CN111705303A - Application and device of differential aerodynamic design in gas cluster beam source - Google Patents
Application and device of differential aerodynamic design in gas cluster beam source Download PDFInfo
- Publication number
- CN111705303A CN111705303A CN202010581263.1A CN202010581263A CN111705303A CN 111705303 A CN111705303 A CN 111705303A CN 202010581263 A CN202010581263 A CN 202010581263A CN 111705303 A CN111705303 A CN 111705303A
- Authority
- CN
- China
- Prior art keywords
- semi
- tesla
- immovable
- valve
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
Abstract
A differential aerodynamic design is applied to a gas cluster beam source, and a Tesla type immovable micro valve suitable for an outlet of a gas phase condensation cluster source condensation cavity is used; the low-resistance directivity of the unidirectional flow of the air flow from the Tesla immovable micro valve is utilized, and the high air pressure of the condensation cavity and the low background air pressure of the vacuum cavity are maintained under the condition of a low vacuum pump set and the flow of the condensed air; the low resistance direction of the Tesla immovable micro valve and the direction of the cluster source from the high-pressure condensation cavity to the low-pressure vacuum cavity are reversed, so that gas in the condensation cavity is difficult to enter the vacuum cavity; meanwhile, the number of semi-ring tracks communicated with the straight track interface in the Tesla immovable microvalve is controlled, and the size of one-way flow resistance of the Tesla immovable microvalve is adjusted; the high-pressure condensation chamber enables more efficient cluster and nanoparticle synthesis.
Description
Technical Field
The invention relates to a novel differential aerodynamic design, in particular to an effective separation design of high-low air pressure areas for a gas-phase condensed cluster source.
Background
Different vacuum degrees are realized between the traditional condensation cavity and the vacuum device based on a differential vacuum systemAnd (4) environment. In a typical condensation chamber 101pa, and the vacuum system is 10-4pa, of the order of magnitude. However, further improvement of the vacuum degree between the two stages of the differential system requires a huge pumping speed of the vacuum pump, which is difficult to satisfy for a general vacuum pump set, and a pump set meeting the requirements is expensive. Therefore, the differential vacuum system based on aerodynamics is designed, the air pressure of the condensation cavity with low vacuum degree is reduced to diffuse to the high vacuum cavity, and the differential vacuum system has important significance. The inventor of the present invention has previously applied various patents, such as CN2016106226871, a method and apparatus for nano-processing of atomic cluster beam for organisms. The differential air pumping system based on aerodynamic design has very important effect on obtaining high vacuum degree difference and reducing the requirement of the vacuum system on a pump set.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a differential aerodynamic design method for a gas cluster beam source, especially a method for effectively maintaining two different vacuum levels in a differential vacuum system, for effectively separating high and low pressure regions of a gas-phase condensed cluster source, and a differential aerodynamic design applied to a gas cluster beam source and a device thereof.
In order to achieve the purpose, the invention adopts the following technical scheme: a differential aerodynamic design is applied to a gas cluster beam source and a device thereof, and a Tesla type immovable micro valve which is suitable for the outlet of a gas-phase condensation cluster source condensation cavity is used; the high air pressure in the condensation cavity is difficult to enter a low-pressure vacuum system in an aerodynamic mode, and the extremely high air pressure of the condensation cavity and the extremely low background air pressure of the vacuum cavity are maintained under the condition of a low vacuum pump set and the flow of the condensed air by utilizing the low-resistance directivity of unidirectional flow of air flow from the Tesla immovable micro valve. A high-pressure condensation chamber may allow for more efficient cluster and nanoparticle synthesis.
The low resistance direction of the Tesla immovable micro valve and the direction of the cluster source from the high-pressure condensation cavity to the low-pressure vacuum cavity are reversed, so that gas in the condensation cavity is difficult to enter the vacuum cavity; and meanwhile, the number of semi-ring tracks communicated with the straight track interface in the Tesla immovable micro-valve is controlled, and the one-way flow resistance of the Tesla immovable micro-valve is adjusted.
