CN111769071A - Polarization clamp for piezoelectric composite film material - Google Patents

Polarization clamp for piezoelectric composite film material Download PDF

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Publication number
CN111769071A
CN111769071A CN202010751280.5A CN202010751280A CN111769071A CN 111769071 A CN111769071 A CN 111769071A CN 202010751280 A CN202010751280 A CN 202010751280A CN 111769071 A CN111769071 A CN 111769071A
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plate
polarization
clamp
electrode polarization
electrode
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CN111769071B (en
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徐凡
赵官峰
卓江山
娄维尧
蔡姚杰
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/04Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)

Abstract

The application discloses a polarization clamp for a piezoelectric composite film material, which mainly comprises a polarization assembly, an electrode holder and a clamp mounting table; the polarization assembly comprises an upper electrode polarization plate, a lower electrode polarization plate and an insulating isolation plate, and a reserved opening is formed in the insulating isolation plate; the electrode clamp holder comprises a torsional spring, an upper clamp plate body and a lower clamp plate body which are mutually hinged through a connecting pin, the front end of the upper clamp plate body and the front end of the lower clamp plate body are respectively provided with an upper clamp plate and a lower clamp plate, the torsional spring is sleeved on the connecting pin, and two ends of the torsional spring are respectively fixed on the upper clamp plate and the lower clamp plate; the electrode holder is arranged on the fixture mounting table, the upper electrode polarization plate is connected to the lower surface of the upper clamping plate, the lower electrode polarization plate is connected to the upper surface of the lower clamping plate, and the insulating isolation plate is clamped between the upper electrode polarization plate and the lower electrode polarization plate. The polarization clamp is suitable for clamping piezoelectric composite film materials with small areas, and a plurality of electrode clamp holders can be placed on the clamp mounting table to work together.

Description

Polarization clamp for piezoelectric composite film material
Technical Field
The invention relates to the field of polarization clamps of piezoelectric materials and mechanical manufacturing, in particular to a polarization clamp for a piezoelectric composite film material.
Background
Piezoelectric materials are important materials for converting mechanical energy into electrical energy, and are currently ubiquitous in social production and life. Piezoelectric materials are classified into inorganic piezoelectric materials including piezoelectric ceramics and piezoelectric single crystals and organic piezoelectric materials. The organic piezoelectric material is an organic piezoelectric film represented by polyvinylidene fluoride. The other type is a composite piezoelectric material, which is a novel piezoelectric material formed by compounding piezoelectric ceramics and other matrix materials according to a certain mode. Compared with inorganic piezoelectric materials, the composite piezoelectric material has the advantages of good flexibility, low density, easy realization of large-area molding, good performance designability, high voltage piezoelectric coefficient and the like. Compared with the organic piezoelectric material, the composite piezoelectric material not only has the advantages of flexibility, designability and the like of the organic piezoelectric material, but also has higher piezoelectric strain constant than the organic piezoelectric material, so that the piezoelectric composite material can be applied to richer fields such as underwater sound, ultrasound, medicine and the like.
With the development of the polarization process of the piezoelectric material, the newly prepared piezoelectric material does not have the piezoelectric property, and the polarization process is required to polarize the piezoelectric material. After polarization, the anisotropic multi-domain structure in the piezoelectric material is converted into a mono-domain structure and exhibits piezoelectric characteristics.
In the poling process, the design of the fixture is a critical loop. The fixture ensures the attachment between the piezoelectric material and the electrode. If the design of the clamp is poor, the piezoelectric material and the electrode are not tightly attached, the thin film is likely to be punctured, the polarization fails, the whole piezoelectric material is wasted, and even the polarized electrode is wasted. Therefore, the invention provides the polarization clamp for the piezoelectric composite film material, the polarization clamp is specially used for clamping the piezoelectric composite film material with a smaller area, the volume of the polarization clamp is small, a plurality of polarization clamps can be used in parallel, the clamping force of the polarization clamps can be adjusted, the interchangeability is strong, the maintenance is convenient, the manufacture is convenient, and the cost is low.
Disclosure of Invention
In view of the above technical problems in the prior art, an object of the present application is to provide a polarization fixture for a piezoelectric composite thin film material, which is specially used for clamping a piezoelectric composite thin film material with a small area.
