CN111697874A - Motor stator vibration mode observation method based on nonlinear sliding-mode observer - Google Patents

Motor stator vibration mode observation method based on nonlinear sliding-mode observer Download PDF

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CN111697874A
CN111697874A CN202010589027.4A CN202010589027A CN111697874A CN 111697874 A CN111697874 A CN 111697874A CN 202010589027 A CN202010589027 A CN 202010589027A CN 111697874 A CN111697874 A CN 111697874A
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vibration mode
observer
mode
derivative
nonlinear sliding
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CN111697874B (en
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荆锴
林夏萍
刘畅
董砚
孙鹤旭
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Hebei University of Technology
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
    • H02P23/12—Observer control, e.g. using Luenberger observers or Kalman filters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
    • H02P23/14—Estimation or adaptation of motor parameters, e.g. rotor time constant, flux, speed, current or voltage

Abstract

The invention discloses a motor stator vibration mode observation method based on a nonlinear sliding-mode observer, wherein the equipment used for realizing the method comprises an FPGA, a Hall current sensor, a voltage division sampling resistor, a high-speed ADC, an H-bridge drive circuit and a traveling wave type rotating ultrasonic motor, and the method comprises the following steps: firstly, a Hall current sensor and a voltage division sampling resistor are controlled by using an FPGA (field programmable gate array), sampling is carried out on output voltage and current when a traveling wave type rotary ultrasonic motor runs at a sampling frequency of 4MHz, digital-to-analog conversion is realized by a high-speed ADC (analog-to-digital converter), and a first-order derivative for a vibration mode is established
Figure DDA0002555686610000011
The observer of (2): the second step, according to the first derivative of the vibration mode established in the first step
Figure DDA0002555686610000012
The observer of (2) is used for establishing a vibration mode nonlinear sliding mode observer. The method aims at the traveling wave type rotary ultrasonic motor, can realize accurate observation of the vibration mode of the stator, has certain parameter robustness, and can overcome the problems of difficult implementation and low measurement precision of the existing measurement technology.

Description

Motor stator vibration mode observation method based on nonlinear sliding-mode observer
Technical Field
The invention relates to the technical field of motor stator vibration mode measurement, in particular to a traveling wave type rotating ultrasonic motor stator vibration mode observation method based on a nonlinear sliding-mode observer.
Background
The traveling wave ultrasonic motor (TWUSM) is a micro motor, has simple structure, small volume and quick response, is not interfered by an electromagnetic field, and is widely applied to occasions with high control precision requirements, such as aerospace, medical fields and the like.
The TWUSM utilizes the inverse piezoelectric effect of piezoelectric materials, applies two-phase high-frequency excitation voltage to excite a stator to generate vibration traveling waves, enables mass points on the surface of the stator to move in an elliptical track, and drives a rotor to rotate through contact friction with the rotor. According to the driving mechanism, the stator generates the traveling wave which is the driving key, and the traveling wave is formed by superposing two-phase vibration modes of the stator, so that the research on the measurement of the vibration modes of the stator is very necessary. Analyzing the current literature, the measurement of the stator vibration mode mainly depends on modes such as a high-speed camera, a sensor, a transformer bridge circuit and the like, and the measurement modes are not easy to install, and the instrument is expensive, so that the popularization and the use are not facilitated. In summary, the current measurement technology for the vibration mode of the stator is not easy to be widely applied.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a motor stator vibration mode observation method based on a nonlinear sliding-mode observer. The method aims at the traveling wave type rotary ultrasonic motor, can realize accurate observation of the vibration mode of the stator, has certain parameter robustness, and can overcome the problems of difficult implementation and low measurement precision of the existing measurement technology.
