CN111716355A - Robot absolute positioning precision compensation system and method - Google Patents

Robot absolute positioning precision compensation system and method Download PDF

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Publication number
CN111716355A
CN111716355A CN202010548509.5A CN202010548509A CN111716355A CN 111716355 A CN111716355 A CN 111716355A CN 202010548509 A CN202010548509 A CN 202010548509A CN 111716355 A CN111716355 A CN 111716355A
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robot
adjustment mechanism
fine adjustment
end effector
coordinate system
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郝健
封善斋
任立国
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Haikeshong Manufacturing Intelligent Technology Qingdao Co ltd
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Haikeshong Manufacturing Intelligent Technology Qingdao Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1612Programme controls characterised by the hand, wrist, grip control
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1628Programme controls characterised by the control loop
    • B25J9/1653Programme controls characterised by the control loop parameters identification, estimation, stiffness, accuracy, error analysis
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1679Programme controls characterised by the tasks executed
    • B25J9/1692Calibration of manipulator

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Orthopedic Medicine & Surgery (AREA)
  • Numerical Control (AREA)

Abstract

The invention discloses a robot absolute positioning precision compensation system and a method, wherein the compensation system comprises: the fine adjustment mechanism is a high-precision axial motion platform and is arranged at the tail end of the robot, and the robot tail end executor is arranged on the fine adjustment mechanism; a fiducial for providing a number of fixed reference points; the visual positioning device establishes a global coordinate system according to a plurality of fixed reference points; the data processing system is used for setting a preset position of the robot end effector and is in control connection with the visual positioning device and the fine adjustment mechanism; the fine adjustment mechanism receives the position deviation between the preset position and the actual position fed back by the visual positioning device, and adjusts the fine adjustment mechanism according to the position deviation until the position deviation is zero. The invention is used for compensating the absolute positioning precision of the robot end effector, improving the absolute positioning precision of the robot and widening the application range of the robot.

Description

Robot absolute positioning precision compensation system and method
Technical Field
The invention relates to the technical field of robot measurement, in particular to a system and a method for compensating absolute positioning accuracy of a robot.
Background
The industrial robot is a key part of industrial automation and intelligent manufacturing, and is widely applied to complex operations such as assembly, carrying, welding, spraying, laser cutting, assembly, grinding, product detection and the like. When the industrial robot works, the corresponding robot end effector is loaded at the tail end of the robot according to different working objects.
With diversification and complication of industrial robot operation modes, the precision requirement of the industrial field on the robot becomes higher and higher, the precision of the robot mainly comprises repeated positioning precision and absolute positioning precision, the repeated positioning precision refers to the approaching degree between the actual reaching positions of the robot end effector for repeatedly reaching the same target position (ideal position), and the positioning precision refers to the approaching degree between the actual reaching position of the robot end effector and the target position (theoretical position).
Most industrial robots used in the factory at present adopt teaching mode programming, are applied to operations such as assembly, carrying, spraying and welding, and have low efficiency, and meanwhile, the requirement on the repeated positioning precision of the robots in the mode is high. In precision machining operations such as polishing, grinding, arc welding, laser cutting, and product inspection, the robot is required to have not only high repeated positioning accuracy but also high absolute positioning accuracy.
At present, a robot manufacturer can ensure high repeated positioning accuracy before an industrial robot leaves a factory, the repeated positioning accuracy can usually reach 0.1 magnitude, and the absolute positioning accuracy is usually lower, usually at 1mm magnitude. The lower absolute positioning precision leads to that the industrial robot can not meet the requirements of precision machining and production, which greatly limits the application range of the robot.
The current robot absolute positioning precision compensation method is mainly based on a robot operation model, needs to deeply research forward and inverse kinematics of the robot, is complex in mathematical model, needs to set a calibration standard in a measurement space, is complex and still has limitations: (1) after the compensated positioning error reaches a certain precision, almost no lifting space exists; (2) not all points in the measurement space can be effectively compensated.
