CN111748785A - Film coating equipment and film coating method thereof - Google Patents

Film coating equipment and film coating method thereof Download PDF

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Publication number
CN111748785A
CN111748785A CN202010516228.1A CN202010516228A CN111748785A CN 111748785 A CN111748785 A CN 111748785A CN 202010516228 A CN202010516228 A CN 202010516228A CN 111748785 A CN111748785 A CN 111748785A
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China
Prior art keywords
workpiece
coated
shaft
coating
material receiving
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CN202010516228.1A
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Chinese (zh)
Inventor
宗坚
彭吉
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Jiangsu Favored Nanotechnology Co Ltd
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Jiangsu Favored Nanotechnology Co Ltd
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Application filed by Jiangsu Favored Nanotechnology Co Ltd filed Critical Jiangsu Favored Nanotechnology Co Ltd
Priority to CN202010516228.1A priority Critical patent/CN111748785A/en
Publication of CN111748785A publication Critical patent/CN111748785A/en
Priority to PCT/CN2021/097063 priority patent/WO2021249216A1/en
Priority to TW110120697A priority patent/TWI818269B/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

A coating apparatus and a coating method thereof, wherein the coating apparatus comprises: the film coating cavity is provided with a film coating cavity for accommodating the workpiece to be coated; the feeding support is arranged in the coating cavity and is used for supporting the workpiece to be coated; and the receiving rotating shaft is used for rolling the workpiece to be coated, which is supported on the feeding support, to be wound on the receiving rotating shaft, so that in the rolling process, the coating equipment can prepare a coating on the surface of the workpiece to be coated, which is exposed in the coating space. The coating equipment can coat the film on the workpiece to be coated, the length of which can exceed 3 meters, even reaches 350 meters or 800 meters and more, and the cutting is not needed.

Description

Film coating equipment and film coating method thereof
Technical Field
The invention relates to the field of film coating, and further relates to film coating equipment and a film coating method thereof.
Background
Coating equipment is generally used for preparing a coating or a film on the surface of a workpiece to be coated so as to enhance the physical or chemical properties of the surface of the workpiece to be coated.
The coating equipment is provided with a coating cavity for accommodating a workpiece to be coated, and the coating cavity needs to be continuously vacuumized in the coating process so as to reach the required vacuum degree and meet the coating requirement. The length, width and height of the coating cavity of the traditional coating equipment are basically not more than 3 meters, even not more than 1 meter, and the volume is limited. For the material with longer length of the workpiece to be coated, the material with the length longer than that of the coating cavity, such as the material with the length longer than 3 meters or even more than 15 meters, can not be contained in the coating cavity in an unfolding way for coating. The longer workpiece to be coated needs to be coated in the coating cavity section by section, and because the two ends of the segmented workpiece to be coated are continuous front and back, the vacuumizing of the coating cavity is influenced, namely, in the coating process, the coating cavity inevitably has an air leakage phenomenon, and the coating cavity cannot be guaranteed to reach the required vacuum degree.
In the conventional coating method, because the coating chamber needs to maintain a required vacuum degree during the coating process, the workpiece to be coated needs to be cut or tailored into a plurality of small sections of workpieces which are accommodated in the coating chamber in a matching manner, and then the workpiece can be spread and placed in the coating chamber for coating.
For example, the workpiece to be coated is a headphone sound transmission net for smart devices such as mobile phones, and the length of the workpiece to be coated can reach 300 meters. In the existing coating method, the earphone sound-transmitting net needs to be cut into small sections of earphone sound-transmitting nets with the length of 0.085 meter, so as to be respectively and adaptively placed into the coating cavity for coating one section by one section. However, for convenience of taking parts, a preset distance is required to be arranged between the adjacent small sections of the headphone sound transmission nets, and in order to coat the surface of each small section of the headphone sound transmission net, the small sections of the headphone sound transmission nets cannot be overlapped, so that the occupied area in the coating cavity is obviously large. In addition, in the coating process, the existing coating method needs to use auxiliary consumables such as release paper and double-sided adhesive tape to assist the sound-transmitting net of each small section of receiver to complete coating, and in fact, the auxiliary consumables do not need coating, but the surfaces of the auxiliary consumables are also coated with films, so that the waste of coating materials is caused, the process is complex, and the coating cost is increased.
In addition, in the existing coating method, a fixture is usually adopted to support the workpiece to be coated as a workpiece with a multi-layer structure so as to be adaptively accommodated in the coating chamber for coating. However, in order to meet the requirement that the surface of each layer of workpiece is coated with a film layer, the jig needs to support the workpieces of adjacent layers to keep a preset distance, and the permeation requirement required by the film coating is ensured. And limited by the volume of the coating cavity, the longer the length of the workpiece to be coated is, the more the number of layers of the workpiece in the multilayer structure supported and formed by the jig is, and the smaller the distance between the workpieces in adjacent layers is. Generally, the length of the workpiece to be coated cannot exceed 15 meters, and if the length of the workpiece to be coated is greater than 15 meters or too long, the distance between adjacent workpieces cannot reach the required distance, so that the film layer coated on the surface of the workpiece in the inner layer cannot reach the required thickness, and the process requirements cannot be met.
Disclosure of Invention
One advantage of the present invention is to provide a film coating apparatus and a film coating method thereof, wherein the film coating apparatus is capable of coating a film on a workpiece to be coated, wherein the length of the workpiece to be coated may exceed 3 meters, even reach 350 meters or 800 meters and more, and the like, and the workpiece to be coated can be completely accommodated in a film coating cavity of the film coating apparatus for coating, and cutting is not required, wherein a film layer with a required thickness can be coated on the surface of the workpiece to be coated, so as to meet the film coating requirement.
Another advantage of the present invention is to provide a coating apparatus and a coating method thereof, wherein the workpiece to be coated is accommodated in the coating chamber in a rolling manner, and during the coating process, the workpiece to be coated is coated in a rolling manner, so that the surface of the workpiece to be coated is coated with a film layer with a desired thickness.
Another advantage of the present invention is to provide a coating apparatus and a coating method thereof, wherein the coating apparatus can simultaneously coat the workpieces to be coated with different lengths so as to meet the coating requirements of different customers.
Another advantage of the present invention is to provide a coating apparatus and a coating method thereof, wherein the thickness of the coating layer coated on the surface of the workpiece to be coated is substantially the same, thereby realizing uniform coating and meeting the quality requirement of the terminal customer on the workpiece to be coated.
Another advantage of the present invention is to provide a coating apparatus and a coating method thereof, wherein the rolling speed of the workpiece to be coated can be controlled, so that the thickness of the coating layer coated on the surface of the workpiece to be coated can be controlled, and the coating requirement can be met.
