CN111694220A - Synchronous method for scanning type laser direct imaging - Google Patents
Synchronous method for scanning type laser direct imaging Download PDFInfo
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- CN111694220A CN111694220A CN201910179959.9A CN201910179959A CN111694220A CN 111694220 A CN111694220 A CN 111694220A CN 201910179959 A CN201910179959 A CN 201910179959A CN 111694220 A CN111694220 A CN 111694220A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
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- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The invention discloses a synchronous method of scanning laser direct imaging, which determines position error data of a scanning motion mechanism and multiplying power error data of an imaging mechanism, takes each step of the scanning motion mechanism as a compensation cycle after starting exposure, carries out position compensation calculation according to the position error data corresponding to the position of the scanning motion mechanism and the multiplying power error data of the imaging mechanism in the step cycle to obtain an error value, and determines the imaging time of the imaging mechanism according to the magnitude relation between the accumulated error value and an output pulse range. According to the invention, various influence factors are added into the calculation module, and the error data corresponding to each exposure strip is real error data, so that the calculation is more reasonable and the result is more accurate; the overall error of each exposure strip can be controlled within the range of one motion mechanism output pulse.
Description
Technical Field
The invention belongs to the technical field of intelligent equipment, and particularly relates to a scanning type laser direct imaging synchronization method.
Background
In the scanning process of a laser direct imaging system (LDI), a specific image needs to be displayed at a specific position, and once deviation exists in position calculation, image dislocation can be caused, so that a scanning motion mechanism and an imaging mechanism need to be synchronously processed; the existing method is that a group of compensation data is shared by scanning motion strokes, so that position compensation calculation is not accurate, the imaging position is influenced, and the influence on high-speed and high-precision equipment is larger.
Disclosure of Invention
In view of the above, the main objective of the present invention is to provide a synchronization method for scanning laser direct imaging.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
the embodiment of the invention provides a synchronous method for scanning type laser direct imaging, which comprises the following steps: determining position error data of a scanning motion mechanism and multiplying power error data of an imaging mechanism, after exposure is started, taking each step of the scanning motion mechanism as a compensation cycle, performing position compensation calculation according to the position error data corresponding to the position of the scanning motion mechanism and the multiplying power error data of the imaging mechanism in the step cycle to obtain an error value, and determining the imaging time of the imaging mechanism according to the magnitude relation between the accumulated error value and an output pulse range.
In the above scheme, the determining the position error data of the scanning motion mechanism specifically includes: and calibrating the whole exposure stroke in sections through a laser interferometer, measuring the difference value between the theoretical value and the actual value of each section of interval, and multiplying the difference value between the theoretical value and the actual value of each section of interval by a first amplification factor to obtain the position error data of the N groups of scanning motion mechanisms.
In the foregoing solution, the determining magnification error data of the imaging mechanism specifically includes: calibrating the real multiplying power of the imaging mechanism, and determining the difference between the real multiplying power and the theoretical design multiplying power; and multiplying the difference value between the real magnification and the theoretical magnification by a second magnification coefficient to obtain magnification error data of the imaging mechanism.
In the above scheme, the performing position compensation calculation according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism in the step period to obtain an error value specifically includes: and selecting corresponding position error data according to the index number of the currently exposed strip and the current position of the scanning motion mechanism, and adding the magnification error data of the imaging mechanism to obtain an error value.
In the above scheme, the determining the imaging time of the imaging mechanism according to the accumulated error value and the size of the output pulse range specifically includes: when the accumulated error value is larger than or equal to the pulse range output by one scanning motion mechanism, triggering the imaging mechanism to image at the moment of stepping PW +/-signal width PSO; when the accumulated error value is smaller than the output pulse range of one scanning motion mechanism, the imaging mechanism is triggered to image at the moment of stepping PW.
In the above-described aspect, after the imaging mechanism images, the error value is newly determined for the next place of the exposure stripe and the imaging timing of the imaging mechanism is determined until the entire exposure formation of the exposure stripe is finished.
Compared with the prior art, the method has the advantages that various influence factors are added into the calculation module, the error data corresponding to each exposure strip is the real error data, the operation is more reasonable, and the result is more accurate; the overall error of each exposure strip can be controlled within the range of one motion mechanism output pulse.
Drawings
Fig. 1 is a flowchart of a synchronization method for scanning laser direct imaging according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The embodiment of the invention provides a synchronous method for scanning type laser direct imaging, which is realized by the following steps as shown in figure 1:
step 101: determining position error data of a scanning motion mechanism and multiplying power error data of an imaging mechanism;
specifically, the exposure whole stroke is subjected to equidistant subsection calibration through a laser interferometer, the difference value between a theoretical value and an actual value of each section of interval is measured, and the difference value between the theoretical value and the actual value of each section of interval is multiplied by a first amplification factor to obtain the position error data of the N groups of scanning motion mechanisms.
Calibrating the real multiplying power of the imaging mechanism, and determining the difference between the real multiplying power and the theoretical design multiplying power; and multiplying the difference value between the real magnification and the theoretical magnification by a second magnification coefficient to obtain magnification error data of the imaging mechanism.
The first amplification factor and the second amplification factor are determined according to error values of different motion mechanisms, and each issued value is ensured to be an integer.
Step 102: after exposure is started, taking each step of a scanning motion mechanism as a compensation cycle, and performing position compensation calculation according to position error data corresponding to the position of the scanning motion mechanism and magnification error data of an imaging mechanism in the step cycle to obtain an error value;
specifically, the corresponding position error data is selected according to the index number of the currently exposed strip and the current position of the scanning motion mechanism, and the error value is obtained by adding the magnification error data of the imaging mechanism.
The position error is accumulated every time a pso signal is received, i.e. calculated, during operation.
The imaging mechanism magnification error is calculated only at the following three times: at the time of PW (position error accumulation is less than + -PSO), at the time of PW + PSO (position error accumulation is added to PSO), or at the time of PW-PSO (position error accumulation is less than-PSO).
And 103, determining the imaging time of the imaging mechanism according to the magnitude relation between the accumulated error value and the output pulse range.
Specifically, when the accumulated error value is larger than or equal to the output pulse range of one scanning motion mechanism, the imaging mechanism is triggered to image at the moment of stepping PW +/-signal width PSO; when the accumulated error value is smaller than the output pulse range of one scanning motion mechanism, the imaging mechanism is triggered to image at the moment of stepping PW.
When the actual value is larger than the theoretical value and the accumulated error value is larger than PSO, triggering imaging at the PW + PSO moment;
and when the actual value is smaller than the theoretical value and the accumulated error value is less than PSO, triggering imaging at the PW-PSO moment.
After imaging by the imaging mechanism, steps 102 and 103 are repeated for the next spot of the exposed strip until the entire exposure formation of the exposed strip is complete.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention.
Claims (6)
1. A synchronous method of scanning laser direct imaging is characterized in that the method comprises the following steps: determining position error data of a scanning motion mechanism and multiplying power error data of an imaging mechanism, after exposure is started, taking each step of the scanning motion mechanism as a compensation cycle, performing position compensation calculation according to the position error data corresponding to the position of the scanning motion mechanism and the multiplying power error data of the imaging mechanism in the step cycle to obtain an error value, and determining the imaging time of the imaging mechanism according to the magnitude relation between the accumulated error value and an output pulse range.
2. The method according to claim 1, wherein the determining of the position error data of the scanning motion mechanism comprises: and calibrating the whole exposure stroke in sections through a laser interferometer, measuring the difference value between the theoretical value and the actual value of each section of interval, and multiplying the difference value between the theoretical value and the actual value of each section of interval by a first amplification factor to obtain the position error data of the N groups of scanning motion mechanisms.
3. The synchronization method for scanning laser direct imaging according to claim 1 or 2, wherein the determining magnification error data of the imaging mechanism specifically comprises: calibrating the real multiplying power of the imaging mechanism, and determining the difference between the real multiplying power and the theoretical design multiplying power; and multiplying the difference value between the real magnification and the theoretical magnification by a second magnification coefficient to obtain magnification error data of the imaging mechanism.
4. The synchronous method of claim 3, wherein the error value is obtained by performing position compensation calculation according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism in the step period, and specifically comprises: and selecting corresponding position error data according to the index number of the currently exposed strip and the current position of the scanning motion mechanism, and adding the magnification error data of the imaging mechanism to obtain an error value.
5. The synchronous method of claim 4, wherein the determining the imaging time of the imaging mechanism according to the accumulated error value and the size of the output pulse range comprises: when the accumulated error value is larger than or equal to the pulse range output by one scanning motion mechanism, triggering the imaging mechanism to image at the moment of stepping PW +/-signal width PSO; when the accumulated error value is smaller than the output pulse range of one scanning motion mechanism, the imaging mechanism is triggered to image at the moment of stepping PW.
6. The synchronized method of scanning laser direct imaging of claim 5, wherein after imaging by the imaging mechanism, the error value is re-determined for the next location of the exposure stripe and the imaging timing of the imaging mechanism is determined until the entire exposure formation of the exposure stripe is completed.
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| CN201910179959.9A CN111694220B (en) | 2019-03-11 | 2019-03-11 | Synchronous method for scanning type laser direct imaging |
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| CN201910179959.9A CN111694220B (en) | 2019-03-11 | 2019-03-11 | Synchronous method for scanning type laser direct imaging |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5027132A (en) * | 1988-03-25 | 1991-06-25 | Texas Instruments Incorporated | Position compensation of laser scan for stage movement |
| US5917294A (en) * | 1995-08-31 | 1999-06-29 | Canon Kabushiki Kaisha | Synchronization control apparatus and method |
| WO2008139955A1 (en) * | 2007-05-07 | 2008-11-20 | Mejiro Precision, Inc. | Projecting exposure method, alignment method and projecting exposure device |
| CN104516213A (en) * | 2013-09-27 | 2015-04-15 | 佳能株式会社 | Exposure apparatus, exposure method, and device manufacturing method |
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2019
- 2019-03-11 CN CN201910179959.9A patent/CN111694220B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5027132A (en) * | 1988-03-25 | 1991-06-25 | Texas Instruments Incorporated | Position compensation of laser scan for stage movement |
| US5917294A (en) * | 1995-08-31 | 1999-06-29 | Canon Kabushiki Kaisha | Synchronization control apparatus and method |
| WO2008139955A1 (en) * | 2007-05-07 | 2008-11-20 | Mejiro Precision, Inc. | Projecting exposure method, alignment method and projecting exposure device |
| CN104516213A (en) * | 2013-09-27 | 2015-04-15 | 佳能株式会社 | Exposure apparatus, exposure method, and device manufacturing method |
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| CN111694220B (en) | 2022-08-26 |
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