point is the center point TCP of the hands 11 and 12.
When the maximum distance from the specific point of each of the hands 11 and 12 to the tip of the hands 11 and 12 is L (1 st maximum distance L) (see fig. 2), the distance L1 (see fig. 4) from the side wall 22 to the 1 st region R1 (outer contour line R11) is greater than the 1 st maximum distance L.
In the present embodiment, information required to identify the 1 st region R1 is referred to as information related to the 1 st region R1.
< 2 nd region R2>
Fig. 5 and 6 are explanatory views for explaining the 2 nd region R2.
The chambers C1 to C7 are airtightly attached to the side wall 22 of the transfer chamber 20. That is, the transfer chamber 20 communicates with the chambers C1-C7. The following description will be made in detail by taking the cavity C1 as an example.
The cavity C1 is, for example, a hollow hexahedron, and has one open surface to form a communication port C13. A through hole corresponding to the communication port C13 is formed in the side wall 22 of the transfer chamber 20, and the chamber C1 and the transfer chamber 20 communicate with each other through the through hole and the communication port C13. The hands 11 and 12 carry the substrate W while holding it, and carry the substrate W into the chamber C1 or out of the chamber C1.
In fig. 5 and 6, for simplicity of explanation, a fixed coordinate system in which the depth direction of the cavity C1 is the X-axis direction and the direction orthogonal to the X-axis direction and the Z-axis direction (vertical direction) is the Y-axis direction is used for explanation.
In the example of fig. 5, the direction of the hand 11 and the direction of the hand 12 are the same for simplicity of illustration, but one of the hands inserted into the cavity C1 is shown. That is, when the hand 12 is used to carry in or carry out the substrate W, the hand 12 becomes an entry hand, and if the hand is operated linearly, the hand can enter the region on the chamber C1 side beyond the outer contour line R11 of the 1 st region R1. At this time, the other hand 11 becomes a retreating hand and cannot exceed the outer contour line R11 of the 1 st region R1. For this purpose, the hand 11 is rotated about the axis of the 3 rd rotation shaft 13 and stopped in the 1 st region R1. Here, although the description is made for the chamber C1, the same applies to the case of another chamber.
In fig. 5, the reference position of the transfer robot 10 is also shown. The hands 11 and 12 shown by one-dot chain lines in fig. 5 are reference positions of the hands 11 and 12.
The reference position of the transfer robot 10 is, for example, the following: the base tubular portion 18 is located at the lowest position in the Z-axis direction, and at a position where the 1 st arm 16 and the 2 nd arm 14 overlap in a plan view, and the other end portions (tip end sides) of the hands 11, 12 face a position opposite to the 2 nd rotation axis 15.
As described above, since the length of the 1 st arm 16 is the same as the length of the 2 nd arm 14, the 1 st arm 16 and the 2 nd arm 14 overlap each other in a plan view at the reference position of the transfer robot 10.
The 2 nd region R2 is a region corresponding to the size of the cavity C1, and is a three-dimensional region set based on the size (Y-axis direction, Z-axis direction) of the communication port C13 of the cavity C1 and the depth (X-axis direction) of the cavity C1. In the examples shown in fig. 5 and 6, the three-dimensional region is defined by a range R21 (X-axis direction), a range R22 (Y-axis direction), and a range R23 (Z-axis direction). In fig. 5, a 2 nd region R2 viewed in the Z-axis direction (in a plan view of fig. 4) is surrounded by a broken line.
As such, since the 2 nd region R2 is a region determined corresponding to each cavity, the 2 nd region R2 is different in each cavity. The following is a detailed description.
The range R22 is, for example, a range from a position separated from the opposing surface C12 of the cavity C1 by L2 in the X axis direction to the outer contour line R11. Here, L2 is slightly longer than the 1 st maximum distance L.
On the other hand, the longest distance among the distances from an arbitrary position of a straight line connecting the center point TCP of the hands 11 and 12 and the 3 rd rotation axis 13 to the ends of the hands 11 and 12 in the Y-axis direction is defined as the 2 nd maximum distance M. In this case, the range R21 corresponds to both ends of the communication port C13 in the Y-axis direction (see fig. 5), and is a range between a position separated from one end to the other end by L3 and a position separated from the other end to the one end by L3. Here, L3 is slightly longer than the 2 nd maximum distance M.
The range R23 corresponds to a range between both ends of the communication port C13 in the Z-axis direction (see fig. 6), and is a range between a position separated by a predetermined distance from one end to the other end and a position separated by a predetermined distance from the other end to the one end. Here, the predetermined distance is a distance slightly longer than a value obtained by adding the thickness of 2 substrates W to the sum of the thicknesses of the hands 11 and 12 in the Z-axis direction.