Another advantage of the present invention is to provide a coating apparatus and a coating method thereof, which can prevent the workpiece to be coated from slipping or loosening during the rolling process.
Another advantage of the present invention is to provide a coating apparatus and a coating method thereof, wherein the motor is automatically stopped after the workpiece to be coated is rolled, so as to ensure the safety of the apparatus.
Another advantage of the present invention is to provide a coating apparatus and a coating method thereof, which can further improve coating uniformity.
Another advantage of the present invention is to provide a coating apparatus and a coating method thereof, which are easy to automate, simple and low-cost.
According to an aspect of the present invention, the present invention further provides a coating apparatus for preparing a film on a surface of a workpiece to be coated, the coating apparatus comprising:
the film coating cavity is provided with a film coating cavity for accommodating the workpiece to be coated;
the feeding support is arranged in the coating cavity and is used for supporting the workpiece to be coated; and
the collecting rotating shaft is used for rolling the workpiece to be coated, which is supported on the feeding support, to be wound on the collecting rotating shaft, so that in the rolling process, the coating equipment can prepare a coating on the surface of the workpiece to be coated, which is exposed in the coating space.
In an embodiment, the feeding support includes at least one feeding rotating shaft, wherein the feeding rotating shaft is rotatably disposed in the coating cavity, so that the workpiece to be coated is rolled on the feeding rotating shaft.
In one embodiment, the workpiece to be coated wound on the material receiving rotating shaft forms a material receiving column, and during the coating process, the diameter of the material receiving column is gradually increased, and the rotating speed of the material receiving rotating shaft is gradually reduced.
In an embodiment, the material receiving rotating shafts are two, and are respectively a first material receiving rotating shaft and a second material receiving rotating shaft, the material feeding rotating shaft is used for overlapping and rolling a first workpiece to be coated and a second workpiece to be coated, wherein a preset first coating space is provided between the first material receiving rotating shaft and the material feeding rotating shaft, a preset second coating space is provided between the second material receiving rotating shaft and the material feeding rotating shaft, the first material receiving rotating shaft is used for rolling the first workpiece to be coated to be wound on the first material receiving rotating shaft, and the second material receiving rotating shaft is used for rolling the second workpiece to be coated to be wound on the second material receiving rotating shaft.
In an embodiment, the receiving shafts are two, which are respectively a first receiving shaft and a second receiving shaft, and the two receiving shafts are respectively a first receiving shaft for winding a first workpiece to be coated and a second receiving shaft for winding a second workpiece to be coated, wherein a predetermined first coating space is provided between the first receiving shaft and the first receiving shaft, and a predetermined second coating space is provided between the second receiving shaft and the second receiving shaft, wherein the first receiving shaft is used for rolling the first workpiece to be coated to be wound around the first receiving shaft, and the second receiving shaft is used for rolling the second workpiece to be coated to be wound around the second receiving shaft.
In one embodiment, the length of the first workpiece to be coated is shorter than that of the second workpiece to be coated.
In an embodiment, the first material receiving rotating shaft is adjacent to the second material loading rotating shaft, and a first predetermined distance is provided between the first material receiving rotating shaft and the second material loading rotating shaft, wherein the second material receiving rotating shaft is adjacent to the first material loading rotating shaft, and a second predetermined distance is provided between the second material receiving rotating shaft and the first material loading rotating shaft.
In an embodiment, the feeding device further comprises at least one damping device, wherein the damping device is mounted on the feeding rotating shaft.
In an embodiment, the collecting device further comprises at least one driving motor, wherein the driving motor is arranged at a position for driving the collecting rotating shaft to rotate.
In an embodiment, the winding device further includes at least one detection circuit, wherein the detection circuit is electrically connected to the driving motor, when the workpiece to be coated is wound around the receiving rotating shaft to the end in a rolling manner, the end of the workpiece to be coated prevents the receiving rotating shaft from continuing to rotate between the loading bracket and the receiving rotating shaft, the driving motor is subjected to resistance to generate overload, and the detection circuit is configured to stop the driving motor when the driving motor generates overload.
In an embodiment, the winding device further includes at least one resistance sensor, the resistance sensor is disposed at a position for detecting a resistance received by the material receiving rotating shaft, wherein the resistance sensor is electrically connected to the driving motor, when the workpiece to be coated is wound to the end of the material receiving rotating shaft in a rolling manner, the end of the workpiece to be coated prevents the material receiving rotating shaft from continuing to rotate between the material loading bracket and the material receiving rotating shaft, and the resistance sensor is configured to detect that the resistance received by the material receiving rotating shaft is greater than a preset threshold value, and stop the driving motor.
In one embodiment, the coating device further comprises a rotating bracket, wherein the rotating bracket is rotatably arranged in the coating cavity, the feeding bracket and the receiving rotating shaft are mounted on the rotating bracket, and the rotating bracket is used for synchronously driving the feeding bracket and the receiving rotating shaft to rotate in the coating cavity.
In one embodiment, the rotating frame comprises a rotating shaft and at least one bottom supporting member, wherein the rotating shaft is rotatably disposed in the coating chamber, wherein the bottom supporting member is disposed at a bottom end of the rotating shaft and rotates along with the rotating shaft, and wherein the feeding frame and the receiving shaft are mounted on the bottom supporting member and rotate along with the bottom supporting member in the coating chamber.
In an embodiment, the rotating frame further includes a top supporting member, wherein the top supporting member is disposed at the top end of the rotating shaft, and an accommodating space is defined between the top supporting member and the bottom supporting member for accommodating the workpiece to be coated.
In one embodiment, the rotating frame further comprises at least two workpiece supporting members, wherein each workpiece supporting member is disposed on the loading frame and the receiving shaft, respectively, and is close to the bottom supporting member for supporting the workpiece to be coated.
In one embodiment, the coating device further comprises an electrode device, wherein the electrode device is arranged at the position of discharging in the coating cavity.
In one embodiment, the electrode device has at least one electrode element, wherein the electrode element is mounted to the rotating support.
According to another aspect of the present invention, the present invention further provides a coating method comprising:
A. rolling a workpiece to be coated, which is supported on a feeding support, in a coating cavity on a receiving rotating shaft, wherein a preset coating space is formed between the receiving rotating shaft and the feeding support; and
B. and in the rolling process, preparing a film on the surface of the workpiece to be coated, which is exposed to the coating space.
In one embodiment, in the coating method, the feeding support includes at least one feeding rotating shaft, wherein the feeding rotating shaft is rotatably disposed in the coating chamber, so that the workpiece to be coated is rolled on the feeding rotating shaft.