Evacuating the air in the vacuum chamber to a medium-high vacuum environment using a vacuum pump (<1E-6Pa), and introducing condensing gas into the condensing cavity to make the gas pressure reach-102pa。
Starting a material source to generate cluster beams; the gas flow and proportion in the condensation cavity are adjusted, and the number of semi-ring tracks communicated with the Tesla immovable micro-valves is adjusted to control the air pressure at the low-pressure end of the condensation cavity, so that the beam flow yield is highest.
Using a Tesla type immovable micro valve suitable for the outlet of the gas phase condensation cluster source condensation cavity; the low-resistance directivity of the unidirectional flow of the air flow from the Tesla immovable micro valve is utilized, and the high air pressure of the condensation cavity and the low background air pressure of the vacuum cavity are maintained under the condition of a low vacuum pump set and the flow of the condensed air; the low resistance direction of the Tesla immovable micro valve and the direction of the cluster source from the high-pressure condensation cavity to the low-pressure vacuum cavity are reversed, so that gas in the condensation cavity is difficult to enter the vacuum cavity; meanwhile, the number of semi-ring tracks communicated with the straight track interface in the Tesla immovable microvalve is controlled, and the size of one-way flow resistance of the Tesla immovable microvalve is adjusted; the high-pressure condensation chamber enables more efficient cluster and nanoparticle synthesis.
The vacuum pump set is provided with a molecular pump mechanical pump: obtaining a high vacuum cavity environment; condensation cavity: the condensation cavity is a high-pressure part in the differential pumping system and is used for condensation growth of the nano particles; the straight rail of the Tesla immovable micro valve is a channel for high-pressure airflow in the condensation cavity to flow out;
the Tesla immovable micro valve semi-ring track is connected with the straight track; the straight track is provided with a plurality of stages of communicating valves on a straight line, the vertical plane of each stage of communicating valve (capable of being cut) is controlled by an aperture structure, the on-off and the opening degree of each stage of communicating valve are controlled by an external multi-path controller, a plurality of semi-ring tracks are arranged on the rear side of each stage of communicating valve of the straight track, the inlet and the outlet of the semi-ring tracks are arranged on the column wall of the columnar straight track, the planes of the semi-ring tracks and the straight track form an angle of 30-75 degrees, and high-pressure air flow passing through each stage of communicating valve of the straight track is diffused to a large space, namely to the semi-ring tracks on the; the straight track and the semi-ring track external control type communication valve can control the number of the semi-ring tracks communicated with the straight track, and play a role in controlling the flow resistance of the whole Tesla immovable micro valve;
the external multi-channel controller is arranged outside the vacuum chamber, enters the vacuum chamber through the electrode flange, is connected with the semi-ring track external control type communicating valve through the straight track and controls the communicating valve.
The communicating valve is an aperture type communicating valve; the opening and closing of the electrode flange are controlled by the electrode flange. The straight track is provided with more than five-stage communicating valves, and after the communicating valves 6 are fully or partially opened, the flow of the semi-ring track obtains reverse flow resistance, so that beam intensity with good collecting effect can be obtained.
The invention discloses a differential aerodynamically designed gas cluster beam source device, which comprises a molecular pump 1, a mechanical pump 2, a condensation cavity 3, a Tesla immovable microvalve straight track 4, a Tesla immovable microvalve semi-ring track 5, a straight track and semi-ring track external control type communication valve 6 and an external multi-channel controller 7, wherein the molecular pump is connected with the mechanical pump 2 through a pipeline; a Tesla immovable micro valve which is composed of a Tesla immovable micro valve straight track 4, a Tesla immovable micro valve semi-ring track 5, a straight track and a semi-ring track external control type communicating valve 6 is arranged at the outlet of the condensation cavity, and an external multi-channel controller 7 is connected to the external control type communicating valve 6; the structure of the straight rail 4, the semi-ring rail 5 and the external control type communicating valve 6 of the straight rail and the semi-ring rail of the Tesla immovable micro valve is that; the controller 6 for communicating the straight track with the semi-ring track has the structure that the external multi-channel controller 7 electrically controls the number of communicated straight tracks and semi-ring track external control type communicating valves 6.
