CN111694465B - Manufacturing method of touch display panel, touch display panel and display device - Google Patents
Manufacturing method of touch display panel, touch display panel and display device Download PDFInfo
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- CN111694465B CN111694465B CN202010579799.XA CN202010579799A CN111694465B CN 111694465 B CN111694465 B CN 111694465B CN 202010579799 A CN202010579799 A CN 202010579799A CN 111694465 B CN111694465 B CN 111694465B
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- 238000001312 dry etching Methods 0.000 claims description 6
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Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/042—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
- G06F3/0421—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means by interrupting or reflecting a light beam, e.g. optical touch-screen
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/042—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
- G06F3/0425—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means using a single imaging device like a video camera for tracking the absolute position of a single or a plurality of objects with respect to an imaged reference surface, e.g. video camera imaging a display or a projection screen, a table or a wall surface, on which a computer generated image is displayed or projected
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Abstract
The invention provides a manufacturing method of a touch display panel, the touch display panel and a display device, and relates to the technical field of display. The embodiment of the invention provides a display panel, which comprises a display area, wherein the display area comprises a through hole area and a shading area surrounding the through hole area; forming an organic layer on the light shielding region of the display panel; etching the organic layer to enable the surface of the organic layer far away from the display panel to have a plurality of concave structures; forming a touch electrode film on the organic layer; patterning the touch electrode film to form a shading layer in the concave structure; the shading layer is a touch electrode film remained in the concave structure after patterning treatment. The organic layer is subjected to corrosion treatment, so that the surface of the organic layer is provided with a plurality of concave structures, a shading layer is formed in the concave structures, and the influence of light from the inside of the display panel on the through hole area is reduced through the absorption of the shading layer to light.
Description
Technical Field
The present invention relates to the field of display technologies, and in particular, to a method for manufacturing a touch display panel, and a display device.
Background
At present, the arrangement of a front camera device or an infrared scanning device inside a display area has become a popular display panel manufacturing mode in the current display panel manufacturing, and the display panel manufactured by adopting the mode needs to be provided with a through hole area in the display area of the display panel, but due to the influence of light rays of an effective display area in the display panel and external natural light, the problems of light leakage, poor imaging quality and the like can occur at the position of the through hole area.
In order to solve this problem, in the FMLOC (Film multi-layer oncell touch, multilayer Film embedded touch structure) process, when the sensing electrode and the emitting electrode are fabricated in the effective display area, a metal light shielding layer is formed on the periphery of the via area, and since the conventional metal light shielding layer reflects light, it is necessary to coat black ink on the flat layer at the corresponding position of the metal light shielding layer around the via area, so as to reduce the problem of light leakage of the functional device in the via area in the display area.
However, in the current improvement mode, since the surface of the conventional metal shading layer is of a flat structure, light from the inside of the display panel is reflected, and the generated reflected light enters the position of the through hole area, so that more parasitic light can appear at the position of the through hole area, and the light emitting effect of the functional device positioned in the through hole area is affected.
Disclosure of Invention
The invention provides a manufacturing method of a touch display panel, the touch display panel and a display device, and aims to solve the problem that light leakage exists when a metal shading layer and black ink are adopted together to realize shading.
In order to solve the above problems, the present invention discloses a method for manufacturing a touch display panel, comprising:
providing a display panel, wherein the display panel comprises a display area, and the display area comprises a through hole area and a shading area surrounding the through hole area;
forming an organic layer on the light shielding region of the display panel;
etching the organic layer to enable the surface of the organic layer far away from the display panel to have a plurality of concave structures;
forming a touch electrode film on the organic layer;
patterning the touch electrode film to form a shading layer in the concave structure;
the shading layer is the touch electrode film remained in the concave structure after the patterning treatment.
Optionally, the material of the organic layer is an organic material with a main chain molecular structure of benzene rings.
Optionally, the display panel further includes a non-display area, the display area further includes an effective display area, and before the step of forming the organic layer on the light shielding area of the display panel, the method further includes:
Forming a buffer film on the display region and the non-display region of the display panel;
patterning the buffer film to form a buffer layer in the effective display area and the non-display area, and removing the buffer film in the light shielding area;
and forming an electrode connection layer on the buffer layer of the effective display area.
Optionally, the step of forming an organic layer on the light shielding region of the display panel includes:
forming an organic thin film covering the buffer layer, the electrode connection layer, and the display panel at the light shielding region;
patterning the organic thin film to form an organic layer located in the effective display region, the non-display region, and the light shielding region;
wherein the organic thin film in the pixel region in the effective display region is removed, and the effective display region is further formed with a first contact hole penetrating the organic layer, and the non-display region is further formed with a second contact hole penetrating the organic layer.
Optionally, the step of performing etching treatment on the organic layer so that a surface of the organic layer away from the display panel has a plurality of concave structures includes:
Etching the buffer layer at the position of the second contact hole to form a third contact hole penetrating through the buffer layer, and enabling the surface of the organic layer far away from the display panel to be provided with a plurality of concave structures, wherein the concave structures are positioned in the effective display area, the shading area and the non-display area;
wherein, the orthographic projection of the second contact hole on the display panel is at least partially overlapped with the orthographic projection of the third contact hole on the display panel.
Optionally, a dry etching process is used to etch the buffer layer at the position where the second contact hole is located, and etching gas used in the dry etching process includes oxygen and carbon tetrafluoride.
