CN111645031A - Photoresist nozzle replacing device - Google Patents
Photoresist nozzle replacing device Download PDFInfo
- Publication number
- CN111645031A CN111645031A CN202010465029.2A CN202010465029A CN111645031A CN 111645031 A CN111645031 A CN 111645031A CN 202010465029 A CN202010465029 A CN 202010465029A CN 111645031 A CN111645031 A CN 111645031A
- Authority
- CN
- China
- Prior art keywords
- shaft sleeve
- embedded
- ratchet wheel
- rotation ratchet
- pawl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B27/00—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for
- B25B27/14—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for for assembling objects other than by press fit or detaching same
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The application relates to the technical field of semiconductor manufacturing, in particular to a photoresist nozzle replacing device. The photoresist nozzle replacing device comprises: the shaft sleeve assembly comprises an outer spline shaft sleeve and an inner embedded shaft sleeve which are coaxially arranged, the inner part of the inner embedded shaft sleeve is hollow, and the inner embedded shaft sleeve is embedded in the outer spline shaft sleeve; the embedded shaft sleeve is meshed with the spline outer shaft sleeve in the circumferential direction, and the embedded shaft sleeve can perform telescopic action relative to the spline outer shaft sleeve in the axial direction; the transmission base is arranged at the lower end of the shaft sleeve assembly and is in transmission connection with the lower end of the embedded shaft sleeve, the embedded shaft sleeve is driven to rotate through driving of the embedded shaft sleeve, and therefore the embedded shaft sleeve can be driven to stretch and retract relative to the spline outer shaft sleeve in the axial direction. The application provides a hinder nozzle and change device can solve and need through the problem that manual change photoresistance nozzle is inefficiency among the correlation technique.
Description
Technical Field
The application relates to the technical field of semiconductor manufacturing, in particular to a photoresist nozzle replacing device.
Background
The photoresist nozzle is an important component of the glue spreading and developing equipment for spreading chemicals on the surface of the wafer. After the surface of the wafer is coated with chemicals, the coated chemicals form a uniform pattern layer through high-speed rotation.
In the actual operation process of the gluing and developing equipment, due to the reasons of abnormal light resistance, abnormal nozzles or installation of new-gauge light resistance and the like, the light resistance nozzles need to be replaced.
At present, different models of gluing and developing equipment are matched with specific models of photoresist nozzles, and the photoresist nozzles cannot be used universally. When changing the light resistance nozzle, because do not have the torsion standard, if adopt manual mode, have certain operation risk and efficiency lower.
Disclosure of Invention
The application provides a hinder nozzle and change device can solve and need through the problem that manual change photoresistance nozzle is inefficiency among the correlation technique.
On the one hand, this application provides a device is changed to photoresistance nozzle, the device is changed to photoresistance nozzle includes:
the shaft sleeve assembly comprises an outer spline shaft sleeve and an inner embedded shaft sleeve which are coaxially arranged, the inner embedded shaft sleeve is hollow, and the inner embedded shaft sleeve is embedded in the outer spline shaft sleeve; the embedded shaft sleeve is meshed with the spline outer shaft sleeve in the circumferential direction, and the embedded shaft sleeve can perform telescopic action relative to the spline outer shaft sleeve in the axial direction;
the transmission base is arranged at the lower end of the shaft sleeve assembly and is in transmission connection with the lower end of the embedded shaft sleeve, the embedded shaft sleeve is driven to rotate to drive the spline outer shaft sleeve to rotate, and the embedded shaft sleeve can be pushed to stretch in the axial direction relative to the spline outer shaft sleeve.
Optionally, a plurality of keys and a plurality of key slots are arranged on the inner wall of the spline outer shaft sleeve, and the keys and the key slots are alternately arranged along the circumferential direction of the spline outer shaft sleeve.