The direction of the hands 11 and 12 at the operating position is determined by an angle a formed by a straight line connecting the center point TCP of the hands 11 and 12 at the reference position and the 3 rd rotation axis 13 and a straight line connecting the center point TCP of the hands 11 and 12 at the operating position and the 3 rd rotation axis 13.
Since the reference position of the transfer robot 10 and the positional relationship of the respective cavities are different, the appropriate value of the angle a is different depending on the target cavity.
Further, the distances between the hands 11 and 12 and the chamber C1 (including not only the inner wall surfaces but also the communication port C13) when the substrate W held by the hands 11 and 12 is carried into the chamber C1 or when the substrate W is carried out of the chamber C1 are short. Therefore, the region as the 2 nd region R2 is set so that the hands 11 and 12 and the substrate W do not contact the chamber C1 during teaching.
Specifically, if the center point TCP of the hands 11 and 12 is located in the 2 nd region R2 and the error of the angle a with respect to the proper value is within the allowable error, the hands 11 and 12 and the substrate W do not contact the chamber C1 during teaching.
In the present embodiment, information necessary for identifying such a 2 nd region R2 is referred to as information related to the 2 nd region R2. Therefore, not only the 2 nd region R2 for each cavity, but also the appropriate value and the allowable error of the angle a for each cavity are information related to the 2 nd region R2.
The determination unit 42 determines whether "each axis manual operation" or "straight line manual operation" is set when the user instructs the position of the transfer robot 10 using the teaching device 50.
The selection section 43 selects the determination condition corresponding to the operation mode determined in the determination section 42.
For example, when the determination unit 42 determines that "manual operation for each axis" is set, the selection unit 43 selects the 1 st condition. When the determination unit 42 determines that "linear manual operation" is set, the selection unit 43 selects the 1 st condition and the 2 nd condition.
< Condition 1>
The 1 st condition is that the center point TCP of both the hands 11 and 12 exists in the 1 st region R1. That is, an abnormality occurs when the center point TCP of one of the hands 11 and 12 is outside the 1 st region R1.
< Condition 2>
The 2 nd condition means that all of the following 3 conditions are satisfied. The abnormality occurs when all of the 3 conditions are not satisfied.
(1) The center point TCP of the hand not performing the "straight manual operation" exists in the 1 st region R1. For example, when teaching is performed to hold the substrate W by the hand 12 and carry the substrate W into the chamber C1 with the hand 12 as the entry hand 12, the hand 11 becomes the retreat hand (the hand not performing the "linear manual operation"), and therefore, an abnormality occurs when the center point TCP of the hand 11 goes out of the 1 st region R1.
(2) The center point TCP of the hand performing the "straight manual operation" exists in the 1 st region R1 or the 2 nd region R2.
(3) When the center point TCP of the hand performing the "linear manual operation" is present in the 2 nd region R2, the error of the angle a from the appropriate value is within the allowable error.
The monitoring unit 44 monitors whether or not the condition selected by the selection unit 43 is satisfied when the user teaches the position of the transfer robot 10 using the teaching tool 50. For example, in the case of "linear manual operation", the monitoring unit 44 monitors whether or not the 1 st condition and the 2 nd condition are satisfied.
When the condition selected by the selection unit 43 is not satisfied, it is determined that there is an abnormality, and an abnormality signal is sent to the stop control unit 45 and the notification unit 46.
The stop control unit 45 stops the operation of the transfer robot 10 when the monitoring unit 44 sends the abnormality signal. That is, even if the user wants to perform the "axis manual operation" or the "linear manual operation" in order to teach the transfer robot 10, the user does not receive the operation command.
The notification unit 46 notifies the user when the monitoring unit 44 sends the abnormality signal. As the notification to the user, display of the fact that the abnormality is present or the like can be performed on the demonstrator 50. Further, notification to the user can be performed via the output unit 60. The output unit 60 is, for example, a display unit, a speaker, a lamp, or the like.
The Processing Unit 41 loads a control program stored in a ROM (not shown) in advance onto a RAM (not shown) using a CPU (Central Processing Unit), for example, and executes the control program, thereby controlling the above-described respective units, and thereby causing the entire apparatus to operate as the substrate Processing apparatus 100 according to the present embodiment. The processing unit 41 may include a processing unit such as an FPGA (Field Programmable Gate Array).
The control program may be provided not in advance in a ROM (not shown) but in a removable recording medium U such as a USB memory.
Fig. 7 is a flowchart illustrating operation control of the transfer robot 10 by the control unit 40 in the substrate processing apparatus 100 according to the present embodiment. For convenience of explanation, a case where the user operates the teach pendant 50 to teach, and a case where the hand 11 is the retreating hand and the hand 12 is the entering hand will be described as an example.