The polarization clamp for the piezoelectric composite thin film material is characterized in that: the polarization clamp mainly comprises three parts, namely a polarization assembly, an electrode holder and a clamp mounting table;
the polarization assembly comprises an upper electrode polarization plate, a lower electrode polarization plate and an insulating isolation plate;
the electrode clamp holder comprises a torsion spring, an upper clamp plate body and a lower clamp plate body which are mutually hinged through a connecting pin, the front end of the upper clamp plate body and the front end of the lower clamp plate body are respectively provided with an upper clamp plate and a lower clamp plate which are used for clamping under pressure, the torsion spring is sleeved on the connecting pin, and two ends of the torsion spring are respectively fixed on the upper clamp plate and the lower clamp plate;
the electrode holder is arranged on the fixture mounting table, the upper electrode polarization plate is connected to the lower surface of the upper clamping plate, and the lower electrode polarization plate is connected to the upper surface of the lower clamping plate; the piezoelectric composite film material is placed in the reserved opening of the insulating isolation plate and clamped between the upper electrode polarization plate and the lower electrode polarization plate.
The polarization clamp for the piezoelectric composite thin film material is characterized in that: the upper electrode polarization plate and the lower electrode polarization plate are respectively connected with a direct-current high-voltage power supply through leads. The upper electrode polarization plate and the lower electrode polarization plate are arranged on the electrode holder, and the electrode holder is used for compressing the polarization assembly during polarization operation, so that the insulating isolation plate is clamped between the upper electrode polarization plate and the lower electrode polarization plate, and the piezoelectric composite film material and the upper electrode polarization plate and the lower electrode polarization plate are tightly attached to each other.
The polarization clamp for the piezoelectric composite thin film material is characterized in that: the upper electrode polarization plate and the lower electrode polarization plate are both in rectangular structures, a rectangular boss is arranged in the middle of the lower surface of the upper electrode polarization plate and in the middle of the upper surface of the lower electrode polarization plate, a matched rectangular opening is arranged in the middle of the insulating isolation plate, and the rectangular opening is a reserved opening in the insulating isolation plate; the insulating isolation plate is tightly clamped between the upper electrode polarization plate and the lower electrode polarization plate, and meanwhile, the rectangular boss in the middle of the lower surface of the upper electrode polarization plate and the rectangular boss in the middle of the upper surface of the electrode polarization plate penetrate into the rectangular opening of the insulating isolation plate in opposite directions and are in tight contact with the piezoelectric composite film material placed in the rectangular opening of the insulating isolation plate.
The polarization clamp for the piezoelectric composite thin film material is characterized in that: the upper surface of the upper electrode polarization plate and the lower surface of the lower electrode polarization plate are respectively provided with a plurality of mushroom head-shaped cylindrical bosses, the lower surface of the upper clamping plate and the upper surface of the lower clamping plate are respectively provided with a plurality of matched concave clamping grooves, and the upper electrode polarization plate and the lower electrode polarization plate are fixedly installed on the upper clamping plate and the lower clamping plate respectively through the matching clamping action of the mushroom head-shaped cylindrical bosses and the concave clamping grooves.
The polarization clamp for the piezoelectric composite thin film material is characterized in that: the upper surface of lower electrode polarization board is equipped with cylindrical location platform, is equipped with the circular locating hole that matches on the insulating division board, and cylindrical location platform cooperation on the lower electrode polarization board penetrates in the circular locating hole of insulating division board, realizes that the location of insulating division board on the lower electrode polarization board is placed.
The polarization clamp for the piezoelectric composite thin film material is characterized in that: two vertical supporting teeth are arranged at the bottom of the front end of the upper splint body close to the upper splint, the two supporting teeth are arranged at intervals, and the same plane where the two supporting teeth are located is parallel to the connecting pin; the upper electrode polarization plate, the insulating isolation plate and the lower electrode polarization plate of the polarization assembly are tightly clamped together by the upper clamping plate and the lower clamping plate of the electrode clamp holder, and the bottoms of the two supporting teeth are in tight contact with the lower clamping plate body. The purpose of setting up the support tooth in addition lies in: the upper clamping plate and the lower clamping plate for mounting the polarization component are prevented from bending deformation due to uneven stress when the electrode holder is closed for a long time, and the other function is to prevent the upper clamping plate from offsetting after the electrode holder is closed.
The polarization clamp for the piezoelectric composite thin film material is characterized in that: the fixture mounting table comprises an optical axis and two horizontal supporting seats fixedly mounted at two ends of the optical axis, slide bar through holes matched with the outer diameter of the optical axis are formed in the bottom of the lower clamp plate body, the number of the slide bar through holes in the bottom of the lower clamp plate body is the same as that of the optical axis, and the optical axis of the fixture mounting table is matched with the slide bar through holes in the bottom of the lower clamp plate body to penetrate into the slide bar through holes in the bottom of the lower clamp plate body, so that the electrode.