Optionally, the spline outer shaft sleeve comprises a connecting part and a transmission part which are connected into a whole;
the connecting part is positioned at the upper end part of the spline outer shaft sleeve;
the transmission part is positioned below the connecting part, a transmission shaft sleeve is coaxially sleeved in the transmission part, and the transmission shaft sleeve is hollow;
the embedded shaft sleeve is embedded in the transmission shaft sleeve, the embedded shaft sleeve is meshed with the transmission shaft sleeve in the circumferential direction, and the embedded shaft sleeve can perform telescopic action relative to the transmission shaft sleeve in the axial direction.
Optionally, the inner surface of the outdrive engages the outer surface of the inner outdrive, and the outer surface of the outdrive engages the inner surface of the splined outer outdrive.
Optionally, the drive mount comprises a drive ratchet assembly, the drive ratchet assembly comprising: a forward rotation ratchet wheel, a reverse rotation ratchet wheel and a driving pawl;
the forward rotation ratchet wheel and the reverse rotation ratchet wheel are coaxially sleeved at the lower end of the embedded shaft sleeve, the forward rotation ratchet wheel can drive the embedded shaft sleeve to rotate in the forward direction along the circumferential direction, and the reverse rotation ratchet wheel can drive the embedded shaft sleeve to rotate in the reverse direction along the circumferential direction;
the driving pawl can drive the forward rotation ratchet wheel to rotate in the forward direction, or the driving pawl can drive the reverse rotation ratchet wheel to rotate in the reverse direction.
Optionally, the cross-sectional shape of the inner surface of the forward rotation ratchet wheel, the cross-sectional shape of the inner surface of the reverse rotation ratchet wheel and the cross-sectional shape of the outer surface of the embedded shaft sleeve are matched and are both polygonal.
Optionally, the transmission base further comprises a base shell, a cavity is formed in the base shell, and the lower end of the embedded shaft sleeve, the forward rotation ratchet wheel and the reverse rotation ratchet wheel are located in the cavity;
the outer wall of the base shell is provided with a pawl groove, the active pawl penetrates through the pawl groove and extends into the cavity, the active pawl can move up and down in the pawl groove, when the active pawl moves to a first position, the active pawl is meshed with the forward rotation ratchet wheel, and when the active pawl moves to a second position, the active pawl is meshed with the reverse rotation ratchet wheel.
Optionally, a plurality of tooth portions and a plurality of groove portions are formed on the wheel surfaces of the forward rotation ratchet wheel and the reverse rotation ratchet wheel, and the tooth portions and the groove portions are alternately arranged along the circumferential direction of the wheel surfaces of the respective ratchet wheels;
the groove part of the forward rotation ratchet wheel is communicated with the groove part of the reverse rotation ratchet wheel, so that the driving pawl can move up and down in the pawl groove.
The technical scheme at least comprises the following advantages: the embedded sleeve shaft can perform telescopic action relative to the spline outer shaft sleeve in the axial direction, and the transmission base can push the embedded sleeve shaft to perform telescopic action relative to the spline outer shaft sleeve in the axial direction, so that the working surface of the shaft sleeve assembly can be changed, and the working surface of the shaft sleeve assembly can be connected with different types of photoresist nozzles; the embedded sleeve shaft is meshed with the spline outer shaft sleeve in the circumferential direction, the transmission base is in transmission connection with the lower end of the embedded shaft sleeve, the embedded shaft sleeve is driven to rotate through driving the embedded shaft sleeve, the spline outer shaft sleeve is driven to rotate, the shaft sleeve assembly can be driven to drive the connected specific type of photoresist nozzle to rotate, and therefore the device can be used for detaching or installing the photoresist nozzle.
Drawings
In order to more clearly illustrate the detailed description of the present application or the technical solutions in the prior art, the drawings needed to be used in the detailed description of the present application or the prior art description will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1a is a schematic view of a photoresist nozzle assembly according to the related art;
FIG. 1b is a schematic view illustrating the disassembly of a photoresist nozzle according to the related art;
FIG. 1c is a schematic view of a first specific type of photoresist nozzle structure in the related art;
FIG. 1d is a schematic view of a second specific type of photoresist nozzle structure in the related art;
FIG. 2 is a schematic view of the embodiment of the present application illustrating the configuration of the embedded bushing when the embedded bushing is extended to a first actuation position;
FIG. 3 is a schematic view of the embodiment of the present application showing the inner sleeve retracted to a second operating position;
FIG. 4 is an enlarged partial schematic view of FIG. 3;
fig. 5 is a schematic structural diagram of a transmission base of a photoresist nozzle replacing device according to an embodiment of the present application.
