CN111675494A - Single-silver LOW-E coated glass - Google Patents

Single-silver LOW-E coated glass Download PDF

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Publication number
CN111675494A
CN111675494A CN202010501579.5A CN202010501579A CN111675494A CN 111675494 A CN111675494 A CN 111675494A CN 202010501579 A CN202010501579 A CN 202010501579A CN 111675494 A CN111675494 A CN 111675494A
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CN
China
Prior art keywords
film layer
sixny
layer
thickness
coated glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010501579.5A
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Chinese (zh)
Inventor
范宝丰
孙丙合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Building Materials Jiaxing Glass Heilongjiang Co ltd
Original Assignee
China Building Materials Jiaxing Glass Heilongjiang Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Building Materials Jiaxing Glass Heilongjiang Co ltd filed Critical China Building Materials Jiaxing Glass Heilongjiang Co ltd
Priority to CN202010501579.5A priority Critical patent/CN111675494A/en
Publication of CN111675494A publication Critical patent/CN111675494A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3639Multilayers containing at least two functional metal layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3649Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/22ZrO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/23Mixtures
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/28Other inorganic materials
    • C03C2217/281Nitrides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • C03C2218/156Deposition methods from the vapour phase by sputtering by magnetron sputtering

Abstract

The invention discloses single-silver LOW-E coated glass which comprises a glass substrate, wherein a SixNy base film layer, a first AZO film layer, a first NiCr barrier layer, an Ag layer, a second NiCr barrier layer, a second AZO film layer, a second SixNy film layer and a ZrOx top film layer are sequentially arranged on the upper surface of the glass substrate from bottom to top, and the SixNy base film layer and the second SixNy film layer are Si3N4 dielectric layers. The single-silver LOW-E coated glass provided by the invention utilizes SixNy as a base film layer and ZrOx as a top film layer, so that the film layers have better cohesiveness and better mechanical strength, and meanwhile, the light transmittance of the glass is improved by AZO, the transmittance of the glass is more than or equal to 50%, the radiance is less than or equal to 0.10, the reflectivity is less than or equal to 20, the shading coefficient SC is more than or equal to 0.5, and the optical performance is good.

