CN111708449A - Touch module, preparation method thereof and electronic equipment - Google Patents
Touch module, preparation method thereof and electronic equipment Download PDFInfo
- Publication number
- CN111708449A CN111708449A CN202010364731.XA CN202010364731A CN111708449A CN 111708449 A CN111708449 A CN 111708449A CN 202010364731 A CN202010364731 A CN 202010364731A CN 111708449 A CN111708449 A CN 111708449A
- Authority
- CN
- China
- Prior art keywords
- light
- area
- light intensity
- touch module
- ito
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Abstract
The invention relates to a touch module, a preparation method thereof and electronic equipment, wherein the manufacturing method of the touch module comprises the following steps: s301, sequentially depositing an ITO film and a dry film on a substrate; s302, exposing and developing the dry film by using a photomask, wherein the photomask comprises a light-blocking area and a light-transmitting area, and the light-transmitting area exposes the corresponding dry film outwards from the edge of the light-blocking area by adopting gradually-changed light intensity; s303, etching the ITO film which is not protected by the dry film; s304, stripping the dry film; the ITO circuit in the touch module prepared by the manufacturing method of the touch module has a smooth slope, so that the visual effect is improved, the risk of circuit breaking is reduced, and the product yield is improved. Therefore, the touch module with good visual effect and high product yield can be conveniently and quickly obtained by the manufacturing method of the touch module.
Description
Technical Field
The invention relates to the technical field of display, in particular to a touch module, a preparation method of the touch module and electronic equipment.
Background
In the display technology field, ITO (indium tin oxide) is used as a nano indium tin metal oxide, and has excellent conductivity and transparency, and a touch module including an ITO layer is widely used in various display devices due to its high conductivity and high transparency.
The existing touch module is usually prepared by the processes of film forming, shielding, exposure, developing, etching, film removing and the like, a multilayer film layer is formed on a substrate, a photomask is arranged on the multilayer film layer, then parallel ultraviolet light of an exposure machine is used for exposure to photo-etch a dry film to form a required pattern, a developing solution is used for removing redundant patterns, then a circuit without dry film protection is etched by using an etching solution, and finally the redundant film layer is removed to obtain a complete ITO circuit, but because the photomask used for shielding the ultraviolet light uses a shading layer with uniform ultraviolet transmittance, the dry film has a break difference during developing, on one hand, the side etching is caused from the side of the break difference during etching, the side etching phenomenon is caused, the conductivity and the visual effect are influenced, on the other hand, the sheet resistance of the existing ITO (indium tin oxide) is changed from 100 omega to 70 omega to improve the conductivity of the display screen, and the ITO layer is thicker due to the reduction of the ITO sheet resistance, and the ITO circuit is more obvious due to the existence of the offset of the vertical circuit, so that the visual effect is influenced.
Disclosure of Invention
Therefore, it is necessary to provide a touch module, a manufacturing method thereof, and an electronic device for solving the problems of poor visual effect and low product yield of the existing ITO circuit.
A manufacturing method of a touch module comprises the following steps:
s301, sequentially depositing an ITO film and a dry film on a substrate;
s302, exposing and developing the dry film by using a photomask, wherein the photomask comprises a light-blocking area and a light-transmitting area, and the light-transmitting area exposes the corresponding dry film outwards from the edge of the light-blocking area by adopting gradual light intensity;
s303, etching the ITO film which is not protected by the dry film;
s304, stripping the dry film.
The technical scheme at least has the following technical effects: the method comprises the steps of S301, depositing an ITO film and a dry film on a substrate in sequence, wherein the dry film is used for protecting a part of the ITO film of an ITO circuit to be formed; exposing and developing the dry film by using a photomask S302, exposing the corresponding dry film by adopting gradually-changed light intensity from the edge of the self-light-blocking area of the light-transmitting area to the outside during exposure, gradually increasing the exposure from the edge of the self-light-blocking area of the dry film corresponding to the light-transmitting area of the photomask to the outside at the moment, gradually increasing the development amount from the edge of the self-light-blocking area to the outside, gradually increasing the thickness of the washed dry film, almost completely reserving the dry film corresponding to the light-blocking area of the photomask, forming smooth transition under the erosion of a developing solution, and washing the dry film opposite to the edge of the light-transmitting area far away from the light-blocking area to the maximum; etching liquid is added at the opening through S303 to etch the ITO thin film which is not protected by the dry film, the corresponding ITO thin film at the opening is completely etched under the action of the etching liquid, and a smoothly-transitional ITO circuit is formed during the residual etching of the smoothly-transitional dry film, so that the side etching phenomenon and the over-etching phenomenon are improved; the dry film on the ITO circuit is stripped through S304 to form a required touch module, and the ITO circuit on the touch module has a smooth slope, so that the visual effect is improved, the risk of circuit breaking is reduced, and the product yield is improved. Therefore, the touch module with good visual effect and high product yield can be conveniently and quickly obtained by the manufacturing method of the touch module.
In one embodiment, the light-transmitting regions include a first light-transmitting region, a second light-transmitting region, and a third light-transmitting region, wherein:
the first light-transmitting area is connected and arranged at the edge of the light-blocking area, and the light intensity of the first light-transmitting area is equal everywhere;
the second light transmitting area is positioned on one side, away from the light blocking area, of the first light transmitting area, and the second light transmitting area is exposed by adopting gradually changed light intensity;
the third light transmission area is located on one side, far away from the first light transmission area, of the second light transmission area, and the light intensity corresponding to the third light transmission area is larger than the maximum light intensity of the second light transmission area.
According to the technical scheme, the light intensity of different parts of the light transmission area is limited to ensure that the exposure amount of different parts is different, and smooth transition is formed under the erosion of the developing solution.
In one embodiment, the light intensity of the second light-transmitting region is 10% -90% of the light intensity of the third light-transmitting region.
Above-mentioned technical scheme is 10% -90% of the light intensity of third printing opacity district through the light intensity of injecing the second printing opacity district to the exposure energy that obtains with the relative dry film in second printing opacity district and first printing opacity district is less.
In one embodiment, the light intensity of the first light-transmitting region is 10% -20% of the light intensity of the third light-transmitting region.
According to the technical scheme, the light intensity of the first light transmission area is limited to be 10% -20% of the light intensity of the third light transmission area, so that the gradient of the ITO circuit at the part opposite to the first light transmission area is further reduced.
In one embodiment, the maximum light intensity of the second light-transmitting region is 60% -80% higher than the light intensity of the first light-transmitting region.
According to the technical scheme, the maximum light intensity of the second light transmission area is limited to be 60% -80% higher than that of the first light transmission area, so that the ultraviolet light which is allowed to transmit light in the first light transmission area is small, the exposure energy is weak, and the gradient of the ITO circuit at the part opposite to the first light transmission area is slow.
In one embodiment, the light intensity of the second light-transmitting region is gradually increased from the edge of the first light-transmitting region.
Above-mentioned technical scheme is through the outside grow gradually of the edge of the first printing opacity district of the light intensity of injecing the second printing opacity district to make along the outside direction in edge of first printing opacity district, the exposure energy that sees through the second printing opacity district increases gradually, thereby avoids forming the offset with the dry film that the second printing opacity district is relative under the erosion of developer, thereby improves the side etching phenomenon and the excessive phenomenon of etching.
In one embodiment, the sum of the widths of the first light-transmitting region and the second light-transmitting region ranges from 1um to 100um in a direction outward from the edge of the light-blocking region.
The technical scheme improves the visual effect while improving the lateral erosion phenomenon by limiting the sum of the widths of the first light transmission area and the second light transmission area to be 1um-100 um.
In one embodiment, the width of the first light-transmitting region and the width of the second light-transmitting region are the same in a direction outward from the edge of the light-blocking region.
Above-mentioned technical scheme is through injecing along the outside direction in self-blocking light zone edge, and the width in first printing opacity district is the same with the width in second printing opacity district to the setting in printing opacity district, of course, the setting mode in printing opacity district is not restricted to the width in first printing opacity district and the width in second printing opacity district is the same.
In addition, the present invention also provides a touch module prepared by the method for manufacturing a touch module, including: the ITO circuit comprises a substrate and a plurality of ITO circuits arranged on the substrate, wherein the ITO circuits are provided with a first surface, a second surface, a third surface and a fourth surface, and the ITO circuits comprise:
the first surface and the second surface are oppositely arranged and are parallel to the substrate, the first surface is positioned on one side of the second surface far away from the substrate, and the projection of the first surface on the second surface along the direction vertical to the substrate completely falls into the second surface;
the third surface and the fourth surface are respectively connected with the first surface and the second surface, and projections of the third surface and the fourth surface on the first surface along a direction perpendicular to the substrate all fall outside the first surface except for an intersection position of the third surface and the fourth surface with the first surface.
The technical scheme at least has the following technical effects: the ITO line exposed and prepared on the substrate by the method for manufacturing a touch module according to any of the above embodiments has a good visual effect and a high yield because the projection of the first surface on the second surface along the direction perpendicular to the substrate completely falls into the second surface, so that the ITO line is not easy to break, and because the projection of the third surface and the projection of the fourth surface on the first surface along the direction perpendicular to the substrate completely fall into the outer side of the first surface except the intersection position with the first surface, so that the ITO line has a smooth slope and the visual effect is improved.
In one embodiment, the third surface and the fourth surface are symmetrical with respect to the first surface, and include a vertical surface and a vertical surface, the vertical surface is perpendicular to the second surface, the vertical surface and the first surface are connected by the inclined surface, and an obtuse angle is formed between the inclined surface and the first surface.
Above-mentioned technical scheme is through injecing the constitution of third surface and fourth surface to make the ITO circuit be trapezoidal square structure, thereby can improve visual effect on the basis of guaranteeing the product yield.
In one embodiment, the cross-sectional shape of the ITO lines is trapezoidal in a direction perpendicular to the substrate.
According to the technical scheme, the cross section shape of the ITO circuit is limited, so that the ITO circuit is of a trapezoid structure, and the visual effect can be improved on the basis of ensuring the product yield.
In addition, the invention also provides an electronic device comprising the touch module according to any one of the embodiments.
The technical scheme at least has the following technical effects: because the visual effect of the touch module is better, and the product yield is higher, the electronic equipment with the touch module has better visual effect and higher product yield.
Drawings
FIG. 1 is a schematic diagram of a mask in the prior art;
FIG. 2 is a flow chart of a process for manufacturing a touch module according to the prior art;
FIG. 3 is a flowchart illustrating a method for manufacturing a touch module according to an embodiment of the present invention;
fig. 4 is a flowchart illustrating a process for manufacturing a touch module according to an embodiment of the invention;
fig. 5 is a schematic structural diagram of a touch module according to an embodiment of the invention;
fig. 6 is a schematic structural diagram of a touch module according to another embodiment of the invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1, a mask 01 provided by the prior art includes a light-blocking region 011 and a light-transmitting region 012, the ultraviolet transmittance of the light-blocking layer of the light-blocking region 011 is uniform, and can completely block ultraviolet, the light-transmitting region 012 completely transmits ultraviolet, as shown in fig. 2, in the process of manufacturing a touch module by using the mask 01 provided by the prior art, a semi-finished product of an ITO film 03 and a dry film 04 is provided on a substrate 02 in sequence, parallel ultraviolet light of an exposure machine is used for exposure, the portion opposite to the light-blocking region 011 is not exposed, the portion opposite to the light-transmitting region 012 is completely exposed, a required pattern is formed by the photo-etching dry film 02, and a surplus pattern is removed by a developing solution, a break occurs between the unexposed dry film 041 and the developing portion 042, the developing solution is eroded from the side of the break, a lateral erosion phenomenon is caused, so that the developing portion 042 is a trapezoidal structure, and the ITO film 03 portion opposite to the developing portion 042, form the offset between ITO circuit 031 that needs remain and via hole 032 when the etching, can follow offset department side etching during the etching, cause the side etching phenomenon for via hole 032 is trapezoidal structure, gets rid of unnecessary rete at last in order to obtain complete ITO circuit 031, and ITO circuit 031 is the trapezoidal structure of falling, influences electric conductive property and visual effect, and influences visual effect. In order to solve the problems, the invention sets partial light-transmitting area at the edge of the light-blocking area to weaken the exposure energy at the edge position, can form smooth dry film gradient during dry film development, and can also form ITO circuit with smooth gradient during ITO film etching, thereby improving the side etching phenomenon and improving the visual effect and the product yield.
As shown in fig. 3 and 4, the present invention provides a method for manufacturing a touch module, comprising the following steps:
s301, sequentially depositing an ITO film 300 and a dry film 400 on a substrate 200, wherein in specific setting, the substrate 200 can be a cycloolefin polymer film (COP film) with the characteristics of high transparency, low birefringence, low water absorption, high rigidity, high heat resistance, ultraviolet resistance, good water vapor tightness and the like, and can also be other base materials meeting requirements, and the deposition of the ITO film 300 and the dry film 400 can be magnetron sputtering deposition, vacuum evaporation deposition, sol-gel, chemical vapor deposition and other processes in the prior art, and is not described again;
s302, exposing and developing the dry film 400 by using the photomask 100, wherein the photomask 100 comprises a light-blocking area 110 and a light-transmitting area 120, and the light-transmitting area 120 exposes the corresponding dry film 400 outwards from the edge of the light-blocking area 110 by adopting gradual light intensity; when specifically arranged, the photomask 100 is used for an exposure process in the preparation process of the ITO circuit 310, the photomask 100 comprises a light blocking region 110 and a light transmitting region 120, the light blocking region 110 is provided with a light blocking pattern for completely blocking ultraviolet rays from transmitting during exposure, the light transmitting region 120 is provided with a light transmitting opening for completely transmitting ultraviolet rays during exposure, the photomask 100 is arranged above a substrate 200 deposited with an ITO film 300 and a dry film 400, parallel ultraviolet rays of an exposure machine are used for exposure, the light transmitting region 120 adopts gradually-changed light intensity to expose the corresponding dry film 400 from the edge of the light blocking region 110 outwards and uses a developing solution to remove the redundant dry film 400, so as to form dry film residues 410 in smooth transition, and an opening 420 between adjacent dry film residues 410 is used for etching the ITO film 300;
s303, etching the ITO film 300 which is not protected by the dry film 400, adding etching liquid during specific setting, and etching the ITO film 300 which is not protected by the dry film residue 410 by using the etching liquid to form an ITO circuit 310 and a via hole 320 which are in smooth transition;
s304, stripping the dry film 400, and stripping the dry film residue 410 on the ITO circuit 310 during the specific setup to form the desired touch module.
In the method for manufacturing the touch module, the ITO film 300 and the dry film 400 are sequentially deposited on the substrate 200 through S301, and the dry film 400 is used for protecting a part of the ITO film 300 on which the ITO circuit 310 is to be formed; exposing and developing the dry film 400 by using the photomask 100 through S302, wherein the light-transmitting area 120 exposes the corresponding dry film 400 from the edge of the light-blocking area 110 to the outside by adopting gradual light intensity during exposure, at the moment, the exposure amount of the dry film 400 corresponding to the light-transmitting area 120 of the photomask 100 from the edge of the light-blocking area 110 to the outside is gradually increased, the developing amount from the edge of the light-blocking area 110 to the outside is gradually increased, the thickness of the washed dry film 400 is gradually increased, almost all the dry film 400 corresponding to the light-blocking area 110 of the photomask 100 is remained, smooth transition is formed under the erosion of a developing solution, and the dry film 400 opposite to the edge of the light-transmitting area 120 far away from the light-blocking area 110 is washed to; etching liquid is added at the opening 420 through S303 to etch the ITO thin film 300 which is not protected by the dry film residue 410, the corresponding ITO thin film 300 at the opening 420 is completely etched under the action of the etching liquid, and the ITO circuit 310 in smooth transition is formed when the dry film residue 410 in smooth transition is etched, so that the side etching phenomenon and the over-etching phenomenon are improved; the smoothly transitional dry film residue 410 is stripped through S304 to form a desired touch module, and at this time, the ITO trace 310 on the touch module has a smooth slope, so as to improve the visual effect, reduce the risk of breaking, and improve the yield of products. Therefore, the touch module with good visual effect and high product yield can be conveniently and quickly obtained by the manufacturing method of the touch module.
As shown in fig. 4, in a preferred embodiment, the light-transmitting region 120 includes a first light-transmitting region 121, a second light-transmitting region 122, and a third light-transmitting region 123, wherein:
the first light-transmitting region 121 is connected to the edge of the light-blocking region 110 and extends to the outside of the light-blocking region 110 for a certain distance, and the light intensity of the first light-transmitting region 121 is equal everywhere;
the second light-transmitting area 122 is located on one side of the first light-transmitting area 121 far away from the light-blocking area 110, and the second light-transmitting area 122 is exposed by adopting gradual light intensity;
the third light-transmitting area 123 is located on a side of the second light-transmitting area 122 away from the first light-transmitting area 121, and the light intensity corresponding to the third light-transmitting area 123 is greater than the maximum light intensity of the second light-transmitting area 122.
In the method for manufacturing the touch module, the light intensity of different parts of the light-transmitting area 120 is limited to ensure that the exposure amount of different parts is different, and smooth transition is formed under the erosion of the developing solution. The corresponding light intensity of the first and second light transmission regions 121 and 122 is less than the corresponding light intensity of the third light transmission region 123, the exposure energy is less, only the dry film 400 of the surface layer is exposed, and only the dry film 400 of the surface layer is developed during development. The corresponding dry film 400 of the third light transmission region 123 is entirely exposed, is entirely developed upon development, is almost entirely washed away upon development, and the corresponding dry film 400 of the light blocking region 110 is not almost entirely left upon exposure development.
The first light-transmitting area 12 with fixed corresponding light intensity is close to the light-blocking area 110, only the surface layer part of the dry film 400 opposite to the first light-transmitting area 121 is washed away during development, smooth transition is formed under the erosion of the developing solution, and no break difference occurs; the second light-transmitting area 122 with gradually changed corresponding light intensity is far away from the light-blocking area 110, the dry film 400 opposite to the second light-transmitting area 122 is washed away at different thicknesses during development, an opening 420 is formed under the corrosion of a developing solution so as to facilitate subsequent etching, so that dry film residues 410 at intervals through the opening 420 can be formed, the dry film residues 410 are used for protecting an ITO circuit 310 and have smooth gradients, so that the ITO film 300 corresponding to the opening 420 is completely etched in the subsequent etching step, the risk of short circuit caused by residue is reduced, the ITO circuit 310 in smooth transition is formed during the etching of the dry film residues 410, the side etching phenomenon and the excessive etching phenomenon are improved, the visual effect is improved, the risk of circuit breaking is reduced, and the product yield is improved.
In particular arrangements, each side edge of the light blocking region 110 has a first light transmitting region 121 and second and third light transmitting regions 122 and 123, and the first light-transmitting region 121, the second light-transmitting region 122, and the third light-transmitting region 123 are sequentially arranged along the direction outward from the edge of the light-blocking region 110, the light intensity corresponding to the third light-transmitting region 123 is greater than the maximum light intensity of the second light-transmitting region 122, the corresponding light intensity of the second light-transmitting region 122 may gradually increase or decrease based on the corresponding light intensity of the first light-transmitting region 121, the corresponding light intensity of the second light-transmitting region 122 may also select a starting point greater than the corresponding light intensity of the first light-transmitting region 121 to gradually increase, the corresponding light intensity of the second light-transmitting region 122 may also select a starting point less than the corresponding light intensity of the first light-transmitting region 121 to gradually decrease, of course, the specific corresponding light intensities of the first transparent area 121, the second transparent area 122 and the third transparent area 123 are determined according to the actual condition of the touch module.
In order to further reduce the exposure energy, in a preferred embodiment, the light intensity of the second light-transmitting region 122 may be 10% to 90% of the light intensity of the third light-transmitting region 123.
In the method for manufacturing the touch module, the light intensity of the second transparent area 122 is limited to be 10% -90% of the light intensity of the third transparent area 123, so that the corresponding light intensity of the second transparent area 122 is any fixed value in the light intensity range of the third transparent area 123 with 10% -90% of the light intensity, and the corresponding light intensity of the second transparent area 122 is any threshold value in the light intensity range of the third transparent area 123 with 10% -90% of the light intensity, so that the exposure energy obtained by the dry film 400 opposite to the second transparent area 122 is small. The corresponding light intensity of the first light-transmitting region 121 may continuously vary from the corresponding light intensity of the second light-transmitting region 122, and at this time, the corresponding light intensity of the first light-transmitting region 121 is any fixed value within the light intensity range of the third light-transmitting region 123 of 10% -90%. When the touch module is specifically arranged, the relative proportion of the light intensity corresponding to the first light-transmitting region 121 to the light intensity of the third light-transmitting region 123 may be 10%, 20% or 30%, and the relative proportion of the light intensity corresponding to the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may be 30% -70%, 30% -40%, 40% -60% or 50% -55%, and certainly, the specific corresponding light intensities of the first light-transmitting region 121 and the second light-transmitting region 122 are determined according to the actual situation of the touch module.
To further reduce the slope of the dry film residue 410 and the slope of the ITO line 310, more specifically, the corresponding light intensity of the first light-transmitting region 121 may be 10% to 20% of the light intensity of the third light-transmitting region 123.
In the method for manufacturing the touch module, the relative proportion of the corresponding light intensity of the first light-transmitting area 121 to the light intensity of the third light-transmitting area 123 is limited to be any value between 10% and 20%, so as to further reduce the gradient of the ITO line 310. When the touch control module is specifically arranged, the relative proportion of the corresponding light intensity of the first light-transmitting area 121 to the light intensity of the third light-transmitting area 123 may be 10%, 11%, 12%, 13%, 14%, 15%, 16%, 17%, 18%, 19%, 20%, and certainly, the selection range of the relative proportion of the corresponding light intensity of the first light-transmitting area 121 to the light intensity of the third light-transmitting area 123 may also be 10% -15%, 15% -20%, or 20% -25%, and the specific corresponding light intensity of the first light-transmitting area 121 is determined according to the actual situation of the touch control module, and the slope of the ITO line 310 may be adjusted by adjusting the relative proportion of the corresponding light intensity of the first light-transmitting area 121 to the light intensity of the third light-transmitting area 123, so as to further improve the visual.
To further reduce the slope of the dry film residue 410 and the slope of the ITO line 310, in particular, the maximum corresponding light intensity of the second light-transmitting region 122 is 60-80% higher than the corresponding light intensity of the first light-transmitting region 121.
In the method for manufacturing the touch module, the maximum corresponding light intensity of the second transparent area 122 is limited to be 60% -80% higher than the corresponding light intensity of the first transparent area 121, so that the corresponding light intensity of the first transparent area 121 is smaller, the exposure energy is weaker, and the gradient of the ITO line 310 at the portion opposite to the first transparent area 121 is slower. In particular arrangements, the maximum corresponding light intensity of the second light-transmitting region 122 may be 60%, 65%, 70%, 75%, 80%, etc. higher than the corresponding light intensity of the first light-transmitting region 121. For example, the corresponding light intensity of the first light-transmitting region 121 may be 10% of the light intensity of the third light-transmitting region 123, the relative proportion of the corresponding light intensity of the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may be 10% to 90%, the maximum corresponding light intensity of the second light-transmitting region 122 may be 70% to 90% of the light intensity of the third light-transmitting region 123, and at this time, the maximum corresponding light intensity of the second light-transmitting region 122 may be 70% of the light intensity of the third light-transmitting region 123, 75% of the light intensity of the third light-transmitting region 123, 80% of the light intensity of the third light-transmitting region 123, 85% of the light intensity of the third light-transmitting region 123, and 90% of the light intensity; the corresponding light intensity of the first light-transmitting region 121 may also be 15% of the light intensity of the third light-transmitting region 123, the relative proportion of the corresponding light intensity of the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may also be 15% -80%, the relative proportion of the maximum corresponding light intensity of the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may be 75% -90%, and at this time, the relative proportion of the maximum corresponding light intensity of the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may be 75%, 80%, 85%, 90%; the relative proportion of the corresponding light intensity of the first light-transmitting region 121 to the light intensity of the third light-transmitting region 123 may be 20%, the relative proportion of the corresponding light intensity of the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may be 20% -90%, the relative proportion of the maximum corresponding light intensity of the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may be 80% -90%, at this time, the relative proportion of the maximum corresponding light intensity of the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may be 80%, 85%, 90%, and the specific corresponding light intensities of the first light-transmitting region 121 and the second light-transmitting region 122 are determined according to the actual situation of the.
In order to further improve the undercut phenomenon and the over-etching phenomenon, in a preferred embodiment, the light intensity of the second light-transmitting region 122 may gradually increase from the edge of the first light-transmitting region 121 outwards.
In the method for manufacturing the touch module, the light intensity of the first transparent area 121 is gradually increased from the edge of the second transparent area 122, so that the exposure energy passing through the second transparent area 122 is gradually increased along the outward direction of the edge of the first transparent area 121. In a specific arrangement, the relative proportion of the light intensity of the second light-transmitting region 122 to the light intensity of the third light-transmitting region 123 may be 10% -70%, 20% -80%, 30% -90%, and the corresponding light intensities of the second light-transmitting region 122 sequentially increase from the edge of the first light-transmitting region 121 to the outside, so that the exposure energy transmitted through the second light-transmitting region 122 sequentially increases, and the unexposed dry film 400 with sequentially reduced thickness is formed to counteract the erosion of the developing solution, thereby preventing the dry film 400 opposite to the second light-transmitting region 122 from forming a break under the erosion of the developing solution, and thus improving the occurrence of the side etching phenomenon and the over-etching phenomenon.
In order to improve the visual effect while improving the undercut phenomenon, a preferred embodiment is one in which the sum of the widths of the first and second light-transmitting regions 121 and 122 ranges from 1um to 100um in a direction outward from the edge of the light-blocking region 110.
In the method for manufacturing the touch module, the sum of the widths of the first light-transmitting area 121 and the second light-transmitting area 122 ranges from 1um to 100um by limiting the outward direction from the edge of the light-blocking area 110, so as to improve the lateral erosion phenomenon and improve the visual effect. In a specific setting, along a direction outward from an edge of the light blocking area 110, a sum of widths of the first and second light transmissive areas 121 and 122 may be 1um, 10um, 20um, 30um, 40um, 50um, 60um, 70um, 80um, 90um, and 100um, when a sum of widths of the first and second light transmissive areas 121 and 122 is 60um, the width of the first light transmissive area 121 may be 10um, the width of the second light transmissive area 122 is 50um, the width of the first light transmissive area 121 may be 20um, the width of the second light transmissive area 122 is 40um, the width of the first light transmissive area 121 may be 35um, the width of the second light transmissive area 122 is 25um, and a sum of widths of the first and second light transmissive areas 121 and 122, a specific numerical value of the width of the first light transmissive area 121 and the width of the second light transmissive area 122 may be determined according to actual conditions of the touch module and the touch module by adjusting widths of the first and second light transmissive areas 121 and 122, and a mask, The width of the first light-transmitting area 121 and the width of the second light-transmitting area 122 can adjust the gradient and the line width of the ITO line 310 and the distance between adjacent ITO lines 310, thereby further improving the visual effect.
To facilitate the disposition of the mask 100, specifically, the width of the first light-transmitting region 121 and the width of the second light-transmitting region 122 are the same in a direction outward from the edge of the light-blocking region 110.
In the above-mentioned method for manufacturing a touch module, by defining the direction outward from the edge of the light-blocking area 110, the width of the first light-transmitting area 121 and the width of the second light-transmitting area 122 are the same, so as to facilitate the setting of the mask 100, when specifically setting, for example, in the direction outward from the edge of the light-blocking area 110, the width of the first light-transmitting area 121 may be 10um, the width of the second light-transmitting area 122 is 10um, for example, the width of the first light-transmitting area 121 may also be 30um, the width of the second light-transmitting area 122 may also be 30um, for example, the width of the first light-transmitting area 121 may also be 50um, and the width of the second light-transmitting area 122 is 50um, of course, the setting manner of the light-transmitting area 120 is not limited to the width of the first light-transmitting area 121 being the same as the width of the second light-transmitting area 122, and the width of the first light-transmitting area 121 and the width of the second light-transmitting area, for example, the width of the first light-transmitting region 121 is greater than the width of the second light-transmitting region 122 in the direction outward from the edge of the light-blocking region 110, the width of the first light-transmitting region 121 may be 10um and the width of the second light-transmitting region 122 may be 20um in the direction outward from the edge of the light-blocking region 110, and for example, the width of the first light-transmitting region 121 is less than the width of the second light-transmitting region 122 in the direction outward from the edge of the light-blocking region 110, the width of the first light-transmitting region 121 may be 20um and the width of the second light-transmitting region 122 may be 10um in the direction outward from the edge of the light-blocking region 110.
In addition, as shown in fig. 5 and fig. 6, the present invention further provides a touch module manufactured by the method for manufacturing a touch module, including: the ITO wiring structure includes a substrate 200 and a plurality of ITO wirings 310 disposed on the substrate 200, wherein when the ITO wiring structure is specifically disposed, the substrate 200 may be a cyclic olefin polymer film (COP film) or other substrate satisfying requirements, the ITO wirings 310 may be formed by deposition, exposure, development, etching, and other processes, and the ITO wirings 310 have a certain distance therebetween and are distributed in an array. The ITO line 310 has a first surface 311, a second surface 312, a third surface 313 and a fourth surface 314, wherein:
the first surface 311 and the second surface 312 are oppositely arranged, the first surface 311 and the second surface 312 are parallel to the substrate 200, the first surface 311 is positioned on one side of the second surface 312 far away from the substrate 200, and the projection of the first surface 311 on the second surface 312 along the direction vertical to the substrate 200 completely falls into the second surface 312, so that the area of one side of the ITO line 310 close to the substrate 200 is larger than that of one side of the ITO line 310 far away from the substrate 200;
the third surface 313 and the fourth surface 314 respectively connect the first surface 311 and the second surface 312, and projections of the third surface 313 and the fourth surface 314 on the first surface 311 along a direction perpendicular to the substrate all fall outside the first surface 311 except an intersection position with the first surface 311, so that the third surface 313 and the fourth surface 314 gradually expand to the outside of the first surface 311 when approaching the substrate 200.
In the touch module, the projection of the first surface 311 on the second surface 312 along the direction perpendicular to the substrate 200 of the ITO trace 310 prepared by exposing the mask 100 on the substrate 200 completely falls into the second surface 312, so that a side area of the ITO trace 310 close to the substrate is large, an open circuit is not easy to occur, and the stability is good, and the projection of the third surface 313 and the fourth surface 314 on the first surface 311 along the direction perpendicular to the substrate 200 except the intersection position with the first surface 311 completely falls into the outer side of the first surface 311, so that the ITO trace 310 has a smooth slope, the visual effect is improved, and therefore, the touch module has a good visual effect and a high product yield.
In order to ensure that the touch module can improve the visual effect on the basis of ensuring the product yield, as shown in fig. 5, in a preferred embodiment, the third surface 313 and the fourth surface 314 are symmetrical with respect to the first surface 312, and the third surface 313 includes an inclined surface 315 and a vertical surface 316, the vertical surface 316 is perpendicular to the second surface 312, the inclined surface 315 connects the vertical surface and the first surface, and the inclined surface 315 and the first surface 311 form an obtuse angle.
In the touch module, the ITO line 310 has a trapezoid structure by defining the third surface 313 and the fourth surface 314, so that the visual effect can be improved on the basis of ensuring the yield of products. In a specific arrangement, the third surface 313 and the fourth surface 314 are symmetrical with respect to the first surface 312, so that the ITO line 310 has a symmetrical structure, and of course, the cross-sectional shape of the ITO line 310 along the direction perpendicular to the substrate 200 may be a trapezoid, so that the ITO line 310 has a trapezoid structure, and at this time, the trapezoid may have an isosceles trapezoid, a right trapezoid, or the like, and of course, the cross-sectional shape of the ITO line 310 along the direction perpendicular to the substrate 200 is not limited to a trapezoid, and may have other structures, for example, the third surface may be an arc-shaped surface protruding toward the outer side of the ITO line 310, and the specific structure of the ITO line 310 is determined according to the actual situation and the application scenario of the touch module.
In addition, the invention also provides an electronic device comprising the touch module of any one of the above embodiments. The electronic equipment can be a notebook computer, a mobile phone, a vehicle-mounted computer or an ipad and the like.
In the electronic equipment, the visual effect of the touch module is better, and the product yield is higher, so that the electronic equipment with the touch module has the advantages of better visual effect and higher product yield.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (12)
1. A manufacturing method of a touch module is characterized by comprising the following steps:
s301, sequentially depositing an ITO film and a dry film on a substrate;
s302, exposing and developing the dry film by using a photomask, wherein the photomask comprises a light-blocking area and a light-transmitting area, and the light-transmitting area exposes the corresponding dry film outwards from the edge of the light-blocking area by adopting gradual light intensity;
s303, etching the ITO film which is not protected by the dry film;
s304, stripping the dry film.
2. The method of claim 1, wherein the transparent regions comprise a first transparent region, a second transparent region and a third transparent region, wherein:
the first light-transmitting area is connected and arranged at the edge of the light-blocking area, and the light intensity of the first light-transmitting area is equal everywhere;
the second light transmitting area is positioned on one side, away from the light blocking area, of the first light transmitting area, and the second light transmitting area is exposed by adopting gradually changed light intensity;
the third light transmission area is located on one side, far away from the first light transmission area, of the second light transmission area, and the light intensity corresponding to the third light transmission area is larger than the maximum light intensity of the second light transmission area.
3. The method for manufacturing the touch module according to claim 2, wherein the light intensity of the second transparent area is 10% -90% of the light intensity of the third transparent area.
4. The method for manufacturing the touch module according to claim 2, wherein the light intensity of the first transparent area is 10% -20% of the light intensity of the third transparent area.
5. The method for manufacturing the touch module according to claim 4, wherein the maximum light intensity of the second transparent area is 60% -80% higher than the light intensity of the first transparent area.
6. The method of claim 2, wherein the light intensity of the second transparent region gradually increases from the edge of the first transparent region.
7. The method of claim 2, wherein the sum of the widths of the first transparent area and the second transparent area is in a range of 1um to 100um in a direction outward from the edge of the light blocking area.
8. The method of claim 7, wherein the width of the first transparent area is the same as the width of the second transparent area along a direction outward from the edge of the light blocking area.
9. A touch module manufactured by the method for manufacturing a touch module according to any one of claims 1 to 8, comprising: the ITO circuit comprises a substrate and a plurality of ITO circuits arranged on the substrate, wherein the ITO circuits are provided with a first surface, a second surface, a third surface and a fourth surface, and the ITO circuits comprise:
the first surface and the second surface are oppositely arranged and are parallel to the substrate, the first surface is positioned on one side of the second surface far away from the substrate, and the projection of the first surface on the second surface along the direction vertical to the substrate completely falls into the second surface;
the third surface and the fourth surface are respectively connected with the first surface and the second surface, and projections of the third surface and the fourth surface on the first surface along a direction perpendicular to the substrate all fall outside the first surface except for an intersection position of the third surface and the fourth surface with the first surface.
10. The touch module of claim 9, wherein the third surface and the fourth surface are symmetrical with respect to the first surface and comprise an inclined surface and a vertical surface, the vertical surface is perpendicular to the second surface, the inclined surface connects the vertical surface and the first surface, and the inclined surface and the first surface form an obtuse angle.
11. The touch module of claim 9, wherein the ITO traces have a trapezoidal cross-sectional shape along a direction perpendicular to the substrate.
12. An electronic device comprising the touch module according to any one of claims 9-11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010364731.XA CN111708449A (en) | 2020-04-30 | 2020-04-30 | Touch module, preparation method thereof and electronic equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010364731.XA CN111708449A (en) | 2020-04-30 | 2020-04-30 | Touch module, preparation method thereof and electronic equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111708449A true CN111708449A (en) | 2020-09-25 |
Family
ID=72536597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010364731.XA Withdrawn CN111708449A (en) | 2020-04-30 | 2020-04-30 | Touch module, preparation method thereof and electronic equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111708449A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104062794A (en) * | 2014-06-10 | 2014-09-24 | 深圳市华星光电技术有限公司 | Mask plate, manufacturing method of ultraviolet mask plate and manufacturing method of array substrate |
| CN105404093A (en) * | 2016-01-06 | 2016-03-16 | 京东方科技集团股份有限公司 | Mask plate, display substrate and preparation method thereof, display panel and display device |
| CN105514033A (en) * | 2016-01-12 | 2016-04-20 | 武汉华星光电技术有限公司 | Manufacturing method for array substrate |
| CN105655289A (en) * | 2016-01-04 | 2016-06-08 | 京东方科技集团股份有限公司 | Array substrate, manufacturing method thereof and display device |
| US9377900B1 (en) * | 2012-06-18 | 2016-06-28 | Amazon Technologies, Inc. | Optical touch sensor |
| CN106681101A (en) * | 2017-01-05 | 2017-05-17 | 京东方科技集团股份有限公司 | Gray-scale mask, as well as display substrate and exposure device formed by utilizing same |
| CN106933023A (en) * | 2017-05-09 | 2017-07-07 | 深圳市华星光电技术有限公司 | A kind of preparation method of light shield and substrate of glass |
-
2020
- 2020-04-30 CN CN202010364731.XA patent/CN111708449A/en not_active Withdrawn
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9377900B1 (en) * | 2012-06-18 | 2016-06-28 | Amazon Technologies, Inc. | Optical touch sensor |
| CN104062794A (en) * | 2014-06-10 | 2014-09-24 | 深圳市华星光电技术有限公司 | Mask plate, manufacturing method of ultraviolet mask plate and manufacturing method of array substrate |
| CN105655289A (en) * | 2016-01-04 | 2016-06-08 | 京东方科技集团股份有限公司 | Array substrate, manufacturing method thereof and display device |
| CN105404093A (en) * | 2016-01-06 | 2016-03-16 | 京东方科技集团股份有限公司 | Mask plate, display substrate and preparation method thereof, display panel and display device |
| CN105514033A (en) * | 2016-01-12 | 2016-04-20 | 武汉华星光电技术有限公司 | Manufacturing method for array substrate |
| CN106681101A (en) * | 2017-01-05 | 2017-05-17 | 京东方科技集团股份有限公司 | Gray-scale mask, as well as display substrate and exposure device formed by utilizing same |
| CN106933023A (en) * | 2017-05-09 | 2017-07-07 | 深圳市华星光电技术有限公司 | A kind of preparation method of light shield and substrate of glass |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106775066B (en) | Touch screen, manufacturing method thereof and touch display device | |
| CN106468972B (en) | Touch substrate, manufacturing method thereof and touch device | |
| KR20200113174A (en) | Touch panel and manufacturing method thereof | |
| US10067612B2 (en) | One glass solution touch panel and manufacturing method thereof and touch panel display | |
| US20170160829A1 (en) | Touch Screen, Fabrication Method Thereof and Display Device | |
| US20130241871A1 (en) | Touch panel and manufacturing method thereof | |
| US20180157082A1 (en) | Touch panel and method of manufacturing the same | |
| TWI440965B (en) | Photomask, manufacturing method of conducting wiring of flat display panel and wiring structure of flat display panel | |
| TW201314536A (en) | Touch display devices and formation methods thereof | |
| CN216052544U (en) | Array substrate and display device | |
| WO2019001285A1 (en) | Array substrate and preparation method thereof and display device | |
| JP2011086084A (en) | Touch panel sensor, matrix type electrode substrate for producing the same, and method of producing the same | |
| WO2019179339A1 (en) | Array substrate and manufacturing method therefor, display panel and display device | |
| US11847276B2 (en) | Touch substrate and touch display device | |
| US11023061B2 (en) | Panel with multiple conductive patterns | |
| KR101708158B1 (en) | Mask plate and manufacturing method of array substrate | |
| CN109634469B (en) | Display module, manufacturing method thereof and touch display device | |
| US20190012025A1 (en) | Touch Screen, Display Panel, and Display Device | |
| CN104777930A (en) | OGS (One Glass Solution) touch screen and manufacturing method thereof, OGS touch device | |
| US11112913B2 (en) | Touch screen, manufacturing method thereof, touch display panel, and display device | |
| CN111708449A (en) | Touch module, preparation method thereof and electronic equipment | |
| CN111562717A (en) | Photomask, touch module and preparation method thereof, and electronic equipment | |
| US11327401B2 (en) | Display substrate, method for preparing the same, and display device | |
| CN203204597U (en) | Capacitor touch screen | |
| KR20050096815A (en) | Liquid crystal display substrate, method of manufacturing the same, and liquid crystal display device having the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: Room 422, 4th floor, building 1, Linrui youth apartment, 955 rulehu street, Airport Economic Zone, Nanchang City, Jiangxi Province 330000 Applicant after: Jiangxi zhanyao Microelectronics Co.,Ltd. Address before: 330100, two / F, office building, Nanchang, Jiangxi. Applicant before: NANCHAGN OFILM DISPLAY TECHNOLOGY Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20220505 Address after: 330029 room 1010, second floor, building 26, No. 8, zhouxindongyang Road, Xinqi, chuangcheng, traditional Chinese medicine, directly administered District, Ganjiang new area, Nanchang City, Jiangxi Province Applicant after: Jiangxi Zhuoxin Microelectronics Co.,Ltd. Address before: Room 422, 4th floor, building 1, Linrui youth apartment, 955 rulehu street, Airport Economic Zone, Nanchang City, Jiangxi Province 330000 Applicant before: Jiangxi zhanyao Microelectronics Co.,Ltd. |
|
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20200925 |