Detailed Description
The technical solutions in the present application will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; the connection can be mechanical connection or electrical connection; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
In addition, the technical features mentioned in the different embodiments of the present application described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1a and 1b, schematic diagrams of replacing a photoresist nozzle in the related art of the present application are shown. The nozzle 11 of the glue spreading and developing device is provided with a plurality of connecting holes, and the connecting part of the photoresist nozzle 12 is screwed in the connecting holes, so when replacing the photoresist nozzle 12 in the related art, the photoresist nozzle 12 needs to be rotated forwards manually for disassembly, and the photoresist nozzle 12 needs to be rotated backwards manually for installation.
Referring to fig. 1c and 1d, schematic structural diagrams of a photoresist nozzle in the related art of the present application are shown. As shown in fig. 1c, which is a first specific type of photoresist nozzle 121, as shown in fig. 1d, which is a second specific type of photoresist nozzle 122, each of the first specific type of photoresist nozzle 121 and the second specific type of photoresist nozzle 122 includes a connecting portion 13 for connecting the photoresist nozzle replacing device according to the embodiment of the present application, and a screwing portion 14 for screwing a corresponding connecting hole on the head 11 of the paste developing apparatus.
Referring to fig. 2 and fig. 3, they show schematic structural diagrams of a photoresist nozzle replacing device provided in an embodiment of the present application at different operating positions. Wherein, this photoresistance nozzle replacement device includes:
the shaft sleeve assembly 21 comprises a spline outer shaft sleeve 211 and an embedded shaft sleeve 212 which are coaxially arranged, wherein the embedded shaft sleeve 212 is hollow and is embedded in the spline outer shaft sleeve 211; the inner sleeve shaft 212 is engaged with the spline outer sleeve 211 in the circumferential direction, and the inner sleeve shaft 212 can perform a telescopic motion relative to the spline outer sleeve 211 in the axial direction.
The transmission base 22 is arranged at the lower end of the shaft sleeve assembly 21, is in transmission connection with the lower end of the embedded shaft sleeve 212, drives the spline outer shaft sleeve 211 to rotate through the embedded shaft sleeve 212, and can push the embedded shaft sleeve 212 to do telescopic action relative to the spline outer shaft sleeve 211 in the axial direction.
When the boss assembly 21 rotates, the shaft thereof is used as a rotation shaft, and since the spline outer boss 211 and the inner boss 212 are designed to be coaxial, the shaft of the spline outer boss 211 and the shaft of the inner boss 212 are also the shafts of the boss assembly 21. The inner surface of the upper end of the sleeve assembly 21 is the working surface of the sleeve assembly 21, and the shape and structure thereof determine the type of photoresist nozzle to which the sleeve assembly 21 can be connected.
The outer surface of the inner sleeve 212 is engaged with the inner surface of the spline outer sleeve 211 in the circumferential direction of the sleeve assembly 21; the inner hub 212 is movable relative to the splined outer hub 211 in the axial direction of the hub assembly 21.
Since the inner sleeve 212 is movable in the axial direction relative to the spline outer sleeve 211, the shape and structure of the inner surface of the upper end portion of the sleeve assembly 21 are changed in accordance with the movement of the inner sleeve 212.
The inner sleeve 212 is extendable to a first operating position and retractable to a second operating position when it is axially extended or retracted relative to the spline outer sleeve 211.
As shown in fig. 2, when the inner sleeve 212 extends to the first action position, the inner surface of the upper end of the inner sleeve 212 is a working surface of the sleeve assembly 21; the configuration of the inner surface of the upper end of the inner sleeve 212 determines that the sleeve assembly 21 may be connected to a first particular type of photoresist nozzle, and optionally, the inner surface of the inner sleeve 212 may have a regular pentagonal or other polygonal cross-section.