In an embodiment, in the step a, the material receiving rotating shaft is used as a driving wheel, the material feeding rotating shaft is used as a driven wheel, and the material receiving rotating shaft is rotated to roll the workpiece to be coated to be wound on the material receiving rotating shaft and drive the material feeding rotating shaft to rotate.
In one embodiment, in the coating method, as the diameter of a material receiving column formed by the workpiece to be coated wound on the material receiving rotating shaft is gradually increased, the rotating speed of the material receiving rotating shaft is gradually reduced.
In one embodiment, in the coating method, the workpiece to be coated is kept in a tensile state by a damping device.
In one embodiment, in the coating method, when the workpiece to be coated is rolled around the material receiving rotating shaft to the end, the material receiving rotating shaft stops rotating.
In one embodiment, in the coating method, the receiving rotating shaft stops rotating when the resistance applied to the receiving rotating shaft is detected to be greater than a preset threshold value.
In one embodiment, in the coating method, the receiving shaft is stopped by detecting that a driving motor driving the receiving shaft is overloaded.
In an embodiment, in the coating method, the loading support and the receiving spindle are synchronously driven to rotate in the coating cavity.
Further objects and advantages of the invention will be fully apparent from the ensuing description and drawings.
These and other objects, features and advantages of the present invention will become more fully apparent from the following detailed description, the accompanying drawings and the claims.
Drawings
FIG. 1 is a schematic plan view of a coating apparatus according to a preferred embodiment of the present invention.
Fig. 2A is a schematic plan view of a first modified example of the plating device according to the above preferred embodiment of the invention before plating.
Fig. 2B is a schematic plan view of a first modified example of the plating device according to the above preferred embodiment of the present invention during plating.
Fig. 2C is a schematic plan view of a first modified example of the plating apparatus according to the above preferred embodiment of the invention at the end of plating.
Fig. 3A is a schematic plan view of a second modified example of the plating device according to the above preferred embodiment of the invention before plating.
Fig. 3B is a schematic plan view of a second modified example of the plating device according to the above preferred embodiment of the present invention during plating.
Fig. 3C is a schematic plan view of a second modified example of the plating device according to the above preferred embodiment of the invention at the end of plating.
Fig. 4 is a schematic structural view of the rotating frame of the coating apparatus according to the above preferred embodiment of the present invention.
Fig. 5 is a schematic perspective view of the rotating stand of the coating apparatus according to the above preferred embodiment of the present invention.
Fig. 6 is a partial perspective view illustrating the rotary frame of the coating apparatus according to the above preferred embodiment of the present invention.
Fig. 7 is a schematic top view of the rotating frame of the coating apparatus according to the above preferred embodiment of the present invention.
Fig. 8A is a schematic plan view of a fourth modified example of the plating device according to the above preferred embodiment of the invention before plating.
Fig. 8B is a schematic plan view of a fourth modified example of the plating device according to the above preferred embodiment of the invention during plating.
Fig. 8C is a schematic plan view of a fourth modified example of the plating device according to the above preferred embodiment of the invention at the end of plating.
Fig. 9A is a schematic plan view of a fifth modified example of the plating device according to the above preferred embodiment of the invention before plating.
Fig. 9B is a schematic plan view of a fifth modified example of the plating device according to the above preferred embodiment of the present invention during plating.
Fig. 9C is a schematic plan view of a fifth modified example of the plating device according to the above preferred embodiment of the invention at the end of plating.
Fig. 10 is a block diagram of the driving motor of the plating device according to the above preferred embodiment of the present invention.
FIG. 11 is a block diagram showing the structure of the electrode assembly of the plating device according to the above preferred embodiment of the present invention.
Detailed Description
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
It will be understood by those skilled in the art that in the present disclosure, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced devices or components must be in a particular orientation, constructed and operated in a particular orientation, and thus the above terms are not to be construed as limiting the present invention.
It is understood that the terms "a" and "an" should be interpreted as meaning that a number of one element or element is one in one embodiment, while a number of other elements is one in another embodiment, and the terms "a" and "an" should not be interpreted as limiting the number.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Fig. 1 is a schematic view of a coating apparatus according to a preferred embodiment of the present application. The coating equipment can coat a film on a workpiece 600 to be coated, wherein the length of the workpiece to be coated can exceed 3 meters, even reach 350 meters or 800 meters and the like, and even be longer, the workpiece to be coated can be completely contained in a coating cavity 101 of the coating equipment for coating, and cutting is not needed, wherein a film layer with required thickness can be coated on the surface of the workpiece 600 to be coated, and the coating requirement is met.
As shown in fig. 1, the coating apparatus includes a coating chamber 10, at least one loading support 201, and at least one receiving shaft 30, wherein the coating chamber 10 has the coating chamber 101, the loading support 201 is disposed in the coating chamber 101 for supporting a workpiece 600 to be coated, the receiving shaft 30 is rotatably disposed in the coating chamber 101, a predetermined coating space 102 is provided between the receiving shaft 30 and the loading support 201, the receiving shaft 30 is used for rolling the workpiece 600 to be coated supported by the loading support 201 to wind around the receiving shaft 30, so that the coating apparatus can prepare a coating layer on the surface of the workpiece 600 to be coated exposed to the coating space 102 during rolling.
For example, the workpiece 600 to be coated may be a roll material, which is a flexible material, and may be wound around the receiving shaft 30, wherein the workpiece 600 to be coated is connected between the receiving shaft 30 and the loading bracket 201, wherein the length of the workpiece 600 to be coated is greater than the distance between the receiving shaft 30 and the loading bracket 201, and a portion of the workpiece 600 to be coated between the receiving shaft 30 and the loading bracket 201 is exposed to the coating space 102. Or, two ends of the workpiece 600 to be coated may be respectively and windingly disposed on the material receiving rotating shaft 30 and the material loading bracket 201. For example, the workpiece 600 to be coated is a flexible material such as a speaker phone sound-transmitting net or a non-woven fabric used in smart devices such as a mobile phone, and the workpiece 600 to be coated can be integrally mounted on the feeding support 201 without being cut into small sections. After the film coating is finished, the workpiece 600 to be coated still keeps a complete state, and a film layer with the required thickness can be prepared on the whole surface, so that the material does not need to be replaced in the film coating process, the human intervention is reduced, the equipment utilization rate is high, the large-scale industrial film coating can be realized, and the cost is favorably reduced.
For example, the coating chamber 10 may have a cylindrical structure with a diameter of 1 meter and a height of 0.9 meter, and the coating chamber 101 of the coating chamber 10 is suitable for being filled with reaction raw materials required for coating, or plasma source gas, etc., wherein the coating chamber 101 may be continuously evacuated by an air extractor to achieve a vacuum degree required for coating. The film layer may be a nano film, or a waterproof film layer, etc., and is not limited herein.
Preferably, the feeding support 201 includes at least one feeding rotating shaft 20, that is, the feeding rotating shaft 20 is a rotating shaft structure, wherein the feeding rotating shaft 20 is rotatably disposed in the coating cavity 101, so that the workpiece to be coated is rolled on the feeding rotating shaft 20. That is, before coating, the workpiece 600 to be coated may be wound around the loading spindle 20, the loading spindle 20 is in a full-roll state, and the receiving spindle 30 is in an empty-roll state, that is, the rest of the workpiece 600 to be coated is wound around the loading spindle 20 except for the part of the workpiece 600 to be coated connected between the loading spindle 20 and the receiving spindle 30. In the coating process, the receiving rotating shaft 30 gradually rolls the workpiece to be coated to wind around the receiving rotating shaft 30, wherein the workpiece 600 to be coated wound around the feeding rotating shaft 20 gradually leaves from the feeding rotating shaft 20 until the feeding rotating shaft 20 is in an empty winding state, and the receiving rotating shaft 30 is in a full winding state, that is, the rest of the workpiece 600 to be coated is completely wound around the receiving rotating shaft 30 except for the part of the workpiece 600 to be coated connected between the feeding rotating shaft 20 and the receiving rotating shaft 30. In other words, during the coating process, the workpieces 600 to be coated wound around the feeding spindle 20 are gradually decreased, wherein the decreased workpieces 600 to be coated are wound around the receiving spindle 30, i.e., the workpieces 600 to be coated wound around the receiving spindle 30 are gradually increased.
It should be understood that the loading frame 201 is not a rotating shaft structure, and the workpiece 600 to be coated is a coil material and is supported by the loading frame 201, wherein the receiving rotating shaft 30 can drive the workpiece 600 to be coated to rotate on the loading frame 201 to coil the workpiece 600 to be coated.
In the coating process, the material receiving rotating shaft 30 serves as a driving wheel, the material feeding rotating shaft 20 serves as a driven wheel, the material receiving rotating shaft 30 drives the material feeding rotating shaft 20 by rolling the workpiece 600 to be coated, wherein the workpiece to be coated, which is rolled on the material receiving rotating shaft 20, is gradually wound on the material receiving rotating shaft 30. The workpiece 600 to be coated between the receiving rotating shaft 30 and the feeding rotating shaft 20 is exposed to the coating space 102, so as to prepare a film layer on the surface of the exposed part of the workpiece 600 to be coated, and along with the rotation of the receiving rotating shaft 30, all the surfaces of the workpiece 600 to be coated are sequentially exposed to the coating space 102, so that after the coating is finished, all the surfaces of the workpiece 600 to be coated are prepared with the film layer.
Further, the workpiece 600 to be coated, which is rolled on the feeding rotating shaft 20, forms a feeding column 601, and the workpiece 600 to be coated, which is rolled on the receiving rotating shaft 30, forms a receiving column 602. Before coating, the diameter of the feeding column 601 is the largest, and the diameter of the receiving column 602 is the smallest, preferably zero, that is, the empty roll state. In the coating process, along with the rotation of the material receiving rotating shaft 30, the workpiece 600 to be coated is gradually wound on the material receiving rotating shaft 30, the diameter of the material loading column 601 is gradually reduced, and the diameter of the material receiving column 602 is gradually increased. After the coating is finished, the diameter of the feeding column 601 is the smallest, preferably zero, that is, in an empty rolling state, and the diameter of the receiving column 602 is the largest.
As shown in fig. 10, preferably, the coating device further includes at least one driving motor 40, wherein the driving motor 40 is disposed at a position for driving the material receiving rotating shaft 30 to rotate, and the driving motor 40 is used for driving the material receiving rotating shaft 30 to rotate. The number of the material receiving rotating shafts 30 may be multiple, and the material receiving rotating shafts respectively roll a plurality of workpieces 600 to be coated, which have different lengths. The driving motor 40 can control the rotation speed of the receiving rotating shaft 30.
Further, in the coating process, the rotation speed of the receiving rotating shaft 30 driven by the driving motor 40 is gradually reduced, that is, the diameter of the receiving column 60 is gradually increased, and the rotation speed of the receiving rotating shaft 30 is gradually reduced, so as to ensure that the linear speeds of the workpieces 600 to be coated exposed in the coating space 102 are basically consistent, and the time of the workpieces 600 to be coated exposed in the coating space 102 is basically consistent, which is beneficial to ensuring that the thicknesses of the films coated on the surfaces of the workpieces 600 to be coated are basically consistent, thereby realizing coating uniformity and meeting the quality requirements of the end customers on the workpieces to be coated.
In this embodiment, the driving motor 40 adopts a multiphase frequency conversion technology to gradually reduce the rotation speed of the material receiving rotating shaft 30. It can be understood that the rotation speed of the receiving rotating shaft 30 driven by the driving motor 40 can be gradually reduced according to time.
It should be noted that the driving motor 40 can control the rotation speed of the material receiving rotating shaft 30, so that the rolling speed of the workpiece 600 to be coated can be regulated, the thickness of the film layer coated on the surface of the workpiece 600 to be coated can be regulated, and the coating requirement can be met.
Further, the coating equipment further comprises a damping device 50, wherein the damping device 50 is installed on the feeding rotating shaft 20, and the damping device 50 is used for enabling the workpiece 600 to be coated to be in a stretching state all the time in a rolling process, so that the workpiece 600 to be coated is prevented from loosening and even wrinkling, and the coating uniformity is facilitated.
In other words, during the coating process, the rotation speed of the receiving shaft 30 is relatively fast at the beginning, which may cause the feeding shaft 20 to slip, and thus the workpiece 600 to be coated wound around the feeding shaft 20 may loosen or even wrinkle. In order to avoid the phenomenon, the damping device 50 can prevent the feeding rotating shaft 20 from slipping, so that the workpiece 600 to be coated between the feeding rotating shaft 20 and the receiving rotating shaft 30 is always kept in a stretching state, and the tightness between the outer workpiece 600 to be coated and the inner workpiece 600 to be coated can be kept close or consistent, which is beneficial to coating.
In the first modified embodiment of the preferred embodiment, as shown in fig. 2A, 2B and 2C, there are two receiving shafts 30, which are the first receiving shaft 31 and the second receiving shaft 32, respectively, and there are two workpieces to be coated 600, which are the first workpiece to be coated 610 and the second workpiece to be coated 620 with different lengths, respectively. The feeding rotating shaft 20 is configured to superposedly wind a first workpiece 610 to be coated and a second workpiece 620 to be coated, wherein a preset first coating space 111 is provided between the first receiving rotating shaft 31 and the feeding rotating shaft 20, a preset second coating space 112 is provided between the second receiving rotating shaft 32 and the feeding rotating shaft 20, wherein the first receiving rotating shaft 31 is configured to roll the first workpiece 610 to be coated around the first receiving rotating shaft 31, and the second receiving rotating shaft 32 is configured to roll the second workpiece 620 to be coated around the second receiving rotating shaft 32.
That is, in the first modified embodiment, a plurality of workpieces to be coated may be rolled on the same loading spindle 20 and rolled on different receiving spindles 30. In order to avoid interference between adjacent workpieces 600 to be coated, a certain avoiding space is formed between the receiving rotating shafts 30. Because the two workpieces 600 to be coated are overlapped and rolled on the feeding rotating shaft 20, the first receiving rotating shaft 31 and the second receiving rotating shaft 32 should rotate synchronously to keep the two workpieces to be coated in a stretching state, which is beneficial to realizing coating uniformity. It will be understood by those skilled in the art that the number of the receiving shafts 30 in the first modified embodiment is only two, and the number of the receiving shafts 30 in other modified embodiments may be more, and is not limited herein.
In a second variant of the preferred embodiment, as shown in figures 3A, 3B and 3C, the receiving shafts 30 are two, which are respectively a first receiving shaft 31 and a second receiving shaft 32, the two feeding rotating shafts 20 are respectively a first feeding rotating shaft 21 for rolling a first workpiece to be coated 610 and a second feeding rotating shaft 22 for rolling a second workpiece to be coated 620, wherein a first coating space 111 is provided between the first material receiving spindle 31 and the first material loading spindle 21, wherein a second coating space 112 is provided between the second receiving spindle 32 and the second loading spindle 22, wherein the first material receiving rotating shaft 31 is used for rolling the first workpiece to be coated 610 to wind around the first material receiving rotating shaft 31, the second material receiving rotating shaft 32 is used for rolling the second workpiece 620 to be coated to wind around the second material receiving rotating shaft 32.
In the second modified embodiment, the length of the first workpiece to be coated 610 is shorter than the length of the second workpiece to be coated 620, and the coating apparatus can simultaneously coat the first workpiece to be coated 610 and the second workpiece to be coated 620 with different lengths, so as to meet the coating requirements of different customers. In order to avoid interference between adjacent workpieces 600 to be coated, a certain avoiding space is provided between the receiving rotating shafts 30, and a certain avoiding space is also provided between the feeding rotating shafts 20. Those skilled in the art will appreciate that, in the second modified embodiment, the number of the feeding rotating shafts 20 and the receiving rotating shafts 30 is two only for example, and in other modified embodiments, the number of the feeding rotating shafts 20 and the receiving rotating shafts 30 may be more, and is not limited herein.
Further, the number of the driving motors 40 corresponds to the number of the receiving rotating shafts 30, and each driving motor 40 independently drives the corresponding receiving rotating shaft 30 to rotate, so that each receiving rotating shaft 30 independently rotates. That is, the receiving shafts 30 do not interfere with each other, and the feeding shafts 20 do not interfere with each other. Furthermore, different driving motors 40 can control different receiving rotating shafts 30 to have different rotating speeds, that is, the rotating speed of the first receiving rotating shaft 31 is different from the rotating speed of the second receiving rotating shaft 32, so as to respectively coat the workpieces 600 to be coated with different lengths, thereby meeting the requirements of customers.
Specifically, the first workpiece to be coated 610 wound around the first feeding rotating shaft 21 forms a first feeding column 6011, and the first workpiece to be coated 610 wound around the first receiving rotating shaft 31 forms a first receiving column 6021. The second workpiece 620 to be coated wound around the second feeding rotating shaft 22 forms a second feeding column 6012, wherein the second workpiece 620 to be coated wound around the second receiving rotating shaft 32 forms a second receiving column 6022.
It should be mentioned that the second material receiving rotating shaft 32 is adjacent to the first material loading rotating shaft 21, that is, the first material loading column 6011 is located between the first material loading rotating shaft 21 and the second material receiving rotating shaft 32, and a first preset distance D1 is provided between the second material receiving rotating shaft 32 and the first material loading rotating shaft 21. The first material receiving rotating shaft 31 is adjacent to the second material feeding rotating shaft 22, that is, the second material feeding column 6012 is located between the second material feeding rotating shaft 22 and the first material receiving rotating shaft 31, and a second preset distance D2 is formed between the first material receiving rotating shaft 31 and the second material feeding rotating shaft 22. It can be understood that, by such an arrangement, the coating device provides an avoidance space for the adjacent workpiece 600 to be coated, and at the same time, the space utilization rate is improved.
More specifically, before coating, the first feeding rotating shaft 21 and the second feeding rotating shaft 22 are in a full-roll state, the first receiving rotating shaft 31 and the second receiving rotating shaft 32 are in an empty-roll state, the first preset distance D1 is slightly larger than the radius R1 of the first feeding column 6011, and the second preset distance D2 is slightly larger than the radius R2 of the second feeding column 6012. After the coating is finished, the first feeding rotating shaft 21 and the second feeding rotating shaft 22 are both in an empty winding state, the first receiving rotating shaft 31 and the second receiving rotating shaft 32 are both in a full winding state, the radius R1 of the first receiving column 6021 is equal to the radius R1 of the first feeding column 6011 and is slightly smaller than the second preset distance D2, and the radius R2 of the second receiving column 6022 is equal to the radius R2 of the second feeding column 6012 and is slightly smaller than the first preset distance D1. In other words, a minimum value of the first and second preset spacings D1 and D2 is slightly larger than a maximum value of the radii R1 and R2.
In the preferred embodiment, the coating apparatus further includes at least one detection circuit 60, wherein the detection circuit 60 is electrically connected to the driving motor 40, when the workpiece 600 to be coated is rolled around the receiving shaft 30 to the end 603, the end 603 of the workpiece 600 to be coated prevents the receiving shaft 30 from rotating further between the loading rack 201 and the receiving shaft 30, the driving motor 40 is subjected to resistance to generate overload, and the detection circuit 60 is configured to stop the driving motor 40 when the driving motor 40 generates overload.
Further, the detection circuit 60 may be configured to detect a current of the driving motor 40, when the driving motor 40 cannot rotate the material receiving rotating shaft 30, the current of the driving motor 40 may be overloaded, and if the detection circuit 60 detects that the current of the driving motor 40 exceeds a preset threshold, the driving motor 40 stops rotating. Of course, the detection circuit 60 may also be used to detect whether the voltage of the driving motor 40 is overloaded, and if the voltage is overloaded, the driving motor 40 is stopped, so as to ensure safety.
In other words, at the beginning of coating, the head end 604 of the workpiece 600 to be coated is connected between the feeding spindle 20 and the receiving spindle 30, i.e. the head end 604 of the workpiece 600 to be coated is exposed to the coating space 102. With the rotation of the material receiving rotating shaft 30, the workpiece 600 to be coated is gradually wound around the material receiving rotating shaft 30 until the end 603 of the workpiece 600 to be coated is exposed to the coating space 102, that is, the end 603 of the workpiece 600 to be coated is connected between the material feeding rotating shaft 20 and the material receiving rotating shaft 30, the end 603 will prevent the material receiving rotating shaft 30 from continuing to rotate, the driving motor 40 is overloaded due to resistance, and at this time, the detection circuit 60 detects that the driving motor 49 is overloaded, and stops the driving motor 40 from rotating, so as to stop rotating the material receiving rotating shaft 30.
It is understood that the head end 604 of the workpiece 600 to be coated may be adhered to the receiving shaft 30 by using an adhesive tape, glue or solid glue, and the tail end 603 of the workpiece 600 to be coated may also be adhered to the feeding shaft 20 by using an adhesive tape, glue or solid glue. Of course, the connection mode between the workpiece 600 to be coated and the feeding rotating shaft 20 and the receiving rotating shaft 30 can be clamping connection, nailing connection, detachable connection, and the like, and is not limited herein.
Optionally, in a third modified embodiment of the preferred embodiment, the coating apparatus further includes at least one resistance sensor 70, the resistance sensor 70 is disposed at a position for detecting the resistance applied to the material receiving rotating shaft 30, wherein the resistance sensor 70 is electrically connected to the driving motor 40, when the workpiece 600 to be coated is rolled around the material receiving rotating shaft 30 to the end 603, the end 603 of the workpiece 600 to be coated prevents the material receiving rotating shaft 30 from rotating further between the loading bracket 201 and the material receiving rotating shaft 30, and the resistance sensor 70 is configured to detect that the resistance applied to the material receiving rotating shaft 30 is greater than a preset threshold value, and stop the driving motor 40 to ensure safety.
When the coating equipment coats a plurality of workpieces 600 to be coated with different lengths, the workpieces 600 to be coated with different lengths may be rolled up inconsistently, and when one of the workpieces 600 to be coated is rolled around the receiving rotating shaft 30 to the tail end 603, the corresponding driving motor 40 and the corresponding receiving rotating shaft 30 stop rotating, and the other receiving rotating shafts 30 are not influenced to continue to roll up the corresponding workpieces 600 to be coated. When all the workpieces 600 to be coated are rolled to the tail end 603, all the driving motors 40 and the receiving rotating shafts 30 stop rotating, and coating is finished. After the coating is finished, the coating equipment can release the pressure in the coating cavity 101, exhaust the air, and then open the hatch door of the coating cavity 10, so that the workpiece 600 to be coated in the coating cavity 101 can be taken out conveniently.
In the preferred embodiment, as shown in fig. 4, the coating apparatus further includes a rotating frame 80, wherein the rotating frame 80 is rotatably disposed in the coating chamber 101, wherein the feeding frame 201 and the receiving shaft 30 are mounted on the rotating frame 80, wherein the rotating frame 80 is configured to synchronously drive the feeding frame 201 and the receiving shaft 30 to rotate in the coating chamber 101, so as to drive the workpiece 600 to be coated to rotate in the coating chamber 101, thereby further improving the coating uniformity.
Further, as shown in fig. 5, 6 and 7, the rotating bracket 80 includes a rotating shaft 81 and at least one bottom supporting member 82, wherein the rotating shaft 81 is rotatably disposed in the coating chamber 101, wherein the bottom supporting member 82 is disposed at the bottom end of the rotating shaft 81 and rotates with the rotating shaft 81, and wherein the feeding bracket 201 and the receiving rotating shaft 30 are mounted on the bottom supporting member 82 and rotate with the bottom supporting member 82 in the coating chamber 101.
Further, the rotating frame 80 includes a top support member 83, wherein the top support member 83 is disposed at the top end of the rotating shaft 81, and an accommodating space 801 is defined between the top support member 83 and the bottom support member 82 for accommodating the workpiece 600 to be coated. That is, the loading spindle 20 and the receiving spindle 30 are disposed between the top support 83 and the bottom support 82 and rotate in the accommodating space 801, wherein the workpiece 600 to be coated is wound around the loading spindle 20 or the receiving spindle 30.
It can be understood that the bottom support 82 and the top support 83 are disc-shaped structures, wherein the rotating shaft 81 is rotatably connected to the center positions of the bottom support 82 and the top support 83, so that the rotating frame 80 rotates symmetrically in the coating chamber 101, thereby improving space utilization.
Of course, it is understood by those skilled in the art that the rotating bracket 80 may be replaced with a fixed bracket that does not rotate within the coating chamber 101, and is not limited thereto.
The rotating rack 80 further comprises at least two workpiece supporting members 84, wherein each of the workpiece supporting members 84 is disposed on the loading rack 201 and the receiving spindle 30, respectively, and the workpiece supporting members 84 are disposed near the bottom supporting member 82 for supporting the workpiece 600 to be coated. In other words, the workpiece support 84 is between the bottom support 82 and the workpiece 600 to be coated and supports the workpiece 600 to be coated, and the workpiece support 84 may have a disc-shaped structure with a size smaller than that of the bottom support 82. Further, the workpiece support 84 has a size slightly larger than that of the workpiece 600 to be coated in a full roll to provide stable support.
In the preferred embodiment, as shown in fig. 11, the coating apparatus further includes an electrode device 90, wherein the electrode device 90 is disposed at a position where the discharge occurs in the coating chamber 101 to provide a voltage required for coating, so as to facilitate formation of a plasma environment in the coating chamber 101 and discharge reaction raw materials for preparing a coating on the surface of the workpiece 600 to be coated.
Further, the electrode device 90 has at least one electrode member 91, wherein the electrode member 91 is mounted to the rotating frame 80 to rotationally discharge in the coating chamber 101. The electrode element 91 can be connected to the negative electrode of the rf power source for providing rf voltage in the coating chamber 101. The positive electrode of the radio frequency power supply can be grounded, or connected to the coating cavity 10 and grounded, so that the whole coating cavity 10 is the positive electrode, and the method is not limited herein.
In a fourth modified embodiment of the preferred embodiment, as shown in fig. 8A, 8B and 8C, the coating apparatus includes three receiving rotating shafts 30A, 30B and 30C and three feeding rotating shafts 20A, 20B and 20C, wherein three workpieces 600A, 600B and 600C to be coated are respectively rolled between the three receiving rotating shafts 30A, 30B and 30C and the three feeding rotating shafts 20A, 20B and 20C. Specifically, the workpiece 600A to be coated is rolled between the receiving rotating shaft 30A and the feeding rotating shaft 20A, and a predetermined coating space 102A is provided between the receiving rotating shaft 30A and the feeding rotating shaft 20A, so as to coat the surface of the workpiece 600A to be coated exposed in the coating space 102A. The workpiece 600B to be coated is rolled between the receiving rotating shaft 30B and the feeding rotating shaft 20B, and a preset coating space 102B is formed between the receiving rotating shaft 30B and the feeding rotating shaft 20B, so as to coat the surface of the workpiece 600B to be coated exposed in the coating space 102B. The workpiece 600C to be coated is rolled between the receiving rotating shaft 30C and the feeding rotating shaft 20C, and a preset coating space 102C is formed between the receiving rotating shaft 30C and the feeding rotating shaft 20C, so as to coat the surface of the workpiece 600C to be coated exposed in the coating space 102C.
In the fourth modified embodiment, the lengths of the workpieces 600A, 600B, and 600C to be coated are not equal, and the coating apparatus can simultaneously coat the workpieces 600A, 600B, and 600C to be coated with different lengths, so as to meet the coating requirements of different customers. In order to avoid interference among the adjacent workpieces 600A, 600B and 600C to be coated, a certain avoidance space is arranged among the receiving rotating shafts 30A, 30B and 30C, and a certain avoidance space is also arranged among the feeding rotating shafts 20A, 20B and 20C.
In a fifth modified embodiment of the preferred embodiment, as shown in fig. 9A, 9B and 9C, the film plating apparatus includes four receiving rotating shafts 30A, 30B, 30C and 30D and four feeding rotating shafts 20A, 20B, 20C and 20D, wherein the four workpieces 600A, 600B, 600C and 600D to be plated are respectively rolled between the four receiving rotating shafts 30A, 30B, 30C and 30D and the four feeding rotating shafts 20A, 20B, 20C and 20D. Specifically, the workpiece 600A to be coated is rolled between the receiving rotating shaft 30A and the feeding rotating shaft 20A, and a predetermined coating space 102A is provided between the receiving rotating shaft 30A and the feeding rotating shaft 20A, so as to coat the surface of the workpiece 600A to be coated exposed in the coating space 102A. The workpiece 600B to be coated is rolled between the receiving rotating shaft 30B and the feeding rotating shaft 20B, and a preset coating space 102B is formed between the receiving rotating shaft 30B and the feeding rotating shaft 20B, so as to coat the surface of the workpiece 600B to be coated exposed in the coating space 102B. The workpiece 600C to be coated is rolled between the receiving rotating shaft 30C and the feeding rotating shaft 20C, and a preset coating space 102C is formed between the receiving rotating shaft 30C and the feeding rotating shaft 20C, so as to coat the surface of the workpiece 600C to be coated exposed in the coating space 102C. The workpiece 600D to be coated is rolled between the receiving rotating shaft 30D and the feeding rotating shaft 20D, and a preset coating space 102D is formed between the receiving rotating shaft 30D and the feeding rotating shaft 20D, so as to coat the surface of the workpiece 600D to be coated exposed in the coating space 102D.
In the fifth modified embodiment, the lengths of the workpieces 600A, 600B, 600C, and 600D to be coated are not equal, and the coating apparatus can simultaneously coat the workpieces 600A, 600B, 600C, and 600D to be coated with different lengths, so as to meet the coating requirements of different customers. In order to avoid interference between the adjacent workpieces 600A, 600B, 600C, 600D to be coated, a certain avoidance space is provided between the receiving rotating shafts 30A, 30B, 30C, 30D, and a certain avoidance space is also provided between the feeding rotating shafts 20A, 20B, 20C, 20D.
Further, the preferred embodiment further provides a coating method of the coating apparatus, including:
s10, rolling the workpiece 600 to be coated, which is supported by the loading support 201, in the coating cavity 101 on the receiving rotating shaft 30, wherein a predetermined coating space 102 is provided between the receiving rotating shaft 30 and the loading support 201; and
and S20, preparing a film layer on the surface of the workpiece 600 to be coated exposed to the coating space 102 in the rolling process.
In an optional embodiment, in the coating method, the feeding support 201 includes at least one feeding rotating shaft 20, which is rotatably disposed in the coating chamber 101, so that the workpiece 600 to be coated is rolled on the feeding rotating shaft 20.
In an optional embodiment, in the coating method, the material receiving rotating shaft 30 serves as a driving wheel, the material loading rotating shaft 20 serves as a driven wheel, the material receiving rotating shaft 30 is rotated to roll the workpiece 600 to be coated to wind around the material receiving rotating shaft 30, and the material loading rotating shaft 20 is driven to rotate.
In an alternative embodiment, in the coating method, as the diameter of the material receiving column 602 formed by the workpiece 600 to be coated wound on the material receiving spindle 30 gradually increases, the rotation speed of the material receiving spindle 30 gradually decreases.
In an alternative embodiment, in the coating method, the workpiece 600 to be coated is kept in a stretched state by the damping device 50.
In an optional embodiment, in the coating method, when the workpiece 600 to be coated is rolled around the receiving spindle 30 to the end, the receiving spindle 30 stops rotating.
In an optional embodiment, in the coating method, the receiving shaft 30 stops rotating when the resistance applied to the receiving shaft 30 is detected to be greater than a predetermined threshold.
In an alternative embodiment, in the coating method, the receiving shaft 30 is stopped by detecting the overload of the driving motor 40 driving the receiving shaft 30.
In an optional embodiment, in the coating method, the method further includes synchronously driving the loading support 201 and the receiving rotating shaft 30 to rotate in the coating cavity 101.
It will be appreciated by persons skilled in the art that the embodiments of the invention described above and shown in the drawings are given by way of example only and are not limiting of the invention. The objects of the invention have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the examples, and any variations or modifications of the embodiments of the present invention may be made without departing from the principles.

Claims (26)

1. The coating equipment is used for preparing a film on the surface of a workpiece to be coated, and is characterized by comprising the following components:
the film coating cavity is provided with a film coating cavity for accommodating the workpiece to be coated;
the feeding support is arranged in the coating cavity and is used for supporting the workpiece to be coated; and
the collecting rotating shaft is used for rolling the workpiece to be coated, which is supported on the feeding support, to be wound on the collecting rotating shaft, so that in the rolling process, the coating equipment can prepare a coating on the surface of the workpiece to be coated, which is exposed in the coating space.
2. The plating device according to claim 1, wherein the loading support comprises at least one loading rotating shaft, wherein the loading rotating shaft is rotatably arranged in the plating chamber, so that the workpiece to be plated is rolled on the loading rotating shaft.
3. The coating apparatus according to claim 2, wherein the workpiece to be coated wound around the material receiving shaft forms a material receiving column, and the diameter of the material receiving column gradually increases and the rotation speed of the material receiving shaft gradually decreases during the coating process.
4. The coating apparatus according to claim 2, wherein the material receiving shafts are two, namely a first material receiving shaft and a second material receiving shaft, and the material feeding shaft is used for overlapping and winding a first workpiece to be coated and a second workpiece to be coated, wherein the first material receiving shaft and the material feeding shaft have a predetermined first coating space therebetween, and wherein the second material receiving shaft and the material feeding shaft have a predetermined second coating space therebetween, wherein the first material receiving shaft is used for rolling the first workpiece to be coated to be wound around the first material receiving shaft, and wherein the second material receiving shaft is used for rolling the second workpiece to be coated to be wound around the second material receiving shaft.
5. The coating apparatus according to claim 2, wherein the material receiving shafts are two, namely a first material receiving shaft and a second material receiving shaft, and the material feeding shafts are two, namely a first material feeding shaft for winding a first workpiece to be coated and a second material feeding shaft for winding a second workpiece to be coated, wherein the first material receiving shaft and the first material feeding shaft have a predetermined first coating space therebetween, and the second material receiving shaft and the second material feeding shaft have a predetermined second coating space therebetween, wherein the first material receiving shaft is used for rolling the first workpiece to be coated to be wound around the first material receiving shaft, and the second material receiving shaft is used for rolling the second workpiece to be coated to be wound around the second material receiving shaft.
6. The plating apparatus according to claim 5, wherein the length of the first workpiece to be plated is shorter than the length of the second workpiece to be plated.
7. The plating device as claimed in claim 5, wherein the first material receiving shaft is adjacent to the second material feeding shaft with a first predetermined distance therebetween, wherein the second material receiving shaft is adjacent to the first material feeding shaft with a second predetermined distance therebetween.
8. The plating device according to any one of claims 2 to 7, further comprising at least one damping means, wherein the damping means is mounted to the charging spindle.
9. The plating device according to any one of claims 1 to 7, further comprising at least one driving motor, wherein the driving motor is disposed at a position to drive the take-up shaft to rotate.
10. The coating device according to claim 9, further comprising at least one detection circuit, wherein the detection circuit is electrically connected to the driving motor, when the workpiece to be coated is wound around the receiving shaft to the end thereof in a rolling manner, the end of the workpiece to be coated prevents the receiving shaft from rotating further between the loading frame and the receiving shaft, the driving motor is subjected to a resistance force to generate an overload, and the detection circuit is configured to stop the driving motor when the driving motor generates the overload.
11. The coating device according to claim 9, further comprising at least one resistance sensor disposed at a position where the resistance sensor detects the resistance applied to the material receiving shaft, wherein the resistance sensor is electrically connected to the driving motor, the end of the workpiece to be coated prevents the material receiving shaft from further rotating between the material loading bracket and the material receiving shaft when the workpiece to be coated is wound around the material receiving shaft to the end, and the resistance sensor is configured to detect that the resistance applied to the material receiving shaft is greater than a predetermined threshold value and stop the driving motor.
12. The plating device according to any one of claims 1 to 7, further comprising a rotating frame, wherein the rotating frame is rotatably provided in the plating chamber, wherein the feeding frame and the receiving shaft are mounted to the rotating frame, wherein the rotating frame is configured to synchronously drive the feeding frame and the receiving shaft to rotate in the plating chamber.
13. The plating device according to claim 12, wherein the rotary holder comprises a rotary shaft rotatably provided in the plating chamber, and at least a bottom support member provided at a bottom end of the rotary shaft and rotating together with the rotary shaft, wherein the feed holder and the take-up shaft are mounted to the bottom support member and rotate with the bottom support member in the plating chamber.
14. The plating apparatus according to claim 13, wherein the rotating frame further comprises a top support member, wherein the top support member is disposed at a top end of the rotating shaft, and a receiving space is defined between the top support member and the bottom support member for receiving the workpiece to be plated.
15. The coating apparatus according to claim 13, wherein the rotary support further comprises at least two workpiece supports, wherein each of the workpiece supports is disposed on the loading support and the receiving spindle, respectively, wherein the workpiece supports are disposed adjacent to the bottom support for supporting the workpiece to be coated.
16. The plating device according to claim 12, further comprising an electrode means, wherein the electrode means is disposed at a position where electric discharge is generated in the plating chamber.
17. The plating device according to claim 16, wherein the electrode means has at least one electrode member, wherein the electrode member is mounted to the rotating holder.
18. A method of coating a film, comprising:
A. rolling a workpiece to be coated, which is supported on a feeding support, in a coating cavity on a receiving rotating shaft, wherein a preset coating space is formed between the receiving rotating shaft and the feeding support; and
B. and in the rolling process, preparing a film on the surface of the workpiece to be coated, which is exposed to the coating space.
19. The plating method according to claim 18, wherein the loading support comprises at least one loading spindle, wherein the loading spindle is rotatably disposed in the plating chamber, so that the workpiece to be plated is rolled on the loading spindle.
20. The coating method according to claim 19, wherein in the step a, the material receiving rotating shaft is used as a driving wheel, the material loading rotating shaft is used as a driven wheel, and the material receiving rotating shaft is rotated to roll the workpiece to be coated around the material receiving rotating shaft and drive the material loading rotating shaft to rotate.
21. The coating method according to claim 20, wherein the rotation speed of the material receiving shaft is gradually reduced as the diameter of a material receiving column formed by the workpiece to be coated wound on the material receiving shaft is gradually increased.
22. The coating method according to any one of claims 18 to 21, wherein the workpiece to be coated is held in tension by a damping device.
23. The coating method according to any one of claims 18 to 21, wherein the rotation of the take-up shaft is stopped when the workpiece to be coated is rolled around the take-up shaft to the end.
24. The plating method according to claim 23, wherein the material receiving shaft stops rotating when the resistance applied to the material receiving shaft is detected to be greater than a predetermined threshold.
25. The plating method according to claim 23, wherein the material receiving shaft is stopped by detecting overload of a driving motor for driving the material receiving shaft.
26. The plating method according to any one of claims 18 to 21, further comprising synchronously driving the loading holder and the receiving spindle to rotate in the plating chamber.
CN202010516228.1A 2020-06-09 2020-06-09 Film coating equipment and film coating method thereof Pending CN111748785A (en)

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PCT/CN2021/097063 WO2021249216A1 (en) 2020-06-09 2021-05-30 Coating support, coating apparatus, and coating method therefor
TW110120697A TWI818269B (en) 2020-06-09 2021-06-07 Coating bracket, coating equipment and coating method

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