CN111704108A - Continuous production process of high-purity chlorine - Google Patents

Continuous production process of high-purity chlorine Download PDF

Info

Publication number
CN111704108A
CN111704108A CN202010623553.8A CN202010623553A CN111704108A CN 111704108 A CN111704108 A CN 111704108A CN 202010623553 A CN202010623553 A CN 202010623553A CN 111704108 A CN111704108 A CN 111704108A
Authority
CN
China
Prior art keywords
purity chlorine
gas
purity
chlorine
introducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010623553.8A
Other languages
Chinese (zh)
Inventor
曾令军
汪正宏
阳辉
曾令霞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taihe Gas Jingzhou Co ltd
Original Assignee
Taihe Gas Jingzhou Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taihe Gas Jingzhou Co ltd filed Critical Taihe Gas Jingzhou Co ltd
Priority to CN202010623553.8A priority Critical patent/CN111704108A/en
Publication of CN111704108A publication Critical patent/CN111704108A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00Halogens; Halogen acids
    • C01B7/01Chlorine; Hydrogen chloride
    • C01B7/07Purification ; Separation
    • C01B7/075Purification ; Separation of liquid chlorine
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00Halogens; Halogen acids
    • C01B7/01Chlorine; Hydrogen chloride
    • C01B7/07Purification ; Separation
    • C01B7/0743Purification ; Separation of gaseous or dissolved chlorine

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

The invention provides a continuous production process of high-purity chlorine, which comprises the following steps: step S1, introducing liquid chlorine from a liquid phase space valve of an industrial liquid chlorine tank into a gasification device, and gasifying at a first temperature to obtain gasified nitrogen; step S2, introducing the nitrogen obtained in the step S1 into an adsorption device, and adsorbing by a compound adsorbent to obtain crude high-purity chlorine with the water content of less than or equal to 0.3 ppmv; step S3, introducing the crude high-purity chlorine obtained in the step S2 into a primary rectifying device, and rectifying and removing heavy component impurities in the crude high-purity chlorine under a first pressure to obtain primary high-purity chlorine; and step S4, introducing the primary high-purity chlorine gas obtained in the step S3 into a secondary rectification device, and rectifying and removing light component impurities in the primary high-purity chlorine gas under a second pressure to obtain secondary high-purity chlorine gas. The invention solves the technical problem of low yield in the traditional high-purity chlorine production process by optimizing the high-purity chlorine production process.

Description

Continuous production process of high-purity chlorine
Technical Field
The invention relates to the technical field of preparation of high-purity gas, in particular to a continuous production process of high-purity chlorine.
Background
Chlorine is one of the main products in the chlor-alkali industry, and is a strong oxidant and a chlorinating agent. The high-purity chlorine gas is high-purity gas obtained by purifying industrial liquid chlorine and is used as standard gas and correction gas; in addition, the high-purity chlorine can also be applied to the fields of microelectronics, optical fiber cables, high-temperature superconductivity and high-performance alloy smelting, and the like, and the advanced scientific and technological fields of related industry, basic scientific research and the like.
For a long time, high-purity chlorine in China always depends on import, and the purity of the high-purity chlorine produced by an adsorption purification method in China only exists in 80-90 years, and can reach 99.996%. The adsorption method for preparing high-purity chlorine needs to remove impurities in industrial chlorine deeply, and the impurities comprise water, oxygen, nitrogen, carbon dioxide, carbon monoxide, hydrogen, methane and other gases. The adsorption method is to remove carbon dioxide, hydrocarbons and metal ions thereof by adopting chemically treated zeolite adsorption, remove water by using a drying agent and zeolite secondary adsorption, condense and separate low-boiling-point impurities, and obtain high-purity chlorine by low-temperature bottling. The preparation of the high-purity chlorine prepared by the adsorption method needs to prepare a drying agent and an adsorbent which are not corroded by the chlorine and do not cause chlorination reaction, and select proper process conditions for drying, adsorption, regeneration and condensation, and the like, which are the problems of great technical difficulty and a lot of research contents.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a continuous production process of high-purity chlorine, which aims to solve the technical problem of low yield of the traditional high-purity chlorine production process in the related technology.
The invention provides a continuous production process of high-purity chlorine, which comprises the following steps:
step S1, introducing liquid chlorine from a liquid phase space valve of an industrial liquid chlorine tank into a gasification device, and gasifying at a first temperature to obtain gasified nitrogen;
step S2, introducing the nitrogen obtained in the step S1 into an adsorption device, and adsorbing by a compound adsorbent to obtain crude high-purity chlorine with the water content of less than or equal to 0.3 ppmv;
step S3, introducing the crude high-purity chlorine obtained in the step S2 into a primary rectifying device, and rectifying and removing heavy component impurities in the crude high-purity chlorine under a first pressure to obtain primary high-purity chlorine;
and step S4, introducing the primary high-purity chlorine gas obtained in the step S3 into a secondary rectification device, and rectifying and removing light component impurities in the primary high-purity chlorine gas under a second pressure to obtain secondary high-purity chlorine gas.
Optionally, the first temperature is in a range of 20-60 ℃.
Optionally, the built adsorbent is a built combined adsorbent of a molecular sieve and activated alumina.
Optionally, the mass fraction ratio of the molecular sieve to the activated alumina is 4:6 to 7: 3.
Optionally, the first pressure is 0.6 to 0.8 MPa.
Optionally, the second pressure is 0.4-0.6 MPa.
Optionally, the height of the first rectifying device is 10-14 m; and/or the presence of a gas in the gas,
the height of the second rectifying device is 10-14 m.
Optionally, the adsorption device comprises a use tank and a regeneration tank which are connected in parallel between the gasification device and the primary rectification device through gas circuits.
Optionally, the first rectification device comprises a first refrigerating unit and a first heating element, and the first refrigerating unit is arranged at the top of the first rectification device; the first heating device is additionally arranged at the bottom of the first rectifying device; and/or the presence of a gas in the gas,
the second rectifying device comprises a second refrigerating unit and a second heating element, the second refrigerating unit is arranged at the top of the second rectifying device, and the second heating element is arranged at the bottom of the second rectifying device.
Optionally, the continuous production process further comprises:
step S5, bottling the secondary high-purity chlorine gas obtained in the step S4 by a compression canning system to obtain bottled high-purity liquid nitrogen;
step S6, introducing heavy component impurities removed by the primary rectifying device into a tail gas treatment device, and treating with alkali liquor;
and step S7, introducing the light component impurities removed by the secondary rectification device into a tail gas treatment device, and treating with alkali liquor.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a continuous production process of high-purity chlorine, which takes industrial liquid chlorine as an initial raw material and obtains the high-purity chlorine meeting the index through the processes of gasification, single-stage adsorption, secondary rectification and the like, the whole process is simple and easy to operate, and the continuous industrial production of the high-purity chlorine can be realized; the pollution source in the production process is less, and the obtained product has high quality; the water content of the obtained high-purity chlorine gas is lower than 0.3ppmv, and the purity reaches 99.999 percent.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly apparent, the technical solutions of the present invention are further described below with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
At present, no formal high-purity chlorine manufacturers exist in China in the related technology, only the research center of special gas of the Ministry of Dali Guangdong has a small amount of production technology for intermittently preparing high-purity chlorine by an adsorption method, and the yield is basically 5 tons/year. The China gas Association has a large market for the use of special gas, the annual usage amount is about 300 tons, and the total sales of foreign famous gas sellers such as Prikex, Linde gas, air products company and French liquefied air group in China can reach 300 tons per year. Thus, the China market for high purity chlorine is basically monopolized by foreign manufacturers. Based on the technical scheme, the invention provides a continuous production process of high-purity chlorine, and realizes a production line of high-purity chlorine capable of producing 1000 tons per year.
Based on the above, the invention provides a continuous production process of high-purity chlorine gas, which comprises the following steps:
step S1, introducing liquid chlorine from a liquid phase space valve of an industrial liquid chlorine tank into a gasification device, and gasifying at a first temperature to obtain gasified nitrogen;
step S2, introducing the nitrogen obtained in the step S1 into an adsorption device, and adsorbing by a compound adsorbent to obtain crude high-purity chlorine with the water content of less than or equal to 0.3 ppmv;
step S3, introducing the crude high-purity chlorine obtained in the step S2 into a primary rectifying device, and rectifying and removing heavy component impurities in the crude high-purity chlorine under a first pressure to obtain primary high-purity chlorine;
and step S4, introducing the primary high-purity chlorine gas obtained in the step S3 into a secondary rectification device, and rectifying and removing light component impurities in the primary high-purity chlorine gas under a second pressure to obtain secondary high-purity chlorine gas.
Optionally, the first temperature is in a range of 20-60 ℃. For example, but not limited to, the first temperature is in the range of 31-40 ℃.
Optionally, the built adsorbent is a built combined adsorbent of a molecular sieve and activated alumina.
Optionally, the mass fraction ratio of the molecular sieve to the activated alumina is 4:6 to 7: 3. For example, but not limiting of, the ratio of the mass fractions of the molecular sieve and the activated alumina is 6: 4.
Optionally, the first pressure is 0.6 to 0.8 MPa.
Optionally, the second pressure is 0.4-0.6 MPa.
Optionally, the height of the first rectifying device is 10-14 m; and/or the presence of a gas in the gas,
the height of the second rectifying device is 10-14 m.
Optionally, the adsorption device comprises a use tank and a regeneration tank which are connected in parallel between the gasification device and the primary rectification device through gas circuits.
Optionally, the first rectification device comprises a first refrigerating unit and a first heating element, and the first refrigerating unit is arranged at the top of the first rectification device; the first heating device is additionally arranged at the bottom of the first rectifying device; and/or the presence of a gas in the gas,
the second rectifying device comprises a second refrigerating unit and a second heating element, the second refrigerating unit is arranged at the top of the second rectifying device, and the second heating element is arranged at the bottom of the second rectifying device.
Optionally, the continuous production process further comprises:
step S5, bottling the secondary high-purity chlorine gas obtained in the step S4 by a compression canning system to obtain bottled high-purity liquid nitrogen;
step S6, introducing heavy component impurities removed by the primary rectifying device into a tail gas treatment device, and treating with alkali liquor;
and step S7, introducing the light component impurities removed by the secondary rectification device into a tail gas treatment device, and treating with alkali liquor.
The embodiment of the invention provides a continuous production process of high-purity chlorine, which takes industrial liquid chlorine as an initial raw material and obtains the high-purity chlorine meeting the index through the processes of gasification, single-stage adsorption, secondary rectification and the like, the whole process is simple and easy to operate, and the continuous industrial production of the high-purity chlorine can be realized; the pollution source in the production process is less, and the obtained product has high quality; the water content of the obtained high-purity chlorine gas is lower than 0.3ppmv, and the purity reaches 99.999 percent.
Specifically, for the gasification process, in order to improve the mass transfer driving force of gas in the single-stage adsorption process and the two-stage rectification process, the temperature of the gasification process is set. Specifically, when the first temperature is too low, the feeding speed of industrial liquid chlorine is slow, the mass transfer driving force is insufficient, and the yield of the produced high-purity chlorine gas is low; when the first temperature is too high, the pressure in the rectification process is also higher, the relative volatilization of light component impurities is reduced due to the too high rectification pressure, the rectification effect is worsened, the yield of high-purity chlorine is reduced, and the safety risk in the rectification process is also improved due to the too high rectification pressure. Therefore, in the embodiment of the invention, a large number of experiments prove that when the first temperature is 20-60 ℃, a product with qualified product quality can be obtained, and the yield of high-purity chlorine gas is improved.
Specifically, GB5138-2016 states that the mass fraction of water in qualified industrial liquid chlorine products is less than or equal to 0.04% (i.e., the volume fraction is about 1600ppmv), and the water content of high-purity chlorine gas is less than 0.3ppmv, so that a large amount of water needs to be removed in the production process from industrial liquid chlorine to high-purity liquid chlorine. Therefore, for the single-stage adsorption process, in order to remove the moisture in the industrial liquid chlorine to the maximum extent, a compound adsorbent is designed (namely, the molecular sieve and the activated alumina are compounded according to the mass fraction of 4: 6-7: 3). In addition, in the embodiment of the invention, the single-stage adsorption of the high-purity chlorine can be realized by the compound adsorbent, the multi-stage physical adsorption drying in the traditional process is avoided, the simplification of the process is realized, and the effect is excellent.
Specifically, for the secondary rectification process, in order to remove impurities in the chlorine gas with low water content to the maximum extent and reduce the pressure in the rectification process, a secondary distillation process for removing heavy component impurities and then removing light component impurities is designed, so that the pressure of the high-purity chlorine gas after rectification can be reduced (lower than the gasification pressure of GB11984-2008 & ltchlorine safety code & gt, which is 1.0MPa), and the pressure value of the high-purity chlorine gas discharged from a distillation device can meet the national standard; the impurity removal operation of removing the heavy component impurities first and then removing the light component impurities in the embodiment of the invention also avoids the use of a diaphragm compressor in the traditional impurity removal process (removing the light component impurities first and then removing the heavy component impurities), and reduces the product pollution path caused by the diaphragm rupture of the diaphragm compressor.
To more clearly illustrate the technical effects of the continuous production process of high purity chlorine gas proposed by the present invention, the present invention provides the following data for the examples. It should be understood that the data set forth in the following examples are merely intended to better illustrate the technical effect of the continuous process for the production of high purity chlorine gas as set forth in the present invention and are not to be construed as being equivalent to all experimental data.
Example set 1
Selection of gasification unit temperature
1. And (3) experimental operation: controlling the gasification device according to a first temperature (gasification temperature) shown in table 1, filling a compound component adsorbent of a molecular sieve and activated alumina with a mass fraction ratio of 6:4 into the adsorption device, carrying out an experiment with a first pressure of 0.6-0.8 MPa in the first rectification device and a second pressure of 0.4-0.6 MPa in the second rectification device, and obtaining result data shown in table 1. Wherein the height of the first and second rectification devices is 12 meters.
TABLE 1 different temperature selection for gasification plants
Group of embodiments First temperature (. degree. C.) Average yield (Kg/h) Yield (%) Quality of the product
Example 1 20~30 80 90 Qualified
Example 2 31~40 150 98 Qualified
Example 3 41~50 120 82 Qualified
Example 4 51~60 100 78 Qualified
2. And (4) analyzing results: as can be seen from table 1 above, in a certain temperature range (i.e., 20 to 40 ℃), as the first temperature (i.e., the gasification temperature) increases, the average yield of the high-purity chlorine gas is also greatly increased, and the yield of the high-purity chlorine gas is also greatly increased; over a certain temperature range (namely 31-40 ℃), the average yield of the high-purity chlorine gas is greatly reduced and the yield of the high-purity chlorine gas is also greatly reduced along with the increase of the first temperature (namely the gasification temperature). Specifically, when the first temperature (i.e. the gasification temperature) is within the range of 31-40 ℃, the average yield of the high-purity chlorine gas is the highest and reaches 150Kg/h, and at this time, the yield of the high-purity chlorine gas is the highest and reaches 98%.
Example group 2
1. Moisture removal from high purity chlorine gas under different adsorbent conditions
a. And (3) experimental operation: respectively selecting 3 different adsorbents of active alumina, a molecular sieve and a compound component of the molecular sieve and the active alumina (the mass fraction ratio of the molecular sieve to the active oxidant in the compound component is 6:4) to remove water in the high-purity chlorine, and obtaining result data shown in table 2.
TABLE 2 removal of moisture from high purity chlorine gas under different adsorbents
Figure BDA0002563915090000051
Figure BDA0002563915090000061
b. And (4) analyzing results: as can be seen from Table 2, under the condition of the same amount of the adsorbent, the compound adsorbent compounded by the molecular sieve and the activated alumina according to the mass fraction of 6:4 has the best dehydration effect, and the water content in the high-purity chlorine gas can reach 0.27ppmv and is far lower than 0.3 ppmv.
2. Selection of different compounding ratios of molecular sieve and active alumina
a. And (3) experimental operation: different compound proportions of the molecular sieve and the activated alumina, namely 1:9, 2:8, 3:7, 4:6, 5:5, 6:4, 7:3 and 8:2, are respectively selected as adsorbents to remove water in the high-purity chlorine gas, and result data shown in table 3 are obtained.
TABLE 3 removal of water from high-purity chlorine at different compounding ratios
Figure BDA0002563915090000062
b. And (4) analyzing results: as can be seen from table 3, under a certain compounding ratio of the molecular sieve to the activated alumina (i.e., the compounding ratio of the molecular sieve to the activated alumina is in the range of 1:9 to 6:4), as the mass percentage of the molecular sieve increases, the more water in the high-purity chlorine gas is removed, the lower the water content in the high-purity chlorine gas is; when the compounding ratio of the molecular sieve to the activated alumina exceeds a certain value (namely the compounding ratio of the molecular sieve to the activated alumina is 6:4), the removal of water in the high-purity chlorine gas is less and the water content in the high-purity chlorine gas is higher along with the increase of the mass percentage of the molecular sieve. Wherein, when the compounding ratio of the molecular sieve to the active alumina is 6:4, the water content in the high-purity chlorine is the lowest and can reach 0.27 ppmv.
3. Single stage adsorption and selection of multiple stages of adsorption
a. And (3) experimental operation: and respectively selecting the compound adsorbent of the molecular sieve and the activated alumina, the silicon tetrachloride adsorbent, the molecular sieve adsorbent and the alumina adsorbent with the same dosage to remove the water in the high-purity chlorine. Wherein, the compounding ratio of the molecular sieve to the activated alumina is 6:4, and single-stage adsorption operation is carried out; the silicon tetrachloride adsorbent, the molecular sieve adsorbent and the alumina adsorbent were subjected to two-stage adsorption operation, and the result data shown in table 4 were obtained.
TABLE 4 removal of water from high-purity chlorine at different compounding ratios
Figure BDA0002563915090000071
b. And (4) analyzing results: as can be seen from Table 4, the single-stage adsorption operation of the composite adsorbent consisting of the molecular sieve and the activated alumina in the composite ratio of 6:4 is far higher than the two-stage adsorption operation of a single adsorbent (such as silicon tetrachloride, the molecular sieve, alumina and the like) in removing moisture in high-purity chlorine; and the quality of the chlorine after regeneration of the compound adsorbent is far higher than that of the chlorine after regeneration of the single adsorbent. Wherein the compound adsorbent of the molecular sieve and the active alumina with the compound proportion of 6:4 can ensure that the water content in the high-purity chlorine gas reaches 0.27ppmv, and the mass of the regenerated compound adsorbent of the molecular sieve and the active alumina with the compound proportion of 6:4 can reach 30 t.
Finally, the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all of them should be covered in the claims of the present invention.

Claims (10)

1. A continuous production process of high-purity chlorine gas is characterized by comprising the following steps:
step S1, introducing liquid chlorine from a liquid phase space valve of an industrial liquid chlorine tank into a gasification device, and gasifying at a first temperature to obtain gasified nitrogen;
step S2, introducing the nitrogen obtained in the step S1 into an adsorption device, and adsorbing by a compound adsorbent to obtain crude high-purity chlorine with the water content of less than or equal to 0.3 ppmv;
step S3, introducing the crude high-purity chlorine obtained in the step S2 into a primary rectifying device, and rectifying and removing heavy component impurities in the crude high-purity chlorine under a first pressure to obtain primary high-purity chlorine;
and step S4, introducing the primary high-purity chlorine gas obtained in the step S3 into a secondary rectification device, and rectifying and removing light component impurities in the primary high-purity chlorine gas under a second pressure to obtain secondary high-purity chlorine gas.
2. The continuous process for producing high purity chlorine gas of claim 1, wherein the first temperature is in the range of 20 ℃ to 60 ℃.
3. The continuous process for producing high purity chlorine gas of claim 1, wherein the built adsorbent is a built adsorbent of a molecular sieve and activated alumina.
4. The continuous production process of high purity chlorine gas according to claim 3, wherein the mass fraction ratio of the molecular sieve to the activated alumina is 4:6 to 7: 3.
5. The continuous process for producing high purity chlorine gas of claim 1, wherein the first pressure is in the range of 0.6 to 0.8 MPa.
6. The continuous process for producing high purity chlorine gas of claim 5, wherein the second pressure is in the range of 0.4 to 0.6 MPa.
7. The continuous process for the production of high purity chlorine according to any of claims 1 to 6, wherein the height of the first rectification unit is 10 to 14 meters; and/or the presence of a gas in the gas,
the height of the second rectifying device is 10-14 m.
8. The continuous production process of high purity chlorine gas as claimed in any one of claims 1 to 6, wherein the adsorption unit comprises a use tank and a regeneration tank connected in parallel with the gas circuit between the gasification unit and the primary rectification unit.
9. The continuous production process of high-purity chlorine gas according to any one of claims 1 to 6, wherein the first rectification device comprises a first refrigerating unit and a first heating element, and the first refrigerating unit is arranged at the top of the first rectification device; the first heating device is additionally arranged at the bottom of the first rectifying device; and/or the presence of a gas in the gas,
the second rectifying device comprises a second refrigerating unit and a second heating element, the second refrigerating unit is arranged at the top of the second rectifying device, and the second heating element is arranged at the bottom of the second rectifying device.
10. The continuous process for the production of high purity chlorine of any of claims 1 to 6, further comprising:
step S5, bottling the secondary high-purity chlorine gas obtained in the step S4 by a compression canning system to obtain bottled high-purity liquid nitrogen;
step S6, introducing heavy component impurities removed by the primary rectifying device into a tail gas treatment device, and treating with alkali liquor;
and step S7, introducing the light component impurities removed by the secondary rectification device into a tail gas treatment device, and treating with alkali liquor.
CN202010623553.8A 2020-06-30 2020-06-30 Continuous production process of high-purity chlorine Pending CN111704108A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010623553.8A CN111704108A (en) 2020-06-30 2020-06-30 Continuous production process of high-purity chlorine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010623553.8A CN111704108A (en) 2020-06-30 2020-06-30 Continuous production process of high-purity chlorine

Publications (1)

Publication Number Publication Date
CN111704108A true CN111704108A (en) 2020-09-25

Family

ID=72544939

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010623553.8A Pending CN111704108A (en) 2020-06-30 2020-06-30 Continuous production process of high-purity chlorine

Country Status (1)

Country Link
CN (1) CN111704108A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1054402A (en) * 1990-01-19 1991-09-11 波克集团股份有限公司 The cryogenic purincation of gas
CN103626129A (en) * 2013-08-09 2014-03-12 杭州电化集团有限公司 Preparation method for electronic-grade high-purity chlorine from industrial liquid chlorine
CN107739024A (en) * 2017-11-14 2018-02-27 合肥创想能源环境科技有限公司 The technique that a kind of UF membrane composite algorithm prepares nitrogen
CN110683513A (en) * 2019-11-12 2020-01-14 浙江博瑞电子科技有限公司 Preparation method of high-purity chlorine
CN210764317U (en) * 2019-09-17 2020-06-16 苏州金宏气体股份有限公司 Electronic grade hydrogen bromide purification device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1054402A (en) * 1990-01-19 1991-09-11 波克集团股份有限公司 The cryogenic purincation of gas
CN103626129A (en) * 2013-08-09 2014-03-12 杭州电化集团有限公司 Preparation method for electronic-grade high-purity chlorine from industrial liquid chlorine
CN107739024A (en) * 2017-11-14 2018-02-27 合肥创想能源环境科技有限公司 The technique that a kind of UF membrane composite algorithm prepares nitrogen
CN210764317U (en) * 2019-09-17 2020-06-16 苏州金宏气体股份有限公司 Electronic grade hydrogen bromide purification device
CN110683513A (en) * 2019-11-12 2020-01-14 浙江博瑞电子科技有限公司 Preparation method of high-purity chlorine

Similar Documents

Publication Publication Date Title
US8968694B2 (en) Method for preparing high purity ammonia
CN113321184B (en) High-purity electronic-grade chlorine purification production device and technology thereof
CN215101986U (en) High-purity electronic grade chlorine purification apparatus for producing
EP3336057B1 (en) Method for producing hydrogen chloride
CN112023618A (en) Crude helium refining system and method
CN214937122U (en) Purification system of electron-level purity acetylene
CN105731379A (en) Purifying method of electronic grade chlorine
CN106044710A (en) Method for purifying electron-grade hydrogen chloride
CN106276798B (en) A method of preparing high-purity chlorine
CN111174530A (en) Method and device for separating and purifying krypton and xenon
CN111704108A (en) Continuous production process of high-purity chlorine
KR102084294B1 (en) Method and apparatus for producing high purity nitric oxide for semiconductor using the nitric acid production process
CN111333037B (en) System and method for preparing high-purity hydrogen sulfide gas
CN212024774U (en) System for preparing 4N-purity hydrogen sulfide gas
CN112827319B (en) Chlorine-based SiC-CVD epitaxial tail gas full-temperature-range pressure swing adsorption hydrogen extraction and recycling method containing low-concentration silane and light hydrocarbons above carbon two
CN211716983U (en) Device for separating and purifying krypton and xenon
CN113262628A (en) Production device and process for preparing electronic-grade high-purity methane from synthetic ammonia tail gas
CN112645335B (en) Method for extracting silane by pressure swing adsorption of epitaxial Cheng Weiqi Quan Wencheng
JP5495642B2 (en) Method for purifying carbonyl difluoride
KR100584686B1 (en) Purification method of high purity ammonia
CN115676786B (en) Helium-neon separation process based on silver molecular sieve adsorption at normal temperature
CN216878719U (en) Production device for preparing electronic-grade high-purity methane from synthetic ammonia tail gas
CN114291795B (en) Method for preparing high-purity sulfur dioxide
TWI457285B (en) Method for driving high purity chlorine
CN112279234B (en) Azeotropic compositions of carbonyl fluoride and carbon dioxide

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20200925

RJ01 Rejection of invention patent application after publication