As shown in fig. 3, when the inner sleeve 212 is retracted to the second operating position, the inner surface of the upper end of the splined outer sleeve 211 is the working surface of the sleeve assembly 21; the shape and structure of the inner surface of the upper end of the splined outer hub 211 determines that the hub assembly 21 can be connected to a second specific type of photoresist nozzle, and optionally, the inner wall of the splined outer hub 211 is provided with a plurality of keys and a plurality of key slots, which are alternately arranged along the circumference of the splined outer hub.
In conclusion, the inner sleeve shaft can perform telescopic action relative to the spline outer sleeve in the axial direction, and the transmission base can push the inner sleeve shaft to perform telescopic action relative to the spline outer sleeve in the axial direction, so that the working surface of the shaft sleeve assembly can be changed, and the working surface of the shaft sleeve assembly can be connected with different types of photoresist nozzles; the embedded sleeve shaft is meshed with the spline outer shaft sleeve in the circumferential direction, the transmission base is in transmission connection with the lower end of the embedded shaft sleeve, the embedded shaft sleeve is driven to rotate through driving the embedded shaft sleeve, the spline outer shaft sleeve is driven to rotate, the shaft sleeve assembly can be driven to drive the connected specific type of photoresist nozzle to rotate, and therefore the device can be used for detaching or installing the photoresist nozzle.
As shown in fig. 4, which is a partially enlarged structural diagram of fig. 3. The spline outer shaft sleeve 211 comprises a connecting part 2111 and a transmission part 2112 which are connected into a whole; the connecting portion 2111 is located at the upper end portion of the spline outer sleeve 211; the transmission portion 2112 is positioned below the connection portion 2111, a driving sleeve 213 is coaxially sleeved in the transmission portion 2111, and the driving sleeve 213 is hollow inside; the inner sleeve 212 is fitted into the driving sleeve 213, and the inner sleeve 212 engages with the driving sleeve 213 in the circumferential direction, so that the inner sleeve 212 can extend and contract relative to the driving sleeve 213 in the axial direction. The inner surface of the outdrive 213 engages the outer surface of the inner outdrive 212 and the outer surface of the outdrive 213 engages the inner surface of the splined outer hub 211. Alternatively, the cross-sectional shape of the outer surface of the inset sleeve 212 is pentagonal or other polygonal shape.
When the transmission base drives the embedded shaft sleeve to rotate, the outer surface of the embedded shaft sleeve is meshed with the inner surface of the transmission shaft sleeve, so that the transmission shaft sleeve is driven to rotate by rotation of the embedded shaft sleeve, and the outer surface of the transmission shaft sleeve is meshed with the inner surface of the spline outer shaft sleeve, so that the rotation of the transmission shaft sleeve drives the spline outer shaft sleeve to rotate.
Referring to fig. 5, a schematic structural diagram of a transmission base of a photoresist nozzle replacing device according to an embodiment of the present application is shown. The drive mount 22 includes a drive ratchet assembly that includes: a forward rotation ratchet wheel 221, a reverse rotation ratchet wheel 222, and a driving pawl 223.
The forward rotation ratchet wheel 221 and the reverse rotation ratchet wheel 222 are coaxially sleeved at the lower end of the inner nested tube 212, and the driving pawl 223 can drive the forward rotation ratchet wheel 221 to rotate forward, so that the inner nested tube 212 is driven to rotate forward; or the driving pawl 223 can drive the reverse ratchet wheel 222 to rotate reversely, so as to drive the inner nested tube 212 to rotate reversely.
Optionally, the shape of the inner surface of the forward rotation ratchet wheel and the shape of the inner surface of the reverse rotation ratchet wheel are matched with the shape of the outer surface of the inner nesting pipe, namely the cross sections of the inner surface and the reverse rotation ratchet wheel are both pentagonal or other polygons, so that transmission can be achieved between the ratchet wheels and the inner nesting pipe.
