CN111684341B - 用于形成三维光场分布的光学器件 - Google Patents

用于形成三维光场分布的光学器件 Download PDF

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Publication number
CN111684341B
CN111684341B CN201980011194.6A CN201980011194A CN111684341B CN 111684341 B CN111684341 B CN 111684341B CN 201980011194 A CN201980011194 A CN 201980011194A CN 111684341 B CN111684341 B CN 111684341B
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China
Prior art keywords
layer
geometry
resonance
pcm
patterned
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CN201980011194.6A
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English (en)
Chinese (zh)
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CN111684341A (zh
Inventor
X·罗滕伯格
K·洛德威克斯
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Svef Co
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Imec
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G02F1/0322—Arrangements comprising two or more independently controlled crystals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22—Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2294—Addressing the hologram to an active spatial light modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/10—Function characteristic plasmon
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/50—Phase-only modulation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/60—Temperature independent
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H2001/0208—Individual components other than the hologram
    • G03H2001/0224—Active addressable light modulator, i.e. Spatial Light Modulator [SLM]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/10—Shape or geometry
    • G03H2225/12—2D SLM
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/30—Modulation
    • G03H2225/32—Phase only

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Holo Graphy (AREA)
CN201980011194.6A 2018-01-31 2019-01-30 用于形成三维光场分布的光学器件 Active CN111684341B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18154494.1A EP3521912B1 (en) 2018-01-31 2018-01-31 An optical device for forming a distribution of a three-dimensional light field
EP18154494.1 2018-01-31
PCT/EP2019/052261 WO2019149758A1 (en) 2018-01-31 2019-01-30 An optical device for forming a distribution of a three-dimensional light field

Publications (2)

Publication Number Publication Date
CN111684341A CN111684341A (zh) 2020-09-18
CN111684341B true CN111684341B (zh) 2024-08-23

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CN201980011194.6A Active CN111684341B (zh) 2018-01-31 2019-01-30 用于形成三维光场分布的光学器件

Country Status (6)

Country Link
US (1) US11506917B2 (enExample)
EP (1) EP3521912B1 (enExample)
JP (1) JP7134242B2 (enExample)
KR (1) KR102693642B1 (enExample)
CN (1) CN111684341B (enExample)
WO (1) WO2019149758A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3770672B1 (en) 2019-07-24 2024-07-10 Imec VZW An optical device for modulating incident light
US12596286B2 (en) 2021-01-28 2026-04-07 Fujikura Ltd. Optical phase modulator, optical device, and optical computing device
GB202114302D0 (en) * 2021-10-06 2021-11-17 Bodle Tech Ltd Display device and projection device
CN115016150B (zh) * 2022-06-14 2026-03-03 深圳迈塔兰斯科技有限公司 一种像素结构、超表面及控制像素结构的方法
CN116449629B (zh) * 2023-04-21 2026-04-03 华中科技大学 一种像素结构及其显示驱动方法
FR3149231A1 (fr) 2023-05-31 2024-12-06 Université D’Aix-Marseille Empilement de couches dont la teinte, dans le domaine visible, change
EP4566796A1 (en) 2023-12-05 2025-06-11 Imec VZW An apparatus for volumetric forming of an object and a method for controlling volumetric forming of an object

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017138886A1 (en) * 2016-02-11 2017-08-17 Agency For Science, Technology And Research Device and arrangement for controlling an electromagnetic wave, methods of forming and operating the same

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US6552842B2 (en) 2001-04-13 2003-04-22 Ut-Battelle, Llc Reflective coherent spatial light modulator
US6859304B2 (en) 2002-08-09 2005-02-22 Energy Conversion Devices, Inc. Photonic crystals and devices having tunability and switchability
KR100751351B1 (ko) 2005-12-01 2007-08-22 삼성에스디아이 주식회사 광 제어 구조 및 이를 구비한 디스플레이 장치
EP2084583A1 (en) * 2006-10-26 2009-08-05 SeeReal Technologies S.A. Compact holographic display device
JP5209727B2 (ja) 2007-10-19 2013-06-12 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 一体型光起電力デバイスを有するディスプレイ
US8558213B2 (en) * 2008-04-01 2013-10-15 Nxp B.V. Vertical phase change memory cell
US8259381B2 (en) 2009-06-05 2012-09-04 Exelis Inc. Phase-change materials and optical limiting devices utilizing phase-change materials
US8958141B1 (en) * 2012-09-10 2015-02-17 Robert G. Brown Ultra-broadband, plasmonic, high-refractive index materials, UBHRI-GRIN-lenses-and other optical components
KR102176583B1 (ko) * 2013-12-09 2020-11-09 삼성전자주식회사 홀로그래피 3차원 영상 표시 장치 및 방법
WO2015097468A1 (en) 2013-12-23 2015-07-02 Isis Innovation Limited Display device based on phase-change materials
CN107209301B (zh) 2015-02-05 2019-10-11 夏普株式会社 固态反射显示器
GB201518371D0 (en) 2015-10-16 2015-12-02 Isis Innovation Optical Device
EP3203309A1 (en) 2016-02-04 2017-08-09 Bodle Technologies Limited Optical device with thermally switching phase change material
US20170261662A1 (en) 2016-03-14 2017-09-14 Electronics And Telecommunications Research Institute Optical device manufacturing method

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
WO2017138886A1 (en) * 2016-02-11 2017-08-17 Agency For Science, Technology And Research Device and arrangement for controlling an electromagnetic wave, methods of forming and operating the same

Also Published As

Publication number Publication date
JP2021512366A (ja) 2021-05-13
JP7134242B2 (ja) 2022-09-09
KR20200116147A (ko) 2020-10-08
EP3521912B1 (en) 2021-10-27
CN111684341A (zh) 2020-09-18
US11506917B2 (en) 2022-11-22
EP3521912A1 (en) 2019-08-07
WO2019149758A1 (en) 2019-08-08
KR102693642B1 (ko) 2024-08-09
US20210033895A1 (en) 2021-02-04

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Effective date of registration: 20250619

Address after: Leuven

Patentee after: Svef Co.

Country or region after: Belgium

Address before: Leuven

Patentee before: IMEC VZW

Country or region before: Belgium