The polarization clamp for the piezoelectric composite thin film material is characterized in that: the fixture mounting table comprises at least two optical axes, two horizontal supporting seats are fixedly mounted at two ends of each optical axis, at least two slide bar through holes are correspondingly formed in the bottom of the lower clamp plate body, and the at least two optical axes of the fixture mounting table penetrate into the at least two slide bar through holes in the bottom of the lower clamp plate body at intervals in parallel to realize stable mounting of the electrode holder on the fixture mounting table.
The invention has the beneficial effects that:
1. the mushroom-shaped detachable buckle design is adopted between the upper electrode polarization plate and the lower electrode polarization plate of the polarization assembly and the electrode holder part, so that the integral interchangeability of the polarization clamp is improved.
2. The whole design of the polarization clamp is small and exquisite, and the polarization clamp is suitable for polarization work of piezoelectric composite thin film materials with small areas.
3. When the polarization clamp works, the plurality of electrode clamp holders can be arranged on the optical axis of the clamp mounting table in an aligned and spaced mode to work together, and the polarization clamp is low in manufacturing cost and high in interchangeability.
Drawings
FIG. 1 is a schematic diagram of a polarization assembly of the present application;
FIG. 2 is a schematic cross-sectional view taken along line B-B of FIG. 1;
FIG. 3 is partial view C in bitmap 2;
FIG. 4 is a schematic cross-sectional view taken along line A-A of FIG. 1;
FIG. 5 is a front view of the electrode holder of the present application;
FIG. 6 is a partial view E of FIG. 5;
FIG. 7 is a perspective view of an electrode holder of the present application;
FIG. 8 is a partial view D of FIG. 7;
FIG. 9 is a schematic view of the structure of the fixture mount of the present application;
FIG. 10 is a schematic view of the polarization fixture of the present application;
FIG. 11 is an exploded view of the assembly of the polarization jig of the present application;
in the figure: 1-upper clamping plate, 2-upper electrode polarization plate, 3-insulating isolation plate, 4-torsion spring, 5-lower electrode polarization plate, 6-lower clamping plate, 7-connecting pin, 8-optical axis, 9-horizontal supporting seat, 10-supporting tooth, 11-concave clamping groove, 12-upper clamping plate body and 13-lower clamping plate body.
Detailed Description
The present invention is further illustrated by the following examples, which should not be construed as limiting the scope of the invention.
In the description of the present invention, it should be noted that the orientations or positional relationships indicated as the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., appear based on the orientations or positional relationships shown in the drawings only for the convenience of describing the present invention and simplifying the description, but not for indicating or implying that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" should be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example (b): compare FIGS. 1-11
A polarization clamp for piezoelectric composite thin film materials mainly comprises three parts, namely a polarization component, an electrode holder and a clamp mounting table;
the polarization component comprises an upper electrode polarization plate 2, a lower electrode polarization plate 5 and an insulating isolation plate 3;
the electrode holder includes torsional spring 4 and through connecting pin 7 articulated punch holder body 12 and lower plate body 13 each other, and punch holder 1 and lower plate 6 that are used for exerting pressure the centre gripping are equipped with respectively to punch holder body 12 front end and lower plate body 13 front end, and 4 covers on connecting pin 7 of torsional spring, and 4 both ends of torsional spring are fixed respectively and are withstood punch holder 1 and lower plate 6, provide the clamp force for the electrode holder part.
In comparison with fig. 5, the bottom of the upper clamp plate 1 is U-shaped, the top of the lower clamp plate 6 is U-shaped, and a polarization working area is formed between the U-shaped bottom of the upper clamp plate 1 and the U-shaped top of the lower clamp plate 6.
The electrode holder is installed on the fixture mounting table, the upper electrode polarization plate 2 is connected to the lower surface of the upper clamping plate 1, the lower electrode polarization plate 5 is connected to the upper surface of the lower clamping plate 6, and the insulating isolation plate 3 is clamped between the upper electrode polarization plate 2 and the lower electrode polarization plate 5. Referring to fig. 11, the insulating isolation plate 3 is provided with a reserved opening for placing the piezoelectric composite thin film material, and when the insulating isolation plate is clamped between the upper electrode polarization plate and the lower electrode polarization plate, the piezoelectric composite thin film material placed in the reserved opening of the insulating isolation plate 3 is tightly attached to the upper electrode polarization plate and the lower electrode polarization plate.