Description

Single-silver LOW-E coated glass
Technical Field
The invention relates to the field of coated glass, in particular to single-silver LOW-E coated glass.
Background
The LOW-E glass is high-end LOW-emissivity glass with a single-silver LOW-E coated glass, and is a film system product formed by coating multiple layers of metal and other compounds including a silver layer on the surface of a glass substrate. However, the film layer of the existing LOW-E glass has poor adhesive force and poor mechanical strength, and quality defects such as film stripping, oxidation, white spots and the like easily occur. Meanwhile, NiCr film layers are used as barrier layers between the upper surface and the lower surface of the Ag layer, and the film layers with low light transmittance are not transparent enough.
An effective solution to the problems in the related art has not been proposed yet.
Disclosure of Invention
The invention aims to provide LOW-E coated glass with good cohesiveness, good mechanical strength and high light transmittance.
In order to achieve the purpose, the invention provides the following technical scheme: the single-silver LOW-E coated glass comprises a glass substrate, wherein a SixNy base film layer, a first AZO film layer, a first NiCr barrier layer, an Ag layer, a second NiCr barrier layer, a second AZO film layer, a second SixNy film layer and a ZrOx top film layer are sequentially arranged on the upper surface of the glass substrate from bottom to top.
Furthermore, the thickness of the SixNy-based film layer is 15-25 nm, and the thickness of the second SixNy film layer is 10-25 nm.
Furthermore, the thickness of the first AZO film layer is 15-25 nm, and the thickness of the second AZO film layer is 10-20 nm.
Furthermore, the thickness of the first NiCr barrier layer is 1-5 nm, and the thickness of the second NiCr barrier layer is 1-5 nm.
Furthermore, the thickness of the ZrOx top film layer is 10-15 nm.
Further, the SixNy base film layer and the second SixNy film layer are Si3N4 dielectric layers.
Furthermore, the thickness of the Ag layer is 7-10 nm.
Compared with the prior art, the invention has the following beneficial effects:
(1) the single-silver LOW-E coated glass provided by the invention utilizes SixNy as a base film layer and ZrOx as a top film layer, so that the film layers have better cohesiveness and better mechanical strength, and meanwhile, the light transmittance of the glass is improved by AZO, the transmittance of the glass is more than or equal to 50%, the radiance is less than or equal to 0.10, the reflectivity is less than or equal to 20, the shading coefficient SC is more than or equal to 0.5, and the optical performance is good.
Detailed Description
The invention will be further described with reference to specific embodiments:
the single-silver LOW-E coated glass comprises a glass substrate, wherein a SixNy base film layer, a first AZO film layer, a first NiCr barrier layer, an Ag layer, a second NiCr barrier layer, a second AZO film layer, a second SixNy film layer and a ZrOx top film layer are sequentially arranged on the upper surface of the glass substrate from bottom to top.
According to the scheme of the embodiment, the thickness of the SixNy-based film layer is 15-25 nm. The sputtering target is prepared by adopting a magnetron sputtering coating process, using an alternating current medium frequency power supply, argon as sputtering gas and nitrogen as reaction gas to sputter a silicon-aluminum target (the mass percentage of silicon to aluminum is 92:8), wherein the argon-nitrogen ratio is (400 SCCM-520 SCCM): (600 SCCM-750 SCCM), the argon-nitrogen ratio is the core of the film layer, and the quality of the film is determined.
According to the scheme of the embodiment, the thickness of the first AZO film layer 3 is 15-25 nm. The ceramic AZO sputtering coating is prepared by adopting a magnetron sputtering coating process and shooting a ceramic AZO target by using an alternating current medium-frequency power supply, argon as a sputtering gas and oxygen as a reaction gas, wherein the argon-oxygen ratio is (800 SCCM-1000 SCCM): (50-60 SCCM), the argon-oxygen ratio is the core of the membrane layer.
According to the scheme of the embodiment, the thickness of the first NiCr barrier layer is 1-10 nm. The nickel-chromium alloy sputtering target is prepared by adopting a magnetron sputtering coating process, sputtering nickel-chromium alloy by using a direct-current power supply and using argon as sputtering gas, wherein the gas flow is 500-800 SCCM.
According to the scheme of the embodiment, the thickness of the Ag layer is 8-10 nm. The magnetron sputtering coating process is adopted, a direct-current power supply is used for sputtering a silver target, argon is used as sputtering gas, and the gas flow is 500-650 SCCM.
According to the scheme of the embodiment, the thickness of the second NiCr barrier layer is 1-10 nm. The nickel-chromium alloy sputtering target is prepared by adopting a magnetron sputtering coating process, sputtering nickel-chromium alloy by using a direct-current power supply and using argon as sputtering gas, wherein the gas flow is 500-800 SCCM.
According to the scheme of the embodiment, the thickness of the second AZO film layer is 10-20 nm. The ceramic AZO sputtering coating is prepared by adopting a magnetron sputtering coating process and shooting a ceramic AZO target by using an alternating current medium-frequency power supply, argon as a sputtering gas and oxygen as a reaction gas, wherein the argon-oxygen ratio is (800 SCCM-1000 SCCM): (50-60 SCCM), the argon-oxygen ratio is the core of the membrane layer.
According to the scheme of the embodiment, the thickness of the second SixNy film layer is 10-30 nm. The sputtering target is prepared by adopting a magnetron sputtering coating process, using an alternating current medium frequency power supply, argon as sputtering gas and nitrogen as reaction gas to sputter a silicon-aluminum target (the mass percentage of silicon to aluminum is 92:8), wherein the argon-nitrogen ratio is (400 SCCM-520 SCCM): (600 SCCM-750 SCCM), the argon-nitrogen ratio is the core of the film layer, and the quality of the film is determined.
According to the scheme of the embodiment, the thickness of the ZrOx top film layer 9 is 10-20 nm. The sputtering target is prepared by adopting a magnetron sputtering coating process, using an alternating current medium frequency power supply, argon as sputtering gas and oxygen as reaction gas to sputter a zirconia target, wherein the argon-oxygen ratio is (800 SCCM-1000 SCCM): (30 SCCM-50 SCCM), the argon-oxygen ratio is the core of the film layer, and the quality of the film is determined.
Specifically, the SixNy base film layer and the SixNy film layer 8 are Si3N4 dielectric layers.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that various changes, modifications and substitutions can be made without departing from the spirit and scope of the invention as defined by the appended claims. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. The single-silver LOW-E coated glass is characterized by comprising a glass substrate, wherein a SixNy base film layer, a first AZO film layer, a first NiCr barrier layer, an Ag layer, a second NiCr barrier layer, a second AZO film layer, a second SixNy film layer and a ZrOx top film layer are sequentially arranged on the upper surface of the glass substrate from bottom to top.
2. The single-silver LOW-E coated glass as claimed in claim 1, wherein the thickness of the SixNy-based film layer is 15-25 nm, and the thickness of the second SixNy film layer is 10-25 nm.
3. The single-silver LOW-E coated glass according to claim 1, wherein the thickness of the first AZO film layer is 15-25 nm, and the thickness of the second AZO film layer is 10-20 nm.
4. The single-silver LOW-E coated glass according to claim 1, wherein the thickness of the first NiCr barrier layer is 1-5 nm, and the thickness of the second NiCr barrier layer is 1-5 nm.
5. The single-silver LOW-E coated glass according to claim 1, wherein the thickness of the ZrOx top film layer is 10-15 nm.
6. The single-silver LOW-E coated glass as claimed in claim 1, wherein the SixNy-based film layer and the second SixNy film layer are Si3N4 dielectric layers.
7. The single-silver LOW-E coated glass according to claim 1, wherein the thickness of the Ag layer is 7-10 nm.
CN202010501579.5A 2020-06-04 2020-06-04 Single-silver LOW-E coated glass Pending CN111675494A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010501579.5A CN111675494A (en) 2020-06-04 2020-06-04 Single-silver LOW-E coated glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010501579.5A CN111675494A (en) 2020-06-04 2020-06-04 Single-silver LOW-E coated glass

Publications (1)

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CN111675494A true CN111675494A (en) 2020-09-18

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023158401A1 (en) * 2022-02-17 2023-08-24 Turkiye Sise Ve Cam Fabrikalari Anonim Sirketi Low-e coated glass with intermediate transmittance

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130015677A1 (en) * 2011-07-15 2013-01-17 Centre Luxembourgeois de Recherches pour le Verre et la Ceramique S.A. (C.R.V.C.), Dudelange, Coated article including low-e coating with improved durability and/or methods of making same
CN103879080A (en) * 2012-12-21 2014-06-25 中国南玻集团股份有限公司 Three-silver-layer low-radiation glass and preparation method thereof
CN104275878A (en) * 2014-10-30 2015-01-14 中山市亨立达机械有限公司 Single-silver LOW-E coated glass
CN106495504A (en) * 2016-12-23 2017-03-15 重庆物华天宝镀膜科技有限公司 It is not likely to produce the Low emissivity list silver coating glass of cut

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130015677A1 (en) * 2011-07-15 2013-01-17 Centre Luxembourgeois de Recherches pour le Verre et la Ceramique S.A. (C.R.V.C.), Dudelange, Coated article including low-e coating with improved durability and/or methods of making same
CN103879080A (en) * 2012-12-21 2014-06-25 中国南玻集团股份有限公司 Three-silver-layer low-radiation glass and preparation method thereof
CN104275878A (en) * 2014-10-30 2015-01-14 中山市亨立达机械有限公司 Single-silver LOW-E coated glass
CN106495504A (en) * 2016-12-23 2017-03-15 重庆物华天宝镀膜科技有限公司 It is not likely to produce the Low emissivity list silver coating glass of cut

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
白振中 等: "《工程玻璃深加工技术手册》" *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023158401A1 (en) * 2022-02-17 2023-08-24 Turkiye Sise Ve Cam Fabrikalari Anonim Sirketi Low-e coated glass with intermediate transmittance

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Application publication date: 20200918