Disclosure of Invention
The invention provides a system and a method for compensating the absolute positioning accuracy of a robot, which are used for compensating the absolute positioning accuracy of an end effector of the robot, improving the absolute positioning accuracy of the robot and widening the application range of the robot.
In order to realize the purpose of the invention, the invention is realized by adopting the following technical scheme:
a robot absolute positioning accuracy compensation system is applied to a robot end effector and is characterized by comprising: the fine adjustment mechanism is a high-precision axial motion platform and is arranged at the tail end of the robot, and the robot tail end executor is arranged on the fine adjustment mechanism; a fiducial for providing a number of fixed reference points; the visual positioning device establishes a global coordinate system according to the fixed reference points and is used for acquiring the actual position of the robot end effector in the global coordinate system; the data processing system is used for setting a preset position of the robot end effector and is in control connection with the visual positioning device and the fine adjustment mechanism; and the fine adjustment mechanism receives the position deviation between the preset position and the actual position fed back by the visual positioning device, and adjusts the fine adjustment mechanism according to the position deviation until the position deviation is zero.
The robot absolute positioning accuracy compensation system comprises a vision positioning device, a vision sensor and a controller, wherein the vision positioning device is a plurality of vision sensors; or the visual positioning device is a plurality of laser sensors.
According to the absolute positioning accuracy compensation system for the robot, the fine adjustment mechanism comprises at least one axial motion platform, and the axial motion platform is a mechanical type, a magnetic suspension type or an air-floating type motion platform.
The system for compensating the absolute positioning accuracy of the robot is characterized in that when the axial motion platform is a mechanical motion platform, the mechanical motion platform comprises: mounting a platform; a drive motor mounted on the mounting platform; the lead screw is in driving connection with the driving motor; a guide rail mounted on the mounting platform; the sliding table is connected with the lead screw, and when the lead screw rotates, the sliding table moves along the guide rail in the axial direction; and the high-precision displacement sensor is used for detecting the sliding displacement of the sliding table and is connected with the data processing system. According to the absolute positioning accuracy compensation system for the robot, the lead screw is of a non-return-stroke pre-tightening spherical structure, and the high-accuracy displacement sensor is of a high-accuracy non-contact linear encoder.
The application also relates to a robot absolute positioning accuracy compensation method which is realized by the robot absolute positioning accuracy compensation system, and the robot absolute positioning accuracy compensation method comprises the following steps: s1: establishing a global coordinate system; s2: acquiring the actual position of the robot end effector in the global coordinate system; s3: calculating the displacement deviation between the actual position of the robot end effector and a preset position; s4: and adjusting the axial movement of each sliding table of the fine adjustment mechanism according to the displacement deviation to enable the displacement deviation to be zero.
In the above method for compensating the absolute positioning accuracy of the robot, the step S4 is specifically: s41: establishing a fine adjustment mechanism coordinate system where the fine adjustment mechanism is located; s42: calculating a conversion relation between the global coordinate system and the fine adjustment mechanism coordinate system; s43: respectively converting the actual position and the preset position of the robot end effector to a first position and a second position under the coordinate system of the fine adjustment mechanism by using the conversion relation; s44: and adjusting the axial movement of each sliding table of the fine adjustment mechanism according to the first position and the second position to enable the displacement deviation to be zero.
In the method for compensating the absolute positioning accuracy of the robot, the axial movement of each sliding table of the fine adjustment mechanism is adjusted by using a PID control algorithm.
Compared with the prior art, the absolute positioning accuracy compensation system and method for the robot provided by the invention have the following advantages and beneficial effects: the fine-tuning installs at the robot end, and robot end effector installs on the fine-tuning, through the actual position and the preset position that acquire robot end effector place, feed back the displacement deviation between the two to the fine-tuning, because the fine-tuning is high accuracy axial motion platform, it can be according to this position deviation to zero accurately, realize actual position and preset position coincidence, its adjustment accuracy does not rely on the precision of robot itself, improve the absolute positioning accuracy of robot indirectly through the fine-tuning of high accuracy, moreover, the steam generator is simple in structure and easy to realize, and improve the absolute positioning accuracy height of robot, make the robot application range wider.
Other features and advantages of the present invention will become more apparent from the following detailed description of the invention when taken in conjunction with the accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a flowchart of an embodiment of a method for compensating absolute positioning accuracy of a robot according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
The invention provides a robot absolute positioning accuracy compensation system and method, which can realize higher repeated positioning accuracy but has low absolute positioning accuracy, thereby greatly influencing the application range of the robot, for example, the requirements of precision machining and production cannot be met.
The robot may be a rectangular coordinate type, a cylindrical coordinate type, a spherical coordinate type, or a joint coordinate type industrial robot, or the like.
The robot absolute positioning accuracy compensation system (not shown) of the embodiment comprises a fine adjustment mechanism, a benchmark, a visual positioning device and a data processing system.
The fine adjustment mechanism is installed at the tail end of the robot, and the robot tail end executor is installed on the fine adjustment mechanism. The robot end moves to drive the fine adjustment mechanism and the robot end actuator to move, and the fine adjustment mechanism moves to drive the robot end actuator to move.
The fine adjustment mechanism may be a multi-axis motion platform such as a single-axis motion platform, a two-axis motion platform, a three-axis motion platform, a six-axis motion platform, etc., and the number of degrees of freedom thereof depends on the number of degrees of freedom of the robot end effector, or the number of degrees of freedom that need to be focused in practical use, etc.
The multi-axial motion platform is formed by splicing and assembling a single-axial motion platform.
The uniaxial motion platform can be a mechanical motion platform, a magnetic suspension motion platform or an air-floating motion platform. When the single-axial motion platform is a mechanical motion platform, the single-axial motion platform can comprise a mounting platform, a driving motor, a lead screw, a guide rail, a sliding platform and a high-precision displacement sensor.
The mounting platform is a carrier for the various components in the axial motion platform.
The driving motor is installed on the installation platform and used for providing power for the axial motion platform.
The lead screw is connected with a driving shaft of the driving motor, and when the driving motor works, the driving shaft drives the lead screw to rotate together.
And the guide rail is arranged on the mounting platform and used for providing a sliding track for the sliding table.
The sliding table is connected with the screw rod, a hole penetrating through the screw rod can be formed in the sliding table, internal threads matched with the screw rod are formed in the inner wall of the hole, when the screw rod rotates along with a driving shaft of the driving motor, the sliding table slides along the screw rod and the guide rail, and if a part to be moved (such as a robot end effector) is installed on the sliding table, at the moment, when the driving motor works, the axial movement mechanism can drive the part to be moved to move axially (such as the X axial direction, the Y axial direction or the Z axial direction).
The high-precision displacement sensor adopts a high-precision non-contact linear encoder which is used for acquiring the displacement of the part to be moved along the sliding table.
In addition, in order to improve the precision of the mechanical motion platform, in the embodiment, the guide rail adopts a pre-tightening sealing design, the clearance error is zero, and the lead screw adopts a non-backlash pre-tightening spherical structure, so that the high precision of the axial motion platform is ensured.
In this embodiment, the fine adjustment of the robot end effector is realized by adjusting the displacement of the fine adjustment mechanism in each axial direction, and if the robot end effector is positioned absolutely with high precision, it is required to ensure that the fine adjustment mechanism satisfies high precision and high stability.
The mechanical fine adjustment mechanism adopts a high-precision displacement sensor to detect the displacement of each axial direction so as to accurately control the fine adjustment mechanism to adjust the robot end effector and compensate the absolute positioning that the tail end of the robot can not continuously drive the robot end effector.
The precise axial motion platform also comprises a magnetic suspension type motion platform and an air suspension type motion platform, and the magnetic suspension type motion platform and the air suspension type motion platform have no friction due to guide rails of the magnetic suspension type motion platform and the air suspension type motion platform, so that the precise axial motion platform realizes ultra-precise positioning relative to a mechanical motion platform. The magnetic suspension type motion platform and the air suspension type motion platform are both precision positioning sliding tables commonly used in the prior art, and the structure thereof can refer to the prior art, so that the detailed description is omitted herein.
Because the air-floating type motion platform has the advantages of simple structure, light weight, flexible design and the like relative to the magnetic suspension type motion platform, the air-floating type motion platform is mostly adopted as an ideal choice of a precise positioning platform.
The fine adjustment mechanism is an axial motion platform or is formed by combining at least one axial motion platform, and the high precision of each axial motion platform is ensured, so that the fine adjustment mechanism also has high precision, and is favorable for compensating the absolute positioning precision of the robot.
It is assumed that the robot end effector is used to perform measurements or machining of a certain workpiece, which is placed on the workpiece holder.
Determining the position of the robot end effector, wherein a global coordinate system needs to be established, and the position which the robot end effector needs to reach is represented in the global coordinate system and is recorded as a preset position (namely an ideal position) P1; representing the real-time position of the robot end effector, noted as the actual position P2.
When the fine adjustment mechanism is not used or does not work, the robot existsThe lower absolute positioning accuracy is achieved, so that the actual position P2 and the preset position P1 of the robot end effector always have displacement deviation
Figure 692883DEST_PATH_IMAGE002
P。
The coordinate system of the fine adjustment mechanism is a tool coordinate system of the robot, which can be obtained by calibration, and the tool coordinate system and the calibration obtaining method are contents disclosed in the prior calibration technical field, and are not described herein again.
A reference, similar to a fixed coordinate system, is fixed to the work holder, which provides several fixed reference points.
The visual positioning device may be a plurality of visual sensors, or a plurality of laser sensors. The vision positioning device establishes a global coordinate system according to a plurality of fixed reference points, and can position the actual position of the robot end effector with higher precision.
The preset position P1 of the robot end effector, i.e., the position that the robot end effector is expected to reach, is preset in the data processing system.
According to the preset program instruction, the robot drives the robot end effector to move to the actual position P2. The pre-set program instructions may be provided in a data processing system that communicates with the robot to control the robot and receive data from the robot feedback, such as the actual position P2 reached by the robot end effector.
The program instructions calculate in real time the displacement deviation between the preset position P1 and the actual position P2 of the robot end effector during the travel of the robot
Figure 78865DEST_PATH_IMAGE002
P, deviation of displacement
Figure 311132DEST_PATH_IMAGE002
P is fed back to the fine adjustment mechanism, and the fine adjustment mechanism is based on the displacement deviation
Figure 440762DEST_PATH_IMAGE002
P automatically adjusting the motion displacement of each axial direction until the displacement deviation
Figure 989555DEST_PATH_IMAGE002
P is zero, so that the absolute positioning precision of the robot is effectively compensated, and the tail end of the robot realizes high absolute positioning precision.
With reference to FIG. 1, how the fine adjustment mechanism depends on the displacement deviation is described
Figure 280859DEST_PATH_IMAGE002
P adjusts the actual position P2 of the robot end effector to travel to the preset position P1.
S1: and establishing a global coordinate system.
As described above, several stationary reference points are acquired using the fiducials.
The visual positioning device establishes a global coordinate system according to a plurality of reference points.
S2: the actual position P2 of the robot end effector in the global coordinate system is obtained.
The data processing system directs the robot end effector to travel to the preset position P1 according to the preset program instructions, but the robot end effector cannot actually travel to the preset position P1 due to the low absolute positioning accuracy of the robot end itself, and the visual positioning device is used for detecting the actual position P2 of the robot end effector in real time.
It should be noted that the actual position P2 in this embodiment does not represent the real-time position of the robot end effector during the travel of the robot, but represents the actual position of the robot end effector when the robot has traveled to a position where the robot end effector cannot be moved any further by the movement of the robot.
S3: calculating a displacement deviation between an actual position P2 and a preset position P1 of the robot end effector
Figure 282313DEST_PATH_IMAGE002
P。
Assume that the initial position of the robot end effector in the global coordinate system is P0.
The data processing system calculates the displacement deviation between the actual position P2 and the preset position P1 after receiving the actual position P2 of the robot end effector fed back by the visual positioning device
Figure 199322DEST_PATH_IMAGE002
P。
For example, P0(x0, y0, z0), P1(x1, y1, z1) and P2(x2, y2, z 2).
Deviation of displacement
Figure 602622DEST_PATH_IMAGE002
P=
Figure DEST_PATH_IMAGE004
=
Figure DEST_PATH_IMAGE006
-
Figure DEST_PATH_IMAGE008
S4: according to displacement deviation
Figure 986199DEST_PATH_IMAGE002
P, adjusting the axial movement of each sliding table of the fine adjustment mechanism to make the displacement deviation
Figure 209369DEST_PATH_IMAGE002
P is zero.
Deviation of displacement
Figure 680802DEST_PATH_IMAGE002
P is fed back to the fine adjustment mechanism to form a closed loop system, the driving motor drives the sliding table to move axially (for example, an X axis, a Y axis or a Z axis and the like), and the absolute positioning precision of the tail end of the robot is effectively compensated to obtain a high-precision real-time position.
As follows, the fine adjustment mechanism according to the displacement deviation will be described
Figure 938608DEST_PATH_IMAGE002
P implements the process of closed-loop control.
S41: and establishing a fine adjustment mechanism coordinate system where the fine adjustment mechanism is located.
Since the fine adjustment mechanism is mounted at the end of the robot, it is located in the coordinate system of the tool of the robot, as described above.
S42: and calculating the conversion relation between the global coordinate system and the fine adjustment mechanism coordinate system.
Deviation of displacement
Figure 837294DEST_PATH_IMAGE002
If P is adjusted by the fine adjustment mechanism, the actual position P2 and the preset position P1 of the robot end effector need to be converted from the global coordinate system to positions under the fine adjustment mechanism coordinate system, and therefore, the conversion relationship between the global coordinate system and the fine adjustment mechanism coordinate system needs to be calculated, for example, the conversion matrix R and the translation matrix T from the global coordinate system to the fine adjustment mechanism coordinate system are included.
S43: the actual position P2 and the preset position P1 of the robot end effector are converted to a first position P2 'and a second position P1' in the fine adjustment mechanism coordinate system, respectively, using the conversion relationship.
Deviation of displacement
Figure 62608DEST_PATH_IMAGE002
And P is converted into vector displacement in a coordinate system of the fine adjustment mechanism, and the fine adjustment mechanism is guided to move in each axial direction to perform position compensation.
The actual position P2 in the global coordinate system corresponds to the first position P2'(x2', y2', z2') = R × P2+ T in the fine-tuning mechanism coordinate system.
The preset position P1(x1, y1, z1) in the global coordinate system corresponds to the second position P1'(x1', y1', z1') = R × P1+ T in the fine-tuning mechanism coordinate system.
S44: according to the first position P2 'and the second position P1', the axial movement of each sliding table of the fine adjustment mechanism is adjusted to make the displacement deviation
Figure 806573DEST_PATH_IMAGE002
P is zero.
The displacement compensated by the fine adjustment mechanism is S = P1'(x1', y1', z1') -P2'(x2', y2', z2') = R (P1-P2).
The fine adjustment mechanism adopts PID control algorithm for compensating the displacement, and closed-loop control of the displacement is realized.
Based on the compensated displacement S, the fine adjustment mechanism adjusts the axial movement of each sliding table, so as to drive the end effector of the machine to move, so as to change the actual position P2 to P2 ″.
Recalculating the displacement deviation using the new actual position P2 ″
Figure 184465DEST_PATH_IMAGE002
P 'is fed back to the fine adjustment mechanism to further adjust the axial movement of each sliding table of each fine adjustment mechanism, so as to drive the end effector of the machine to move, thereby changing the actual position P2' 'to be P2' ''.
Until the actual position of the robot end effector adjusted by the fine adjustment mechanism is the same as the preset position P1, i.e., the displacement deviation is zero.
The absolute positioning accuracy compensation system and method of the robot provided by the invention do not need a motion model of the robot, utilize the high-accuracy fine adjustment mechanism to compensate the original lower absolute positioning accuracy of the robot, improve the absolute positioning accuracy of the end effector of the robot, expand the application range and the application effect of the robot, have simple structure, are easy to realize, have low cost and are suitable for large-scale industrial application; and the fine adjustment mechanism can be disassembled and assembled and installed on robots of different types, so that effective utilization of resources is realized.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions.

Claims (8)

1. A robot absolute positioning accuracy compensation system is applied to a robot end effector and is characterized by comprising:
the fine adjustment mechanism is a high-precision axial motion platform and is arranged at the tail end of the robot, and the robot tail end executor is arranged on the fine adjustment mechanism;
a fiducial for providing a number of fixed reference points;
the visual positioning device establishes a global coordinate system according to the fixed reference points and is used for acquiring the actual position of the robot end effector in the global coordinate system;
the data processing system is used for setting a preset position of the robot end effector and is in control connection with the visual positioning device and the fine adjustment mechanism;
and the fine adjustment mechanism receives the position deviation between the preset position and the actual position fed back by the visual positioning device, and adjusts the fine adjustment mechanism according to the position deviation until the position deviation is zero.
2. The system of claim 1, wherein the visual positioning device is a plurality of visual sensors; or the visual positioning device is a plurality of laser sensors.
3. The system of claim 1, wherein the fine adjustment mechanism comprises at least one axial motion stage, the axial motion stage being a mechanical, magnetic suspension, or air-floating motion stage.
4. The system of claim 3, wherein when the axial motion platform is a mechanical motion platform, the mechanical motion platform comprises:
mounting a platform;
a drive motor mounted on the mounting platform;
the lead screw is in driving connection with the driving motor;
a guide rail mounted on the mounting platform;
the sliding table is connected with the lead screw, and when the lead screw rotates, the sliding table moves along the guide rail in the axial direction;
and the high-precision displacement sensor is used for detecting the sliding displacement of the sliding table and is connected with the data processing system.
5. The absolute positioning accuracy compensation system of claim 4, wherein the lead screw is of a non-backlash pre-tightening spherical structure, and the high-accuracy displacement sensor is a high-accuracy non-contact linear encoder.
6. A robot absolute positioning accuracy compensation method implemented by the robot absolute positioning accuracy compensation system of any one of claims 1 to 5, the robot absolute positioning accuracy compensation method comprising:
s1: establishing a global coordinate system;
s2: acquiring the actual position of the robot end effector in the global coordinate system;
s3: calculating the displacement deviation between the actual position of the robot end effector and a preset position;
s4: and adjusting the axial movement of each sliding table of the fine adjustment mechanism according to the displacement deviation to enable the displacement deviation to be zero.
7. The method for compensating for the absolute positioning accuracy of the robot according to claim 6, wherein the step S4 is specifically that:
s41: establishing a fine adjustment mechanism coordinate system where the fine adjustment mechanism is located;
s42: calculating a conversion relation between the global coordinate system and the fine adjustment mechanism coordinate system;
s43: respectively converting the actual position and the preset position of the robot end effector to a first position and a second position under the coordinate system of the fine adjustment mechanism by using the conversion relation;
s44: and adjusting the axial movement of each sliding table of the fine adjustment mechanism according to the first position and the second position to enable the displacement deviation to be zero.
8. The absolute positioning accuracy compensation method of a robot according to claim 6,
and adjusting the axial movement of each sliding table of the fine adjustment mechanism by utilizing a PID control algorithm.
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