The upper electrode polarization plate 2 and the lower electrode polarization plate 5 are respectively connected with a direct-current high-voltage power supply through leads.
The upper electrode polarization plate 2 and the lower electrode polarization plate 5 are both rectangular structures, a rectangular boss is arranged in the middle of the lower surface of the upper electrode polarization plate 2 and in the middle of the upper surface of the lower electrode polarization plate 5, a matched rectangular opening is arranged in the middle of the insulating isolation plate 3, and the rectangular opening is a reserved opening in the insulating isolation plate 3; when the insulating isolation plate 3 is tightly clamped between the upper electrode polarization plate 2 and the lower electrode polarization plate 5, the rectangular boss in the middle of the lower surface of the upper electrode polarization plate 2 and the rectangular boss in the middle of the upper surface of the electrode polarization plate 5 oppositely penetrate into the rectangular opening of the insulating isolation plate 3 and are in tight contact with the piezoelectric composite film material placed in the rectangular opening of the insulating isolation plate 3.
The upper surface of the upper electrode polarization plate 2 and the lower surface of the lower electrode polarization plate 5 are both provided with a plurality of mushroom-head-shaped cylindrical bosses, as shown in the partial view C of fig. 2-3. The lower surface of the upper clamping plate 1 and the upper surface of the lower clamping plate 6 are respectively provided with a plurality of matched concave clamping grooves 11, as shown in a partial view D in figures 7-8. The mushroom head-shaped cylindrical boss on the upper surface of the upper electrode polarization plate 2 is matched and clamped into the concave clamping groove 11 on the lower surface of the upper clamping plate 1, the mushroom head-shaped cylindrical boss on the lower surface of the lower electrode polarization plate 5 is matched and clamped into the concave clamping groove 11 on the upper surface of the lower clamping plate 6, and detachable clamping of the upper electrode polarization plate and the lower electrode polarization plate and the electrode holder part is realized respectively (through the matching clamping action of the mushroom head-shaped cylindrical boss and the concave clamping groove 11), so that interchangeability in the polarization assembly is ensured, and if the upper electrode polarization plate and the lower electrode polarization plate are damaged, the upper electrode polarization plate and the.
The upper surface of lower electrode polarization board 5 is equipped with cylindrical location platform, is equipped with the circular locating hole that matches on insulating division board 3, and cylindrical location platform cooperation on lower electrode polarization board 5 penetrates in the circular locating hole of insulating division board 3, realizes that insulating division board 3 is placed in the location on lower electrode polarization board 5. The insulating isolation plate 3 is placed between the upper electrode polarization plate and the lower electrode polarization plate to prevent the upper electrode polarization plate and the lower electrode polarization plate from contacting to cause short circuit.
As shown by a partial view E in fig. 5-6, two vertical supporting teeth 10 are disposed at a position close to the upper splint 1 at the bottom of the front end of the upper splint body 12, the two supporting teeth 10 are disposed at intervals, and the same plane where the two supporting teeth 10 are located is parallel to the connecting pin 7; the bottom of each of the two support teeth 10 is in close contact with the lower clamp plate body 13 while the upper clamp plate 1 and the lower clamp plate 6 of the electrode holder tightly hold the upper electrode polarization plate 2, the insulating spacer 3 and the lower electrode polarization plate 5 of the polarization assembly together. The two supporting teeth 10 function as: when the electrode holder does not hold the polarization component, the support teeth 10 can be used as supports when the electrode holder is closed, so that the upper clamping plate and the lower clamping plate for mounting the polarization component are prevented from bending and deforming due to uneven stress when the electrode holder is closed for a long time, and the other function is to prevent the upper clamping plate from shifting after the electrode holder is closed.
The anchor clamps mount table includes optical axis 8 and two horizontal supporting seats 9 of fixed mounting at optical axis 8 both ends, and 13 bottoms of lower plate body are equipped with the slide bar through-hole that matches with 8 external diameters of optical axis, and the quantity of the slide bar through-hole of 13 bottoms of lower plate body is the same with the quantity of optical axis 8, and the optical axis 8 cooperation of anchor clamps mount table penetrates in the slide bar through-hole of 13 bottoms of lower plate body, realizes the installation of electrode holder on the anchor clamps mount table.