The transmission base is in transmission connection with the lower end of the embedded shaft sleeve through the matching action of the forward rotation ratchet wheel, the reverse rotation ratchet wheel and the driving pawl, the embedded shaft sleeve is driven to rotate through driving the embedded shaft sleeve, so that the spline outer shaft sleeve is driven to rotate, the shaft sleeve assembly can drive the connected specific type of photoresist nozzle to rotate, and the photoresist nozzle is detached or installed through the device.
As shown in fig. 5, the transmission base further includes a base housing 224, the base housing 224 is hollow to form a cavity, and the lower end of the embedded shaft sleeve 212, the forward rotation ratchet 221 and the reverse rotation ratchet 222 are located in the cavity; a pawl slot 2241 is formed in an outer wall of the base housing 224, the active pawl 223 penetrates through the pawl slot 2241 and extends into the cavity, the active pawl 223 can move up and down in the pawl slot 2241, when the active pawl moves to the first position, the active pawl 223 is engaged with the forward rotation ratchet wheel 221, and when the active pawl 223 moves to the second position, the active pawl 223 is engaged with the reverse rotation ratchet wheel 222.
The base housing 224 is fixedly connected to the lower end of the embedded shaft sleeve 212, so that the base housing 224 can be driven to extend and retract when the base housing 224 is pushed up and down.
When the driving pawl 223 is engaged with the forward rotation ratchet wheel 221, the driving pawl 223 can push the forward rotation ratchet wheel 221 to rotate forward, so as to drive the inner nested tube 212 to rotate forward; when the driving pawl 223 engages with the reverse ratchet wheel 222, the reverse ratchet wheel 222 drives the reverse ratchet wheel 222 to rotate reversely, so as to drive the inner nested tube 212 to rotate reversely.
The wheel surfaces of the forward rotation ratchet wheel 221 and the reverse rotation ratchet wheel 222 are respectively provided with a plurality of tooth parts and a plurality of groove parts, and the tooth parts and the groove parts are alternately arranged along the circumferential direction of the respective ratchet wheel surfaces;
in order to enable the active pawl 223 to move up and down in this pawl groove 2241 so as to respectively engage with the normal rotation ratchet wheel 221 and the reverse rotation ratchet wheel 222 at different positions, respectively, and therefore the groove portion of the normal rotation ratchet wheel 221 and the groove portion of the reverse rotation ratchet wheel 222 communicate, alternatively, the respective groove portions thereof may be made to communicate by adjusting the rotation stop position of the normal rotation ratchet wheel or the reverse rotation ratchet wheel.
The working mode of the embodiment of the application comprises the following steps: installing a first specific type of photoresist nozzle, removing the first specific type of photoresist nozzle, installing a second specific type of photoresist nozzle, and removing the second specific type of photoresist nozzle.
When a first specific type of photoresist nozzle is installed, the transmission base is pushed upwards firstly, so that the transmission base pushes the embedded shaft sleeve to extend to a first action position, and the working surface of the shaft sleeve assembly is the inner surface of the upper end part of the embedded shaft sleeve; then fixing a first specific type of photoresist nozzle on the inner surface of the upper end part of the embedded shaft sleeve; then the active pawl moves to a first position in the pawl groove, the active pawl is meshed with the groove part of the forward rotation ratchet wheel, the active pawl drives the forward rotation ratchet wheel to rotate forward, the forward rotation of the forward rotation ratchet wheel drives the embedded shaft sleeve to rotate forward, the forward rotation of the embedded shaft sleeve drives the photoresist nozzles of the first specific type to rotate forward, and then the photoresist nozzles of the first specific type can be screwed into the connecting hole of the spray head of the gluing and developing equipment, and the installation of the photoresist nozzles of the first specific type can be realized.
When the photoresist nozzle of the first specific type is disassembled, the working surface of the shaft sleeve component is the inner surface of the upper end part of the embedded shaft sleeve; then fixing a first specific type of photoresist nozzle on the inner surface of the upper end part of the embedded shaft sleeve; then the active pawl moves to a second position in the pawl groove, the active pawl is meshed with the groove part of the reverse ratchet wheel, the active pawl drives the reverse ratchet wheel to rotate reversely, the reverse rotation of the forward ratchet wheel drives the embedded shaft sleeve to rotate reversely, the reverse rotation of the embedded shaft sleeve drives the photoresist nozzle of the first specific type to rotate reversely, and then the photoresist nozzle of the first specific type can be screwed out of the connecting hole of the spray head of the gluing and developing equipment, and the photoresist nozzle of the first specific type can be dismounted.