The user operates the teach pendant 50 to start teaching (step S101). The user operates the teach pendant 50 to give an instruction to manually operate the transfer robot 10. At this time, the processing unit 41 of the control unit 40 receives an operation instruction of the transfer robot 10 via the teach pendant 50 (step S102).
Next, the determination unit 42 determines whether the received operation instruction of the transfer robot 10 is "each axis manual operation" or "linear manual operation" (step S103). The determination method of the determination unit 42 has already been described, and detailed description is omitted.
When the determination unit 42 determines that the received operation instruction of the transfer robot 10 is the manual operation of each axis (yes in step S103), the selection unit 43 selects the 1 st condition (step S104), and the processing unit 41 reads the 1 st condition from the storage unit 47.
Thereafter, the control unit 40 controls the transfer robot 10 to execute the operation instruction received in step S102 (step S105).
During this time, the monitoring unit 44 determines (monitors) at predetermined time intervals whether or not the positions of the center points TCP of the hands 11 and 12 satisfy the 1 st condition, that is, whether or not the center points TCP of the hands 11 and 12 exist in the 1 st region R1 (step S106).
If the monitoring unit 44 determines that the center point TCP of the hand 11 or 12 is present in the 1 st area R1 (yes in step S106), the processing unit 410 determines whether or not the execution of the operation instruction received in step S102 is completed (step S107).
If it is determined that the execution of the operation instruction received in step S102 is not completed (no in step S107), the processing unit 41 returns the process to step S105. When it is determined that the execution of the operation instruction received in step S102 is completed (yes in step S107), the processing unit 41 advances the process to step S108.
For example, if an operation instruction is being executed from the (n-1) th teaching position to the (n) th teaching position, it is determined that the execution of the operation instruction is not completed. When the nth teaching position is reached and the teaching position information is stored, it is determined that the execution of the operation instruction is completed.
When it is determined in step S107 that an end instruction to end the teaching is received from the user after execution of the operation instruction is completed (yes in step S108), the processing unit 41 accumulates teaching position information taught so far and stores the teaching position information as 1 teaching program.
On the other hand, if it is determined in step S107 that the execution of the operation instruction is completed and then it is determined that an end instruction to end the teaching has not been received from the user (no in step S108), the process returns to step S102.
However, if the monitoring unit 44 determines in step S106 that the center points TCP of the hands 11 and 12 do not exist in the 1 st region R1 (no in step S106), that is, if the center point TCP of either of the hands 11 and 12 is out of the 1 st region R1, the stop control unit 45 stops the operation of the transfer robot 10 in accordance with the received operation instruction (step S109).
Next, the notification unit 46 notifies the user via the output unit 60 that the center point TCP of either of the hands 11 and 12 is out of the 1 st region R1 (step S110). The process ends thereafter.
The description returns to step S103 again.
When the determination unit 42 determines that the received operation instruction of the transfer robot 10 is not the manual operation of each axis (no in step S103), that is, when the received operation instruction is the linear manual operation, the selection unit 43 selects the 2 nd condition (step S111). The processing unit 41 reads the 2 nd condition from the storage unit 47.
Thereafter, the control unit 40 controls the transfer robot 10 to execute the operation instruction received in step S102 (step S112).
During this time, the monitoring unit 44 determines (monitors) at predetermined time intervals whether the center point TCP of the retreating hand (hand 11) satisfies the 2 nd condition, that is, whether the center point TCP of the retreating hand (hand 11) exists in the 1 st region R1 (step S113).
When the monitoring unit 44 determines that the center point TCP of the hand 11 is not present in the 1 st region R1 (no in step S113), that is, when the center point TCP of the hand 11 is out of the 1 st region R1, the stop control unit 45 stops the operation of the transfer robot 10 in accordance with the received operation instruction (step S109). The notification unit 46 notifies the user via the output unit 60 that the center point TCP of the hand 11 is out of the 1 st area R1 (step S110).
However, if the monitoring unit 44 determines that the center point TCP of the retreating hand (hand 11) is present in the 1 st region R1, yes in step S113, steps S114 and S115 are executed to determine (monitor) whether or not the center point TCP of the entering hand (hand 12) is present in the 1 st region R1 or the 2 nd region R2.
If the monitoring unit 44 determines that the center point TCP of the entry hand (hand 12) is present in the 1 st region R1 (yes in step S114), the processing proceeds to step S117.
The processing unit 41 then determines whether or not execution of the operation instruction received in step S102 is completed (step S117).
If it is determined that the execution of the operation instruction received in step S102 is not completed (no in step S117), the processing unit 41 returns the process to step S112. When it is determined that the execution of the operation instruction received in step S102 is completed (yes in step S117), the processing unit 41 advances the process to step S118.
The processing of step S117 and step S118 is the same as that of step S107 and step S108 described above, and therefore, the description thereof is omitted.