Further, as can be seen by comparing FIGS. 9-11: the fixture mounting table comprises two optical axes 8, two horizontal supporting seats 9 are fixedly mounted at two ends of each optical axis 8, the optical axes 8 are used for bearing the electrode holder part, and the horizontal supporting seats 9 are used for fixedly mounting the whole polarization fixture in a silicon oil tank.
The bottom of the lower clamp plate body 13 is correspondingly provided with two slide bar through holes, and two optical axes 8 of the clamp mounting table penetrate into the two slide bar through holes at the bottom of the lower clamp plate body 13 at intervals in parallel to realize stable mounting of the electrode holder on the clamp mounting table.
Furthermore, the upper polarized electrode plate and the lower polarized electrode plate are both manufactured by cutting copper plates.
Furthermore, the insulating isolation plate is made of epoxy resin, and is obtained by cutting an epoxy resin plate through laser.
Further, the upper clamping plate and the lower clamping plate can be made of photosensitive resin by using SLA3D printing technology, and can also be made of ABS plastic by using injection molding technology, and a3D printing method is preferred.
Example 1:
an assembly exploded view of a polarization jig for a piezoelectric composite thin film material is shown in fig. 11, wherein an upper electrode polarization plate and a lower electrode polarization plate of the polarization jig are both made of copper plates by a cutting process. The insulating isolation plate is made of epoxy resin and is obtained by laser cutting. The upper clamping plate and the lower clamping plate are prepared by adopting a3D printing technology. The residual horizontal supporting seat, the connecting pin, the optical axis and the torsion spring can be purchased with standard parts.
The assembly process of the polarization jig is as follows: firstly, the lower electrode polarization plate is fastened at the corresponding mounting position of the lower clamping plate, and the upper electrode polarization plate is fastened at the corresponding mounting position of the upper clamping plate. And secondly, the upper clamping plate body, the lower clamping plate body, the torsion spring and the connecting pin are installed and fixed. At which point the electrode holder is partially installed. Two optical axes of the clamp mounting table respectively penetrate through the two slide bar through holes at the bottom of the lower clamp plate body. And the two ends of the optical axis are connected with the horizontal supporting seat. And finally, the whole clamp is connected into the silicon oil tank through the horizontal supporting seat. And the whole clamp is assembled.
When the polarization clamp is used, the upper electrode polarization plate and the lower electrode polarization plate are firstly placed into the electrode holder, the insulating isolation plate is placed, then the piezoelectric composite film material is placed, and then the electrode holder part is pressed, so that the specific process is as follows: press in the lump upper plate body rear end and lower plate body rear end, open upper and lower splint, then place the location of insulating division board on lower electrode polarization board. Then the piezoelectric composite film material to be polarized is placed in the rectangular opening of the insulating isolation plate and is contacted with the rectangular boss of the lower electrode polarization plate, and then the electrode holder part is loosened to close the upper clamping plate and the lower clamping plate. Thereby the clamping process of the polarization clamp is finished. In use, as shown in fig. 10, a plurality of electrode holder portions are mounted on the jig mount to polarize a plurality of pieces of the piezoelectric composite thin film material at the same time.
The statements in this specification merely set forth a list of implementations of the inventive concept and the scope of the present invention should not be construed as limited to the particular forms set forth in the examples.

Claims (8)

1. A polarization anchor clamps for piezoelectricity composite film material which characterized in that: the polarization clamp mainly comprises three parts, namely a polarization assembly, an electrode holder and a clamp mounting table;
the polarization assembly comprises an upper electrode polarization plate (2), a lower electrode polarization plate (5) and an insulating isolation plate (3), wherein a reserved opening for placing a piezoelectric composite film material is formed in the insulating isolation plate (3);
the electrode clamp holder comprises a torsion spring (4), an upper clamp plate body (12) and a lower clamp plate body (13) which are mutually hinged through a connecting pin (7), the front end of the upper clamp plate body (12) and the front end of the lower clamp plate body (13) are respectively provided with an upper clamp plate (1) and a lower clamp plate (6) which are used for pressing and clamping, the torsion spring (4) is sleeved on the connecting pin (7), and two ends of the torsion spring (4) are respectively fixed on the upper clamp plate (1) and the lower clamp plate (6);
the electrode holder is arranged on the fixture mounting table, the upper electrode polarization plate (2) is connected to the lower surface of the upper clamping plate (1), and the lower electrode polarization plate (5) is connected to the upper surface of the lower clamping plate (6); the piezoelectric composite film material is placed in a reserved opening of the insulating isolation plate (3) in a matching mode, the insulating isolation plate (3) is clamped between the upper electrode polarization plate and the lower electrode polarization plate, and meanwhile the piezoelectric composite film material is tightly attached to the upper electrode polarization plate and the lower electrode polarization plate.