The Tesla immovable micro valve which is suitable for the condensation cavity has the function equal to that of a one-way valve, so that the low resistance flow of the air flow from one port to the other port is realized, and the reverse flow is extremely difficult; high air pressure in the condensation cavity is realized, and the consumption of condensed gas and the requirement on the pumping speed of the vacuum pump set are reduced; meanwhile, the number of the semi-ring tracks communicated with the straight track of the Tesla immovable microvalve in the valve is controlled to control the flow resistance of gas in the Tesla immovable microvalve, so that different condensation pressures are obtained, and the semi-ring tracks are important components for mass production of cluster sources with high condensation efficiency.
The Tesla immovable micro valve semi-ring track is connected with the straight track; the straight track is provided with a plurality of stages of communicating valves on a straight line, the vertical plane of each stage of communicating valve (capable of being cut) is controlled by an aperture structure, the on-off and the opening degree of each stage of communicating valve are controlled by an external multi-path controller, a plurality of semi-ring tracks are arranged on the rear side of each stage of communicating valve of the straight track, the inlet and the outlet of the semi-ring tracks are arranged on the column wall of the columnar straight track, the planes of the semi-ring tracks and the straight track form an angle of 30-75 degrees, and high-pressure air flow passing through each stage of communicating valve of the straight track is diffused to a large space, namely to the semi-ring tracks on the; the straight track and the semi-ring track external control type communication valve can control the number of the semi-ring tracks communicated with the straight track, and play a role in controlling the flow resistance of the whole Tesla immovable micro valve;
the straight track is provided with more than five stages of communicating valves, the high-pressure airflow drives the cluster beam to be deposited at the tail end of the straight track or at the near tail end of the straight track, and a collecting vessel is arranged near the last stage of communicating valve when the near tail end is collected.
Tesla microvalves utilize friction rather than moving parts to inhibit backflow. The design can be optimized by dispensing a specific amount of material in the molding area with the goal of maximizing the pressure drop ratio of forward and backward flow of the device.
The method comprises the following operation steps:
1. replacing a nozle of a traditional nozle-skinner system for obtaining a differential vacuum system with a Tesla non-movable micro valve;
2. and opening the vacuum cavity, and detecting the optimal vacuum degree in a unidirectional mode with the number of the semi-ring tracks being 0.
3. And starting a material source to generate an atomic-scale material beam. And adjusting the number of communicated semi-ring tracks of the Tesla immovable micro valve and the flow of condensed gas to obtain the optimal beam intensity.
4. And maintaining proper air pressure by using a Tesla immovable micro valve to perform cluster beam deposition.
The invention relates to an aerodynamically designed Tesla non-movable micro-valve device for gas cluster beam source difference according to the method, which comprises the following structures: the device comprises a molecular pump 1, a mechanical pump 2, a condensation cavity 3, a Tesla immovable microvalve straight track 4, a Tesla immovable microvalve semi-ring track 5, a straight track and semi-ring track external control type communication valve 6 and an external multi-channel controller 7.
The external multi-path controller 7 controls the number of the communicated straight tracks and the semi-ring track external control type communicating valves 6 through electric control, and further controls the number of the semi-ring tracks communicated with the straight tracks. The gas flow resistance of the tesla valve is adjusted.
Due to the adoption of the technical scheme, the invention has the following beneficial effects:
1. compared with the traditional non-slider-skimmer differential vacuum system, the differential vacuum aerodynamic design based on the Tesla valve can obtain the same high air pressure under the conditions of low air flow and low air pumping efficiency of the vacuum pump set. Or to achieve higher high air pressure at higher vacuum pump set pumping efficiency.
2. The novel differential vacuum aerodynamic design is applied to the outlet of the condensation cavity of the gas-phase condensation cluster source, so that the gas condensation efficiency in the condensation cavity can be greatly improved, the consumption of condensed gas is reduced, and the beam output is greatly improved.
3. In the conventional non-slider-skinner differential system, the vacuum degree of the low-pressure part is destroyed under the condition that the air pressure of the high-pressure part is too high and the air flow is too large. Compared with the traditional method based on the differential vacuum aerodynamic design of the Tesla valve, the method can avoid the great damage to the vacuum degree of the low-pressure part under the same high pressure, and has effective aerodynamic isolation.