Optionally, the touch electrode film is further located on the organic layer of the effective display area, and the step of patterning the touch electrode film to form a light shielding layer in the concave structure includes:
patterning the touch electrode film positioned in the effective display area and the shading area to form an electrode layer and a reflection reducing layer in the effective display area and form a shading layer in the concave structure of the shading area;
The front projection of the electrode layer and the anti-reflection layer on the display panel are not overlapped, and the anti-reflection layer is the touch electrode film remained in the concave structure of the effective display area after the patterning treatment; the electrode layer is connected with the electrode connection layer through the first contact hole, and the electrode layer is connected with the display panel through the second contact hole and the third contact hole.
Optionally, after the step of patterning the touch electrode film to form a light shielding layer in the concave structure, the method further includes:
and forming a flat layer covering the electrode layer, the light shielding layer, the anti-reflection layer and the buffer layer.
In order to solve the above problems, the present invention also discloses a touch display panel, including:
a display panel including a display region including a through hole region and a light shielding region surrounding the through hole region;
an organic layer disposed on the light shielding region of the display panel, the organic layer having a plurality of recess structures at a surface remote from the display panel;
a light shielding layer disposed within the recessed structure;
The shading layer is a touch electrode film.
Optionally, the display panel further includes a non-display area, the display area further includes an effective display area, and the touch display panel further includes:
a buffer layer disposed on the effective display area and the non-display area of the display panel;
and an electrode connection layer disposed on the buffer layer of the effective display region.
Optionally, the organic layer is further located in the effective display area and the non-display area, and covers the buffer layer and the electrode connection layer;
the organic layer of the effective display area and the non-display area is provided with a plurality of concave structures on the surface far away from the display panel.
Optionally, the touch display panel further includes:
an electrode layer and a reflection reducing layer arranged in the effective display area;
the front projection of the electrode layer and the anti-reflection layer on the display panel are not overlapped, and the anti-reflection layer is a touch electrode film in a concave structure of the effective display area; the method comprises the steps of carrying out a first treatment on the surface of the The electrode layer is connected with the electrode connecting layer through a first contact hole penetrating through the organic layer; in the non-display area, the electrode layer is connected with the display panel through a second contact hole penetrating through the organic layer and a third contact hole penetrating through the buffer layer, and the orthographic projection of the second contact hole on the display panel is at least partially overlapped with the orthographic projection of the third contact hole on the display panel.
Optionally, the touch display panel further includes: and a planarization layer covering the electrode layer, the light shielding layer, the anti-reflection layer, and the buffer layer.
In order to solve the problems, the invention also discloses a display device which comprises the touch display panel.
Compared with the prior art, the invention has the following advantages:
in an embodiment of the invention, a display panel is provided, the display panel includes a display area, the display area includes a through hole area and a light shielding area surrounding the through hole area; forming an organic layer on the light shielding region of the display panel; etching the organic layer to enable the surface of the organic layer far away from the display panel to have a plurality of concave structures; forming a touch electrode film on the organic layer; patterning the touch electrode film to form a shading layer in the concave structure; the shading layer is a touch electrode film remained in the concave structure after patterning treatment. The organic layer of the shading area of the display panel is corroded, so that the surface of the organic layer far away from the display panel is provided with a plurality of concave structures, then the touch electrode film on the organic layer is subjected to patterning treatment, so that the touch electrode film is remained in the concave structures to form the shading layer, when the light rays in the display panel irradiate onto the shading layer in the concave structures, the light rays are continuously reflected and refracted in the concave structures with the shading layer and finally absorbed, so that the light rays irradiated to the periphery of the through hole area in the display panel can be absorbed, stray light of the through hole area can be reduced, and the light emitting effect of the functional device positioned in the through hole area is improved; and the shading layer positioned in the concave structure can absorb external natural light, so that the influence of the external natural light on the through hole area is reduced.
Drawings
FIG. 1 is a schematic cross-sectional view of an effective display area and a light shielding area of a touch display panel according to the prior art;
fig. 2 is a flowchart illustrating a method for manufacturing a touch display panel according to a first embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of a touch display panel with a light shielding area according to an embodiment of the invention;
FIG. 4 shows the molecular structure of a benzene ring as the main chain molecular structure employed in the organic layer according to the embodiment of the present invention;
FIG. 5 shows a molecular structure in which the main chain molecular structure employed in the organic layer is silicon in the prior art;
FIG. 6 is a schematic cross-sectional view of an embodiment of the present invention after forming a buffer layer in the active display area and the non-display area;
FIG. 7 is a schematic cross-sectional view showing an electrode connection layer formed in an effective display region and a non-display region in an embodiment of the present invention;
fig. 8 is a schematic cross-sectional view illustrating an organic layer formed in an effective display region and a non-display region in an embodiment of the present invention;
fig. 9 is a schematic cross-sectional view showing formation of a recess structure on an organic layer of an active display region and a non-display region in an embodiment of the present invention;
FIG. 10 is a schematic cross-sectional view illustrating formation of a touch electrode film in an active display area and a non-display area according to an embodiment of the present invention;
FIG. 11 is a schematic cross-sectional view of a touch electrode film patterned in an effective display area and a non-display area according to an embodiment of the present invention;