When a second specific type of photoresist nozzle is installed, the transmission base is pushed downwards firstly, so that the transmission base pushes the embedded shaft sleeve to retract to a second action position, and the working surface of the shaft sleeve assembly is the inner surface of the upper end part of the spline outer shaft sleeve; fixing a second specific type of photoresist nozzle on the inner surface of the upper end part of the spline outer sleeve; then the active pawl moves to a first position in the pawl groove, the active pawl is meshed with the groove part of the forward rotation ratchet wheel, the active pawl drives the forward rotation ratchet wheel to rotate forward, the forward rotation of the forward rotation ratchet wheel drives the embedded shaft sleeve to rotate forward, the forward rotation of the embedded shaft sleeve drives the photoresist nozzles of the second specific type to rotate forward, and then the photoresist nozzles of the second specific type can be screwed into the connecting hole of the spray head of the gluing and developing equipment, and the installation of the photoresist nozzles of the second specific type can be realized.
When the photoresist nozzle of the second specific type is disassembled, the working surface of the shaft sleeve assembly is the inner surface of the upper end part of the spline outer shaft sleeve; fixing a second specific type of photoresist nozzle on the inner surface of the upper end part of the spline outer sleeve; then the active pawl moves to a second position in the pawl groove, the active pawl is meshed with the groove part of the reverse rotation ratchet wheel, the active pawl drives the reverse rotation ratchet wheel to rotate reversely, the reverse rotation of the forward rotation ratchet wheel drives the embedded shaft sleeve to rotate reversely, the reverse rotation of the embedded shaft sleeve drives the photoresist nozzle of a second specific type to rotate reversely, and then the photoresist nozzle of the second specific type can be screwed out of the connecting hole of the spray head of the gluing and developing equipment, and the photoresist nozzle of the second specific type can be dismounted.
In conclusion, the inner sleeve shaft can perform telescopic action relative to the spline outer sleeve in the axial direction, and the transmission base can push the inner sleeve shaft to perform telescopic action relative to the spline outer sleeve in the axial direction, so that the working surface of the shaft sleeve assembly can be changed, and the working surface of the shaft sleeve assembly can be connected with different types of photoresist nozzles; the embedded sleeve shaft is meshed with the spline outer shaft sleeve in the circumferential direction, the transmission base is in transmission connection with the lower end of the embedded shaft sleeve, the embedded shaft sleeve is driven to rotate through driving the embedded shaft sleeve, the spline outer shaft sleeve is driven to rotate, the shaft sleeve assembly can be driven to drive the connected specific type of photoresist nozzle to rotate, and therefore the device can be used for detaching or installing the photoresist nozzle. The photoresist nozzle replacing device provided by the embodiment of the application can provide conditions for setting the torque standard by controlling the rotation of the ratchet wheel.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (8)
1. A photoresist nozzle replacing device, comprising:
the shaft sleeve assembly comprises an outer spline shaft sleeve and an inner embedded shaft sleeve which are coaxially arranged, the inner embedded shaft sleeve is hollow, and the inner embedded shaft sleeve is embedded in the outer spline shaft sleeve; the embedded shaft sleeve is meshed with the spline outer shaft sleeve in the circumferential direction, and the embedded shaft sleeve can perform telescopic action relative to the spline outer shaft sleeve in the axial direction;
the transmission base is arranged at the lower end of the shaft sleeve assembly and is in transmission connection with the lower end of the embedded shaft sleeve, the embedded shaft sleeve is driven to rotate to drive the spline outer shaft sleeve to rotate, and the embedded shaft sleeve can be pushed to stretch in the axial direction relative to the spline outer shaft sleeve.