The technical scheme adopted by the invention for solving the technical problem is as follows: the motor stator vibration mode observation method based on the nonlinear sliding-mode observer is realized, and the equipment used for realizing the method comprises an FPGA, a Hall current sensor, a voltage division sampling resistor, a high-speed ADC, an H-bridge drive circuit and a traveling wave type rotary ultrasonic motor, and comprises the following steps:
firstly, a Hall current sensor and a voltage dividing sampling resistor are controlled by using an FPGA (field programmable gate array), sampling is carried out on output voltage and current when a traveling wave type rotary ultrasonic motor runs at a sampling frequency of 4MHz, digital-to-analog conversion is realized by a high-speed ADC (analog-to-digital converter), and a vibration mode first-order derivative is established
Figure BDA0002555686590000021
Obtaining a first derivative of the vibration mode
Figure BDA0002555686590000022
The observed value of (a);
a second step of obtaining a first derivative of the vibration mode according to the first step
Figure BDA0002555686590000023
Establishing a vibration mode nonlinear sliding-mode observer according to the observed value;
and thirdly, proving the stability and the convergence of the vibration mode nonlinear sliding-mode observer designed in the second step.
Compared with the prior art, the invention has the beneficial effects that:
1. the method starts from a TWUSM model, and a vibration mode first-order-derivative observer is built to realize stator vibration mode first-order-derivative observation.
2. According to the method, the stator vibration mode is estimated by building the nonlinear sliding-mode observer, sensor-free measurement of the TWUSM vibration mode is realized, and the cost is reduced.
3. The method of the invention theoretically overcomes the parameter uncertainty caused by the TWUSM being easily influenced by the environment, and realizes accurate observation.
4. The method of the invention theoretically overcomes the influence caused by the undetectable nonlinear quantity generated by the TWUSM complex driving mechanism and realizes accurate observation.
5. The method disclosed by the invention aims at measuring the vibration mode of the stator, directly reflects the vibration state of the stator, indirectly knows the response state of the rotor and is beneficial to the research on the internal state of the motor.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic diagram of the method of the present invention.
FIG. 2 is a schematic diagram showing comparison between an observation result and a simulation true value of the vibration mode nonlinear sliding mode observer in a parameter stable state.
FIG. 3 is a schematic diagram showing comparison between an observation result and a simulation true value of the vibration mode nonlinear sliding mode observer in a parameter time-varying state.
Detailed Description
The invention provides a motor stator vibration mode observation method realized based on a nonlinear sliding-mode observer, and equipment used for realizing the method comprises an FPGA (FPGA cycle IV series), a Hall current sensor (the model is HCS-LTS06A), a voltage division sampling resistor, a high-speed ADC (high-speed analog-to-digital converter of ADI company), an H-bridge drive circuit and a traveling wave type rotary ultrasonic motor (short for motor), and the method comprises the following steps:
firstly, a Hall current sensor and a voltage dividing sampling resistor are controlled by using an FPGA (field programmable gate array), sampling is carried out on output voltage and current when a traveling wave type rotary ultrasonic motor runs at a sampling frequency of 4MHz, digital-to-analog conversion is realized by a high-speed ADC (analog-to-digital converter), and a vibration mode first-order derivative is established
Figure BDA0002555686590000031
Obtaining a first derivative of the vibration mode
Figure BDA0002555686590000032
The observed value of (a);
specifically, the FPGA is used for controlling the Hall current sensor and the voltage dividing sampling resistor to sample the output voltage and current of the motor in operation at the sampling frequency of 4MHz, the high-speed ADC is used for realizing digital-to-analog conversion and transmitting the digital-to-analog conversion back to the FPGA, and the two-phase voltage u ═ of the motor is obtainedA,uB]And a two-phase current i ═ iA,iB](ii) a Wherein, A and B represent two phases of the motor respectively, the same as the following;
the piezoelectric vibrator equation of TWUSM is known as:
Figure BDA0002555686590000033
wherein R isd＝diag{RdA,RdB}、Cd＝diag{CdA,CdBDielectric loss resistance and static capacitance of the two-phase piezoelectric vibrator are respectively; Θ is the electromechanical coupling coefficient.