The present invention is not but an aerodynamically based differential vacuum design; the differential vacuum aerodynamic design based on the Tesla non-movable micro valve is also an effective device for obtaining mass production nanocluster beams. The invention also relates to a device for improving the air pressure and the condensation efficiency of the vacuum condensation cavity. Is a technical method for preparing cluster beams in large quantities by a physical method. And a technical method for compensating the insufficient pumping speed of the vacuum pump set.
Drawings
FIG. 1 is a schematic diagram of an aerodynamic design apparatus assembly for a tunable Tesla non-movable microvalve differential of the present invention.
Fig. 2 is a schematic front view of an iris type communication valve of the present invention. In the center is a variable diameter through hole, similar to a camera iris shutter.
Fig. 3 is a schematic flow control diagram of the present invention.
FIG. 4 is a schematic diagram of an aerodynamic design device assembly with adjustable Tesla immovable microvalve differentials and a single Tesla valve configuration.
Detailed Description
The invention is described in detail below with reference to the figures and examples.
As shown in fig. 1, the present invention includes: the differential vacuum pump group comprises a molecular pump 1 and a mechanical pump 2, wherein an inlet provided by the differential vacuum pump group is drawn in the figure; a condensation cavity (low-pressure vacuum cavity) 3, a Tesla immovable microvalve straight track 4, a Tesla immovable microvalve semi-ring track 5, a straight track and semi-ring track external control type (aperture type) communication valve 6 and an external multi-channel controller 7. The outlet of the condensation chamber and the high pressure chamber 8. High pressure air flow 9, reverse flow resistance 10. The annular cavity flow 11.
Vacuum pump set of molecular pump mechanical pump: obtaining a high vacuum cavity environment.
Condensation cavity: the condensation cavity is a high-pressure part in the differential pumping system and can be used for condensation growth of the nano particles.
The straight track of the Tesla immovable micro valve is a main channel for high-pressure airflow in the condensation cavity to flow out.
The Tesla immovable micro-valve semi-ring track is connected with the straight track, so that a large flow resistance is generated for airflow in one direction, and the reverse flow resistance is almost unchanged (but the reverse flow resistance can be changed by controlling the on-off and the opening degree of each stage of communication valve). And functions to provide one-way flow resistance. The straight track is provided with a plurality of stages of communicating valves 6 on a straight line, the vertical plane of each stage of communicating valve (capable of being cut) is controlled by an aperture structure, the on-off and the opening degree of each stage of communicating valve are controlled by an external multipath controller 7, a plurality of semi-ring tracks are arranged on the rear side of each stage of communicating valve of the straight track, the inlet and the outlet of the semi-ring tracks are arranged on the column wall of the columnar straight track, the plane of the semi-ring tracks and the straight track form an angle of 30-75 degrees, and high-pressure air flow 9 passing through each stage of communicating valve of the straight track is diffused to a large space, namely to the semi-ring tracks on the rear side; the straight track and the semi-ring track external control type communicating valve can control the number of the semi-ring tracks communicated on the straight track, and play a role in controlling the flow resistance of the whole Tesla immovable micro valve.
The external multi-channel controller 7 is arranged outside the vacuum chamber, enters the vacuum chamber through the electrode flange, is connected with the semi-ring track external control type communicating valve 6 through the straight track and controls the communicating valve. The communicating valve is an aperture type communicating valve. The electrode flange controls the opening and closing of the switch. In fig. 4, after five-stage (the device design may be more than that) communication valves 6 on the straight track are fully or partially opened, the flow of the semi-circular track obtains a reverse flow resistance 9, and an optimal beam intensity can be obtained (the high-pressure airflow drives the cluster beam to be deposited at the extreme end of the straight track or at the near extreme end of the straight track, and when the near extreme end is collected, a collecting vessel is arranged near the last-stage communication valve). The flow of each semi-ring track is controllable.
The operation process comprises the following steps:
1. replacing a nozle of a nozle-skinner system of a condensation cavity of a traditional differential vacuum system with an adjustable Tesla immovable micro valve;
2. opening the vacuum cavity, closing all the external control type communication valves 6, and detecting the optimal vacuum degree in a unidirectional mode with the semi-ring track communication number of 0;
3. and starting a material source to generate an atomic-scale material beam. Adjusting the number of communicated semi-ring tracks of the Tesla immovable micro valve and the flow of condensed gas to obtain the optimal beam intensity;
4. and maintaining proper air pressure by using a Tesla immovable micro valve to perform cluster beam deposition.