2. A polarization jig for a piezo-electric composite film material according to claim 1, wherein: the upper electrode polarization plate (2) and the lower electrode polarization plate (5) are respectively connected with a direct-current high-voltage power supply through leads.
3. A polarization jig for a piezo-electric composite film material according to claim 1, wherein: the upper electrode polarization plate (2) and the lower electrode polarization plate (5) are both rectangular structures, a rectangular boss is arranged in the middle of the lower surface of the upper electrode polarization plate (2) and the middle of the upper surface of the lower electrode polarization plate (5), a matched rectangular opening is arranged in the middle of the insulating isolation plate (3), and the rectangular opening is a reserved opening on the insulating isolation plate (3); the insulating isolation plate (3) is tightly clamped between the upper electrode polarization plate (2) and the lower electrode polarization plate (5), and meanwhile, a rectangular boss in the middle of the lower surface of the upper electrode polarization plate (2) and a rectangular boss in the middle of the upper surface of the electrode polarization plate (5) penetrate into the rectangular opening of the insulating isolation plate (3) in opposite directions and are in tight contact with a piezoelectric composite film material placed in the rectangular opening of the insulating isolation plate (3).
4. A polarization jig for a piezo-electric composite film material according to claim 1, wherein: the upper surface of upper electrode polarization board (2) and the lower surface of lower electrode polarization board (5) all are provided with a plurality of mushroom head shape cylinder bosss, and upper plate (1) lower surface and lower plate (6) upper surface are equipped with a plurality of concave type draw-in grooves (11) that match respectively, and through the cooperation joint effect of mushroom head shape cylinder bosss and concave type draw-in groove (11), it is fixed to realize the installation on upper electrode polarization board (2) and lower electrode polarization board (5) at upper plate (1) and lower plate (6) respectively.
5. A polarization jig for a piezo-electric composite film material according to claim 1, wherein: the upper surface of lower electrode polarization board (5) is equipped with cylindrical location platform, is equipped with the circular locating hole that matches on insulating division board (3), and cylindrical location platform cooperation on lower electrode polarization board (5) penetrates in the circular locating hole of insulating division board (3), realizes that insulating division board (3) location on lower electrode polarization board (5) is placed.
6. A polarization jig for a piezo-electric composite film material according to claim 1, wherein: the bottom of the front end of the upper splint body (12) close to the upper splint (1) is provided with two vertical supporting teeth (10), the two supporting teeth (10) are arranged at intervals, and the same plane where the two supporting teeth (10) are located is parallel to the connecting pin (7); the bottom of each of the two support teeth (10) is in close contact with the lower clamping plate body (13) while the upper clamping plate (1) and the lower clamping plate (6) of the electrode holder tightly clamp the upper electrode polarization plate (2), the insulating isolation plate (3) and the lower electrode polarization plate (5) of the polarization assembly together.
7. A polarization jig for a piezo-electric composite film material according to claim 1, wherein: the fixture mounting table comprises an optical axis (8) and two horizontal supporting seats (9) fixedly mounted at two ends of the optical axis (8), slide bar through holes matched with the outer diameter of the optical axis (8) are formed in the bottom of the lower clamp plate body (13), the number of the slide bar through holes in the bottom of the lower clamp plate body (13) is the same as that of the optical axis (8), the optical axis (8) of the fixture mounting table is matched with the slide bar through holes in the bottom of the lower clamp plate body (13), and the electrode holder is mounted on the fixture mounting table.
8. A polarization jig for a piezo-electric composite film material according to claim 7, wherein: the fixture mounting table comprises at least two optical axes (8), two horizontal supporting seats (9) are fixedly mounted at two ends of each optical axis (8), at least two slide bar through holes are correspondingly formed in the bottom of the lower clamp plate body (13), and the at least two optical axes (8) of the fixture mounting table penetrate into the at least two slide bar through holes in the bottom of the lower clamp plate body (13) at intervals in parallel to realize stable mounting of the electrode holder on the fixture mounting table.
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CN212303635U (en) * 2020-07-30 2021-01-05 浙江工业大学 Polarization clamp for piezoelectric composite film material

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