When the monitoring unit 44 determines that the center point TCP of the entry hand (hand 12) is not present in the 1 st region R1 (no in step S114), it determines (monitors) whether or not the position of the hand 12 is present in the 2 nd region R2 (step S115).
However, if the monitoring unit 44 determines that the center point TCP of the entry hand (hand 12) does not exist in the 2 nd area R2 (no in step S115), the stop control unit 45 proceeds to step S109 to stop the operation of the transfer robot 10 in response to the received operation instruction because the center point TCP of the entry hand (hand 12) does not exist in the 1 st area R1 and the 2 nd area R2 and therefore the 2 nd condition is not satisfied. The stop control unit 45 stops the operation of the transfer robot 10 in accordance with the received operation instruction (step S109).
After step S109, the notification unit 46 notifies the user via the output unit 60 that the center point TCP of the hand (hand 12) is out of the 1 st region R1 or the 2 nd region R2 (step S110).
When determining that the position of the hand 12 is within the 2 nd region R2 (yes in step S115), the monitoring unit 44 determines (monitors) whether the direction (angle a) of the entering hand (hand 12) is within the allowable error (step S116).
When the monitoring unit 44 determines that the orientation of the hand 12 is not within the allowable error (no at step S116), the processing of steps S109 to 110 is performed. These processes have already been described, and detailed description thereof is omitted.
When the monitoring unit 44 determines that the orientation of the hand 12 is within the allowable error (yes in step S116), the processing unit 41 determines whether or not the execution of the operation instruction received in step S102 is completed (step S117).
If it is determined that the execution of the operation instruction received in step S102 is not completed (no in step S117), the processing unit 41 returns the process to step S112. When it is determined that the execution of the operation instruction received in step S102 is completed (yes in step S117), the processing unit 41 checks the RAM to determine whether or not an instruction to terminate the teaching is received from the user (step S118). When determining that the instruction to end the teaching has not been received from the user (no in step S118), the processing unit 41 returns the process to step S102. When the processing unit 41 determines that a teaching termination instruction is received from the user (yes in step S118), the processing is terminated.
As described above, since the position of the specific point of the hand is monitored based on the 1 st condition or the 2 nd condition selected according to the operation mode when the transfer robot 10 is manually operated, it is possible to prevent the hand of the transfer robot 10 from interfering with the surroundings.
The determination unit 42, the selection unit 43, the monitoring unit 44, the stop control unit 45, and the notification unit 46 may be configured by hardware logic, or may be configured by software by the processing unit 41 executing a predetermined program.
In the above description, the substrate processing apparatus 100 has been described as an example having 2 hands 11 and 12, but the present embodiment is not limited thereto, and may have a configuration having only 1 hand.
In the case of 1 hand, since it is not necessary to divide the entry hand and the retreat hand to perform the processing, the processing of step S113 may be omitted from the flowchart of fig. 7.

Claims (3)

1. A transfer robot includes:
a first arm 1 having one end rotatably coupled to the first rotating shaft 1;
a 2 nd arm having one end rotatably coupled to a 2 nd rotation shaft provided at the other end of the 1 st arm; and
a hand for transferring a substrate, one end of which is rotatably connected to a 3 rd rotating shaft provided at the other end of the 2 nd arm,
the transfer robot is characterized in that,
the transfer robot is configured to allow a user to select: manually operating each of the axes in which the position of the hand is changed by manually rotating any one of the 1 st rotation axis, the 2 nd rotation axis, or the 3 rd rotation axis; and a linear manual operation for linearly moving the hand,
the transfer robot includes a storage unit that stores:
a 1 st region and a 2 nd region set in accordance with the operation range of the hand;
a 1 st condition selected by a user when an operation mode at the time of operating the transfer robot by manual operation is each axis rotation manual operation; and
the 2 nd condition selected by the user in the case where the operation mode when the transfer robot is operated in the manual operation is the linear manual operation,
when a user performs a manual operation, the 1 st condition or the 2 nd condition is read out in accordance with the operation mode, and whether or not the position of a specific point of the hand is suitable for the read-out condition is monitored.
2. The transfer robot of claim 1,
the 1 st condition is that a specific point of the hand is present within the 1 st zone.
3. The transfer robot of claim 1 or 2,
the 2 nd condition satisfies all of the following conditions (1) to (3):
(1) the specific point of the hand not performing the straight-line manual operation exists in the 1 st area;
(2) the specific point of the hand performing the straight-line manual operation exists within the 1 st region or within the 2 nd region;
(3) in a case where the specific point of the hand performing the linear manual operation exists within the 2 nd region, an error of the angle a with respect to an appropriate value is within an allowable error.
CN202010068121.5A 2019-04-01 2020-01-20 Transfer robot Pending CN111791220A (en)

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