Claims (10)
1. A differential aerodynamic design is applied to a gas cluster beam source and is characterized in that a Tesla type immovable micro valve which is suitable for an outlet of a gas-phase condensation cluster source condensation cavity is used; the low-resistance directivity of the unidirectional flow of the air flow from the Tesla immovable micro valve is utilized, and the high air pressure of the condensation cavity and the low background air pressure of the vacuum cavity are maintained under the condition of a low vacuum pump set and the flow of the condensed air; the low resistance direction of the Tesla immovable micro valve and the direction of the cluster source from the high-pressure condensation cavity to the low-pressure vacuum cavity are reversed, so that gas in the condensation cavity is difficult to enter the vacuum cavity; meanwhile, the number of semi-ring tracks communicated with the straight track interface in the Tesla immovable microvalve is controlled, and the size of one-way flow resistance of the Tesla immovable microvalve is adjusted; the high-pressure condensation chamber enables more efficient cluster and nanoparticle synthesis.
2. Use according to claim 1, characterised in that the evacuation of the air in the vacuum chamber is achieved by means of a vacuum pump<1E-6Pa, introducing condensing gas into the condensing cavity to make the pressure reach-102pa。
3. Use according to claim 1, characterized in that the material source is activated to produce a cluster beam; the gas flow and proportion in the condensation cavity are adjusted, and the air pressure of the condensation cavity controlled by the number of semi-ring tracks communicated with the Tesla immovable micro-valve is adjusted, so that the beam flow production is maximized.
4. Use according to claim 1, characterized by a vacuum pump group provided with a molecular pump mechanical pump: obtaining a high vacuum cavity environment; condensation cavity: the condensation cavity is a high-pressure part in the differential pumping system and is used for condensation growth of the nano particles; the straight rail of the Tesla immovable micro valve is a channel for high-pressure airflow in the condensation cavity to flow out;
the Tesla immovable micro valve semi-ring track is connected with the straight track; the straight track is provided with a plurality of stages of communicating valves on a straight line, the vertical plane of each stage of communicating valve is controlled by an aperture structure, the on-off and the opening degree of each stage of communicating valve are controlled by an external multipath controller, a plurality of semi-ring tracks are arranged at the side of the rear part of each stage of communicating valve of the straight track, the inlet and the outlet of the semi-ring tracks are arranged on the column wall of the columnar straight track, the planes of the semi-ring tracks and the straight track form an angle of 30-75 degrees, and high-pressure air flow passing through each stage of communicating valve of the straight track is diffused to a large space, namely to the semi-ring tracks at the side; the straight track and the semi-ring track external control type communication valve can control the number of the semi-ring tracks communicated with the straight track, and play a role in controlling the flow resistance of the whole Tesla immovable micro valve;
the external multi-channel controller is arranged outside the vacuum chamber, enters the vacuum chamber through the electrode flange, is connected with the semi-ring track external control type communicating valve through the straight track and controls the communicating valve.
5. Use according to claim 1, wherein the communication valve is an iris-type communication valve; the opening and closing of the electrode flange are controlled by the electrode flange.
6. The application of claim 1, wherein the straight track is provided with more than five stages of communicating valves, and when the communicating valves are fully or partially opened, the semi-ring track flow rate obtains reverse flow resistance, so that beam intensity with good collecting effect can be obtained.
7. A differential aerodynamically designed gas cluster beam source device is characterized by comprising a molecular pump, a mechanical pump, a condensation cavity, a Tesla immovable microvalve straight track, a Tesla immovable microvalve semi-ring track, a straight track and semi-ring track external control type communication valve and an external multi-path controller; installing a Tesla immovable micro valve consisting of a Tesla immovable micro valve straight track, a Tesla immovable micro valve semi-ring track, a straight track and a semi-ring track external control type communicating valve at the outlet of the condensation cavity, and connecting an external multi-channel controller to the external control type communicating valve;
the structure of the Tesla immovable micro-valve straight track, the semi-ring track and the straight track and semi-ring track external control type communicating valve is that; the controller for communicating the straight track with the semi-ring track has the structure that the external multi-channel controller electrically controls the number of communicated straight track and semi-ring track external control type communication valves.