Establishing a stator vibration mode first-order derivative observer:
according to the piezoelectric vibrator equation (1), A, B two-phase expressions are consistent, and one-phase equation is rewritten into an equation (3) according to the state variable voltage u:
Figure BDA0002555686590000034
designing the slip form surface
Figure BDA0002555686590000035
For the observed value of u, a stator vibration mode first-order derivative observer is designed as follows:
Figure BDA0002555686590000036
wherein, the equation (4) is introduced into the equation (3) to obtain the first derivative of the vibration mode
Figure BDA0002555686590000037
Is expressed as:
Figure BDA0002555686590000038
m and k1Are design parameters.
A second step of obtaining a first derivative of the vibration mode according to the first step
Figure BDA0002555686590000039
Establishing a vibration mode nonlinear sliding-mode observer according to the observed value;
the first derivative of the vibration mode obtained in the first step
Figure BDA0002555686590000041
The observed value is used as a first derivative of the real vibration mode
Figure BDA0002555686590000042
And two-phase voltage u ═ uA,uB]And a two-phase current i ═ iA,iB]TWUSM electromechanical coupling equation:
Figure BDA0002555686590000043
wherein M ═ diag { M ═ MsA,msB}、D＝diag{dsA,dsBAnd C ═ diag { C }sA,csBRepresents two-phase modal mass, modal damping and modal stiffness, respectively, and theta is an electromechanical coupling coefficient, FcIs a modal force.
According to TWUSM electromechanical coupling equation (2), since A, B two-phase expressions are consistent, a single-phase state equation (6) is established, wherein state variables are taken
Figure BDA0002555686590000044
Output of
Figure BDA0002555686590000045
Figure BDA0002555686590000046
C＝[01]And taking into account the perturbations of the system parameters:
Figure BDA0002555686590000047
designing a vibration mode nonlinear sliding mode observer according to the formula (6) as follows:
Figure BDA0002555686590000048
Figure BDA0002555686590000049
for the observer estimated system state, G is the design matrix.
And thirdly, proving the stability and the convergence of the vibration mode nonlinear sliding-mode observer designed in the second step.
The nonlinear sliding mode observer of the vibration mode is established on the basis of the first derivative of the vibration mode obtained in the first step
Figure BDA00025556865900000411
The observed value is used as a first derivative of the real vibration mode
Figure BDA00025556865900000412
And firstly, the stability and the convergence of the vibration mode first derivative observer are verified.
The vibration mode first derivative observer designed in the first step is as formula (4), wherein the parameter design requirement is as follows: k is a radical of1>0，0<r<1。
Figure BDA00025556865900000410
The stability is proved, and a Lyapunov function is set as follows:
Figure BDA0002555686590000051
its first derivative:
Figure BDA0002555686590000052
as long as the design parameters
Figure BDA0002555686590000053
Can ensure that
Figure BDA0002555686590000054
Combining the Lyapunov function to obtain
Figure BDA0002555686590000055
The vibration mode first-order derivative observer is not only gradually stable in the global range, but also stable in a finite time, and the stability time depends on the initial value s of s0：
Figure BDA0002555686590000056
Furthermore, the vibration mode nonlinear sliding-mode observer designed in the second step is as shown in formula (7):
Figure BDA0002555686590000057
wherein the matrix G ∈ R2×1(ii) a To satisfy A0A parametric design matrix with stable eigenvalues for a-GC, and for some constant f, Lyapunov symmetric positive definite matrices P and Q exist, satisfying:
Figure BDA0002555686590000058
the control input v of the vibration mode nonlinear sliding mode observer is as follows:
Figure BDA0002555686590000059
in the formula (I), the compound is shown in the specification,
Figure BDA00025556865900000510
for state deviation, the design parameter ρ ≧ D + η is a positive real number.
From the above requirements, the following design matrix is obtained:
Figure BDA0002555686590000061
the stability of the compound is proved by setting a Lyapunov function:
V(e)＝eTPe (10)
then there are:
Figure BDA0002555686590000062
although the first term, Q, is a semi-positive definite matrix, it is satisfied that the term is not always zero along any trajectory, so its equilibrium point is the origin. The second term is that rho is larger than or equal to D + eta, eta is a positive real number and is inevitably smaller than or equal to 0, so that:
Figure BDA0002555686590000063
therefore, the vibration mode nonlinear sliding-mode observer is stable in convergence and robust to parameter disturbance.
And establishing an observer for observing a first derivative of the vibration mode and a sliding mode observer for observing the nonlinear vibration mode according to the requirements, wherein the TWUSM parameter is measured by using an admittance circle method.
The vibration mode first derivative observer and the vibration mode nonlinear sliding mode observer are realized by FPGA, the traveling wave type rotary ultrasonic motor is selected from a model number TRUM60A, and an H-bridge drive circuit (also called a full-bridge drive circuit) is matched for use.
FIG. 1 is a schematic diagram of the method of the present invention, and as shown in the figure, the device used for implementing the method includes an FPGA (Altera cycle IV series), a Hall current sensor (model is HCS-LTSA), a voltage division sampling resistor, a high-speed ADC, and an H-bridge driving circuit, and TWUSM selects TRUM 60A; the FPGA is provided with a sampling module (namely, a Hall current sensor (the model is HCS-LTSA) and a voltage division sampling resistor are controlled to realize sampling), and a vibration mode first-order derivative observer and a vibration mode nonlinear sliding mode observer are established. Sampling output voltage and output current of the motor during operation by using a Hall current sensor and a voltage divider resistor through an FPGA at a sampling frequency of 4MHz, realizing digital-to-analog conversion by using a high-speed ADC and transmitting the digital-to-analog conversion back to the FPGA, and establishing a vibration mode first-order-derivative observer and a vibration mode nonlinear sliding-mode observer through software in the FPGA;
the principle of the method of the invention is as follows: firstly, the output voltage u ═ u when the motor runs is realized by using a Hall current sensor and a voltage divider resistor through an FPGA at a sampling frequency of 4MHzA,uB]I ═ iA,iB]The real-time sampling is realized by using a high-speed ADC (analog-to-digital converter) to realize digital-to-analog conversion, and the digital-to-analog conversion is transmitted back to an FPGA (field programmable gate array) and input to a vibration mode first-order-derivative observer to realize stator vibration mode first-order-derivative
Figure BDA0002555686590000071
The value reflects the real state of the TWUSM; secondly, inputting the voltage quantity obtained by calculating to obtain a first derivative of a real vibration mode and FPGA sampling to a vibration mode nonlinear sliding mode observer module, and calculating a stator vibration mode observed value according to a designed nonlinear sliding mode observer (7)
Figure BDA0002555686590000072
Stator vibration mode first order derivative observation value
Figure BDA0002555686590000073
And an observed error value of a derivative of a vibration mode of the stator
Figure BDA0002555686590000074
The observation error value of the first derivative of the stator vibration mode is fed back to the vibration mode nonlinear sliding mode observer in the form of a switch function v to be compensated, so that the observation of the stator vibration mode is realized.
The embodiments shown in fig. 2 and 3 are non-linear sliding mode views of the vibration mode of the TWUSM designed by the present inventionAs a simulation result of the measuring device, the upper solid line curve in fig. 2 and 3 shows a simulated actual value w ═ wA,wB]The dashed curve is the observed value output by the observer
Figure BDA0002555686590000075
While the observation curve was translated upward by 0.5 μm for observation. The lower curves in fig. 2 and 3 show the relative error of the observed value and the actual value, wherein the solid curve is the relative error e of phase arAThe dashed curve is the relative error e of phase BrB。
The simulation result shown in fig. 2 shows that the relative error between the output of the designed vibration mode nonlinear sliding mode observer and the true value is very small in the parameter stable state, and accurate tracking can be realized. The simulation result shown in fig. 3 shows that the relative error between the output and the true value of the designed vibration mode nonlinear sliding mode observer in the parameter time-varying state is still very small, and accurate observation can be realized under parameter disturbance. The nonlinear sliding mode observer with the designed vibration mode has the characteristics of high accuracy and strong robustness.
Nothing in this specification is said to apply to the prior art.

Claims (9)

1. The motor stator vibration mode observation method based on the nonlinear sliding-mode observer is realized, and the equipment used for realizing the method comprises an FPGA, a Hall current sensor, a voltage division sampling resistor, a high-speed ADC, an H-bridge drive circuit and a traveling wave type rotary ultrasonic motor, and comprises the following steps:
firstly, a Hall current sensor and a voltage dividing sampling resistor are controlled by using an FPGA (field programmable gate array), sampling is carried out on output voltage and current when a traveling wave type rotary ultrasonic motor runs at a sampling frequency of 4MHz, digital-to-analog conversion is realized by a high-speed ADC (analog-to-digital converter), and a vibration mode first-order derivative is established
Figure FDA0002555686580000011
Obtaining a first derivative of the vibration mode
Figure FDA0002555686580000012
The observed value of (a);
a second step of obtaining a first derivative of the vibration mode according to the first step
Figure FDA0002555686580000013
Establishing a vibration mode nonlinear sliding-mode observer according to the observed value;
and thirdly, proving the stability and the convergence of the vibration mode nonlinear sliding-mode observer designed in the second step.
2. The motor stator vibration mode observation method realized based on the nonlinear sliding-mode observer according to claim 1, characterized in that the specific process of the first step is as follows: the FPGA is used for controlling the Hall current sensor and the voltage dividing sampling resistor to sample output voltage and current of the motor in operation at a sampling frequency of 4MHz, the high-speed ADC is used for realizing digital-to-analog conversion and transmitting the digital-to-analog conversion back to the FPGA, and two-phase voltage u of the motor is obtainedA,uB]And a two-phase current i ═ iA,iB](ii) a Wherein, A and B represent two phases of the motor respectively, the same as the following;
the piezoelectric vibrator equation of TWUSM is known as:
Figure FDA0002555686580000014
wherein R isd＝diag{RdA,RdB}、Cd＝diag{CdA,CdBDielectric loss resistance and static capacitance of the two-phase piezoelectric vibrator are respectively; theta is an electromechanical coupling coefficient;
establishing a stator vibration mode first-order derivative observer:
according to the piezoelectric vibrator equation (1), A, B two-phase expressions are consistent, and one-phase equation is rewritten into an equation (3) according to the state variable voltage u:
Figure FDA0002555686580000015
designing the slip form surface
Figure FDA0002555686580000016
Figure FDA0002555686580000017
For the observed value of u, a stator vibration mode first-order derivative observer is designed as follows:
Figure FDA0002555686580000018
wherein, the equation (4) is introduced into the equation (3) to obtain the first derivative of the vibration mode
Figure FDA0002555686580000021
Is expressed as:
Figure FDA0002555686580000022
m and k1Are design parameters.
3. The motor stator vibration mode observation method realized based on the nonlinear sliding-mode observer according to claim 1, wherein the specific process of the second step is as follows:
the first derivative of the vibration mode obtained in the first step
Figure FDA0002555686580000023
The observed value is used as a first derivative of the real vibration mode
Figure FDA0002555686580000024
And two-phase voltage u ═ uA,uB]And a two-phase current i ═ iA,iB]TWUSM electromechanical coupling equation:
Figure FDA0002555686580000025
wherein M ═ diag { M ═ MsA,msB}、D＝diag{dsA,dsBAnd C ═ diag { C }sA,csBRepresents two-phase modal mass, modal damping and modal stiffness, respectively, and theta is an electromechanical coupling coefficient, FcIs a modal force;
according to TWUSM electromechanical coupling equation (2), since A, B two-phase expressions are consistent, a single-phase state equation (6) is established, wherein state variables are taken
Figure FDA0002555686580000026
Output of
Figure FDA0002555686580000027
Figure FDA0002555686580000028
C＝[01]And taking into account the perturbations of the system parameters:
Figure FDA0002555686580000029
designing a vibration mode nonlinear sliding mode observer according to the formula (6) as follows:
Figure FDA00025556865800000210
Figure FDA00025556865800000211
for the observer estimated system state, G is the design matrix.
4. The motor stator vibration mode observation method realized based on the nonlinear sliding-mode observer according to claim 1, wherein the concrete process of the third step is as follows:
the nonlinear sliding mode observer of the vibration mode is established on the basis of the first derivative of the vibration mode obtained in the first step
Figure FDA00025556865800000212
The observed value is used as a first derivative of the real vibration mode
Figure FDA00025556865800000213
Firstly, verifying the stability and the convergence of a vibration mode first-order derivative observer;
the vibration mode first derivative observer designed in the first step is as formula (4), wherein the parameter design requirement is as follows: k is a radical of1>0，0<r<1；
Figure FDA0002555686580000031
The stability is proved, and a Lyapunov function is set as follows:
Figure FDA0002555686580000032
its first derivative:
Figure FDA0002555686580000033
as long as the design parameters
Figure FDA0002555686580000034
Can ensure that
Figure FDA0002555686580000035
Combining the Lyapunov function to obtain
Figure FDA0002555686580000036
The vibration mode first-order derivative observer is not only gradually stable in the global range, but also stable in a finite time, and the stability time depends on the initial value s of s0：
Figure FDA0002555686580000037
Furthermore, the vibration mode nonlinear sliding-mode observer designed in the second step is as shown in formula (7):
Figure FDA0002555686580000038
wherein the matrix G ∈ R2×1(ii) a To satisfy A0A parametric design matrix with stable eigenvalues for a-GC, and for some constant f, Lyapunov symmetric positive definite matrices P and Q exist, satisfying:
Figure FDA0002555686580000039
the control input v of the vibration mode nonlinear sliding mode observer is as follows:
Figure FDA0002555686580000041
in the formula (I), the compound is shown in the specification,
Figure FDA0002555686580000042
for the state deviation, the design parameter rho is more than or equal to D + η and is a positive real number;
from the above requirements, the following design matrix is obtained:
Figure FDA0002555686580000043
the stability of the compound is proved by setting a Lyapunov function:
V(e)＝eTPe (10)
then there are:
Figure FDA0002555686580000044
although Q is a semi-positive definite matrix, the first item is satisfied that the item is not constantly zero along any track, so that the balance point is the origin; the second term is that rho is larger than or equal to D + eta, eta is a positive real number and is inevitably smaller than or equal to 0, so that:
Figure FDA0002555686580000045
therefore, the vibration mode nonlinear sliding-mode observer is stable in convergence and robust to parameter disturbance.
5. The observation method of claim 1, wherein the motor parameters are measured by admittance method.
6. The observation method of the stator vibration mode of the traveling wave type rotary ultrasonic motor according to claim 1, wherein the nonlinear sliding mode observer of the vibration mode is implemented by an FPGA.
7. The observation method of claim 1, wherein the traveling wave rotary ultrasonic motor is selected from the model number TRUM 60A.
8. The observation method of the stator vibration mode of the traveling wave type rotary ultrasonic motor according to claim 1, wherein the hall current sensor is HCS-LTS06A, and the high-speed ADC is a high-speed analog-to-digital converter of ADI.
9. The observation method of the stator vibration mode of the traveling wave type rotary ultrasonic motor according to claim 1, wherein the FPGA is an Altera cycle IV series.
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CN113852311A (en) * 2021-08-18 2021-12-28 北京精密机电控制设备研究所 Fault-tolerant permanent magnet synchronous motor phase current sampling method
CN114237045A (en) * 2021-11-29 2022-03-25 哈尔滨工业大学 Sensorless piezoelectric drive closed-loop control method
CN114389490A (en) * 2021-12-10 2022-04-22 江苏大学 Permanent magnet synchronous motor rotating speed control method based on fixed time second-order sliding mode technology

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