CN111694220A - Synchronous method for scanning type laser direct imaging - Google Patents

Synchronous method for scanning type laser direct imaging Download PDF

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CN111694220A
CN111694220A CN201910179959.9A CN201910179959A CN111694220A CN 111694220 A CN111694220 A CN 111694220A CN 201910179959 A CN201910179959 A CN 201910179959A CN 111694220 A CN111694220 A CN 111694220A
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CN111694220B (en
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蔡志国
谢荣先
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Suzhou Weiying Laser Technology Co ltd
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    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216Mask projection systems
    • G03F7/70358Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
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    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704Scanned exposure beam, e.g. raster-, rotary- and vector scanning
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    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Abstract

本发明公开了一种扫描式激光直接成像的同步方法,确定扫描运动机构的位置误差数据和成像机构的倍率误差数据,在启动曝光后,以扫描运动机构的每个步进为一个补偿周期,在该步骤周期内根据所述扫描运动机构所处位置对应的位置误差数据和成像机构的倍率误差数据进行位置补偿计算获得误差值,根据累计误差值与输出脉冲范围的大小关系确定成像机构的成像时刻。本发明将多种影响因素添加至计算模块中,且每个曝光条带对应的误差数据即为真实的误差数据,运算更合理,结果更准确;能够将每个曝光条带整体误差控制在一个运动机构输出脉冲范围内。

Figure 201910179959

The invention discloses a synchronizing method for scanning laser direct imaging. The position error data of the scanning motion mechanism and the magnification error data of the imaging mechanism are determined. After exposure is started, each step of the scanning motion mechanism is regarded as a compensation period. In this step period, the position compensation calculation is performed according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism to obtain the error value, and the imaging mechanism of the imaging mechanism is determined according to the relationship between the accumulated error value and the output pulse range. time. The invention adds a variety of influencing factors into the calculation module, and the error data corresponding to each exposure strip is the real error data, the operation is more reasonable, and the result is more accurate; the overall error of each exposure strip can be controlled within a The motion mechanism output pulse range.

Figure 201910179959

Description

扫描式激光直接成像的同步方法A Synchronization Method for Scanning Laser Direct Imaging

技术领域technical field

本发明属于智能设备技术领域,具体涉及一种扫描式激光直接成像的同步方法。The invention belongs to the technical field of intelligent equipment, and particularly relates to a synchronization method for scanning laser direct imaging.

背景技术Background technique

激光直接成像系统(LDI)扫描过程中,需在特定的位置显示特定的图像,一旦位置计算有偏差,则会造成图像错位,因此需对扫描运动机构与成像机构作同步处理;现有的方法均为扫描运动行程共用一组补偿数据,这样会造成位置补偿计算的不精确,进而影响到成像的位置,对于高速、高精密设备的影响更大。During the scanning process of the laser direct imaging system (LDI), a specific image needs to be displayed at a specific position. Once the position calculation is deviated, the image will be dislocated. Therefore, the scanning motion mechanism and the imaging mechanism need to be synchronously processed; the existing method Both scanning motion strokes share a set of compensation data, which will result in inaccurate position compensation calculation, which in turn affects the imaging position, and has a greater impact on high-speed and high-precision equipment.

发明内容SUMMARY OF THE INVENTION

有鉴于此,本发明的主要目的在于提供一种扫描式激光直接成像的同步方法。In view of this, the main purpose of the present invention is to provide a synchronization method for scanning laser direct imaging.

为达到上述目的,本发明的技术方案是这样实现的:In order to achieve the above object, the technical scheme of the present invention is achieved in this way:

本发明实施例提供一种扫描式激光直接成像的同步方法,该方法为:确定扫描运动机构的位置误差数据和成像机构的倍率误差数据,在启动曝光后,以扫描运动机构的每个步进为一个补偿周期,在该步骤周期内根据所述扫描运动机构所处位置对应的位置误差数据和成像机构的倍率误差数据进行位置补偿计算获得误差值,根据累计误差值与输出脉冲范围的大小关系确定成像机构的成像时刻。An embodiment of the present invention provides a method for synchronizing scanning laser direct imaging. The method includes: determining the position error data of the scanning motion mechanism and the magnification error data of the imaging mechanism; is a compensation cycle, in this step cycle, the position compensation calculation is performed according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism to obtain the error value, and the error value is obtained according to the size relationship between the accumulated error value and the output pulse range. Determine the imaging moment of the imaging mechanism.

上述方案中,所述确定扫描运动机构的位置误差数据,具体为:通过激光干涉仪对曝光整个行程进行分段标定,测出每段区间的理论值与实际值的差值,将所述每段区间的理论值与实际值的差值乘以第一放大系数获得N组扫描运动机构的位置误差数据。In the above scheme, the determining of the position error data of the scanning motion mechanism is specifically: performing segment calibration on the entire exposure stroke by a laser interferometer, measuring the difference between the theoretical value and the actual value of each segment, The difference between the theoretical value and the actual value in the segment interval is multiplied by the first amplification factor to obtain the position error data of the N groups of scanning motion mechanisms.

上述方案中,所述确定成像机构的倍率误差数据,具体为:标定成像机构的真实倍率,并确定真实倍率和理论设计倍率之间的差值;将所述真实倍率和理论倍率之间的差值乘以第二放大系数获得成像机构的倍率误差数据。In the above solution, determining the magnification error data of the imaging mechanism is specifically: calibrating the real magnification of the imaging mechanism, and determining the difference between the real magnification and the theoretical design magnification; The value is multiplied by the second magnification factor to obtain magnification error data of the imaging mechanism.

上述方案中,所述在该步骤周期内根据所述扫描运动机构所处位置对应的位置误差数据和成像机构的倍率误差数据进行位置补偿计算获得误差值,具体为:根据当前曝光的条带索引号及扫描运动机构当前所处的位置选择相应的位置误差数据,再加上成像机构的倍率误差数据获得误差值。In the above solution, the error value is obtained by performing position compensation calculation according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism in this step period, specifically: according to the currently exposed strip index number and the current position of the scanning motion mechanism, select the corresponding position error data, and add the magnification error data of the imaging mechanism to obtain the error value.

上述方案中,所述根据累计误差值与输出脉冲范围的大小确定成像机构的成像时刻,具体为:当累计误差值大于等于一个扫描运动机构输出脉冲范围时,则在步进PW±信号宽度PSO时刻触发成像机构成像;当累计误差值小于一个扫描运动机构输出脉冲范围时,则步进PW时刻触发成像机构成像。In the above solution, determining the imaging time of the imaging mechanism according to the size of the accumulated error value and the output pulse range is specifically: when the accumulated error value is greater than or equal to the output pulse range of a scanning motion mechanism, then step PW±signal width PSO Imaging by the imaging mechanism is triggered at all times; when the accumulated error value is less than the output pulse range of a scanning motion mechanism, the imaging mechanism is triggered by stepping PW at the moment.

上述方案中,在成像机构成像之后,对曝光条带的下一处重新确定误差值并且确定成像机构的成像时刻,直至曝光条带的整个曝光形成结束。In the above solution, after imaging by the imaging mechanism, the error value is re-determined for the next position of the exposure strip and the imaging time of the imaging mechanism is determined until the entire exposure formation of the exposure strip is completed.

与现有技术相比,本发明将多种影响因素添加至计算模块中,且每个曝光条带对应的误差数据即为真实的误差数据,运算更合理,结果更准确;能够将每个曝光条带整体误差控制在一个运动机构输出脉冲范围内。Compared with the prior art, the present invention adds a variety of influencing factors into the calculation module, and the error data corresponding to each exposure strip is the real error data, the calculation is more reasonable, and the result is more accurate; The overall error of the strip is controlled within the output pulse range of a motion mechanism.

附图说明Description of drawings

图1为本发明实施例提供一种扫描式激光直接成像的同步方法的流程图。FIG. 1 is a flowchart of a synchronization method for scanning laser direct imaging according to an embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

本发明实施例提供一种扫描式激光直接成像的同步方法,如图1所示,该方法通过以下步骤实现:An embodiment of the present invention provides a synchronization method for scanning laser direct imaging. As shown in FIG. 1 , the method is implemented by the following steps:

步骤101:确定扫描运动机构的位置误差数据和成像机构的倍率误差数据;Step 101: Determine the position error data of the scanning motion mechanism and the magnification error data of the imaging mechanism;

具体地,通过激光干涉仪对曝光整个行程进行等距分段标定,测出每段区间的理论值与实际值的差值,将所述每段区间的理论值与实际值的差值乘以第一放大系数获得N组扫描运动机构的位置误差数据。Specifically, the laser interferometer is used to perform equidistant segmentation calibration on the entire exposure stroke, measure the difference between the theoretical value and the actual value in each section, and multiply the difference between the theoretical value and the actual value in each section by the The first amplification factor obtains the position error data of N groups of scanning motion mechanisms.

标定成像机构的真实倍率,并确定真实倍率和理论设计倍率之间的差值;将所述真实倍率和理论倍率之间的差值乘以第二放大系数获得成像机构的倍率误差数据。The real magnification of the imaging mechanism is calibrated, and the difference between the real magnification and the theoretical design magnification is determined; the difference between the real magnification and the theoretical magnification is multiplied by the second magnification factor to obtain the magnification error data of the imaging mechanism.

所述第一放大系数和第二放大系数根据不同运动机构的误差值确定,确保每个下发的值为整数。The first amplification factor and the second amplification factor are determined according to the error values of different motion mechanisms to ensure that each issued value is an integer.

步骤102:在启动曝光后,以扫描运动机构的每个步进为一个补偿周期,在该步骤周期内根据所述扫描运动机构所处位置对应的位置误差数据和成像机构的倍率误差数据进行位置补偿计算获得误差值;Step 102: After the exposure is started, take each step of the scanning motion mechanism as a compensation period, and in this step cycle, perform the position according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism. Compensation calculation to obtain error value;

具体地,根据当前曝光的条带索引号及扫描运动机构当前所处的位置选择相应的位置误差数据,再加上成像机构的倍率误差数据获得误差值。Specifically, the corresponding position error data is selected according to the currently exposed strip index number and the current position of the scanning motion mechanism, and the error value is obtained by adding the magnification error data of the imaging mechanism.

所述位置误差是在运行过程中,每接收到一个pso信号,即计算一次,进行累加。The position error is calculated and accumulated every time a pso signal is received during operation.

成像机构倍率误差仅在以下三个时刻计算:PW时刻(位置误差累加小于±PSO)、PW+PSO时刻(位置误差累加于PSO)、或者PW-PSO时刻(位置误差累加小于-PSO)。The magnification error of the imaging mechanism is only calculated at the following three moments: PW time (position error accumulation is less than ±PSO), PW+PSO time (position error accumulation is in PSO), or PW-PSO time (position error accumulation is less than -PSO).

步骤103,根据累计误差值与输出脉冲范围的大小关系确定成像机构的成像时刻。Step 103: Determine the imaging time of the imaging mechanism according to the magnitude relationship between the accumulated error value and the output pulse range.

具体地,当累计误差值大于等于一个扫描运动机构输出脉冲范围时,则在步进PW±信号宽度PSO时刻触发成像机构成像;当累计误差值小于一个扫描运动机构输出脉冲范围时,则步进PW时刻触发成像机构成像。Specifically, when the cumulative error value is greater than or equal to the output pulse range of a scanning motion mechanism, the imaging mechanism is triggered at the moment of stepping PW±signal width PSO; when the cumulative error value is less than the output pulse range of a scanning motion mechanism, the step PW triggers imaging by the imaging mechanism at all times.

当实际值大于理论值,且累计误差值>PSO时,则在PW+PSO时刻触发成像;When the actual value is greater than the theoretical value, and the accumulated error value is greater than PSO, the imaging is triggered at the moment of PW+PSO;

当实际值小于理论值,且累计误差值<PSO时,则在PW-PSO时刻触发成像。When the actual value is less than the theoretical value, and the accumulated error value is less than PSO, the imaging is triggered at the time of PW-PSO.

在成像机构成像之后,对曝光条带的下一处重复步骤102和103,直至曝光条带的整个曝光形成结束。After imaging by the imaging mechanism, steps 102 and 103 are repeated for the next part of the exposure strip until the entire exposure formation of the exposure strip is completed.

以上所述,仅为本发明的较佳实施例而已,并非用于限定本发明的保护范围。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention.

Claims (6)

1.一种扫描式激光直接成像的同步方法,其特征在于,该方法为:确定扫描运动机构的位置误差数据和成像机构的倍率误差数据,在启动曝光后,以扫描运动机构的每个步进为一个补偿周期,在该步骤周期内根据所述扫描运动机构所处位置对应的位置误差数据和成像机构的倍率误差数据进行位置补偿计算获得误差值,根据累计误差值与输出脉冲范围的大小关系确定成像机构的成像时刻。1. a synchronizing method of scanning laser direct imaging, it is characterized in that, this method is: determine the position error data of scanning motion mechanism and the magnification error data of imaging mechanism, after starting exposure, with each step of scanning motion mechanism It is a compensation cycle. In this step cycle, the position compensation calculation is performed according to the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism to obtain the error value. According to the cumulative error value and the size of the output pulse range The relationship determines the imaging moment of the imaging mechanism. 2.根据权利要求1所述的扫描式激光直接成像的同步方法,其特征在于,所述确定扫描运动机构的位置误差数据,具体为:通过激光干涉仪对曝光整个行程进行分段标定,测出每段区间的理论值与实际值的差值,将所述每段区间的理论值与实际值的差值乘以第一放大系数获得N组扫描运动机构的位置误差数据。2. The synchronizing method of scanning laser direct imaging according to claim 1, characterized in that, determining the position error data of the scanning motion mechanism, specifically: performing segment calibration on the entire exposure stroke by a laser interferometer, measuring The difference between the theoretical value and the actual value of each interval is calculated, and the difference between the theoretical value and the actual value of each interval is multiplied by the first amplification factor to obtain the position error data of N groups of scanning motion mechanisms. 3.根据权利要求1或2所述的扫描式激光直接成像的同步方法,其特征在于,所述确定成像机构的倍率误差数据,具体为:标定成像机构的真实倍率,并确定真实倍率和理论设计倍率之间的差值;将所述真实倍率和理论倍率之间的差值乘以第二放大系数获得成像机构的倍率误差数据。3. The synchronizing method for scanning laser direct imaging according to claim 1 or 2, wherein the determining the magnification error data of the imaging mechanism is specifically: calibrating the real magnification of the imaging mechanism, and determining the real magnification and the theoretical Design the difference between the magnifications; multiply the difference between the real magnification and the theoretical magnification by the second magnification factor to obtain the magnification error data of the imaging mechanism. 4.根据权利要求3所述的扫描式激光直接成像的同步方法,其特征在于,所述在该步骤周期内根据所述扫描运动机构所处位置对应的位置误差数据和成像机构的倍率误差数据进行位置补偿计算获得误差值,具体为:根据当前曝光的条带索引号及扫描运动机构当前所处的位置选择相应的位置误差数据,再加上成像机构的倍率误差数据获得误差值。4 . The synchronization method of scanning laser direct imaging according to claim 3 , wherein the position error data corresponding to the position of the scanning motion mechanism and the magnification error data of the imaging mechanism in the step cycle are performed. 5 . Perform position compensation calculation to obtain the error value, specifically: select the corresponding position error data according to the currently exposed strip index number and the current position of the scanning motion mechanism, and add the magnification error data of the imaging mechanism to obtain the error value. 5.根据权利要求4所述的扫描式激光直接成像的同步方法,其特征在于,所述根据累计误差值与输出脉冲范围的大小确定成像机构的成像时刻,具体为:当累计误差值大于等于一个扫描运动机构输出脉冲范围时,则在步进PW±信号宽度PSO时刻触发成像机构成像;当累计误差值小于一个扫描运动机构输出脉冲范围时,则步进PW时刻触发成像机构成像。5 . The method for synchronizing direct scanning laser imaging according to claim 4 , wherein determining the imaging time of the imaging mechanism according to the cumulative error value and the output pulse range, specifically: when the cumulative error value is greater than or equal to When a scanning motion mechanism outputs the pulse range, the imaging mechanism is triggered at the time of stepping PW±signal width PSO; when the accumulated error value is less than the output pulse range of a scanning motion mechanism, the imaging mechanism is triggered at the stepping PW moment. 6.根据权利要求5所述的扫描式激光直接成像的同步方法,其特征在于,在成像机构成像之后,对曝光条带的下一处重新确定误差值并且确定成像机构的成像时刻,直至曝光条带的整个曝光形成结束。6 . The synchronization method of scanning laser direct imaging according to claim 5 , wherein, after the imaging mechanism is imaging, the error value is re-determined for the next position of the exposure strip and the imaging time of the imaging mechanism is determined until the exposure time. 7 . The entire exposure formation of the strips ends.
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US5027132A (en) * 1988-03-25 1991-06-25 Texas Instruments Incorporated Position compensation of laser scan for stage movement
US5917294A (en) * 1995-08-31 1999-06-29 Canon Kabushiki Kaisha Synchronization control apparatus and method
WO2008139955A1 (en) * 2007-05-07 2008-11-20 Mejiro Precision, Inc. Projecting exposure method, alignment method and projecting exposure device
CN104516213A (en) * 2013-09-27 2015-04-15 佳能株式会社 Exposure apparatus, exposure method, and device manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5027132A (en) * 1988-03-25 1991-06-25 Texas Instruments Incorporated Position compensation of laser scan for stage movement
US5917294A (en) * 1995-08-31 1999-06-29 Canon Kabushiki Kaisha Synchronization control apparatus and method
WO2008139955A1 (en) * 2007-05-07 2008-11-20 Mejiro Precision, Inc. Projecting exposure method, alignment method and projecting exposure device
CN104516213A (en) * 2013-09-27 2015-04-15 佳能株式会社 Exposure apparatus, exposure method, and device manufacturing method

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