2. The photoresist nozzle changer of claim 1, wherein a plurality of keys and key grooves are provided on an inner wall of the spline outer sleeve, the keys and key grooves being alternately arranged in a circumferential direction of the spline outer sleeve.
3. The photoresist nozzle changer of claim 1, wherein the splined outer hub comprises a connecting portion and a transmission portion integrally connected;
the connecting part is positioned at the upper end part of the spline outer shaft sleeve;
the transmission part is positioned below the connecting part, a transmission shaft sleeve is coaxially sleeved in the transmission part, and the transmission shaft sleeve is hollow;
the embedded shaft sleeve is embedded in the transmission shaft sleeve, the embedded shaft sleeve is meshed with the transmission shaft sleeve in the circumferential direction, and the embedded shaft sleeve can perform telescopic action relative to the transmission shaft sleeve in the axial direction.
4. The photoresist nozzle replacing device according to claim 3,
the inner surface of the driving shaft sleeve is meshed with the outer surface of the embedded shaft sleeve, and the outer surface of the driving shaft sleeve is meshed with the inner surface of the spline outer shaft sleeve.
5. The photoresist nozzle replacement device of claim 1, wherein the drive base includes a drive ratchet assembly, the drive ratchet assembly comprising: a forward rotation ratchet wheel, a reverse rotation ratchet wheel and a driving pawl;
the forward rotation ratchet wheel and the reverse rotation ratchet wheel are coaxially sleeved at the lower end of the embedded shaft sleeve, the forward rotation ratchet wheel can drive the embedded shaft sleeve to rotate in the forward direction along the circumferential direction, and the reverse rotation ratchet wheel can drive the embedded shaft sleeve to rotate in the reverse direction along the circumferential direction;
the driving pawl can drive the forward rotation ratchet wheel to rotate in the forward direction, or the driving pawl can drive the reverse rotation ratchet wheel to rotate in the reverse direction.
6. The photoresist nozzle replacing device according to claim 5, wherein the cross-sectional shape of the inner surface of the forward rotation ratchet, the cross-sectional shape of the inner surface of the reverse rotation ratchet, and the cross-sectional shape of the outer surface of the embedded bushing are matched and are all polygonal.
7. The photoresist nozzle replacing device according to claim 5, wherein the transmission base further comprises a base shell, a cavity is formed in the base shell, and the lower end of the embedded shaft sleeve, the forward rotation ratchet wheel and the reverse rotation ratchet wheel are positioned in the cavity;
the outer wall of the base shell is provided with a pawl groove, the active pawl penetrates through the pawl groove and extends into the cavity, the active pawl can move up and down in the pawl groove, when the active pawl moves to a first position, the active pawl is meshed with the forward rotation ratchet wheel, and when the active pawl moves to a second position, the active pawl is meshed with the reverse rotation ratchet wheel.
8. The photoresist nozzle replacing device according to claim 7, wherein a plurality of tooth portions and a plurality of groove portions are formed on the wheel surfaces of the forward rotation ratchet wheel and the reverse rotation ratchet wheel, and the tooth portions and the groove portions are alternately arranged along the circumferential direction of the respective ratchet wheel surfaces;
the groove part of the forward rotation ratchet wheel is communicated with the groove part of the reverse rotation ratchet wheel, so that the driving pawl can move up and down in the pawl groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010465029.2A CN111645031B (en) | 2020-05-28 | 2020-05-28 | Photoresist nozzle replacing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010465029.2A CN111645031B (en) | 2020-05-28 | 2020-05-28 | Photoresist nozzle replacing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111645031A true CN111645031A (en) | 2020-09-11 |
| CN111645031B CN111645031B (en) | 2022-04-05 |
Family
ID=72349555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010465029.2A Active CN111645031B (en) | 2020-05-28 | 2020-05-28 | Photoresist nozzle replacing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111645031B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2329859A (en) * | 1997-10-03 | 1999-04-07 | David Anthony Tyers | Universal wrench |
| WO2007119883A1 (en) * | 2006-04-18 | 2007-10-25 | Young Gu Kim | Multistage bolt socket |
| CN202399202U (en) * | 2011-12-06 | 2012-08-29 | 四川什邡东润制造有限公司 | Disassembling tool special for high pressure nozzle |
| CN202572317U (en) * | 2012-05-30 | 2012-12-05 | 河南省煤气（集团）有限责任公司 | Special tool for probe of disassembly machine unit |
| CN202716188U (en) * | 2012-07-23 | 2013-02-06 | 王建国 | Outer hexagonal sleeve wrench and inner hexagonal sleeve wrench |
| CN209007482U (en) * | 2018-11-07 | 2019-06-21 | 内蒙古光能科技有限公司 | Reducing externally threaded item mounting or dismounting tools |
| CN209551586U (en) * | 2019-01-18 | 2019-10-29 | 卞洪丽 | A kind of Portable valve maintenance tool |
-
2020
- 2020-05-28 CN CN202010465029.2A patent/CN111645031B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2329859A (en) * | 1997-10-03 | 1999-04-07 | David Anthony Tyers | Universal wrench |
| WO2007119883A1 (en) * | 2006-04-18 | 2007-10-25 | Young Gu Kim | Multistage bolt socket |
| CN202399202U (en) * | 2011-12-06 | 2012-08-29 | 四川什邡东润制造有限公司 | Disassembling tool special for high pressure nozzle |
| CN202572317U (en) * | 2012-05-30 | 2012-12-05 | 河南省煤气（集团）有限责任公司 | Special tool for probe of disassembly machine unit |
| CN202716188U (en) * | 2012-07-23 | 2013-02-06 | 王建国 | Outer hexagonal sleeve wrench and inner hexagonal sleeve wrench |
| CN209007482U (en) * | 2018-11-07 | 2019-06-21 | 内蒙古光能科技有限公司 | Reducing externally threaded item mounting or dismounting tools |
| CN209551586U (en) * | 2019-01-18 | 2019-10-29 | 卞洪丽 | A kind of Portable valve maintenance tool |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111645031B (en) | 2022-04-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111645031B (en) | Photoresist nozzle replacing device | |
| EP3904274B1 (en) | Lifting column | |
| ITMI20070492A1 (en) | ADAPTABLE TUBULAR ELECTRIC MOTOR ASSEMBLY FOR ROLLING SHUTTERS SUCH AS SHUTTERS AND THE LIKE. | |
| CN105089482A (en) | Spring system for roller blinds | |
| CN108991727B (en) | Lifting device of lifting table | |
| CA2765231A1 (en) | Progressing cavity pump/motor | |
| JP2007291848A (en) | Coupling device | |
| JP5469067B2 (en) | Apparatus for rotating and supporting a winding tube and home automation equipment comprising said apparatus | |
| CN106402003B (en) | Lifting assembly for fan and tower fan with lifting assembly | |
| KR20190086790A (en) | Peristaltic pump | |
| CN113120782A (en) | Fly jib, crane, fly jib deployment method, and fly jib retraction method | |
| TW202212245A (en) | Linkage type lifting mast and its system | |
| CN218082463U (en) | Left-hand bolt nut installer | |
| CN113651193B (en) | Method for disassembling and assembling agricultural film winding drum and driving shaft | |
| CN109678068B (en) | Plug pin mechanism capable of being remotely operated and supporting leg device | |
| CN215485898U (en) | Rotary positioning sleeve and rock drill | |
| CN209003059U (en) | A kind of transmission bar assembly in the lifting device of same table | |
| CN219544068U (en) | Polyurethane wheelset equipment | |
| CN114207233A (en) | Supporting structure | |
| CN219157990U (en) | Assembled steel constructs connected node device | |
| US11602861B1 (en) | Modular telescopic rotation arm by motor control | |
| WO2020015743A1 (en) | Linear actuation structure | |
| CN219406777U (en) | Anti-collision mechanism for vehicle rotating handle | |
| KR20070078947A (en) | Movable ladder for hand control | |
| CN217031404U (en) | Humidifying component for air conditioner and air conditioner with humidifying component |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |