CN111715605B - Cleaning device and cleaning method for optical coating clamp - Google Patents
Cleaning device and cleaning method for optical coating clamp Download PDFInfo
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- CN111715605B CN111715605B CN201910220040.XA CN201910220040A CN111715605B CN 111715605 B CN111715605 B CN 111715605B CN 201910220040 A CN201910220040 A CN 201910220040A CN 111715605 B CN111715605 B CN 111715605B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
Abstract
The invention relates to a cleaning device and a cleaning method of an optical coating clamp, wherein the cleaning device of the optical coating clamp comprises a direct-current power supply, an ultrasonic oscillator and a reaction vessel; the cleaning method of the cleaning device of the optical coating clamp comprises the following steps: (1) starting a direct current power supply to carry out electrochemical corrosion on the optical coating clamp; (2) the ultrasonic oscillator and the direct-current power supply work simultaneously to clean the optical coating clamp; (3) washing the optical coating fixture; (4) drying the optical coating fixture; (5) and drying the optical coating fixture. According to the cleaning device and the cleaning method for the optical coating clamp, provided by the invention, the optical coating clamp is pretreated, and then the surface film layer of the optical coating clamp is treated by using a method combining electrochemical corrosion and ultrasonic oscillation.
Description
Technical Field
The invention relates to a cleaning device and a cleaning method for an optical coating clamp, and belongs to the field of cleaning of vacuum coating of cavity surfaces of semiconductor lasers.
Background
Semiconductor lasers are widely used in various fields due to their unique advantages. Semiconductor lasers are continuously required to have high power, high conversion efficiency, long service life and the like, so the reflectivity of the semiconductor lasers needs to be optimized by coating films on cavity surfaces. Vacuum coating of a cavity surface of a semiconductor laser refers to a process of coating several (or more than ten) dielectric films on the cleaved cavity surface, and the purpose of vacuum coating is to increase or decrease the reflectivity of the cavity surface of the semiconductor laser and protect the cavity surface from being polluted by the external environment. The vacuum coating process is a process for forming a film by condensing a dielectric film material on the cavity surface of a semiconductor laser by means of heating, electron beams, ion beams, magnetron sputtering and the like in a high vacuum environment. The process requires that a semiconductor laser chip is firstly cleaved into bars, and then a plurality of bars are placed on a coating clamp for coating in order to improve the efficiency.
In the actual vacuum coating process, the inner wall of the vacuum chamber, the workpiece disc and the clamp can be polluted by deposition of an evaporation coating material or a sputtering coating material, the inner wall of the vacuum chamber can be protected by attaching aluminum foil paper, and the workpiece disc can be subjected to sand blasting. However, since the coating jig is precise and expensive, the aluminum foil cannot be attached, and the sand blasting may cause deformation and thus cannot be used. At present, the clamp is generally soaked in an alkaline solution, but the method has long time and low efficiency, and can not clean certain hidden corners thoroughly.
Chinese patent CN 204237864U discloses a coating machine fixture cleaning device, which comprises a guide rail, a transmission chain, an alkali liquor tank, a rinsing tank, a heating device, a drying device and a controller, wherein the guide rail is enclosed into a rectangle, the transmission chain is arranged below the guide rail along the guide rail, the operation mode of the transmission chain is anticlockwise, lifting rings are uniformly arranged on the transmission chain, a hook is arranged below each lifting ring, the alkali liquor tank and the rinsing tank are respectively arranged below two downward bulges on the guide rail, the heating device is arranged in the alkali liquor tank, and the coating machine fixture cleaning device can clean coating fixtures in batches.
Chinese patent CN101959620A discloses an ultrasonic cleaning apparatus and an ultrasonic cleaning method, which at least comprises: a cleaning tank for holding a cleaning liquid to dip and clean an object to be cleaned; the object to be cleaned is held by a holding jig and immersed in a cleaning liquid in a cleaning tank immersed in a transfer water in an ultrasonic wave transfer tank, and ultrasonic waves superimposed on the object to be cleaned by a vibration plate are transferred to the cleaning tank through the transfer water, whereby the object to be cleaned is ultrasonically cleaned. However, the invention is soaked by the cleaning liquid, so that the cleaning speed is slow and the cleaning is not thorough.
Disclosure of Invention
The invention provides a cleaning device and a cleaning method of an optical coating clamp aiming at the defects of the prior art, wherein the cleaning device of the optical coating clamp comprises a direct-current power supply, an ultrasonic oscillator and a reaction vessel, and the method combining electrochemical corrosion and ultrasonic waves is adopted to quickly, efficiently and fully clean the optical coating clamp, reduce the pollution of the optical coating clamp and prolong the service life of the optical coating clamp.
The technical scheme of the invention is as follows:
a cleaning device for an optical coating clamp comprises a direct current power supply, an ultrasonic oscillator and a reaction vessel; one end of the positive wire is connected with the positive electrode of the direct-current power supply, and the other end of the positive wire is connected with the optical coating clamp; one end of the negative electrode lead is connected with the negative electrode of the direct current power supply, and the other end of the negative electrode lead is connected with the platinum sheet; the optical coating clamp and the platinum sheet are placed in a reaction container filled with electrolyte, the platinum sheet is partially immersed in the electrolyte, and the optical coating clamp is completely immersed in the electrolyte; the reaction vessel was placed in an ultrasonic oscillator containing deionized water. In the device, a direct current power supply, electrolyte, an optical coating clamp and a platinum sheet form an electrolytic cell, the optical coating clamp is an anode, and the platinum sheet is a cathode.
Preferably, according to the invention, the electrolyte comprises NaOH, NaCl and H2O, NaOH, NaCl and H in electrolyte2The mass ratio of O is (1-2) to (3-5) to (2-4). Because the optical coating clamp is generally precise, in order to prevent the clamp from being corroded and damaged by high-concentration alkali liquor, the invention adopts NaOH and NaCl aqueous solution as electrolyte, wherein NaOH is used as the alkali liquor and the coating material on the clampChemical reaction is generated to pretreat the optical coating clamp, and the function of NaCl is to provide ionized ions of the electrochemical reaction.
According to the optimization of the invention, the cleaning device also comprises a first guide rail and a second guide rail, wherein the first guide rail and the second guide rail are arranged above the reaction container, the first guide rail is provided with a first sliding block, and the positive lead is detachably connected with the first sliding block; and a second slide block is arranged on the second guide rail, and the negative electrode lead is detachably connected with the second slide block. The position adjustment between the platinum sheet and the optical coating fixture is realized through the adjusting positions of the first sliding block and the second sliding block on the guide rail.
According to the invention, the horizontal distance between the platinum sheet and the optical coating clamp is preferably 20cm-50 cm.
The cleaning method of the cleaning device of the optical coating clamp comprises the following steps:
(1) starting a direct current power supply to carry out electrochemical corrosion on the optical coating clamp;
(2) the ultrasonic oscillator and the direct-current power supply work simultaneously to clean the optical coating clamp;
(3) washing the optical coating fixture;
(4) drying the optical coating fixture;
(5) and drying the optical coating fixture.
The method combining electrochemical corrosion and ultrasonic wave can quickly process the film material on the surface of the optical coating clamp, and the electrochemical treatment optical coating clamp provided by the invention comprises three processes: (1) the alkaline ions in the electrolyte and the membrane material are subjected to chemical reaction, so that a loose structure is formed on the surface of the membrane material; (2) after the direct-current power supply is electrified, anions in the electrolyte generate anodic oxidation reaction in the optical coating clamp and accelerate the chemical reaction of alkaline ions and the coating material, and meanwhile, an active layer with a compact small-hole structure is formed on the surface of the optical coating clamp, and the active layer has poor density due to the existence of the small-hole structure; the electrification generates an electric field at the interface of the anode membrane material surface and the electrolyte, and electrons in the electric field participate in chemical reaction so as to accelerate the activation of the membrane material surface. (3) By utilizing the ultrasonic cavitation effect, the surface of the film material is subjected to ultrasonic oscillation after a small hole structure appears, the film material is easy to dissolve and fall off, and the surface of a new film material clamp is exposed after the film material falls off, so that the cleaning of the optical film coating clamp is accelerated, and the cleaning efficiency is improved.
Preferably, before the step (1), the optical coating fixture is placed into the electrolyte for soaking treatment, wherein the soaking time is 20min-30 min. Carry out soaking treatment with optics coating fixture, can play the effect of preliminary treatment to the coating material on optics coating fixture surface, the activation coating material for the coating material surface forms comparatively loose aperture structure, makes things convenient for follow-up electrochemical treatment and ultrasonic cleaning, shortens the time of cleaning, improves the cleaning efficiency.
Preferably, in the step (1), the direct current power supply adopts a constant voltage mode, the working time of the direct current power supply is 5min-20min, and the direct current voltage is 10V-30V.
Further preferably, in the step (1), the operating time of the direct current power supply is 5min, and the direct current voltage is 10V.
Preferably, in step (2), the ultrasonic oscillator is started to operate for 5min to 20min, and the output frequency of the ultrasonic oscillator is 15 KHz. By utilizing the ultrasonic cavitation effect, the surface of the film material is subjected to ultrasonic oscillation after a small hole structure appears, so that the film material is quickly dropped, and the effect of efficiently removing the film material on the surface of the clamp is achieved.
Further preferably, in the step (2), the ultrasonic oscillator is started to work for 5 min.
According to the invention, in the step (3), deionized water is adopted to wash the optical coating fixture, and the washing time is 10min-20 min. Electrolyte remained on the surface of the optical coating clamp is removed, and the subsequent use of the clamp is prevented from being influenced.
According to the optimization of the invention, in the step (5), the optical coating fixture is dried by a vacuum drying oven, the working temperature of the vacuum drying oven is 160-180 ℃, and the drying time is 40-60 min. The drying oven can accelerate the drying of the optical coating fixture, shorten the whole cleaning time and improve the cleaning efficiency.
The invention has the beneficial effects that:
1. the invention provides a cleaning device and a cleaning method of an optical coating clamp, which are characterized in that the optical coating clamp is pretreated firstly, and then a surface film layer of the optical coating clamp is treated by a method combining electrochemical treatment and ultrasonic oscillation.
2. The electrochemical corrosion technology can enable a compact pore structure to appear in the film material on the surface of the optical coating fixture, the film material can be loosened and easily fall off due to the pore structure, and the ultrasonic wave can enable the loosened film material to fall off quickly, so that the coating fixture is cleaned quickly and efficiently, the cleaning time is shortened, and the cleaning efficiency is improved.
3. The invention provides a cleaning device and a cleaning method for an optical coating clamp, which can realize omnibearing and dead-angle-free cleaning of the optical coating clamp.
Drawings
FIG. 1 is a schematic structural view of an optical coating fixture cleaning apparatus according to the present invention;
FIG. 2 is a schematic structural diagram of the surface of the electrochemically etched film material;
FIG. 3 is a schematic view of an unused optical coating fixture;
FIG. 4 is a schematic view of an optical coating jig after coating;
FIG. 5 is a schematic view of an optical coating fixture after being cleaned by the cleaning method provided by the present invention;
FIG. 6 is a schematic view of an optical coating fixture cleaned by a conventional soaking method.
In the figure: 1. a direct current power supply; 2. a platinum sheet; 3. an optical coating jig; 4. an electrolyte; 5. deionized water; 6. an ultrasonic oscillator; 7. a reaction vessel; 8. the device comprises a first guide rail 9, a second guide rail 10, a first sliding block 11 and a second sliding block.
Detailed Description
The invention is further defined in the following, but not limited to, the figures and examples in connection with the description.
Example 1
Optical coating fixtureAs shown in fig. 1, the cleaning device of (1) comprises a direct current power supply 1, an ultrasonic oscillator 6 and a reaction vessel 7; the model of the direct current power supply 1 is AN5330-150, one end of a positive wire is connected with the positive electrode of the direct current power supply 1, and the other end of the positive wire is connected with the optical coating clamp 3; one end of the negative electrode lead is connected with the negative electrode of the direct current power supply 1, and the other end of the negative electrode lead is connected with the platinum sheet 2; an optical coating clamp 3 as an anode and a platinum sheet 2 as a cathode are placed in a reaction container 7 filled with an electrolyte 4, wherein the reaction container 7 is a polytetrafluoroethylene container, the platinum sheet 2 is partially immersed in the electrolyte 4, and the optical coating clamp 3 is completely immersed in the electrolyte 4; the reaction vessel 7 is placed in an ultrasonic oscillator 6 containing deionized water 5. Wherein, NaOH, NaCl and H are contained in the electrolyte 42The mass ratio of O is 1:3: 2.
The cleaning device further comprises a first guide rail 8 and a second guide rail 9, the first guide rail 8 and the second guide rail 9 are arranged above the reaction container 7, a first sliding block 10 is mounted on the first guide rail 8, and the positive electrode lead is detachably connected with the first sliding block 10 and is connected to the first guide rail 8 through a hoop in the embodiment; the second slide block 11 is installed on the second guide rail 9, the negative electrode lead is detachably connected with the second slide block 11, and in the embodiment, the negative electrode lead is connected to the second guide rail 9 through the hoop. The position adjustment between the platinum sheet 2 and the optical coating fixture 3 is realized through the adjusting positions of the first slide block 10 and the second slide block 11 on the guide rail. The horizontal distance between the platinum sheet 2 and the optical coating clamp 3 is 20cm-50 cm.
The cleaning method of the cleaning device of the optical coating clamp comprises the following steps:
(1) before the optical coating clamp 3 is used, as shown in fig. 3, the surface of the optical coating clamp 3 is clean and has no coating, the original color of the metal on the surface of the optical coating clamp 3 is shown, and the surface layer of the optical coating clamp is in an uneven state. The photo of the optical coating fixture 3 after coating the surface thereof, as shown in fig. 4, has a layer of coating material on the surface, and the surface is relatively uniform due to the existence of the coating material, and the color is relatively uniform. And (3) putting the optical coating clamp 3 into the electrolyte 4 for soaking for 20 min.
(2) The direct current power supply 1 is started firstly, the direct current power supply 1 adopts a constant voltage mode, the working time of the direct current power supply 1 is 5min, and the direct current voltage is 10V. After the direct current power supply 1 works for 5min, as shown in fig. 2, the structure on the surface of the membrane material after electrochemical corrosion is filled with the small hole structure.
(3) Keeping the direct current power supply 1 to work continuously, simultaneously starting the ultrasonic oscillator 6 again, starting the ultrasonic oscillator 6 to work for 5min, wherein the output frequency of the ultrasonic oscillator 6 is 15KHz, and the output frequency of the ultrasonic oscillator 6 is 15 KHz. The electrification can generate an electric field at the interface of the surface film material of the optical film coating clamp 3, which is contacted with the electrolyte 4, the reaction of the film material and the electrolyte 4 can be carried out in the electric field of the contact of the film material and the electrolyte 4, and the process comprises the process that the particles participating in the reaction obtain or lose electrons, namely, the electrons in the electric field can participate in the chemical reaction to accelerate the activation of the surface of the film material. To explain the reaction process more conveniently, taking the silicon film material and the hydrofluoric acid electrolyte 4 as an example, the electrochemical reaction equation is:
Si+2HF+nh+＝SiF2+2H+(2-n)e-
SiF2+2HF＝Sif4+H2
SiF4+2HF＝H2SiF6
wherein h is+Is a cavity, e-Is an electron. The holes may be provided by adding a portion of a neutral solvent, such as Na in NaCl, to the electrolyte 4+，e-Is provided by an external electric field after current is introduced.
(4) And taking out the optical coating clamp 3, and washing the optical coating clamp 3 by using deionized water for 10 min.
(5) The optical coating jig 3 was blow-dried with nitrogen.
(6) And drying the optical coating clamp 3 by using a vacuum drying oven, wherein the working temperature of the vacuum drying oven is 160 ℃, and the drying time is 40 min.
After being cleaned in the cleaning device for 30min, the optical coating fixture 3 is washed, dried and dried, and as shown in fig. 5, the surface of the optical coating fixture 3 does not have uniform state and color. After the cleaning device provided by the invention is used for cleaning, as can be seen from comparison between fig. 5 and fig. 3, the color and the state of the surface of the optical coating clamp 3 are relatively similar to the state of the unused optical coating clamp 3, which shows that most of the coating material on the surface of the optical coating clamp 3 is removed after cleaning, and only a little coating material remains in a few places.
Example 2
The method for cleaning an optical coating jig according to embodiment 1, except that:
the optical coating jig 3 used in this embodiment has the same state as the optical coating jig 3 used in embodiment 1.
NaOH, NaCl and H in electrolyte 42The mass ratio of O is 2:5: 4.
In the step (1), the optical coating clamp 3 is placed in the electrolyte 4 for soaking for 30 min.
In the step (2), the direct current power supply 1 is started firstly, the direct current power supply 1 adopts a constant voltage mode, the working time of the direct current power supply 1 is 20min, and the direct current voltage is 30V.
In the step (3), the direct current power supply 1 is kept working continuously, meanwhile, the ultrasonic oscillator 6 is started again, and the ultrasonic oscillator 6 is started to work for 20 min.
And (4) taking out the optical coating clamp 3, and washing the optical coating clamp 3 by using deionized water for 20 min.
In the step (6), the optical coating fixture 3 is dried by a vacuum drying oven, the working temperature of the vacuum drying oven is 180 ℃, and the drying time is 60 min.
Comparative example 1
The conventional immersion method was used in comparative example 1, and the optical coating jig used in this comparative example had the same state as the optical coating jig 3 used in example 2. Preparing alkaline solution, NaOH and H in the alkaline solution2And (3) placing the optical coating clamp into an alkaline solution for soaking for 30min, and then washing and drying the optical coating clamp, wherein the mass ratio of O is 2: 9. As shown in fig. 6, the surface color and state of the optical coating fixture treated by the conventional soaking method are relatively uniform, which indicates that a large portion of the coating material still remains on the surface of the optical coating fixture, and only a small portion of the surface of the optical coating fixture is soakedAnd (5) film separating material. Comparing the cleaning effect of comparative example 1 with that of example 1, it can be seen from comparing fig. 5, fig. 6 and fig. 3 that the color and state of the optical coating fixture in fig. 5 and fig. 3 are closer, which shows that the cleaning effect of example 1 is better and more thorough.
In conclusion, as can be seen from the comparison between example 1 and comparative example 1, the cleaning method provided by the present invention has the advantages of short cleaning time and higher cleaning efficiency.
Claims (9)
1. The using method of the cleaning device of the optical coating clamp is characterized in that the cleaning device comprises a direct-current power supply, an ultrasonic oscillator and a reaction vessel; one end of the positive wire is connected with the positive electrode of the direct-current power supply, and the other end of the positive wire is connected with the optical coating clamp; one end of the negative electrode lead is connected with the negative electrode of the direct current power supply, and the other end of the negative electrode lead is connected with the platinum sheet; the optical coating clamp and the platinum sheet are placed in a reaction container filled with electrolyte, the platinum sheet is partially immersed in the electrolyte, and the optical coating clamp is completely immersed in the electrolyte; the reaction vessel is placed in an ultrasonic oscillator containing deionized water;
the electrolyte comprises NaOH, NaCl and H2O, NaOH, NaCl and H in electrolyte2The mass ratio of O is (1-2) to (3-5) to (2-4);
the cleaning device also comprises a first guide rail and a second guide rail, the first guide rail and the second guide rail are arranged above the reaction container, a first sliding block is arranged on the first guide rail, and the positive wire is detachably connected with the first sliding block; a second slide block is arranged on the second guide rail, and the negative electrode lead is detachably connected with the second slide block;
the method comprises the following steps:
(1) starting a direct current power supply to carry out electrochemical corrosion on the optical coating clamp;
(2) the ultrasonic oscillator and the direct-current power supply work simultaneously to clean the optical coating clamp;
(3) washing the optical coating fixture;
(4) drying the optical coating fixture;
(5) and drying the optical coating fixture.
2. The use method of the cleaning apparatus for an optical coating jig according to claim 1, wherein the horizontal distance between the platinum sheet and the optical coating jig is 20cm to 50 cm.
3. The use method of the cleaning device for the optical coating jig according to claim 1, wherein before the step (1), the optical coating jig is placed in the electrolyte for a soaking treatment for 20min to 30 min.
4. The use method of the cleaning device for optical coating jigs according to claim 1, wherein in the step (1), the DC power supply is in a constant voltage mode, the DC power supply is operated for 5min to 20min, and the DC voltage is 10V to 30V.
5. The use method of the cleaning device for optical coating jigs according to claim 4, wherein in the step (1), the DC power supply is operated for 5min and the DC voltage is 10V.
6. The method according to claim 1, wherein in the step (2), the ultrasonic oscillator is started to operate for 5min to 20min, and the output frequency of the ultrasonic oscillator is 15 KHz.
7. The use method of the cleaning device for optical coating jigs according to claim 6, wherein in the step (2), the ultrasonic oscillator is started for 5 min.
8. The use method of the cleaning device for the optical coating fixture according to claim 1, wherein in the step (3), the optical coating fixture is rinsed with deionized water for 10min to 20 min.
9. The use method of the cleaning device for the optical coating jig according to any one of claims 1, 3 to 8, wherein in the step (5), the optical coating jig is dried by using a vacuum drying oven, the operating temperature of the vacuum drying oven is 160 ℃ to 180 ℃, and the drying time is 40min to 60 min.
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| CN201910220040.XA CN111715605B (en) | 2019-03-22 | 2019-03-22 | Cleaning device and cleaning method for optical coating clamp |
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| CN201910220040.XA CN111715605B (en) | 2019-03-22 | 2019-03-22 | Cleaning device and cleaning method for optical coating clamp |
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| CN111715605B true CN111715605B (en) | 2022-02-08 |
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| CN112605051A (en) * | 2020-10-28 | 2021-04-06 | 威科赛乐微电子股份有限公司 | Cleaning method of wafer grinding clamp |
| CN114737199B (en) * | 2022-03-28 | 2023-06-27 | 成都泰美克晶体技术有限公司 | SC wafer corrosion cleaning system |
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| CN1721580A (en) * | 2004-06-30 | 2006-01-18 | 西门子公司 | Method and apparatus for surface treatment of a component |
| CN105009258B (en) * | 2013-03-01 | 2017-04-12 | 栗田工业株式会社 | Semiconductor substrate cleaning system and method for cleaning semiconductor substrate |
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