8. The apparatus of claim 7, wherein the tesla immovable microvalves used in the condensation chamber function as one-way valves to achieve low resistance flow of gas from one port to the other, with flow in the reverse direction being extremely difficult; high air pressure in the condensation cavity is realized, and the consumption of condensed gas and the requirement on the pumping speed of the vacuum pump set are reduced; meanwhile, the number of the semi-ring tracks communicated with the straight track of the Tesla immovable microvalve in the valve is controlled to control the flow resistance of gas in the Tesla immovable microvalve, so that different condensation pressures are obtained, and the semi-ring tracks are important components for mass production of cluster sources with high condensation efficiency.
9. The device of claim 7 wherein the tesla immobile microvalve semi-circular tracks are connected by straight tracks; the straight track is provided with a plurality of stages of communicating valves on a straight line, the vertical plane of each stage of communicating valve is controlled by an aperture structure, the on-off and the opening degree of each stage of communicating valve are controlled by an external multipath controller, a plurality of semi-ring tracks are arranged at the side of the rear part of each stage of communicating valve of the straight track, the inlet and the outlet of the semi-ring tracks are arranged on the column wall of the columnar straight track, the planes of the semi-ring tracks and the straight track form an angle of 30-75 degrees, and high-pressure air flow passing through each stage of communicating valve of the straight track is diffused to a large space, namely to the semi-ring tracks at the side; the straight track and the semi-ring track external control type communicating valve control the number of the semi-ring tracks communicated on the straight track, and play a role in controlling the flow resistance of the whole Tesla immovable micro valve.
10. The apparatus as claimed in claim 7, wherein the straight track is provided with more than five stages of communication valves, the high-pressure gas flow drives the cluster beam to deposit at the extreme end of the straight track or at the near extreme end of the straight track, and a collecting vessel is arranged near the last stage of communication valve when the near extreme end is collected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010581263.1A CN111705303B (en) | 2020-06-23 | 2020-06-23 | Application and device of differential aerodynamic design in gas cluster beam source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010581263.1A CN111705303B (en) | 2020-06-23 | 2020-06-23 | Application and device of differential aerodynamic design in gas cluster beam source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111705303A true CN111705303A (en) | 2020-09-25 |
| CN111705303B CN111705303B (en) | 2021-08-27 |
Family
ID=72542888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010581263.1A Active CN111705303B (en) | 2020-06-23 | 2020-06-23 | Application and device of differential aerodynamic design in gas cluster beam source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111705303B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1810629A (en) * | 2006-01-24 | 2006-08-02 | 南京大学 | Gas phase synthesis process of nanometer particle array with one-dimensional diameter and number density gradient |
| US20090140165A1 (en) * | 2007-12-04 | 2009-06-04 | Tel Epion Inc. | Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture |
| CN103233203A (en) * | 2013-03-18 | 2013-08-07 | 内蒙古大学 | Preparation method of ferromagnetism enhanced BiFeO3 film |
| CN103343317A (en) * | 2013-07-11 | 2013-10-09 | 南京大学 | Preparation method of TiO2 nanoparticle antireflective film based on nanocluster beam deposition system |
| CN103789734A (en) * | 2014-01-27 | 2014-05-14 | 南京大学 | Method for realizing wide nano-particle beams by using neutral cluster beam nozzle assembly |
| CN106028846A (en) * | 2013-12-23 | 2016-10-12 | Pax实验室公司 | Vaporization device systems and methods |
| CN106119802A (en) * | 2016-08-01 | 2016-11-16 | 宋凤麒 | A kind of elementide line for organic nanometer processing method and apparatus |
| CN109069774A (en) * | 2016-01-27 | 2018-12-21 | 莱战略控股公司 | For refilling the check valve of aerosol delivery device |
| US20190274230A1 (en) * | 2018-03-01 | 2019-09-05 | Dell Products L.P. | System and Method of Transferring Energy |
-
2020
- 2020-06-23 CN CN202010581263.1A patent/CN111705303B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1810629A (en) * | 2006-01-24 | 2006-08-02 | 南京大学 | Gas phase synthesis process of nanometer particle array with one-dimensional diameter and number density gradient |
| US20090140165A1 (en) * | 2007-12-04 | 2009-06-04 | Tel Epion Inc. | Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture |
| CN103233203A (en) * | 2013-03-18 | 2013-08-07 | 内蒙古大学 | Preparation method of ferromagnetism enhanced BiFeO3 film |
| CN103343317A (en) * | 2013-07-11 | 2013-10-09 | 南京大学 | Preparation method of TiO2 nanoparticle antireflective film based on nanocluster beam deposition system |
| CN106028846A (en) * | 2013-12-23 | 2016-10-12 | Pax实验室公司 | Vaporization device systems and methods |
| CN103789734A (en) * | 2014-01-27 | 2014-05-14 | 南京大学 | Method for realizing wide nano-particle beams by using neutral cluster beam nozzle assembly |
| CN109069774A (en) * | 2016-01-27 | 2018-12-21 | 莱战略控股公司 | For refilling the check valve of aerosol delivery device |
| CN106119802A (en) * | 2016-08-01 | 2016-11-16 | 宋凤麒 | A kind of elementide line for organic nanometer processing method and apparatus |
| US20190274230A1 (en) * | 2018-03-01 | 2019-09-05 | Dell Products L.P. | System and Method of Transferring Energy |
| US10602638B2 (en) * | 2018-03-01 | 2020-03-24 | Dell Products L.P. | System and method of transferring energy |
Non-Patent Citations (3)
| Title |
|---|
| K. NAGAYA: "Investigation of the interaction of xenon cluster with intense EUV–FEL pulses", 《JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA》 * |
| TAISHI CHEN: "Topological transport and atomic tunnelling-clustering dynamics for aged Cu-doped Bi2Te3 crystals", 《NATURE COMMUNICATIONS》 * |
| 徐一凡: "Tesla型不可动微阀拓扑优化设计研究", 《计算机仿真》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111705303B (en) | 2021-08-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206601239U (en) | Aero-engine multistage compressor test structure and its adjustable flow-guiding stator blade | |
| CN102953825B (en) | Pneumatic supersonic velocity/hypersonic velocity adjustable air inlet passage for self-circulation of forebody | |
| CN102953826B (en) | Pneumatic supersonic velocity/hypersonic velocity adjustable air inlet passage for forebody-inner passage circulation | |
| CN111705303B (en) | Application and device of differential aerodynamic design in gas cluster beam source | |
| CN101006275A (en) | Evacuation of load lock enclosure | |
| CN111128671B (en) | Mass spectrometer air pressure adjusting system and method | |
| CN104976712A (en) | Air conditioner device | |
| CN209481791U (en) | Reaction chamber and semiconductor processing equipment | |
| CN104806535A (en) | Complex radial flow pump, combined radial flow pump and air extraction system | |
| CA2760567A1 (en) | A pressure regulating device, a compressed air supply system and a motor vehicle | |
| CN109452854B (en) | Cooking utensil | |
| CN112267104A (en) | Chemical vapor deposition method preparation film device | |
| CN105195354A (en) | Multi-channel ejector | |
| CN113278930A (en) | Nanocluster beam density control device and application method thereof | |
| CN115045856A (en) | Anti-surge device and compressor | |
| CN112555180A (en) | Air vortex generating assembly, air supply assembly and air conditioning system | |
| CN201344125Y (en) | Roots vacuum pump | |
| CN202137074U (en) | Vacuum breathing apparatus | |
| CN206428001U (en) | A kind of device for growing graphene | |
| CN210003343U (en) | compressed air energy storage system with multistage switching | |
| CN102141162B (en) | Active buck-boost regulating valve for three natures detecting device of building doors and windows and curtain walls | |
| CN109779979B (en) | Simple and efficient vaneless diffuser stability expanding system of centrifugal compressor | |
| US5088895A (en) | Vacuum pumping apparatus | |
| CN214196721U (en) | Air vortex generating assembly, air supply assembly and air conditioning system | |
| CN204898064U (en) | Gaseous extrinsic cycle type heater CVD diamond film growing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |