CN111694220A - Synchronous method for scanning type laser direct imaging - Google Patents

Abstract

The invention discloses a synchronizing method for scanning laser direct imaging. The position error data of the scanning motion mechanism and the magnification error data of the imaging mechanism are determined. After exposure is started, each step of the scanning motion mechanism is regarded as a compensation period. In this step period, the position compensation calculation is performed according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism to obtain the error value, and the imaging mechanism of the imaging mechanism is determined according to the relationship between the accumulated error value and the output pulse range. time. The invention adds a variety of influencing factors into the calculation module, and the error data corresponding to each exposure strip is the real error data, the operation is more reasonable, and the result is more accurate; the overall error of each exposure strip can be controlled within a The motion mechanism output pulse range.

Description

A Synchronization Method for Scanning Laser Direct Imaging

technical field

The invention belongs to the technical field of intelligent equipment, and particularly relates to a synchronization method for scanning laser direct imaging.

Background technique

During the scanning process of the laser direct imaging system (LDI), a specific image needs to be displayed at a specific position. Once the position calculation is deviated, the image will be dislocated. Therefore, the scanning motion mechanism and the imaging mechanism need to be synchronously processed; the existing method Both scanning motion strokes share a set of compensation data, which will result in inaccurate position compensation calculation, which in turn affects the imaging position, and has a greater impact on high-speed and high-precision equipment.

SUMMARY OF THE INVENTION

In view of this, the main purpose of the present invention is to provide a synchronization method for scanning laser direct imaging.

In order to achieve the above object, the technical scheme of the present invention is achieved in this way:

An embodiment of the present invention provides a method for synchronizing scanning laser direct imaging. The method includes: determining the position error data of the scanning motion mechanism and the magnification error data of the imaging mechanism; is a compensation cycle, in this step cycle, the position compensation calculation is performed according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism to obtain the error value, and the error value is obtained according to the size relationship between the accumulated error value and the output pulse range. Determine the imaging moment of the imaging mechanism.

In the above scheme, the determining of the position error data of the scanning motion mechanism is specifically: performing segment calibration on the entire exposure stroke by a laser interferometer, measuring the difference between the theoretical value and the actual value of each segment, The difference between the theoretical value and the actual value in the segment interval is multiplied by the first amplification factor to obtain the position error data of the N groups of scanning motion mechanisms.

In the above solution, determining the magnification error data of the imaging mechanism is specifically: calibrating the real magnification of the imaging mechanism, and determining the difference between the real magnification and the theoretical design magnification; The value is multiplied by the second magnification factor to obtain magnification error data of the imaging mechanism.

In the above solution, the error value is obtained by performing position compensation calculation according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism in this step period, specifically: according to the currently exposed strip index number and the current position of the scanning motion mechanism, select the corresponding position error data, and add the magnification error data of the imaging mechanism to obtain the error value.

In the above solution, determining the imaging time of the imaging mechanism according to the size of the accumulated error value and the output pulse range is specifically: when the accumulated error value is greater than or equal to the output pulse range of a scanning motion mechanism, then step PW±signal width PSO Imaging by the imaging mechanism is triggered at all times; when the accumulated error value is less than the output pulse range of a scanning motion mechanism, the imaging mechanism is triggered by stepping PW at the moment.

In the above solution, after imaging by the imaging mechanism, the error value is re-determined for the next position of the exposure strip and the imaging time of the imaging mechanism is determined until the entire exposure formation of the exposure strip is completed.

Compared with the prior art, the present invention adds a variety of influencing factors into the calculation module, and the error data corresponding to each exposure strip is the real error data, the calculation is more reasonable, and the result is more accurate; The overall error of the strip is controlled within the output pulse range of a motion mechanism.

Description of drawings

FIG. 1 is a flowchart of a synchronization method for scanning laser direct imaging according to an embodiment of the present invention.

Detailed ways

In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

An embodiment of the present invention provides a synchronization method for scanning laser direct imaging. As shown in FIG. 1 , the method is implemented by the following steps:

Step 101: Determine the position error data of the scanning motion mechanism and the magnification error data of the imaging mechanism;

Specifically, the laser interferometer is used to perform equidistant segmentation calibration on the entire exposure stroke, measure the difference between the theoretical value and the actual value in each section, and multiply the difference between the theoretical value and the actual value in each section by the The first amplification factor obtains the position error data of N groups of scanning motion mechanisms.

The real magnification of the imaging mechanism is calibrated, and the difference between the real magnification and the theoretical design magnification is determined; the difference between the real magnification and the theoretical magnification is multiplied by the second magnification factor to obtain the magnification error data of the imaging mechanism.

The first amplification factor and the second amplification factor are determined according to the error values of different motion mechanisms to ensure that each issued value is an integer.

Step 102: After the exposure is started, take each step of the scanning motion mechanism as a compensation period, and in this step cycle, perform the position according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism. Compensation calculation to obtain error value;

Specifically, the corresponding position error data is selected according to the currently exposed strip index number and the current position of the scanning motion mechanism, and the error value is obtained by adding the magnification error data of the imaging mechanism.

The position error is calculated and accumulated every time a pso signal is received during operation.

The magnification error of the imaging mechanism is only calculated at the following three moments: PW time (position error accumulation is less than ±PSO), PW+PSO time (position error accumulation is in PSO), or PW-PSO time (position error accumulation is less than -PSO).

Step 103: Determine the imaging time of the imaging mechanism according to the magnitude relationship between the accumulated error value and the output pulse range.

Specifically, when the cumulative error value is greater than or equal to the output pulse range of a scanning motion mechanism, the imaging mechanism is triggered at the moment of stepping PW±signal width PSO; when the cumulative error value is less than the output pulse range of a scanning motion mechanism, the step PW triggers imaging by the imaging mechanism at all times.

When the actual value is greater than the theoretical value, and the accumulated error value is greater than PSO, the imaging is triggered at the moment of PW+PSO;

When the actual value is less than the theoretical value, and the accumulated error value is less than PSO, the imaging is triggered at the time of PW-PSO.

After imaging by the imaging mechanism, steps 102 and 103 are repeated for the next part of the exposure strip until the entire exposure formation of the exposure strip is completed.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention.

Claims (6)

1. a synchronizing method of scanning laser direct imaging, it is characterized in that, this method is: determine the position error data of scanning motion mechanism and the magnification error data of imaging mechanism, after starting exposure, with each step of scanning motion mechanism It is a compensation cycle. In this step cycle, the position compensation calculation is performed according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism to obtain the error value. According to the cumulative error value and the size of the output pulse range The relationship determines the imaging moment of the imaging mechanism. 2. The synchronizing method of scanning laser direct imaging according to claim 1, characterized in that, determining the position error data of the scanning motion mechanism, specifically: performing segment calibration on the entire exposure stroke by a laser interferometer, measuring The difference between the theoretical value and the actual value of each interval is calculated, and the difference between the theoretical value and the actual value of each interval is multiplied by the first amplification factor to obtain the position error data of N groups of scanning motion mechanisms. 3. The synchronizing method for scanning laser direct imaging according to claim 1 or 2, wherein the determining the magnification error data of the imaging mechanism is specifically: calibrating the real magnification of the imaging mechanism, and determining the real magnification and the theoretical Design the difference between the magnifications; multiply the difference between the real magnification and the theoretical magnification by the second magnification factor to obtain the magnification error data of the imaging mechanism. 4 . The synchronization method of scanning laser direct imaging according to claim 3 , wherein the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism in the step cycle are performed. 5 . Perform position compensation calculation to obtain the error value, specifically: select the corresponding position error data according to the currently exposed strip index number and the current position of the scanning motion mechanism, and add the magnification error data of the imaging mechanism to obtain the error value. 5 . The method for synchronizing direct scanning laser imaging according to claim 4 , wherein determining the imaging time of the imaging mechanism according to the cumulative error value and the output pulse range, specifically: when the cumulative error value is greater than or equal to When a scanning motion mechanism outputs the pulse range, the imaging mechanism is triggered at the time of stepping PW±signal width PSO; when the accumulated error value is less than the output pulse range of a scanning motion mechanism, the imaging mechanism is triggered at the stepping PW moment. 6 . The synchronization method of scanning laser direct imaging according to claim 5 , wherein, after the imaging mechanism is imaging, the error value is re-determined for the next position of the exposure strip and the imaging time of the imaging mechanism is determined until the exposure time. 7 . The entire exposure formation of the strips ends.

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