FIG. 12 is a schematic diagram showing the principle of absorption of natural light by the light shielding layer or the anti-reflection layer according to the embodiment of the present invention;
fig. 13 is a schematic cross-sectional view of an embodiment of the present invention after forming a flat layer in the active display area and the non-display area.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
In the prior art, shading the through hole area in the touch display panel is performed according to the following process: as shown in fig. 1, a display panel 1 is provided, wherein a display area of the display panel 1 includes an effective display area a, a through hole area (not shown in fig. 1), and a light shielding area B surrounding the through hole area, and a buffer layer 2 is formed in the effective display area a of the display panel 1; forming a patterned first electrode layer 3 on the buffer layer 2; forming a first organic layer 4 covering the first electrode layer 3 and the buffer layer 2 in the effective display area A, forming the first organic layer 4 on the display panel 1 surrounding the light shielding area B of the through hole area, patterning the first organic layer 4, and forming a via structure penetrating the first organic layer 4 on the first electrode layer 3 of the effective display area A, wherein the via structure is used for realizing the lap joint of the first electrode layer 3 and a subsequently formed second electrode layer 5; forming a second electrode layer 5 on the first organic layer 4 of the effective display area through a patterning process, the second electrode layer 5 including an induction electrode and an emission electrode, and simultaneously forming a metal light shielding layer 7 in the light shielding area B; then, the flat layer 6 covering the first organic layer 4, the second electrode layer 5 and the metal shielding layer 7 is formed, the influence of external light on the through hole area is shielded by the metal shielding layer 7, however, because the surface of the conventional metal shielding layer 7 is flat, the external light is reflected, so that stray light can appear at the through hole area, when the through hole area is provided with a camera, the imaging quality of the camera is affected, in the prior art, after the display module is formed, the black ink 8 is coated at the position, corresponding to the flat layer 6 and the metal shielding layer 7, in the structure, of the flat layer 6, the influence of the external light on the functional device in the through hole area is reduced by the black ink 8, but because the black ink 8 is positioned on the side, away from the display panel 1, of the metal shielding layer 7 only shields the external natural light, and because the surface of the metal shielding layer 7 is flat, when the light from the effective display area A in the display panel 1 is irradiated on the metal shielding layer 7, the light is reflected, and the reflected light can enter the through hole area, so that the functional device positioned in the through hole area can be affected.
Therefore, in the embodiment of the invention, the organic layer of the shading area of the display panel is subjected to corrosion treatment, so that the surface of the organic layer far away from the display panel is provided with a plurality of concave structures, then the touch electrode film on the organic layer is subjected to patterning treatment, so that the touch electrode film is remained in the concave structures to form the shading layer, when the light in the display panel irradiates on the shading layer in the concave structures, the light is continuously reflected and refracted in the concave structures with the shading layer and finally absorbed, thereby absorbing the light irradiated on the periphery of the through hole area in the display panel, reducing the stray light of the through hole area and improving the light emitting effect of the functional device positioned in the through hole area.
Example 1
Referring to fig. 2, a flowchart of a method for manufacturing a touch display panel according to an embodiment of the invention may specifically include the following steps:
step 210, providing a display panel, wherein the display panel comprises a display area, and the display area comprises a through hole area and a shading area surrounding the through hole area.
In an embodiment of the present invention, as shown in fig. 3, a display panel 100 is provided, where the display panel 100 includes a substrate 101, a PI Film (Polyimide Film) 102, a barrier layer 103, an interlayer dielectric layer 104, a source-drain electrode layer 105, a planarization layer 106, an anode 107, a pixel defining layer 108, an organic functional layer 109, and an encapsulation layer 110 sequentially formed on the substrate 101, and an active layer and a gate electrode located on the active layer are further included between the barrier layer 103 and the interlayer dielectric layer 104, and in this embodiment of the present invention, a thin Film encapsulation is adopted, and the material of the encapsulation layer 110 may be an inorganic material, an organic material, or a combination of an inorganic material and an organic material, for example, the encapsulation layer 110 includes a first encapsulation layer and a second encapsulation layer, and the materials of the first encapsulation layer and the second encapsulation layer are all inorganic materials, and the number of layers of the encapsulation layer 110 may be specifically set according to actual needs, which is not limited in this embodiment of the present invention.
The display panel 100 includes a display area including a through hole area and a light shielding area 10 surrounding the through hole area, the through hole area being an area for mounting functional devices such as a camera or an infrared scanning device, the light shielding area 10 being for subsequently providing a light shielding layer to perform a light shielding function on the through hole area.
And 220, forming an organic layer on the light shielding region of the display panel.
In the embodiment of the present invention, after the display panel 100 is obtained, the organic layer 203 is formed on the light shielding region 10 of the display panel 100, where the material of the organic layer 203 is an organic material with a main chain molecular structure of benzene rings, as shown in fig. 4, and the material of the conventional organic layer is an organic material with a main chain molecular structure of silicon, as shown in fig. 5, the organic material with a main chain molecular structure of benzene rings is more easily corroded by oxygen in the subsequent corrosion treatment process, so that the required surface morphology of the organic layer 203 can be obtained.
In an alternative embodiment of the present invention, the display panel 100 further includes a non-display area 30, and the display area further includes an effective display area 20, as shown in fig. 6, and further includes, before step 220: forming a buffer film on the display region and the non-display region of the display panel; patterning the buffer film to form a buffer layer in the effective display area and the non-display area, and removing the buffer film in the light shielding area; and forming an electrode connection layer on the buffer layer of the effective display area.
In the embodiment of the present invention, a buffer film is formed on the display area and the non-display area 30 of the display panel 100, the buffer film may be silicon nitride, silicon oxide or a combination of silicon nitride and silicon oxide, a first photoresist is formed on the buffer film, the first photoresist is exposed and developed, the buffer film uncovered by the first photoresist after development is etched, the buffer film of the light shielding area 10 is etched away, and the buffer layer 201 is formed on the active display area 20 and the non-display area 30, since the light shielding area 10 is disposed around a via area for mounting a functional device, the film structure of the via area is to be cut away, and if the buffer film of the light shielding area 10 is not etched away, cracks may be generated due to stress when the film structure of the via area is cut away.
After forming the buffer layer 201, a first metal film is formed on the buffer layer 201, a second photoresist is formed on the metal film, the second photoresist is exposed and developed, the first metal film uncovered by the second photoresist after development is etched to form an electrode connection layer 202, and then the second photoresist remaining on the electrode connection layer 202 is removed, as shown in fig. 7, the electrode connection layer 202 is located only in the effective display area 20, wherein the material of the first metal film is Ti/Al/Ti, and the electrode connection layer 202 is used for connecting with a subsequently formed electrode layer to transmit an electrical signal.
In an alternative embodiment of the present invention, step 220 may specifically include sub-step S2201 and sub-step S2202:
substep S2201, forming an organic thin film covering the buffer layer, the electrode connection layer and the display panel at the light shielding region;
a substep S2202 of performing patterning processing on the organic thin film to form an organic layer located in the effective display region, the non-display region, and the light shielding region; wherein the organic thin film in the pixel region in the effective display region is removed, and the effective display region is further formed with a first contact hole penetrating the organic layer, and the non-display region is further formed with a second contact hole penetrating the organic layer.
In the embodiment of the present invention, after the electrode connection layer 202 is formed on the buffer layer 201 of the effective display region 20, an organic film covering the buffer layer 201, the electrode connection layer 202, and the display panel 100 located in the light shielding region 10 is formed, the organic film is exposed and developed, and the organic film in the pixel region in the effective display region 20 is removed by development to form the organic layer 203 in the effective display region 20, the non-display region 30, and the light shielding region 10, as shown in fig. 8, and a first contact hole 2032 penetrating the organic layer 203 is formed in the effective display region 20 and a second contact hole 2033 penetrating the organic layer 203 is formed in the non-display region 30. The first contact hole 2032 may be used for connecting the electrode connection layer 202 with a subsequently formed electrode layer, and the second contact hole 2033 may be used for connecting a subsequently formed signal transmission electrode with the display panel 100.
And 230, performing corrosion treatment on the organic layer, so that the surface of the organic layer far away from the display panel is provided with a plurality of concave structures.
In the embodiment of the present invention, after the organic layer 203 is formed in the effective display region 20, the non-display region 30 and the light shielding region 10, the organic layer 203 is subjected to etching treatment, so that a plurality of recess structures 2031 are formed on the surface of the organic layer 203 away from the display panel 100.
In an embodiment of the present invention, step 230 may specifically include: etching the buffer layer at the position of the second contact hole to form a third contact hole penetrating through the buffer layer, and enabling the surface of the organic layer far away from the display panel to be provided with a plurality of concave structures, wherein the concave structures are positioned in the effective display area, the shading area and the non-display area; wherein, the orthographic projection of the second contact hole on the display panel is at least partially overlapped with the orthographic projection of the third contact hole on the display panel.
In the embodiment of the present invention, the second contact hole 2033 penetrating through the organic layer 203 is formed in the non-display area 30, and since the organic layer 203 in the non-display area 30 is located on the buffer layer 201, the second contact hole 2033 is also located on the buffer layer 201, the buffer layer 201 where the second contact hole 2033 is located is etched to form a third contact hole penetrating through the buffer layer 201, as shown in fig. 9, while the buffer layer 201 is etched to form the third contact hole, the surface of the organic layer 203, which is far away from the display panel 100, is etched into a plurality of concave structures 2031, the concave structures 2031 are located in the effective display area 20, the light-shielding area 10 and the non-display area 30, and the concave structures 2031 located in the light-shielding area 10 can make the light-shielding layer formed thereon subsequently present an uneven surface, so as to realize the absorption of the light irradiated thereon.
Wherein, the orthographic projection of the second contact hole 2033 on the display panel 100 and the orthographic projection of the third contact hole on the display panel 100 are at least partially overlapped, so that the signal transmission electrode formed later can be connected with the display panel 100 through the second contact hole 2033 and the third contact hole.
Further, the buffer layer 201 at the position of the second contact hole 2033 is etched by a dry etching process, and the etching gas used in the dry etching process includes oxygen and carbon tetrafluoride. Therefore, the principle of forming the recess structure on the surface of the organic layer 203 is: since the organic layer 203 formed of an organic material having a benzene ring as a main chain molecular structure is easily corroded by oxygen, when the buffer layer 201 at the position of the second contact hole 2033 is dry etched to form the third contact hole, the etching gas may contact with the surface of the organic layer 203 remote from the display panel 100, and oxygen in the etching gas may corrode the surface of the organic layer 203, so that a plurality of recess structures 2031 may occur on the surface of the organic layer 203.
And step 240, forming a touch electrode film on the organic layer.
In the embodiment of the invention, after the recess structure 2031 is formed on the surface of the organic layer 203, the touch electrode film 2040 is deposited on the organic layer 203, and the touch electrode film 2040 is located in the light shielding region 10, the effective display region 20 and the non-display region 30, as shown in fig. 10, since the organic layer 203 includes the first contact hole 2032 and the second contact hole 2033, and the orthographic projection of the second contact hole 2033 and the third contact hole in the buffer layer 201 on the display panel 100 is at least partially overlapped, after the touch electrode film 2040 is deposited on the surface of the organic layer 203, the touch electrode film 2040 is contacted with the electrode connection layer 202 through the first contact hole 2032, and the touch electrode film 2040 is contacted with the display panel 100 through the second contact hole 2033 and the third contact hole, and, since the organic film in the pixel region in the effective display region 20 is removed, the touch electrode film 2040 in the pixel region is contacted with the buffer layer 201, wherein the touch electrode film 2040 is made of Ti/Al/Ti.
Step 250, performing patterning treatment on the touch electrode film to form a light shielding layer in the concave structure; the shading layer is the touch electrode film remained in the concave structure after the patterning treatment.
In the embodiment of the present invention, after the touch electrode film 2040 is formed, the patterning process is performed on the touch electrode film 2040 to form the light shielding layer 207 in the recess structure 2031 in the light shielding region 10, as shown in fig. 3 and 11.
In the embodiment of the present invention, the touch electrode film 2040 is further disposed on the organic layer 203 of the effective display area 20, and the step 250 specifically includes: patterning the touch electrode film positioned in the effective display area and the shading area to form an electrode layer and a reflection reducing layer in the effective display area and form a shading layer in the concave structure of the shading area; the front projection of the electrode layer and the anti-reflection layer on the display panel are not overlapped, and the anti-reflection layer is the touch electrode film remained in the concave structure of the effective display area after the patterning treatment; the electrode layer is connected with the electrode connection layer through the first contact hole, and the electrode layer is connected with the display panel through the second contact hole and the third contact hole.
Specifically, a third photoresist is formed on the touch electrode film 2040, the third photoresist is exposed and developed, the touch electrode film 2040 uncovered by the third photoresist after development is etched, since the touch electrode film 2040 is formed on the organic layer 203 having the recess structure 2031, after etching the touch electrode film 2040 uncovered by the third photoresist after development, a touch electrode film material remains in the recess structure 2031, a light shielding layer 207 is formed on the touch electrode film 2040 remaining in the recess structure 2031 of the light shielding region 10, an electrode layer 204 is formed on the touch electrode film covered by the third photoresist after etching the touch electrode film 2040 in the effective display region 20, and a reverse reducing layer 205 is formed after etching the touch electrode film 2040 except the electrode layer 204 on the organic layer 203 in the effective display region 20, as shown in fig. 11.
Further, the touch electrode film 2040 is further located in the non-display area 30, the touch electrode film 2040 in the non-display area 30 is etched to form the anti-reflection layer 205 and the signal transmission electrode 208, and finally the third photoresist remaining on the electrode layer 204 and the signal transmission electrode 208 is stripped.
The front projection of the electrode layer 204 and the anti-falling layer 205 on the display panel 100 are not overlapped, the electrode layer 204 located in the effective display area 20 includes an emitter electrode and a sensor electrode, and the anti-falling layer 205 is a touch electrode film 2040 remained in the concave structure 2031 of the effective display area 20 after patterning treatment; the electrode layer 204 located in the effective display area 20 is connected to the electrode connection layer 202 through the first contact hole 2032, the electrode layer 204 and the electrode connection layer 202 are disposed in different layers, the electrode layer 204 includes a plurality of sensing electrodes and a plurality of driving electrodes, and the sensing electrodes and the driving electrodes are disposed in the same layer crossing each other, so that the driving electrodes and the sensing electrodes may not be connected to each other in the same layer, otherwise, a short circuit phenomenon may occur, and therefore, the driving electrodes or the sensing electrodes need to be bridged through the electrode connection layer 202, that is, when the sensing electrodes are connected to each other in the same layer, the driving electrodes are connected to each other through the electrode connection layer 202 disposed in different layers, or, when the driving electrodes are connected to each other in the same layer, the sensing electrodes are connected to each other through the electrode connection layer 202 disposed in different layers. The signal transmission electrode 208 located in the non-display area 30 is connected to the display panel 100 through the second contact hole 2033 and the third contact hole for transmitting a driving signal from the chip of the display panel 100 to the driving electrode and transmitting an sensing signal from the sensing electrode to the chip of the display panel 100.
In an alternative embodiment of the present invention, since the surface of the organic layer 203 has a plurality of concave structures 2031, two adjacent concave structures 2031 are connected together by the organic layer 203, and the connection surface of the organic layer 203 connecting two adjacent concave structures 2031 is a planar structure, as shown in fig. 12.
Alternatively, the connection surface of the organic layer 203 connecting the adjacent two concave structures 2031 may also be a convex structure.
In another alternative embodiment of the present invention, the plurality of concave structures 2031 are directly connected in sequence without a connection surface of a planar structure or a convex structure therebetween.
In the embodiment of the present invention, after etching the touch electrode film 2040, part of the material of the touch electrode film 2040 remains in the concave structure 2031, after the light enters the concave structure 2031, the light is continuously reflected and refracted in the concave structure 2031, and finally absorbed, for the light shielding layer 207 formed in the light shielding region 10, when the external natural light enters the light shielding layer 207, the external natural light is absorbed by the light shielding layer 207, so that the influence of the external natural light on the functional devices in the through hole region surrounded by the light shielding layer 207 can be reduced; when the lateral light in the effective display area 20 inside the display panel 100 is irradiated onto the light shielding layer 207 of the light shielding area 10, as shown in fig. 3, the light shielding layer 207 also absorbs the lateral light from the effective display area 20, so that the influence of the lateral light from the effective display area 20 on the functional devices located in the through hole area can be reduced; in addition, when the buffer layer 201 of the non-display area 30 in the display panel 100 is etched to form the third contact hole, a plurality of concave structures 2031 are formed on the surface of the organic layer 203, and then the residual touch electrode film 2040 is formed in the concave structures 2031 by etching the touch electrode film 2040, so that the light shielding layer 207 is formed, no additional process is required for forming the light shielding layer 207, in the prior art, when the touch electrode is formed, the metal light shielding layer is formed in the light shielding area, then the second organic layer is formed, and finally, a layer of black ink is required to be coated on the second organic layer, so that the light shielding effect is realized by the metal light shielding layer and the black ink.
Further, for the anti-reflection layer 205 of the effective display area 20 and the non-display area 30, when the external natural light irradiates the touch display panel, the anti-reflection layer 205 of the effective display area 20 and the non-display area 30 absorbs the external natural light, so that the overall reflectivity of the touch display panel can be effectively reduced.
In addition, in the embodiment of the present invention, compared with the conventional organic silicon material having a main chain molecular structure as a benzene ring, the organic material having a benzene ring is more easily corroded by oxygen, and after the organic layer 203 formed of the organic material having a benzene ring as a main chain molecular structure is corroded to form the concave structure 2031, and the light shielding layer 207 or the anti-reflection layer 205 is formed in the concave structure 2031, it is found that the transmittance of the formed light shielding layer 207 or anti-reflection layer 205 has a close relationship with the transmittance of the oxygen used when the buffer layer 201 is etched to form the third contact hole, and as the oxygen flow increases, the optical density value of the light shielding layer 207 or anti-reflection layer 205 gradually increases, the light absorption capacity of the light shielding layer 207 or anti-reflection layer 205 gradually increases, and the optical transmittance of the light shielding layer 207 or anti-reflection layer 205 also gradually decreases, as shown in table i.e., when the wavelength is 550nm, the relationship between the optical density value of the oxygen flow and the light shielding layer 207 or anti-reflection layer 205 is 0, and the optical density value of the light shielding layer 207 or anti-reflection layer 205 is gradually decreases, for example, when the optical density value of the light shielding layer 207 or anti-reflection layer 205 is 0.013 is gradually decreased, and the optical transmittance of the light is 0 or the light shielding layer 205 is gradually decreased; when the oxygen flow is 60, the optical density value of the corresponding light shielding layer 207 or the anti-reflection layer 205 is 0.12, and at this time, the transmittance of the light shielding layer 207 or the anti-reflection layer 205 is 74.87%, so that the light absorbing capability of the light shielding layer 207 or the anti-reflection layer 205 is enhanced; when the oxygen flow is 150, the optical density value of the corresponding light shielding layer 207 or the anti-reflection layer 205 is 0.99, and at this time, the transmittance of the light shielding layer 207 or the anti-reflection layer 205 is 10.32%, and the light absorbing capability of the light shielding layer 207 or the anti-reflection layer 205 is very strong.
| Oxygen flow rate | 150 | 60 | 0 |
| Optical density (@ 550 nm) | 0.99 | 0.12 | 0.013 |
| Average transmittance | 10.32％ | 74.87％ | 94.76％ |
List one
In another alternative embodiment of the present invention, step 205 is followed by: a planarization layer is formed to cover the electrode layer, the light shielding layer, the anti-reflection layer and the buffer layer.
In the embodiment of the present invention, after patterning the touch electrode film 2040, a planarization layer 206 is formed, as shown in fig. 13, the planarization layer 206 covers the electrode layer 204, the light shielding layer 207, the anti-reflection layer 205 and the buffer layer 201, and the material of the planarization layer 206 is an organic material, for example, may be a resin material, and the planarization layer 206 is used for planarizing the underlying film structure.
In the embodiment of the invention, the organic layer of the shading area of the display panel is corroded to enable the surface of the organic layer far away from the display panel to be provided with a plurality of concave structures, then the touch electrode film on the organic layer is subjected to patterning treatment to enable the touch electrode film to remain in the concave structure so as to form the shading layer, when the light in the display panel irradiates onto the shading layer in the concave structure, the light is continuously reflected and refracted in the concave structure with the shading layer and finally absorbed, so that the light in the display panel irradiates around the through hole area can be absorbed, stray light of the through hole area can be reduced, and the light emitting effect of a functional device positioned in the through hole area is improved; and the shading layer positioned in the concave structure can absorb external natural light, so that the influence of the external natural light on the through hole area is reduced.
Example two
The second embodiment of the present invention provides a touch display panel, including:
a display panel 100, the display panel 100 including a display region including a through hole region and a light shielding region 10 surrounding the through hole region;
an organic layer 203 disposed on the light shielding region 10 of the display panel 100, the organic layer 203 having a plurality of recess structures 2031 on a surface remote from the display panel 100;
a light shielding layer 207 disposed within the recessed structure 2031;
the light shielding layer 207 is a touch electrode film, the material of the touch electrode film is Ti/Al/Ti, and the material of the organic layer 203 is an organic material with a main chain molecular structure of benzene ring.
Specifically, the light shielding layer 207 is a touch electrode film remained in the recess structure 2031 after patterning the touch electrode film 2040 formed on the organic layer 203.
In addition, the display panel 100 includes a substrate 101, a PI Film (Polyimide Film) 102, a barrier layer 103, an interlayer dielectric layer 104, a source drain electrode layer 105, a planarization layer 106, an anode 107, a pixel defining layer 108, an organic functional layer 109, and an encapsulation layer 110 sequentially formed on the substrate 101, where an active layer and a gate electrode located on the active layer are further included between the barrier layer 103 and the interlayer dielectric layer 104, and in this embodiment, the material of the encapsulation layer 110 may be an inorganic material, an organic material, or a combination of an inorganic material and an organic material, for example, the encapsulation layer 110 includes a first encapsulation layer and a second encapsulation layer, and the materials of the first encapsulation layer and the second encapsulation layer are all inorganic materials, and the number of layers of the encapsulation layer 110 may be specifically set according to actual needs, which is not limited in this embodiment of the present invention.
In the embodiment of the present invention, the display panel 100 further includes a non-display area 30, the display area further includes an effective display area 20, and the touch display panel further includes:
a buffer layer 201 disposed on the effective display area 20 and the non-display area 30 of the display panel 100;
an electrode connection layer 202 disposed on the buffer layer 201 of the effective display area 20.
Wherein the organic layer 203 is further located in the effective display region 20 and the non-display region 30, and covers the buffer layer 201 and the electrode connection layer 202;
wherein the organic layer 203 of the effective display area 20 and the non-display area 30 has a plurality of recess structures 2031 on a surface remote from the display panel 100.
Further, the touch display panel further includes:
an electrode layer 204 and a anti-reflection layer 205 disposed in the effective display area 20;
the front projection of the electrode layer 204 and the anti-reflection layer 205 on the display panel 100 are not overlapped, and the anti-reflection layer 205 is a touch electrode film 2040 in the concave structure 2031 of the effective display area 20; the electrode layer 204 is connected to the electrode connection layer 202 through a first contact hole 2032 penetrating through the organic layer 203; in the non-display region 30, the electrode layer 204 is connected to the display panel 100 through a second contact hole 2033 penetrating through the organic layer 203 and a third contact hole penetrating through the buffer layer 201, where the orthographic projection of the second contact hole 2033 on the display panel 100 and the orthographic projection of the third contact hole on the display panel 100 are at least partially overlapped, and the material of the electrode layer is Ti/Al/Ti.
Specifically, the plurality of recess structures 2031 are formed when etching the buffer layer 201 at the position where the second contact hole 2033 is located in the non-display region 30, and two adjacent recess structures 2031 are connected together by the organic layer 203, and the connection surface of the organic layer 203 connecting the two adjacent recess structures 2031 is a planar structure or a convex structure.
Alternatively, the plurality of concave structures 2031 may be directly connected in sequence, and there is no connection surface with a planar structure or a convex structure.
In addition, the touch display panel further includes:
a planarization layer 206 covering the electrode layer 204, the light shielding layer 207, the anti-reflection layer 205, and the buffer layer 201.
The touch display panel in the embodiment of the invention is manufactured by adopting the manufacturing method of the touch display panel in the embodiment one.
The embodiment of the invention also provides a display device which comprises the touch display panel.
In the embodiment of the invention, the organic layer of the shading area of the display panel is corroded to enable the surface of the organic layer far away from the display panel to be provided with a plurality of concave structures, then the touch electrode film on the organic layer is subjected to patterning treatment to enable the touch electrode film to remain in the concave structure so as to form the shading layer, when the light in the display panel irradiates onto the shading layer in the concave structure, the light is continuously reflected and refracted in the concave structure with the shading layer and finally absorbed, so that the light in the display panel irradiates around the through hole area can be absorbed, stray light of the through hole area can be reduced, and the light emitting effect of a functional device positioned in the through hole area is improved; and the shading layer positioned in the concave structure can absorb external natural light, so that the influence of the external natural light on the through hole area is reduced.
For the foregoing method embodiments, for simplicity of explanation, the methodologies are shown as a series of acts, but one of ordinary skill in the art will appreciate that the present invention is not limited by the order of acts, as some steps may, in accordance with the present invention, occur in other orders or concurrently. Further, those skilled in the art will also appreciate that the embodiments described in the specification are all preferred embodiments, and that the acts and modules referred to are not necessarily required for the present invention.
In this specification, each embodiment is described in a progressive manner, and each embodiment is mainly described by differences from other embodiments, and identical and similar parts between the embodiments are all enough to be referred to each other.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article or apparatus that comprises the element.
The above detailed description of the method for manufacturing a touch display panel, the touch display panel and the display device provided by the invention applies specific examples to illustrate the principles and embodiments of the invention, and the above examples are only used for helping to understand the method and core ideas of the invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present invention, the present description should not be construed as limiting the present invention in view of the above.
Claims (14)
1. The manufacturing method of the touch display panel is characterized by comprising the following steps of:
providing a display panel, wherein the display panel comprises a display area, and the display area comprises a through hole area and a shading area surrounding the through hole area;
forming an organic layer on the light shielding region of the display panel;
etching the organic layer to enable the surface of the organic layer far away from the display panel to have a plurality of concave structures;
forming a touch electrode film on the organic layer;
patterning the touch electrode film to form a shading layer in the concave structure;
The shading layer is the touch electrode film remained in the concave structure after the patterning treatment.
2. The method according to claim 1, wherein the material of the organic layer is an organic material having a main chain molecular structure of benzene rings.
3. The method of claim 1, wherein the display panel further comprises a non-display region, the display region further comprising an active display region, the step of forming an organic layer on the light-shielding region of the display panel further comprising:
forming a buffer film on the display region and the non-display region of the display panel;
patterning the buffer film to form a buffer layer in the effective display area and the non-display area, and removing the buffer film in the light shielding area;
and forming an electrode connection layer on the buffer layer of the effective display area.
4. A method according to claim 3, wherein the step of forming an organic layer on the light-shielding region of the display panel comprises:
forming an organic thin film covering the buffer layer, the electrode connection layer, and the display panel at the light shielding region;
Patterning the organic thin film to form an organic layer located in the effective display region, the non-display region, and the light shielding region;
wherein the organic thin film in the pixel region in the effective display region is removed, and the effective display region is further formed with a first contact hole penetrating the organic layer, and the non-display region is further formed with a second contact hole penetrating the organic layer.
5. The method of claim 4, wherein the etching the organic layer such that a surface of the organic layer remote from the display panel has a plurality of recess structures, comprises:
etching the buffer layer at the position of the second contact hole to form a third contact hole penetrating through the buffer layer, and enabling the surface of the organic layer far away from the display panel to be provided with a plurality of concave structures, wherein the concave structures are positioned in the effective display area, the shading area and the non-display area;
wherein, the orthographic projection of the second contact hole on the display panel is at least partially overlapped with the orthographic projection of the third contact hole on the display panel.
6. The method of claim 5, wherein the buffer layer at the location of the second contact hole is etched using a dry etching process, and wherein the etching gas used in the dry etching process includes oxygen and carbon tetrafluoride.
7. The method of claim 5, wherein the touch electrode film is further disposed on the organic layer of the active display area, and the step of patterning the touch electrode film to form a light shielding layer in the recess structure comprises:
patterning the touch electrode film positioned in the effective display area and the shading area to form an electrode layer and a reflection reducing layer in the effective display area and form a shading layer in the concave structure of the shading area;
the front projection of the electrode layer and the anti-reflection layer on the display panel are not overlapped, and the anti-reflection layer is the touch electrode film remained in the concave structure of the effective display area after the patterning treatment; the electrode layer is connected with the electrode connection layer through the first contact hole, and the electrode layer is connected with the display panel through the second contact hole and the third contact hole.
8. The method of claim 7, further comprising, after the step of patterning the touch electrode film to form a light shielding layer within the recessed structure:
And forming a flat layer covering the electrode layer, the light shielding layer, the anti-reflection layer and the buffer layer.
9. A touch display panel, comprising:
a display panel including a display region including a through hole region and a light shielding region surrounding the through hole region;
an organic layer disposed on the light shielding region of the display panel, the organic layer having a plurality of recess structures at a surface remote from the display panel;
a light shielding layer disposed within the recessed structure;
the shading layer is a touch electrode film.
10. The touch display panel of claim 9, wherein the display panel further comprises a non-display area, the display area further comprising an active display area, the touch display panel further comprising:
a buffer layer disposed on the effective display area and the non-display area of the display panel;
and an electrode connection layer disposed on the buffer layer of the effective display region.
11. The touch display panel according to claim 10, wherein the organic layer is further located in the effective display region and the non-display region, and covers the buffer layer and the electrode connection layer;
The organic layer of the effective display area and the non-display area is provided with a plurality of concave structures on the surface far away from the display panel.
12. The touch display panel of claim 11, further comprising:
an electrode layer and a reflection reducing layer arranged in the effective display area;
the front projection of the electrode layer and the anti-reflection layer on the display panel are not overlapped, and the anti-reflection layer is a touch electrode film in a concave structure of the effective display area; the electrode layer is connected with the electrode connecting layer through a first contact hole penetrating through the organic layer; in the non-display area, the electrode layer is connected with the display panel through a second contact hole penetrating through the organic layer and a third contact hole penetrating through the buffer layer, and the orthographic projection of the second contact hole on the display panel is at least partially overlapped with the orthographic projection of the third contact hole on the display panel.
13. The touch display panel of claim 12, further comprising:
and a planarization layer covering the electrode layer, the light shielding layer, the anti-reflection layer, and the buffer layer.
14. A display device comprising the touch display panel according to any one of claims 9 to 13.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107134459A (en) * | 2017-04-07 | 2017-09-05 | 京东方科技集团股份有限公司 | Show backboard and preparation method thereof and display device |
| CN107180852A (en) * | 2017-05-18 | 2017-09-19 | 上海天马有机发光显示技术有限公司 | A kind of touch-control display panel and display device |
| CN109509707A (en) * | 2018-12-11 | 2019-03-22 | 合肥鑫晟光电科技有限公司 | Display panel, array substrate, thin film transistor (TFT) and its manufacturing method |
| CN109585303A (en) * | 2018-11-23 | 2019-04-05 | 合肥鑫晟光电科技有限公司 | Display panel, array substrate, thin film transistor (TFT) and its manufacturing method |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107134459A (en) * | 2017-04-07 | 2017-09-05 | 京东方科技集团股份有限公司 | Show backboard and preparation method thereof and display device |
| CN107180852A (en) * | 2017-05-18 | 2017-09-19 | 上海天马有机发光显示技术有限公司 | A kind of touch-control display panel and display device |
| CN109585303A (en) * | 2018-11-23 | 2019-04-05 | 合肥鑫晟光电科技有限公司 | Display panel, array substrate, thin film transistor (TFT) and its manufacturing method |
| CN109509707A (en) * | 2018-12-11 | 2019-03-22 | 合肥鑫晟光电科技有限公司 | Display panel, array substrate, thin film transistor (TFT) and its manufacturing method |
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