CN111748718A - 芯片封装用金属陶瓷立针注射成型工艺 - Google Patents

芯片封装用金属陶瓷立针注射成型工艺 Download PDF

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CN111748718A
CN111748718A CN202010421907.0A CN202010421907A CN111748718A CN 111748718 A CN111748718 A CN 111748718A CN 202010421907 A CN202010421907 A CN 202010421907A CN 111748718 A CN111748718 A CN 111748718A
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injection molding
powder
chip packaging
cermet
molding process
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王受杨
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Zhuzhou Tiancheng Metal Laser High Tech Co ltd
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Zhuzhou Tiancheng Metal Laser High Tech Co ltd
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C29/00Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/02Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • B22F3/1017Multiple heating or additional steps
    • B22F3/1021Removal of binder or filler
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12Both compacting and sintering
    • B22F3/14Both compacting and sintering simultaneously
    • B22F3/15Hot isostatic pressing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/22Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip
    • B22F3/225Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip by injection molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/22Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip
    • B22F3/227Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip by organic binder assisted extrusion
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/05Mixtures of metal powder with non-metallic powder
    • C22C1/051Making hard metals based on borides, carbides, nitrides, oxides or silicides; Preparation of the powder mixture used as the starting material therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)

Abstract

本发明公开了芯片封装用金属陶瓷立针注射成型工艺,包括以下步骤:配方设计、材料配比、材料制粉、粉末干燥、加入型剂、材料挤出、材料破碎、注射成型、胚料脱脂、产品烧结。本发明的芯片封装用金属陶瓷立针注射成型工艺,采用金属陶瓷材料,成型后可以将金属覆盖工件表面,提高工件的硬度和致密性,而且降低生产成本,再通过脱脂烧结,提高材料的致密性,然后降低制品的孔隙度,而且使用粘接剂可以使粉末的排布更加均匀,这样可以消除毛坯微观组织上的不均匀,提高工件的理论密度。

Description

芯片封装用金属陶瓷立针注射成型工艺
技术领域
本发明涉及注射成型技术领域,具体为芯片封装用金属陶瓷立针注射成型工艺。
背景技术
将电路制造在半导体芯片表面上的集成电路又称薄膜集成电路;另有一种厚膜集成电路是由独立半导体设备和被动组件,集成到衬底或线路板所构成的小型化电路,在实际使用中需要对芯片进行封装后才能继续使用,而封装类别包括有金属封装、陶瓷封装以及塑料封装,而封装工件一般采用的使注射成型工艺,它是指有一定形状的模型,通过压力将融熔状态的胶体注入模腔而成型,但现有的芯片封装的材料大多采用的单一,导致注射成型工艺的成本过高,而且还会导致封装零件的性能较差,使用过程中硬度和密度都不高,而且在注射成型工艺过程中,脱脂烧结工艺过于简单,导致封装零件的致密度不高,导致零件质量差。
发明内容
本发明的目的在于提供芯片封装用金属陶瓷立针注射成型工艺,以解决上述背景技术中提出的问题。
为了解决上述技术问题,本发明提供如下技术方案:芯片封装用金属陶瓷立针注射成型工艺,包括以下步骤:
(1)配方设计:材料配方的设计;
(2)材料配比:将费式粒度0.4~1.0微米的碳氮化钛、碳化钨、碳化钒、碳化钽、钴、镍等粉末按配方进行配比;
(3)材料制粉:将材料粉进行湿磨;
(4)粉末干燥:湿磨后的粉末进行低温真空干燥;
(5)加入型剂:把干燥后的粉末按设计比例加入石蜡、植物油脂、硬脂酸等成型剂;
(6)材料挤出:将混合料使用混合挤出机挤出;
(7)材料破碎:将混合料冷却并破碎成可流动颗粒;
(8)注射成型:使用高精密微型注塑机和高精密注塑用模具进行注射成型;
(9)胚料脱脂:将注射成型后的产品坯料放入氢气脱脂炉脱脂;
(10)产品烧结:将脱脂后的产品放入HIP烧结炉烧结。
优选的,所述步骤(1)中材料配方比例为碳:10.04%-16.04%,肽:60.07%-67.07%,镍9.00%-11.00%,钼:7.50%-12.50%,氮:1.60%-5.20%。
优选的,所述步骤(3)中的湿磨具体为将材料粉末可倾斜式球磨机进行湿磨(球磨媒介为无水乙醇和硬质合金球),湿磨时间为48小时。
优选的,所述步骤(6)中的挤出温度为120℃,反复混合挤出3次。
与现有技术相比,本发明所达到的有益效果是:该芯片封装用金属陶瓷立针注射成型工艺,采用金属陶瓷材料,成型后可以将金属覆盖工件表面,提高工件的硬度和致密性,而且降低生产成本,再通过脱脂烧结,提高材料的致密性,然后降低制品的孔隙度,而且使用粘接剂可以使粉末的排布更加均匀,这样可以消除毛坯微观组织上的不均匀,提高工件的理论密度。
附图说明
附图用来提供对本发明的进一步理解,并且构成说明书的一部分,与本发明的实施例一起用于解释本发明,并不构成对本发明的限制。在附图中:
图1是本发明的工艺流程图。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
请参阅图1,本发明提供一种技术方案:芯片封装用金属陶瓷立针注射成型工艺,包括以下步骤:
(1)配方设计:材料配方的设计;
所述材料配方比例为碳:10.04%-16.04%,肽:60.07%-67.07%,镍9.00%-11.00%,钼:7.50%-12.50%,氮:1.60%-5.20%。
(2)材料配比:将费式粒度0.4~1.0微米的碳氮化钛、碳化钨、碳化钒、碳化钽、钴、镍等粉末按配方进行配比;
(3)材料制粉:将材料粉进行湿磨;
所述湿磨具体为将材料粉末可倾斜式球磨机进行湿磨(球磨媒介为无水乙醇和硬质合金球),湿磨时间为48小时;
(4)粉末干燥:湿磨后的粉末进行低温真空干燥;
(5)加入型剂:把干燥后的粉末按设计比例加入石蜡、植物油脂、硬脂酸等成型剂;
(6)材料挤出:将混合料使用混合挤出机挤出;
所述挤出温度为120℃,反复混合挤出3次;
(7)材料破碎:将混合料冷却并破碎成可流动颗粒;
(8)注射成型:使用高精密微型注塑机和高精密注塑用模具进行注射成型;
(9)胚料脱脂:将注射成型后的产品坯料放入氢气脱脂炉脱脂;
(10)产品烧结:将脱脂后的产品放入HIP烧结炉烧结。
需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。
最后应说明的是:以上所述仅为本发明的优选实施例而已,并不用于限制本发明,尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。

Claims (4)

1.芯片封装用金属陶瓷立针注射成型工艺,其特征在于;包括以下步骤:
配方设计:材料配方的设计;
材料配比:将费式粒度0.4~1.0微米的碳氮化钛、碳化钨、碳化钒、碳化钽、钴、镍等粉末按配方进行配比;
材料制粉:将材料粉进行湿磨;
粉末干燥:湿磨后的粉末进行低温真空干燥;
加入型剂:把干燥后的粉末按设计比例加入石蜡、植物油脂、硬脂酸等成型剂;
材料挤出:将混合料使用混合挤出机挤出;
材料破碎:将混合料冷却并破碎成可流动颗粒;
注射成型:使用高精密微型注塑机和高精密注塑用模具进行注射成型;
胚料脱脂:将注射成型后的产品坯料放入氢气脱脂炉脱脂;
产品烧结:将脱脂后的产品放入HIP烧结炉烧结。
2.根据权利要求1所述的芯片封装用金属陶瓷立针注射成型工艺,其特征在于:所述步骤(1)中材料配方比例为碳:10.04%-16.04%,肽:60.07%-67.07%,镍9.00%-11.00%,钼:7.50%-12.50%,氮:1.60%-5.20%。
3.根据权利要求1所述的芯片封装用金属陶瓷立针注射成型工艺,其特征在于:所述步骤(3)中的湿磨具体为将材料粉末可倾斜式球磨机进行湿磨(球磨媒介为无水乙醇和硬质合金球),湿磨时间为48小时。
4.根据权利要求1所述的芯片封装用金属陶瓷立针注射成型工艺,其特征在于:所述步骤(6)中的挤出温度为120℃,反复混合挤出3次。
CN202010421907.0A 2020-05-18 2020-05-18 芯片封装用金属陶瓷立针注射成型工艺 Pending CN111748718A (zh)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1814838A (zh) * 2005-02-04 2006-08-09 李北 一种金属陶瓷材料及其成型工艺
CN104493168A (zh) * 2014-12-27 2015-04-08 株洲茂翔硬质合金有限公司 一种金属陶瓷制品的制备方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1814838A (zh) * 2005-02-04 2006-08-09 李北 一种金属陶瓷材料及其成型工艺
CN104493168A (zh) * 2014-12-27 2015-04-08 株洲茂翔硬质合金有限公司 一种金属陶瓷制品的制备方法

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Application publication date: 20201009